TWI504464B - Defect correction device - Google Patents

Description

Defect correction device Field of invention

The present invention relates to a defect correcting device for correcting defects of a substrate such as a flat panel display (FPD) or a semiconductor wafer by laser light.

Background of the invention

Conventionally, a method in which a laser beam emitted from a laser light source is irradiated onto a substrate by a processing head to correct a defect of the substrate is adopted. A laser processing apparatus in which a laser oscillator and a processing head are connected by an optical fiber is known as a device for performing such a defect (see Patent Document 1).

The laser processing apparatus described in Patent Document 1 includes a laser oscillator fixed to an end portion of the device, a movable machining head movable in a horizontal axis direction on the workpiece, and a laser oscillator and processing by optical fiber. Between the heads.

Patent Document 1

Japanese Patent Laid-Open No. 9-239578

However, in the laser processing apparatus described in Patent Document 1, since only the processing head is moved in the laser oscillator and the processing head separated by the optical fiber, the optical fiber is repeatedly deformed as the processing head moves.

When the optical fiber is repeatedly deformed, the durability is lowered, the core wire of the optical fiber is cracked, and the processing of the working member cannot be performed with the laser light of uniform intensity distribution.

Further, when the optical fiber is repeatedly deformed, since the reflection condition in the optical fiber changes, the quality of the laser light transmitted in the optical fiber changes, and there is a drawback that the substrate cannot be processed by the laser light having a uniform intensity distribution.

An object of the present invention is to provide a defect correcting device that can irradiate laser light having a uniform intensity distribution to a substrate.

In order to solve the above problems, the defect correction device of the present invention guides a laser beam emitted from a laser light source to a processing head to correct a defective portion on the substrate, and includes: holding the substrate in a plane a substrate stage in a state; a gate type elevated frame interposed between the substrate stages; a driving mechanism for moving the substrate stage and the one of the elevated frames to move relative to the other; and moving along the horizontal column of the elevated frame a mounting portion for integrally mounting the laser beam and the processing head; an optical fiber integrally coupled between the laser light source and the processing head that is integrally mounted to the mounting portion; and the optical fibers are slightly different from each other A plurality of modal disturbances that are curved to adjust the modal distribution within the fiber.

In the present invention, since the laser light source, the optical fiber, the processing head, and the plurality of modal disturbers move integrally, the relative distance between the laser light source and the processing head is short, and the mounting shape of the optical fiber is fixed, and the optical fiber is not deformed.

Therefore, according to the present invention, laser light having a uniform intensity distribution can be irradiated to the substrate.

The best form for implementing the invention

Hereinafter, a defect correction device according to an embodiment of the present invention will be described with reference to the drawings.

1A and 1B are a plan view and a front view showing a defect correction device 1 according to an embodiment of the present invention.

Fig. 2 is a schematic block diagram for explaining the internal structure of the machining head 5 of the defect correction device 1.

3A and 3B are a schematic side view and a schematic front view for explaining the optical fiber 8 and the mode disturbers 11, 12 of the defect correction device 1.

The defect correction device 1 is used for repair processing, etc., which is a short circuit of a wiring portion, a photoresist, which is formed by a glass substrate A in which a circuit pattern is formed in a process of photolithography of a process such as a liquid crystal display (LCD). In the case of a defect such as overflow, the defect is removed by laser light.

As shown in FIGS. 1A and 1B, the defect correcting device 1 includes a floating table 2 for floating the substrate A in a planar state in which it is horizontal, and a side of the floating holding table 2 on the side of the floating table 2 The side edge portion (one side parallel to the transport direction), the adsorption transfer table 3 that is transported in the X direction, and the gate type overhead (moving mechanism) that is placed in the Y direction perpendicular to the substrate transfer direction via the floating table 2 4. The processing head 5 and the laser light source unit (the laser power source 6, the laser light source 7, the optical fiber 8 and the two modal disturbance devices 11, 12) which are integrally moved in the Y direction along the horizontal column 20 of the overhead frame 4. ).

The overhead frame 4 has a moving mechanism for moving along the horizontal column 20 using the head mounting portion 18 for mounting the processing head 5 and the laser light source unit mounting portion 19 for mounting the laser power source 6 and the laser light source 7. The head mounting portion 18 is provided in a cantilever shape on the side of the horizontal column 20 constituting the overhead frame 4 in a state where the linear guide rail and the linear motor (not shown) are movable in the Y direction. Further, in the head mounting portion 18, the objective lens 9 is oriented vertically downward, and the processing head 5 is attached.

