TWI549907B - Graphite film and manufacturing method thereof - Google Patents

Graphite film and manufacturing method thereof Download PDF

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TWI549907B
TWI549907B TW104114441A TW104114441A TWI549907B TW I549907 B TWI549907 B TW I549907B TW 104114441 A TW104114441 A TW 104114441A TW 104114441 A TW104114441 A TW 104114441A TW I549907 B TWI549907 B TW I549907B
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carbon material
film
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mixed
carbon
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TW201639782A (en
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孫德崢
許艷惠
陳啓盛
李國維
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達勝科技股份有限公司
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石墨膜及石墨膜之製造方法 Graphite film and method for producing graphite film

本發明是關於一種石墨膜及其製造方法,特別是關於一種平坦無破損的石墨膜及其製造方法。 The present invention relates to a graphite film and a method of manufacturing the same, and more particularly to a flat, non-destructive graphite film and a method of manufacturing the same.

石墨膜是一種具有高熱傳導性的高分子材料,作為半導體元件及發熱元件的重要材料而普遍的被使用在電子電路設備中。舉例來說,業界在製造印刷電路板時使用石墨膜作為材料,協助傳導及排除電路板在使用時所產生的熱量。由於印刷電路板是現在各式電子產品中的重要元件,因此,石墨膜已成為製造各式電子產品時不可或缺的材料。 The graphite film is a polymer material having high thermal conductivity and is commonly used in electronic circuit devices as an important material for semiconductor elements and heat generating elements. For example, the industry uses graphite films as materials in the manufacture of printed circuit boards to help conduct and eliminate the heat generated by the boards during use. Since printed circuit boards are an important component in various electronic products, graphite films have become an indispensable material in the manufacture of various electronic products.

然而,在製備石墨膜時,薄膜極易因加熱而發生體積收縮。如此一來,製得的石墨膜成品表面分布有大小不一的皺褶。表面不平整的石墨膜在使用上存在有無法充分貼合於電子電路元件表面,進而造成散熱效果不佳的問題。 However, in the preparation of a graphite film, the film is extremely susceptible to volume shrinkage due to heating. In this way, the surface of the finished graphite film is distributed with wrinkles of different sizes. The graphite film having an uneven surface has a problem that it cannot be sufficiently adhered to the surface of the electronic circuit component, which causes a poor heat dissipation effect.

因此,如何開發一種石墨膜,以解決先前技術中,石墨膜表面於製備過程中產生皺摺的問題,就成為了研究人員需要解決的問題。 Therefore, how to develop a graphite film to solve the problem of wrinkles in the surface of the graphite film in the prior art in the prior art has become a problem that researchers need to solve.

鑒於以上的問題,本發明是關於一種石墨膜及其製 造方法,藉以解決先前技術中石墨膜表面破損及不平坦的問題。 In view of the above problems, the present invention relates to a graphite film and its preparation The method is to solve the problem of surface damage and unevenness of the graphite film in the prior art.

本發明揭露一種石墨膜的製造方法。首先,形成混合有一碳材的一聚醯亞胺膜。接著,以一碳化溫度加熱碳化混合有碳材的聚醯亞胺膜形成一碳化聚醯亞胺膜。最後,以高於碳化溫度的一石墨化溫度加熱石墨化碳化聚醯亞胺膜形成石墨膜。 The invention discloses a method for manufacturing a graphite film. First, a polyimide film having a carbon material mixed is formed. Next, the polyimine film which is carbonized and mixed with the carbon material is heated at a carbonization temperature to form a carbonized polyimide film. Finally, the graphitized carbonized polyimide film is heated at a graphitization temperature higher than the carbonization temperature to form a graphite film.

本發明揭露一種石墨膜,包含一石墨薄膜。石墨薄膜為經碳化及石墨化的一聚醯亞胺薄膜。聚醯亞胺薄膜包含一聚醯亞胺及一碳材。 The invention discloses a graphite film comprising a graphite film. The graphite film is a carbonized and graphitized polyimide film. The polyimide film comprises a polyimine and a carbon material.

根據上述本發明所揭露的石墨膜及其製造方法,由於聚醯亞胺膜包含了碳材,因而可降低加熱過程中發生的聚醯亞胺膜體積收縮。如此一來,由聚醯亞胺膜加熱碳化與石墨化製得的石墨膜可保持平整,解決了先前技術中石墨膜的皺摺在使用時產生的問題。 According to the graphite film disclosed in the above invention and the method for producing the same, since the polyimide film contains a carbon material, the volume shrinkage of the polyimide film which occurs during heating can be reduced. In this way, the graphite film obtained by heating carbonization and graphitization by the polyimide film can be kept flat, and solves the problem that the wrinkles of the graphite film in the prior art are used.

以上之關於本發明內容之說明及以下之實施方式之說明係用以示範與解釋本發明之原理,並且提供本發明之專利申請範圍更進一步之解釋。 The above description of the present invention and the following description of the embodiments of the present invention are intended to illustrate and explain the principles of the invention.

10‧‧‧石墨膜 10‧‧‧Graphite film

11‧‧‧石墨薄膜 11‧‧‧ graphite film

12‧‧‧聚醯亞胺薄膜 12‧‧‧ Polyimine film

第1A圖為本發明一實施例之石墨膜示意圖。 Fig. 1A is a schematic view showing a graphite film according to an embodiment of the present invention.

第1B圖為本發明一實施例之未碳化及未石墨化的聚醯亞胺膜示意圖。 1B is a schematic view of an uncarbonized and ungraphitized polyimide film according to an embodiment of the present invention.

第2圖為本發明一實施例之石墨膜製作方法流程圖。 2 is a flow chart of a method for fabricating a graphite film according to an embodiment of the present invention.

第3圖為本發明實施例一之石墨膜成品。 Figure 3 is a graphite film product of the first embodiment of the present invention.

第4圖為本發明實施例二之石墨膜成品。 Figure 4 is a graphite film product of the second embodiment of the present invention.

第5圖為本發明比較例一之石墨膜成品。 Fig. 5 is a view showing a graphite film of Comparative Example 1 of the present invention.

第6圖為本發明比較例二之石墨膜成品。 Figure 6 is a graph of the graphite film of Comparative Example 2 of the present invention.

