TWI513848B - Hybrid gas injector - Google Patents
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- TWI513848B TWI513848B TW099132464A TW99132464A TWI513848B TW I513848 B TWI513848 B TW I513848B TW 099132464 A TW099132464 A TW 099132464A TW 99132464 A TW99132464 A TW 99132464A TW I513848 B TWI513848 B TW I513848B
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Description
本發明大致關於半導體晶圓的熱處理。尤其是，本發明係關於在一熱處理爐中的氣體注射器。The present invention generally relates to heat treatment of semiconductor wafers. In particular, the invention relates to a gas injector in a heat treatment furnace.
在矽積體電路之製造中的若干階段持續使用著批次熱處理。一低溫熱製程藉由化學汽相沈積來沈積一層矽氮化物，通常在大約700℃的溫度範圍內使用氯矽烷及氨作為前驅物氣體。其他的低溫製程包含多晶矽或二氧化矽之沈積或其他利用低溫之製程。高溫製程包含氧化、退火、矽化及其他通常用到高溫的製程，例如1000℃以上或甚至1200℃。Batch heat treatment is continuously used in several stages in the manufacture of the plenum circuit. A low temperature thermal process deposits a layer of niobium nitride by chemical vapor deposition, typically using chlorodecane and ammonia as precursor gases in a temperature range of about 700 °C. Other low temperature processes include the deposition of polysilicon or cerium oxide or other processes that utilize low temperatures. High temperature processes include oxidation, annealing, deuteration, and other processes typically used at elevated temperatures, such as above 1000 ° C or even 1200 ° C.
大規模的商用生產通常用垂直爐及垂直配置的晶圓塔以支撐爐中的大量晶圓，通常在如圖1所繪示之截面圖的結構中。該爐包含一熱絕緣加熱器筒12，其係用於支撐一電阻加熱線圈14，該電阻加熱線圈由一如圖示之電源供應供電。通常由石英組成之一鐘罩16包含一頂部且裝配於該加熱線圈14中。一具開啟端之內襯18可被使用，其係裝配於該鐘罩16中。一支撐塔20坐落於一台座22上並且在處理期間該台座22及支撐塔20大致被該內襯18圍繞。該塔20包含垂直配置的狹槽，其係用於固持待於批次模式中進行熱處理之多個水平地佈置的晶圓。主要佈置於該塔20與該內襯18之間的一氣體注射器24在其上端有一出口，用於注射製程氣體於該內襯18內。通常而言，在沿著多個高度處之不同長度的多個氣體注射器24注射該製程氣體。未繪示之一真空幫浦移除通過該鐘罩16之底部的該製程氣體。該加熱器筒12，鐘罩16及內襯18可被垂直抬起以允許晶圓被轉移至該塔20及自該塔20轉移出來，雖然在一些組態中此等元件保持靜止而一升降機提升及降低該台座22及經負載之塔20進出該爐10之底部。Large-scale commercial production typically uses vertical furnaces and vertically configured wafer towers to support a large number of wafers in the furnace, typically in the configuration of the cross-sectional view as depicted in FIG. The furnace includes a thermally insulated heater cartridge 12 for supporting a resistive heating coil 14, which is powered by a power supply as shown. A bell jar 16 generally composed of quartz includes a top portion and is assembled in the heating coil 14. An open end liner 18 can be used that fits within the bell jar 16. A support tower 20 is seated on a pedestal 22 and the pedestal 22 and support tower 20 are generally surrounded by the lining 18 during processing. The tower 20 includes vertically disposed slots for holding a plurality of horizontally disposed wafers to be heat treated in batch mode. A gas injector 24, primarily disposed between the column 20 and the liner 18, has an outlet at its upper end for injecting process gas into the liner 18. Generally, the process gas is injected at a plurality of gas injectors 24 of different lengths along a plurality of heights. A vacuum pump is not shown to remove the process gas passing through the bottom of the bell jar 16. The heater cartridge 12, the bell jar 16 and the liner 18 can be lifted vertically to allow the wafer to be transferred to and from the tower 20, although in some configurations the components remain stationary and a lift The pedestal 22 and the loaded tower 20 are raised and lowered to enter and exit the bottom of the furnace 10.
