TWI503287B - Hydrofluoric acid waste liquor treatment method - Google Patents
Hydrofluoric acid waste liquor treatment method Download PDFInfo
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- TWI503287B TWI503287B TW101103825A TW101103825A TWI503287B TW I503287 B TWI503287 B TW I503287B TW 101103825 A TW101103825 A TW 101103825A TW 101103825 A TW101103825 A TW 101103825A TW I503287 B TWI503287 B TW I503287B
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
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- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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- C02F1/5209—Regulation methods for flocculation or precipitation
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
- C02F1/5236—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using inorganic agents
- C02F1/5245—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using inorganic agents using basic salts, e.g. of aluminium and iron
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- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/58—Treatment of water, waste water, or sewage by removing specified dissolved compounds
- C02F1/583—Treatment of water, waste water, or sewage by removing specified dissolved compounds by removing fluoride or fluorine compounds
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- C02F2101/00—Nature of the contaminant
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Description
本發明關於一種對玻璃基板等進行蝕刻之後需要廢棄處理的氫氟酸的廢水處理方法，尤其是關於使用含氫氟酸的蝕刻溶液後將氟濃度從高濃度降低到低濃度而廢棄的廢水處理方法。 The present invention relates to a wastewater treatment method for hydrofluoric acid which needs to be disposed of after etching a glass substrate or the like, and more particularly to waste water treatment for reducing the fluorine concentration from a high concentration to a low concentration after using an etching solution containing hydrofluoric acid. method.
製造顯示面板等時，用蝕刻溶液對玻璃基板進行蝕刻的製程需使用大量的含高濃度氫氟酸的溶液。因此，蝕刻製程結束後進行氫氟酸濃度依然高的蝕刻溶液的廢棄處理時，需要支付另外的費用而委託給專門回收廢水的服務公司，並且如此回收的含氫氟酸的廢水與含有其他有害物質的廢水混合，會經過廢水處理製程。在玻璃基板的細磨(slimming)製程或者用於形成圖案的蝕刻製程等製程中使用後需要處理的廢水中，氟離子濃度約為10,000至25,000ppm以上，因此降低氟離子的濃度成為廢水處理的核心問題。對於單獨處理含高濃度氟離子的廢水的方法來說，尚未公開有特別好的方法。處理廢水時，對於一同包含氫氟酸等其他有害物質的綜合廢水，多次反覆進行作為物理化學處理的一級處理，該一級處理為用消石灰等中和並過濾淤渣(Sludge)的過程，然後進行諸如生物化學處理或電分解處理等的二級、三級處理。 When manufacturing a display panel or the like, a process of etching a glass substrate with an etching solution requires a large amount of a solution containing a high concentration of hydrofluoric acid. Therefore, when the etching solution of the hydrofluoric acid concentration is still high after the completion of the etching process, it is necessary to pay a separate fee and entrust it to a service company that exclusively collects waste water, and the hydrofluoric acid-containing wastewater thus recovered contains other harmful substances. The wastewater of the substance is mixed and passed through the wastewater treatment process. In the wastewater to be treated after use in a slimming process of a glass substrate or an etching process for forming a pattern, the fluoride ion concentration is about 10,000 to 25,000 ppm or more, thereby reducing the concentration of fluoride ions into wastewater treatment. the core issue. A particularly good method has not been disclosed for the method of separately treating wastewater containing a high concentration of fluoride ions. When the wastewater is treated, the first-stage treatment is performed as a physical chemical treatment for the integrated wastewater containing other harmful substances such as hydrofluoric acid, and the primary treatment is a process of neutralizing and filtering the sludge with slaked lime or the like, and then Perform secondary and tertiary treatments such as biochemical treatment or electrolysis treatment.