以下在實施方式中詳細敘述本發明之詳細特徵以及優點,其內容足以使任何熟習相關技藝者了解本發明之技術內容並據以實施,且根據本說明書所揭露之內容、申請專利範圍及圖式,任何熟習相關技藝者可輕易地理解本發明相關之目的及優點。以下之實施例係進一步詳細說明本發明之觀點,但非以任何觀點限制本發明之範疇。 The detailed features and advantages of the present invention are set forth in the Detailed Description of the Detailed Description of the <RTIgt; </ RTI> <RTIgt; </ RTI> </ RTI> </ RTI> <RTIgt; The objects and advantages associated with the present invention can be readily understood by those skilled in the art. The following examples are intended to describe the present invention in further detail, but are not intended to limit the scope of the invention.

以下先介紹本發明之石墨膜的結構,請參照第1A圖及第1B圖。第1A圖為本發明一實施例之石墨膜示意圖。第1B圖為本發明一實施例之未碳化及未石墨化的聚醯亞胺膜示意圖。 Hereinafter, the structure of the graphite film of the present invention will be described first. Please refer to FIGS. 1A and 1B. Fig. 1A is a schematic view showing a graphite film according to an embodiment of the present invention. 1B is a schematic view of an uncarbonized and ungraphitized polyimide film according to an embodiment of the present invention.

石墨膜10包含石墨薄膜11。石墨薄膜11係由聚醯亞胺薄膜12進行碳化及石墨化後所得到。聚醯亞胺薄膜12包含聚醯亞胺及碳材。碳材均勻分布於聚醯亞胺中,碳材與聚醯亞胺的重量比為1:99至40:60,較佳為6:94至20:80。聚醯亞胺係由二胺與二酐反應生成聚醯胺酸後,利用加熱的方式使聚醯胺酸發生亞醯胺化(imidization)反應而得到。碳材包含碳黑、碳灰、石墨、碳球、碳管或石墨烯,但不以此為限。於本發明其他實施例中,碳材可以為其他具有高含碳量的材料。在聚醯亞胺薄膜12 碳化及石墨化的過程中,由於碳化溫度高達800℃至1500℃,石墨化溫度高達2600℃至2900℃,聚醯亞胺薄膜12中部分碳、氫、氧及氮受熱揮發,最後幾乎只留下碳。因此,聚醯亞胺薄膜12碳化及石墨化後所形成的石墨薄膜11的厚度小於碳化及石墨化前的聚醯亞胺薄膜12的厚度。 The graphite film 10 contains a graphite film 11. The graphite film 11 is obtained by carbonizing and graphitizing the polyimide film 12 . The polyimide film 12 comprises a polyimide and a carbon material. The carbon material is uniformly distributed in the polyimide, and the weight ratio of the carbon material to the polyimide is 1:99 to 40:60, preferably 6:94 to 20:80. The polyimine is obtained by reacting a diamine with a dianhydride to form a poly-proline, and then performing a methanation reaction of the polyamic acid by heating. The carbon material contains carbon black, carbon ash, graphite, carbon spheres, carbon tubes or graphene, but is not limited thereto. In other embodiments of the invention, the carbon material may be other materials having a high carbon content. Polyimine film 12 In the process of carbonization and graphitization, since the carbonization temperature is as high as 800 ° C to 1500 ° C, the graphitization temperature is as high as 2600 ° C to 2900 ° C, and some of the carbon, hydrogen, oxygen and nitrogen in the polyimide film 12 are volatilized by heat, and finally only remain. Under carbon. Therefore, the thickness of the graphite film 11 formed by carbonization and graphitization of the polyimide film 12 is smaller than the thickness of the polyimide film 12 before carbonization and graphitization.

接下來介紹本發明之石墨膜的製作方法,請參閱第2圖。第2圖為本發明一實施例之石墨膜製作方法之流程圖。 Next, a method of producing the graphite film of the present invention will be described, see Fig. 2. 2 is a flow chart of a method for fabricating a graphite film according to an embodiment of the present invention.

首先,將碳材加入極性溶劑中並混合均勻(S101)。 First, the carbon material is added to a polar solvent and mixed uniformly (S101).

詳細來說,將碳材加入極性溶劑中。碳材與聚醯亞胺的重量比為1:99至40:60,較佳為6:94至20:80。極性溶劑可以為二甲基甲醯胺(N,N-Dimethyl formamide,DMF)、二甲基乙醯胺(Dimethylacetamide,DMAc)、二甲基亞碸(Dimethyl sulfoxide,DMSO)、N-甲基吡咯烷酮(N-methyl-2-pyrrolidone,NMP)、γ-丁內酯(gamma-Butyrolactone,GBL)及其組合,但並不以此為限。碳材包含碳黑、碳灰、石墨、碳球、碳管或石墨烯,但不以此為限。於本發明其他實施例中,碳材可以為其他具有高含碳量的材料。 In detail, the carbon material is added to the polar solvent. The weight ratio of carbon material to polyimine is from 1:99 to 40:60, preferably from 6:94 to 20:80. The polar solvent may be N, N-Dimethyl formamide (DMF), Dimethylacetamide (DMAc), Dimethyl sulfoxide (DMSO), N-methylpyrrolidone. (N-methyl-2-pyrrolidone, NMP), gamma-butyrolactone (GBL) and combinations thereof, but not limited thereto. The carbon material contains carbon black, carbon ash, graphite, carbon spheres, carbon tubes or graphene, but is not limited thereto. In other embodiments of the invention, the carbon material may be other materials having a high carbon content.

為了使碳材與溶劑混合均勻,並且減少所需的混合時間,可以20赫茲(Hertz,Hz)至100赫茲之頻率來快速攪拌溶劑,加速碳材分散於溶劑中。此外,亦可藉由研磨的方法來加速碳材分散於溶劑中。 In order to mix the carbon material with the solvent uniformly and reduce the mixing time required, the solvent can be rapidly stirred at a frequency of 20 Hz (Hertz, Hz) to 100 Hz to accelerate the dispersion of the carbon material in the solvent. Further, the carbon material may be accelerated in the solvent by grinding.

接著,將二胺溶解於混合有碳材的極性溶劑中形成 混合有碳材的二胺溶液(S102)。 Next, the diamine is dissolved in a polar solvent mixed with a carbon material to form A diamine solution of a carbon material is mixed (S102).

