TWI503198B - Docking guide apparatus - Google Patents
Docking guide apparatus Download PDFInfo
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- TWI503198B TWI503198B TW101146335A TW101146335A TWI503198B TW I503198 B TWI503198 B TW I503198B TW 101146335 A TW101146335 A TW 101146335A TW 101146335 A TW101146335 A TW 101146335A TW I503198 B TWI503198 B TW I503198B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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Description
本發明係有關於一種對接導向裝置,並且更具體地有關一種當安裝用於使用雷射光束製造有機發光二極體顯示器的設備時調節該設備的高度和位置的對接導向裝置。The present invention relates to a docking guide, and more particularly to a docking guide that adjusts the height and position of an apparatus for manufacturing an organic light emitting diode display using a laser beam.
通常,將具有長邊和短邊的矩形玻璃基板用做用於平板顯示裝置(例如,有機發光二極體顯示器)的基板。Generally, a rectangular glass substrate having a long side and a short side is used as a substrate for a flat panel display device (for example, an organic light emitting diode display).
這樣的玻璃基板經受各種處理(包括清洗、鐳射退火、曝光和蝕刻)以被製成用於平板顯示裝置的基板。Such a glass substrate is subjected to various processes including cleaning, laser annealing, exposure, and etching to be made into a substrate for a flat panel display device.
玻璃基板通過供應機器人被傳送到上述處理中的每個處理,並且被提供到用於進行相應處理的每個室中的基板傳送裝置,支撐由供應機器人傳送的玻璃基板。The glass substrate is conveyed to each of the above processes by the supply robot, and is supplied to the substrate transfer device in each of the chambers for performing the respective processes, supporting the glass substrate conveyed by the supply robot.
由退火裝置進行退火處理。退火裝置發出雷射光束穿過室的上表面到基板上,以使基板結晶。Annealing is performed by an annealing device. The annealing device emits a laser beam through the upper surface of the chamber onto the substrate to crystallize the substrate.
退火裝置包括:光學模組,上述光學模組用於將雷射光束投射到基板上;以及導向模組(guide module),上述導向模組用於生成雷射光束並且將雷射光束引導至光學模組上。The annealing device includes: an optical module for projecting a laser beam onto the substrate; and a guide module for generating a laser beam and guiding the laser beam to the optical On the module.
標題為“基板製造裝置(Substrate manufacturing device)”的韓國專利申請No.2008-0040832A(於2008年5 月9日公佈)公開了本發明的相關技術。Korean Patent Application No. 2008-0040832A entitled "Substrate manufacturing device" (in 2008) The related art of the present invention is disclosed on the 9th of the month.
常規地,在分別製造光學模組和導向模組之後,組裝退火裝置。然而,由於設備規模大,使用者難以組裝退火裝置。Conventionally, after separately manufacturing the optical module and the guide module, the annealing device is assembled. However, due to the large scale of the equipment, it is difficult for the user to assemble the annealing device.
因此,需要一種克服現有技術中這種問題的對接導向裝置。Therefore, there is a need for a docking guide that overcomes this problem in the prior art.
本發明被構想為解決現有技術中的這種問題,並且本發明的一方面是提供一種對接導向裝置,上述對接導向裝置可以使光學模組和導向模組的高度相等,將導向模組移動到光學模組上,並且引導光學模組和導向模組的準確組裝。The present invention is conceived to solve such problems in the prior art, and an aspect of the present invention provides a docking guide that can equalize the height of the optical module and the guide module and move the guide module to On the optical module, and guide the accurate assembly of the optical module and the guiding module.
根據本發明的一方面,對接導向裝置包括:底部框架單元;可移動單元,上述可移動單元可移動地安裝在上述底部框架單元上;以及聯接單元,上述聯接單元放置在上述可移動單元上並且聯接到導向模組。According to an aspect of the invention, a docking guide includes: a bottom frame unit; a movable unit movably mounted on the bottom frame unit; and a coupling unit, the coupling unit being placed on the movable unit and Connected to the guide module.
上述底部框架單元可包括:多個台柱(pillars),上述多個台柱放置在固定結構上;以及連接器,上述連接器連接上述台柱。The bottom frame unit may include: a plurality of pillars placed on the fixed structure; and a connector connecting the pillars.
