TWI539989B - Heat recovery apparatus - Google Patents

Description

Heat recovery unit

The present invention relates to a heat recovery apparatus for recovering the heat of a high temperature gas and heating the low temperature gas.

A firing furnace is used in the manufacturing steps of the liquid crystal display panel or the like. In the firing furnace, the gas evaporated from the workpiece contains an evapotranspiration of organic matter. Evapotranspiration can adversely affect the workpiece. Therefore, the furnace must be ventilated in the firing furnace. The internal temperature of the firing furnace is lowered by the ventilation. Therefore, heat exchange is performed between the exhaust in the furnace and the inhalation into the furnace.

A device for recovering the heat of such a high-temperature gas and heating the low-temperature gas is known (for example, refer to Patent Documents 1 to 3).

(Patent Document 1) Japanese Patent Laid-Open Publication No. 2002-191920

(Patent Document 2) Japanese Patent Laid-Open Publication No. 2001-154739

(Patent Document 3) Japanese Patent Laid-Open Publication No. 2002-200473

It is desirable for the industry to increase the heat recovery efficiency of a heat recovery device that heats the low temperature gas while recovering the heat of the high temperature gas. Moreover, it is also desirable to suppress the manufacturing cost of the heat recovery device.

It is an object of the present invention to provide a heat recovery device which is more conventionally known The heat recovery device can improve heat recovery efficiency and can suppress manufacturing costs.

The heat recovery device of the present invention has a heat exchanger and a preheating chamber. The heat exchanger has a heat absorbing area and a heat absorbing area. The heat absorbing region is disposed on the aeration path of the high temperature gas and absorbs heat from the high temperature gas. The heat dissipation area is disposed on the aeration path of the low temperature gas and dissipates the heat to the low temperature gas. The preheating chamber is disposed in front of the heat dissipating region in the aeration path of the low temperature gas, and allows the low temperature gas to absorb the leaked heat. The leaked heat is the heat leaked from at least one of the aeration path of the high temperature gas and the heat absorption zone.

Therefore, the heat exchanger recovers heat from the high temperature gas to the low temperature gas. Further, the preheating chamber recovers the heat leaked from the high temperature gas to the low temperature gas. Thereby, the heat recovery efficiency of the heat recovery device can be improved. Moreover, it is not necessary to insulate the ventilation path of the high temperature gas. Therefore, the heat insulating material provided in the heat recovery device can be suppressed, thereby suppressing the manufacturing cost.

When the high temperature gas contaminated by the evapotranspiration of the organic matter is ventilated by the heat recovery device, it is preferable that the heat recovery device includes a purification unit. The purification unit is disposed in front of the heat absorption region in the ventilation path of the high-temperature gas to decompose the organic component contained in the high-temperature gas. In the preheating chamber, the low temperature gas is absorbed by the heat leaked from the outer wall of the purification portion.

The preheating chamber may also have a main preheating chamber and a secondary preheating chamber. The main preheating chamber is provided with a heat absorption area and a purification unit. The sub-preheating chamber is disposed in a portion of the main preheating chamber in the aeration path of the low temperature gas and in front of the heat dissipating region.

It is also possible to have a heat dissipation area in the sub preheating room. At this time, it is preferable that the intake port of the high-temperature gas aeration path and the exhaust port of the low-temperature gas aeration path face in the same direction.

The heat recovery device may also include a blower unit. The blower unit is installed in the ventilation of high temperature gas The fluid absorption pressure of the high temperature gas is adjusted in the subsequent section of the endothermic region in the path and in front of the exhaust port in the aeration path of the high temperature gas.

According to the present invention, the heat recovery device can recover heat leaked from the aeration path of the high temperature gas, and the heat recovery efficiency can be improved by a conventional heat recovery device. Therefore, the heat insulating material or the like can be suppressed, so that the manufacturing cost can be reduced.

