TWI503947B - Multiple die stacking for two or more die in microelectronic packages, modules, and systems - Google Patents

Multiple die stacking for two or more die in microelectronic packages, modules, and systems Download PDF

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Publication number
TWI503947B
TWI503947B TW102138051A TW102138051A TWI503947B TW I503947 B TWI503947 B TW I503947B TW 102138051 A TW102138051 A TW 102138051A TW 102138051 A TW102138051 A TW 102138051A TW I503947 B TWI503947 B TW I503947B
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TW
Taiwan
Prior art keywords
microelectronic
component
contacts
module
components
Prior art date
Application number
TW102138051A
Other languages
Chinese (zh)
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TW201423954A (en
Inventor
Wael Zohni
Belgacem Haba
Original Assignee
Tessera Inc
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Priority claimed from US13/658,401 external-priority patent/US8952516B2/en
Application filed by Tessera Inc filed Critical Tessera Inc
Publication of TW201423954A publication Critical patent/TW201423954A/en
Application granted granted Critical
Publication of TWI503947B publication Critical patent/TWI503947B/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K19/00Record carriers for use with machines and with at least a part designed to carry digital markings
    • G06K19/06Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07745Mounting details of integrated circuit chips
    • G06K19/07747Mounting details of integrated circuit chips at least one of the integrated circuit chips being mounted as a module
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    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
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Description

在微電子封裝、模組和系統中堆疊兩個或更多個晶粒的複合晶粒Stacking composite grains of two or more grains in a microelectronic package, module, and system

本發明係有關於堆疊的微電子組件與製造此種組件的方法以及在此種組件中有用的構件。The present invention is directed to stacked microelectronic assemblies and methods of making such assemblies and components useful in such assemblies.

相關申請案之交互參照Cross-references to related applications

本申請案是2011年11月29日申請的美國專利申請案序號13/306,203的一部分接續案,該美國專利申請案係主張2011年4月21日申請的美國臨時專利申請案序號61/477,820的申請日之益處,該些申請案的揭露內容茲被納入在此作為參考。以下都是2011年4月21日申請的共同擁有的申請案茲被納入在此作為參考:美國臨時專利申請案序號61/477,877、61/477,883以及61/477,967。This application is a continuation-in-part of U.S. Patent Application Serial No. 13/306,203, filed on Nov. 29, 2011, which is incorporated herein by reference. The benefits of the filing date are disclosed in this application. The following are commonly owned applications filed on Apr. 21, 2011, which are incorporated herein by reference in its entirety in the U.S. Provisional Patent Application Serial Nos. 61/477,877, 61/477,883, and 61/477,967.

半導體晶片通常是以個別預先被封裝的單元加以提供。標準的晶片係具有一平坦的矩形主體,其具有一大的前表面,其係具有連接至該晶片的內部電路的接點。每一個別的晶片通常被安裝在一封裝中,該封裝於是被安裝在一例如是印刷電路板的電路板之上,並且其係將該晶片的接點連接至該電路板的導體。在許多習知的設計中,該晶片封裝係佔用該電路板的一面積是遠大於該晶片本身的面積。Semiconductor wafers are typically provided in units that are individually packaged in advance. A standard wafer system has a flat rectangular body with a large front surface that has contacts that are connected to internal circuitry of the wafer. Each individual wafer is typically mounted in a package that is then mounted over a circuit board such as a printed circuit board and that connects the contacts of the wafer to the conductors of the circuit board. In many conventional designs, the area of the chip package that occupies the board is much larger than the area of the wafer itself.

如同在此揭露內容中參照到一具有一前表面之平坦的晶片 所用的,該“晶片的面積”應該被理解為指的是該前表面的面積。在“覆晶”設計中,該晶片的前表面係面對一封裝基板(亦即,晶片載體)的面,並且在該晶片上的接點係藉由焊料球或是其它連接元件來直接接合到該晶片載體的接點。於是,該晶片載體可透過覆蓋該晶片的前表面的端子而被接合到一電路板。該“覆晶”設計係提供一種相當小型的配置;每個晶片係佔用該電路板的一面積等於或稍大於該晶片的前表面的面積,例如是揭露在共同受讓的美國專利號5,148,265;5,148,266;以及5,679,977的某些實施例內者,該些專利的揭露內容係被納入在此作為參考。Referring to a flat wafer having a front surface as disclosed herein As used herein, the "area of the wafer" should be understood to refer to the area of the front surface. In a "flip-chip" design, the front surface of the wafer faces the face of a package substrate (ie, the wafer carrier), and the contacts on the wafer are directly bonded by solder balls or other connecting elements. The junction to the wafer carrier. Thus, the wafer carrier can be bonded to a circuit board through terminals that cover the front surface of the wafer. The "flip-chip" design provides a relatively small configuration; each wafer occupies an area of the board equal to or slightly larger than the area of the front surface of the wafer, for example, as disclosed in commonly assigned U.S. Patent No. 5,148,265; The disclosures of the patents are hereby incorporated by reference.

某些創新的安裝技術係提供緊密度是接近或等於習知的覆晶接合之緊密度。可以在等於或稍大於晶片本身的面積之電路板的一面積內容納單一晶片的封裝通常被稱為“晶片尺寸的封裝”。Some innovative mounting techniques provide tightness that is close to or equal to the tightness of conventional flip chip bonding. A package that can accommodate a single wafer in an area of a board equal to or slightly larger than the area of the wafer itself is commonly referred to as a "wafer sized package."

除了最小化微電子組件所佔用的電路板之平面的面積之外,產生一種垂直於該電路板的平面而呈現一低的整體高度或尺寸的晶片封裝也是所期望的。此種薄的微電子封裝係容許一具有該封裝被安裝在其中的電路板能夠相當接近相鄰的結構之設置,因此縮小了納入該電路板的產品之整體尺寸。In addition to minimizing the area of the plane of the board occupied by the microelectronic assembly, it is also desirable to create a wafer package that exhibits a low overall height or size perpendicular to the plane of the board. Such a thin microelectronic package allows a circuit board having the package to be mounted therein to be relatively close to the arrangement of adjacent structures, thereby reducing the overall size of the product incorporated into the board.

各種的提案已經被提出以用於在單一封裝或模組中設置複數個晶片。在習知的“多晶片模組”中,該些晶片係並排地被安裝在單一封裝基板上,該封裝基板於是可被安裝到電路板。此種方法僅提供在該些晶片所佔用的電路板的總成面積上之有限的縮小。該總成面積仍然大於該些個別的晶片在該模組中的總表面積。Various proposals have been made for arranging a plurality of wafers in a single package or module. In conventional "multi-chip modules", the wafers are mounted side-by-side on a single package substrate, which can then be mounted to a circuit board. This approach only provides a limited reduction in the area of the board occupied by the wafers. The assembly area is still greater than the total surface area of the individual wafers in the module.

也已經提出的是封裝複數個晶片在一種“堆疊”配置中,亦 即,一種其中複數個晶片係被設置成一個是在另一個的頂端上的配置。在一堆疊配置中,數個晶片可被安裝在電路板的一個小於該些晶片的總面積之面積內。例如,某些堆疊的晶片配置係被揭示在前述的美國專利號5,679,977;5,148,265;以及美國專利號5,347,159的某些實施例中,該專利的揭露內容係被納入在此作為參考。亦被納入在此作為參考的美國專利號4,941,033係揭示一種其中晶片係堆疊在另一個的頂端上,並且藉由在和該些晶片相關之所謂的“佈線膜”上的導體來彼此互連之配置。It has also been proposed to package a plurality of wafers in a "stacked" configuration, That is, a configuration in which a plurality of wafer systems are disposed one on top of the other. In a stacked configuration, a plurality of wafers can be mounted within an area of the board that is less than the total area of the wafers. For example, some of the stacked wafer configurations are disclosed in the aforementioned U.S. Patent Nos. 5,679,977; 5,148,265; and U.S. Patent No. 5,347,159, the disclosure of which is incorporated herein by reference. U.S. Pat. Configuration.

儘管在多晶片封裝中已經達成一些進步,但仍然有需要改良以便於最小化尺寸並且改善此種封裝的效能。本發明的這些屬性係藉由如下所述的微電子組件的結構來加以達成。Despite some advances in multi-chip packaging, there is still a need for improvements to minimize size and improve the performance of such packages. These attributes of the present invention are achieved by the structure of the microelectronic assembly as described below.

根據本發明之一特點,一種微電子封裝可包含一具有第一及第二相對的表面之基板、以及具有面對該基板的該第一表面的前表面之第一及第二微電子元件。該基板可具有複數個在該第一表面的基板接點以及複數個在該第二表面的端子,該些端子係被配置以用於連接該微電子封裝到該封裝外部的至少一構件。每個微電子元件可具有複數個在其前表面的元件接點。每個微電子元件的該些元件接點可以和該些基板接點中之對應的基板接點連結。該第二微電子元件的該前表面可以部分地覆蓋該第一微電子元件的一後表面並且可以附接至該後表面。該第一微電子元件的該些元件接點可以用一區域陣列來加以配置,並且和一第一組的基板接點覆晶接合。該第二微電子元件的該些元件接點可以藉由導電塊來和一第二組的基板接點連結。In accordance with a feature of the invention, a microelectronic package can include a substrate having first and second opposing surfaces, and first and second microelectronic components having a front surface facing the first surface of the substrate. The substrate can have a plurality of substrate contacts on the first surface and a plurality of terminals on the second surface, the terminals being configured to connect the microelectronic package to at least one component external to the package. Each microelectronic element can have a plurality of component contacts on its front surface. The component contacts of each of the microelectronic components can be coupled to corresponding ones of the substrate contacts. The front surface of the second microelectronic element can partially cover a rear surface of the first microelectronic element and can be attached to the back surface. The component contacts of the first microelectronic component can be configured with an array of regions and are flip-chip bonded to a first set of substrate contacts. The component contacts of the second microelectronic component can be coupled to a second set of substrate contacts by conductive pads.

在一特定的例子中,該第二微電子元件的該些元件接點可以突出超過該第一微電子元件的一橫向邊緣。在一實施例中,該第一及第二微電子元件中之至少一個可包含一記憶體儲存元件。在一範例實施例中,該微電子封裝亦可包含複數個從該些基板接點中的至少某些個延伸至該些端子的引線。該些引線可以是可用以載有一位址信號,該位址信號可用以定址在該第一及第二微電子元件中之至少一個中的該記憶體儲存元件。在一例子中,該些端子中的至少某些個可以是可用以在該些個別的端子以及該第一及第二微電子元件的每一個之間載有一信號或是一參考電位中的至少一個。In a particular example, the component contacts of the second microelectronic component can protrude beyond a lateral edge of the first microelectronic component. In an embodiment, at least one of the first and second microelectronic components can comprise a memory storage component. In an exemplary embodiment, the microelectronic package may also include a plurality of leads extending from at least some of the substrate contacts to the terminals. The leads may be usable to carry an address signal that may be used to address the memory storage element in at least one of the first and second microelectronic components. In an example, at least some of the terminals may be operable to carry at least one of a signal or a reference potential between the individual terminals and each of the first and second microelectronic components One.

在一實施例中,該微電子封裝亦可包含複數個第三微電子元件,每個第三微電子元件係電連接至該基板。在一特定的例子中,該複數個第三微電子元件可以用一堆疊配置來加以配置,該些第三微電子元件的每一個係具有一前表面或後表面面對該些第三微電子元件中之一相鄰的一個的一前表面或後表面。在一實施例中,該複數個第三微電子元件可以用一平面的配置來加以配置,該些第三微電子元件的每一個係具有一週邊表面面對該些第三微電子元件中之一相鄰的一個的一週邊表面。In one embodiment, the microelectronic package can also include a plurality of third microelectronic components, each of the third microelectronic components being electrically connected to the substrate. In a specific example, the plurality of third microelectronic components can be configured in a stacked configuration, each of the third microelectronic components having a front or back surface facing the third microelectronics a front or back surface of an adjacent one of the elements. In one embodiment, the plurality of third microelectronic components can be configured in a planar configuration, each of the third microelectronic components having a peripheral surface facing the third microelectronic component a peripheral surface of an adjacent one.

在一範例實施例中,該第二微電子元件可包含揮發性RAM,該些第三微電子元件分別可以包含非揮發性快閃記憶體,並且該第一微電子元件可包含一被組態設定以主要控制在一外部的構件以及該第二及第三微電子元件之間的資料傳輸的處理器。在一例子中,該第二微電子元件可包含一揮發性框緩衝器(frame buffer)記憶體儲存元件,該些第三微電子元件分別可以包含非揮發性快閃記憶體,並且該第一微電子元件可包含 一繪圖處理器。In an exemplary embodiment, the second microelectronic component may include a volatile RAM, and the third microelectronic component may respectively include a non-volatile flash memory, and the first microelectronic component may include a configured A processor is provided that primarily controls an external component and data transfer between the second and third microelectronic components. In an example, the second microelectronic component can include a volatile frame buffer memory storage component, and the third microelectronic components can each include a non-volatile flash memory, and the first Microelectronic components can include A graphics processor.

在一特定的實施例中,一種系統可包含複數個如上所述的微電子封裝、一電路板以及一處理器。該微電子封裝的該些端子可以和該電路板的板接點電連接。每個微電子封裝可被配置以在一時脈週期中平行地傳輸一數目N個的資料位元。該處理器可被配置以在一時脈週期中平行地傳輸一數目M個的資料位元,M係大於或等於N。在一特定的例子中,一種系統可包含一如上所述的微電子封裝以及一或多個電連接至該微電子封裝的其它電子構件。在一實施例中,該系統亦可包含一殼體,該微電子封裝以及該些其它電子構件係被安裝到該殼體。In a particular embodiment, a system can include a plurality of microelectronic packages, a circuit board, and a processor as described above. The terminals of the microelectronic package can be electrically connected to the board contacts of the circuit board. Each microelectronic package can be configured to transmit a number N of data bits in parallel in a clock cycle. The processor can be configured to transmit a number M of data bits in parallel in a clock cycle, the M system being greater than or equal to N. In a particular example, a system can include a microelectronic package as described above and one or more other electronic components electrically coupled to the microelectronic package. In an embodiment, the system can also include a housing to which the microelectronic package and the other electronic components are mounted.

根據本發明的另一特點,一種模組可包含一具有第一及第二表面的模組卡以及具有前表面面對該模組卡的該第一表面的第一及第二微電子元件。該模組卡可具有複數個平行的露出的邊緣接點相鄰該第一及第二表面中的至少一個的一邊緣,以用於在該模組被插入在一插座中時和該插座之對應的接點配接。該模組卡可具有複數個在該第一表面的卡接點。每個微電子元件可具有複數個在其前表面的元件接點。每個微電子元件的該些元件接點可以和該些卡接點中之對應的卡接點連結。該第二微電子元件的該前表面可以部分地覆蓋該第一微電子元件的一後表面,並且可以附接至該後表面。該第一微電子元件的該些元件接點可以用一區域陣列來加以配置,並且可以和一第一組的卡接點覆晶接合。該第二微電子元件的該些元件接點可以藉由導電塊來和一第二組的卡接點連結。According to another feature of the invention, a module can include a module card having first and second surfaces and first and second microelectronic components having a front surface facing the first surface of the module card. The module card may have a plurality of parallel exposed edge contacts adjacent to an edge of at least one of the first and second surfaces for use when the module is inserted into a socket and the socket The corresponding contacts are mated. The module card can have a plurality of snap points on the first surface. Each microelectronic element can have a plurality of component contacts on its front surface. The component contacts of each of the microelectronic components can be coupled to corresponding ones of the card contacts. The front surface of the second microelectronic element can partially cover a rear surface of the first microelectronic element and can be attached to the back surface. The component contacts of the first microelectronic component can be configured with an array of regions and can be flip-chip bonded to a first set of snap contacts. The component contacts of the second microelectronic component can be coupled to a second set of snap contacts by conductive pads.

在一範例實施例中,該第二微電子元件的該些元件接點可以突出超過該第一微電子元件的一橫向邊緣。在一例子中,該些邊緣接點可 以在該模組卡的該第一或第二表面中的至少一個被露出。在一特定的實施例中,該第一及第二微電子元件中之至少一個可包含一記憶體儲存元件。在一實施例中,該模組亦可包含複數個從該些卡接點中的至少某些個延伸至該些邊緣接點的引線。該些引線可以是可用以載有一位址信號,該位址信號可用以定址在該第一及第二微電子元件中之至少一個中的該記憶體儲存元件。在一特定的例子中,該些邊緣接點中的至少某些個可以是可用以在該個別的邊緣接點以及該第一及第二微電子元件的每一個之間載有一信號或是一參考電位中的至少一個。In an exemplary embodiment, the component contacts of the second microelectronic component can protrude beyond a lateral edge of the first microelectronic component. In an example, the edge contacts can be At least one of the first or second surfaces of the module card is exposed. In a particular embodiment, at least one of the first and second microelectronic components can comprise a memory storage component. In an embodiment, the module may also include a plurality of leads extending from at least some of the card contacts to the edge contacts. The leads may be usable to carry an address signal that may be used to address the memory storage element in at least one of the first and second microelectronic components. In a particular example, at least some of the edge contacts can be used to carry a signal or a signal between the individual edge contacts and each of the first and second microelectronic components. At least one of the reference potentials.

在一特定的例子中,該模組亦可包含複數個第三微電子元件,每個第三微電子元件係電連接至該模組卡。在一例子中,該複數個第三微電子元件可以用一堆疊的配置來加以配置,該些第三微電子元件的每一個係具有一前表面或後表面面對該些第三微電子元件中之一相鄰的一個的一前表面或後表面。在一特定的實施例中,該複數個第三微電子元件可以用一平面的配置來加以配置,該些第三微電子元件的每一個係具有一週邊表面面對該些第三微電子元件中之一相鄰的一個的一週邊表面。In a particular example, the module can also include a plurality of third microelectronic components, each of the third microelectronic components being electrically coupled to the module card. In one example, the plurality of third microelectronic components can be configured in a stacked configuration, each of the third microelectronic components having a front or back surface facing the third microelectronic component a front or back surface of one of the adjacent ones. In a particular embodiment, the plurality of third microelectronic components can be configured in a planar configuration, each of the third microelectronic components having a peripheral surface facing the third microelectronic component a peripheral surface of one of the adjacent ones.