上述可移動單元可包括:固定軌道(fixed rail),上述固定軌道聯接到上述底部框架單元;以及可移動板,上述可移動板可移動地放置在上述固定軌道上。The movable unit may include: a fixed rail coupled to the bottom frame unit; and a movable plate movably placed on the fixed rail.
上述可移動單元可進一步包括閂鎖頜(latching jaw),上述閂鎖頜從上述固定軌道的一端向上延伸以限制上述可移動板的移動。The movable unit may further include a latching jaw extending upward from one end of the fixed rail to restrict movement of the movable plate.
上述可移動單元可進一步包括調節板,上述調節板配置在上述固定軌道和上述底部框架單元之間以調節上述固定軌道的高度。The movable unit may further include an adjustment plate disposed between the fixed rail and the bottom frame unit to adjust a height of the fixed rail.
上述聯接單元可包括:底板,上述底板聯接到上述導向模組的下表面;以及聯接凸緣,上述聯接凸緣從上述底板延伸並且放置在上述可移動板上。The coupling unit may include a bottom plate coupled to a lower surface of the guide module, and a coupling flange extending from the bottom plate and placed on the movable plate.
上述聯接凸緣可形成有聯接孔,並且移動板可形成有與上述聯接孔相對應的移動凹槽。The coupling flange may be formed with a coupling hole, and the moving plate may be formed with a moving groove corresponding to the coupling hole.
上述聯接單元可進一步包括水平保持器,上述水平保持器聯接到上述聯接凸緣並且插入整平凹槽(leveling groove)內,上述整平凹槽形成在上述可移動板上以使上述聯接凸緣保持水平。The coupling unit may further include a horizontal holder coupled to the coupling flange and inserted into a leveling groove formed on the movable plate to make the coupling flange maintain standard.
上述整平凹槽可具有斜面以在上述整平凹槽的中心部位處具有最低點,並且上述水平保持器可具有在上述水平保持器的下端處形成的球面。The flat groove may have a slope to have a lowest point at a central portion of the flat groove, and the horizontal holder may have a spherical surface formed at a lower end of the horizontal holder.
上述水平保持器可擰入上述聯接凸緣以調節上述聯接凸緣的高度。The horizontal retainer described above can be screwed into the coupling flange to adjust the height of the coupling flange.
上述對接導向裝置可進一步包括:支撐單元,上述支撐單元聯接到上述底部框架單元並且向上延伸以支撐上述導向模組。The docking guide may further include: a support unit coupled to the bottom frame unit and extending upward to support the guide module.
上述支撐單元可包括:支撐桿,上述支撐桿聯接到上述底部框架單元;支撐凸台(support boss),上述支撐凸台聯接到上述支撐桿並且朝上述導向模組突出;以及滾子(roller),上述滾子可旋轉地聯接到上述支撐凸台以接觸上述 導向模組。The support unit may include: a support rod coupled to the bottom frame unit; a support boss coupled to the support rod and protruding toward the guide module; and a roller The roller is rotatably coupled to the support boss to contact the above Guide module.
在根據本發明的對接導向裝置中,導向模組的高度通過堆疊調節板調節,導向模組和光學模組的高度可以被調節為彼此相等。In the docking guide according to the present invention, the height of the guide module is adjusted by the stack adjustment plate, and the heights of the guide module and the optical module can be adjusted to be equal to each other.
在根據本發明的對接導向裝置中,可移動板可以被移動至將導向模組配置在光學模組附近。In the docking guide according to the present invention, the movable plate can be moved to arrange the guide module in the vicinity of the optical module.
在根據本發明的對接導向裝置中,水平保持器可以被插入到整平凹槽內以保持導向模組的水平。In the docking guide according to the present invention, the horizontal retainer can be inserted into the flattening groove to maintain the level of the guide module.
在根據本發明的對接導向裝置中,水平保持器可以精細調節聯接凸緣的高度,從而使配置在光學模組附近的導向模組的高度能夠準確地調節。In the docking guide according to the present invention, the horizontal holder can finely adjust the height of the coupling flange, so that the height of the guide module disposed near the optical module can be accurately adjusted.