1‧‧‧ outer casing

2‧‧‧High greenhouse

3‧‧‧low greenhouse

4‧‧‧Heat exchange unit

5‧‧‧Exhaust air blower

6‧‧‧Control Department

11‧‧‧Control room

12‧‧‧Main preheating room

13‧‧‧Deputy preheating room

14‧‧ ‧Baffle

15‧‧‧ vent

16‧‧‧High temperature gas suction port

17‧‧‧High temperature gas exhaust

18‧‧‧Cryogenic gas suction port

19‧‧‧Cryogenic gas vents

21‧‧‧Filter room

22‧‧‧ Purification Department

23‧‧‧heat absorption area

31‧‧‧heating area

41‧‧‧ catheter

100‧‧‧heat recovery unit

Fig. 1 is a side sectional view showing an example of a heat recovery device.

Fig. 2 is a perspective view showing an example of a heat exchange unit of the heat recovery device.

Hereinafter, a configuration example of the heat recovery device will be described with reference to the drawings. Here, the heat recovery device is used for the ventilation of a multi-stage firing furnace used in the manufacturing steps of the liquid crystal display panel. The exhaust gas from the multi-stage firing furnace contains an organic component which is generated by evapotranspiration of a binder or the like. The heat recovery device discharges the exhaust gas to the outside of the furnace and draws the outside air into the firing furnace.

Figure 1 is a side cross-sectional view of a heat recovery device. Here, the heat recovery device 100 of a fixed configuration is shown. Further, a moving roller or the like is provided on the bottom surface of the heat recovery device 100, and the heat recovery device 100 may be movable.

The heat recovery device 100 has an outer casing 1. The inside of the outer casing 1 is divided into a control chamber 11, a main preheating chamber 12, and a sub preheating chamber 13. A control unit 6 is mounted in the control room 11. The main preheating chamber 12 houses a high temperature chamber 2 and an air blower 5 . A low temperature chamber 3 is installed in the sub preheating chamber 13. A high temperature gas intake port 16, a high temperature gas exhaust port 17, and a low temperature gas intake port 18 are provided on the wall surface of the casing 1 which constitutes the main preheating chamber 12. Outside the housing 1 constituting the sub-preheating chamber 13 The wall is provided with a low temperature gas exhaust port 19. A barrier rib 14 is provided between the main preheating chamber 12 and the sub preheating chamber 13. A vent 15 for venting between the main preheating chamber 12 and the sub preheating chamber 13 is provided on the barrier wall 14.

The control chamber 11 is separated from the main preheating chamber 12 and the sub preheating chamber 13. Further, the control room 11 is surrounded by a heat insulating material (not shown). Therefore, heat conduction from the autonomous preheating chamber 12 and the sub preheating chamber 13 to the control chamber 11 is suppressed. The control unit 6 controls the purge blower 5 to maintain the ventilation capacity of the heat recovery device 100. Further, the control unit 6 notifies the administrator of the fact that the ventilation capacity of the heat recovery device 100 has decreased in the form of a warning sound or a warning display.

The low-temperature greenhouse 3 is a tubular member having a rectangular cross section in the flow path direction. Both ends of the low greenhouse 3 are open. Further, the cross-sectional area near the both ends is smaller than the cross-sectional area of the central portion. One end of the low temperature chamber 3 is retracted from the low temperature gas exhaust port 19 to the outside of the outer casing 1. This end discharges the outside air into a firing furnace (not shown). The other end of the low temperature chamber 3 is disposed inside the sub preheating chamber 13. A heat dissipation area 31 is provided inside the low temperature chamber 3.

The heat dissipating region 31 dissipates heat to the outside air taken in from the sub preheating chamber 13. Therefore, a portion of the heat exchange unit 4 is disposed inside the heat dissipation region 31. The configuration of the heat exchange unit 4 will be described later in detail.

The high-temperature greenhouse 2 is a cylindrical member having a rectangular cross section in the flow path direction. Both ends of the high greenhouse 2 are open. Further, the cross-sectional area near the both ends is smaller than the cross-sectional area of the central portion. One end of the high temperature chamber 2 is retracted from the high temperature gas suction port 16 to the outside of the outer casing 1. This end suctions the exhaust gas from a firing furnace not shown. The other end of the high temperature chamber 2 is disposed inside the main preheating chamber 12. A filter chamber 21, a purifying portion 22, and a heat absorbing region 23 are provided inside the high temperature chamber 2.

