TW201213596A - Hybrid gas injector - Google Patents

Abstract

A gas injector for use in injecting process gas into a space in a vertical furnace between a tower supporting multiple wafers and a tubular liner includes a tubular straw having an open distal end and a first bore extending along a first axis and composed of a first single material selected from the group consisting of silicon, quartz, and silicon carbide, and a connector detachably connected to the straw section, composed of a second material other than the first material and including a supply tube having a second bore extending along a second axis perpendicular to the first axis and in fluid communication with the first bore and having a distal end connectable to a gas supply line.

Description

201213596 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention generally relates to heat treatment of semiconductor wafers. In particular, the present invention relates to a gas injector in a heat treatment furnace. [Prior Art] The batch is continuously heat treated in several stages in the manufacture of the integrated circuit. - The low temperature thermal process is deposited by chemical vapor deposition - a layer of gasification gas, usually using a chlorite and ammonia as a precursor gas in a temperature range of about 7 generations. Other low temperature processes include the deposition of polycrystalline or sulphur dioxide or other processes utilizing low temperatures. High-temperature processes include oxidation, annealing, and other processes that are typically used at high temperatures, such as above 1000 t or even 120 (TC. Large-scale commercial production typically uses vertical furnaces and vertically configured wafer towers to support a large number of crystals in the furnace. , usually in the structure of the cross-sectional view as shown in the figure. The furnace comprises a heat-insulating heater cartridge 12 for supporting a resistor plus (four) coil 14 'the resistor heating coil is powered by - as shown Power supply. Usually composed of quartz - the bell jar 16 comprises a top and is mounted in the heating coil ... ... the lining with the open end _ is used, which is fitted in the bell jar 16. The yoke tower 20 is situated The pedestal is surrounded by the lining 18 at the processing period (four). The tower 2 〇 includes a vertically disposed slot 'made in a plurality of horizontally arranged wafers to be heat treated in the batch mode^ The 'gas injector 24, which is disposed primarily between the article and the liner, has a ^ at its upper end for injecting process gas into the liner 18. Generally speaking, 'at a plurality of heights is not 151101.doc 201213596 Multiple gas injections of the same length 24 injecting the process gas. Not shown - the vacuum pump removes the process gas passing through the bottom of the bell jar 16. The heater cartridge 12' bell jar 16 and liner 1 8 can be lifted vertically Allowing the wafer to be transferred to and from the column 20, although in some configurations the elements remain stationary and an elevator lifts and lowers the pedestal 22 and the load from the 20 into and out of the furnace 10 The bell jar 18 is closed at its upper end, causing the furnace 1 to tend to have a substantially uniform thermal temperature in the middle and upper portions thereof. This is called a hot zone where the temperature is controlled for the most The thermal process is optimized. However, the open end of the liner 8 and the mechanical support of the pedestal 22 result in a lower temperature at the lower end of the furnace 'usually low enough that processes such as chemical vapor deposition are not fully effective. The hot zone may exclude some of the lower slots of the tower 20. It is known that in low temperature applications, the tower, liner and injector are comprised of quartz or fused vermiculite. However, quartz columns and quartz injectors are being Replaced by a syringe. The front view of Figure 2 is shown The configuration of one of the towers is available from Integrated Materials, Inc. of Sunnyvaie, Calif., USA. This column is manufactured by Boyle et al. in U.S. Patent No. 6,455,395, incorporated herein by reference. It has been proposed by B.yle et al. in U.S. Patent Application Serial No. 2002/0170486.

