TWI546171B - Robot - Google Patents

Description

robot

The disclosed embodiments relate to drive mechanisms and robots.

In the production line of a liquid crystal panel display, a substrate transfer robot that transports a glass substrate to be a material is known (for example, see Patent Document 1). In order to prevent deterioration of the quality of the product caused by dust (hereinafter referred to as "fine particles"), the robot is placed in a clean environment such as a clean room.

In addition, in order to maintain the cleanliness of such a clean environment, the driving source of the arm portion of the robot is usually covered with a cover or the like to form a structure for preventing scattering of particles from the inside of the robot.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2002-93881

However, in the above-described prior art, there is a need to improve the cleanliness of the clean environment while cooling the drive source. Ground.

Specifically, since the drive source is covered by the cover or the like as described above, there is a problem that the generated heat is hard to escape. Regarding this problem, it is conceivable to discharge air from the internal space in which the drive source is disposed to the outside, but it is necessary to suppress the scattering of the particles from the inside of the robot.

The above aspect of the embodiment of the present invention is directed to the above problems, and an object thereof is to provide a drive mechanism and a robot that can cool a drive source while maintaining cleanliness of a clean environment.

The drive mechanism in one of the embodiments is provided with a drive source, an internal space, a supply fan, and an exhaust fan. The aforementioned internal space accommodates the aforementioned drive source. The air supply fan supplies air to the aforementioned internal space. The exhaust fan is exhausted from the aforementioned internal space. Further, the drive mechanism maintains the internal pressure of the internal space lower than the air pressure outside the internal space by the air flow generated by the air supply fan and the exhaust fan.

According to one of the embodiments, the driving source can be cooled while maintaining the cleanliness of the clean environment.

1‧‧‧Robot

5‧‧‧Control device

10‧‧‧ whirl mechanism

11‧‧‧Abutment

12‧‧‧ Rotation

20‧‧‧ Lifting arm

21‧‧‧ Pillars

23‧‧‧1st joint

24‧‧‧1st lifting arm

25‧‧‧2nd Joint

26‧‧‧2nd lifting arm

27‧‧‧3rd Joint

30‧‧‧ horizontal arm

101‧‧‧ arrow

102‧‧‧ arrow

301‧‧‧ arrow

302‧‧‧ arrow

303‧‧‧ arrow

1a‧‧‧Robot

20-1‧‧‧1st lifting arm

20-2‧‧‧2nd lifting arm

21-1‧‧‧ Pillars

21-2‧‧‧ Pillars

21a‧‧‧ next door

23-1‧‧‧1st joint

23-2‧‧‧1st joint

23a‧‧‧Air supply fan

23A‧‧‧1st Joint

23b‧‧‧Exhaust fan

23B‧‧‧1st Joint

23ba‧‧ air filter

23bb‧‧‧Shell

23c‧‧‧Motor

23d‧‧‧Reducer

23da‧‧‧Output Department

23e‧‧ motor cover

31a‧‧‧Bottom arm unit

31b‧‧‧Upper arm unit

32a‧‧‧ Telescopic arm

32b‧‧‧ Telescopic arm

33a‧‧‧ Holding Department

33b‧‧‧ Holding Department

34a‧‧‧Bottom support member

34b‧‧‧Upper support member

D‧‧‧ drive mechanism

O‧‧‧distance

S‧‧‧ revolving axis

SP‧‧‧Internal space

U1‧‧‧ axis

U1-1‧‧‧Axis

U1-2‧‧‧Axis

U2‧‧‧ axis

U3‧‧‧Axis

W‧‧‧Workpiece

Fig. 1 is a schematic perspective view of a robot according to a first embodiment.

2A] Fig. 2A is a front elevational view showing the periphery of a first joint portion.

2B] Fig. 2B is a side view showing the periphery of the first joint portion.

2C] Fig. 2C is a view showing an example of a relationship between an air supply fan and an exhaust fan.

3A] Fig. 3A is a plan perspective view showing a periphery of a first joint portion showing a flow of air.

FIG. 3B is a side perspective view showing the periphery of the first joint portion showing the flow of air. FIG.

3C] FIG. 3C is a schematic view showing a state in which the workpiece is located below the first joint portion.

4A] Fig. 4A is a front elevational view showing the vicinity of a first joint portion according to a first modification.