The filter chamber 21 removes dust and oil mist from the exhaust gas of the firing furnace. Therefore, in the filter chamber 21 A plurality of filter particles are stacked. By using the filter particles, even if the heat recovery device 100 is in operation, the exchange of the filter particles can be performed, so that the high cleanliness in the filter chamber 21 can be maintained. Therefore, dust and oil mist are not attached to the purifying portion 22 in the subsequent stage. Thereby, it is possible to prevent the ability of the catalyst in the purification unit 22 to decompose the organic matter due to the adhesion of dust and oil mist, and the number of maintenance of the purification unit 22 can be reduced.

Further, although not shown, a pressure detecting portion is provided directly in front of and behind the filter chamber 21. The fluid pressure data of the exhaust gas detected by the pressure detecting unit is output to the control unit 6. The control unit 6 detects the clogging of the filter chamber 21 based on the pressure change. Then, when a jam occurs, a warning tone or a warning display indicating the situation is output. Further, the purge capability of the purge blower 5 is adjusted to stabilize the pressure change and stabilize it.

The purification unit 22 decomposes the organic component in the exhaust gas passing through the filtration chamber 21. Therefore, a catalyst (here, a platinum catalyst with a heater) is provided inside the purification unit 22. The organic component is oxidized by the catalyst to decompose the organic component in the exhaust gas into carbon dioxide or the like. Therefore, the organic component does not flow into the endothermic region 23 of the rear stage. Therefore, it is possible to prevent the heat exchange rate of the heat absorbing region 23 from being lowered due to the organic component, and the number of maintenance of the heat absorbing region 23 can be reduced. Further, the exhaust gas flowing into the purification unit 22 is heated by the catalyst. Specifically, the temperature of the exhaust gas is raised by about 10 ° C to 100 ° C by the heat generated by the heating of the heater and the decomposition reaction of the organic matter. Therefore, more heat exchange can be performed in the endothermic region 23 of the rear stage.

Further, although not shown, a temperature detecting unit is provided directly in front of and behind the purification unit 22. The temperature data of the exhaust gas detected by the temperature detecting unit is output to the control unit 6. The control unit 6 detects the organic matter decomposition ability of the catalyst based on the temperature change. Then, when organic matter When the resolution capability drops below the established value, a warning tone or warning display indicating the situation is output.

The heat absorption region 23 recovers heat from the exhaust gas passing through the purification portion 22. Therefore, a portion of the heat exchange unit 4 is disposed inside the heat absorption region 23. The other part of the heat exchange unit 4 is also disposed in the heat dissipation area 31 of the low temperature chamber 3.

Here, a configuration example of the heat exchange unit 4 will be described based on Fig. 2 .

2 is a perspective view showing a part of the heat exchange unit 4. The heat exchange unit 4 has a plurality of ducts 41 arranged in two dimensions. The interior of each conduit 41 is a cavity in which an actuating fluid is sealed. Each of the ducts 41 is disposed through a hole 14 provided between the main preheating chamber 12 and the sub preheating chamber 13, a top plate of the high temperature chamber 2, and a hole in the bottom plate of the low temperature chamber 3. Therefore, one end side of each of the ducts 41 is disposed in the heat absorption region 23 inside the high temperature chamber 2. The other end side of each duct 41 is disposed in the heat dissipation area 31 inside the low temperature chamber 3. Further, although not shown, fins perpendicular to the respective axial directions are formed in the respective ducts 41. Further, an airtight member that maintains the airtightness inside the high temperature chamber 2 and the inside of the low temperature chamber 3 is provided between each of the ducts 41 and the barrier ribs 14.