在一實施例中,該第二微電子元件可包含揮發性RAM,該些第三微電子元件分別可以包含非揮發性快閃記憶體,並且該第一微電子元件可包含一被組態設定以主要控制在一外部的構件以及該第二及第三微電子元件之間的資料傳輸的處理器。在一特定的例子中,該第二微電子元件可包含一揮發性框緩衝器記憶體儲存元件,該些第三微電子元件分別可以包含非揮發性快閃記憶體,並且該第一微電子元件可包含一繪圖處理器。In an embodiment, the second microelectronic component can include a volatile RAM, the third microelectronic component can each include a non-volatile flash memory, and the first microelectronic component can include a configured A processor that primarily controls an external component and data transfer between the second and third microelectronic components. In a specific example, the second microelectronic component can include a volatile frame buffer memory storage component, and the third microelectronic component can each include a non-volatile flash memory, and the first microelectronic The component can include a graphics processor.

在一範例實施例中,一種系統可包含複數個如上所述的模 組、一電路板以及一處理器。該模組的該些露出的接點可被插入一配接的插座中,該插座係和該電路板電連接。每個模組可被配置以在一時脈週期中平行地傳輸一數目N個的資料位元。該處理器可被配置以在一時脈週期中平行地傳輸一數目M個的資料位元,M係大於或等於N。在一例子中,一種系統可包含一如上所述的模組以及一或多個電連接至該模組的其它電子構件。在一特定的實施例中,該系統亦可包含一殼體,該模組以及該些其它電子構件係被安裝到該殼體。In an exemplary embodiment, a system can include a plurality of modules as described above A group, a circuit board, and a processor. The exposed contacts of the module can be inserted into a mating receptacle that is electrically coupled to the circuit board. Each module can be configured to transmit a number N of data bits in parallel in a clock cycle. The processor can be configured to transmit a number M of data bits in parallel in a clock cycle, the M system being greater than or equal to N. In one example, a system can include a module as described above and one or more other electronic components electrically coupled to the module. In a particular embodiment, the system can also include a housing to which the module and the other electronic components are mounted.

10、210、310、410、510、610、710、810、910、1010、1010'‧‧‧模組10, 210, 310, 410, 510, 610, 710, 810, 910, 1010, 1010'‧‧‧ modules

12、612、912、1512‧‧‧間隔物12, 612, 912, 1512‧‧‧ spacers

14、914、1314‧‧‧黏著劑層14,914, 1314‧‧‧Adhesive layer

20、220、320、420、520、620、720、820、920、1020、1320、1520‧‧‧第一微電子元件20, 220, 320, 420, 520, 620, 720, 820, 920, 1020, 1320, 1520‧‧‧ first microelectronic components

21、321、421、721、921、1321‧‧‧前表面Front surface of 21, 321, 421, 721, 921, 1321‧‧

22、322、922、1322‧‧‧後表面22, 322, 922, 1322‧‧‧ rear surface

23、323、423、623、723、1523‧‧‧橫向邊緣23, 323, 423, 623, 723, 1523‧‧‧ lateral edges

24‧‧‧電性接點(晶片接點)24‧‧‧Electrical contacts (wafer contacts)

25、325‧‧‧中央區域25, 325‧‧‧Central Area

30、230、330、430、530、630、730、830、930、1030、1330、1430、1530‧‧‧第二微電子元件30, 230, 330, 430, 530, 630, 730, 830, 930, 1030, 1330, 1430, 1530‧‧‧ second microelectronic components

31、331、431、531、631、731、931、1331、1531‧‧‧前表面Front surface of 31, 331, 431, 531, 631, 731, 931, 1331, 1531‧‧

32‧‧‧後表面32‧‧‧Back surface

33、733‧‧‧橫向邊緣33, 733‧‧‧ lateral edges

34、234‧‧‧電性接點(晶片接點)34, 234‧‧‧Electrical contacts (wafer contacts)

35、435、535、635、1535‧‧‧中央區域35, 435, 535, 635, 1535‧‧‧ central area

40、240、340、440、540、640、840、1040、1140‧‧‧模組卡40, 240, 340, 440, 540, 640, 840, 1040, 1140‧‧‧ module cards

41、241、341、441、541、641、741、1041、1141、1341‧‧‧第一表面41, 241, 341, 441, 541, 641, 741, 1041, 1141, 1341‧‧‧ first surface

42、242、342、442、542、642、842、1042、1142、1342、1542‧‧‧第二表面42, 242, 342, 442, 542, 642, 842, 1042, 1142, 1342, 1542‧‧‧ second surface

43、843、1043、1043a‧‧‧插入邊緣43,843, 1043, 1043a‧‧‧ insert edge

44、244、344、444、544、844b、1044‧‧‧導電接點44, 244, 344, 444, 544, 844b, 1044‧‧‧ conductive contacts

45、845、845‧‧‧第一孔45, 845, 845‧‧‧ first hole

46、846‧‧‧第二孔46, 846‧‧‧ second hole

50、850、1050、1150‧‧‧邊緣接點50, 850, 1050, 1150‧‧‧ edge joints

55、855a、855b‧‧‧導電線路55, 855a, 855b‧‧‧ conductive lines

60‧‧‧第一囊封材料60‧‧‧First encapsulating material

65、465‧‧‧第二囊封材料65, 465‧‧‧Second encapsulation material

70、570、870、970‧‧‧引線70, 570, 870, 970‧‧‧ leads

71、72、272、371a、371b、372、471、472、971、972、1072‧‧‧導線接合71, 72, 272, 371a, 371b, 372, 471, 472, 971, 972, 1072‧‧‧ wire bonding

224、324、324a、324b、424、634、734、824、924、1024‧‧‧導電接點(晶片接點)224, 324, 324a, 324b, 424, 634, 734, 824, 924, 1024‧‧‧ conductive contacts (wafer contacts)

246、446、546、1046、1476‧‧‧孔246, 446, 546, 1046, 1476‧‧ holes

247、347、547、647、747、1047‧‧‧導電接點247, 347, 547, 647, 747, 1047‧‧‧ conductive contacts

273、675、775、1073、1351、1373、1375、1473、1575‧‧‧導電塊273, 675, 775, 1073, 1351, 1373, 1375, 1473, 1575‧‧‧ conductive blocks

434、534、534a、534b、834、934、1034、1534‧‧‧導電接點(晶片接點)434, 534, 534a, 534b, 834, 934, 1034, 1534‧‧‧ conductive contacts (wafer contacts)

574、574a、574b‧‧‧引線接合574, 574a, 574b‧‧‧ wire bonding

719‧‧‧行軸719‧‧‧ axis

724、724'、1324、1334、1434‧‧‧元件接點724, 724', 1324, 1334, 1434‧‧‧ component contacts

740‧‧‧模組卡(基板)740‧‧‧Module card (substrate)

747a、747b、1347、1347a、1347b、1447b、1547b‧‧‧基板接點747a, 747b, 1347, 1347a, 1347b, 1447b, 1547b‧‧‧ substrate contacts

848‧‧‧橫向邊緣848‧‧‧ lateral edges

913‧‧‧前表面913‧‧‧ front surface

915‧‧‧後表面915‧‧‧Back surface

945‧‧‧第一間隙945‧‧‧First gap

946‧‧‧第二間隙946‧‧‧Second gap

950‧‧‧模組接點950‧‧‧Modular contacts

960、1460‧‧‧囊封材料960, 1460‧‧‧ encapsulation materials

961‧‧‧插入部分961‧‧‧Insert part

962‧‧‧下方的表面Surface below 962‧‧

980‧‧‧引線架980‧‧‧ lead frame

981‧‧‧第一表面981‧‧‧ first surface

982‧‧‧第二表面982‧‧‧ second surface

983、1143‧‧‧插入邊緣983, 1143‧‧‧ insert edge

985‧‧‧引線(導電線路部分)985‧‧‧Lead (conducting line part)

1090、1090a、1090b、1090'‧‧‧第三微電子元件1090, 1090a, 1090b, 1090'‧‧‧ third microelectronic components

1100‧‧‧構件1100‧‧‧ components

1110a‧‧‧第一模組1110a‧‧‧ first module

1110b‧‧‧第二模組1110b‧‧‧ second module

1165‧‧‧層1165‧‧ layer

1200‧‧‧系統1200‧‧‧ system

1201‧‧‧殼體1201‧‧‧shell

1202‧‧‧電路板(主機板)1202‧‧‧Circuit board (main board)

1204‧‧‧導體1204‧‧‧Conductor

1205‧‧‧插座1205‧‧‧ socket

1206‧‧‧模組(構件)1206‧‧‧Modules (components)

1207‧‧‧接點1207‧‧‧Contacts

1208‧‧‧電子構件(半導體晶片)1208‧‧‧Electronic components (semiconductor wafers)

1210‧‧‧電子構件(顯示螢幕)1210‧‧‧Electronic components (display screen)

1211‧‧‧透鏡1211‧‧ lens

1310、1510‧‧‧微電子封裝1310, 1510‧‧‧Microelectronics package

1340、1540‧‧‧基板1340, 1540‧‧‧ substrate

1350、1550‧‧‧端子1350, 1550‧‧‧ terminals

1475‧‧‧導電柱1475‧‧‧conductive column

1477‧‧‧截頭錐形的柱1477‧‧‧Frustum-shaped column

1478‧‧‧截頭錐形的柱1478‧‧‧Frustum-shaped column

1479a、1479b‧‧‧導電柱1479a, 1479b‧‧‧ conductive column

1480‧‧‧細長的焊料連接1480‧‧‧Slim solder connection

1600‧‧‧系統1600‧‧‧ system

1601‧‧‧殼體1601‧‧‧shell

1602‧‧‧電路板(主機板、豎板)1602‧‧‧Circuit board (main board, riser)

1604‧‧‧導體1604‧‧‧Conductor

1606‧‧‧模組(構件)1606‧‧‧Modules (components)

1608‧‧‧電子構件(半導體晶片)1608‧‧‧Electronic components (semiconductor wafers)

1610‧‧‧電子構件(顯示螢幕)1610‧‧‧Electronic components (display screen)

1611‧‧‧透鏡1611‧‧‧ lens

圖1A是根據本發明的一實施例的一堆疊的微電子組件之概略的截面圖。1A is a schematic cross-sectional view of a stacked microelectronic assembly in accordance with an embodiment of the present invention.

圖1B是圖1A之堆疊的組件沿著圖1A的線1B-1B所取的仰視截面圖。Figure 1B is a bottom cross-sectional view of the assembly of Figure 1A taken along line 1B-1B of Figure 1A.

圖1C是圖1B之堆疊的組件沿著圖1B的線1C-1C所取的側截面圖。1C is a side cross-sectional view of the assembly of FIG. 1B taken along line 1C-1C of FIG. 1B.

圖2是根據另一具有一覆晶接合的微電子元件之實施例的一堆疊的微電子組件之概略的截面圖。2 is a schematic cross-sectional view of a stacked microelectronic assembly in accordance with another embodiment of a flip chip bonded microelectronic component.

圖3是根據另一具有一面朝上的微電子元件之實施例的一堆疊的微電子組件之概略的截面圖。3 is a schematic cross-sectional view of a stacked microelectronic assembly in accordance with another embodiment of a microelectronic component having an upward facing surface.

圖4是根據另一在該模組卡中具有單一窗口之實施例的一堆疊的微電子組件之概略的截面圖,附接至兩個微電子元件的導線接合係延伸穿過該窗口。4 is a cross-sectional view of a stacked microelectronic assembly in accordance with another embodiment having a single window in the module card with a wire bond system attached to two microelectronic elements extending through the window.

圖5是根據另一具有引線接合的實施例的一堆疊的微電子組件之概略的截面圖。Figure 5 is a schematic cross-sectional view of a stacked microelectronic assembly in accordance with another embodiment having wire bonding.

圖6是根據另一具有細長的焊料連接之實施例的一堆疊的微電子組件之概略的截面圖。Figure 6 is a schematic cross-sectional view of a stacked microelectronic assembly in accordance with another embodiment having an elongated solder joint.

圖7A是根據另一具有一微電子元件的實施例的一堆疊的微電子組件之概略的截面圖,其中接點係位在接近其之一邊緣處。7A is a cross-sectional view of a stack of microelectronic assemblies in accordance with another embodiment having a microelectronic component with the contacts tied near one of the edges.

圖7B是圖7A的堆疊的封裝沿著圖7A的線7B-7B所取的仰視截面圖。Figure 7B is a bottom cross-sectional view of the stacked package of Figure 7A taken along line 7B-7B of Figure 7A.

圖7C是展示用於圖7B的一部分的接點之一替代的配置之片段視圖。Figure 7C is a fragmentary view showing a configuration alternative to one of the contacts of a portion of Figure 7B.

圖8是圖1B之堆疊的組件的仰視截面圖之一變化,其中一微電子元件係具有中央接點的列被定向為實質垂直於另一微電子元件的中央接點的列。8 is a variation of a bottom cross-sectional view of the stacked assembly of FIG. 1B with a microelectronic component having a column of central contacts oriented substantially perpendicular to a column of central contacts of another microelectronic component.

圖9A是根據另一具有一引線架的實施例之一堆疊的微電子組件之概略的截面圖。Figure 9A is a schematic cross-sectional view of a microelectronic assembly stacked in accordance with another embodiment having a lead frame.

圖9B是圖9A的堆疊的組件沿著圖9A的線9B-9B所取的仰視截面圖。Figure 9B is a bottom cross-sectional view of the stacked assembly of Figure 9A taken along line 9B-9B of Figure 9A.

圖9C是圖9B之堆疊的組件沿著圖9B的線9C-9C所取的側截面圖。Figure 9C is a side cross-sectional view of the assembly of Figure 9B taken along line 9C-9C of Figure 9B.

圖10A是根據另一具有複數個堆疊的微電子元件之實施例的一堆疊的微電子組件在不展示囊封材料下之概略的俯視圖。10A is a diagrammatic top plan view of a stacked microelectronic assembly in accordance with another embodiment having a plurality of stacked microelectronic components without exhibiting encapsulation material.

圖10B是圖10A的堆疊的組件沿著圖10A的線10B-10B所取的側截面圖。Figure 10B is a side cross-sectional view of the stacked assembly of Figure 10A taken along line 10B-10B of Figure 10A.

圖10C是根據另一具有複數個彼此相鄰的微電子元件的實施例之一堆疊的微電子組件之概略的俯視圖。Figure 10C is a top plan view of a microelectronic assembly stacked according to another embodiment having a plurality of microelectronic elements adjacent to each other.

圖11是根據另一包含兩個彼此接合的模組卡的實施例的一堆疊的微電子組件之概略的立體圖。Figure 11 is a schematic perspective view of a stacked microelectronic assembly in accordance with another embodiment including two module cards joined to each other.

圖12是一種根據一包含複數個模組的實施例之系統之概要的繪圖。Figure 12 is a drawing of an overview of a system in accordance with an embodiment comprising a plurality of modules.

圖13A是根據另一實施例的一堆疊的微電子封裝之概略的截面圖。Figure 13A is a diagrammatic cross-sectional view of a stacked microelectronic package in accordance with another embodiment.

圖13B是圖1A的堆疊的封裝沿著圖13A的線13B-13B所取的仰視截面圖。Figure 13B is a bottom cross-sectional view of the stacked package of Figure 1A taken along line 13B-13B of Figure 13A.

圖14A-14E是圖13A之堆疊的微電子封裝中由圖13A的虛線的區域14所指出的一部分的變化之片段截面圖。14A-14E are fragmentary cross-sectional views of a portion of the microelectronic package of the stack of Fig. 13A as indicated by the region 14 of the dashed line of Fig. 13A.

圖15是根據另一具有細長的焊料連接的實施例的一堆疊的微電子封裝之概略的截面圖。15 is a schematic cross-sectional view of a stacked microelectronic package in accordance with another embodiment having an elongated solder joint.

圖16是根據本發明的一實施例的一種系統之概要的繪圖。16 is a drawing of an overview of a system in accordance with an embodiment of the present invention.

參考圖1A至1C,根據本發明的一實施例的一種模組10可包含一第一微電子元件20、一第二微電子元件30以及一具有露出的邊緣接點50之模組卡40。一第一囊封材料60可以覆蓋該微電子元件20及30以及該模組卡40的一部分。Referring to FIGS. 1A through 1C , a module 10 according to an embodiment of the invention may include a first microelectronic component 20 , a second microelectronic component 30 , and a module card 40 having an exposed edge contact 50 . A first encapsulating material 60 can cover the microelectronic components 20 and 30 and a portion of the module card 40.

在某些實施例中,該第一及第二微電子元件20及30中之至少一個可以是一半導體晶片、一晶圓或類似者。例如,該第一微電子元件20以及第二微電子元件30的一或兩者可包含一例如是DRAM的記憶體儲存元件。如同在此所用的,一“記憶體儲存元件”係指許多以一陣列配置的記憶單元以及可用以儲存資料並且從其擷取資料的電路,例如是用於在一電性介面上的資料傳輸。在一特定的例子中,該模組10可以內含在一單排內嵌式記憶體模組(“SIMM”)或是一雙排內嵌式記憶體模組(“DIMM”)中In some embodiments, at least one of the first and second microelectronic components 20 and 30 can be a semiconductor wafer, a wafer, or the like. For example, one or both of the first microelectronic component 20 and the second microelectronic component 30 can comprise a memory storage component such as a DRAM. As used herein, a "memory storage element" refers to a plurality of memory units arranged in an array and circuitry that can be used to store data and retrieve data therefrom, such as for data transmission over an electrical interface. . In a particular example, the module 10 can be contained in a single row of embedded memory modules ("SIMM") or a dual row of embedded memory modules ("DIMMs").

該第一微電子元件20可具有一前表面21、一遠離該前表面 21的後表面22、以及延伸在該前表面及後表面之間的橫向邊緣23。電性接點24係在該第一微電子元件20的前表面21被露出。如在此所述的,該第一微電子元件20的電性接點24亦可被稱為“晶片接點”。如同在此揭露內容中所用的,一導電的元件在一結構的一表面“被露出”的一項陳述係指該導電的元件是可利用於接觸在一垂直於該表面的方向上從該結構外部朝向該表面移動之一理論上的點。因此,在一結構的一表面被露出的一端子或是其它導電的元件可以從此種表面突出;可以是與此種表面齊平的;或是可以相對於此種表面而為凹陷的並且透過在該結構中的一孔洞或凹處而被露出。該第一微電子元件20的接點24係在該第一微電子元件的一中央區域25內的前表面21被露出。例如,該些接點24可以用一或兩個相鄰該前表面21的中心之平行的列來加以配置。The first microelectronic component 20 can have a front surface 21 away from the front surface The rear surface 22 of the 21 and the lateral edge 23 extending between the front and rear surfaces. Electrical contacts 24 are exposed on front surface 21 of first microelectronic element 20. As described herein, the electrical contacts 24 of the first microelectronic component 20 may also be referred to as "wafer contacts." As used in this disclosure, a statement that a conductive element is "exposed" on a surface of a structure means that the conductive element is available for contact from a structure in a direction perpendicular to the surface. The outer part moves toward the surface in a theoretical point. Thus, a terminal or other electrically conductive element that is exposed on a surface of a structure may protrude from such a surface; may be flush with such surface; or may be recessed relative to such surface and transmitted through A hole or recess in the structure is exposed. The contact 24 of the first microelectronic component 20 is exposed at a front surface 21 in a central region 25 of the first microelectronic component. For example, the contacts 24 can be configured with one or two parallel columns adjacent the center of the front surface 21.