The laser light source unit mounting portion 19 is provided with a slider supported in a state of being slidable in the Y direction along a rail 21 provided on the upper surface of the horizontal column 20, and a laser power source 6 having a large weight is disposed vertically above the horizontal column 20 and Laser light source 7.

The head mounting portion 18 and the laser light source unit mounting portion 19 are integrally fixed to each other and are moved in the Y direction.

In the state in which the glass substrate A is subjected to the microscopic examination and the laser processing, the substrate A is placed on the floating table 2 by a transfer robot or the like (not shown). The substrate alignment mechanism 23 of the reference pin and the press pin is positioned. After the positioning, the adsorption transfer table 3 is raised, the glass substrate A is adsorbed by the adsorption unit 3a, and the linear motor of the adsorption transfer table 3 is driven to be transported in the X direction along the linear guide rail.

The processing head 5 is moved in the Y direction by the defect position information of the glass substrate A defined by the pattern inspection device or the like disposed on the FDP manufacturing line, and the adsorption transfer table 3 is moved in the X direction to perform microscopic inspection and laser processing described later. Thereby, microscopic examination and laser processing can be performed in almost the entire range of the glass substrate A.

Here, the incident side end surface 8a of the optical fiber 8 is connected to the laser light source 7, and the emission side end surface 8b is connected to the incident side of the processing head 5 on which the projection lens (projection optical system) 41 is disposed.

As shown in FIGS. 3A and 3B, the optical fibers 8 are arranged to apply a pressing force to the optical fibers 8 from different directions to generate the two mode disturbers 11, 12 which are slightly curved. Further, the optical fiber 8 is formed with a linear portion 8c extending in a straight line toward the emission-side end surface 8b in a state of being aligned with the optical axis of the projection optical system of the processing head 5. The straight portion 8c of the optical fiber 8 is fixed to the laser light source unit mounting portion 19 by a fixing member, and the front end portion of the optical fiber 8 is attached to the input port of the processing head 5, and the exit side of the optical fiber 8 can be used. One part is fixed in a straight line.

The mode disturber 11 on the incident side is provided with two screws 11a and 11c on the side of the optical fiber via the optical fiber 8, and one screw 11b is disposed on the other side of the optical fiber 8 between the two screws 11a and 11c. Composition. The central screw 11b presses the optical fiber 8 to the negative direction of the X-axis, and the screws 11a and 11c at both ends press the optical fiber 8 to the positive direction of the X-axis. Thereby, the optical fiber 8 extending from the incident side end surface 8a in the Y-axis direction is slightly curved in the X-axis direction on the XY plane. At this time, the two screws 11a and 11c on both sides may be replaced with a fixing pin, and one screw 11b in the center may be twisted to apply a pressing force to the optical fiber 8 to be slightly bent. Further, the screw 11b in the center can be replaced with a fixing pin, and the screws 11a and 11c on both sides can be twisted, and a pressing force is applied to the optical fiber 8 to be slightly bent.

Further, the mode disturber 12 on the emission side is also constituted by three screws 12a, 12b, and 12c similarly to the mode disturber 11 on the incident side. The central screw 12b presses the optical fiber 8 in the positive direction of the Z-axis, and the screws 12a and 12c at both ends press the optical fiber to the negative direction of the Z-axis. Thereby, the optical fiber 8 extending in the Y-axis direction is slightly curved in the ZZ direction in the YZ plane.

At this time, the two screws 12a and 12c on both sides may be replaced with a fixing pin, and one screw 11b in the center may be twisted, and a pressing force is applied to the optical fiber 8 to be slightly bent. Further, the screw 12b in the center can be replaced with a fixing pin, and the screws 12a and 12c on both sides can be twisted to apply a pressing force to the optical fiber 8 to be slightly bent.

Further, the screws of the modal scramblers 11 and 12 are screwed to the screw holes of the casing or the like which are not shown in the drawings of the modal disturbers 11, 12, and the pressing amount of the optical fibers can be adjusted.

As described above, in the present embodiment, the incident side mode disturber 11 and the output side mode disturber 12 can slightly bend the optical fibers 8 in the directions (X-axis direction and Z-axis direction) perpendicular to each other.