鐘罩18在其上端上封閉，導致爐10在其中間及上面部分趨於具有一大致一致的熱溫度。這被稱為熱區，在該熱區中溫度被控制用於最優化熱製程。然而，該內襯18之開啟底端及該台座22之機械式支架導致該爐之低端具有一較低的溫度，通常足夠低使得如化學汽相沈積之製程不能完全有效。該熱區可排除該塔20之一些較低狹槽。The bell jar 18 is closed at its upper end, causing the furnace 10 to tend to have a substantially uniform thermal temperature at its intermediate and upper portions. This is referred to as a hot zone where temperature is controlled to optimize the thermal process. However, the open end of the liner 18 and the mechanical support of the pedestal 22 result in a lower temperature at the lower end of the furnace, typically low enough that the process such as chemical vapor deposition is not fully effective. This hot zone can exclude some of the lower slots of the tower 20.
習知在低溫應用中，該塔、內襯及注射器由石英或熔融矽石組成。然而，石英塔及石英注射器正被矽塔及矽注射器所取代。圖2之正視圖繪示可購自美國加州Sunnyvale之Integrated Materials公司的一矽塔之一組態。此一塔的製造係由Boyle等人描述於美國專利第6,455,395號中，其係藉由引用併入本文。矽內襯已經由Boyle等人在美國經公告之專利申請案第2002/0170486號中提出。Conventionally, in cryogenic applications, the column, liner and syringe consist of quartz or fused vermiculite. However, quartz towers and quartz syringes are being replaced by towers and helium injectors. Figure 2 is a front elevational view showing one configuration of a stack of towers available from Integrated Materials, Sunnyvale, California. The manufacture of this column is described in U.S. Patent No. 6,455,395, the disclosure of which is incorporated herein by reference. The lining has been proposed by Boyle et al. in U.S. Patent Application Serial No. 2002/0170486.
Zehavi等人揭示一矽注射器24，其係繪示於圖2之正視圖中，且其製造方法揭示於美國經公告之專利申請案第2006/0185589號中。其包含一注射器桿26(亦稱為一管)及一連接器28(亦已知為一關節)。該連接器28包含一供應管20及一肘管32，該肘管具有一凹部以接收該注射器桿26。該供應管30可具有一大約4毫米至8毫米的外直徑並具有一相應大小的內圓孔34。該供應管30穿過該爐之下歧管。Zehavi et al. disclose a syringe 24, which is depicted in the front view of FIG. 2, and is disclosed in U.S. Patent Application Serial No. 2006/0185589. It includes a syringe shaft 26 (also referred to as a tube) and a connector 28 (also known as a joint). The connector 28 includes a supply tube 20 and an elbow 32 having a recess for receiving the syringe shaft 26. The supply tube 30 can have an outer diameter of about 4 mm to 8 mm and have a correspondingly sized inner circular aperture 34. The supply tube 30 passes through the manifold below the furnace.
該供應管30之末端可透過一真空配件及O型環(諸如一Ultratorr配件)連接至氣體供應管線，該氣體供應管線供應所需的氣體或氣體混合物進入該爐，例如，用於矽氮化物之CVD沈積的氨及矽烷。根據Boyle等人的美國專利第6,450,346號中描述之方法，該整個一體之連接器28可由經退火的原生多晶矽機械加工而來。該機械加工包含將該供應孔34連接至接收該桿的凹部。或者，將一分離管30裝入且結合至經分開機械加工之肘管32來組裝連接器28。The end of the supply tube 30 can be connected to a gas supply line through a vacuum fitting and an O-ring, such as an Ultrorator fitting, which supplies a desired gas or gas mixture into the furnace, for example, for niobium nitride CVD deposited ammonia and decane. The entire unitary connector 28 can be machined from annealed native polycrystalline crucibles according to the method described in U.S. Patent No. 6,450,346, the entire disclosure of which to. The machining includes attaching the supply aperture 34 to a recess that receives the rod. Alternatively, a separate tube 30 is loaded and bonded to the separately machined elbow 32 to assemble the connector 28.