該第二微電子元件30可具有一前表面31、一遠離該前表面31的後表面32、以及延伸在該前表面及後表面之間的橫向邊緣33。電性接點34係在該第二微電子元件30的前表面31被露出。如在此所述的,該第二微電子元件30的電性接點34亦可被稱為“晶片接點”。該第二微電子元件30的接點34係在該第二微電子元件的一中央區域35內的前表面31被露出。例如,該些接點34可以用一或兩個相鄰該前表面31的中心之平行的列來加以配置。The second microelectronic element 30 can have a front surface 31, a rear surface 32 remote from the front surface 31, and a lateral edge 33 extending between the front surface and the back surface. The electrical contacts 34 are exposed on the front surface 31 of the second microelectronic element 30. As described herein, the electrical contacts 34 of the second microelectronic component 30 may also be referred to as "wafer contacts." The contact 34 of the second microelectronic element 30 is exposed at a front surface 31 in a central region 35 of the second microelectronic element. For example, the contacts 34 can be configured with one or two parallel columns adjacent the center of the front surface 31.

如同在圖1A及1C中可見的,該第一及第二微電子元件20及30可以相對於彼此加以堆疊。在某些實施例中,該第二微電子元件30的前表面31以及該第一微電子元件20的後表面22可以彼此面對面。該第二微電子元件30的前表面31的至少一部分可以覆蓋該第一微電子元件20 的後表面22的至少一部分。該第二微電子元件30的中央區域35的至少一部分可以突出超過該第一微電子元件20的一橫向邊緣23。於是,該第二微電子元件30的接點34可被設置在一突出超過該第一微電子元件20的橫向邊緣23的位置中。As can be seen in Figures 1A and 1C, the first and second microelectronic elements 20 and 30 can be stacked relative to one another. In some embodiments, the front surface 31 of the second microelectronic element 30 and the back surface 22 of the first microelectronic element 20 can face each other. At least a portion of the front surface 31 of the second microelectronic element 30 can cover the first microelectronic element 20 At least a portion of the rear surface 22. At least a portion of the central region 35 of the second microelectronic element 30 can protrude beyond a lateral edge 23 of the first microelectronic element 20. Thus, the contact 34 of the second microelectronic element 30 can be disposed in a position that protrudes beyond the lateral edge 23 of the first microelectronic element 20.

該微電子組件10可進一步包含一具有背對的第一及第二表面41及42的模組卡40。一或多個導電接點44可以在該模組卡40的第二表面42被露出。該模組卡40可進一步包含一或多個孔,例如第一孔45及第二孔46。如同在圖1A及1C中所示,該個別的第一及第二微電子元件20、30的前表面21、31可以面對該模組卡40的第一表面41。The microelectronic assembly 10 can further include a module card 40 having first and second surfaces 41 and 42 facing away from each other. One or more conductive contacts 44 may be exposed at the second surface 42 of the module card 40. The module card 40 can further include one or more apertures, such as a first aperture 45 and a second aperture 46. As shown in FIGS. 1A and 1C, the front surfaces 21, 31 of the individual first and second microelectronic elements 20, 30 can face the first surface 41 of the module card 40.

該模組卡40可以是部份或全部由任何適當的介電材料所做成。例如,該模組卡40可包括例如是厚的纖維強化的環氧樹脂層之一相對剛性板狀的材料,例如Fr-4或Fr-5板。不論被採用的材料為何,該模組卡40都可以包含單一層或是多層的介電材料。在一特定的實施例中,該模組卡40可以實質由一種具有一小於30ppm/℃的熱膨脹係數(“CTE”)的材料所組成。The module card 40 can be made, in part or in whole, of any suitable dielectric material. For example, the module card 40 can comprise a relatively rigid plate-like material such as a thick fiber reinforced epoxy layer, such as a Fr-4 or Fr-5 plate. The module card 40 can comprise a single layer or multiple layers of dielectric material regardless of the material being used. In a particular embodiment, the module card 40 can be substantially comprised of a material having a coefficient of thermal expansion ("CTE") of less than 30 ppm/°C.

如同在圖1中可見的,該模組卡40可延伸超過該第一微電子元件20的一橫向邊緣23以及該第二微電子元件30的一橫向邊緣33。該模組卡40的第一表面41可以和該第一微電子元件20的前表面21並列置放。As can be seen in FIG. 1, the module card 40 can extend beyond a lateral edge 23 of the first microelectronic component 20 and a lateral edge 33 of the second microelectronic component 30. The first surface 41 of the module card 40 can be placed side by side with the front surface 21 of the first microelectronic component 20.

在圖1A至1C所描繪的實施例中,該模組卡40係包含一實質與該第一微電子元件20的中央區域25對準的第一孔45以及一實質與該第二微電子元件30的中央區域35對準的第二孔46,藉此透過該個別的第一及第二孔以提供至接點24及34的接達。該第一及第二孔45及46可以延 伸在該模組卡40的第一及第二表面41及42之間。如同在圖1B中所示,該孔45及46可以和該個別的第一及第二微電子元件20及30之對應的晶片接點24或34對準。In the embodiment depicted in FIGS. 1A through 1C, the module card 40 includes a first aperture 45 substantially aligned with the central region 25 of the first microelectronic component 20 and a substantially associated with the second microelectronic component. The central region 35 of the 30 is aligned with the second aperture 46, thereby passing through the respective first and second apertures to provide access to the contacts 24 and 34. The first and second holes 45 and 46 can be extended Extending between the first and second surfaces 41 and 42 of the module card 40. As shown in FIG. 1B, the apertures 45 and 46 can be aligned with corresponding wafer contacts 24 or 34 of the respective first and second microelectronic components 20 and 30.

該模組卡40亦可包含在其第二表面42被露出的導電接點44以及延伸在該些接點44與露出的邊緣接點50之間的導電線路55。該些導電線路55係電耦接該些接點44至該些露出的邊緣接點50。在一特定的實施例中,該些接點44可以是該些線路55個別的末端部分。The module card 40 can also include conductive contacts 44 that are exposed at the second surface 42 thereof and conductive traces 55 that extend between the contacts 44 and the exposed edge contacts 50. The conductive lines 55 electrically couple the contacts 44 to the exposed edge contacts 50. In a particular embodiment, the contacts 44 can be individual end portions of the lines 55.

在一特定的實施例中,該模組卡40可具有複數個相鄰該第一及第二表面41、42中的至少一個的一插入邊緣43之平行的露出的邊緣接點50,以用於在該模組10被插入一插座(展示在圖12中)時,和該插座之對應的接點配接。如同在圖1B中所示,該插入邊緣43可以被設置成使得該些孔45及46的每一個具有一延伸在一遠離該模組卡40的插入邊緣之方向上的長的尺寸L。該些邊緣接點50中的某些個或是全部可以在該模組卡40的第一或第二表面41、42的任一個或是兩者被露出。In a particular embodiment, the module card 40 can have a plurality of parallel exposed edge contacts 50 adjacent an insertion edge 43 of at least one of the first and second surfaces 41, 42 for use. When the module 10 is inserted into a socket (shown in FIG. 12), it is mated with a corresponding contact of the socket. As shown in FIG. 1B, the insertion edge 43 can be configured such that each of the apertures 45 and 46 has a long dimension L that extends in a direction away from the insertion edge of the module card 40. Some or all of the edge contacts 50 may be exposed at either or both of the first or second surfaces 41, 42 of the module card 40.

該些露出的邊緣接點50以及插入邊緣43的尺寸可以被製作以用於插入到一種系統的其它連接器之一對應的插座(圖12),例如可被設置在一主機板上。此種露出的邊緣接點50可以適合用於和此種插座連接器內之複數個對應的彈簧接點(圖12)配接。此種彈簧接點可被設置在每個槽的單一或多個側邊上,以和該些露出的邊緣接點50之對應者配接。在一例子中,該些邊緣接點50中的至少某些個可以是可用以在該個別的邊緣接點以及該第一及第二微電子元件20、30的每一個之間載有一信號或是一參考電位中的至少一個。The exposed edge contacts 50 and the insertion edges 43 may be sized for insertion into a corresponding socket (Fig. 12) of one of the other connectors of a system, for example, may be disposed on a motherboard. Such exposed edge contacts 50 can be adapted for mating with a plurality of corresponding spring contacts (Fig. 12) within such receptacle connectors. Such spring contacts can be provided on one or more sides of each slot to mate with the corresponding ones of the exposed edge contacts 50. In an example, at least some of the edge contacts 50 can be used to carry a signal or between each of the individual edge contacts and each of the first and second microelectronic components 20, 30. Is at least one of a reference potential.

如同在圖1A至1C中可見的,電連接或引線70可以電連接該第一微電子元件20的接點24以及該第二微電子元件30的接點34至該些露出的邊緣接點50。該些引線70可包含導線接合(wire bond)71及72以及該些導電線路55。在一實施例中,該些引線70可被視為電連接每個微電子元件20、30至該模組卡40。在一特定的例子中,該些引線70可以是可用以載有一位址信號,該位址信號可用以定址在該第一及第二微電子元件20、30中之至少一個中的一記憶體儲存元件。As can be seen in FIGS. 1A through 1C, electrical connections or leads 70 can electrically connect the contacts 24 of the first microelectronic component 20 and the contacts 34 of the second microelectronic component 30 to the exposed edge contacts 50. . The leads 70 can include wire bonds 71 and 72 and the conductive traces 55. In an embodiment, the leads 70 can be considered to electrically connect each of the microelectronic components 20, 30 to the module card 40. In a particular example, the leads 70 can be used to carry an address signal that can be used to address a memory in at least one of the first and second microelectronic components 20, 30. Store components.

如同在此所用的,一“引線”是在兩個導電的元件之間延伸的電連接的一部分或是全部,例如該引線70係包括導線接合71以及一導電線路55,其從該第一微電子元件20的接點24中之一,穿過該第一孔45而延伸至該些露出的邊緣接點50中之一。As used herein, a "lead" is a portion or all of an electrical connection extending between two electrically conductive elements, for example, the lead 70 includes a wire bond 71 and a conductive trace 55 from which the first micro One of the contacts 24 of the electronic component 20 extends through the first aperture 45 to one of the exposed edge contacts 50.

在一例子中,該模組10可包含複數個引線70在該孔45及46之內,從該第一及第二微電子元件20及30中的至少一個的晶片接點24及34延伸至該些露出的邊緣接點50。在一特定的實施例中,該些引線70可包含在該模組卡40上的導電線路55以及從該些導電線路延伸至該第一及第二微電子元件20、30中的至少一個的晶片接點24、34之導線接合71、72。In one example, the module 10 can include a plurality of leads 70 extending within the holes 45 and 46 from the wafer contacts 24 and 34 of at least one of the first and second microelectronic components 20 and 30 to The exposed edge contacts 50. In a particular embodiment, the leads 70 can include conductive traces 55 on the module card 40 and extend from the conductive traces to at least one of the first and second microelectronic components 20, 30. Wire bonds 71, 72 of wafer contacts 24, 34.

如同在圖1B中所示,該些引線70的導電線路55可以沿著該模組卡40的第二表面42延伸。在一特定的例子中,該些引線70的導電線路55可以沿著該模組卡40的第一表面41延伸、或是該些引線的導電線路可以沿著該模組卡的第一及第二表面41、42兩者來延伸。該些導電線路55的部分可以沿著該模組卡40的一表面41或42,在一大致平行於該孔45 及46的長尺寸L的方向上從該個別的接點24及34延伸至該些露出的邊緣接點50。在一特定的實施例中,該些導電線路55是以一圖案沿著該模組卡40的一表面41或42來加以配置,使得在該個別的接點24及34與露出的邊緣接點50之間的引線70的長度可被最小化。As shown in FIG. 1B, the conductive traces 55 of the leads 70 can extend along the second surface 42 of the module card 40. In a specific example, the conductive lines 55 of the leads 70 may extend along the first surface 41 of the module card 40, or the conductive lines of the leads may follow the first and the first of the module cards. Both surfaces 41, 42 extend. Portions of the conductive lines 55 may be along a surface 41 or 42 of the module card 40, substantially parallel to the aperture 45. And the length L of the 46 extends from the individual contacts 24 and 34 to the exposed edge contacts 50. In a particular embodiment, the conductive traces 55 are disposed along a surface 41 or 42 of the module card 40 in a pattern such that the individual contacts 24 and 34 are in contact with the exposed edges. The length of the lead 70 between 50 can be minimized.

該導線接合71及72的每一個可以延伸穿過該個別的第一或第二孔45或46,並且可以電耦接一個別的接點24或34至該模組卡40之一對應的接點44。形成該導線接合71及72的製程可包含穿過該孔45、46來插入一接合工具,以將該導電接點24、34電連接至該模組卡40之對應的導電接點44。Each of the wire bonds 71 and 72 can extend through the individual first or second holes 45 or 46 and can be electrically coupled to a corresponding contact 24 or 34 to a corresponding one of the module cards 40. Point 44. The process of forming the wire bonds 71 and 72 can include inserting a bonding tool through the holes 45, 46 to electrically connect the conductive contacts 24, 34 to corresponding conductive contacts 44 of the module card 40.

在一特定的實施例中,該導線接合71及72的每一個可以是包含複數個被定向成實質平行於彼此的導線接合之多重的導線接合。此種包含複數個導線接合71或72之多重的導線接合結構可以在一接點24或34以及該模組卡40之一對應的接點44之間提供平行的導電路徑。In a particular embodiment, each of the wire bonds 71 and 72 can be a plurality of wire bonds comprising a plurality of wire bonds that are oriented substantially parallel to each other. Such multiple wire bond structures comprising a plurality of wire bonds 71 or 72 can provide a parallel conductive path between a contact 24 or 34 and a corresponding contact 44 of one of the module cards 40.

一間隔物12可被設置在該第二微電子元件30的前表面31以及該模組卡40的第一表面41的一部分之間。此種間隔物12例如可以是由一種例如是二氧化矽的介電材料、一種例如是矽的半導體材料、或是一或多層的黏著劑所做成。若該間隔物12包含黏著劑,該黏著劑可以連接該第二微電子元件30至該模組卡40。在一實施例中,該間隔物12在一實質垂直於該模組卡40的第一表面41之垂直的方向V上可具有和該第一微電子元件20在其前表面及後表面21、22之間的厚度T2實質相同的厚度T1。A spacer 12 can be disposed between the front surface 31 of the second microelectronic component 30 and a portion of the first surface 41 of the module card 40. Such a spacer 12 may, for example, be made of a dielectric material such as cerium oxide, a semiconductor material such as ruthenium, or one or more layers of an adhesive. If the spacer 12 includes an adhesive, the adhesive can connect the second microelectronic component 30 to the module card 40. In an embodiment, the spacers 12 may have a front surface and a rear surface 21 of the first microelectronic component 20 in a direction V perpendicular to the first surface 41 of the module card 40. The thickness T2 between 22 is substantially the same thickness T1.

在一特定的實施例中,該間隔物12可被一具有一表面面對該模組卡40的第一表面41之緩衝晶片所取代。在一例子中,此種緩衝晶片 可以被覆晶接合到在該模組卡40的第一表面41被露出的接點。此種緩衝晶片可被配置以幫助提供該微電子元件20及30的每一個相對該模組10外部的構件之阻抗隔離。In a particular embodiment, the spacer 12 can be replaced by a buffer wafer having a surface facing the first surface 41 of the module card 40. In an example, such a buffer wafer The flip chip may be bonded to the contact where the first surface 41 of the module card 40 is exposed. Such a buffer wafer can be configured to help provide impedance isolation of each of the microelectronic components 20 and 30 relative to components external to the module 10.

一或多個黏著劑層14可被設置在該第一微電子元件20與該模組卡40之間、在該第一及第二微電子元件20及30之間、在該第二微電子元件30與該間隔物12之間、以及在該間隔物12與該模組卡40之間。此種黏著劑層14可包含用於彼此接合該模組10之前述的構件之黏著劑。在一特定的實施例中,該一或多個黏著劑層14可以延伸在該模組卡40的第一表面41以及該第一微電子元件20的前表面21之間。在一實施例中,該一或多個黏著劑層14可以將該第二微電子元件30的前表面31的至少一部分附接到該第一微電子元件20的後表面22的至少一部分。One or more adhesive layers 14 may be disposed between the first microelectronic component 20 and the module card 40, between the first and second microelectronic components 20 and 30, and at the second microelectronic Between the component 30 and the spacer 12, and between the spacer 12 and the module card 40. Such an adhesive layer 14 can include an adhesive for bonding the aforementioned components of the module 10 to each other. In a particular embodiment, the one or more adhesive layers 14 can extend between the first surface 41 of the module card 40 and the front surface 21 of the first microelectronic element 20. In an embodiment, the one or more adhesive layers 14 can attach at least a portion of the front surface 31 of the second microelectronic element 30 to at least a portion of the back surface 22 of the first microelectronic element 20.

在一例子中,每個黏著劑層14可以是部份或全部由一種晶粒附接黏著劑所做成,並且可以是由一種例如是聚矽氧烷彈性體之低彈性模數的材料所構成。在一實施例中,該晶粒附接黏著劑可以是柔性的。在另一例子中,若該兩個微電子元件20及30是由相同的材料所形成的習知的半導體晶片,則每個黏著劑層14可以是全部或部份地由一薄層的高彈性模數的黏著劑或焊料所做成,因為該些微電子元件將會有響應於溫度變化而一致膨脹及收縮的傾向。不論被採用的材料為何,該些黏著劑層14的每一個都可包含單一層或是多個層在其中。在一其中該間隔物12是由一種黏著劑做成之特定的實施例中,設置在該間隔物12與第二微電子元件30以及模組卡40之間的黏著劑層14可被省略。In one example, each of the adhesive layers 14 may be partially or wholly made of a die attach adhesive and may be made of a material having a low modulus of elasticity such as a polyoxyalkylene elastomer. Composition. In an embodiment, the die attach adhesive can be flexible. In another example, if the two microelectronic components 20 and 30 are conventional semiconductor wafers formed of the same material, each of the adhesive layers 14 may be wholly or partially covered by a thin layer. Elastomeric modulus adhesives or solders are formed because the microelectronic components will have a tendency to uniformly expand and contract in response to temperature changes. Each of the adhesive layers 14 may comprise a single layer or multiple layers therein, regardless of the material being employed. In a particular embodiment in which the spacer 12 is formed of an adhesive, the adhesive layer 14 disposed between the spacer 12 and the second microelectronic component 30 and the module card 40 can be omitted.