Here, the optical fibers 8 are slightly bent by the modal disturbers 11, 12, and the high-order mode of the laser light incident on the optical fiber 8 of the multimode fiber can be removed, thereby obtaining a stable modal distribution, and thus, it can be described later. The processing head 5 irradiates the substrate A with laser light having a uniform intensity distribution.

Furthermore, in the present embodiment, the optical fibers 8 are slightly bent in the direction perpendicular to each other by the two modal disturbers 11, 12, and the optical fibers can be slightly bent in the same direction by two modal scramblers. The situation removes the higher order modes more reliably, and thus, a more stable mode distribution can be obtained.

Further, in the present embodiment, since a plurality of modal disturbers 11, 12 which slightly bend the optical fiber 8 in different directions are used, it is possible to obtain a mode in which the modal disturber which is conventionally used to circumscribe the optical fiber is stabilized a plurality of times. distributed.

In addition, in the present embodiment, since the two modal scramblers 11, 12 cause the optical fibers 8 to 蜿蜒 in a direction perpendicular to each other, a very stable modal distribution can be obtained, if 2 of the plurality of modal scramblers When the modal disturbance device makes the directions of the optical fibers 8 不同 different, the angles of the constituents are ideal to be close to vertical, but the high-order modes can be effectively removed compared with the case where the same direction is slightly curved.

Further, in the present embodiment, the optical fibers 8 are twisted by the screws of the modal disturbers 11, 12, and as long as the optical fibers 8 can be slightly bent, pins, projections, or holes or grooves for inserting the optical fibers 8 can be used. For components and the like, it is preferable to use a member that is not easily damaged by the optical fiber 8.

Further, in the present embodiment, each of the mode disturbers 11 and 12 is constituted by a combination of three screws or pins, and five or seven odd-numbered screws may be arranged in the screw or the pin, and plural numbers may be formed in the same direction. Tiny bending.

The linear portion 8c of the present embodiment is not forcibly formed by the fixing member of the fixed optical fiber 8, but is formed to extend in a straight line shape due to the positional relationship between the mode disturbers 11, 12 and the processing head 5, and the optical fiber 8 can be fixed by the fixing member. And the straight portion 8c is forcibly formed.

Further, the length L of the straight portion 8c is such that the intensity distribution of the laser light is uniform, preferably 50 mm, preferably 100 mm or more.

Further, in the present embodiment, when the head mounting portion 18 is driven, the head mounting portion 18 and the laser light source unit mounting portion 19 are integrally driven in the Y direction, and the processing head 5 and the laser unit (the laser power source 6 and the lightning unit) The light source 7, the optical fiber 8, and the modal scramblers 11, 12) are integrally moved in the Y direction. That is, even if the processing head 5 is moved, the optical fiber 8 is not deformed, and is moved while maintaining the fixed state.

Therefore, since the laser light source 7, the optical fiber 8, and the mode disturbers 11, 12 move together even if the processing head 5 moves, the optical fiber 8 is not deformed, and the reflection conditions in the optical fiber 8 can be constantly kept fixed, and the irradiation can be performed until The intensity distribution of the laser light of the substrate A is stable. As a result, laser light of a uniform intensity distribution can be constantly irradiated, and high-precision laser processing can be continued.

Moreover, since the fiber 8 is not deformed, it can be prevented from being repeatedly caused. The deterioration of the optical fiber 8 which is easily damaged.

Further, in the present embodiment, only the lighter processing head 5 is attached to the cantilever beam head mounting portion 18, and the larger laser power source 6 and the laser light source 7 are disposed on the gate type horizontal column 20. Since the vertical direction of the lead is moved, the load applied to the head mounting portion 18 can be minimized. Thus, the high precision movement of the processing head 5 can be performed, and the laser processing can be performed with good precision.

Further, in the present embodiment, the glass substrate A is floated by the floating table 2, and the adsorption transfer table 3 is moved in the X direction, and the processing head 5 is moved in the Y direction by the overhead 4 to perform the substrate A. Substantially comprehensive microscopic examination and laser processing, instead, the substrate A can be fixed so that the overhead frame 4 is always moved in the X direction, and the processing head 5 and the laser unit are moved along the horizontal column 20 of the overhead frame 4 in the Y direction. .

Hereinafter, the internal structure of the processing head 5 of the defect correction device 1 will be described with reference to Fig. 2 in particular.