詳細來說,將二胺加入混合有碳材的極性溶劑中,並透過攪拌或研磨製程,使二胺溶解於極性溶劑中形成二胺溶液,而碳材則均勻分散於二胺溶液中。二胺係選自對苯二胺(1,4-diamino benzene)、間苯二胺(1,3-diamino benzene)、4,4'-二胺基二苯醚(4,4'-oxydianiline)、3,4'-二胺基二苯醚(3,4'-oxydianiline)、4,4'-二胺基二苯烷(4,4'-methylene dianiline)、二對苯二胺(N,N-Diphenylethylenediamine),二胺基二苯酮(diaminobenzophenone)、二胺二苯基碸(diaminodiphenyl sulfone)、二萘二胺(1,5-naphthalene diamine)、二胺基二苯硫醚(4,4'-diaminodiphenyl sulfide)、1,3-二(3-胺基酚氧基)苯(1,3-Bis(3-aminophenoxy)benzene)、1,4-二(4-胺基酚氧基)苯(1,4-Bis(4-aminophenoxy)benzene)、1,3-二(4-胺基酚氧基)苯(1,3-Bis(4-aminophenoxy)benzene)、2,2'-二[4-(4-胺基酚氧基)苯基]丙烷(2,2'-Bis[4-(4-aminophenoxy)phenyl]propane)、4,4'-二(4-胺基酚氧基)聯苯(4,4'-bis-(4-aminophenoxy)biphenyl)、4,4'-二(3-胺基酚氧基)聯苯(4,4'-bis-(3-aminophenoxy)biphenyl)、1,3-二丙胺基-1,1',3,3'-四甲基二矽氧烷(1,3-Bis(3-aminopropyl)-1,1',3,3'-tetramethyldisiloxane)、1,3-二丙胺基-1,1',3,3'-四苯基二矽氧烷(1,3-Bis(3-aminopropyl)-1,1',3,3'-tetraphenyldisiloxane)、1,3-二丙胺基-1,1'-二甲基-3,3'-二苯基二矽氧烷 (1,3-Bis(aminopropyl)-dimethyldiphenyldisiloxane)及其所構成之群組。 In detail, the diamine is added to a polar solvent mixed with a carbon material, and the diamine is dissolved in a polar solvent to form a diamine solution by a stirring or grinding process, and the carbon material is uniformly dispersed in the diamine solution. The diamine is selected from the group consisting of 1,4-diamino benzene, 1,3-diamino benzene, and 4,4'-diaminodiphenyl ether (4,4'-oxydianiline). , 3,4'-oxydianiline, 4,4'-methylene dianiline, di-p-phenylenediamine (N, N-Diphenylethylenediamine), diaminobenzophenone, diaminodiphenyl sulfone, 1,5-naphthalene diamine, diaminodiphenyl sulfide (4,4 '-diaminodiphenyl sulfide), 1,3-bis(3-aminophenoxy)benzene, 1,4-bis(4-aminophenoloxy)benzene (1,4-Bis(4-aminophenoxy)benzene), 1,3-bis(4-aminophenoxy)benzene, 2,2'-di[ 4-(4-Aminophenoxy)phenyl]propane), 4,4'-bis(4-aminophenoloxy) 4,4'-bis-(4-aminophenoxy)biphenyl, 4,4'-bis-(3-aminophenoxy)biphenyl 1,3-Bis(3-aminopropyl)-1,1',3,3'-tetramethyldisiloxane 1,3-dipropene 1,1-B'(3-aminopropyl)-1,1',3,3'-tetraphenyldisiloxane, 1,3-dipropylamine Base-1,1'-dimethyl-3,3'-diphenyldioxane (1,3-Bis(aminopropyl)-dimethyldiphenyldisiloxane) and the group formed thereof.

接著,將二酐加入混合有碳材的二胺溶液中形成混合有碳材的聚醯胺酸溶液(103)。 Next, the dianhydride is added to the diamine solution in which the carbon material is mixed to form a polyamine acid solution (103) mixed with the carbon material.

詳細來說,將二酐加入混合有碳材的二胺溶液中,使二酐與二胺溶液中的二胺反應生成聚醯胺酸溶液,而碳材則均勻分散於聚醯胺酸溶液中。加入二胺溶液中的二酐莫耳數與二胺溶液中的二胺莫耳數的比例為0.98:1至1.05:1。二酐係選自1,2,4,5-苯四甲酸二酐(1,2,4,5-Benzenetetracarboxylic dianhydride)、聯苯四羧酸二酐(3,3',4,4'-Biphenyltetracarboxylic dianhydride)、二苯醚四酸二酐(4,4'-Oxydiphthalic anhydride)、二苯酮四羧酸二酐(Benzophenonetetracarboxylicdianhydride)、二苯基碸四羧酸二酐(3,3',4,4'-diphenyl sulfonetetracarboxylic dianhydride)、萘基四酸二酐(1,2,5,6-naphthalenetetracarboxylic dianhydride)、萘二酸酐(Naphthalenetetracarboxylic Dianhydride)、二-(3,4-苯二甲酸酐)二甲基矽烷(bis(3,4-dicarboxypheny1)dimethylsilane dianhydride)、1,3-二(3,4-二羧基苯基)-1,1',3,3'一四甲基二矽氧烷二酐(1,3-bis(4'-phthalic anhydride)-tetramethyldisiloxane)及其所構成之群組。此時,混合有碳材的聚醯胺酸溶液的黏度為100泊(poise,ps)至1000泊(即為10,000cps至100,000cps)。 In detail, the dianhydride is added to the diamine solution mixed with the carbon material, and the dianhydride is reacted with the diamine in the diamine solution to form a poly-proline solution, and the carbon material is uniformly dispersed in the poly-proline solution. . The ratio of the molar amount of the dianhydride to the diamine solution to the diamine molar in the diamine solution is from 0.98:1 to 1.05:1. The dianhydride is selected from the group consisting of 1,2,4,5-Benzenetetracarboxylic dianhydride and biphenyltetracarboxylic dianhydride (3,3',4,4'-Biphenyltetracarboxylic). Dianhydride), 4,4'-Oxydiphthalic anhydride, Benzophenone tetracarboxylicdianhydride, diphenylphosphonium tetracarboxylic dianhydride (3,3',4,4 '-diphenyl sulfonetetracarboxylic dianhydride, 1,2,5,6-naphthalenetetracarboxylic dianhydride, naphthalenetetracarboxylic dianhydride, bis-(3,4-phthalic anhydride) dimethyl decane (bis(3,4-dicarboxypheny1)dimethylsilane dianhydride), 1,3-bis(3,4-dicarboxyphenyl)-1,1',3,3'-tetramethyldioxane dianhydride (1 , 3-bis (4'-phthalic anhydride)-tetramethyldisiloxane) and the group formed thereof. At this time, the polyamine liquid solution mixed with the carbon material has a viscosity of 100 poise (psise) to 1000 poise (that is, 10,000 cps to 100,000 cps).