Zehavi et al. disclose a sputum injector 24, which is depicted in the front view of Fig. 2, and is disclosed in U.S. Patent Application Serial No. 2/6/185, 589. It includes a syringe shaft 26 (also referred to as a tube) and a connection benefit 28 (also known as a joint). The connector 28 includes a supply tube 20 and an elbow 32 having a recess for receiving the syringe plunger. 151101.doc 201213596 The Shai supply officer 30 can have an outer diameter of about 4 mm to 8 mm and have a correspondingly sized inner circular aperture 34. The supply tube 3 passes through the manifold below the furnace. The end of the supply tube 30 is connectable to a gas supply line through a vacuum fitting and a weir ring (such as a piece) that supplies a desired gas or gas mixture into the furnace, for example, for niobium nitride CVD deposited ammonia and money. The entire unitary connector 28 can be machined from annealed primary polycrystalline wafers according to the method described in U.S. Patent No. 6,450,346, the disclosure of which to. The machining includes attaching the supply aperture 34 to a recess that receives the rod. Alternatively, the connector 28 is assembled by incorporating the separation tube 3 且 and bonding it to the elbow f 3 2 of the separate mechanical jade. The syringe shaft 26 is formed with an injection hole 36, for example, having a diameter which is (4) in diameter with respect to the diameter of the circular hole 34 of the supply tube 30 and which extends along the entire length of the syringe rod. As shown, the syringe 24 can have a beveled end, such as facing the chamber liner or it may have a flat end that is perpendicular to the axis of the rod 26. The cross-sectional shape of the syringe shaft 26 may be generally square (as shown) or may be octagonal or circular or may be shaped according to the needs of the oven manufacturer and the line. The syringe rod 52 can be composed of two shells 54, % which are joined together by a tongue and groove structure extending along the axial direction of the rod, not shown.

All of the parts of Zehavi et al.'s syringe 4 are made of tantalum (preferably polycrystalline and preferably native polycrystalline ♦). These parts may be formed using a curable adhesive composed of spin-on glass (S0G) and Shishi powder, as described in U.S. Patent No. 7, 〇 83,694. A flowable adhesive is applied to the joint area of the parts. Then the parts are assembled into a two-port construction and then the structure is annealed at a temperature of 151101.doc 201213596 in the range of 900 to 11 ° C. The spin-on glass is converted into a sand matrix of the tantalum parts and incorporated into the tantalum powder. /, tightly coupled to the helium gas injector to reduce the effectiveness of the particles, the amount of these particles dropped to the current number of pull. Dropping onto the treated wafer becomes harmful and reduces the good [Summary] Unfortunately, the above description (4) knows the single-money defect. Manufacture of complex Shixi injection g a ^ for the existence of a singular right-handed shot, a monotonous and expensive system, even by increasing the production yield. The cost of the syringe is reduced by π卩, so the 矽 矽 矽 依然 依然 依然 依然 依然 依然 依然 依然 依然 依然 依然 依然 依然In addition, the stone structure is longer, sometimes its long-term production of Yuan and χ, '· mouth and U more than one meter, the fragile and easy to assemble syringe needs 晷 + eight, Yi Jianda gives "^μ prevent this When the syringe is transported f:/, when the long rod is broken, the syringe obviously needs to be replaced by a new injection state. Similarly, the report is based on the deposition product to increase the wafer_deposit or deposition rate. Or the uniformity changes cause it to reach the end of the use of the scorpion, the syringe will usually (four) be replaced and replaced by - an expensive new