1‧‧‧對接導向裝置1‧‧‧Docking guide
10‧‧‧底部框架單元10‧‧‧Bottom frame unit
11‧‧‧台柱11‧‧‧台柱
12‧‧‧連接器12‧‧‧Connector
20‧‧‧可移動單20‧‧‧Removable slip
21‧‧‧固定軌道21‧‧‧ Fixed track
22‧‧‧可移動板22‧‧‧Removable board
23‧‧‧閂鎖頜23‧‧‧Latch jaw
24‧‧‧調節板24‧‧‧Adjustment board
26‧‧‧移動凹槽26‧‧‧ moving groove
28‧‧‧斜面28‧‧‧Bevel
29‧‧‧整平凹槽29‧‧‧ Flattening grooves
30‧‧‧聯接單元30‧‧‧Connection unit
31‧‧‧底板31‧‧‧floor
32‧‧‧聯接凸緣32‧‧‧Connection flange
33‧‧‧水平保持器33‧‧‧Horizontal Holder
36‧‧‧聯接孔36‧‧‧Connection hole
38‧‧‧球面38‧‧‧ spherical
40‧‧‧支撐單元40‧‧‧Support unit
41‧‧‧支撐桿41‧‧‧Support rod
42‧‧‧支撐凸台42‧‧‧Support boss
43‧‧‧滾子43‧‧‧Roller
44‧‧‧制動板44‧‧‧ brake plate
100‧‧‧光學模組100‧‧‧Optical module
200‧‧‧導向模組200‧‧‧guide module
根據結合附圖對實施例進行的以下描述,本發明的上述及-其他方面、特徵和優點將變得明顯,其中:圖1是根據本發明的一實施例的對接導向裝置的立體圖;圖2是根據本發明的該實施例的對接導向裝置的底部框架單元的示意圖;圖3是根據本發明的該實施例的對接導向裝置的可移動單元的示意圖;圖4是根據本發明的該實施例的對接導向裝置的聯接單元的示意圖;以及圖5是根據本發明的該實施例的對接導向裝置的示意性的剖面圖。The above and other aspects, features, and advantages of the present invention will become apparent from the following description of the embodiments of the accompanying drawings in which: FIG. 1 is a perspective view of a docking guide according to an embodiment of the present invention; Is a schematic view of a bottom frame unit of a docking guide according to this embodiment of the invention; FIG. 3 is a schematic view of a movable unit of the docking guide according to the embodiment of the present invention; FIG. 4 is an embodiment according to the present invention. A schematic view of a coupling unit of a docking guide; and FIG. 5 is a schematic cross-sectional view of the docking guide according to this embodiment of the present invention.
在下文中,將根據附圖描述本發明的示例性的實施例。應當注意的是,附圖不是精確進行刻度的,並且僅為了描述方便以及清楚,附圖線上的厚度或者在部件的尺寸上可以被放大。如本文中使用的,單數形式“一(a)”、“一(an)”和“該(the)”同樣可以適用於包括複數形式,除非另外明確地指出。Hereinafter, exemplary embodiments of the present invention will be described in accordance with the accompanying drawings. It should be noted that the drawings are not precisely scaled and are merely for convenience of description and clarity, and the thickness of the drawing lines or the size of the components may be enlarged. "an,"
此外,通過考慮本申請的功能限定本文中所使用的術語,並且可以根據使用者或操作者的習慣或意向改變這些術語。因此,應當根據本文中提出的全部申請進行術語的定義。Further, the terms used herein are defined by considering the functions of the present application, and these terms may be changed according to the habit or intention of the user or the operator. Therefore, the definition of terms should be made in accordance with all of the applications presented herein.
圖1是根據本發明的一實施例的對接導向裝置的立體圖;圖2是根據本發明的該實施例的對接導向裝置的底部框架單元的示意圖;圖3是根據本發明的該實施例的對接導向裝置的可移動單元的示意圖;圖4是根據本發明的該實施例的對接導向裝置的聯接單元的示意圖;以及圖5是根據本發明的該實施例的對接導向裝置的示意性的剖面圖。1 is a perspective view of a docking guide according to an embodiment of the present invention; FIG. 2 is a schematic view of a bottom frame unit of the docking guide according to the embodiment of the present invention; and FIG. 3 is a docking according to the embodiment of the present invention. Schematic diagram of a movable unit of a guiding device; FIG. 4 is a schematic view of a coupling unit of the docking guide according to the embodiment of the present invention; and FIG. 5 is a schematic sectional view of the docking guiding device according to the embodiment of the present invention .