The laser light source 7 is a light source for repairing processing. In the present embodiment, as shown in Figs. 3A and 3B, a structure including a laser oscillator 7a, a coupling lens 7b, a half mirror 7c, and an LED light source 7e is employed.

The laser oscillator 7a is a laser that can remove the defects on the glass substrate A and oscillates the laser light whose wavelength is set and output. For example, a pulse oscillatable YAG laser or the like can be suitably used. The oscillation wavelength can be switched to the complex object to switch the complex oscillation wavelength.

The laser oscillator 7a is electrically connected to the control unit 22, and controls the oscillation in accordance with a control signal from the control unit 22.

The half mirror 7c reflects the laser light oscillated in the negative X-axis direction by the laser oscillator 7a toward the coupling lens 7b in the negative direction of the Y-axis. Further, the half mirror 7c transmits light that is emitted from the LED light source 7e toward the coupling lens 7b in the negative direction of the Y-axis.

Since the half mirror 7c reflects the laser light oscillated by the laser oscillator 7a toward the coupling lens 7b, the oscillation direction of the laser oscillator 7a can be determined in accordance with the device structure, so that the degree of freedom in design is increased, and space can be saved. Chemical.

The coupling lens 7b is an optical element for combining the laser light emitted from the laser oscillator 7a with the optical fiber 3.

The optical fiber 8 causes the laser beam coupled to the fiber end surface 8a by the coupling lens 7b to propagate inside and guide it into the processing head 5, and as the laser light 60, is emitted from the fiber end surface 8b. Since the laser light 60 is emitted after being propagated inside the optical fiber 8, even if the laser light of the laser oscillator 7a has a Gaussian distribution, light having a uniform uniformity in light quantity distribution is formed.

In addition, since the second diagram is a schematic diagram, the optical axis of the laser beam emitted from the laser oscillator 7a is shown along the Z direction, and in the present embodiment, as shown in FIG. 3B, along the X-axis direction. . However, the arrangement position and posture of the laser oscillator 7a are not limited to these.

Further, in addition to the above-described modal disturbers 11, 12, the uniformizing means of the laser light may be a homogeneous structure using various optical elements such as a fly-eye lens, a diffractive element, an aspherical lens or a kaleidoscope type rod. The structure of the machine, etc.

The processing head 5 holds an optical element or device such as a projection lens (projection optical system) 41, a spatial modulation element 42, an illumination optical system 43, an observation light source 44, an observation imaging lens 45, and an imaging element 46 in the casing 5a. .

The projection lens 41 is configured such that the fiber end surface 8b of the optical fiber 8 fixed to the casing 5a of the machining head 5 and the reference surface of the spatial modulation element 42 are conjugated, and the projection magnification is set so that the fiber end face 8b can be A lens or a lens group that illuminates the entire modulation region of the spatial modulation element 42.

In Fig. 2, the optical axis P1 of the projection lens 41 is set in the ZY plane, and is inclined from the positive direction of the Z-axis toward the negative direction as it goes from the positive direction of the Y-axis to the negative direction.

The spatial modulation element 42 is a spatial modulation of the laser light 61 projected from the projection lens 41, and is composed of a DMD (Digital Mirror Device) of a micro mirror array, and can control the shaking of the plurality of micro mirrors in the modulation region of the rectangle. The spacing is two-dimensionally arranged.

In the present embodiment, the mirror 47 is disposed on the optical path of the laser light 61, and the optical axis P1 of the laser light 61 is reflected in the direction of the optical axis P2. Further, the laser beam 61 is reflected as the start light 62 along the optical axis P3 along the normal line of the reference surface of the spatial modulation element 42, and is placed at a predetermined angle with respect to the normal line of the reference surface of the spatial modulation element 42. Further, the optical axes P1, P2 are located on the same plane as the optical axis P3 of the start light 62.

The illuminating optical system 43 constitutes an optical element group of the imaging optical system that images the image of the illuminating light 62 that is spatially modulated by the spatial modulating element 42 and is reflected in a certain direction at a desired magnification on the glass substrate A. The imaging lens 48 It is disposed on the side of the spatial modulation element 42 and the objective lens 9 is disposed on the side of the glass substrate A.