注射器桿26形成有一注射孔36，例如，具有與該供應管30之圓孔34直徑相似的直徑並且沿注射器桿26整個長度延伸之一圓形孔。如所示，該注射管24可具有一斜端，例如面向該腔室內襯或其可能具有一與該桿26之軸垂直的一平坦端。該注射器桿26的截面形狀可能大體呈正方形(如圖示)或可能呈八邊形或圓形或根據該爐製造者及生產線需要而定形狀。該注射器桿52可由兩殼54、56組成，該兩殼透過未繪示的沿著桿軸向延伸之榫槽結構接合在一起。The syringe shaft 26 is formed with an injection aperture 36, for example, having a diameter similar to the diameter of the circular aperture 34 of the supply tube 30 and extending along the entire length of the syringe shaft 26 as a circular aperture. As shown, the syringe 24 can have a beveled end, such as facing the chamber liner or it can have a flat end that is perpendicular to the axis of the rod 26. The cross-sectional shape of the syringe shaft 26 may be generally square (as shown) or may be octagonal or circular or shaped according to the needs of the oven manufacturer and the line. The syringe shaft 52 can be comprised of two shells 54, 56 that are joined together by a notched structure that extends axially along the stem, not shown.
Zehavi等人的注射器40之所有的零件係由矽(較佳多晶矽及最佳係原生多晶矽)構成的。該等零件可使用由旋塗玻璃(SOG)及矽粉構成的一可固化黏着劑融合一起，如Boyle等人的美國專利第7,083,694號所描述。可流動的黏著劑被施加於該等零件的接合區域，接著該等零件被組裝成為所示之結構。接著該結構在900至1100℃的範圍內之一溫度下退火以將該旋塗玻璃轉換成一矽基質，其緊密地結合至該等矽零件並併入矽粉末。All of the parts of Zehavi et al.'s syringe 40 are constructed of tantalum (preferably polycrystalline and preferably primary polycrystalline germanium). The parts may be fused together using a curable adhesive consisting of spin-on-glass (SOG) and tantalum powder, as described in U.S. Patent No. 7,083,694 to Boyle et al. A flowable adhesive is applied to the joint regions of the parts, which are then assembled into the structure shown. The structure is then annealed at a temperature in the range of 900 to 1100 ° C to convert the spin-on glass into a tantalum matrix that is tightly bonded to the tantalum parts and incorporated into the tantalum powder.
該矽氣體注射器在減少爐中產生的微粒數量方面極有效，這些微粒掉落至經處理晶圓上變得有害並且降低良率。The helium gas injector is extremely effective in reducing the amount of particles generated in the furnace, and the particles fall onto the treated wafer to become harmful and reduce the yield.
不幸的是，以上描述的習知單一矽氣體注射器存在若干缺陷。製造複雜的矽注射器是一個單調且昂貴之製程。結果，即使藉由增加生產良率且延長注射器使用壽命使得該注射器的費用減少但該矽注射器依然很貴。另外，該矽結構較長，有時其長度遠超過一米，易碎且易斷裂。運送經組裝之注射器需要十分小心以防止該注射器在運輸中斷裂。只要該長桿斷裂時，該注射器很明顯就需要以一新注射器取代。同樣的，當該注射器主要由於沈積產物的堆積使得晶圓缺陷增加或沈積率或均勻性改變致使其達到使用壽命之末端時，該注射器通常會被扔掉並由一個昂貴的新注射器取代。Unfortunately, the conventional single helium gas injector described above has several drawbacks. Making a complex helium syringe is a monotonous and expensive process. As a result, even if the cost of the syringe is reduced by increasing the production yield and extending the life of the syringe, the syringe is still expensive. In addition, the crucible structure is long, sometimes its length is far more than one meter, brittle and easy to break. Transporting the assembled syringe requires great care to prevent the syringe from breaking during transport. As long as the long rod breaks, the syringe obviously needs to be replaced with a new syringe. Similarly, when the syringe is primarily caused by an increase in wafer defects or a change in deposition rate or uniformity due to deposition of deposition products, it is typically thrown away and replaced by an expensive new syringe.
雖然全矽氣體注射器已提供優異之性能，但是本發明者已經意識到了僅僅是注射器的桿延伸進入熱區的處理區域且經受藉由製程氣體的密集塗佈。該連接器或關節位於處理區域的下面且經歷一較低的溫度以致該連接器沒有經歷明顯沈積。While full helium gas injectors have provided superior performance, the inventors have recognized that only the rod of the syringe extends into the treatment zone of the hot zone and is subjected to intensive coating by process gases. The connector or joint is located below the treatment zone and experiences a lower temperature such that the connector does not experience significant deposition.