該模組10亦可包含一第一囊封材料60以及一第二囊封材料 65。例如,該第一囊封材料60可以覆蓋該個別的第一及第二微電子元件20及30的後表面22及32以及該模組卡40的第一表面41的一部分。在一特定的實施例中,該第一囊封材料60可以是一種包覆成型(overmold)。一或多種第二囊封材料65可以覆蓋該個別的微電子元件20及30在該個別的孔45及46內被露出的前表面21及31的部分、該模組卡40的第二表面42的一部分、該些接點24、34及44、以及延伸在該個別的接點24及34與對應的接點44之間的導線接合71及72。在一特定的實施例中,一種第二囊封材料65可以覆蓋延伸在該晶片接點24及34與模組卡40之間的引線70的部分。The module 10 can also include a first encapsulating material 60 and a second encapsulating material. 65. For example, the first encapsulating material 60 can cover the back surfaces 22 and 32 of the individual first and second microelectronic components 20 and 30 and a portion of the first surface 41 of the module card 40. In a particular embodiment, the first encapsulating material 60 can be an overmold. One or more second encapsulating materials 65 may cover portions of the front surfaces 21 and 31 of the individual microelectronic components 20 and 30 that are exposed within the individual apertures 45 and 46, and the second surface 42 of the module card 40. A portion of the contacts 24, 34, and 44, and wire bonds 71 and 72 extending between the respective contacts 24 and 34 and corresponding contacts 44. In a particular embodiment, a second encapsulating material 65 can cover portions of the leads 70 that extend between the wafer contacts 24 and 34 and the module card 40.

在根據一特定實施例的一製程中,該第一囊封材料60可被注入到該個別的第一及第二微電子元件20及30的後表面22及32之上、以及注入到該模組卡40的第一表面41之上。在根據一例子的一製程中,該第二囊封材料65可被注入到該第一及第二孔45、46之中,使得在該晶片接點24、34以及該模組卡40之間的引線70的部分係被該第二囊封材料所覆蓋。In a process according to a particular embodiment, the first encapsulation material 60 can be implanted onto the back surfaces 22 and 32 of the individual first and second microelectronic components 20 and 30, and injected into the mold. Above the first surface 41 of the set of cards 40. In a process according to an example, the second encapsulating material 65 can be injected into the first and second holes 45, 46 such that between the wafer contacts 24, 34 and the module card 40 The portion of lead 70 is covered by the second encapsulating material.

圖2係展示以上相關圖1A至1C所述的實施例的一種變化。在此變化中,一模組210係和上述的模組10相同,除了該第一微電子元件220係覆晶接合至該模組卡240的第一表面241,而不是導線接合至該模組卡的第二表面。Figure 2 shows a variation of the embodiment described above in relation to Figures 1A through 1C. In this variation, a module 210 is the same as the module 10 described above, except that the first microelectronic component 220 is flip-chip bonded to the first surface 241 of the module card 240 instead of being wire bonded to the module. The second surface of the card.

導電接點224係在該第一微電子元件220的前表面221被露出。該些導電接點或晶片接點224可以例如是藉由導電塊273而電連接至在該模組卡240的第一表面241被露出之導電接點247。該些導電塊273可包括一種具有一相當低的熔化溫度之可熔的金屬,例如是焊料、錫或是一包 含複數種金屬的共晶混合物。或者是,該些導電塊273可包含一種具有一熔化溫度高於該焊料或另一可熔的金屬的熔化溫度之可濕性金屬,例如是銅、其它貴金屬或是非貴金屬。在一特定的實施例中,該些導電塊273可包含一種散佈在一媒體中的導電材料,例如,一導電膏、填充金屬的膏、填充焊料的膏、或是等向性的導電黏著劑或非等向性的導電黏著劑。The conductive contacts 224 are exposed at the front surface 221 of the first microelectronic element 220. The conductive contacts or wafer contacts 224 can be electrically connected, for example, by conductive bumps 273 to conductive contacts 247 that are exposed at the first surface 241 of the module card 240. The conductive blocks 273 may comprise a fusible metal having a relatively low melting temperature, such as solder, tin or a package. A eutectic mixture comprising a plurality of metals. Alternatively, the conductive blocks 273 may comprise a wettable metal having a melting temperature above the melting temperature of the solder or another fusible metal, such as copper, other precious metals or non-precious metals. In a specific embodiment, the conductive blocks 273 may comprise a conductive material dispersed in a medium, such as a conductive paste, a metal-filled paste, a solder-filled paste, or an isotropic conductive adhesive. Or an isotropic conductive adhesive.

導電線路(未顯示在圖2中)可以從該些導電接點247沿著該模組卡240的第一表面241延伸至在該模組卡的一插入邊緣(例如在圖1B及1C中所示的插入邊緣43)之露出的邊緣接點。如同在上述的模組10中,該第二微電子元件230的晶片接點234可以藉由延伸穿過該模組卡的一孔246的導線接合272而電連接至該模組卡240之對應的導電接點244。導電線路亦可以從該些導電接點244沿著該模組卡240的第二表面242延伸至在該模組卡的一插入邊緣(例如在圖1B及1C中所示的插入邊緣43)之露出的邊緣接點。Conductive lines (not shown in FIG. 2) may extend from the conductive contacts 247 along the first surface 241 of the module card 240 to an insertion edge of the module card (eg, in FIGS. 1B and 1C) The exposed edge joint of the illustrated insertion edge 43). As in the module 10 described above, the wafer contacts 234 of the second microelectronic component 230 can be electrically connected to the corresponding module card 240 by wire bonding 272 extending through a hole 246 of the module card. Conductive contacts 244. The conductive traces may also extend from the conductive contacts 244 along the second surface 242 of the module card 240 to an insertion edge of the module card (eg, the insertion edge 43 shown in FIGS. 1B and 1C). Exposed edge joints.

圖3係展示以上相關圖1A至1C所述的實施例的另一種變化。在此變化中,一模組310係和上述的模組10相同,除了該第一微電子元件320係以其後表面322面對該模組卡340的第一表面341並且其前表面321的至少一部分面對且部分地覆蓋該第二微電子元件330的前表面331的至少一部分來加以設置。該第一微電子元件320的後表面322可以藉由一或多個例如在圖1A及1C中所示的黏著劑層14之黏著劑層來附接至該模組卡340的第一表面341。導電接點324a及324b(整體稱為導電接點324)可以在該第一微電子元件320的前表面321被露出。該第一微電子元件320的晶片接點324可包含任意的導電接點324a及/或324b的配置。Figure 3 is a diagram showing another variation of the embodiment described above in relation to Figures 1A through 1C. In this variation, a module 310 is identical to the module 10 described above except that the first microelectronic component 320 faces the first surface 341 of the module card 340 with its rear surface 322 and its front surface 321 At least a portion is disposed to face and partially cover at least a portion of the front surface 331 of the second microelectronic element 330. The back surface 322 of the first microelectronic element 320 can be attached to the first surface 341 of the module card 340 by one or more adhesive layers such as the adhesive layer 14 shown in FIGS. 1A and 1C. . Conductive contacts 324a and 324b (collectively referred to as conductive contacts 324) may be exposed at the front surface 321 of the first microelectronic element 320. The wafer contacts 324 of the first microelectronic element 320 can include any configuration of conductive contacts 324a and/or 324b.

該第一微電子元件320的導電接點324a可以在該第一微電子元件的一中央區域325內之前表面321被露出。例如,該些接點324a可以用相鄰該前表面321的中心的一或兩個平行的列來加以配置。該些導電接點324a可以例如是藉由導線接合371a而電連接至在該模組卡340的第一表面341被露出之導電接點347。The conductive contact 324a of the first microelectronic element 320 can be exposed in a central region 325 of the first microelectronic component before the surface 321 is exposed. For example, the contacts 324a can be configured with one or two parallel columns adjacent the center of the front surface 321 . The conductive contacts 324a can be electrically connected to the conductive contacts 347 exposed on the first surface 341 of the module card 340, for example, by wire bonding 371a.

該第一微電子元件320的導電接點324b可以在接近該第一微電子元件的一橫向邊緣323的前表面321被露出。例如,該些接點324b可以用相鄰該第一微電子元件320的橫向邊緣323的一或兩個平行的列來加以配置。該些導電接點324b可以例如是藉由導線接合371b而電連接至在該模組卡340的第一表面341被露出之導電接點347。The conductive contact 324b of the first microelectronic element 320 can be exposed proximate the front surface 321 of a lateral edge 323 of the first microelectronic element. For example, the contacts 324b can be configured with one or two parallel columns adjacent the lateral edges 323 of the first microelectronic element 320. The conductive contacts 324b can be electrically connected to the conductive contacts 347 exposed on the first surface 341 of the module card 340, for example, by wire bonding 371b.

類似於圖2,導電線路(未被展示在圖3中)可以從該些導電接點347及344沿著該模組卡340之個別的第一及第二表面341、342延伸至在該模組卡的插入邊緣(例如在圖1B及1C中所示的插入邊緣43)露出的邊緣接點。Similar to FIG. 2, conductive traces (not shown in FIG. 3) may extend from the conductive contacts 347 and 344 along the respective first and second surfaces 341, 342 of the module card 340 to the mold. The edge contacts of the insertion edge of the group card (e.g., the insertion edge 43 shown in Figures IB and 1C) are exposed.

儘管在圖3中所示的實施例係被展示為該第二微電子元件330係藉由導線接合372而電連接至該模組卡340,但是在其它實施例中,該第二微電子元件可以用各種的其它方式來電連接至該模組卡,其包含例如是引線接合(lead bond,如同在圖5中所示)或是利用焊料的覆晶接合(如同在圖6及7中所示)Although the embodiment shown in FIG. 3 is shown with the second microelectronic component 330 electrically coupled to the module card 340 by wire bonds 372, in other embodiments, the second microelectronic component The module card can be electrically connected in various other ways, including, for example, a lead bond (as shown in Figure 5) or a flip chip bond using solder (as shown in Figures 6 and 7). )

圖4係展示以上相關圖1A至1C所述的實施例的另一種變化。在此變化中,一模組410係和上述的模組10相同,除了第一及第二微電子元件420及430係藉由延伸穿過一延伸在該模組卡的第一及第二表面 441、442之間的共用的孔446之個別的導線接合471及472來電連接至該模組卡440,而不是使得每個微電子元件藉由延伸穿過該模組卡之個別分開的孔的導線接合來電連接至該模組卡。Figure 4 is a diagram showing another variation of the embodiment described above in relation to Figures 1A through 1C. In this variation, a module 410 is identical to the module 10 described above, except that the first and second microelectronic components 420 and 430 extend through a first and second surface extending through the module card. The individual wire bonds 471 and 472 of the shared hole 446 between 441 and 442 are electrically connected to the module card 440 instead of having each microelectronic component extended through an individual separate aperture of the module card. A wire bond connects to the module card.

如同在圖4中所示,該第一微電子元件420的導電接點424可以在接近該第一微電子元件的一橫向邊緣423的前表面421被露出。例如,該些接點424可以被配置在相鄰該第一微電子元件420的橫向邊緣423的一列中。該些導電接點424可以例如是藉由導線接合471來電連接至在該模組卡440的第二表面442被露出之導電接點444。As shown in FIG. 4, the conductive contacts 424 of the first microelectronic element 420 can be exposed at a front surface 421 proximate a lateral edge 423 of the first microelectronic element. For example, the contacts 424 can be disposed in a column adjacent the lateral edges 423 of the first microelectronic element 420. The conductive contacts 424 can be electrically connected to the conductive contacts 444 exposed at the second surface 442 of the module card 440, for example, by wire bonds 471.

該第二微電子元件430的導電接點434可以在該第二微電子元件的一中央區域435內之前表面431被露出。例如,該些接點434可被配置在大約於該前表面431的中心處之一列中。該些導電接點434可以例如是藉由導線接合472來電連接至在該模組卡440的第二表面442被露出之導電接點444。The conductive contact 434 of the second microelectronic element 430 can be exposed in a central region 435 of the second microelectronic element before the surface 431 is exposed. For example, the contacts 434 can be disposed in a column about the center of the front surface 431. The conductive contacts 434 can be electrically connected, for example, by wire bonds 472 to conductive contacts 444 that are exposed at the second surface 442 of the module card 440.

在圖4所示的實施例中,該模組410可包含單一第二囊封材料465。例如,一第二囊封材料465可以覆蓋該個別的微電子元件420及430的前表面421及431在該單一共用的孔446內被露出的部分、該模組卡440的第二表面442的一部分、該些接點424、434及444、以及延伸在該個別的接點424及434與對應的接點444之間的導線接合471及472。In the embodiment shown in FIG. 4, the module 410 can include a single second encapsulating material 465. For example, a second encapsulating material 465 can cover portions of the front surfaces 421 and 431 of the individual microelectronic components 420 and 430 that are exposed within the single common aperture 446, and the second surface 442 of the module card 440. A portion, the contacts 424, 434, and 444, and wire bonds 471 and 472 extending between the individual contacts 424 and 434 and the corresponding contacts 444.

圖5係展示以上相關圖1A至1C所述的實施例的另一種變化。在此變化中,一模組510係和上述的模組10相同,除了該第一微電子元件520係覆晶接合至該模組卡540的第一表面541(用和圖2相同的方式),並且該第二微電子元件530係藉由從導電線路延伸至該些晶片接點534的引 線接合574a及574b(整體稱為引線接合574)來電連接至該模組卡540,而不是藉由導線接合。Figure 5 is a diagram showing another variation of the embodiment described above in relation to Figures 1A through 1C. In this variation, a module 510 is the same as the module 10 described above, except that the first microelectronic component 520 is flip-chip bonded to the first surface 541 of the module card 540 (in the same manner as in FIG. 2). And the second microelectronic component 530 is extended by the conductive line to the wafer contacts 534 Wire bonds 574a and 574b (collectively referred to as wire bonds 574) are electrically connected to the module card 540 instead of being wire bonded.

如同在圖5中所示,該第二微電子元件530的導電接點534a及534b(整體稱為導電接點534)可以在該第二微電子元件的一中央區域535內之前表面531被露出。例如,該些接點534可以用相鄰該前表面531的中心的一或兩個平行的列來加以配置。該些導電接點534a中的某些個可以例如是藉由引線接合574a來電連接至在該模組卡540的第二表面542被露出之導電接點544。其它的導電接點534b可以例如是藉由引線接合574b來電連接至在該模組卡540的第一表面541被露出之導電接點547。如同在圖5中所示,該導電接點544及547可以是該個別的引線接合574a及574b之導電的接觸部分。As shown in FIG. 5, the conductive contacts 534a and 534b (collectively referred to as conductive contacts 534) of the second microelectronic component 530 can be exposed before a central region 535 of the second microelectronic component. . For example, the contacts 534 can be configured with one or two parallel columns adjacent the center of the front surface 531. Some of the conductive contacts 534a may be electrically connected, for example, by wire bonds 574a to conductive contacts 544 that are exposed at the second surface 542 of the module card 540. The other conductive contacts 534b can be electrically connected to the conductive contacts 547 exposed at the first surface 541 of the module card 540, for example, by wire bonding 574b. As shown in FIG. 5, the conductive contacts 544 and 547 can be conductive contact portions of the individual wire bonds 574a and 574b.

形成該些引線接合574的製程可以是大致如同在共同讓與的美國專利5,915,752及5,489,749中所敘述者,該些專利的揭露內容係被納入在此作為參考。在該引線接合的製程中,每個引線570可以藉由一例如是熱超音波接合工具的工具而被向下位移,以和一對應的導電接點534接合。此種接合工具可以穿過該孔546而被插入,以電連接該引線570至該對應的導電接點534。該引線570的易碎區段可能在此製程期間斷開。The process of forming the wire bonds 574 can be substantially as described in the commonly assigned U.S. Patent Nos. 5,915,752 and 5,489,749, the disclosures of each of each of each of each In the wire bonding process, each lead 570 can be displaced downwardly by a tool such as a thermal ultrasonic bonding tool to engage a corresponding conductive contact 534. Such a bonding tool can be inserted through the aperture 546 to electrically connect the lead 570 to the corresponding conductive contact 534. The frangible section of the lead 570 may break during this process.

圖6係展示以上相關圖1A至1C所述的實施例的另一種變化。在此變化中,一模組610係和上述的模組10相同,除了該第一微電子元件620係覆晶接合至該模組卡640的第一表面641(以和圖2相同的方式),並且該第二微電子元件630係藉由延伸在該第二微電子元件的導電接點634以及在該模組卡的該第一表面被露出的導電接點647之間的導電塊675而覆 晶接合至該模組卡的該第一表面,而不是藉由導線接合。在一特定的實施例中,該模組卡640可以是沒有引線延伸穿過在其第一及第二表面641、642之間的孔(例如是在圖1A中所示的孔45及46)。Figure 6 is a diagram showing another variation of the embodiment described above in relation to Figures 1A through 1C. In this variation, a module 610 is identical to the module 10 described above except that the first microelectronic component 620 is flip-chip bonded to the first surface 641 of the module card 640 (in the same manner as in FIG. 2). And the second microelectronic component 630 is formed by a conductive block 675 extending between the conductive contact 634 of the second microelectronic component and the conductive contact 647 exposed at the first surface of the module card. cover The crystal is bonded to the first surface of the module card instead of being wire bonded. In a particular embodiment, the module card 640 can be a hole that has no leads extending through between the first and second surfaces 641, 642 thereof (eg, holes 45 and 46 shown in FIG. 1A). .

類似於上述的模組10,該第二微電子元件630的導電接點634可以在該第二微電子元件的一中央區域635內之前表面631被露出。例如,該些接點634可以用相鄰該前表面631的中心的一或兩個平行的列來加以配置。Similar to the module 10 described above, the conductive contacts 634 of the second microelectronic component 630 can be exposed before the front surface 631 in a central region 635 of the second microelectronic component. For example, the contacts 634 can be configured with one or two parallel columns adjacent the center of the front surface 631.

例如,該些導電塊675可以是細長的焊料連接、焊料球、或是任何以上參考該導電塊273所述的其它材料。此種導電塊675可以延伸穿過在該間隔物612以及該第一微電子元件620的橫向邊緣623之間的空間,以電連接該第二微電子元件630與該模組卡640。For example, the conductive bumps 675 can be elongated solder connections, solder balls, or any of the other materials described above with reference to the conductive bumps 273. Such a conductive block 675 can extend through the space between the spacer 612 and the lateral edge 623 of the first microelectronic element 620 to electrically connect the second microelectronic element 630 with the module card 640.