The objective lens 9 is composed of a plurality of objective lenses such as an objective lens for ultraviolet rays for processing a resist pattern of the glass substrate A. The plurality of objective lenses are held in a state in which the rotator mechanism can be switched, and the magnifications are different from each other. Therefore, by rotating the rotator mechanism and switching the objective lens 9, the magnification of the illuminating optical system 8 can be changed. Hereinafter, the objective lens 9 is a lens that selects the illumination optical system 43 as long as it is not particularly limited.

Further, in the present embodiment, the optical axis P4 of the imaging lens 48 is disposed in parallel with the Y-axis direction, and the optical axis P5 of the objective lens 9 is disposed in parallel with the Z-axis direction.

Therefore, a reflection start light 62 is provided between the spatial modulation element 42 and the imaging lens 48 so as to be incident on the mirror 49 along the optical axis P4. Further, between the imaging lens 48 and the objective lens 9, a half mirror 51 that reflects light transmitted through the imaging lens 48 and enters along the optical axis P5 is provided.

In this manner, the optical axes P4 and P5 are located on the same plane as the optical axes P1, P2, and P3. In other words, the micro-mirror reflection of the spatial modulation element 42 in the activated state from the laser light source 7a is formed, and the optical axes P1 to P5 of the first optical axis that reaches the substrate A via the illumination optical system 43 are located on the same plane.

Further, both the mirror 49 and the half mirror 51 are inclined only around the X-axis.

The observation light source 44 generates a light source for illuminating the observation light 70 in the processable region on the glass substrate A, and is disposed on the side of the optical path between the half mirror 51 and the objective lens 9.

A half mirror 52 that transmits the start light 62 reflected by the half mirror 51 and reflects the observation light 70 toward the objective lens 9 is disposed at a position opposite to the observation light source 44 in the optical path between the half mirror 51 and the objective lens 9. . Further, between the observation light source 44 and the half mirror 52, a collecting lens 53 for collecting the observation light 70 into an illumination beam of a suitable diameter is provided. Further, the optical axis P6 of the collecting lens 53 may be on the plane where the first optical axis is located, or may be at the intersection.

The observation light source 44 can employ a suitable light source such as a xenon lamp or LED that produces visible light. In addition, an autofocus unit having a light source for autofocus may be provided to control the front focus position of the objective lens 9.

The observation imaging lens (photographing optical system) 45 is disposed coaxially with the optical axis P5 of the objective lens 9 on the upper side of the half mirror 51 for reflecting the glass substrate A illuminated by the observation light 70, and is an objective lens. The optical elements of the nine collected light are imaged on the imaging surface of the imaging element (photographing unit) 46. Therefore, the optical axis P5 also serves as the second optical axis from the substrate A to the imaging unit via the imaging optical system. Further, the imaging element 46 is an image photoelectric converter that images on the imaging surface, and is constituted by a CCD or the like.

In the present embodiment, the device configuration of the control unit 22 is composed of a combination of a computer including a CPU, a memory, an input/output unit, an external memory device, and the like, and a suitable hardware. The control unit 22 controls the actor of the defect correction device 1 according to an operation input of a user interface of an appropriate operation input mechanism such as an operation panel, a keyboard, a mouse, etc., and is electrically connected to the laser light source 7 and the spatial modulation component 42. The component 46 is photographed to control the respective actions and action times.

The control unit 22 sends a control signal for oscillating the laser light to the laser oscillator 7a, and oscillates the laser light from the laser oscillator 7a in accordance with the irradiation conditions previously selected in accordance with the substrate A. The irradiation conditions of the laser light include a wavelength, a light output, an oscillation pulse width, and the like.

The oscillating laser light is optically coupled to the fiber end face 8a of the optical fiber 8 by the combining lens 7b, and the laser light 60 of the divergent light whose light intensity distribution is uniform is emitted from the fiber end face 8b by the modal disturbers 11, 12 and the linear portion 8c. .

Further, in the present embodiment, the defect correction device 1 for correcting the defect of the glass substrate A manufactured by the FPD process is described. The defect correction device 1 can also be used as a defect corrector for performing the semiconductor wafer substrate.

4A and 4B are schematic side views for explaining a laser light source 17 of a defect correction device according to a modification of the embodiment of the present invention.

Further, in FIGS. 4A and 4B, the movable directions of the coupling lens 17b, the half mirror 17c, and the mirror 17d are attached with symbols in parentheses.