然而，目前尚未公開有採用單獨處理蝕刻製程中產生的包含高濃 度氟離子的廢水的物理化學處理方法而能夠急劇降低氟離子濃度的技術。如果能夠提供這種技術，則可以期待環保效果的同時可以期待降低廢水處理費用的效果。 However, it has not been disclosed yet that the use of a separate treatment etch process produces a high concentration A technique for rapidly reducing the concentration of fluoride ions by a physicochemical treatment method for wastewater containing fluoride ions. If such a technology can be provided, it is expected that the environmental protection effect can be expected to reduce the cost of wastewater treatment.
有鑒於此，本發明的目的在於提供一種對於包含高濃度氟離子的蝕刻後的殘留液單獨將氟離子濃度轉換成極其低的濃度的廢水處理方法。 In view of the above, an object of the present invention is to provide a wastewater treatment method for separately converting a fluorine ion concentration into an extremely low concentration for an etched residual liquid containing a high concentration of fluoride ions.
本發明提供一種氫氟酸廢水處理方法，其包括：步驟a，在含有氟離子之廢水中加入酸和含鈣鹽；步驟b，加入氫氧化鈣；步驟c，與酸一起加入分別包含鐵鹽或鋁鹽之助凝劑；步驟d，加入高分子凝結劑。 The present invention provides a hydrofluoric acid wastewater treatment method comprising: step a, adding an acid and a calcium-containing salt to a wastewater containing fluoride ions; step b, adding calcium hydroxide; and step c, adding an iron salt together with the acid Or a coagulant of aluminum salt; step d, adding a polymeric coagulant.
較佳地，本發明可以提供一種氫氟酸廢水處理方法，其中於步驟a及步驟b中，攪拌1至20小時。 Preferably, the present invention can provide a hydrofluoric acid wastewater treatment method in which steps a and b are stirred for 1 to 20 hours.
較佳地，本發明可以提供一種氫氟酸廢水處理方法，其更包括步驟e，係在步驟d之後，過濾生成的淤渣。 Preferably, the present invention can provide a hydrofluoric acid wastewater treatment method, which further comprises the step e, after the step d, filtering the formed sludge.
較佳地，本發明可以提供一種氫氟酸廢水處理方法，其中在進行過濾的步驟e之後，對於殘留之廢水反覆進行步驟a至步驟e。 Preferably, the present invention can provide a hydrofluoric acid wastewater treatment method in which steps a to e are repeated for the residual wastewater after the step e of the filtration.
較佳地，本發明可以提供一種氫氟酸廢水處理方法，其中步驟b使廢水的pH值達到10以上。 Preferably, the present invention can provide a method for treating hydrofluoric acid wastewater, wherein step b brings the pH of the wastewater to above 10.
較佳地，本發明可以提供一種氫氟酸廢水處理方法，其中步驟c之助凝劑包括：氯化亞鐵(FeCl2)、硫酸鋁(Al2(SO4)3)、硫酸亞鐵(FeSO4)、硫酸鐵(Fe2(SO4)3)、氯化鐵(FeCl3) 、聚氯化鋁(Poly Aluminum Chloride，PAC)、銨鋁礬(Al(NH4)(SO4)2．12H2O)、鋁酸鈉(Sodium Aluminate)，並且步驟c所得的溶液根據步驟c中所加入的酸而成為中性。 Preferably, the present invention can provide a hydrofluoric acid wastewater treatment method, wherein the coagulant of step c comprises: ferrous chloride (FeCl 2 ), aluminum sulfate (Al 2 (SO 4 ) 3 ), ferrous sulfate ( FeSO 4 ), iron sulfate (Fe 2 (SO 4 ) 3 ), ferric chloride (FeCl 3 ), poly aluminum chloride (PAC), ammonium aluminum lanthanum (Al(NH 4 )(SO 4 ) 2 .12H 2 O), sodium aluminate, and the solution obtained in step c is neutral according to the acid added in step c.
