KR20110023026A - Cassette transfer apparatus for solar cell wafer and wafer texturing apparatus for solar cell using the same - Google Patents

Abstract

PURPOSE: A device for transferring a cassette of a wafer for a solar cell and a device for processing a texture of the wafer for the solar cell using the same are provided to prevent a wafer from being damaged in a transfer process by automatically loading and unloading the cassette which receives the wafer. CONSTITUTION: A loader(100) transfers a cassette(50) with a wafer and supplies the cassette to a texture processing device. The loader includes a texture processing device and a frame(120) which is continuously arranged. A transfer robot(130) which transfers the cassette is installed in the frame. An unloader transfers the cassette to a wafer separating position. A returning unit returns the cassette from the unloader to the loader.

Description

Cassette transfer device for solar cell wafer and texture processing device for wafer for solar cell using same {CASSETTE TRANSFER APPARATUS FOR SOLAR CELL WAFER AND WAFER TEXTURING APPARATUS FOR SOLAR CELL USING THE SAME}

The present invention relates to a cassette conveying apparatus for a wafer for a solar cell and a texture processing apparatus for a wafer for a solar cell using the same, and more particularly, for a solar cell for automatically inserting or recovering a cassette into which a wafer is stored into a wafer texture processing apparatus. The present invention relates to a cassette conveying apparatus for a wafer and a texture processing apparatus for a solar cell wafer using the same.

In general, a solar cell is manufactured using a semiconductor device that converts solar energy into electrical energy. The semiconductor device is fabricated into a wafer, divided into smaller sizes, and installed in a cell of each solar cell.

The wafer is mainly made of silicon and can be classified into single crystal, polycrystalline, and amorphous according to the crystal structure of silicon. The wafer is subjected to a surface treatment process to increase the energy conversion rate by lowering the reflectance to sunlight, an example of such a surface treatment device is a wafer texture processing apparatus to form a texture structure by etching the surface of the wafer Has been developed and used.

The conventional solar cell texture processing apparatus forms a texture structure by dipping a single crystal silicon wafer into a processing tank in which a texturing solution is stored in a batch-dip method.

To this end, when the wafer for a solar cell texture is collected and stored in a cassette, wafers that have undergone other preliminary processes are loaded into the handler, and then moved to a handler. In this process, the wafer and the pretreatment process to remove contaminants on the surface of the wafer are removed. A texture process of dipping in the treatment tank and a post-treatment process of removing the texture solution from the wafer. Then, the wafer whose texture is processed through this process is separated from the unloaded cassette and sent to the subsequent process.

Meanwhile, the cassette used for accommodating the wafer in the texturing process is moved back to the inlet side of the texturing apparatus by the operator, and then the process of reuse is repeated.

However, in the conventional solar cell wafer texture processing apparatus, the process of loading the cassette containing the wafer into the handler, the unloading of the cassette from the handler, and the process of moving the cassette are performed by an operator. As such, in the related art, as the processes of loading / unloading and returning the cassette are all made by hand, the work is not easy and many hands are required. In addition, the wafer or cassette may be damaged in the process of moving the cassette. On the other hand, when the cassette is damaged, the wafer is not normally stored and transferred. As a result, the wafer may fall or be broken during the transfer, causing defects in the wafer during the manufacturing process. In addition, since a process of loading / unloading a cassette is manually performed by an operator, it is difficult to increase the size of the texture processing apparatus and increases the process time when the work is not continuously performed.

The present invention automatically loads a cassette containing a wafer into a texture processing apparatus, and when the texture processing is completed, unloads the cassette to separate the wafer, and then automatically moves the cassette back to the loading position. It is possible to reduce the fatigue and workability of the operator, and to prevent the wafer wafer and the breakage of the cassette generated during the movement of the cassette cassette feeder of the solar cell wafer and texture processing of the solar cell wafer using the same To provide a device.

According to an aspect of the present invention, a feeder for supplying and recovering a cassette containing a solar cell wafer to a texture processing apparatus, moving the cassette to a wafer storage position, and moving the cassette stored in the wafer to a texture processing apparatus. When the texture processing is completed on the wafer in the texture processing apparatus, the unloader moves the cassette to the wafer separation position, moves the cassette from which the wafer is separated to the cassette return position, and the cassette supplied from the unloader to the loader. Provided is a cassette conveyance apparatus for a solar cell wafer including a return section for returning.

The return unit may be installed above the moving line of the cassette. In addition, the return portion may include a conveyor belt.

The return unit may include a linear module that reciprocates between the loader and the unloader, and a loading plate installed on the linear module and on which the cassette is seated.