圖7A及7B係展示以上相關圖6所述的實施例的另一種變化。在此變化中,一模組710係和上述的模組610相同,除了該第二微電子元件730係藉由延伸在位於相鄰該第二微電子元件的一橫向邊緣733的導電接點734以及在該模組卡的第一表面被露出的導電接點747之間的導電塊775來覆晶接合至該模組卡740的第一表面741,而不是使得該些導電塊延伸在該第二微電子元件的一中央區域內之第二微電子元件的前表面露出的導電接點之間。Figures 7A and 7B show another variation of the embodiment described above in relation to Figure 6. In this variation, a module 710 is identical to the module 610 described above except that the second microelectronic component 730 is extended by a conductive contact 734 located at a lateral edge 733 adjacent the second microelectronic component. And a conductive block 775 between the conductive contacts 747 exposed on the first surface of the module card is flip-chip bonded to the first surface 741 of the module card 740 instead of extending the conductive blocks The front surface of the second microelectronic component in a central region of the two microelectronic component is exposed between the conductive contacts.

該第一微電子元件720可具有複數個在該第一微電子元件的前表面721之元件接點724。該些元件接點724可以和一第一組的基板接點747a連結,使得該些元件接點係和該些基板接點覆晶接合。如同在圖7B中所示,該些元件接點724以及該第一組的基板接點747a分別可以用一區 域陣列配置來加以配置。The first microelectronic element 720 can have a plurality of component contacts 724 on the front surface 721 of the first microelectronic component. The component contacts 724 can be coupled to a first set of substrate contacts 747a such that the component contacts are flip-chip bonded to the substrate contacts. As shown in FIG. 7B, the component contacts 724 and the first set of substrate contacts 747a can each use a region. Domain array configuration to configure.

在一特定的例子中,在該第二微電子元件730的前表面731之接點734可以被配置在相鄰該第二微電子元件的橫向邊緣733的一行中,使得該些接點734可以突出超過該第一微電子元件720的橫向邊緣723。該些元件接點734可以和一第二組的基板接點747b連結,使得該些元件接點係和該些基板接點覆晶接合。In a particular example, the contacts 734 at the front surface 731 of the second microelectronic element 730 can be disposed in a row adjacent the lateral edges 733 of the second microelectronic element such that the contacts 734 can Projecting beyond the lateral edge 723 of the first microelectronic element 720. The component contacts 734 can be coupled to a second set of substrate contacts 747b such that the component contacts are flip-chip bonded to the substrate contacts.

儘管該些接點724、734及747係被展示為用並列的行之接點來加以配置,但是其它的接點配置亦被本發明所思及。例如,儘管未顯示在圖7B中,至少一接點可被設置在相鄰的接點行之間。在另一例子中,例如可見於圖7C中的,該些接點可包含一行的接點,一行軸719係延伸穿過此行大多數的接點724,亦即,該行軸719之中心是相對其而定的。然而,在此行中,如同在接點724'的情形中,該些接點724中的一或多個可能並未相對於該行軸719來定中心的。在此例中,這一或多個接點724'係被視為一特定行的部分,即使此種接點可能並未相對於軸719來定中心的,因為它們比任何其它行的軸更靠近到該特定行的軸719。該行軸719可以延伸穿過這一或多個並未相對於該行軸來定中心的接點、或是在某些情形中,該非中心的接點可能會離該行軸更遠,使得該行軸719甚至可能不會通過該行的這些非中心的接點。在一行中、或是甚至在超過一行中可能有一個、數個或是許多接點並未相對該個別的行的一行軸來定中心。Although the contacts 724, 734, and 747 are shown as being configured with parallel row contacts, other contact configurations are also contemplated by the present invention. For example, although not shown in FIG. 7B, at least one of the contacts may be disposed between adjacent contact rows. In another example, such as seen in Figure 7C, the contacts can include a row of contacts, and a row of axes 719 extends through most of the contacts 724 of the row, i.e., the center of the row axis 719 It is relative to it. However, in this row, as in the case of contact 724', one or more of the contacts 724 may not be centered relative to the row axis 719. In this example, the one or more contacts 724' are considered to be part of a particular row, even though such contacts may not be centered relative to the axis 719 because they are more axes than any other row. Close to the axis 719 of the particular row. The row axis 719 can extend through the one or more contacts that are not centered relative to the row axis, or in some cases, the non-center contact may be further from the row axis, such that The row axis 719 may not even pass through these non-central contacts of the row. There may be one, several, or many contacts in a row, or even in more than one row, that are not centered relative to the row axis of the individual row.

再者,該微電子元件720、730以及該基板740包含除了行之外的群組的接點724、734及747之配置也是可行的,例如具有形狀像是環、多邊形或甚至是散亂的接點分布之配置。Furthermore, it is also possible that the microelectronic elements 720, 730 and the substrate 740 comprise a combination of contacts 724, 734 and 747 of groups other than rows, for example having a shape like a ring, a polygon or even a disorder. The configuration of the contact distribution.

在一實施例中,類似於上述的模組610,該模組卡740可以沒有引線延伸穿過在其第一及第二表面741、742之間的孔。In one embodiment, similar to the module 610 described above, the module card 740 can extend through the aperture between its first and second surfaces 741, 742 without leads.

圖8係展示以上相關圖1B所述的實施例的另一變化。在此變化中,一模組810係和上述的模組10相同,除了第一導電的元件820的導電接點824的列可以實質垂直於第二導電的元件830的導電接點834的列。在此一實施例中,類似於圖1B中所示的第二孔46,該第二孔846可具有一延伸在一遠離該模組卡840的插入邊緣843的方向上之長的尺寸L。該第一孔845可以具有一延伸在一實質平行於該模組卡840的插入邊緣843而且實質垂直於該第二孔846的長的尺寸L的方向上之長的尺寸L'。FIG. 8 is a diagram showing another variation of the embodiment described above in relation to FIG. 1B. In this variation, a module 810 is identical to the module 10 described above except that the columns of conductive contacts 824 of the first conductive component 820 can be substantially perpendicular to the columns of conductive contacts 834 of the second conductive component 830. In this embodiment, similar to the second aperture 46 shown in FIG. 1B, the second aperture 846 can have a length L that extends a distance away from the insertion edge 843 of the module card 840. The first aperture 845 can have a length L' extending in a direction substantially parallel to the insertion edge 843 of the module card 840 and substantially perpendicular to the length L of the second aperture 846.

該些引線870可包含導電線路855a的一圖案是和在圖1B中所示的導電線路55的圖案相同。該些引線870可進一步包含導電線路855b之一替代的圖案,該些導電線路855b係從在該模組卡840的第二表面842被露出之導電接點844b延伸至該些露出的邊緣接點850。在一特定的實施例中,該些導電線路855b中的某些個可以延伸繞著該第一孔845的橫向邊緣848。The pattern of the leads 870 that may include the conductive traces 855a is the same as the pattern of the conductive traces 55 shown in FIG. 1B. The leads 870 can further include a pattern of one of the conductive traces 855b extending from the conductive contacts 844b exposed at the second surface 842 of the module card 840 to the exposed edge contacts. 850. In a particular embodiment, some of the conductive traces 855b may extend around the lateral edge 848 of the first aperture 845.

圖9係展示以上相關圖1A至1C所述的實施例的另一種變化。在此變化中,一模組910係和上述的模組10相同,除了第一及第二微電子元件920及930係被安裝到一引線架(lead frame)980之上,而不是安裝到一例如是在圖1A中所示的模組卡40的模組卡之上。在一特定的實施例中,該第一及第二微電子元件920、930的前表面921、931可以面對該引線架980的一第一表面981,每個微電子元件係電連接至該引線架。Figure 9 is a diagram showing another variation of the embodiment described above in relation to Figures 1A through 1C. In this variation, a module 910 is identical to the module 10 described above except that the first and second microelectronic components 920 and 930 are mounted to a lead frame 980 instead of being mounted to a For example, it is above the module card of the module card 40 shown in FIG. 1A. In a particular embodiment, the front surfaces 921, 931 of the first and second microelectronic components 920, 930 can face a first surface 981 of the lead frame 980, each microelectronic component being electrically connected to the Lead frame.

引線架結構的例子係被展示及敘述在美國專利號7,176,506 以及6,765,287中,該些專利的揭露內容茲被納入在此作為參考。一般而言,一例如是該引線架980的引線架是一種由一片例如是銅的導電金屬所形成的結構,其係被圖案化成為包含複數個引線或導電線路部分985的區段。在範例實施例中,該第一及第二微電子元件920、930中之至少一個可以被直接安裝到該些引線之上,而該些引線可以延伸在該些微電子元件之下。在此一實施例中,在該些微電子元件上之接點924、934可以藉由焊料球或類似者來電連接至個別的引線。該些引線於是可被利用來形成電連線至各種其它的導電結構,以用於運載一電子信號電位往返該些微電子元件920、930。當包含在其上形成一囊封層960的該結構的組裝完成時,例如是一框架之臨時的元件可以從該引線架980的引線移除,以便於形成個別的引線或導電線路部分985。An example of a leadframe structure is shown and described in U.S. Patent No. 7,176,506 The disclosures of these patents are incorporated herein by reference. In general, a leadframe, such as the leadframe 980, is a structure formed from a piece of conductive metal, such as copper, that is patterned into segments that include a plurality of leads or conductive trace portions 985. In an exemplary embodiment, at least one of the first and second microelectronic elements 920, 930 can be mounted directly over the leads, and the leads can extend under the microelectronic elements. In this embodiment, the contacts 924, 934 on the microelectronic components can be electrically connected to individual leads by solder balls or the like. The leads can then be utilized to form electrical connections to various other conductive structures for carrying an electrical signal potential to and from the microelectronic components 920, 930. When the assembly of the structure including the encapsulation layer 960 is completed, a temporary component such as a frame can be removed from the leads of the lead frame 980 to facilitate the formation of individual leads or conductive trace portions 985.

該第一微電子元件920可以藉由一或多個延伸在該第一微電子元件的前表面921以及該引線架的一第一表面981之間的黏著劑層914來附接到該引線架980。此種黏著劑層914可以是類似於以上參考圖1A至1C述的黏著劑層14。該間隔物912可以藉由一或多個延伸在該間隔物的一前表面913以及該引線架的第一表面981之間的黏著劑層914而附接至該引線架980。該第二微電子元件930的前表面931的至少一部分可以部分地覆蓋該第一微電子元件920的後表面922以及該間隔物912的一後表面915。該第二微電子元件930的前表面931可以藉由一或多個黏著劑層914來附接至該第一微電子元件920的後表面922以及該間隔物912的後表面915。The first microelectronic component 920 can be attached to the leadframe by one or more adhesive layers 914 extending between the front surface 921 of the first microelectronic component and a first surface 981 of the leadframe. 980. Such an adhesive layer 914 can be similar to the adhesive layer 14 described above with reference to Figures 1A through 1C. The spacer 912 can be attached to the lead frame 980 by one or more adhesive layers 914 extending between a front surface 913 of the spacer and the first surface 981 of the lead frame. At least a portion of the front surface 931 of the second microelectronic element 930 can partially cover the back surface 922 of the first microelectronic element 920 and a back surface 915 of the spacer 912. The front surface 931 of the second microelectronic element 930 can be attached to the back surface 922 of the first microelectronic element 920 and the back surface 915 of the spacer 912 by one or more adhesive layers 914.

如同在圖9A至9C中可見的,電連接或引線970可以電連接該第一微電子元件920的接點924以及該第二微電子元件930的接點934 至該些露出的模組接點950。該些引線970可包含導線接合971及972以及該引線架980的導電線路部分985。在一特定的例子中,該些引線970可以是可用以載有一位址信號,該位址信號可用以定址在該第一及第二微電子元件920、930中之至少一個中的一記憶體儲存元件。As can be seen in Figures 9A through 9C, electrical connections or leads 970 can electrically connect the contacts 924 of the first microelectronic component 920 and the contacts 934 of the second microelectronic component 930. To the exposed module contacts 950. The leads 970 can include wire bonds 971 and 972 and conductive trace portions 985 of the lead frame 980. In a particular example, the leads 970 can be used to carry an address signal that can be used to address a memory in at least one of the first and second microelectronic components 920, 930. Store components.

在一例子中,該引線架980可以界定延伸在該引線架的第一表面981以及該引線架的一相對該第一表面的第二表面982之間的一第一間隙945以及一第二間隙946。該第一間隙945可以和該第一微電子元件920的晶片接點924對準,使得該些導線接合971可以穿過該第一間隙而延伸在該些晶片接點924以及該引線架的第二表面982之間。該第二間隙946可以和該第二微電子元件930的晶片接點934對準,使得該些導線接合972可以穿過該第二間隙而延伸在該些晶片接點934以及該引線架的第二表面982之間。In one example, the lead frame 980 can define a first gap 945 and a second gap extending between the first surface 981 of the lead frame and a second surface 982 of the lead frame opposite the first surface. 946. The first gap 945 can be aligned with the wafer contacts 924 of the first microelectronic component 920 such that the wire bonds 971 can extend through the first gaps over the wafer contacts 924 and the lead frame Between two surfaces 982. The second gap 946 can be aligned with the wafer contacts 934 of the second microelectronic component 930 such that the wire bonds 972 can extend through the second gaps over the die contacts 934 and the lead frame Between two surfaces 982.

該模組910亦可包含一種囊封材料960,該囊封材料960可以覆蓋該第一及第二微電子元件20、30以及該引線架980的一部分,使得該露出的模組接點950可以在該囊封材料的一插入部分961的一下方的表面962被露出。該囊封材料960亦可以覆蓋該些接點924、934以及延伸在該個別的接點924及934與該引線架980之間的導線接合971及972。該囊封材料960的插入部分961可具有一適當的尺寸及形狀,以用於在該模組910被插入在該插座中時和一對應的插座(展示在圖12中)配接。The module 910 can also include an encapsulation material 960 that can cover the first and second microelectronic components 20, 30 and a portion of the lead frame 980 such that the exposed module contacts 950 can A lower surface 962 of an insertion portion 961 of the encapsulating material is exposed. The encapsulation material 960 can also cover the contacts 924, 934 and the wire bonds 971 and 972 extending between the individual contacts 924 and 934 and the lead frame 980. The insertion portion 961 of the encapsulation material 960 can have an appropriate size and shape for mating with a corresponding socket (shown in Figure 12) when the module 910 is inserted into the socket.

在一特定的實施例中,該模組910可具有複數個相鄰該第一及第二表面981、982中的至少一個的一插入邊緣983被露出之平行的模組接點950,以用於在該模組910被插入在該插座中時和一插座(展示在圖12 中)之對應的接點配接。該些模組接點950中的某些個或是全部可以在該引線架980的第一或第二表面981、982的任一或兩者被露出。In a specific embodiment, the module 910 can have a plurality of parallel module contacts 950 with an insertion edge 983 adjacent to at least one of the first and second surfaces 981, 982 being exposed. When the module 910 is inserted into the socket and a socket (shown in Figure 12) The corresponding contact of the middle) is mated. Some or all of the module contacts 950 may be exposed at either or both of the first or second surfaces 981, 982 of the lead frame 980.

圖10A及10B係展示以上相關圖2所述的實施例的一種變化。在此變化中,一模組1010係和上述的模組210相同,除了該模組1010亦包含被安裝到該模組卡1040之上的第三微電子元件1090的一個堆疊。Figures 10A and 10B show a variation of the embodiment described above in relation to Figure 2. In this variation, a module 1010 is identical to the module 210 described above, except that the module 1010 also includes a stack of third microelectronic components 1090 mounted to the module card 1040.

類似於圖2,該第一微電子元件1020係覆晶接合至該模組卡1040的第一表面1041。該第一微電子元件1020的導電接點或晶片接點1024可以例如是藉由導電塊1073而電連接至在該模組卡1040的第一表面1041被露出的導電接點1047。該第二微電子元件1030的晶片接點1034可以藉由延伸穿過該模組卡的一孔1046的導線接合1072來電連接至該模組卡1040之對應的導電接點1044。導電線路(未顯示在圖10A及10B中)可以從該些導電接點1044及1047沿著該模組卡1040的第一表面1041及/或第二表面1042延伸至在該模組卡的一插入邊緣(例如該邊緣1043或邊緣1043a)露出的邊緣接點1050。如同在圖10B中所示,該些邊緣接點1050可以在該第一表面1041、第二表面1042或是兩個表面被露出。Similar to FIG. 2, the first microelectronic component 1020 is flip-chip bonded to the first surface 1041 of the module card 1040. The conductive contacts or wafer contacts 1024 of the first microelectronic component 1020 can be electrically connected to the conductive contacts 1047 exposed at the first surface 1041 of the module card 1040, for example, by conductive pads 1073. The wafer contacts 1034 of the second microelectronic component 1030 can be electrically connected to the corresponding conductive contacts 1044 of the module card 1040 by wire bonding 1072 extending through a hole 1046 of the module card. Conductive lines (not shown in FIGS. 10A and 10B) may extend from the conductive contacts 1044 and 1047 along the first surface 1041 and/or the second surface 1042 of the module card 1040 to one of the module cards. The exposed edge contact 1050 is inserted into the edge (eg, the edge 1043 or edge 1043a). As shown in FIG. 10B, the edge contacts 1050 can be exposed at the first surface 1041, the second surface 1042, or both surfaces.

在該堆疊中可以有任意數目的第三微電子元件1090,其包含例如在圖10B中所示的兩個第三微電子元件1090a及1090b。該些第三微電子元件1090可以彼此連接且/或藉由任意的互連配置與該些邊緣接點1050連接。例如,該下方的第三微電子元件1090a可以經由覆晶接合、導線接合、引線接合、或是其它互連配置來和在該模組卡1040的一表面被露出的接點連接。一或多個上方的第三微電子元件1090b可以透過延伸穿過該下方的第三微電子元件1090a之導電的貫孔、導線接合、引線接合、或是其 它互連配置來和該模組卡1040的接點連接。There may be any number of third microelectronic elements 1090 in the stack that include, for example, the two third microelectronic elements 1090a and 1090b shown in Figure 10B. The third microelectronic elements 1090 can be connected to each other and/or to the edge contacts 1050 by any interconnection configuration. For example, the underlying third microelectronic component 1090a can be connected to a exposed contact on a surface of the module card 1040 via flip chip bonding, wire bonding, wire bonding, or other interconnect configuration. One or more of the upper third microelectronic elements 1090b may pass through conductive vias extending through the underlying third microelectronic element 1090a, wire bonding, wire bonding, or It is interconnected to interface with the module card 1040.