較佳地，本發明可以提供一種氫氟酸廢水處理方法，其中酸為鹽酸，含鈣鹽為硝酸鈣、氯化鈣、硫化鈣中的一種，用摩爾比計，酸及含鈣鹽的混合比為1：1。 Preferably, the present invention can provide a method for treating hydrofluoric acid wastewater, wherein the acid is hydrochloric acid, and the calcium salt is one of calcium nitrate, calcium chloride and calcium sulfide, and the mixture of acid and calcium salt is used in molar ratio. The ratio is 1:1.
較佳地，本發明可以提供一種氫氟酸廢水處理方法，其中氫氟酸廢水處理方法處理廢水中氟離子濃度為10,000ppm以上的廢水。 Preferably, the present invention can provide a hydrofluoric acid wastewater treatment method, wherein the hydrofluoric acid wastewater treatment method treats wastewater having a fluoride ion concentration of 10,000 ppm or more in the wastewater.
根據本發明之氫氟酸廢水處理方法，藉由單獨處理蝕刻製程後殘留的廢水而可以將10,000ppm以上的氟離子濃度降低到幾百ppm水平，對於如此殘留有低濃度的氟離子的廢水，可以在後續製程中藉由多種已知的方法很容易地製備出幾ppm至幾十ppm水平的溶液，因此環保效果非常大。 According to the hydrofluoric acid wastewater treatment method of the present invention, the fluorine ion concentration of 10,000 ppm or more can be reduced to a level of several hundred ppm by separately treating the residual wastewater after the etching process, and for the wastewater in which the low concentration of fluoride ions remains, It is possible to easily prepare a solution having a level of several ppm to several tens of ppm by a variety of known methods in a subsequent process, and thus the environmental protection effect is very large.
並且，根據本發明之氫氟酸廢水處理方法，更可以大幅減輕進行蝕刻製程的工廠的環境有害性，並且可以降低廢水處理所需的費用。 Further, according to the hydrofluoric acid wastewater treatment method of the present invention, the environmental harmfulness of the plant in which the etching process is performed can be greatly reduced, and the cost required for the wastewater treatment can be reduced.
第1圖係為表示本發明之氫氟酸廢水處理方法之較佳實施例之流程圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a flow chart showing a preferred embodiment of the hydrofluoric acid wastewater treatment method of the present invention.
第2a圖至第2d圖係為表示本發明之氫氟酸廢水處理方法之較佳實施例的概略性之示意圖。 2a to 2d are schematic diagrams showing a preferred embodiment of the hydrofluoric acid wastewater treatment method of the present invention.
以下，參照附圖詳細說明根據本發明之氫氟酸廢水處理方法的較 佳實施例。 Hereinafter, the method for treating hydrofluoric acid wastewater according to the present invention will be described in detail with reference to the accompanying drawings. A good example.
請參閱第1圖，其為表示本發明的實施例的整個流程的流程圖。 Please refer to Fig. 1, which is a flow chart showing the entire flow of an embodiment of the present invention.
本發明的目的在於，去除對於玻璃基板進行細磨製程、圖案形成製程等製程之後產生的蝕刻廢水中殘留的高濃度的氟離子。主要的製程在於，利用氟離子(F-)的沉澱反應製成淤渣，經由過濾去除。 An object of the present invention is to remove a high concentration of fluoride ions remaining in etching wastewater generated after a process such as a fine grinding process or a pattern forming process for a glass substrate. The main process consists in making a sludge by precipitation reaction of fluoride ion (F - ) and removing it by filtration.