syringe. Although the full body syringe has provided excellent performance, the inventors have realized that only The rod of the syringe extends into the treatment zone of the human hot zone and is subjected to intensive coating by process gases. The connector or joint is located below the treatment zone and experiences - a lower temperature such that the connector does not experience significant deposition. One aspect of the invention 'a mixed gas injector comprises a rod made of a high-purity material such as a rod and another material, wherein the rod is 5110l. (i〇c 201213596 extends through the furnace The hot zone, the thermal carbide composition bounded by the heating coil 14 and the delta connector are arranged substantially outside of the zone of the furnace. The rod or the material of the quartz or tantalum connector may be stronger and more robust than the material of the stem. Cheaper is preferred. For Shishi rods, quartz and Shishi carbide can be used for connectors. However, due to the excellent strength of strong metals such as stainless steel or iron-iron alloy (i_ei) and easy machining, It is preferred to manufacture the connector: In the fact that the gas supply line is usually composed of non-recorded steel, the connection benefit of a stainless steel can be obviously used without affecting the purity level. It can be joined to the connection by a detachable coupling. For example, if the screw element 1 of the screw is used, the rod and the connection benefit can be transported separately because of the less complicated structure and the ease of installation. Replacement does not require a new connector. If the rod breaks or becomes over-coated, a new rod can be used to join the previously used connector. The previously mentioned connection is less deposited. If the connector needs to be treated, its smaller size, reduced complexity and robust composition will facilitate cleaning. For example, an embodiment relates to a gas injector for injecting a process cartridge into a The vertical furnace is located in a space between a tower supporting one of the plurality of wafers and a central lining. The gas injector comprises a tubular rod having an opening end and a - extending along an axis a hole and consisting of a first single material selected from the group consisting of tantalum, quartz and tantalum carbide; and a connector detachably connected to the rod area slave a second material other than the first material, and 151101.doc 201213596, the 3H supply tube has a second hole and an end, the second axis extending perpendicularly to the second axis and the first hole The crucible includes a supply tube, the bore being in communication with the first body, and the end being connectable to the gas supply line. [Embodiment] A preferred embodiment of the present invention is illustrated in Figures 1 to 4. s rolling body; one embodiment of the main radiator 5 (shown in front view of FIG. 3), comprising: a mast 52, which is similar to that described by ZehaW et al. 56 is formed by merging and having a central hole 58 between the two polycrystalline clamshells. The lower end of the rod 52 is coupled to the mating 1160, which also has a central hole that extends through the The adapter is aligned with the central bore 58 of the rod 52. The two missing σ 62, 64 are machined into the adapter 60 to extend along two opposite sides perpendicular to the axis of the rod 52. The rod 52 can be On the eve of the evening, the polycrystalline 7 can be easily machined when a small size is required. The side adapter 6G is relatively small and simple in shape and can be machined from a single-piece. The machined rod 52 can be used the same. The S0G/矽 merges into a fusion, which forms the main part of the rod 52, or = a separate operation in the fusion. The crucible 66 is made of metal (preferably stainless steel or ferrule iron)