根據本發明之一態樣，一混合氣體注射器包含由如矽之高純度材料構成之一桿及另一材料之一連接器，其中該桿延伸通過該爐之熱區，且該連接器係佈置於大致由該爐之加熱線圈14所定界的熱區的外面。該桿或者可由石英或矽碳化物構成。According to one aspect of the present invention, a mixed gas injector includes a rod composed of a high purity material such as ruthenium and a connector of another material, wherein the rod extends through a hot zone of the furnace, and the connector is arranged Outside of the hot zone substantially bounded by the heating coil 14 of the furnace. The rod may be constructed of quartz or tantalum carbide.
連接器之材料比桿的材料更強健且更便宜是較佳的。對於矽桿，石英及矽碳化物能用於連接器。然而，由於諸如不鏽鋼或者鎳鉻鐵耐熱耐蝕合金(Inconel)之強金屬的優異的強度並且容易機械加工，其用於製造連接器是較佳的。鑒於氣體供應管線通常由不鏽鋼構成之事實，一不鏽鋼的連接器在不影響其純度位準的情況下明顯能被使用。It is preferred that the material of the connector is stronger and less expensive than the material of the rod. For masts, quartz and tantalum carbide can be used for connectors. However, it is preferable to manufacture a connector due to the excellent strength of a strong metal such as stainless steel or Inconel and easy machining. In view of the fact that the gas supply line is usually made of stainless steel, a stainless steel connector can obviously be used without affecting its purity level.
有優勢的是，該桿可透過一可分離的聯結器接合至連接器，例如，使用諸如螺絲之螺紋元件。結果，該桿及連接器可因為較不複雜的結構且易於就地安裝能被分開運送。另外，該桿的更換不需要一新連接器。如果桿斷裂或者變成過度塗佈，則可用一新桿接合至之前用過的連接器。之前提到過的該連接器經受更少之沈積。如果該連接器需要被清理，其更小的尺寸，降低的複雜性及強健的組成會促進清理。Advantageously, the rod can be coupled to the connector by a separable coupling, for example using a threaded element such as a screw. As a result, the rod and connector can be transported separately because of the less complicated structure and ease of in-situ installation. In addition, the replacement of the rod does not require a new connector. If the rod breaks or becomes overcoated, it can be joined to the previously used connector with a new rod. The connector previously mentioned is subject to less deposition. If the connector needs to be cleaned, its smaller size, reduced complexity and robust composition will facilitate cleaning.
例如，一實施例係關於一種氣體注射器，其用於將製程氣體注射進入至一垂直爐的介於支撐多個晶圓之一塔與一管形內襯之間的一空間內。該氣體注射器包含一管形桿，其具有一開啟末端及一沿著一第一軸延伸之第一孔且由一第一單一材料構成，該第一材料係選自由矽、石英及矽碳化物組成的群組；及一連接器，其可分離地連接至該桿區段，該連接器由除該第一材料外之一第二材料構成，並且包含一供應管，該供應管具有一第二孔及一末端，該第二孔沿著與該第一軸垂直的一第二軸延伸並且與該第一孔流體連通，而該末端可連接至一氣體供應管線。For example, an embodiment is directed to a gas injector for injecting process gas into a space between a tower supporting a plurality of wafers and a tubular liner to a vertical furnace. The gas injector comprises a tubular rod having an opening end and a first hole extending along a first axis and being composed of a first single material selected from the group consisting of tantalum, quartz and tantalum carbide a group of components; and a connector detachably coupled to the rod section, the connector being composed of a second material other than the first material, and comprising a supply tube having a first A second aperture and an end extending along a second axis perpendicular to the first axis and in fluid communication with the first aperture, the end being connectable to a gas supply line.
本發明之較佳實施例如圖1至4繪示。Preferred embodiments of the invention are illustrated in Figures 1 through 4.