值得注意的是,本實施例中形成混合有碳材的聚醯 胺酸膜之步驟為在極性溶液中依序加入碳材、二胺及二酐以形成混合有碳材的聚醯胺酸溶液,但不以此為限。於本發明其他實施例中,將碳材、二胺及二酐加入極性溶液中的順序係可調整的。在本發明部分實施例中,碳材係於二胺溶解於極性溶劑形成二胺溶液後再加入二胺溶液中。在本發明部分實施例中,碳材係與二胺一同加入極性溶劑中形成二胺溶液。在本發明部分實施例中,碳材係於二酐加入二胺溶液中形成聚醯胺酸溶液後,再加入聚醯胺酸溶液中。在本發明部分實施例中,碳材係與二酐一同加入二胺溶液中形成聚醯胺酸溶液。在本發明部分實施例中,碳材係於二酐溶解於極性溶劑形成二酐溶液後再加入二酐溶液中。在本發明部分實施例中,碳材係與二酐一同加入極性溶劑中形成二酐溶液。在本發明部分實施例中,碳材係於二胺加入二酐溶液中形成聚醯胺酸溶液後,再加入聚醯胺酸溶液中。在本發明部分實施例中,碳材係與二胺一同加入二酐溶液中形成聚醯胺酸溶液。 It is worth noting that in this embodiment, a polyfluorene mixed with a carbon material is formed. The step of the amine acid film is to sequentially add carbon materials, diamines and dianhydrides in a polar solution to form a polyamic acid solution mixed with carbon materials, but not limited thereto. In other embodiments of the invention, the order in which the carbon material, diamine, and dianhydride are added to the polar solution is adjustable. In some embodiments of the invention, the carbon material is added to the diamine solution after the diamine is dissolved in the polar solvent to form the diamine solution. In some embodiments of the invention, the carbon material is added to the polar solvent along with the diamine to form a diamine solution. In some embodiments of the present invention, the carbon material is added to the polyamine solution after the dianhydride is added to the diamine solution, and then added to the polyaminic acid solution. In some embodiments of the invention, the carbon material is added to the diamine solution along with the dianhydride to form a polyaminic acid solution. In some embodiments of the present invention, the carbon material is added to the dianhydride solution after the dianhydride is dissolved in the polar solvent to form the dianhydride solution. In some embodiments of the invention, the carbon material is added to the polar solvent along with the dianhydride to form a dianhydride solution. In some embodiments of the present invention, the carbon material is added to the polyamine solution after the diamine is added to the dianhydride solution, and then added to the polyaminic acid solution. In some embodiments of the invention, the carbon material is added to the dianhydride solution together with the diamine to form a polyaminic acid solution.

接著,加熱乾燥混合有碳材的聚醯胺酸溶液形成混合有碳材的聚醯胺酸膜(S104)。 Next, the polyamic acid solution in which the carbon material is mixed is heated and dried to form a polyamic acid film in which the carbon material is mixed (S104).

詳細來說,將混合有碳材的聚醯胺酸溶液塗佈於一承載材上,接著將塗佈混合有碳材的聚醯胺酸溶液的承載材放置於120℃至200℃的高溫環境中進行加熱乾燥。如此一來,混合有碳材的聚醯胺酸溶液中的溶劑受熱氣化而離開混合有碳材的聚醯胺酸溶液,並且使混合有碳材的聚醯胺酸溶液中未被氣化的聚醯胺酸形成聚醯胺酸膜,而未被氣化的碳材則均勻分布於聚醯胺酸 膜中。待混合有碳材的聚醯胺酸溶液中的溶劑均受熱氣化後,將混合有碳材的聚醯胺酸膜剝離承載材,得到混合有碳材的聚醯胺酸膜。加熱乾燥的溫度可匹配於溶劑的沸點。在本發明部分實施例中,乾燥的溫度為120℃至200℃,但並不以此為限。 Specifically, a polyamine acid solution mixed with a carbon material is coated on a carrier, and then a carrier material coated with a polyamic acid solution mixed with a carbon material is placed in a high temperature environment of 120 ° C to 200 ° C. Heat drying in the middle. As a result, the solvent in the polyamic acid solution mixed with the carbon material is heated and vaporized to leave the polyamic acid solution mixed with the carbon material, and the polyamic acid solution mixed with the carbon material is not vaporized. Polylysine forms a polylysine film, while unvaporized carbon material is evenly distributed in polylysine In the film. After the solvent in the polyamic acid solution to be mixed with the carbon material is heated and vaporized, the polyamic acid film in which the carbon material is mixed is peeled off from the carrier material to obtain a polyamic acid film in which the carbon material is mixed. The temperature of the heat drying can be matched to the boiling point of the solvent. In some embodiments of the present invention, the drying temperature is from 120 ° C to 200 ° C, but is not limited thereto.

接著,將混合有碳材的聚醯胺酸膜進行亞醯胺化反應形成混合有碳材的聚醯亞胺膜(S105)。 Next, the polyamic acid film in which the carbon material is mixed is subjected to a mercaptochemical reaction to form a polyimine film in which a carbon material is mixed (S105).