蝕刻製程後，溶液中會大量殘留氫氟酸，因此氟離子濃度會達到25,000ppm水平。在這種廢水中，首先與強酸一同加入含鈣鹽，並攪拌。在這過程中，從含鈣鹽生成的鈣離子(Ca+2)與氟離子結合，形成氟化鈣(CaF2)沉澱，因此多少能降低氟離子濃度(請參照第2a圖)。雖然沉澱反應是快速發生的反應，但是較佳地攪拌充分長的時間，以從加入的含鈣鹽最大程度產生沉澱。上述的含鈣鹽可以例舉氯化鈣(CaCl2)，以摩爾比計，強酸與含鈣鹽的混合比可以是1：1，並且加入量可以根據廢水量調整。含鈣鹽除了CaCl2外，更可以舉出硝酸鈣、氯化鈣、硫化鈣、硫酸鈣、碳酸鈣等，但是由於硝酸鈣、氯化鈣、硫化鈣具有易溶於水的特性，而硫酸鈣、碳酸鈣具有不易溶於水的特性，因此本實施例中雖然使用了反應性最好的氯化鈣，但是更可以使用硝酸鈣(Ca(NO3)2)、氯化鈣(CaCl2)、硫化鈣(CaS)。 After the etching process, a large amount of hydrofluoric acid remains in the solution, so the fluoride ion concentration will reach a level of 25,000 ppm. In this wastewater, the calcium-containing salt is first added together with a strong acid and stirred. In this process, the calcium ion (Ca + 2 ) generated from the calcium-containing salt combines with the fluoride ion to form a calcium fluoride (CaF 2 ) precipitate, so that the fluoride ion concentration can be somewhat lowered (refer to Fig. 2a). Although the precipitation reaction is a rapidly occurring reaction, it is preferably stirred for a sufficiently long period of time to maximize precipitation from the added calcium-containing salt. The above calcium-containing salt may be exemplified by calcium chloride (CaCl 2 ), and the mixing ratio of the strong acid to the calcium-containing salt may be 1:1 in terms of a molar ratio, and the amount of addition may be adjusted according to the amount of the wastewater. In addition to CaCl 2 , calcium-containing salts include calcium nitrate, calcium chloride, calcium sulfide, calcium sulfate, calcium carbonate, etc., but calcium nitrate, calcium chloride, and calcium sulfide have the property of being easily soluble in water, and sulfuric acid. Calcium and calcium carbonate have the property of being insoluble in water. Therefore, although calcium chloride having the best reactivity is used in the present embodiment, calcium nitrate (Ca(NO 3 ) 2 ) or calcium chloride (CaCl 2 ) can be used. ), calcium sulfide (CaS).
然後，加入消石灰(Ca(OH)2)，進一步活化氟離子沉澱反應(請參照第2b圖)。消石灰(Ca(OH)2)的加入量雖然可以根據廢水量進行調整，但是加入到廢水的pH值達到10以上，較佳地pH值可以達到12以上的程度。 Then, hydrated lime (Ca(OH) 2 ) is added to further activate the fluoride ion precipitation reaction (refer to Fig. 2b). Although the amount of slaked lime (Ca(OH) 2 ) added can be adjusted according to the amount of waste water, the pH of the waste water added to the wastewater reaches 10 or more, and preferably the pH can reach 12 or more.
根據以上加入的反應物質，可以認為廢水中發生如下的化學反應。 According to the reaction substance added above, it is considered that the following chemical reaction occurs in the wastewater.
2HCl+Ca(OH)2→CaCl2+2H2O 2HCl+Ca(OH) 2 →CaCl 2 +2H 2 O
Ca(OH)2+CaCl2+4F-→2CaF2(沉澱)+20H-+2Cl- Ca(OH) 2 +CaCl 2 +4F - →2CaF 2 (precipitation) +20H-+2Cl -
Ca(OH)2+2HF→2CaF2(沉澱)+2H2O Ca(OH) 2 +2HF→2CaF 2 (precipitation) +2H 2 O
發生上述反應的時間需要根據廢水量而確定為充分的時間，可以進行1至20小時，較佳地進行10小時以上，並且進行攪拌，以利於充分反應。 The time during which the above reaction occurs is determined to be a sufficient time depending on the amount of the wastewater, and may be carried out for 1 to 20 hours, preferably for 10 hours or more, and stirred to facilitate sufficient reaction.
接著，為了進一步降低氟離子濃度，且提高生成的沉澱的凝結性，加入助凝劑。 Next, in order to further reduce the fluoride ion concentration and increase the coagulation property of the formed precipitate, a coagulant is added.