一混合氣體注射器50之一實施例(如圖3之正視圖繪示)包含一矽桿52，其類似於Zehavi等人所描述，其由兩個多晶矽殼54、56融合在一起所形成且在該兩個多晶矽殼之間具有一中心孔58。該桿52之下端結合至一配接器60，該配接器60亦具有一中心孔，其延伸通過該配接器並且與該桿52之中心孔58對齊。兩個缺口62、64經機械加工進入至配接器60以沿著垂直於該桿52之軸的兩個相對側延伸。該桿52可由多晶矽構成，在需要小尺寸時多晶矽可易於機械加工。該配接器60相對較小且形狀簡單且能由一單一部件機械加工。經機械加工的該桿52能用相同的SOG/矽融合操作融合至多晶矽殼54、56，其形成桿52的主要部分，或者在一分開之操作中融合。An embodiment of a mixed gas injector 50 (shown in elevation in FIG. 3) includes a mast 52 similar to that described by Zehavi et al., which is formed by the fusion of two polycrystalline crucibles 54, 56 and There is a central aperture 58 between the two polycrystalline clamshells. The lower end of the rod 52 is coupled to an adapter 60 which also has a central bore extending through the adapter and aligned with the central aperture 58 of the rod 52. The two notches 62, 64 are machined into the adapter 60 to extend along two opposite sides that are perpendicular to the axis of the rod 52. The rod 52 can be composed of polycrystalline germanium, which can be easily machined when a small size is required. The adapter 60 is relatively small and simple in shape and can be machined from a single component. The machined rod 52 can be fused to the polycrystalline crucibles 54, 56 using the same SOG/矽 fusion operation, which forms the major portion of the rod 52, or is fused in a separate operation.
一連接器66由一金屬(較佳地不鏽鋼或者鎳鉻鐵耐熱耐蝕合金)構成且包含一供應管68，該供應管的中心孔用於連接氣體供應管線。例如，該供應管68藉由熔接接合至一不鏽鋼肘管70，該肘管具有兩個連接且垂直配置的垂直孔和水平孔，該等孔經機械加工進入肘管以連接於桿52之中心孔58與供應管68的孔之間。該肘管70具有使配接器60靜置於其上的一平坦的上表面72，配接器60之中心孔與肘管70中的垂直孔對齊。兩個固持器74、76具有各別之水平的延伸齒，該等齒可接合該調節器60之缺口62、64。螺絲78、80可自由地穿過該肘管70之凸緣82、84並旋轉進固持器74、76中。由此，該等螺絲78、80能將該配接器60抵於圍繞垂直肘管孔的肘管70之平坦表面72上緊。該等螺絲78、80能被旋鬆以從桿52釋放該連接器66。由此，如果桿52由於斷裂或老化需要被替換時，該連接器66能再用於一新桿52。較佳地是該等固持器74、76及該等螺絲78、80亦能由不鏽鋼構成。A connector 66 is constructed of a metal, preferably a stainless steel or a ferrochrome heat resistant corrosion resistant alloy, and includes a supply tube 68 having a central bore for connection to a gas supply line. For example, the supply tube 68 is joined by fusion welding to a stainless steel elbow 70 having two connected and vertically disposed vertical and horizontal holes that are machined into the elbow to connect to the center of the rod 52. The aperture 58 is between the aperture of the supply tube 68. The elbow 70 has a flat upper surface 72 on which the adapter 60 rests, with the central aperture of the adapter 60 aligned with the vertical aperture in the elbow 70. The two retainers 74, 76 have respective levels of extended teeth that engage the notches 62, 64 of the adjuster 60. The screws 78, 80 are free to pass through the flanges 82, 84 of the elbow 70 and are rotated into the retainers 74, 76. Thus, the screws 78, 80 can tighten the adapter 60 against the flat surface 72 of the elbow 70 about the vertical elbow bore. The screws 78, 80 can be unscrewed to release the connector 66 from the rod 52. Thus, the connector 66 can be reused for a new lever 52 if the lever 52 needs to be replaced due to breakage or aging. Preferably, the retainers 74, 76 and the screws 78, 80 can also be constructed of stainless steel.
該等零件之間的密封無須提供一高壓密封。矽似乎可充分密封至一金屬。然而，已預想到有一種密封材料可有優勢地使用，諸如像C形密封件之一金屬密封件或者諸如Kalrez之一高溫彈性密封件。該密封件需要適應不同材料的零件間之不同熱膨脹同時維持用於氣體密封的零件之接近性。The seal between the parts does not have to provide a high pressure seal.矽 seems to be sufficiently sealed to a metal. However, it has been envisioned that a sealing material can be used advantageously, such as a metal seal such as a C-shaped seal or a high temperature elastomeric seal such as one of Kalrez. The seal needs to accommodate different thermal expansions between parts of different materials while maintaining the proximity of the parts for gas sealing.