參見圖1至圖5,根據本發明的一實施例的對接導向裝置1包括底部框架單元10、可移動單元20和聯接單元30。Referring to FIGS. 1 through 5, a docking guide 1 according to an embodiment of the present invention includes a bottom frame unit 10, a movable unit 20, and a coupling unit 30.
底部框架單元10被放置在固定結構(例如,地面)上,並且可移動單元20可移動地被安裝在底部框架單元10上。聯接單元30被放置在可移動單元20上並且聯接到導向模組200。The bottom frame unit 10 is placed on a fixed structure (for example, the ground), and the movable unit 20 is movably mounted on the bottom frame unit 10. The coupling unit 30 is placed on the movable unit 20 and coupled to the guide module 200.
因此,隨著聯接到導向模組200的聯接單元30連同可移動單元20被移動,導向模組200準確地接近光學模組 100並且可以被組裝到光學模組100。Therefore, as the coupling unit 30 coupled to the guide module 200 and the movable unit 20 are moved, the guide module 200 accurately approaches the optical module. 100 and can be assembled to the optical module 100.
這裏,光學模組100是指用於放射雷射光束到基板上的設備,並且導向模組200是指用於引導所產生的雷射光束至光學模組100的設備。Here, the optical module 100 refers to a device for radiating a laser beam onto a substrate, and the guiding module 200 refers to a device for guiding the generated laser beam to the optical module 100.
導銷(guide pin)形成在光學模組100和導向模組200之間的接觸部分中的一個接觸部分上,並且導向凹槽形成在另一接觸部分處以接納導銷。A guide pin is formed on one of the contact portions between the optical module 100 and the guide module 200, and a guide groove is formed at the other contact portion to receive the guide pin.
根據本發明的該實施例,對接導向裝置1進一步包括支撐單元40。支撐單元40被聯接到底部框架單元10並且向上突出以支撐導向模組200的兩側。According to this embodiment of the invention, the docking guide 1 further comprises a support unit 40. The support unit 40 is coupled to the bottom frame unit 10 and protrudes upward to support both sides of the guide module 200.
在本發明的該實施例中,支撐單元40包括:支撐桿41,支撐桿41被聯接到底部框架單元10並且向上延伸;以及支撐凸台42,支撐凸台42被聯接到支撐桿41並且朝導向模組200突出以接觸導向模組200。In this embodiment of the invention, the support unit 40 includes: a support rod 41 coupled to the bottom frame unit 10 and extending upward; and a support boss 42 coupled to the support rod 41 and facing The guiding module 200 protrudes to contact the guiding module 200.
這裏,滾子43可旋轉地被聯接到支撐凸台42以經由面對面接觸到導向模組200,使得導向模組200和支撐凸台42之間的摩擦可以在導向模組200的移動過程中被抑制。Here, the roller 43 is rotatably coupled to the support boss 42 to contact the guide module 200 via face-to-face, so that the friction between the guide module 200 and the support boss 42 can be moved during the movement of the guide module 200. inhibition.
在本發明的該實施例中,底部框架單元10包括台柱11和連接器12。In this embodiment of the invention, the bottom frame unit 10 includes a post 11 and a connector 12.
台柱11被放置在固定結構(例如,地面)上。多個台柱11對應於導向模組200的截面積被配置。同時,連接器12與台柱11互相連接在一起。The post 11 is placed on a fixed structure (for example, the ground). The plurality of pillars 11 are arranged corresponding to the cross-sectional area of the guide module 200. At the same time, the connector 12 and the post 11 are connected to each other.
在本發明的該實施例中,可移動單元20包括固定軌道21和可移動板22。In this embodiment of the invention, the movable unit 20 includes a fixed rail 21 and a movable plate 22.
多個固定軌道21被聯接到連接器12,並且可移動板22沿每個固定軌道21移動。A plurality of fixed rails 21 are coupled to the connector 12, and the movable panel 22 is moved along each of the fixed rails 21.
根據本發明的該實施例,可移動單元20進一步提供有閂鎖頜23。閂鎖頜23在固定軌道21的一端處向上突出。According to this embodiment of the invention, the movable unit 20 is further provided with a latching jaw 23. The latching jaw 23 protrudes upward at one end of the fixed rail 21.