詳細來說,亞醯胺化(imidization)反應可以是以高於加熱乾燥的溫度(250℃-450℃)對混合有碳材的聚醯胺酸膜進行加熱,使聚醯胺酸模中的聚醯胺酸脫水及閉環而形成聚醯亞胺膜。亞醯胺化反應亦可以是在聚醯胺酸中加入脫水劑(例如:酸酐)或催化劑(聚合物鉗閉型催化劑)使聚醯胺酸模中的聚醯胺酸脫水及閉環(化學環化法)而形成聚醯亞胺膜。完成亞醯胺化後,碳材均勻分布於聚醯亞胺膜中。其中,加熱溫度越高,聚醯胺酸膜進行亞醯胺化(imidization)反應生成聚醯亞胺膜所需的時間越短。然而,若是反應的溫度過高,則可能會破壞聚醯亞胺分子內的原子之間的鍵結,使得聚醯亞胺因為高溫而降解(degradation)。在本發明部分實施例中,加熱使聚醯胺酸膜進行亞醯胺化反應的溫度為270℃至450℃,但並不以此為限。 In detail, the imidization reaction may heat the polyglycolic acid film mixed with the carbon material at a temperature higher than the heat drying temperature (250 ° C - 450 ° C) to polymerize the polyamide film. The valine acid is dehydrated and closed to form a polyimide film. The methylene amination reaction may also be carried out by adding a dehydrating agent (for example, an acid anhydride) or a catalyst (polymer clamped catalyst) to the polyphthalic acid to dehydrate and close the polyglycolic acid in the polyaminic acid mold (chemical cyclization). Method) to form a polyimide film. After the berylation is completed, the carbon material is uniformly distributed in the polyimide film. Among them, the higher the heating temperature, the shorter the time required for the polyaminic acid film to undergo a imidization reaction to form a polyimide film. However, if the temperature of the reaction is too high, the bond between the atoms in the polyimine molecule may be destroyed, so that the polyimine is degraded due to high temperature. In some embodiments of the present invention, the temperature at which the polyamithanic acid film is subjected to the methylene amination reaction by heating is 270 ° C to 450 ° C, but is not limited thereto.

接著,以碳化溫度加熱碳化混合有碳材的聚醯亞胺膜形成碳化聚醯亞胺膜(S106)。 Next, a polyimide film having a carbon material mixed with a carbon material is heated at a carbonization temperature to form a carbonized polyimide film (S106).

詳細來說,將混合有碳材的聚醯亞胺膜置於低壓環境下、氮氣氣氛中或是惰性氣體氣氛中,以800℃至1500℃的碳 化溫度進行加熱處理,使聚醯亞胺膜表面的聚醯亞胺開始碳化而得到碳化聚醯亞胺膜。舉例來說,可將混合有碳材的聚醯亞胺膜置入內部壓力低於一大氣壓的加熱腔室中進行加熱碳化,或者是將混合有碳材的聚醯亞胺薄膜置入填充有氮氣的加熱腔室中進行加熱碳化。 In detail, the polyimine film mixed with carbon material is placed in a low pressure environment, a nitrogen atmosphere or an inert gas atmosphere, and the carbon is 800 ° C to 1500 ° C. The temperature is subjected to heat treatment to start carbonization of the polyimine on the surface of the polyimide film to obtain a carbonized polyimide film. For example, a polyimine film mixed with a carbon material may be placed in a heating chamber having an internal pressure lower than one atmosphere for carbonization, or a polyimide film mixed with a carbon material may be filled with a carbon material. Heating and carbonization is carried out in a heating chamber of nitrogen.

最後,以高於碳化溫度的石墨化溫度加熱石墨化碳化聚醯亞胺膜形成石墨膜(S107)。 Finally, the graphitized carbonized polyimide film is heated at a graphitization temperature higher than the carbonization temperature to form a graphite film (S107).

詳細來說,將碳化聚醯亞胺膜置於低壓環境下、或是惰性氣體氣氛中,以2600℃至2900℃的石墨化溫度進行加熱處理,使碳化聚醯亞胺膜表面的碳化聚醯亞胺開始石墨化而得到石墨薄膜,完成石墨膜的製備。舉例來說,可將碳化聚醯亞胺膜置入填充有氬氣或是氦氣的加熱腔室中進行加熱石墨化以得到石墨膜。 In detail, the carbonized polyimide film is placed in a low pressure environment or an inert gas atmosphere, and heat treated at a graphitization temperature of 2600 ° C to 2900 ° C to carbonize the surface of the carbonized polyimide film. The imide starts to be graphitized to obtain a graphite film, and the preparation of the graphite film is completed. For example, the carbonized polyimide film can be placed in a heating chamber filled with argon or helium to be heated and graphitized to obtain a graphite film.

由於聚醯亞胺膜包含了碳材,使得聚醯亞胺膜在進行加熱碳化以及加熱石墨化的過程中,聚醯亞胺膜的體積收縮量下降,減少聚醯亞胺膜在加熱過程中因體積過度收縮所造成龜裂的狀況。如此一來,由包含碳材的聚醯亞胺膜進行加熱碳化與石墨化製得的石墨膜可保持平整。 Since the polyimine film contains carbon material, the volume shrinkage of the polyimide film decreases during the process of heating carbonization and heating graphitization, and the polyimine film is reduced during heating. A condition caused by excessive shrinkage of the volume. In this way, the graphite film obtained by heating carbonization and graphitization by a polyimine film containing a carbon material can be kept flat.

此外,本發明一實施例中的聚醯亞胺膜碳化以及碳化聚醯亞胺膜石墨化可以在不同的加熱腔室中進行,但不以此為限。於本發明其他實施例中,聚醯亞胺膜碳化以及碳化聚醯亞胺膜石墨化亦可以在同一加熱腔室中以碳化溫度先對聚醯亞胺膜進 行碳化後,再將加熱溫度升高到石墨化溫度以對碳化聚醯亞胺膜進行石墨化。 In addition, the carbonization of the polyimide film and the graphitization of the carbonized polyimide film in one embodiment of the present invention may be performed in different heating chambers, but not limited thereto. In other embodiments of the present invention, the carbonization of the polyimide film and the graphitization of the carbonized polyimide film may also be performed on the polyimide film at the carbonization temperature in the same heating chamber. After carbonization, the heating temperature is raised to the graphitization temperature to graphitize the carbonized polyimide film.

以下藉由數個實施例及比較例說明本提案所揭露之石墨膜及其製造方法,並且進行實驗測試以比較其性質差異。 The graphite film disclosed in the present proposal and a method for producing the same are described below by several examples and comparative examples, and experimental tests are conducted to compare the difference in properties.

實施例一 Embodiment 1

首先,將9.6克碳黑加入850克二甲基乙醯胺(DMAc)中並攪拌1小時,使碳黑與DMAc混合均勻。 First, 9.6 g of carbon black was added to 850 g of dimethylacetamide (DMAc) and stirred for 1 hour to uniformly mix the carbon black with DMAc.

接著,將71.8克4,4'-二胺基二苯醚(ODA)加入混合有碳黑的DMAc中並攪拌1小時,使ODA溶解於混合有碳黑的DMAc中形成混合有碳黑的二胺溶液。 Next, 71.8 g of 4,4'-diaminodiphenyl ether (ODA) was added to the DMAc mixed with carbon black and stirred for 1 hour to dissolve the ODA in the DMAc mixed with carbon black to form a mixture of carbon black. Amine solution.