在圖4之正視圖中繪示一混合氣體注射器90的另一實施例，該混合氣體注射器90包含類似於圖3之桿的一桿92，該桿92包含第一及第二殼94、96，其中沿著該等殼軸向形成一中心孔98。然而，該第二殼96在其下端附近但偏離其下端處包含一未繪示的側孔隙。另外，一端板94經結合並密封至該等殼94、96之底端以堵塞該中心孔98。該等殼94、96及端板94由相同材料(例如，石英、矽碳化物或矽，但多晶矽係較佳，原始多晶矽係最佳)形成。在該等殼94、96融合在一起的同時該矽端板94可融合至該等殼94、96。Another embodiment of a mixed gas injector 90 is shown in front elevational view of FIG. 4, which includes a rod 92 similar to the rod of FIG. 3, the rod 92 including first and second shells 94, 96. Wherein a central aperture 98 is formed along the axial direction of the housing. However, the second shell 96 includes an unillustrated side aperture near its lower end but offset from its lower end. Additionally, end plates 94 are joined and sealed to the bottom ends of the shells 94, 96 to block the central bore 98. The shells 94, 96 and the end plates 94 are formed of the same material (e.g., quartz, tantalum carbide or tantalum, but polycrystalline tantalum is preferred, and the original polycrystalline tantalum is preferred). The crotch plate 94 can be fused to the shells 94, 96 while the shells 94, 96 are fused together.
一配接器100包含一供應管102，該供應管102係(例如)藉由焊接接合至一夾鉗結構的一基座104。該基座104包含一未繪示的孔隙，該孔隙與供應管的中心孔連通並與該第二殼96中的側孔隙對齊。兩個可移動的夾具106、108包含凸耳110、112，該等凸耳對接於該第一殼94而與該第二殼96中的孔隙相對。該第一殼94的隅角可為圓形以符合該等凸耳110、112之凹形內表面。穿過該等夾具中的孔的螺絲114、116被旋進該基座104內。因此，該等螺絲114、116可抵著該第一殼94上緊該等凸耳110、112以將該桿92之底端固持於該配接器100並將至該基座104之孔的該第二殼96中之孔隙密封以提供該桿92之中心孔98至該供應管102之孔之間流體相通。若該等螺絲114、116被旋鬆，則該桿92可自該連接器100拆卸。An adapter 100 includes a supply tube 102 that is joined to a pedestal 104 of a clamp structure, for example, by soldering. The susceptor 104 includes an aperture, not shown, that communicates with the central aperture of the supply tube and with the side apertures in the second housing 96. The two movable clamps 106, 108 include lugs 110, 112 that abut the first shell 94 opposite the apertures in the second shell 96. The corners of the first shell 94 can be rounded to conform to the concave inner surfaces of the lugs 110, 112. Screws 114, 116 that pass through holes in the clamps are threaded into the base 104. Therefore, the screws 114, 116 can tighten the lugs 110, 112 against the first shell 94 to hold the bottom end of the rod 92 to the adapter 100 and to the hole of the base 104. The apertures in the second shell 96 are sealed to provide fluid communication between the central bore 98 of the stem 92 and the bore of the supply conduit 102. If the screws 114, 116 are unscrewed, the rod 92 can be detached from the connector 100.
本發明提供很多優勢。暴露於高溫中之該注射器零件(亦即，該桿)具有一簡單形狀以容許該桿可更容易地由諸如矽的關鍵性材料所形成。該注射器之其他部分可更容易地由非關鍵性材料形成(尤其係不鏽鋼)，不鏽鋼可更容易地形成所需的形狀。該連接器及尤其是所需的90度彎度可由更加耐用的材料形成。簡單之零件可經運送並且可容易地就地安裝。若一桿需被替換，則該連接器可附接至一新桿而無須自其氣體線斷開，由此降低維修成本。該桿之更簡單的設計促進該桿的清潔，而無須拋棄整個部件及難以清潔的單一注射器。由於由價廉的材料製成的可再使用連接器，消耗與擁有總成本減少。The present invention provides a number of advantages. The syringe part (i.e., the rod) exposed to high temperatures has a simple shape to allow the rod to be more easily formed from a critical material such as a crucible. Other parts of the syringe can be more easily formed from non-critical materials (especially stainless steel), which can more easily form the desired shape. The connector and especially the required 90 degree camber can be formed from a more durable material. Simple parts can be shipped and can be easily installed in place. If a rod needs to be replaced, the connector can be attached to a new rod without disconnecting from its gas line, thereby reducing maintenance costs. The simpler design of the rod facilitates the cleaning of the rod without the need to discard the entire part and a single syringe that is difficult to clean. Due to the reusable connectors made of inexpensive materials, the total cost of consumption and ownership is reduced.