4B] Fig. 4B is a front elevational view showing the vicinity of a second joint portion according to a second modification.

Fig. 5 is a schematic perspective view of a robot according to a second embodiment.

Hereinafter, embodiments of the drive mechanism and the robot disclosed in the present invention will be described in detail with reference to the accompanying drawings. Furthermore, the invention is not limited thereto by the embodiments shown below.

In the following description, a case where the robot transports the glass substrate as the object to be transported will be described as an example. In addition, the object to be conveyed is described as "workpiece". In addition, in the following, sometimes "constituting machine Each of the rigid elements that are mechanically and relatively movable with each other is described as a "link", and the related "link" is referred to as an "arm."

In addition, in the description using FIGS. 1 to 4B, a first embodiment in which a single-link type robot is exemplified will be described, and in the description using FIG. 5, a second example in which a two-link type robot is used will be described. The embodiment will be described.

(first embodiment)

First, the configuration of the robot 1 according to the first embodiment will be described with reference to Fig. 1 . FIG. 1 is a schematic perspective view of a robot 1 according to a first embodiment. In the following, for convenience of explanation, the rotational position of the robot 1 is in the state shown in FIG. 1 , and the positional relationship of each part of the robot 1 will be described.

In addition, in order to make the description easy to understand, FIG. 1 shows a three-dimensional orthogonal coordinate system including a Z-axis in which the vertical direction is the positive direction and the vertical direction is the negative direction. Therefore, the direction along the XY plane means "horizontal direction". The orthogonal coordinate system is sometimes also shown in other drawings used in the following description. In addition, in the following description, it is defined as "front side" when viewed from the positive direction of the X-axis.

As shown in FIG. 1 , the robot 1 includes a swing mechanism 10 , a lift arm unit 20 , and a horizontal arm unit 30 .

The swing mechanism 10 includes a base 11 and a swing table 12. The base 11 is provided, for example, on a floor or the like. The turning table 12 is attached to the upper portion of the base 11 so as to be able to swing the turning axis S as a center. The turning table 12 is rotated around the turning axis S which is a vertical axis. Rotating through the turntable 12 Turning, the elevating arm portion 20 and the horizontal arm portion 30 are rotated around the revolving axis S.

The lift arm portion 20 is a member in which the base end portion is supported by the front end portion of the turntable 12 and supports the horizontal arm portion 30 at the front end portion. The robot 1 transports the workpiece W in the vertical direction so that the lifting arm portion 20 performs the flexing and stretching operation (see an arrow 101 in the drawing). Further, the robot 1 can be configured as a high-stroke robot capable of transporting a large-sized workpiece W in the vertical direction by several meters.

Specifically, the lift arm unit 20 includes a pillar portion 21 , a first joint portion 23 , a first lift arm 24 , a second joint portion 25 , a second lift arm 26 , and a third joint portion 27 . The first joint portion 23 is an example of the drive mechanism D according to the present embodiment, and the drive device of the present invention relatively rotates one of the pair of connected links with respect to the other link, and the details thereof will be described later. .

The pillar portion 21 is a link that is erected in the vertical direction from the front end portion of the turntable 12. Further, the robot 1 is a single-link type robot having one such pillar portion 21.

The proximal end portion of the first lifting arm 24 is coupled to the first joint portion 23 via a distal end portion of the pillar portion 21 . In this way, the first lifting arm 24 is supported by the distal end portion of the pillar portion 21 so as to be rotatable about the joint axis "axis U1" of the first joint portion 23 as the horizontal axis.

The proximal end portion of the second elevating arm 26 is connected to the second joint portion 25 via the distal end portion of the first elevating arm 24 . In this way, the second lifting arm 26 is supported by the front end of the first lifting arm 24 so as to be rotatable about the joint axis "axis U2" of the second joint portion 25 as the horizontal axis. unit.

The horizontal arm portion 30 is connected to the third joint portion 27 via the distal end portion of the second lifting arm 26 . In this way, the horizontal arm portion 30 is supported by the distal end portion of the second lifting arm 26 so as to be rotatable about the joint axis "axis U3" of the third joint portion 27 as the horizontal axis. In this manner, the robot 1 supports the horizontal arm portion 30 using the lift arm portion 20.