接著,將78.2克1,2,4,5-苯四甲酸二酐(PMDA)緩緩加入混合有碳黑的二胺液中並在室溫下攪拌6小時,使PMDA與ODA反應形成混合有碳材的聚醯胺酸溶液。 Next, 78.2 g of 1,2,4,5-benzenetetracarboxylic dianhydride (PMDA) was slowly added to the diamine liquid mixed with carbon black and stirred at room temperature for 6 hours to react PMDA with ODA to form a mixture. A polyamic acid solution of carbon material.

接著,將混合有碳材的聚醯胺酸溶液塗佈於承載板上,並以120℃加熱乾燥混合有碳材的聚醯胺酸溶液10分鐘,在承載板上形成混合有碳材的聚醯胺酸膜,並且將混合有碳材的聚醯胺酸膜自承載板剝離。 Next, the polyamine acid solution mixed with the carbon material was applied onto the carrier plate, and the polyamine solution mixed with the carbon material was dried by heating at 120 ° C for 10 minutes to form a polymer mixed with the carbon material on the carrier plate. A proline membrane, and the polyamic acid membrane mixed with the carbon material is peeled off from the carrier sheet.

接著,以400℃加熱混合有碳材的聚醯胺酸膜10分鐘,使混合有碳材的聚醯胺酸膜進行亞醯胺化反應,形成混合有碳材的聚醯亞胺膜。 Next, the polyamic acid film in which the carbon material was mixed was heated at 400 ° C for 10 minutes, and the polyamine membrane mixed with the carbon material was subjected to a mercaptochemical reaction to form a polyimide film in which a carbon material was mixed.

接著,於填充有氮氣氣氛的加熱腔體中以1000℃的碳化溫度加熱碳化混合有碳材的聚醯亞胺膜60分鐘,形成碳化聚 醯亞胺膜。 Next, the carbonized polyimide film was heated and heated at a carbonization temperature of 1000 ° C in a heating chamber filled with a nitrogen atmosphere for 60 minutes to form a carbonized polycondensation. 醯 imine film.

最後,於填充有氬氣氣氛的加熱腔體中以2900℃的石墨化溫度加熱石墨化碳化聚醯亞胺膜30分鐘,形成石墨膜。 Finally, the graphitized carbonized polyimide film was heated in a heating chamber filled with an argon atmosphere at a graphitization temperature of 2900 ° C for 30 minutes to form a graphite film.

實施例二 Embodiment 2

首先,將37.5克碳黑加入850克二甲基乙醯胺(DMAc)中並攪拌1小時,使碳黑與DMAc混合均勻。 First, 37.5 g of carbon black was added to 850 g of dimethylacetamide (DMAc) and stirred for 1 hour to uniformly mix the carbon black with DMAc.

接著,將71.8克ODA加入混合有碳黑的DMAc中並攪拌1小時,使ODA溶解於混合有碳黑的DMAc中形成混合有碳黑的二胺溶液。 Next, 71.8 g of ODA was added to DMAc mixed with carbon black and stirred for 1 hour, and ODA was dissolved in DMAc mixed with carbon black to form a diamine solution in which carbon black was mixed.

接著,將78.2克1,2,4,5-苯四甲酸二酐(PMDA)緩緩加入混合有碳黑的二胺溶液中並在室溫下攪拌6小時,使PMDA與ODA反應形成混合有碳材的聚醯胺酸溶液。 Next, 78.2 g of 1,2,4,5-benzenetetracarboxylic dianhydride (PMDA) was slowly added to the diamine solution mixed with carbon black and stirred at room temperature for 6 hours to react PMDA with ODA to form a mixture. A polyamic acid solution of carbon material.

接下來的乾燥成膜、亞醯胺化、加熱碳化以及加熱石墨化與實施例一相似,在此便不再贅述。 The subsequent dry film formation, imidization, heat carbonization, and heat graphitization are similar to those of the first embodiment, and will not be described herein.

比較例一 Comparative example one

首先,將71.8克ODA加入850克DMAc中並攪拌1小時,使ODA溶解於DMAc中形成二胺溶液。 First, 71.8 g of ODA was added to 850 g of DMAc and stirred for 1 hour to dissolve the ODA in DMAc to form a diamine solution.

接著,將78.2克PMDA緩緩加入二胺溶液中並在室溫下攪拌6小時,使PMDA與ODA反應形成聚醯胺酸溶液。 Next, 78.2 g of PMDA was slowly added to the diamine solution and stirred at room temperature for 6 hours to react PMDA with ODA to form a polyaminic acid solution.

接下來的乾燥成膜、亞醯胺化、加熱碳化以及加熱石墨化與實施例一相似,在此便不再贅述。 The subsequent dry film formation, imidization, heat carbonization, and heat graphitization are similar to those of the first embodiment, and will not be described herein.

比較例二 Comparative example two

首先,將36.5克ODA以及19.8克PPDA加入850克DMAc中並攪拌1小時,使ODA及PPDA溶解於DMAc中形成二胺溶液。 First, 36.5 g of ODA and 19.8 g of PPDA were added to 850 g of DMAc and stirred for 1 hour to dissolve the ODA and PPDA in DMAc to form a diamine solution.

接著,將39.8克PMDA以及53.8克BPDA緩緩加入二胺溶液中並在室溫下攪拌6小時,使PMDA及BPDA與ODA及PPDA反應形成聚醯胺酸溶液。 Next, 39.8 g of PMDA and 53.8 g of BPDA were slowly added to the diamine solution and stirred at room temperature for 6 hours to react PMDA and BPDA with ODA and PPDA to form a polyaminic acid solution.

接下來的乾燥成膜、亞醯胺化、加熱碳化以及加熱石墨化與實施例一相似,在此便不再贅述。 The subsequent dry film formation, imidization, heat carbonization, and heat graphitization are similar to those of the first embodiment, and will not be described herein.