如此,因為可移動板22被限制可移動板22移動的閂鎖頜23截住,所以可移動板22可以被防止脫離固定軌道21的一端。As such, since the movable plate 22 is intercepted by the latching jaw 23 that restricts the movement of the movable plate 22, the movable plate 22 can be prevented from being detached from one end of the fixed rail 21.
制動板44被聯接到支撐桿41。制動板44防止可移動板22脫離固定軌道21的另一端,而且還防止導向模組200朝光學模組100過度移動並且損壞設備。The brake plate 44 is coupled to the support rod 41. The brake plate 44 prevents the movable plate 22 from being detached from the other end of the fixed rail 21, and also prevents the guide module 200 from excessively moving toward the optical module 100 and damaging the device.
根據本發明的該實施例,可移動單元20進一步提供有調節板24。調節板24被配置在固定軌道21和連接器12之間以調節固定軌道21的高度。According to this embodiment of the invention, the movable unit 20 is further provided with an adjustment plate 24. The adjustment plate 24 is disposed between the fixed rail 21 and the connector 12 to adjust the height of the fixed rail 21.
因此,調節板24位於固定軌道21和連接器12之間以調節導向模組200的高度,使得導向模組200的高度對應於光學模組100的高度。Therefore, the adjusting plate 24 is located between the fixed rail 21 and the connector 12 to adjust the height of the guiding module 200 such that the height of the guiding module 200 corresponds to the height of the optical module 100.
當一個或多個調節板24被堆疊以調節導向模組200的高度時,聯接到固定軌道21的螺栓穿過已堆疊的調節板24以被緊固到連接器12。When one or more adjustment plates 24 are stacked to adjust the height of the guide module 200, the bolts coupled to the fixed rails 21 pass through the stacked adjustment plates 24 to be fastened to the connector 12.
在本發明的該實施例中,聯接單元30包括底板31和聯接凸緣32。In this embodiment of the invention, the coupling unit 30 includes a bottom plate 31 and a coupling flange 32.
底板31被聯接到導向模組200的下表面,並且多個聯接凸緣32分別從底板31延伸並且被分別放置在可移動板22上。The bottom plate 31 is coupled to the lower surface of the guide module 200, and a plurality of coupling flanges 32 respectively extend from the bottom plate 31 and are respectively placed on the movable plate 22.
在本發明的該實施例中,聯接單元30進一步包括水平保持器33。In this embodiment of the invention, the coupling unit 30 further includes a level holder 33.
水平保持器33被聯接到每個聯接凸緣32上,並且向下延伸以被插入到形成在可移動板22上的整平凹槽29內。A horizontal holder 33 is coupled to each of the coupling flanges 32 and extends downward to be inserted into the flattening grooves 29 formed on the movable plate 22.
這裏,整平凹槽29具有斜面28以在整平凹槽29的中心部位處具有最低點,並且在水平保持器33的下端處具有與斜面28接觸的球面38。Here, the flattening groove 29 has a slope 28 to have the lowest point at the center portion of the leveling groove 29, and has a spherical surface 38 in contact with the slope 28 at the lower end of the horizontal holder 33.
這樣,當水平保持器33被插入到整平凹槽29內時,使得球面38接觸到斜面28,聯接凸緣32的水平被保持。Thus, when the horizontal holder 33 is inserted into the flattening groove 29, the spherical surface 38 is brought into contact with the inclined surface 28, and the level of the coupling flange 32 is maintained.
水平保持器33被擰入聯接凸緣32。由於水平保持器33的高度隨水平保持器33的旋轉方向而改變,因此水平保持器33被旋轉以精細調節聯接凸緣32的高度。The horizontal retainer 33 is screwed into the coupling flange 32. Since the height of the horizontal holder 33 changes with the rotation direction of the horizontal holder 33, the horizontal holder 33 is rotated to finely adjust the height of the coupling flange 32.
聯接凸緣32形成有聯接孔36,並且可移動板22形成有移動凹槽26。The coupling flange 32 is formed with a coupling hole 36, and the movable plate 22 is formed with a moving groove 26.