The laser light source 17 of the present modification has a laser oscillator 17a, a coupling lens 17b, a half mirror 17c as a reflection member, and a mirror 17d. Unlike the laser light source 7 of the above-described embodiment, the point where the mirror 17d is disposed and the coupling lens 17b, the half mirror 17c, and the mirror 17d are movable, and the optical fiber 8 is placed in the same manner as in the above-described embodiment. The state disturbers 11, 12 are formed with a straight portion 8c.

As shown in Fig. 4B, the laser light emitted from the laser oscillator 17a in the negative direction of the X-axis is reflected in the positive direction of the Z-axis by the mirror 17d as shown in Fig. 4A, and further negatively reflected by the half mirror 17c on the Y-axis. The direction is reflected and incident on the combining lens 17b. Further, the half mirror 17c transmits light emitted from the LED light source 17e which is the guiding light for displaying the laser irradiation position toward the coupling lens 7b in the negative direction of the Y-axis.

On the other hand, when the micro mirrors of the spatial modulation element 42 shown in FIG. 2 are arranged at equal intervals and are inclined in the same direction, the laser light P2 acts as a diffraction grating. The laser light 61 reflected by the mirror 47 is diffracted by the wavelength of the arrangement and the arrangement pitch of the micro mirrors of the spatial modulation element 42.

Therefore, by adjusting the tilt of the projection optical system 41, the spatial modulation element 42, and the mirror 47, and guiding the diffracted light to the optical axis P4 of the imaging lens 48, laser light having high diffraction efficiency can be obtained.

The optical fiber 8 shown in FIGS. 4A and 4B of the present modification is modally disturbed except for the laser light source 7 to the projection optical system 41 in the same manner as the third embodiment and the third embodiment of the above-described third embodiment. The devices 11 and 12 are slightly curved and formed outside the straight portion 8c, and no loop is left which allows excessive slack.

The combining lens 17b of the present modification can be separated from the half mirror 17c, the mirror 17d, and the laser oscillator 17a, and moved in the Y-axis direction (optical axis direction), in other words, the half mirror 17c, the mirror 17d, and the laser can be adjusted. The relative position of the oscillator 17a allows the incident side end face 8a of the optical fiber 8 to move in the Y-axis direction as the tilt of the projection optical system 41 is adjusted.

Further, the coupling lens 17b and the half mirror 17c are separately movable from the mirror 17d and the laser oscillator 17a, and are integrally moved in the Z-axis direction of the optical axis direction of the laser beam reflected to the mirror 17d, in other words, the mirror 17d and the mirror 17d can be adjusted. The relative position of the laser oscillator 17a allows the incident side end face 8a of the optical fiber 8 to move in the Z-axis direction as the tilt of the projection optical system 41 is adjusted.

Further, the combining lens 17b, the half mirror 17c, and the mirror 17d can be separated from the laser oscillator 17a and integrally moved in the Z-axis direction (the optical axis direction of the laser light emitted from the laser oscillator 7a), in other words, The position relative to the laser oscillator 17a is adjusted to allow the incident side end face 8a of the optical fiber 8 to move in the X-axis direction as the projection optical system 41 is tilted.

As described above, in the present modification, the coupling lens 17b is disposed in a state in which the relative position to the laser oscillation portion 17a can be adjusted. Further, the coupling lens 17b and the reflection member (the half mirror 17c and the mirror 17d) are disposed in a state in which the relative position to the laser oscillator 17a can be adjusted.

Therefore, the coupling lens 17b, the half mirror 17c, and the mirror 17d are separated from the laser oscillator 17a, and are appropriately moved to allow the movement of the XYZ axis of the incident end surface 8a of the optical fiber 8 in the three-axis direction.

Therefore, in the present modification, the projection optical system 41 connected to the optical fiber 8 can be freely inclined. Therefore, by irradiating the diffracted light to the optical axis P4 of the imaging lens 48, laser light having high diffraction efficiency can be obtained.