The horizontal arm unit 30 includes a lower arm unit 31a and an upper arm unit 31b. The lower arm unit 31a includes a telescopic arm portion 32a, a grip portion 33a, and a lower support member 34a. The upper arm unit 31b includes a telescopic arm portion 32b, a grip portion 33b, and an upper support member 34b. In addition, since the upper arm unit 31b has substantially the same configuration as the lower arm unit 31a, the constituent members of the lower arm unit 31a will be described here.

The base end portion of the telescopic arm portion 32a is supported by the lower side support member 34a, and the grip portion 33a is supported at the front end portion. The grip portion 33a is for placing the workpiece W. The lower support member 34a is supported by the front end portion of the second lift arm 26 so as to be rotatable about the shaft U3. Further, the base end portion of the upper side support member 34b is fixed to the lower side support member 34a.

Then, the robot 1 transports the workpiece W in the horizontal direction so that the horizontal arm portion 30 performs the expansion and contraction operation. For example, when the robot 1 is located at the rotational position shown in FIG. 1, the robot 1 expands and contracts the telescopic arm portions 32a, 32b, and linearly moves the workpiece W in the positive or negative direction of the X-axis (see an arrow 102 in the drawing).

Further, the above-described turning operation of the turning mechanism 10, the flexing and stretching operation of the lifting arm portion 20, and the expansion and contraction operation of the horizontal arm portion 30 are based on control. The instruction of the device 5 is performed, and the control device 5 is connected to the robot 1 via a communication network.

The control device 5 is a control device that performs drive control of the robot 1. For example, a drive source for relatively rotating one of the connected pair of arms with respect to the other arm is mounted on each of the joint portions 23, 25, and 27 of the robot 1, and the control device 5 instructs the drive of these drive sources.

The drive source includes a motor unit (hereinafter simply referred to as "motor") and a speed reducer unit (hereinafter simply referred to as "reducer"). The reducer is a transmission mechanism that decelerates the rotation input from the motor and outputs it. The horizontal arm portion 30, the first lifting arm 24, and the second lifting arm 26 are coupled to the output shaft of the speed reducer.

Then, the robot 1 rotates each of the motors at an arbitrary angle in accordance with an instruction from the control device 5, and decelerates the rotation via the speed reducer, and outputs the rotation arm unit 20 to perform the flexing and stretching operation.

As the communication network connecting the robot 1 and the control device 5, for example, a general network such as a wired LAN (Local Area Network) or a wireless LAN can be used. Further, although not shown in the drawings, the same drive source is provided on the swing table 12 and the telescopic arm portions 32a and 32b, and the control device 5 also instructs driving of these drive sources.

Further, as shown in FIG. 1, the first joint portion 23 further includes an air supply fan 23a and an exhaust fan 23b. The first joint portion 23 maintains the internal pressure of the internal space in which the drive source is accommodated lower than the air pressure outside the internal space by the air flow generated by the air supply fan 23a and the exhaust fan 23b.

Next, the configuration of the first joint portion 23 will be specifically described. FIG. 2A is a front elevational view showing the periphery 23 of the first joint portion. FIG. 2B is a side view showing the periphery 23 of the first joint portion. Fig. 2C is a view showing an example of the relationship between the air supply fan 23a and the exhaust fan 23b.

As shown in FIG. 2A, the first joint portion 23 connects the proximal end portion of the first elevating arm 24 and the distal end portion of the strut portion 21. Further, as described above, the first joint portion 23 includes the air supply fan 23a and the exhaust fan 23b.

Further, as shown in FIG. 2B, the first joint portion 23 further includes a motor 23c, a speed reducer 23d, and a motor cover 23e. Further, the first joint portion 23 has an internal space SP formed by the pillar portion 21, the respective frames of the first lifting arm 24, and the motor cover 23e.

The air supply fan 23a supplies air to the internal space SP, and the exhaust fan 23b exhausts from the internal space SP.

Further, the motor 23c and the speed reducer 23d are disposed substantially coaxially with the shaft U1 and housed in the internal space SP. Further, the motor 23c and the speed reducer 23d are partitioned by the partition walls 21a that are in contact with the motor 23c and the speed reducer 23d, respectively.

Specifically, in the first joint portion 23, the motor 23c is fixed to the partition 21a of the pillar portion 21, and the speed reducer 23d is fixed to the first lifting arm 24.

The speed reducer 23d is, for example, an RV (Rotary Vector) type speed reducer, and includes a main body portion, an input portion, and an output portion. The main body portion and the input portion are fixed to the first elevating arm 24.