因此,當聯接孔36和移動凹槽26與安裝在可移動板22上的聯接凸緣32被共線地放置時,水平保持器33被平穩地插入到整平凹槽29內。Therefore, when the coupling hole 36 and the moving groove 26 are placed in line with the coupling flange 32 mounted on the movable plate 22, the horizontal holder 33 is smoothly inserted into the flattening groove 29.
當螺栓被聯接到聯接孔36和移動凹槽26時,聯接凸緣32和可移動板22被保持在聯接狀態。When the bolt is coupled to the coupling hole 36 and the moving groove 26, the coupling flange 32 and the movable plate 22 are maintained in a coupled state.
接下來,將描述根據本發明的該實施例的對接導向裝置的操作。Next, the operation of the docking guide according to this embodiment of the present invention will be described.
將連接器12連接到放置在固定結構上的台柱11,並且將固定軌道21安裝到連接器12的上表面上。將可移動板 22可移動地放置在固定軌道21上。The connector 12 is attached to the post 11 placed on the fixed structure, and the fixed rail 21 is mounted to the upper surface of the connector 12. Moveable board 22 is movably placed on the fixed rail 21.
這裏,將底板31聯接到與光學模組100聯接的導向模組200的下表面,並且將從底板31延伸的聯接凸緣32放置到可移動板22上。Here, the bottom plate 31 is coupled to the lower surface of the guide module 200 coupled to the optical module 100, and the coupling flange 32 extending from the bottom plate 31 is placed on the movable plate 22.
在這種情況下,當可移動板22被移動時,聯接到可移動板22的聯接凸緣32也移動,並且因此導向模組200朝光學模組100水平移動。In this case, when the movable plate 22 is moved, the coupling flange 32 coupled to the movable plate 22 also moves, and thus the guide module 200 moves horizontally toward the optical module 100.
此時,聯接到連接器12上以支撐導向模組200的兩側的支撐單元40被防止在導向模組200移動的過程中向左或向右移動。At this time, the support unit 40 coupled to the connector 12 to support both sides of the guide module 200 is prevented from moving to the left or right during the movement of the guide module 200.
用於抑制可移動板22在一方向上移動的閂鎖頜23形成在固定軌道21的一端處,並且制動板44形成在支撐單元40上以抑制可移動板22在相反方向上移動。A latching jaw 23 for restraining the movable plate 22 from moving in one direction is formed at one end of the fixed rail 21, and a brake plate 44 is formed on the support unit 40 to inhibit the movable plate 22 from moving in the opposite direction.
因此,可移動板22被防止過度地移動,從而可防止固定軌道21脫離期望的位置,或者使得導向模組200能夠防止與光學模組100碰撞以避免設備受損。Therefore, the movable plate 22 is prevented from being excessively moved, so that the fixed rail 21 can be prevented from coming off a desired position, or the guide module 200 can be prevented from colliding with the optical module 100 to prevent damage to the device.
將調節板24配置在連接器12和固定軌道21之間。由於導向模組200的高度根據調節板24的厚度被調節,因此操作者能夠改變已堆疊的調節板24的數量,使得已堆疊的調節板24的數量對應於光學模組100的連接部分以調節導向模組200的高度。The adjustment plate 24 is disposed between the connector 12 and the fixed rail 21. Since the height of the guide module 200 is adjusted according to the thickness of the adjustment plate 24, the operator can change the number of the adjustment plates 24 that have been stacked, so that the number of the stacked adjustment plates 24 corresponds to the connection portion of the optical module 100 to be adjusted. The height of the guide module 200.
將水平保持器33設置於聯接凸緣32。將水平保持器33插入到形成在可移動板22上的整平凹槽29內。The horizontal holder 33 is placed on the coupling flange 32. The horizontal holder 33 is inserted into the flat groove 29 formed on the movable plate 22.
隨著形成在水平保持器33的下端處的球面38被 插入到具有斜面28的整平凹槽29內以保持整平凹槽29的水平,聯接到水平保持器33上的聯接凸緣32和聯接到水平保持器33上的導向模組200保持聯接凸緣32和導向模組200各自的水平。As the spherical surface 38 formed at the lower end of the horizontal holder 33 is Inserted into the flattened recess 29 having the ramp 28 to maintain the level of the flattening recess 29, the coupling flange 32 coupled to the horizontal retainer 33 and the guide module 200 coupled to the horizontal retainer 33 remain coupled The level of the edge 32 and the guide module 200 are each.