雖然本發明之較佳實施例已描述於本文中，但以上之描述僅是說明性的。本文中揭示之發明之進一步的修改將發生於熟習此各別技術者中且所有此等修改都會藉由附加請求項界定而被認為是在本發明之範圍內。Although the preferred embodiments of the invention have been described herein, the foregoing description is merely illustrative. Further modifications of the invention disclosed herein will occur to those skilled in the art and all such modifications are considered to be within the scope of the invention.
10．．．爐10. . . furnace
12．．．絕緣加熱器筒12. . . Insulated heater tube
14．．．電阻加熱線圈14. . . Resistance heating coil
16．．．鐘罩16. . . Bell jar
18．．．內襯18. . . Lining
20．．．支撐塔20. . . Support tower
22．．．台座twenty two. . . Pedestal
24．．．氣體注射器twenty four. . . Gas injector
26．．．注射器桿26. . . Syringe rod
28．．．注射器28. . . syringe
30．．．供應管30. . . Supply tube
32．．．肘管32. . . Elbow
34．．．孔34. . . hole
36．．．注射孔36. . . Injection hole
38．．．殼38. . . shell
40．．．殼40. . . shell
50．．．混合氣體注射器50. . . Mixed gas injector
52．．．桿52. . . Rod
54．．．殼54. . . shell
56．．．殼56. . . shell
58．．．中心孔58. . . Center hole
60．．．配接器60. . . Adapter
62．．．缺口62. . . gap
64．．．缺口64. . . gap
66．．．連接器66. . . Connector
68．．．供應管68. . . Supply tube
70．．．肘管70. . . Elbow
72．．．上表面72. . . Upper surface
74．．．固持器74. . . Holder
76．．．固持器76. . . Holder
78．．．螺絲78. . . Screw
80．．．螺絲80. . . Screw
82．．．凸緣82. . . Flange
84．．．凸緣84. . . Flange
90．．．混合氣體注射器90. . . Mixed gas injector
92．．．桿92. . . Rod
94．．．殼94. . . shell
96．．．殼96. . . shell
98．．．中心孔98. . . Center hole
100．．．配接器100. . . Adapter
102．．．供應管102. . . Supply tube
104．．．基座104. . . Pedestal
106．．．夾具106. . . Fixture
108．．．夾具108. . . Fixture
110．．．凸耳110. . . Lug
112．．．凸耳112. . . Lug
114．．．螺絲114. . . Screw
116．．．螺絲116. . . Screw
圖1係一垂直爐之一截面圖。Figure 1 is a cross-sectional view of a vertical furnace.
圖2係一全矽氣體注射器之一正視圖。Figure 2 is a front elevational view of one of the full helium gas injectors.
圖3係本發明之一氣體注射器的一第一實施例之一正視圖。Figure 3 is a front elevational view of a first embodiment of a gas injector of the present invention.
圖4係本發明之一氣體注射器的一第二實施例之一正視圖。Figure 4 is a front elevational view of a second embodiment of a gas injector of the present invention.
50．．．混合氣體注射器50. . . Mixed gas injector
52．．．桿52. . . Rod
54．．．殼54. . . shell
56．．．殼56. . . shell
58．．．中心孔58. . . Center hole
60．．．配接器60. . . Adapter
62．．．缺口62. . . gap
64．．．缺口64. . . gap
66．．．連接器66. . . Connector
68．．．供應管68. . . Supply tube
70．．．肘管70. . . Elbow
72．．．上表面72. . . Upper surface
74．．．固持器74. . . Holder
76．．．固持器76. . . Holder
78．．．螺絲78. . . Screw
80．．．螺絲80. . . Screw
82．．．凸緣82. . . Flange
84．．．凸緣84. . . Flange
Claims (7)
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| JP2001230212A (en) * | 2000-02-16 | 2001-08-24 | Tokyo Electron Ltd | Vertical heat treatment equipment |
| US20080190910A1 (en) * | 2004-09-16 | 2008-08-14 | Hitachi Kokusai Electric Inc. | Heat Treatment Apparatus and Method of Manufacturing Substrates |
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| Publication number | Publication date |
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| TW201213596A (en) | 2012-04-01 |
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