請參閱表一,表一為本發明二實施例及二比較例之石墨膜成分組成及其相關量測結果。其中,第3圖為本發明實施例一之石墨膜成品,第4圖為本發明實施例二之石墨膜成品,第5圖為本發明比較例一之石墨膜成品,第6圖為本發明比較例二之石墨膜成品。 Please refer to Table 1. Table 1 shows the composition of the graphite film and the related measurement results of the second embodiment and the second comparative example. 3 is a graphite film product of the first embodiment of the present invention, FIG. 4 is a graphite film product of the second embodiment of the present invention, and FIG. 5 is a graphite film product of the first comparative example of the present invention. FIG. The graphite film of Comparative Example 2 was finished.

依照實施例一與實施例二的成分比例製成之石墨膜,表面呈現平整且無皺褶的表面型態,因此在使用上可充分貼合於電子電路元件表面,提供較佳的散熱效果。 The graphite film prepared according to the composition ratio of the first embodiment and the second embodiment has a flat surface and a wrinkle-free surface type, so that it can be sufficiently adhered to the surface of the electronic circuit component in use, thereby providing a better heat dissipation effect.

比較例一與比較例二之石墨膜,由於未添加碳材於聚醯亞胺膜中,因此石墨膜的表面呈現不平整且有皺褶的表面型態,甚至在石墨膜的表面出現龜裂。因此,在使用上無法充分貼合於電子電路元件表面,導致電子電路元件出現散熱效果不佳的問題。 In the graphite film of Comparative Example 1 and Comparative Example 2, since the carbon material was not added to the polyimide film, the surface of the graphite film exhibited an uneven and wrinkled surface type, and cracks appeared even on the surface of the graphite film. . Therefore, it is not possible to sufficiently adhere to the surface of the electronic circuit component in use, resulting in a problem that the electronic circuit component has a poor heat dissipation effect.

根據上述本發明所揭露的石墨膜及其製造方法,添加碳材的聚醯亞胺膜在碳化與石墨化過程中,可保持平整且無皺褶的表面型態,因此在使用上可充分貼合於電子電路元件表面,提供較佳的散熱效果。如此一來,先前技術中石墨膜無法充分貼合於電子電路元件表面,導致電子電路元件出現散熱效果不佳的問題便得到解決。 According to the graphite film disclosed in the above invention and the method for producing the same, the polyimine film to which the carbon material is added can maintain a flat and wrinkle-free surface state during carbonization and graphitization, and thus can be sufficiently applied in use. It is integrated with the surface of the electronic circuit component to provide better heat dissipation. As a result, in the prior art, the graphite film cannot be sufficiently adhered to the surface of the electronic circuit component, and the problem that the heat dissipation effect of the electronic circuit component is poor is solved.

雖然本發明以前述之較佳實施例揭露如上,然其並 非用以限定本發明,任何熟習相像技藝者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之專利保護範圍須視本說明書所附之申請專利範圍所界定者為準。 Although the present invention has been disclosed above in the preferred embodiment of the foregoing, It is not intended to limit the invention, and any skilled person in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The definition is final.

Claims (10)