在一範例實施例中,該模組1010可被配置以作用為一固態記憶體磁碟機。在此一例子中,該第一微電子元件1020可包含一被組態設定以主要執行一例如是固態磁碟機控制器的邏輯功能之半導體晶片,並且該第二微電子元件1030可包含一例如是DRAM的揮發性RAM之記憶體儲存元件。該第三微電子元件1090可以分別包含例如是非揮發性快閃記憶體之記憶體儲存元件。該第一微電子元件1020可包含一特殊用途的處理器,其係被配置以減輕一種例如是系統1200(圖12)的系統之一中央處理單元免於監督往返內含在該第二微電子元件1030及第三微電子元件1090中的記憶體儲存元件之資料傳輸。此種包含一固態磁碟機控制器的第一微電子元件1020可以提供往返於一種例如是系統1200之系統的一主機板(例如,在圖12中所示的電路板1202)上的一資料匯流排之直接的記憶體存取。In an exemplary embodiment, the module 1010 can be configured to function as a solid state memory drive. In this example, the first microelectronic component 1020 can include a semiconductor wafer configured to primarily perform a logic function, such as a solid state disk drive controller, and the second microelectronic component 1030 can include a For example, it is a memory storage element of a volatile RAM of DRAM. The third microelectronic component 1090 can each comprise a memory storage component, such as a non-volatile flash memory. The first microelectronic component 1020 can include a special purpose processor configured to mitigate a central processing unit, such as system 1200 (FIG. 12), from being supervised to and from the second microelectronics. Data transfer of the memory storage elements in component 1030 and third microelectronic component 1090. Such a first microelectronic component 1020 including a solid state disk drive controller can provide a data to and from a motherboard such as the system of system 1200 (e.g., circuit board 1202 shown in FIG. 12). Direct memory access to the bus.

在另一實施例中,該模組1010可被配置以作用為一繪圖模組,例如,其可以被插入一筆記型個人電腦的一PCI express槽。在此一例子中,該第一微電子元件1020可包含一被組態設定以主要執行一例如是繪圖處理器的邏輯功能之半導體晶片,並且該第二微電子元件1030可包含一例如揮發性RAM(例如,DRAM)之記憶體儲存元件,其可以作為一用於計算的圖形繪製的揮發性框緩衝器。該第三微電子元件1090分別可以包含例如是非揮發性快閃記憶體的記憶體儲存元件。In another embodiment, the module 1010 can be configured to function as a graphics module, for example, which can be inserted into a PCI express slot of a notebook PC. In this example, the first microelectronic component 1020 can include a semiconductor wafer configured to primarily perform a logic function, such as a graphics processor, and the second microelectronic component 1030 can include, for example, a volatile A memory storage element of RAM (eg, DRAM) that can act as a volatile frame buffer for graphics rendering of computations. The third microelectronic component 1090 can each comprise a memory storage component, such as a non-volatile flash memory.

圖10C係展示以上相關圖10A及10B所述的實施例的一種變化。在此變化中,一模組1010'係和上述的模組1010相同,除了該模組1010'係包含複數個彼此相鄰地安裝到該模組卡1040之上的第三微電子元件 1090',而不是以一堆疊的配置。類似於該模組1010,該些第三微電子元件1090'可以藉由例如是覆晶接合、導線接合、引線接合、或是其它互連配置的任意互連配置來和在該模組卡1040的一表面被露出的接點連接。該模組1010'可被利用於類似該模組1010之範例的作用,例如一固態記憶體磁碟機或是一繪圖模組。Figure 10C shows a variation of the embodiment described above in relation to Figures 10A and 10B. In this variation, a module 1010' is identical to the module 1010 described above, except that the module 1010' includes a plurality of third microelectronic components mounted adjacent to the module card 1040 adjacent to each other. 1090', not a stacked configuration. Similar to the module 1010, the third microelectronic components 1090' can be connected to the module card 1040 by any interconnection configuration such as flip chip bonding, wire bonding, wire bonding, or other interconnection configuration. One surface is connected by exposed contacts. The module 1010' can be utilized in an example similar to the module 1010, such as a solid state memory disk drive or a graphics module.

圖11係描繪一包含根據上述的實施例中之任一個的第一及第二模組1110a及1110b(例如是參考圖1A至1C所述的模組10)之構件1100。該第一及第二模組1110a、1110b可以利用至少一層1165來彼此接合,使得該些模組之個別的模組卡1140的第二表面1142可以彼此面對面。在一特定的實施例中,該至少一層1165可以是單一共同的囊封材料,例如是在圖1A及1B中所示的第二囊封材料65。在另一例子中,該至少一層1165可以是一或多個類似於參考圖1A至1C所述的黏著劑層14之黏著劑層。Figure 11 depicts a component 1100 comprising first and second modules 1110a and 1110b (e.g., module 10 described with reference to Figures 1A through 1C) in accordance with any of the above-described embodiments. The first and second modules 1110a, 1110b can be joined to each other by using at least one layer 1165 such that the second surfaces 1142 of the individual module cards 1140 of the modules can face each other. In a particular embodiment, the at least one layer 1165 can be a single common encapsulating material, such as the second encapsulating material 65 shown in Figures 1A and 1B. In another example, the at least one layer 1165 can be one or more adhesive layers similar to the adhesive layer 14 described with reference to Figures 1A-1C.

該構件1100可具有相鄰該構件的一插入邊緣1143的一或多個列之平行的露出的邊緣接點1150。該第一及第二模組1110a、1110b的每一個可具有一列在該個別的模組卡1140的第一表面1141被露出的邊緣接點1150,使得該些邊緣接點可以適合用於在該構件1100被插入一插座(類似於圖12中所示的插座)時,和該插座之對應的接點配接。The member 1100 can have parallel exposed edge contacts 1150 adjacent one or more columns of an insertion edge 1143 of the member. Each of the first and second modules 1110a, 1110b can have an array of edge contacts 1150 exposed on the first surface 1141 of the individual module card 1140 such that the edge contacts can be adapted for use in the When the component 1100 is inserted into a socket (similar to the socket shown in Figure 12), it is mated with a corresponding contact of the socket.

以上參考圖1A至10所述的模組及構件可被利用在各式各樣的電子系統的結構中,例如是圖12中所示的系統1200。例如,根據本發明的另一實施例的系統1200係包含複數個如上所述的模組或構件1206結合其它電子構件1208及1210。The modules and components described above with reference to Figures 1A through 10 can be utilized in the construction of a wide variety of electronic systems, such as system 1200 shown in Figure 12. For example, system 1200 in accordance with another embodiment of the present invention includes a plurality of modules or components 1206 as described above in conjunction with other electronic components 1208 and 1210.

該系統1200可以包含複數個插座1205,每個插座係包含複 數個在該插座的一或兩側邊之接點1207,使得每個插座1205可以適合用於配接一對應的模組或構件1206之對應的露出的邊緣接點或是露出的模組接點。在所展示之範例的系統1200中,該系統可包含一例如是撓性的印刷電路板之電路板或主機板1202,並且該電路板可包含許多的導體1204,其中只有一導體1204被描繪在圖12中,其係彼此相互連接該些模組或構件1206。然而,此僅為範例的;任何用於在該些模組或構件1206之間做成電連接之適當的結構都可被利用。The system 1200 can include a plurality of sockets 1205, each of which includes a complex A plurality of contacts 1207 at one or both sides of the socket, such that each socket 1205 can be adapted to be used to mate with a corresponding exposed edge contact or exposed module of a corresponding module or member 1206 point. In the illustrated system 1200, the system can include a circuit board or motherboard 1202, such as a flexible printed circuit board, and the circuit board can include a plurality of conductors 1204, of which only one conductor 1204 is depicted In Figure 12, the modules or members 1206 are interconnected to each other. However, this is merely exemplary; any suitable structure for making electrical connections between the modules or members 1206 can be utilized.

在一特定的實施例中,該系統1200亦可包含一例如是半導體晶片1208的處理器,使得每個模組或構件1206可被配置以在一時脈週期中平行地傳輸一數目N個的資料位元,並且該處理器可被配置以在一時脈週期中平行地傳輸一數目M個的資料位元,M係大於或等於N。In a particular embodiment, the system 1200 can also include a processor, such as a semiconductor wafer 1208, such that each module or component 1206 can be configured to transmit a number N of data in parallel during a clock cycle. A bit, and the processor is configurable to transmit a number M of data bits in parallel in a clock cycle, the M system being greater than or equal to N.

在一例子中,該系統1200可包含一被配置以在一時脈週期中平行地傳輸三十二個資料位元的處理器晶片1208,並且該系統亦可包含四個例如是參考圖1A至1C所述的模組10之模組1206,每個模組1206被配置以在一時脈週期中平行地傳輸八個資料位元(亦即,每個模組1206可包含第一及第二微電子元件,該兩個微電子元件的每一個係被配置以在一時脈週期中平行地傳輸四個資料位元)。In one example, the system 1200 can include a processor die 1208 configured to transmit thirty-two data bits in parallel in a clock cycle, and the system can also include four, for example, with reference to Figures 1A through 1C. The module 1206 of the module 10, each module 1206 is configured to transmit eight data bits in parallel in a clock cycle (ie, each module 1206 can include first and second microelectronics) An element, each of the two microelectronic elements being configured to transmit four data bits in parallel in a clock cycle).

在另一例子中,該系統1200可包含一被配置以在一時脈週期中平行地傳輸六十四個資料位元的處理器晶片1208,並且該系統亦可包含四個例如是參考圖12所述的構件1000之模組1206,每個模組1206被配置以在一時脈週期中平行地傳輸十六個資料位元(亦即,每個模組1206可包含兩組第一及第二微電子元件,該四個微電子元件的每一個係被配置以在 一時脈週期中平行地傳輸四個資料位元)。In another example, the system 1200 can include a processor die 1208 configured to transmit sixty-four data bits in parallel in a clock cycle, and the system can also include four, for example, reference to FIG. The module 1206 of the component 1000, each module 1206 is configured to transmit sixteen data bits in parallel in a clock cycle (ie, each module 1206 can include two sets of first and second micros). Electronic components, each of the four microelectronic components being configured to Four data bits are transmitted in parallel in one clock cycle).

在圖12所描繪的例子中,該構件1208是一半導體晶片,並且構件1210是一顯示螢幕,但是任何其它構件亦可被利用在該系統1200中。當然,儘管為了清楚描繪而只有兩個額外的構件1208及1210被描繪在圖12中,但是該系統1200可包含任意數目的此種構件。In the example depicted in FIG. 12, the member 1208 is a semiconductor wafer and the member 1210 is a display screen, but any other components may be utilized in the system 1200. Of course, although only two additional components 1208 and 1210 are depicted in FIG. 12 for clarity of depiction, the system 1200 can include any number of such components.

模組或構件1206以及構件1208及1210可被安裝在一概要地以虛線描繪之共同的殼體1201中,並且可以依必要性來彼此電互連以形成所要的電路。該殼體1201係被描繪為一例如可用於一行動電話或個人數位助理中的類型之可攜式的殼體,並且螢幕1210可以在該殼體的表面被露出。在其中一結構1206係包含一例如是成像晶片的光敏元件的實施例中,一透鏡1211或其它光學元件亦可被設置以用於將光導向該結構。同樣地,在圖12中所示之簡化的系統僅僅是範例的;其它包含通常被視為固定的結構之例如是桌上型電腦、路由器與類似者的系統之系統亦可以利用以上論述的結構來加以做成。Module or member 1206 and members 1208 and 1210 can be mounted in a common housing 1201, generally depicted in dashed lines, and can be electrically interconnected to each other as necessary to form the desired circuitry. The housing 1201 is depicted as a portable housing of the type that can be used, for example, in a mobile phone or personal digital assistant, and the screen 1210 can be exposed at the surface of the housing. In embodiments where one of the structures 1206 includes a photosensitive element, such as an imaging wafer, a lens 1211 or other optical element can also be provided for directing light to the structure. Similarly, the simplified system shown in Figure 12 is merely exemplary; other systems including systems such as desktops, routers, and the like, which are generally considered to be fixed structures, may also utilize the structure discussed above. Come and make it.

圖13A及13B係展示以上相關圖7A及7B所述的實施例的一種變化。在此變化中,一微電子封裝1310係和上述的模組710相同,除了該微電子封裝1310係包含安裝到一基板1340的微電子元件1320、1330,而不是一模組卡,並且該微電子封裝1310係具有被配置以用於和另一構件互連的端子1350,而不是邊緣接點。在一實施例中,類似於上述的模組710,該基板1340可以是沒有引線延伸穿過該基板的孔。Figures 13A and 13B show a variation of the embodiment described above in relation to Figures 7A and 7B. In this variation, a microelectronic package 1310 is the same as the module 710 described above, except that the microelectronic package 1310 includes microelectronic components 1320, 1330 mounted to a substrate 1340 instead of a module card, and the micro The electronic package 1310 has terminals 1350 that are configured for interconnection with another component, rather than edge contacts. In an embodiment, similar to the module 710 described above, the substrate 1340 can be a hole without leads extending through the substrate.

該第一微電子元件1320可具有一面對該基板1340的第一表面1341之前表面1321。該第一微電子元件1320可具有複數個在該第一微電 子元件的前表面1321之元件接點1324。該些元件接點1324可以是和一第一組的基板接點1347a連結,使得該些元件接點係和該些基板接點覆晶接合。如同在圖13B中所示,該些元件接點1324以及該第一組的基板接點1347a分別可以用一區域陣列配置來加以配置。The first microelectronic element 1320 can have a front surface 1321 of the first surface 1341 of the substrate 1340. The first microelectronic component 1320 can have a plurality of first microelectronics The component contact 1324 of the front surface 1321 of the sub-element. The component contacts 1324 can be connected to a first set of substrate contacts 1347a such that the component contacts are flip-chip bonded to the substrate contacts. As shown in FIG. 13B, the component contacts 1324 and the first set of substrate contacts 1347a can each be configured in an area array configuration.

該第二微電子元件1330可具有一面對該基板1340的第一表面1341之前表面1331。該第二微電子元件1330的前表面1331可以部分地覆蓋該第一微電子元件1320的一後表面1322,並且可以例如是藉由一黏著劑層1314來附接至該後表面1322。The second microelectronic element 1330 can have a front surface 1331 of the first surface 1341 of the substrate 1340. The front surface 1331 of the second microelectronic element 1330 can partially cover a rear surface 1322 of the first microelectronic element 1320 and can be attached to the back surface 1322, for example, by an adhesive layer 1314.

該第二微電子元件1330可具有複數個在該第二微電子元件的前表面1331之元件接點1334。該些元件接點1334可以和一第二組的基板接點1347b連結,使得該些元件接點是和該些基板接點覆晶接合。如同在圖13B中所示,該些元件接點1334以及該第一組的基板接點1347b分別可以用一行配置來加以配置。The second microelectronic element 1330 can have a plurality of component contacts 1334 on the front surface 1331 of the second microelectronic component. The component contacts 1334 can be coupled to a second set of substrate contacts 1347b such that the component contacts are flip-chip bonded to the substrate contacts. As shown in FIG. 13B, the component contacts 1334 and the first set of substrate contacts 1347b can each be configured in a row configuration.

儘管該些接點1324、1334及1347係被展示以並列的行之接點來加以配置,但是其它的接點配置亦被本發明所思及,即如上參考圖7A-7C所述者。Although the contacts 1324, 1334, and 1347 are shown as being arranged in parallel row contacts, other contact configurations are also contemplated by the present invention, i.e., as described above with reference to Figures 7A-7C.

該基板1340可進一步包含複數個在該第二表面1342之端子1350,其被配置以用於連接該微電子封裝1310到該封裝外部的至少一構件。導電塊1351可被設置在該些端子1350之一露出的表面上。此種導電塊1351例如可以是焊料球、或是任何其它以上參考該導電塊273所述的材料。在一例子中,該外部的構件可以是一電路板,例如是在以下相關圖16所展示及敘述的電路板1602。The substrate 1340 can further include a plurality of terminals 1350 at the second surface 1342 that are configured to connect the microelectronic package 1310 to at least one component external to the package. A conductive block 1351 can be disposed on an exposed surface of one of the terminals 1350. Such a conductive block 1351 can be, for example, a solder ball, or any other material described above with reference to the conductive block 273. In one example, the external component can be a circuit board, such as the circuit board 1602 shown and described below with respect to FIG.

該些接點1324及1334可以例如是藉由個別的導電塊1373及1375來電連接至個別組的基板接點1347a及1347b。該些導電塊1373例如可以是焊料球、或是任何以上參考該導電塊273所述的其它材料。該些導電塊1375例如可以是細長的焊料連接、焊料球、或是任何以上參考該導電塊273所述的其它材料。The contacts 1324 and 1334 can be electrically connected to the individual sets of substrate contacts 1347a and 1347b, for example, by individual conductive blocks 1373 and 1375. The conductive bumps 1373 can be, for example, solder balls or any of the other materials described above with reference to the conductive bumps 273. The conductive bumps 1375 can be, for example, elongated solder connections, solder balls, or any of the other materials described above with reference to the conductive bumps 273.

如同在圖14A中所示,在圖13A及13B的實施例的一種變化中,該些導電塊1375及/或導電塊1373可以至少部份地被導電柱1475所取代。該些導電柱可包含沉積的部分,例如是被分配或電鍍在該第二微電子元件的接點1434被露出於其中的開口內。例如,該些導電柱1475可藉由利用一例如是在美國專利公開號2012/0126389中所敘述者的製程以沉積一種金屬或其它的導電材料(例如,一導電的基質材料)在至少部分延伸穿過該囊封材料1460之對應的孔1476之內來加以形成,該公開案的揭露內容茲被納入在此作為參考。As shown in FIG. 14A, in a variation of the embodiment of FIGS. 13A and 13B, the conductive bumps 1375 and/or conductive bumps 1373 can be at least partially replaced by conductive pillars 1475. The conductive pillars may comprise deposited portions, such as being dispensed or plated into openings in which the contacts 1434 of the second microelectronic component are exposed. For example, the conductive pillars 1475 can be at least partially extended by depositing a metal or other conductive material (eg, a conductive matrix material) by a process such as that described in U.S. Patent Publication No. 2012/0126389. This is formed by the corresponding holes 1476 of the encapsulating material 1460, the disclosure of which is hereby incorporated by reference.