The input portion of the speed reducer 23d is connected to the output shaft of the motor 23c, and receives an input of the rotational force of the motor 23c. And when the rotation of the motor 23c When the force is input to the input unit, the speed reducer 23d rotates the output unit (23da, see FIG. 3A) at a rotation speed that is slower than the rotation speed of the motor 23c.

The output portion (23da) of the speed reducer 23d is fixed to the partition wall 21a of the pillar portion 21. Therefore, when the rotation of the motor 23c is input to the input portion of the speed reducer 23d, the main body portion of the speed reducer 23d relatively rotates with respect to the output portion (23da) fixed to the partition wall 21a. As a result, in the first joint portion 23, the first elevating arm 24 on the main body side of the fixed reduction gear 23d rotates, and the posture of the first elevating arm 24 with respect to the strut portion 21 changes.

Further, as shown in FIG. 2B, the exhaust fan 23b has an air filter 23ba. The air filter 23ba is high in a clean room such as a HEPA filter (High Efficiency Particulate Air Filter) or a ULPA filter (Ultra Low Penetration Air Filter). Performance filters are preferred.

Further, the exhaust fan 23b further has a casing 23bb. Further, although it is difficult to understand in FIG. 2B, the cover 23bb is formed in a shape that guides the exhaust gas flow downward beyond the air filter 23ba, and has an opening portion, for example, at the lower side. Further, the exhaust fan 23b is provided on the opposite side of the load of the motor 23c (opposite to the motor 23c, on the opposite side of the speed reducer 23d).

Further, as shown in FIG. 2A, the air supply fan 23a is provided around the first joint portion 23 as viewed from the front, that is, around the motor portion 23c (see FIGS. 2A and 2B) when viewed from the axial direction U1. Further, at this time, the air supply fan 23a is provided to blow the air supply air to the partition wall 21a described above. which is, The motor unit and the speed reducer unit are partitioned by a partition wall that is in contact with the motor unit and the speed reducer unit, and the air supply fan is disposed on the motor unit side with respect to the partition wall, and the air supply is blown toward the partition wall. be set to.

Here, an example of the relationship between the air supply fan 23a and the exhaust fan 23b will be described. In the present embodiment, the flow rate of the air supply fan 23a is set to be smaller than the flow rate of the exhaust fan 23b.

For example, as shown in FIG. 2C, when the flow rate of each of the supply fans 23a is "a", a fan having a flow rate greater than twice the flow rate "2a" is selected as the exhaust fan 23b. Here, the "flow rate" is set to the rated flow rate of each of the air supply fan 23a and the exhaust fan 23b.

In this case, the supply fan 23a is provided twice as many as the exhaust fan, that is, two, in the case where one exhaust fan 23b is provided. Therefore, here, the total flow rate of the air supply fan 23a is <the total flow rate of the exhaust fan 23b.

In the present embodiment, by combining the air supply fan 23a and the exhaust fan 23b in this manner, the internal pressure of the internal space SP is maintained lower than the air pressure outside the internal space SP by the air flow generated by these fans. Therefore, first, since the internal space SP does not become a positive pressure, it is possible to suppress scattering of particles inside the robot 1. In addition, the combination shown in FIG. 2C is only one of them, and this is unquestionable.

Returning to the description of Figure 2A. The air supply fan 23a and the exhaust fan 23b, which are selected in accordance with the combination of Fig. 2C described above, are arranged, for example, as shown in Fig. 2A, such that the height positions of the center portions are aligned and the exhaust fan 23b is disposed in the center in the lateral direction. .

Further, based on the cooling performance of the air supply fan 23a and the exhaust fan 23b, for example It is affected by many conditions such as the shape of the internal space SP and the volume of the space. Therefore, it is preferable that the arrangement of the air supply fan 23a and the exhaust fan 23b is selected based on experimental data or the like. In the present embodiment, the arrangement shown in FIG. 2A will be described.

Further, as shown in FIG. 2A, the exhaust fan 23b is preferably such that its center portion is shifted from the axis U1 by only the distance o. This is to prevent: since the exhaust fan 23b has the air filter 23ba and further covers the air filter 23ba with the casing 23bb, the minimum turning diameter of the robot 1 is enlarged by these thicknesses. The distance o is a distance corresponding to the outer shape of the casing 23bb or the like. In addition, if there is no influence on the minimum turning diameter, such deviation may not be performed.