一種石墨膜的製造方法,包含:形成混合有一碳材的一聚醯亞胺膜;以一碳化溫度加熱碳化混合有該碳材的該聚醯亞胺膜形成一碳化聚醯亞胺膜;以及以高於該碳化溫度的一石墨化溫度加熱石墨化該碳化聚醯亞胺膜形成一石墨膜;其中,在混合有該碳材的該聚醯亞胺膜中包含該碳材與一聚醯亞胺,該碳材與該聚醯亞胺的重量比為1:99至40:60。 A method for producing a graphite film, comprising: forming a polyimine film mixed with a carbon material; heating and carbonizing the polyimine film mixed with the carbon material to form a carbonized polyimide film at a carbonization temperature; Heating and graphitizing the carbonized polyimide film at a graphitization temperature higher than the carbonization temperature to form a graphite film; wherein the carbon material and the polyfluorene are contained in the polyimide film mixed with the carbon material The imine, the weight ratio of the carbon material to the polyimine is from 1:99 to 40:60. 如請求項1之石墨膜的製造方法,其中形成混合有該碳材的該聚醯亞胺膜,包含:將該碳材加入一極性溶劑中並混合均勻;將一二胺溶解於混合有該碳材的該極性溶劑中形成混合有該碳材的一二胺溶液;將一二酐加入混合有該碳材的該二胺溶液中形成混合有該碳材的一聚醯胺酸溶液;加熱乾燥混合有該碳材的該聚醯胺酸溶液形成混合有該碳材的一聚醯胺酸膜;以及將混合有該碳材的該聚醯胺酸膜進行一亞醯胺化反應形成混合有該碳材的該聚醯亞胺膜。 The method for producing a graphite film according to claim 1, wherein the polyimine film in which the carbon material is mixed is formed, comprising: adding the carbon material to a polar solvent and mixing uniformly; dissolving the monoamine in the mixture Forming a diamine solution mixed with the carbon material in the polar solvent of the carbon material; adding a dianhydride to the diamine solution mixed with the carbon material to form a poly-proline solution mixed with the carbon material; heating Drying the polyaminic acid solution mixed with the carbon material to form a poly-proline film mixed with the carbon material; and subjecting the polyamic acid film mixed with the carbon material to a methylene amination reaction to form a mixture The polyimine film having the carbon material. 如請求項2之石墨膜的製造方法,其中該二胺係選自對苯二胺(1,4-diamino benzene)、間苯二胺(1,3-diamino benzene)、4,4'- 二胺基二苯醚(4,4'-oxydianiline)、3,4'-二胺基二苯醚(3,4'-oxydianiline)、4,4'-二胺基二苯烷(4,4'-methylene dianiline)、二對苯二胺(N,N-Diphenylethylenediamine),二胺基二苯酮(diaminobenzophenone)、二胺二苯基碸(diamino diphenyl sulfone)、二萘二胺(1,5-naphthalene diamine)、二胺基二苯硫醚(4,4'-diamino diphenyl sulfide)、1,3-二(3-胺基酚氧基)苯(1,3-Bis(3-aminophenoxy)benzene)、1,4-二(4-胺基酚氧基)苯(1,4-Bis(4-aminophenoxy)benzene)、1,3-二(4-胺基酚氧基)苯(1,3-Bis(4-aminophenoxy)benzene)、2,2'-二[4-(4-胺基酚氧基)苯基]丙烷(2,2'-Bis[4-(4-amino phenoxy)phenyl]propane)、4,4'-二(4-胺基酚氧基)聯苯(4,4'-bis-(4-aminophenoxy)biphenyl)、4,4'-二(3-胺基酚氧基)聯苯(4,4'-bis-(3-aminophenoxy)biphenyl)、1,3-二丙胺基-1,1',3,3'-四甲基二矽氧烷(1,3-Bis(3-aminopropyl)-1,1',3,3'-tetramethyldisiloxane)、1,3-二丙胺基-1,1',3,3'-四苯基二矽氧烷(1,3-Bis(3-aminopropyl)-1,1',3,3'-tetraphenyldisiloxane)、1,3-二丙胺基-1,1'-二甲基-3,3'-二苯基二矽氧烷(1,3-Bis(aminopropyl)-dimethyldiphenyldisiloxane)及其所構成之群組。 The method for producing a graphite film according to claim 2, wherein the diamine is selected from the group consisting of 1,4-diamino benzene, 1,3-diamino benzene, 4, 4'- Diamine diphenyl ether (4,4'-oxydianiline), 3,4'-diamino diphenyl ether (3,4'-oxydianiline), 4,4'-diaminodiphenyl (4,4 '-methylene dianiline), N,N-Diphenylethylenediamine, diaminobenzophenone, diamino diphenyl sulfone, dinaphthyldiamine (1,5- Naphthalene diamine), 4,4'-diamino diphenyl sulfide, 1,3-Bis(3-aminophenoxy)benzene 1,4-Bis(4-aminophenoxy)benzene, 1,3-bis(4-aminophenoloxy)benzene (1,3- Bis(4-aminophenoxy)benzene), 2,2'-bis[4-(4-aminophenoxy)phenyl]propane (2,2'-Bis[4-(4-amino phenoxy)phenyl]propane , 4,4'-bis(4-aminophenoxy)biphenyl, 4,4'-bis(3-aminophenoloxy) Biphenyl (4,4'-bis-(3-aminophenoxy)biphenyl), 1,3-dipropylamino-1,1',3,3'-tetramethyldioxane (1,3-Bis ( 3-aminopropyl)-1,1',3,3'-tetramethyldisiloxane), 1,3-dipropylamino-1,1',3,3'-tetraphenyldioxane (1,3-Bis ( 3-aminopropyl)-1,1',3,3'-tetraphenyldisiloxa Ne), 1,3-Bis(aminopropyl)-dimethyldiphenyldisiloxane (1,3-Bis(aminopropyl)-dimethyldiphenyldisiloxane) and its group group. 如請求項2之石墨膜的製造方法,其中該二酐係選自1,2,4,5-苯四甲酸二酐(1,2,4,5-Benzene tetracarboxylic dianhydride)、 聯苯四羧酸二酐(3,3',4,4'-Biphenyl tetracarboxylic dianhydride)、二苯醚四酸二酐(4,4'-Oxydiphthalic anhydride)、二苯酮四羧酸二酐(Benzophenonetetracarboxylicdianhydride)、二苯基碸四羧酸二酐(3,3',4,4'-diphenyl sulfonetetracarboxylic dianhydride)、萘基四酸二酐(1,2,5,6-naphthalene tetracarboxylic dianhydride)、萘二酸酐(Naphthalenetetracarboxylic Dianhydride)、二-(3,4-苯二甲酸酐)二甲基矽烷(bis(3,4-dicarboxyphenyl)dimethylsilane dianhydride)、1,3-二(3,4-二羧基苯基)-1,1',3,3'一四甲基二矽氧烷二酐(1,3-bis(4'-phthalic anhydride)-tetramethyldisiloxane)及其所構成之群組。 The method for producing a graphite film according to claim 2, wherein the dianhydride is selected from the group consisting of 1,2,4,5-Benzene tetracarboxylic dianhydride, Bismuth tetracarboxylic dianhydride (3,3',4,4'-Biphenyl tetracarboxylic dianhydride), 4,4'-Oxydiphthalic anhydride, benzophenone tetracarboxylic dianhydride ), 3,3',4,4'-diphenyl sulfonetetracarboxylic dianhydride, 1,2,5,6-naphthalene tetracarboxylic dianhydride, naphthalic anhydride (Naphthalenetetracarboxylic Dianhydride), bis(3,4-dicarboxyphenyl)dimethylsilane dianhydride, 1,3-bis(3,4-dicarboxyphenyl)- 1,1',3,3'-tetramethyldisiloxane (1,3-bis(4'-phthalic anhydride)-tetramethyldisiloxane) and a group thereof. 如請求項1之石墨膜的製造方法,其中在混合有該碳材的該聚醯亞胺膜中包含該碳材與一聚醯亞胺,該碳材與該聚醯亞胺的重量比為6:94至20:80。 The method for producing a graphite film according to claim 1, wherein the carbon material and the polyimine are contained in the polyimide film in which the carbon material is mixed, and the weight ratio of the carbon material to the polyimide is 6:94 to 20:80. 如請求項1之石墨膜的製造方法,其中該碳材包含碳黑、碳灰、石墨、碳球、碳管或石墨烯。 A method of producing a graphite film according to claim 1, wherein the carbon material comprises carbon black, carbon ash, graphite, carbon spheres, carbon tubes or graphene. 如請求項1之石墨膜的製造方法,其中該碳化溫度為900~1500℃,該石墨化溫度為2600~2900℃。 The method for producing a graphite film according to claim 1, wherein the carbonization temperature is 900 to 1500 ° C, and the graphitization temperature is 2600 to 2900 ° C. 一種石墨膜,包含:一石墨薄膜,該石墨薄膜為經碳化及石墨化的一聚醯亞胺薄膜;其中,該聚醯亞胺薄膜包含一聚醯亞胺及一碳材,該碳材 與該聚醯亞胺的重量比為1:99至40:60。 A graphite film comprising: a graphite film, which is a carbonized and graphitized polyimide film; wherein the polyimide film comprises a polyimine and a carbon material, the carbon material The weight ratio to the polyimine is from 1:99 to 40:60. 如請求項8之石墨膜,其中在該聚醯亞胺薄膜中,該碳材與該聚醯亞胺的重量比為6:94至20:80。 The graphite film of claim 8, wherein the weight ratio of the carbon material to the polyimine in the polyimide film is from 6:94 to 20:80. 如請求項8之石墨膜,其中該碳材包含碳黑、碳灰、石墨、碳球、碳管或石墨烯。 The graphite film of claim 8, wherein the carbon material comprises carbon black, carbon ash, graphite, carbon spheres, carbon tubes or graphene.
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