在另一於圖14B中所示的變化中,該些柱可包含複數個截頭錐形的柱1477,其係從該第二微電子元件1430的元件接點1434突出朝向該些基板接點1447b中之對應的基板接點。每個柱1477本質上可以由一種實質剛性的導電材料所組成,例如一種像是銅或鋁的金屬。在一實施例中,該些柱1477可藉由蝕刻一例如是附接至該些接點之連續或斷續的金屬片之結構來加以形成。導電塊1473可被設置在該些柱1477以及基板接點1447b之間,以在其之間提供一電連接。如同在圖14B中所示,該些柱1477可具有一漸縮的形狀,使得每個柱具有一相鄰該元件接點1434的第一寬度為大於一相鄰該基板接點1447b的第二寬度。In another variation shown in FIG. 14B, the posts may include a plurality of frustoconical posts 1477 that protrude from the component contacts 1434 of the second microelectronic component 1430 toward the substrate contacts. Corresponding substrate contacts in 1447b. Each post 1477 can be essentially composed of a substantially rigid electrically conductive material, such as a metal such as copper or aluminum. In one embodiment, the posts 1477 can be formed by etching a structure such as a continuous or intermittent piece of metal attached to the contacts. A conductive block 1473 can be disposed between the posts 1477 and the substrate contacts 1447b to provide an electrical connection therebetween. As shown in FIG. 14B, the posts 1477 can have a tapered shape such that each post has a first width adjacent the component contact 1434 that is greater than a second adjacent the substrate contact 1447b. width.

參照圖14C,在圖14B的實施例的一種變化中,該些柱可包含複數個截頭錐形的柱1478,其係從該些基板接點1447b突出朝向該第二微電子元件1430的元件接點1434中之對應的元件接點。導電塊1473可被設置在該些柱1478以及元件接點1434之間,以在其之間提供一電連接。如同在圖14C中所示,該些柱1478可具有一漸縮的形狀,使得每個柱具有一相鄰該基板接點1447b的第一寬度為大於一相鄰該元件接點1434的第二寬度。Referring to FIG. 14C, in a variation of the embodiment of FIG. 14B, the posts may include a plurality of frustoconical posts 1478 protruding from the substrate contacts 1447b toward the components of the second microelectronic component 1430. Corresponding component contacts in contacts 1434. A conductive block 1473 can be disposed between the posts 1478 and the component contacts 1434 to provide an electrical connection therebetween. As shown in FIG. 14C, the posts 1478 can have a tapered shape such that each post has a first width adjacent the substrate contact 1447b that is greater than a second adjacent one of the component contacts 1434. width.

參照圖14D,在另一變化中,該些導電塊1375中的至少某些個可被導電柱1479a及1479b所取代,該些柱1479a係從該第二微電子元件1430的元件接點1434延伸朝向該些基板接點1447b中之對應的基板接點,並且該些柱1479b係從該些基板接點延伸朝向該些柱1479a。導電塊1473可被設置在該些柱1479a及1479b之間,以在其之間提供一電連接。如同在圖14D中所示,該些柱1479a及1479b分別可以具有一漸縮的形狀,使得每個柱具有一相鄰該元件接點1434或基板接點1447b的第一寬度為大於一相鄰該導電塊1473的第二寬度。Referring to FIG. 14D, in another variation, at least some of the plurality of conductive bumps 1375 can be replaced by conductive pillars 1479a and 1479b extending from the component contacts 1434 of the second microelectronic component 1430. The corresponding substrate contacts of the substrate contacts 1447b are oriented, and the pillars 1479b extend from the substrate contacts toward the pillars 1479a. A conductive block 1473 can be disposed between the posts 1479a and 1479b to provide an electrical connection therebetween. As shown in FIG. 14D, the pillars 1479a and 1479b may each have a tapered shape such that each pillar has a first width adjacent to the component contact 1434 or the substrate contact 1447b that is greater than one adjacent. The second width of the conductive block 1473.

參照圖14E,在圖14B的實施例的另一變化中,細長的焊料連接1480可被設置在該些基板接點1447b以及該第二微電子元件1430之對應的元件接點1434之間的柱1477的周圍,以提供在該些柱以及基板接點之間的一電連接。展示在圖14B、14C及14D的實施例的任一個中的導電塊1473可被延伸環繞在該些元件接點1434以及基板接點1447b之間的個別的柱1477、1478及1479之細長的焊料連接1480所取代。Referring to FIG. 14E, in another variation of the embodiment of FIG. 14B, an elongated solder joint 1480 can be disposed between the substrate contacts 1447b and the corresponding component contacts 1434 of the second microelectronic component 1430. Around 1477 to provide an electrical connection between the posts and the substrate contacts. The conductive block 1473 shown in any of the embodiments of Figures 14B, 14C, and 14D can be extended around the elongated solder of the individual posts 1477, 1478, and 1479 between the component contacts 1434 and the substrate contacts 1447b. Replaced by the connection 1480.

圖15係展示以上相關圖6所述的實施例的一種變化。在此 變化中,一微電子封裝1510係和上述的模組610相同,除了該微電子封裝1510係包含安裝到一基板1540的微電子元件1520及1530,而不是安裝到一模組卡,並且該微電子封裝1510係具有在該第二表面1542被露出之端子1550,以用於相互連接該封裝1510與另一構件,而不是如同相關圖6所描繪的實施例中的邊緣接點。在一實施例中,類似於上述的模組610,該基板1540可以沒有引線延伸穿過該基板的孔。Figure 15 is a diagram showing a variation of the embodiment described above in relation to Figure 6. here In a variation, a microelectronic package 1510 is the same as the module 610 described above, except that the microelectronic package 1510 includes microelectronic components 1520 and 1530 mounted to a substrate 1540 instead of being mounted to a module card, and the micro The electronic package 1510 has terminals 1550 that are exposed at the second surface 1542 for interconnecting the package 1510 with another member, rather than an edge contact as in the embodiment depicted in relation to FIG. In an embodiment, similar to the module 610 described above, the substrate 1540 may have no leads extending through the holes of the substrate.

類似於上述的模組10,該第二微電子元件1530的導電接點1534可以在該第二微電子元件的一中央區域1535內之前表面1531被露出。例如,該些接點1534可以用相鄰該前表面1531的中心的一或兩個平行的列來加以配置。Similar to the module 10 described above, the conductive contacts 1534 of the second microelectronic component 1530 can be exposed before the front surface 1531 in a central region 1535 of the second microelectronic component. For example, the contacts 1534 can be configured with one or two parallel columns adjacent the center of the front surface 1531.

該些導電塊1575例如可以是細長的焊料連接、焊料球、或是任何以上參考該導電塊273所述的其它材料。此種導電塊1575可以延伸穿過在該間隔物1512以及該第一微電子元件1520的橫向邊緣1523之間的空間,以電連接該第二微電子元件1530與該基板1540。The conductive bumps 1575 can be, for example, elongated solder connections, solder balls, or any of the other materials described above with reference to the conductive bumps 273. Such a conductive bump 1575 can extend through the space between the spacer 1512 and the lateral edge 1523 of the first microelectronic component 1520 to electrically connect the second microelectronic component 1530 with the substrate 1540.

在圖15中的導電塊1575可被在圖14A-14E中展示的介於元件接點1534以及基板接點1547b之間的替代連接中之任一種所取代。The conductive block 1575 in Figure 15 can be replaced by any of the alternative connections between the component contacts 1534 and the substrate contacts 1547b shown in Figures 14A-14E.

以上參考圖13A至15所述的微電子封裝中的任一個都可包含額外的微電子元件,例如,在圖10A及10B中所示的第三微電子元件1090a及1090b(整體稱為該第三微電子元件1090)以及在圖10C中展示的第三微電子元件1090'。Any of the microelectronic packages described above with reference to Figures 13A through 15 may include additional microelectronic components, such as the third microelectronic components 1090a and 1090b shown in Figures 10A and 10B (collectively referred to as the first The three microelectronic component 1090) and the third microelectronic component 1090' shown in Figure 10C.

在一特定的實施例中,該微電子封裝1310(或1510)可包含一堆疊的第三微電子元件1090,其係用一種類似於在圖10B中所示的微電子 元件的配置之配置來安裝到該基板1340的第一表面1341之上。在此一實施例中,該第三微電子元件1090a及1090b分別可以具有一表面面對該基板的第一表面1341,其係該微電子元件1320及1330的前表面1321及1331所面對的該基板之相同的表面。此一包含第三微電子元件1090的基板1340亦可具有在該第二表面1342之被配置以用於和另一構件互連的端子1350,而不是在圖10B中所示的邊緣接點。在此一實施例中,可以有任意數目的第三微電子元件1090在該堆疊中,其例如包含如同在圖10B的實施例中所示的兩個第三微電子元件1090a及1090b。In a particular embodiment, the microelectronic package 1310 (or 1510) can include a stacked third microelectronic component 1090 that utilizes a microelectronic similar to that shown in Figure 10B. The configuration of the components is configured to be mounted over the first surface 1341 of the substrate 1340. In this embodiment, the third microelectronic components 1090a and 1090b may respectively have a first surface 1341 whose surface faces the substrate, which is faced by the front surfaces 1321 and 1331 of the microelectronic components 1320 and 1330. The same surface of the substrate. The substrate 1340 comprising the third microelectronic component 1090 can also have a terminal 1350 disposed on the second surface 1342 for interconnection with another member, rather than the edge contact shown in FIG. 10B. In this embodiment, there may be any number of third microelectronic elements 1090 in the stack that include, for example, two third microelectronic elements 1090a and 1090b as shown in the embodiment of FIG. 10B.

在一例子中,該微電子封裝1310(或1510)可包含複數個以一種類似於圖10C中所示的微電子元件的配置之配置來安裝到該基板1340的第一表面1341之上的彼此相鄰的第三微電子元件1090',而不是以一種堆疊的配置。在此一實施例中,該些第三微電子元件1090'分別可以具有一表面面對該基板的第一表面1341,其係該微電子元件1320及1330的前表面1321及1331所面對的該基板之相同的表面。此一包含第三微電子元件1090'的基板1340亦可具有在該第二表面1342之被配置以用於和另一構件互連的端子1350,而不是在圖10C中所示的邊緣接點。在此一實施例中,可以有任意數目的第三微電子元件1090',其例如包含四個如同在圖10C的實施例中所示的微電子元件1090'。In one example, the microelectronic package 1310 (or 1510) can include a plurality of configurations mounted to the first surface 1341 of the substrate 1340 in a configuration similar to the configuration of the microelectronic elements shown in FIG. 10C. Adjacent third microelectronic element 1090', rather than a stacked configuration. In this embodiment, the third microelectronic components 1090' may respectively have a first surface 1341 whose surface faces the substrate, which is faced by the front surfaces 1321 and 1331 of the microelectronic components 1320 and 1330. The same surface of the substrate. The substrate 1340 comprising the third microelectronic element 1090' may also have a terminal 1350 disposed on the second surface 1342 for interconnection with another member, rather than the edge contact shown in FIG. 10C. . In this embodiment, there may be any number of third microelectronic elements 1090' that include, for example, four microelectronic elements 1090' as shown in the embodiment of Figure 10C.

以上參考圖1A至15所述的模組及微電子封裝可被利用在各式各樣的電子系統的結構中,例如是在圖16中所示的系統1600。例如,根據本發明的另一實施例的系統1600係包含一或多個例如是上述的微電子封裝1310之模組或構件1606結合其它的電子構件1608及1610。The modules and microelectronic packages described above with reference to Figures 1A through 15 can be utilized in the construction of a wide variety of electronic systems, such as system 1600 shown in Figure 16. For example, system 1600 in accordance with another embodiment of the present invention includes one or more modules or components 1606, such as the microelectronic package 1310 described above, in conjunction with other electronic components 1608 and 1610.

在所展示的範例系統1600中,該系統可包含一例如是撓性的印刷電路板之電路板、主機板、或是豎(riser)板1602,並且該電路板可包含許多的導體1604,其中只有一導體1604係被描繪在圖16中,其係將該些模組或構件1606彼此相互連接。此一電路板1602可以傳輸信號往返於內含在該系統1600中的微電子封裝及/或微電子組件的每一個。然而,此僅僅是範例的;任何用於在該些模組或構件1606之間做成電連接之適當的結構都可被利用。In the illustrated example system 1600, the system can include a circuit board, such as a flexible printed circuit board, a motherboard, or a riser board 1602, and the circuit board can include a plurality of conductors 1604, wherein Only one conductor 1604 is depicted in Figure 16, which interconnects the modules or members 1606 with one another. The circuit board 1602 can transmit signals to and from each of the microelectronic packages and/or microelectronic components contained within the system 1600. However, this is merely exemplary; any suitable structure for making electrical connections between the modules or components 1606 can be utilized.

在一特定的實施例中,該系統1600亦可包含一例如是半導體晶片1608的處理器,使得每個模組或構件1606可被配置以在一時脈週期中平行地傳輸一數目N個的資料位元,並且該處理器可被配置以在一時脈週期中平行地傳輸一數目M個的資料位元,M係大於或等於N。In a particular embodiment, the system 1600 can also include a processor, such as a semiconductor wafer 1608, such that each module or component 1606 can be configured to transmit a number N of data in parallel in a clock cycle. A bit, and the processor is configurable to transmit a number M of data bits in parallel in a clock cycle, the M system being greater than or equal to N.

在圖16描繪的例子中,該構件1608是一半導體晶片,並且構件1610是一顯示螢幕,但是任何其它的構件亦可被利用在該系統1600中。當然,為了清楚描繪起見,儘管只有兩個額外的構件1608及1610被描繪在圖16中,但是該系統1600可包含任意數目的此種構件。In the example depicted in FIG. 16, the member 1608 is a semiconductor wafer and the member 1610 is a display screen, but any other components may be utilized in the system 1600. Of course, for clarity of illustration, although only two additional components 1608 and 1610 are depicted in FIG. 16, the system 1600 can include any number of such components.

模組或構件1606及構件1608及1610可被安裝在一概要地以虛線描繪之共同的殼體1601中,並且可以依必要性來彼此電互連以形成所要的電路。該殼體1601係被描繪為一例如可用於一行動電話或個人數位助理中的類型之可攜式的殼體,並且螢幕1610可以在該殼體的表面被露出。在其中一結構1606係包含一例如是成像晶片的光敏元件的實施例中,一透鏡1611或是其它光學元件亦可被設置以用於將光導向該結構。同樣地,在圖16中所示之簡化的系統僅僅是範例的;其它包含通常被視為固定 的結構之例如是桌上型電腦、路由器與類似者的系統之系統亦可以利用以上論述的結構來加以做成。The module or member 1606 and members 1608 and 1610 can be mounted in a common housing 1601, generally depicted in dashed lines, and can be electrically interconnected to each other as necessary to form the desired circuitry. The housing 1601 is depicted as a portable housing of the type that can be used, for example, in a mobile phone or personal digital assistant, and the screen 1610 can be exposed at the surface of the housing. In embodiments where one of the structures 1606 includes a photosensitive element, such as an imaging wafer, a lens 1611 or other optical element can also be provided for directing light to the structure. Similarly, the simplified system shown in Figure 16 is merely an example; other inclusions are generally considered fixed A system such as a desktop computer, a router, and the like can also be constructed using the structure discussed above.

根據本發明的一模組或構件(例如是以上參考圖1A至1C所述的模組10),藉此該第一微電子元件的一表面係覆蓋該第二微電子元件的後表面的至少一部分之一項可能的益處可以是提供電連接一特定露出的邊緣接點(例如,該露出的邊緣接點50)與在一特定的微電子元件(例如,該第一微電子元件20)的一前表面被露出之一特定的電接點(例如,該電接點24)之相當短的引線。在相鄰的引線之間的寄生電容可能是相當大的,尤其在具有高的接點密度及細微間距的微電子組件中。在例如是其中該些引線70可以是相當短的模組10之微電子組件中,寄生電容可被降低,尤其是在相鄰的引線之間者。A module or member according to the present invention (for example, the module 10 described above with reference to FIGS. 1A to 1C) whereby a surface of the first microelectronic element covers at least a rear surface of the second microelectronic element A possible benefit of a portion may be to provide an electrical connection to a particular exposed edge contact (eg, the exposed edge contact 50) and a particular microelectronic component (eg, the first microelectronic component 20) A front surface is exposed to a relatively short lead of a particular electrical contact (e.g., the electrical contact 24). The parasitic capacitance between adjacent leads can be quite large, especially in microelectronic assemblies with high junction density and fine pitch. In a microelectronic assembly, such as where the leads 70 can be relatively short, the parasitic capacitance can be reduced, especially between adjacent leads.

如上所述根據本發明的一模組或構件之另一項可能的益處可以是提供例如是引線70之類似長度的引線,其例如可以電連接資料輸入/輸出信號端子(例如,該露出的邊緣接點50)與在個別的第一及第二微電子元件20、30的前表面之電性接點24、34。在例如是可包含複數個模組或構件1206的系統1200之系統中,具有相當類似長度的引線70是可以容許資料輸入/輸出信號在每個微電子元件以及該些露出的邊緣接點之間的傳遞延遲是相當接近地相符。Another possible benefit of a module or component in accordance with the present invention as described above may be to provide leads of similar length, such as lead 70, which may, for example, electrically connect data input/output signal terminals (e.g., the exposed edges) Contact 50) and electrical contacts 24, 34 on the front surfaces of the individual first and second microelectronic elements 20, 30. In a system, such as system 1200, which may include a plurality of modules or components 1206, leads 70 of comparable lengths may allow data input/output signals between each microelectronic component and the exposed edge contacts. The delivery delay is fairly close to match.

根據如上所述的本發明的一模組或構件之又一項可能的益處可以是提供例如是引線70之類似長度的引線,其例如可以電連接共用的時脈信號端子及/或共用的資料選通信號端子(例如,該露出的邊緣接點50)與在個別的第一及第二微電子元件20、30的前表面之電性接點24、34。該 些資料選通信號端子或時脈信號端子或是兩者都可具有實質相同的負載及電氣路徑長度至個別的微電子元件20、30,並且至每個微電子元件的路徑長度可以是相當短的。Yet another possible benefit of a module or component according to the present invention as described above may be to provide a lead of similar length, such as lead 70, which may, for example, electrically connect a common clock signal terminal and/or a shared material. The strobe signal terminals (e.g., the exposed edge contacts 50) and the electrical contacts 24, 34 of the front surfaces of the individual first and second microelectronic components 20, 30. The The data strobe signal terminals or the clock signal terminals or both may have substantially the same load and electrical path length to the individual microelectronic components 20, 30, and the path length to each microelectronic component may be relatively short of.

在先前敘述的模組或構件之任一個或是全部中,該第一或第二微電子元件中的一或多個的後表面在完成製造之後可以是至少部分地在該微電子組件的一外表面被露出。因此,在以上相關圖1A至1C所述的組件中,該第一及第二微電子元件20、30的後表面22、32的一或兩者在該完成的模組10中可以是部分或全部被露出。該後表面22、32可以部分或全部被露出,儘管一例如是該第一囊封材料60的包覆成型或是其它的囊封或封裝結構可能會接觸該微電子元件、或是被設置成相鄰該微電子元件。In any or all of the previously described modules or components, the back surface of one or more of the first or second microelectronic components may be at least partially at one of the microelectronic components after fabrication is completed The outer surface is exposed. Thus, in the assembly described above with respect to FIGS. 1A through 1C, one or both of the back surfaces 22, 32 of the first and second microelectronic elements 20, 30 may be partially or in the completed module 10. All are exposed. The back surfaces 22, 32 may be partially or fully exposed, although for example an overmolding of the first encapsulating material 60 or other encapsulation or encapsulation structure may contact the microelectronic component or be configured to Adjacent to the microelectronic component.