Next, the flow of the air generated by the air supply fan 23a and the exhaust fan 23b will be specifically described using FIGS. 3A and 3B. FIG. 3A is a plan perspective view showing the periphery of the first joint portion 23 showing the flow of air. Fig. 3B is a side perspective view showing the periphery of the first joint portion 23 showing the flow of air.

As shown in FIG. 3A, first, air outside the internal space SP is supplied to the internal space SP by the air supply fan 23a (see an arrow 301 in the drawing).

Further, as shown in FIG. 3A or FIG. 3B, the air supplied to the internal space SP is blown toward the partition wall 21a by the air supply fan 23a, and the airflow flowing along the partition wall 21a is formed. At the same time, the airflow guided from the load side (reducer side) of the motor 23c along the opposite side of the load is formed by the rotation of the exhaust fan 23b (see an arrow 302 in both figures).

Further, as shown in FIG. 3A or FIG. 3B, the air guided by the exhaust fan 23b is dusted via the air filter 23ba, and then passes through the casing 23bb. It is guided downward and discharged (see arrow 303 in the two figures).

Here, the effect obtained by such air flow will be described. First, the speed reducer 23d is mainly cooled by the air blown to the partition wall 21a. This is because the partition wall 21a functions as a so-called heat sink and diffuses the heat of the speed reducer 23d that is in contact with the partition wall 21a in the output portion 23da.

Therefore, at least the partition 21a is preferably a metal material such as aluminum having good thermal conductivity. Further, it is also possible to provide a heat sink in the partition wall 21a to further improve the cooling efficiency.

Further, the motor 21c is subjected to heat dissipation by the partition wall 21a together with the speed reducer 23d, and is also dissipated by the air flowing along the motor 21c. This is effective for cooling the motor 21c which is more likely to be at a higher temperature than the speed reducer 23d.

Further, as described above, since the internal pressure of the internal space SP is maintained lower than the air pressure outside the internal space SP by the air flow generated by the air supply fan 23a and the exhaust fan 23b, the scattering of the fine particles in the internal space SP is obtained. inhibition.

Further, since the air in the internal space SP is further filtered by the air filter 23ba which is a high-performance filter, the clean air can be discharged to the outside from the inside of the internal space SP. That is, the drive source can be cooled while maintaining the cleanliness of the clean environment.

Further, in the case of the robot 1 according to the present embodiment, when the workpiece W is conveyed in the vertical direction, there is an advantage that contamination of the workpiece W can be more effectively prevented. This point will be specifically described using FIG. 3C.

FIG. 3C is a schematic view showing a state in which the workpiece W is located below the first joint portion 23 . Further, in FIG. 3C, the robot 1 is shown extremely schematically using reference numerals indicating joints.

As shown in FIG. 3C, the robot 1 may take a posture in which the first joint portion 23, the second joint portion 25, and the third joint portion 27 are rotated when the workpiece W is transported in the vertical direction, and the horizontal arm portion 30 is rotated. The held workpiece W is located below the first joint portion 23 .

Even in the case where such a posture is adopted, according to the present embodiment, it is possible to cool the drive source without contaminating the workpiece W. That is, the motor 23c and the speed reducer 23d can be effectively cooled as described above by using the air flow generated by the air supply fan 23a and the exhaust fan 23b.

In addition, the internal pressure of the internal space SP is maintained lower than the air pressure outside the internal space SP by the air flow generated by the air supply fan 23a and the exhaust fan 23b, and the scattering of the particles in the internal space SP is suppressed while the internal space is The particles in the SP are further dusted through the air filter 23ba.

Then, the dust-removed air is further discharged toward the slightly lower side of the first joint portion 23. Therefore, even when the robot 1 assumes the posture of FIG. 3C, it is possible to prevent the workpiece W from being contaminated by the exhaust gas. That is, the drive source can be cooled while maintaining the cleanliness of the clean environment.

In addition, in the present embodiment, the air supplied from the air supply fan 23a is directly blown to the motor 23c and the speed reducer 23d, and is blown toward the partition wall 21a. Therefore, it can be prevented from being in the motor 23c and the speed reducer 23d. Condensation occurs.