1. . . Defect correction device

2. . . Floating platform

3. . . Adsorption conveyor

3a. . . Adsorption section

4. . . Elevated

5. . . Processing head

5a. . . case

6. . . Laser power supply

7. . . Laser source

7a, 17a. . . Laser oscillator

7b, 17b. . . Combined lens

7c, 17c, 51, 52. . . Half mirror

7e, 17e. . . LED light source

8. . . optical fiber

8a. . . Incident side end face

8b. . . Injection side end face

8c. . . Straight line

9. . . Objective lens

11,12. . . Modal scrambler

11a-11c, 12a-12c. . . Screw

17,60,61. . . laser

17d, 47, 49. . . mirror

18. . . Head mounting

19. . . Laser light source unit mounting section

20. . . Horizontal column

twenty one. . . track

twenty two. . . control unit

twenty three. . . Substrate arrangement mechanism

41. . . Projection lens

42. . . Spatial modulation component

43. . . Illumination optical system

44. . . Observation light source

45. . . Imaging lens for observation

46. . . Shooting component

48. . . Imaging lens

53. . . Collecting lens

62. . . Start light

70. . . Observation light

A. . . glass substrate

L. . . length

P1-P6. . . Optical axis

Fig. 1A is a plan view showing a defect correcting device according to an embodiment of the present invention.

Fig. 1B is a front view showing a defect correction device according to an embodiment of the present invention.

Fig. 2 is a schematic block diagram showing the internal structure of a machining head of the defect correction device according to the embodiment of the present invention.

Fig. 3A is a schematic side view showing an optical fiber and a mode disturber for explaining a defect correction device according to an embodiment of the present invention.

Fig. 3B is a schematic front view showing an optical fiber and a mode disturber of the defect correction device according to the embodiment of the present invention.

Fig. 4A is a schematic side view showing a laser light source for explaining a defect correction device according to a modification of the embodiment of the present invention.

Fig. 4B is a schematic front view showing a laser light source of the defect correction device according to a modification of the embodiment of the present invention.

7. . . Laser source

7a. . . Laser oscillator

7b. . . Combined lens

7c. . . Half mirror

7e. . . LED light source

8. . . optical fiber

8a. . . Incident side end face

8b. . . Injection side end face

8c. . . Straight line

11,12. . . Modal scrambler

11a-11c, 12a-12c. . . Screw

41. . . Projection lens

L. . . length

Claims (5)

A defect correction device is a projection optical system that guides laser light emitted from a laser light source to a processing head by a fiber, and spatially modulates the laser light emitted from the projection optical system by a spatial modulation component and passes through the objective lens The method of correcting a defect on the substrate includes: a substrate stage for holding the substrate in a planar state; a gate type overhead frame being separated by the substrate table; the laser light source unit is mounted a portion that is disposed in a state of being movable along the upper surface of the elevated horizontal column and mounted with the laser light source; the head mounting portion is integrally fixed to the laser light source unit mounting portion, and is disposed along the foregoing The side of the elevated horizontal column moves and the processing head is mounted; the optical fiber is connected between the laser light source mounted on the mounting portion of the laser light source unit and the processing head mounted on the head mounting portion; The modal scrambler slightly bends the optical fibers in two directions orthogonal to each other, and adjusts the pressing amount of the optical fibers to adjust the modal value in the optical fiber. And a fixing member that fixes an exit side of the optical fiber to the laser light source unit mounting portion, and a straight portion formed on an exit side of the optical fiber, wherein the straight portion is formed to have a uniform intensity distribution of the laser light. And extending in a straight line toward the exit side end surface in conformity with the optical axis of the projection optical system. The fixing member is fixed to the laser light source unit mounting portion such that the linear portion has a linear shape with respect to an optical axis of the projection optical system. The defect correction device of claim 1, wherein the modal scrambler is provided with two screws on one side of the optical fiber via the optical fiber, and is disposed on the other side of the optical fiber between the two screws. One screw is screwed to at least one of the screws to adjust the amount of pressing of the optical fiber. The defect correction device of claim 1, wherein the modal scrambler is provided with two pins on one side of the optical fiber via the optical fiber, and is formed on the other side of the optical fiber between the two pins. One screw is disposed, and the aforementioned one screw is screwed, and the amount of pressing of the aforementioned optical fiber is adjusted. The defect correction device of claim 1, wherein the laser light source has: a laser oscillation portion for oscillating the laser light; and a coupling lens for oscillating from the laser oscillation portion The laser light is coupled to the end of the optical fiber; and the combined lens is disposed in a state in which the relative position of the laser oscillation portion is adjustable. The defect correction device of claim 4, wherein the laser light source further has a reflection member for reflecting the laser light oscillated from the oscillating portion to the coupling lens, and the coupling lens and the reflection member are adjustable The aforementioned thunder In a state in which the relative positions of the oscillating portions are arranged, the bonded lens is disposed in a state in which the relative position of the reflecting member is adjustable.