這時,當水平保持器33被擰入聯接凸緣32時,水平保持器33根據水平保持器33的旋轉方向向上或向下移動,並且因此聯接到水平保持器33上的聯接凸緣32的高度能夠被精細調節。At this time, when the horizontal holder 33 is screwed into the coupling flange 32, the horizontal holder 33 moves upward or downward according to the rotation direction of the horizontal holder 33, and thus is coupled to the height of the coupling flange 32 on the horizontal holder 33. Can be finely adjusted.
聯接孔36形成在聯接凸緣32中,並且與聯接孔36相對應的移動凹槽26形成在可移動板22中。A coupling hole 36 is formed in the coupling flange 32, and a moving groove 26 corresponding to the coupling hole 36 is formed in the movable plate 22.
因此,當聯接孔36在將聯接凸緣32定位在可移動板22上的過程中位於移動凹槽26的豎直線上時,將水平保持器33平穩地插入到整平凹槽29內。Therefore, when the coupling hole 36 is located on the vertical line of the moving groove 26 in positioning the coupling flange 32 on the movable plate 22, the horizontal holder 33 is smoothly inserted into the flattening groove 29.
當螺釘被固定到聯接孔36和移動凹槽26內時,將聯接凸緣32聯接到可移動板22,從而聯接凸緣32可以在可移動板22移動的過程中平穩地移動。儘管已經公開了一些實施例,但是應當理解的是,這些實施例僅以說明的方式被給出,並且在不脫離本發明的精神和範圍的情況下,可以進行各種修改、變化和改變。本發明的範圍應當僅由所附的申請專利範圍書及其等同物限定。When the screw is fixed into the coupling hole 36 and the moving groove 26, the coupling flange 32 is coupled to the movable plate 22, so that the coupling flange 32 can smoothly move during the movement of the movable plate 22. Although a few embodiments have been disclosed, it is to be understood that the embodiments of the invention may be The scope of the invention should be limited only by the scope of the appended claims and their equivalents.
10‧‧‧底部框架單元10‧‧‧Bottom frame unit
11‧‧‧台柱11‧‧‧台柱
12‧‧‧連接器12‧‧‧Connector
20‧‧‧可移動單元20‧‧‧Mobile unit
30‧‧‧聯接單元30‧‧‧Connection unit
40‧‧‧支撐單元40‧‧‧Support unit
41‧‧‧支撐桿41‧‧‧Support rod
42‧‧‧支撐凸台42‧‧‧Support boss
43‧‧‧滾子43‧‧‧Roller
44‧‧‧制動板44‧‧‧ brake plate
100‧‧‧光學模組100‧‧‧Optical module
200‧‧‧導向模組200‧‧‧guide module
Claims (12)
Applications Claiming Priority (1)
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KR1020110138698A KR101421643B1 (en) | 2011-12-20 | 2011-12-20 | Guiding device for docking |
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TW201334909A TW201334909A (en) | 2013-09-01 |
TWI503198B true TWI503198B (en) | 2015-10-11 |
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TW101146335A TWI503198B (en) | 2011-12-20 | 2012-12-10 | Docking guide apparatus |
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JP (1) | JP5806658B2 (en) |
KR (1) | KR101421643B1 (en) |
CN (1) | CN103177994B (en) |
TW (1) | TWI503198B (en) |
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CN110039291B (en) * | 2019-05-07 | 2020-02-14 | 燕山大学 | High-position automatic butt-joint platform for large-scale maneuvering radar |
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JP2006351426A (en) * | 2005-06-17 | 2006-12-28 | Yamaichi Electronics Co Ltd | Tray type card connector |
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JP2005277049A (en) | 2004-03-24 | 2005-10-06 | Tokyo Electron Ltd | System and method for heat treatment |
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KR100729221B1 (en) | 2006-01-06 | 2007-06-19 | 코닉시스템 주식회사 | Laser annealing chamber having window module which can move in horizontal direction |
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CN103177994A (en) | 2013-06-26 |
CN103177994B (en) | 2016-03-02 |
KR20130071287A (en) | 2013-06-28 |
TW201334909A (en) | 2013-09-01 |
JP5806658B2 (en) | 2015-11-10 |
KR101421643B1 (en) | 2014-07-24 |
JP2013129058A (en) | 2013-07-04 |
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