In addition, at this point, the gas supply selected in the combination of FIG. 2C described above is used. The arrangement in which the fan 23a and the exhaust fan 23b are arranged such that the height positions of the center portions are aligned is illustrated as an example, but the arrangement is not limited thereto.

Fig. 4A is a front elevational view showing the vicinity of a first joint portion 23A according to a first modification. 4B is a front elevational view showing the vicinity of the first joint portion 23B according to the second modification.

For example, as shown in FIG. 4A, as shown in FIG. 4A, the air supply fan 23a and the exhaust fan 23b may be arranged sideways in the horizontal direction, and the air supply fan 23a may be arranged to be inclined with respect to the horizontal direction. .

Further, for example, as a second modification, as shown in FIG. 4B, a combination of the air supply fan 23a×2 and the exhaust fan 23b×1 arranged in the horizontal direction in the horizontal direction may be arranged in two groups. .

As described above, the arrangement of the first modification and the second modification may be such that the cooling efficiency is optimized in accordance with various conditions such as the shape of the internal space SP and the space volume.

Further, at this point, the flow rate of the air supply fan 23a is set to be smaller than the flow rate of the exhaust fan 23b, and the flow rate is the rated flow rate of the air supply fan 23a and the exhaust fan 23b. However, for example, the same rated flow rate may be used.

In this case, the flow rate is set to the amount of the actually flowing air, and the respective rotation speeds of the air supply fan 23a and the exhaust fan 23b are appropriately controlled so that the flow rate of the air supply fan 23a is smaller than the flow rate of the exhaust fan 23b. can.

This is a connection structure in which the rotation of the air supply fan 23a and the exhaust fan 23b can be controlled by the control device 5, and the internal pressure of the internal space SP is appropriately detected by a pressure sensor or the like and output to the control device 5 to realise.

Further, a temperature sensor may be provided in the vicinity of the exhaust fan 23b, and the temperature of the exhaust gas from the exhaust fan 23b may be sequentially monitored by the control device 5, and based on the temperature, the control device 5 controls the air supply fan 23a. And the respective rotational speeds of the exhaust fans 23b.

As described above, the drive mechanism (first joint portion) according to the first embodiment includes a drive source, an internal space, an air supply fan, and an exhaust fan. The internal space accommodates the above drive source. The air supply fan supplies air to the internal space. The exhaust fan is exhausted from the internal space.

Further, the drive mechanism maintains the internal pressure of the internal space lower than the air pressure outside the internal space by the air flow generated by the air supply fan and the exhaust fan.

Therefore, according to the drive mechanism of the first embodiment, the drive source can be cooled while maintaining the cleanliness of the clean environment.

However, at this point, the case where the robot is a single-link robot has been described as an example, but the robot may be a two-link type. This case will be described as a second embodiment using FIG. 5.

(Second embodiment)

Fig. 5 is a schematic perspective view of the robot 1a according to the second embodiment. Further, in the second embodiment, only constituent elements different from the first embodiment will be mainly described.

As shown in FIG. 5, the robot 1a includes a base 11, a swing table 12, a first lifting arm portion 20-1, and a second lifting arm portion 20-2. The first lifting arm portion 20-1 includes a pillar portion 21-1 and a first joint portion 23-1. and Further, the second lifting arm portion 20-2 includes a pillar portion 21-2 and a first joint portion 23-2.

The pillar portions 21-1 and 21-2 are respectively erected at both end portions of the right and left turntables 12 that are swung around the turning axis S. The first joint portions 23-1 and 23-2 have the distal end portions of the column portions 21-1 and 21-2 and the proximal end portions of the links adjacent thereto (see the first lifting arm 24 of Fig. 1). It can be connected so as to rotate around the axes U1-1 and U1-2, respectively.

That is, as shown in FIG. 5, the robot 1a is a two-link robot having two lifting arm portions (20-1, 20-2) extending from the two pillar portions (21-1, 21-2). .

With such a two-link type, the robot 1a can obtain high rigidity realized by the two lift arm portions (20-1, 20-2), so that high-precision conveyance in the vertical direction with small deflection can be realized. This is useful for the case where the workpiece W is a large workpiece or the like.

Further, the drive mechanism D according to the present embodiment is suitably used as the first joint portions 23-1 and 23-2 of the robot 1a. When the workpiece W is conveyed in the vertical direction, the robot 1a can cool the driving source even when the workpiece W held by the horizontal arm unit 30 is placed at a position lower than the first joint portion 23. The workpiece W is not contaminated by the exhaust gas.