The loader and unloader is a transfer robot including a frame, a three-axis transfer unit installed inside the frame to move the cassette three axes, and a two-axis rotation unit installed on the three axis transfer unit to rotate in two axes, and two axes. It may include a holder installed in the rotating unit to hold the cassette.

In addition, the solar cell texture processing apparatus according to the present invention for achieving the object is a loader for moving the cassette to the wafer storage position, the loader for loading the cassette containing the wafer, is installed at the rear end of the loader, and stored in the cassette A pretreatment unit for pre-processing the processed wafer, a texture processing unit for forming a texture using a texture solution on the surface of the pre-processed wafer, a post-processing unit for removing the texture solution on the wafer from the texture processing unit, and a pretreatment unit; And a plurality of transfer units which are arranged and arranged in succession in the texture processing unit, the post-processing unit, and transfer the cassettes loaded by the loader, and the post-processing cassettes are moved to the wafer separation position in the post-processing unit, and separation of the wafer is completed. And the unloader to move the cassette to the cassette return position and to the return position from the unloader. It may include times sent returned to the cassette loader.

A storage unit for storing the cassette may be provided at the lower end of the pre-processing unit or the post-processing unit.

The cassettes are arranged opposite to each other on both sides and are provided with a pair of side plate portions having hook grooves formed on the top thereof to hook the handlers of the transfer portion, and a plurality of lower support portions which connect the lower both sides of both side plate portions to support both lower edges of the wafer. And, it is installed by connecting the upper one side of both side plate portion may include an upper support for supporting the upper edge of the wafer.

The return unit may be continuously installed in the preprocessor, the texture processor, and the post processor.

The return unit may be installed at an upper portion of the transfer unit.

The return unit may comprise a conveyor belt.

The return unit may include a linear module that reciprocates between the loader and the unloader, and a loading plate installed on the linear module and on which the cassette is seated.

The loader and unloader is a transfer robot including a frame, a three-axis transfer unit installed inside the frame to move the cassette three axes, and a two-axis rotation unit installed on the three axis transfer unit to rotate in two axes, and two axes. It may include a holder installed in the rotating unit to hold the cassette.

Therefore, since the cassette for accommodating the wafer can be automatically loaded / unloaded, not only the work is easy but also the work loss can be reduced, and wafer breakage and manufacturing defects that may occur during the transfer process can be prevented. In addition, since the used cassette is automatically transported and recovered, it is possible to prevent the cassette from being damaged or lost in this process. In addition, the loading / unloading and moving of the cassette are continuously and continuously performed, thereby improving work speed and productivity. As such, since the cassette movement process is automated, the operation and management of the texture processing process can be facilitated, thereby saving labor costs and lowering production costs, and improving product yield and product reliability. . In addition, the wafer can be stored inclined in the cassette, and thus the processing solution can be easily dropped when the wafer is taken out of the processing tank, thereby minimizing the processing solution remaining on the wafer.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, it should be understood to include all transformations, equivalents, and substitutes included in the spirit and scope of the present invention. In the following description of the present invention, if it is determined that the detailed description of the related known technology may obscure the gist of the present invention, the detailed description thereof will be omitted.

Hereinafter, a cassette transfer apparatus for a wafer for a solar cell and a texture processing apparatus for a wafer for a solar cell using the same will be described in detail with reference to the accompanying drawings, and in the description with reference to the accompanying drawings, the same or corresponding components Denotes the same reference numerals and duplicate description thereof will be omitted.

1 is a perspective view illustrating a loader of a cassette transport apparatus of a wafer for a solar cell according to an embodiment of the present invention, Figure 2 is a side view of a cassette transport apparatus of a wafer for a solar cell according to an embodiment of the present invention, Figure 3 Is an enlarged perspective view of a main part of a cassette transport apparatus of a wafer for a solar cell according to an embodiment of the present invention. 4 is a perspective view illustrating a return unit of a cassette transport apparatus of a wafer for solar cells according to an embodiment of the present invention, and FIG. 5 is a view showing an overall texture processing apparatus for a wafer for solar cells according to an embodiment of the present invention. One side view.

The cassette transport apparatus of the solar cell wafer according to this embodiment is used to supply the cassette 50 containing the solar cell wafer to the texture processing apparatus, as shown in FIGS. 1 to 5. It is an apparatus for collecting and returning the cassette 50 having completed the texture processing.

The cassette feeder includes a loader 100 and an unloader 200 installed at the front and rear ends of the texture processing apparatus, respectively, and connects the cassette 50 to the loader 100 and the unloader 200. It has a return part 300 for a return.