助凝劑可以是與氟離子結合而產生沉澱反應的含鐵鹽或含鋁鹽，較佳地可以舉出氯化亞鐵(FeCl2)和硫酸鋁(Al2(SO4)3)，此外更可以使用硫酸亞鐵(FeSO4)、硫酸鐵(Fe2(SO4)3)、氯化鐵(FeCl3)、聚氯化鋁(PAC，Poly Aluminum Chloride)、銨鋁礬(Al(NH4)(SO4)2．12H2O)、鋁酸鈉(Sodium Aluminate)。 The coagulant may be an iron-containing salt or an aluminum-containing salt which combines with fluoride ions to cause a precipitation reaction, and preferably ferrous chloride (FeCl 2 ) and aluminum sulfate (Al 2 (SO 4 ) 3 ), Further, ferrous sulfate (FeSO 4 ), iron sulfate (Fe 2 (SO 4 ) 3 ), ferric chloride (FeCl 3 ), polyaluminum chloride (PAC), ammonium aluminum lanthanum (Al (NH4) can be used. (SO 4 ) 2 .12H 2 O), sodium aluminate (Sodium Aluminate).
在本實施例中，同時加入了上述的氯化亞鐵(FeCl2)和硫酸鋁(Al2(SO4)3)這兩種物質，作為助凝劑。 In the present embodiment, the above-mentioned two kinds of substances of ferrous chloride (FeCl 2 ) and aluminum sulfate (Al 2 (SO 4 ) 3 ) were simultaneously added as a coagulant.
根據上述助凝劑，生成氟化亞鐵(FeF2)沉澱和氟化鋁(AlF3)沉澱，據此氟離子濃度會進一步降低(請參照第2c圖)。 According to the above coagulant, precipitation of ferrous fluoride (FeF 2 ) and precipitation of aluminum fluoride (AlF 3 ) are formed, whereby the fluoride ion concentration is further lowered (refer to Fig. 2c).
並且，與上述助凝劑一起進一步加入強酸，使pH值變成中性。在本實施例中，添加硫酸(H2SO4)，將pH值調整成7左右。 Further, a strong acid is further added together with the above coagulant to make the pH neutral. In the present embodiment, sulfuric acid (H 2 SO 4 ) was added to adjust the pH to about 7.
加入上述助凝劑，發生如下的反應。 When the above coagulant is added, the following reaction occurs.
FeCl2+2F-→FeF2(沉澱)+2Cl- FeCl 2 +2F - →FeF 2 (precipitation) + 2Cl -
Al2(SO4)3+6F-→2AlF3(沉澱)+3SO4 - Al 2 (SO 4 ) 3 +6F - →2AlF 3 (precipitate) +3SO 4 -
Ca(OH)2+H2SO4→CaSO4(沉澱)+2H2O Ca(OH) 2 +H 2 SO 4 →CaSO 4 (precipitation)+2H 2 O
接著，加入高分子凝結劑(polymer)，將藉由沉澱反應產生的懸浮物凝結，變成淤渣狀態，並藉由過濾去除(請參照第2d圖)。 Next, a polymer coagulant is added to condense the suspension generated by the precipitation reaction to a sludge state, and is removed by filtration (refer to Fig. 2d).