The robot having the driving device according to the above-described embodiment further includes: at least one pillar portion that is erected; the arm portion that is rotatably coupled to the pillar portion via the driving mechanism; and the arm portion And supporting the support portion of the substrate; even if the substrate is located below the drive mechanism due to the rotation of the arm portion, the substrate is not taken from the row The exhaust flow of the air fan is polluted.

Further, in each of the above embodiments, the robot may be configured as a high-stroke robot, but may be a low-stroke robot.

In each of the above-described embodiments, the first joint portion of the lift arm portion is mainly described as an example. However, as long as the link that is connected to the link portion that is vertically erected is relatively rotated, the joint is rotated. Not limited to parts.

Further, in each of the above-described embodiments, the case where the drive mechanism is used as the joint mechanism of the robot has been described as an example, but the present invention is not limited thereto. Therefore, for example, the drive mechanism may be provided in a device other than the robot, and only the driving force of the drive source is output to the outside.

Further, in each of the above-described embodiments, the case where the air supply fan is provided with twice the number of exhaust fans has been described as an example, but the ratio of the number of the air supply fan and the exhaust fan is not limited. . Therefore, it is only necessary to obtain the optimum ratio of the cooling efficiency in accordance with the shape of the internal space or the like.

Moreover, in each of the above-described embodiments, the case where the robot is a transport robot that transports the glass substrate has been described as an example, but the type of the object to be transported is not limited. Further, the robot may be a robot that performs work other than the transport operation.

Further, the number of arms of the robot, the number of hands, the number of axes, and the like are not limited to the above embodiments.

Further effects and modifications of the present invention can be easily derived by those having ordinary skill in the art to which the present invention pertains. Therefore, the broader manner of the present invention is not limited to the specific details and typical examples shown and described above. Way of application. Therefore, various modifications can be made without departing from the spirit and scope of the inventions.

21‧‧‧ Pillars

21a‧‧‧ next door

23‧‧‧1st joint

23a‧‧‧Air supply fan

23b‧‧‧Exhaust fan

23c‧‧‧Motor

23d‧‧‧Reducer

23e‧‧ motor cover

23ba‧‧ air filter

23bb‧‧‧Shell

23da‧‧‧Output Department

24‧‧‧1st lifting arm

301‧‧‧ arrow

302‧‧‧ arrow

303‧‧‧ arrow

SP‧‧‧Internal space

Claims (9)

A robot having a driving mechanism having: a driving source; an internal space accommodating the driving source; an air supply fan supplying air to the internal space; and an exhaust fan exhausting from the internal space; The drive mechanism maintains an internal pressure of the internal space lower than a pressure outside the internal space by using an air flow generated by the air supply fan and the exhaust fan, and one of a pair of connected links is opposed to each other. Perform relative rotation on the other side. The robot of claim 1, wherein the rated flow rate of the aforementioned air supply fan is smaller than the rated flow rate of the exhaust fan. The robot according to claim 2, wherein the air supply fan is provided in a number of times of the exhaust fan. The robot according to claim 1, 2 or 3, wherein the driving source includes a motor unit and a speed reducer unit that reduces rotation input from the motor unit and outputs the rotation. The robot according to claim 4, wherein the air supply fan is disposed around the motor portion when viewed from an axial direction of the drive source, and the exhaust fan is disposed on a side opposite to a load of the motor portion. The robot according to claim 5, wherein the motor unit and the speed reducer unit are partitioned by a partition wall that is in contact with the motor unit and the speed reducer unit, and the air supply fan is disposed on the partition wall. The motor portion side is provided so as to blow a supply airflow to the partition wall. The robot of any one of claims 1 to 3, wherein the exhaust fan has an air filter. The robot according to any one of claims 1 to 3, wherein the exhaust fan has a cover formed in a shape that guides the exhaust gas flow downward. The robot according to any one of claims 1 to 3, further comprising: at least one pillar portion erected; the arm portion being coupled to be rotatable relative to the pillar portion via the driving mechanism; and supporting The portion is coupled to the arm portion and supports the substrate. Even if the substrate is positioned lower than the robot due to the rotation of the arm portion, the substrate is not contaminated by the exhaust flow from the exhaust fan.