The actuating fluid inside the duct 41 absorbs the heat of the exhaust gas and evaporates in the heat absorbing region 23 in the high temperature chamber 2. Then, the actuating fluid is condensed and liquefied in the heat radiating region 31 in the low temperature chamber 3 to dissipate the heat into the outside air. Thereby, the high temperature gas in the high temperature chamber 2 is cooled, and the low temperature gas in the low temperature chamber 3 is heated. For the heat exchange unit 4, heat energy can be efficiently exchanged even if there is a small temperature difference.

The purge blower 5 is connected to the other end of the high temperature chamber 2. The purge blower 5 applies a negative pressure to the inside of the high-temperature chamber 2 by adjusting the rotational speed of the rotating internal fins, thereby attracting the exhaust gas. Exhaust gas attracted by the air blower 5 is discharged from the high temperature gas exhaust port 17 It is outside the heat recovery device 100.

The purge blower 5 discharges the exhaust gas to the outside of the heat recovery device 100, and applies a negative pressure to the inside of the high temperature chamber 2. The high-temperature greenhouse 2 applies a negative pressure to a baking furnace (not shown) via the high-temperature gas intake port 16. This baking furnace applies a negative pressure to the inside of the low-temperature greenhouse 3 via the low-temperature gas exhaust port 19. The low temperature chamber 3 applies a negative pressure to the inside of the sub-preheating chamber 13. The sub-preheating chamber 13 applies a negative pressure to the inside of the main preheating chamber 12 via the vent 15 . The main preheating chamber 12 draws in outside air from the outside of the heat recovery device 100 via the low temperature gas intake port 18.

The air taken in from the low-temperature gas intake port 18 flows along the outer wall surfaces of the air blower 5 and the high-temperature chamber 2. During this period, the outside air absorbs the heat leaked from the air blower 5 and the high temperature chamber 2. Thereafter, the outside air is sucked into the interior of the sub-heat preheating chamber 13 via the vent 15 and the autonomous preheating chamber 12. Thereafter, inside the sub-preheating chamber 13, the outside air flows along the outer wall surface of the low-temperature chamber 3. During this period, the outside air absorbed the heat leaked from the low greenhouse 3. Thereafter, the outside air is sucked into the interior of the low temperature chamber 3. During this period, the outside air absorbs heat in the heat dissipation area 31 inside the low temperature chamber 3. Thereafter, the outside air is discharged from the low temperature gas exhaust port 19 to the firing furnace.

Therefore, the heat recovery device 100 can recover heat from the high-temperature exhaust gas of the firing furnace to the low-temperature outside air by the heat exchange unit 4, and can recover the leaked heat leaked from the outer wall surface of the high-temperature greenhouse 2. Therefore, the heat recovery efficiency of the heat recovery device 100 is extremely high. Thereby, it is not necessary to provide a heat insulating material on the surface other than the high temperature chamber 2 and the low temperature chamber 3, so that the manufacturing cost can be reduced.

Moreover, since the organic component in the exhaust gas is removed in the purification unit 22, it is possible to eliminate the contamination of the external air by the organic component. At this time, the heat energy generated by the decomposition of the organic component is also a part of the heat of recovery. Moreover, dust and oil mist in the exhaust gas are removed in the filter chamber 21, but filter particles which can be replenished and taken out during operation are used, thereby improving maintainability and heat generation. The operation time and life of the recovery device 100.

Here, the vent 15 provided on the barrier rib 14 between the main preheating chamber 12 and the sub preheating chamber 13 is moved away from the low temperature gas intake port 18 and approaches the high temperature gas intake port 16 and the low temperature gas exhaust port 19. Thereby, it is ensured that the ventilation path of the low-temperature gas in the main preheating chamber 12 is long, and the leakage of heat as the low-temperature gas can be sufficiently absorbed. Further, the high temperature gas intake port 16 and the low temperature gas exhaust port 19 of the outer casing 1 are disposed on the same side surface. Thereby, the intake port of the high-temperature gas aeration path and the exhaust port of the low-temperature gas ventilation path face in the same direction. Therefore, the pipe can be easily connected to the firing furnace by facing the side surface of the outer casing 1 in the direction of the firing furnace. Further, the high temperature gas intake port 16 and the low temperature gas exhaust port 19 are not necessarily provided on the same side surface of the outer casing 1.