在上述的實施例的任一個中,該微電子組件可包含一由金屬、石墨或是任何其它合適的導熱材料所做成之散熱片。在一實施例中,該散熱片係包含一相鄰該第一微電子元件而被設置的金屬層。該金屬層可以在該第一微電子元件的後表面上被露出。或者是,該散熱片可包含一至少覆蓋該第一微電子元件的後表面之包覆成型或是囊封材料。In any of the above embodiments, the microelectronic assembly can comprise a heat sink made of metal, graphite or any other suitable thermally conductive material. In one embodiment, the heat sink comprises a metal layer disposed adjacent to the first microelectronic component. The metal layer can be exposed on the back surface of the first microelectronic element. Alternatively, the heat sink may comprise an overmold or encapsulation material covering at least the back surface of the first microelectronic component.

儘管本發明在此已經參考特定實施例來加以敘述,但將瞭解到的是,這些實施例僅僅是說明本發明的原理及應用而已。因此,欲被理解是可以對於該些說明的實施例做出許多的修改,並且其它配置可被設計出,而不脫離如同所附的申請專利範圍所界定之本發明的精神與範疇。Although the present invention has been described herein with reference to the specific embodiments thereof, it is understood that these embodiments are merely illustrative of the principles and applications of the invention. Therefore, it is to be understood that a number of modifications may be made to the described embodiments, and other configurations may be devised without departing from the spirit and scope of the invention as defined by the appended claims.

將會體認到的是,各種的附屬項申請專利範圍以及其中所闡述的特點都可以用和最初的申請專利範圍所提出的不同之方式來加以組合。亦將會體認到的是,相關個別的實施例所敘述的特點可以和該些所敘 述的實施例中之其它實施例共用。It will be appreciated that the scope of the various patent applications and the features set forth therein may be combined in a manner different from that set forth in the scope of the original patent application. It will also be appreciated that the features described in the relevant individual embodiments can be described Other embodiments in the described embodiments are common.

1310‧‧‧微電子封裝1310‧‧‧Microelectronics package

1314‧‧‧黏著劑層1314‧‧‧Adhesive layer

1320‧‧‧第一微電子元件1320‧‧‧First microelectronic components

1321‧‧‧前表面1321‧‧‧ front surface

1322‧‧‧後表面1322‧‧‧Back surface

1324‧‧‧元件接點1324‧‧‧Component contacts

1330‧‧‧第二微電子元件1330‧‧‧Second microelectronic components

1331‧‧‧前表面1331‧‧‧ front surface

1334‧‧‧元件接點1334‧‧‧Component contacts

1340‧‧‧基板1340‧‧‧Substrate

1341‧‧‧第一表面1341‧‧‧ first surface

1342‧‧‧第二表面1342‧‧‧ second surface

1347a‧‧‧基板接點1347a‧‧‧Substrate contacts

1347b‧‧‧基板接點1347b‧‧‧Substrate contacts

1350‧‧‧端子1350‧‧‧ Terminal

1351‧‧‧導電塊1351‧‧‧Electrical block

1373‧‧‧導電塊1373‧‧‧Electrical block

1375‧‧‧導電塊1375‧‧‧Electrical block

Claims (27)

一種微電子封裝,其係包括:一基板,其具有第一及第二相對的表面、複數個在該第一表面的基板接點以及複數個在該第二表面的端子,該些端子係被配置以用於連接該微電子封裝到該微電子封裝外部的至少一構件;以及第一及第二微電子元件,該第一微電子元件具有面向該基板之第一表面的一第一表面,以及相對於其的一第二表面,該第一微電子元件具有延伸於其之該第一和第二表面之間並且延伸在第二方向上的一橫向邊緣,該第二微電子組件具有面對該基板的該第一表面的一前表面,每個微電子元件係具有複數個在其前表面的元件接點,每個微電子元件的該些元件接點係和該些基板接點中之對應的基板接點連結,該第二微電子元件的該前表面係部分地覆蓋該第一微電子元件的一後表面並且附接至該後表面,該第二微電子元件的該前表面具有一中央區域,該第二微電子元件的該前表面的該中央區域的至少一部份在第一方向上突出超過該第一微電子元件的該橫向邊緣,該第二微電子元件的該些元件接點係被放置在該中央區域中的兩個平行列中,其中該第一微電子元件的該些元件接點係用一區域陣列來加以配置並且和一第一組的基板接點覆晶接合,並且該第二微電子元件的該些元件接點係藉由細長的焊料連接來和一第二組的基板接點連結,每個細長的焊料連接具有一寬度,該寬度係小於在該些元件接點中之對應的元件接點和該些基板接點中之對應的被連結的基板接點之間的一距離。 A microelectronic package includes: a substrate having first and second opposing surfaces, a plurality of substrate contacts on the first surface, and a plurality of terminals on the second surface, the terminals being Configuring at least one component for connecting the microelectronic package to the exterior of the microelectronic package; and first and second microelectronic components having a first surface facing the first surface of the substrate, And a second surface opposite thereto, the first microelectronic element having a lateral edge extending between the first and second surfaces thereof and extending in a second direction, the second microelectronic assembly having a surface a front surface of the first surface of the substrate, each microelectronic component having a plurality of component contacts on a front surface thereof, the component contacts of each microelectronic component and the substrate contacts Corresponding substrate contacts are joined, the front surface of the second microelectronic component partially covering a rear surface of the first microelectronic component and attached to the rear surface, the front surface of the second microelectronic component Have one a central region, at least a portion of the central region of the front surface of the second microelectronic component protruding in a first direction beyond the lateral edge of the first microelectronic component, the components of the second microelectronic component The contacts are placed in two parallel columns in the central region, wherein the component contacts of the first microelectronic component are configured with an array of regions and are flipped with a first set of substrate contacts Bonding, and the component contacts of the second microelectronic component are coupled to a second set of substrate contacts by an elongated solder connection, each elongated solder connection having a width that is less than a distance between a corresponding component contact of the component contacts and a corresponding one of the substrate contacts. 如申請專利範圍第1項之微電子封裝,其中該第二微電子元件的該些 元件接點係突出超過該第一微電子元件的一橫向邊緣。 The microelectronic package of claim 1, wherein the second microelectronic component The component contacts protrude beyond a lateral edge of the first microelectronic component. 如申請專利範圍第1項之微電子封裝,其中該第一及第二微電子元件中之至少一個係包含一記憶體儲存元件。 The microelectronic package of claim 1, wherein at least one of the first and second microelectronic components comprises a memory storage component. 如申請專利範圍第3項之微電子封裝,其進一步包括複數個從該些基板接點中的至少某些個延伸至該些端子的引線,其中該些引線是可用以載有一位址信號,該位址信號可用以定址在該第一及第二微電子元件中之至少一個的該記憶體儲存元件。 The microelectronic package of claim 3, further comprising a plurality of leads extending from at least some of the substrate contacts to the terminals, wherein the leads are usable to carry an address signal, The address signal can be used to address the memory storage element of at least one of the first and second microelectronic components. 如申請專利範圍第1項之微電子封裝,其中該些端子中的至少某些個是可用以在該些個別的端子以及該第一及第二微電子元件的每一個之間載有一信號或是一參考電位中的至少一個。 The microelectronic package of claim 1, wherein at least some of the terminals are operable to carry a signal or between each of the individual terminals and each of the first and second microelectronic components Is at least one of a reference potential. 如申請專利範圍第1項之微電子封裝,其進一步包括複數個第三微電子元件,每個第三微電子元件係電連接至該基板。 The microelectronic package of claim 1, further comprising a plurality of third microelectronic components, each third microelectronic component being electrically connected to the substrate. 如申請專利範圍第6項之微電子封裝,其中該複數個第三微電子元件係用一堆疊的配置來加以配置,該些第三微電子元件的每一個係具有一前表面或後表面面對該些第三微電子元件中之一相鄰的一個的一前表面或後表面。 The microelectronic package of claim 6, wherein the plurality of third microelectronic components are configured in a stacked configuration, each of the third microelectronic components having a front or back surface a front or back surface of one of the adjacent ones of the third microelectronic elements. 如申請專利範圍第6項之微電子封裝,其中該複數個第三微電子元件係用一平面的配置來加以配置,該些第三微電子元件的每一個係具有一週邊表面面對該些第三微電子元件中之一相鄰的一個的一週邊表面。 The microelectronic package of claim 6, wherein the plurality of third microelectronic components are configured in a planar configuration, each of the third microelectronic components having a peripheral surface facing the a peripheral surface of one of the adjacent ones of the third microelectronic elements. 如申請專利範圍第6項之微電子封裝,其中該第二微電子元件係包含揮發性RAM,該些第三微電子元件分別包含非揮發性快閃記憶體,並且該第一微電子元件係包含一被組態設定以主要控制在一外部的構件以及該第 二及第三微電子元件之間的資料傳輸的處理器。 The microelectronic package of claim 6, wherein the second microelectronic component comprises a volatile RAM, the third microelectronic component respectively comprises a non-volatile flash memory, and the first microelectronic component is Containing a component that is configured to primarily control an external component and the A processor for data transfer between the second and third microelectronic components. 如申請專利範圍第6項之微電子封裝,其中該第二微電子元件係包含一揮發性框緩衝器記憶體儲存元件,該些第三微電子元件分別包含非揮發性快閃記憶體,並且該第一微電子元件係包含一繪圖處理器。 The microelectronic package of claim 6, wherein the second microelectronic component comprises a volatile frame buffer memory storage component, the third microelectronic component respectively comprising a non-volatile flash memory, and The first microelectronic component comprises a graphics processor. 一種微電子系統,其係包含複數個如申請專利範圍第1項的微電子封裝、一電路板以及一處理器,該微電子封裝的該些端子係和該電路板的板接點電連接,每個微電子封裝係被配置以在一時脈週期中平行地傳輸一數目N個的資料位元,並且該處理器係被配置以在一時脈週期中平行地傳輸一數目M個的資料位元,M係大於或等於N。 A microelectronic system comprising a plurality of microelectronic packages as claimed in claim 1, a circuit board, and a processor, the terminals of the microelectronic package being electrically connected to the board contacts of the circuit board, Each microelectronic package is configured to transmit a number N of data bits in parallel in a clock cycle, and the processor is configured to transmit a number M of data bits in parallel in a clock cycle , M system is greater than or equal to N. 一種微電子系統,其係包括一如申請專利範圍第1項的微電子封裝以及一或多個電連接至該微電子封裝的其它電子構件。 A microelectronic system comprising a microelectronic package as in claim 1 and one or more other electronic components electrically connected to the microelectronic package. 如申請專利範圍第12項之系統,其進一步包括一殼體,該微電子封裝以及該些其它電子構件係被安裝到該殼體。 The system of claim 12, further comprising a housing to which the microelectronic package and the other electronic components are mounted. 一種微電子模組,其係包括:一模組卡,其係具有一第一表面、一第二表面以及複數個相鄰該第一及第二表面中的至少一個的一邊緣之平行的露出的邊緣接點,經建構以配接一插座之對應的接點,該模組卡係具有複數個在該第一表面的卡接點;以及第一及第二微電子元件,該第一微電子元件具有面對該模組卡的該第一表面的一第一表面以及相對於其的一第二表面,該第一微電子元件具有延伸於其之該第一和第二表面之間並且延伸在第二方向上的一橫向邊緣,該第二微電子元件具有一前表面,其面對該模組卡的該第一表面,每個微 電子元件係具有複數個在其前表面的元件接點,每個微電子元件的該些元件接點係和該些卡接點中之對應的卡接點連結,該第二微電子元件的該前表面係部分地覆蓋該第一微電子元件的一後表面,並且附接至該後表面,該第二微電子元件的該前表面具有一中央區域,該第二微電子元件的該前表面的該中央區域的至少一部份在第一方向上突出超過該第一微電子元件的該橫向邊緣,該第二微電子元件的該些元件接點係被放置在該中央區域中的兩個平行列中,其中該第一微電子元件的該些元件接點係用一區域陣列來加以配置並且和一第一組的卡接點覆晶接合,並且該第二微電子元件的該些元件接點係藉由細長的焊料連接來和一第二組的卡接點連結,每個細長的焊料連接具有一寬度,該寬度係小於在該些元件接點中之對應的元件接點和該些基板接點中之對應的被連結的基板接點之間的一距離。 A microelectronic module includes: a module card having a first surface, a second surface, and a plurality of parallel exposed edges of at least one of the first and second surfaces An edge contact, configured to match a corresponding contact of a socket, the module card having a plurality of card contacts on the first surface; and first and second microelectronic components, the first micro The electronic component has a first surface facing the first surface of the module card and a second surface opposite thereto, the first microelectronic component having between the first and second surfaces extending therethrough and Extending a lateral edge in the second direction, the second microelectronic element having a front surface facing the first surface of the module card, each micro The electronic component has a plurality of component contacts on a front surface thereof, and the component contacts of each microelectronic component are coupled to corresponding ones of the card contacts, the second microelectronic component The front surface partially covers a rear surface of the first microelectronic component and is attached to the rear surface, the front surface of the second microelectronic component having a central region, the front surface of the second microelectronic component At least a portion of the central region protrudes beyond the lateral edge of the first microelectronic element in a first direction, and the component contacts of the second microelectronic element are placed in two of the central regions In parallel columns, wherein the component contacts of the first microelectronic component are configured with an array of regions and are flip-chip bonded to a first set of card contacts, and the components of the second microelectronic component The contacts are connected to a second set of snap contacts by an elongated solder connection, each elongated solder joint having a width that is less than a corresponding component contact in the component contacts and the Pair of substrate contacts Is a distance between the substrate contacts connected. 如申請專利範圍第14項之模組,其中該第二微電子元件的該些元件接點係突出超過該第一微電子元件的一橫向邊緣。 The module of claim 14, wherein the component contacts of the second microelectronic component protrude beyond a lateral edge of the first microelectronic component. 如申請專利範圍第14項之模組,其中該些邊緣接點係在該模組卡的該第一或第二表面中的至少一個被露出。 The module of claim 14, wherein the edge contacts are exposed at least one of the first or second surfaces of the module card. 如申請專利範圍第14項之模組,其中該第一及第二微電子元件中之至少一個係包含一記憶體儲存元件。 The module of claim 14, wherein at least one of the first and second microelectronic components comprises a memory storage component. 如申請專利範圍第17項之模組,其進一步包括複數個從該些卡接點中的至少某些個延伸至該些邊緣接點的引線,其中該些引線是可用以載有一位址信號,該位址信號可用以定址在該第一及第二微電子元件中之至少一個中的該記憶體儲存元件。 The module of claim 17, further comprising a plurality of leads extending from at least some of the card contacts to the edge contacts, wherein the leads are usable to carry an address signal The address signal can be used to address the memory storage element in at least one of the first and second microelectronic components. 如申請專利範圍第14項之模組,其中該些邊緣接點中的至少某些個是可用以在該個別的邊緣接點以及該第一及第二微電子元件的每一個之間載有一信號或是一參考電位中的至少一個。 The module of claim 14, wherein at least some of the edge contacts are usable to carry between the individual edge contacts and each of the first and second microelectronic components The signal is either at least one of a reference potential. 如申請專利範圍第14項之模組,其進一步包括複數個第三微電子元件,每個第三微電子元件係電連接至該模組卡。 The module of claim 14, further comprising a plurality of third microelectronic components, each third microelectronic component being electrically connected to the module card. 如申請專利範圍第20項之模組,其中該複數個第三微電子元件係用一堆疊的配置來加以配置,該些第三微電子元件的每一個係具有一前表面或後表面面對該些第三微電子元件中之一相鄰的一個的一前表面或後表面。 The module of claim 20, wherein the plurality of third microelectronic components are configured in a stacked configuration, each of the third microelectronic components having a front or back surface facing a front or back surface of an adjacent one of the third microelectronic elements. 如申請專利範圍第20項之模組,其中該複數個第三微電子元件係用一平面的配置來加以配置,該些第三微電子元件的每一個係具有一週邊表面面對該些第三微電子元件中之一相鄰的一個的一週邊表面。 The module of claim 20, wherein the plurality of third microelectronic components are configured in a planar configuration, each of the third microelectronic components having a peripheral surface facing the plurality of A peripheral surface of one of the three microelectronic components. 如申請專利範圍第20項之模組,其中該第二微電子元件係包含揮發性RAM,該些第三微電子元件分別包含非揮發性快閃記憶體,並且該第一微電子元件係包含一被組態設定以主要控制在一外部的構件以及該第二及第三微電子元件之間的資料傳輸的處理器。 The module of claim 20, wherein the second microelectronic component comprises a volatile RAM, the third microelectronic component respectively comprises a non-volatile flash memory, and the first microelectronic component comprises A processor configured to primarily control an external component and data transfer between the second and third microelectronic components. 如申請專利範圍第20項之模組,其中該第二微電子元件係包含一揮發性框緩衝器記憶體儲存元件,該些第三微電子元件分別包含非揮發性快閃記憶體,並且該第一微電子元件係包含一繪圖處理器。 The module of claim 20, wherein the second microelectronic component comprises a volatile frame buffer memory storage component, the third microelectronic component respectively comprising a non-volatile flash memory, and the The first microelectronic component includes a graphics processor. 一種微電子系統,其係包含複數個如申請專利範圍第14項的模組、一電路板以及一處理器,該模組的該些露出的接點係被插入一配接的插座中,該插座係和該電路板電連接,每個模組係被配置以在一時脈週期中平 行地傳輸一數目N個的資料位元,並且該處理器係被配置以在一時脈週期中平行地傳輸一數目M個的資料位元,M係大於或等於N。 A microelectronic system comprising a plurality of modules, a circuit board and a processor as claimed in claim 14, wherein the exposed contacts of the module are inserted into a mating socket, The socket is electrically connected to the circuit board, and each module is configured to be flat in a clock cycle A number N of data bits are transmitted in a row, and the processor is configured to transmit a number M of data bits in parallel in a clock cycle, the M system being greater than or equal to N. 一種微電子系統,其係包括一如申請專利範圍第1項的模組以及一或多個電連接至該模組的其它電子構件。 A microelectronic system comprising a module as in claim 1 and one or more other electronic components electrically connected to the module. 如申請專利範圍第26項之系統,其進一步包括一殼體,該模組以及該些其它電子構件係被安裝到該殼體。 The system of claim 26, further comprising a housing to which the module and the other electronic components are mounted.
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