A flat upper surface 72 placed thereon enters the elbow to be coupled to the rod 52. The delta elbow 70 has a central bore that aligns the adapter 6 with the 72' adapter 60 aligned with the vertical bore in the elbow 151101.doc 201213596 70. The two retainers 74, 76 have respective levels of extended teeth' that engage the notches 62, 64 of the adjuster 6. The screws 78, 80 are free to pass through the flanges 82, 84 of the elbow 7 and are rotated into the retainers 74, 76. Thus, the screws 78, 8 can tighten the adapter 6 against the flat surface 72 of the elbow 70 about the vertical elbow bore. The screws 78, 80 can be unscrewed to release the connector 66 from the rod 52. Thus, if the rod 52 needs to be replaced due to breakage or aging, the connector "can be reused - the new rod 52. Preferably the holders 74, 76 and the screws 78, 8 can also be Made of stainless steel. The seal between the parts does not need to provide a high pressure seal. The 矽 seems to be sufficiently sealed to a metal. However, it is envisioned that a sealing material can be used advantageously, such as a metal seal like a C-shaped seal. Piece or such as

One of Kalrez's high temperature elastomeric seals. The seal needs to accommodate different thermal expansions between parts of different materials while maintaining the proximity of the parts used for gas sealing. Another embodiment of a mixed gas injector 9A is illustrated in the front view of FIG. 4, which includes a rod % similar to the rod of FIG. 3, the rod 92 including first and second shells 94. , 96, which is formed along the axial direction of the shell - a central bore 98 U 'the second shell 96 contains a side void adjacent to its lower end but offset from its lower end. In addition, end plates 9 (bonded and sealed to the bottom ends of the shells 94, 96 to block the central bore %. The shells 94, 96 and end plates 94 are made of the same material (eg, quartz, tantalum carbonization / matter) $石夕', but the polycrystalline stone is better formed by the 'original polycrystalline stone system'. The shell ends can be fused to the shells when the shells 94, 96 are fused together. 151101.doc • 10-201213596 94 > 96 ° A adapter 100 includes a supply tube 02, which is, for example, joined to a pedestal 104 of a clamp structure by soldering. 104 includes an undrawn aperture that communicates with a central aperture of the supply tube and is aligned with a side aperture in the second housing 96. The two movable clamps 〇6, 1〇8 include lugs 110, 112, The lugs are abutted against the first shell 94 opposite the apertures in the second shell 96. The corners of the first shell 94 may be rounded to conform to the concave inner surface of the lugs 110, 112^ The screws that pass through the holes of the jigs are screwed into the base 104. Therefore, the screws ιΐ4, ι6 can be pressed against each other. The first 忒94 tightens the lugs "〇, M is to hold the bottom end of the rod % to the adapter (10) and seal the aperture in the second (four) of the hole of the base 1 () 4 to provide the central hole 98 of the rod 92 to the supply tube The hole between the holes of 1〇2 is in contact with each other. 马马望碑# 1 1 /1 , right. The hai 4 screws 114, 116 are loosened, and the rod 92 can be detached from the S Hai connector. The present invention provides advantages The syringe part exposed to high temperature (i.e., 'the rod) has a simple shape to allow the rod to be more easily formed from a critical material such as Shi Xi. The other parts of the syringe can be made easier: The formation of key materials (especially stainless steel) stainless steel can more easily form the desired shape. The 90-degree bend required for the continuous sugar-free period and the special 90-degree bend can be formed by more resistant materials. The ground is installed on the ground. The bitterness-heart, the thousand, and the ability to be replaced easily, the connector can be rodped and the helmet must be connected to the new member from its milk line. Reduced maintenance into a simple design to promote a cleaner 的 Μ cup of cleaner single, main: clean without having to abandon the whole Components and difficult/projectors. Due to the reusable connection made of inexpensive materials 151101.doc 201213596 connector 'consumption and total cost of ownership reduction. Although the preferred embodiment of the invention has been described herein' The above description is only illustrative, and further modifications of the invention disclosed herein will occur to those skilled in the art and all such modifications are considered to be within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view of a vertical furnace. Fig. 2 is a front view of a full gas injector. Fig. 3 is a view of a gas injector of the present invention. Front view Figure 4 is a view of a second embodiment of a gas injector of the present invention.正枧[Main component symbol description] 10 Furnace 12 Insulated heater tube 14 Resistance heating coil 16 Bell jar 18 Liner 20 Support tower 22 Pilot 24 Gas injector 26 Syringe rod 28 Syringe 30 Supply tube 151101.doc •12· 201213596 32 Elbow Tube 34 Hole 36 Injection hole 38 Shell 40 Shell 50 Mixed gas injector 52 Rod 54 Shell 56 Shell 58 Center 孑 L 60 Adapter 62 Notch 64 Notch 66 Connector 68 Supply tube 70 Elbow 72 Upper surface 74 Retainer 76 Retainer 78 Screw 80 Screw 82 Flange 84 Flange 90 Hybrid gas injector 151101.doc -13- 201213596 92 Rod 94 Shell 96 Shell 98 Center hole 100 Adapter 102 Supply tube 104 Base 106 Clamp 108 Clamp 110 Lobe 112 Lug 114 Screw 116 Screw 151101.doc -14-

Claims (1)

201213596 VII. Patent Application Range: 1. A gas injector </ RTI> for injecting a process gas into a medium between a tower supporting a plurality of wafers and a tubular lining, the gas injector comprising: a tubular rod 'having an open end and a first hole /) α extending in a direction of a shaft and consisting of a first single material composed of a group of free stone, quartz and tantalum carbide; and a connector It is detachably connected to the rod section, 1% is composed of a second material other than the first material and includes a supply alarm, and the ▲ μ tube has a second hole and an end, the second hole edge A second shaft extending perpendicular to the reading of the jth is provided and fluidly coupled to the first orifice is connectable to a gas supply line. 2. 3. 4. 5. 6. The gas injector of claim 1, wherein the second material is a metal such as the gas injector of claim 2, wherein the metal is stainless steel. A gas injector according to claim 1, wherein the first material is polycrystalline germanium. A gas injector according to claim 4, wherein the second material is stainless steel. ^ 4 The gas injector of claim 1 is further comprising a screw that is suspected of being transferred into the connector and clamping the rod segment to the connector. 151101.doc