The description of the above embodiments is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is set forth by the scope of the claims instead of the embodiments. Further, it is to be understood that within the scope of the invention, all modifications and equivalents are intended to be included within the scope of the invention.

1‧‧‧ outer casing

2‧‧‧High greenhouse

3‧‧‧low greenhouse

5‧‧‧Exhaust air blower

6‧‧‧Control Department

11‧‧‧Control room

12‧‧‧Main preheating room

13‧‧‧Deputy preheating room

14‧‧ ‧Baffle

15‧‧‧ vent

16‧‧‧High temperature gas suction port

17‧‧‧High temperature gas exhaust

18‧‧‧Cryogenic gas suction port

19‧‧‧Cryogenic gas vents

21‧‧‧Filter room

22‧‧‧ Purification Department

23‧‧‧heat absorption area

31‧‧‧heating area

100‧‧‧heat recovery unit

Claims (6)

A heat recovery device comprising: a ventilation path of a high temperature gas; a ventilation path of the low temperature gas disposed discontinuously with the ventilation path of the high temperature gas; and a heat exchanger at a ventilation path belonging to the high temperature gas a part of the heat absorbing region absorbs heat from the high temperature gas, and releases heat to the low temperature gas in a heat releasing portion of a portion of the venting path belonging to the low temperature gas; the venting path of the high temperature gas is provided with: a heat absorbing region The internal portion is a member in which the heat absorbing region is provided inside, and the high temperature gas is released from heat absorbed in the heat absorbing region; and the ventilating path of the low temperature gas includes a heat releasing region inner portion, which is a member having the heat-releasing region disposed therein, wherein the low-temperature gas absorbs heat released in the heat-releasing region; and the sub-heating chamber is disposed in a front portion of the heat-receiving region, and the heat radiation is disposed inside a portion in the region, and the low temperature gas is absorbed from the outer wall of the inner portion of the heat releasing region And a main preheating chamber disposed at a front portion of the heat generating region, wherein the heat absorbing region inner portion is disposed inside, and the low temperature gas is absorbed from a wall surface of the high temperature gas The heat leaked. The heat recovery device of claim 1, wherein the inner portion of the heat absorption region is a high temperature, and the inner portion of the heat release region is low temperature. room. The heat recovery apparatus according to claim 2, further comprising an outer casing provided with a barrier partitioning the main preheating chamber and the sub preheating chamber, and being provided in the main preheating chamber to be externally connected a high temperature gas intake port, a high temperature gas exhaust port, and a low temperature gas intake port, wherein the sub preheating chamber is provided with a low temperature gas exhaust port communicating with the outside, and the barrier wall is provided with the main preheating chamber and the above a venting port connected to the sub-preheating chamber; the low-temperature greenhouse is cylindrical, one end of which is retracted from the low-temperature gas exhaust port to the outside of the outer casing and opened, and the other end is opened inside the sub-preheating chamber; The high-temperature greenhouse is cylindrical, and one end thereof is retracted from the high-temperature gas intake port to the outside of the outer casing and opened, and the other end is connected to the high-temperature gas exhaust port. The heat recovery device of claim 3, wherein the low temperature gas is ventilated from the low temperature gas intake port to the low temperature gas exhaust port via the main preheating chamber, the sub preheating chamber, and the low temperature greenhouse Through the high-temperature greenhouse, the high-temperature gas is ventilated from the high-temperature gas intake port to the high-temperature gas exhaust port. The heat recovery apparatus according to claim 4, further comprising: a purification unit installed in a front portion of the heat absorption region in a ventilation path of the high temperature gas contaminated by the evapotranspiration of the organic matter, and decomposing the high temperature gas The organic preheating chamber is configured to cause the low temperature gas to absorb heat leaked from the purification unit. For example, the heat recovery device of claim 5, wherein The blower unit is provided to be disposed in a stage before the heat absorption region in the ventilation path of the high-temperature gas and in front of the exhaust port of the high-temperature gas ventilation path, and adjust the fluid pressure of the high-temperature gas.