藉由這種過程，可以將10,000ppm以上的氟離子濃度降低到幾百ppm水平，對於藉由過濾剩下的溶液，藉由反覆進行幾次上述製程，可以進一步降低氟離子濃度。進一步地，本發明之氫氟酸廢水處理方法也可以將25,000ppm以上高濃度的氟離子濃度能降低到幾百ppm水平。並且，雖然本發明之氫氟酸廢水處理方法也可以適用於10,000ppm以下，例如幾百ppm水平的氫氟酸廢水處理中，但是對於濃度為幾百ppm水平的溶液，應用現有的廢水處理方法，就可以容易地製備出濃度為幾ppm至十幾ppm水平的溶液，因此較佳地，考慮反覆進行上述製程所需的時間和精力、費用等，確定適宜水平的次數，設計製程。 By this process, the concentration of fluorine ions of 10,000 ppm or more can be lowered to a level of several hundred ppm, and by repeating the above processes several times by filtering the remaining solution, the concentration of fluoride ions can be further reduced. Further, the hydrofluoric acid wastewater treatment method of the present invention can also reduce the concentration of fluoride ions having a high concentration of 25,000 ppm or more to a level of several hundred ppm. Moreover, although the hydrofluoric acid wastewater treatment method of the present invention can also be applied to hydrofluoric acid wastewater treatment at a level of 10,000 ppm or less, for example, several hundred ppm, the existing wastewater treatment method is applied to a solution having a concentration of several hundred ppm. Therefore, it is possible to easily prepare a solution having a concentration of several ppm to several tens of ppm, and therefore, it is preferable to consider the time, effort, cost, etc. required to repeatedly carry out the above process, determine the appropriate number of times, and design a process.
如上所述，利用化學反應的平衡、離子積常數的調節等以及氟離子沉澱反應，使氟離子最大程度變成沉澱，由此可以去除氟離子，處理廢水。 As described above, by the balance of the chemical reaction, the adjustment of the ion product constant, and the fluoride ion precipitation reaction, the fluoride ions are largely precipitated, whereby the fluoride ions can be removed and the wastewater can be treated.
本發明的保護範圍不侷限於上述說明的實施例，而根據申請專利範圍的記載被定義，對於本發明所屬技術領域的具有通常知識的技術人員來說，可以在申請專利範圍所記載的保護範圍內進行各 種修改和變更是顯而易見的。 The scope of the present invention is not limited to the embodiments described above, but is defined in accordance with the description of the scope of the claims, and the scope of protection of the patent application can be applied to those skilled in the art to which the present invention pertains. Carry out each Modifications and changes are obvious.
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| KR101559852B1 (en) * | 2014-11-13 | 2015-10-13 | 오에스케이 주식회사 | Treating method for waste water contaning fluoroboric acid produced in etch process |
| CN104649391B (en) * | 2014-12-18 | 2016-06-22 | 华南理工大学 | A kind of method utilizing fluorine-containing spent acid to prepare polymeric aluminum |
| KR101651520B1 (en) * | 2015-01-22 | 2016-08-26 | 김용구 | Treatment method of low-concentration fluoride wastewater |
| CN105347505B (en) * | 2015-11-10 | 2017-12-05 | 太仓中化环保化工有限公司 | A kind of processing method of fluorine-containing heavy metal ion-containing waste water inorganic agent and fluorine-containing heavy metal ion-containing waste water |
| CN105948083A (en) * | 2016-04-28 | 2016-09-21 | 中南大学 | Environment-friendly separation and recovery method of fluorine in fluorine-containing waste liquid |
| CN106430993A (en) * | 2016-08-30 | 2017-02-22 | 江西沃格光电股份有限公司 | Acid pickling method for glasses and acid pickling device |
| CN109851020A (en) * | 2019-02-13 | 2019-06-07 | 江西沃格光电股份有限公司 | Waste water treating agent and preparation method thereof and wastewater treatment method |
| CN112110589B (en) * | 2020-09-27 | 2022-09-09 | 大连东泰产业废弃物处理有限公司 | Harmless treatment method of high-concentration buffer hydrofluoric acid etching waste liquid |
| KR102577808B1 (en) * | 2023-02-14 | 2023-09-13 | 시화패션칼라사업협동조합 | Wastewater treatment method using mixed treatment of dyeing wastewater and heterogeneous wastewater |
| CN117003359B (en) * | 2023-07-19 | 2024-06-14 | 大庆师范学院 | Efficient treatment device for reducing slag yield of graphene wastewater treatment and application method |
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