Here, the loader 100 moves the cassette 50 stored in the cassette storage position to the wafer storage position, and supplies the cassette 50 to the texture processing apparatus when the wafer 50 is completely stored in the cassette 50. The wafer may be automatically received by a supply device using a vacuum chuck, and the cassette 50 may be accommodated in a state in which the cassette 50 is vertically rotated to facilitate the storage of the wafer.

In addition, the unloader 200 may be made in the same manner as the loader 100, and operates in reverse to the operation of the loader 100.

The loader 100 has a frame 120 disposed in series with the texture processing apparatus. The frame 120 is provided with a transfer robot 130 for transferring the cassette 50.

The transfer robot 130 is made to be able to move in three axes and rotate in two axes, for this purpose includes a three-axis transfer unit and a two-axis rotation unit.

The three-axis transfer unit is installed in the frame 120 and moves the cassette 50 in three axes. More specifically, the three-axis transfer unit is made to be movable about the X, Y, Z axis, for this purpose has a drive for driving each axis.

The first guide 132 is fixedly installed at the lower portion of the frame 120, and the first plate 133 is movably installed at the first guide 132. The first guide 132 may have a motor installed therein, and the first plate 133 may move in the width direction, that is, the X-axis direction by the operation of the motor.

In addition, a Y-axis driving unit that is movable in the vertical direction, that is, the Y-axis direction may be installed on the first plate 133.

The Y-axis driving unit has a second guide 134 provided on the first plate 133. The second guide 134 is elongated in the longitudinal direction, and a second plate 135 movable in the longitudinal direction may be installed on one side. In addition, a motor may be built in the second guide 134, and the second plate 135 may move in the vertical direction, that is, the Y-axis direction by the operation of the motor.

In addition, the second plate 135 may be provided with a Z-axis driving unit which is movable in the longitudinal direction, that is, the Z-axis direction.

The Z-axis driving unit is installed on the side of the second plate 135 and includes a third guide 136 that is formed to be long in the longitudinal direction with respect to the frame 120. The third guide 136 may have a motor built therein, and the third guide 136 may be provided with a third plate 137 moving in the longitudinal direction of the frame 120, that is, in the Z-axis direction, by the motor. have.

In addition, the third plate 137 may be provided with a two-axis rotation unit.

In the biaxial rotating unit, a first rotary block 138 is installed on the third plate 137, and a transfer arm 139 that is rotated in a horizontal direction is installed on the upper portion of the rotary block 138.

The end of the transfer arm 139 is provided with a second rotary block 140 to rotate in the vertical direction, the second rotary block 140 is provided with a holder 141 for holding or placing the cassette 50.

The holder 141 is installed to be able to stretch in the width direction of the cassette 50, and the holder 141 is made to hold or place both sides of the cassette 50 as the holder 141 is stretched.

In this embodiment, the motor for rotating the respective plates 133, 135, 137 may be built in the guides 132, 134, 136, etc., and may be installed outside the third guide 136 as shown in FIG. 3. It is also possible to be installed to transmit the driving force by the installed motor 136a.

The loader 100 configured as described above supplies the cassette 50 containing the wafer by the transfer robot 130 to the texture processing apparatus 400, and when the texture processing is completed, the transfer robot 130 from the unloader 200. Move the cassette 50 to the wafer separation position.

On the other hand, when the wafer is separated from the unloader 200, the transfer robot 130 of the unloader 200 again moves the cassette 50 to the return unit 300. Then, the return unit 300 returns the cassette 50 to the loader 100 to be reused.

Here, the return unit 300 is for returning the cassette 50, which may be installed inside or outside the texture processing apparatus 400, and may have a structure capable of continuously circulating the cassette. For example, in this embodiment, the return unit 300 may be installed in the texture processing apparatus 400, and may be installed to be arranged in a plurality of layers and a moving line of the cassette 50 in which the wafer is accommodated.

In this embodiment, the return unit 300 may be installed above the moving line of the cassette 50.

Referring to FIG. 4, the return unit 300 may include a linear module 310. In addition, the linear module 310 may be provided with a loading plate 320 on which the cassette 50 supplied from the conveying unit 300 is seated.

The loading plate 320 reciprocates between the loader 100 and the unloader 200 according to the operation of the linear module 310 to transfer the cassette 50.

The linear module 310 has a linear block 312 to which the loading plate 320 is coupled. The linear block 312 can be reciprocated by a linear guide 314 provided between the loader 100 and the unloader 200. The linear guide 314 may be provided with a motor for moving the linear block 312.

In this embodiment, the return unit 300 is configured to move the cassette 50 by the linear module 310, but is not limited thereto, and may replace the linear module 310 to install a conveyor belt. Thereby, the cassette can be conveyed continuously.

To this end, the return unit 300 may include a conveyor belt and a motor for driving the conveyor belt. The return unit 300 continuously moves the cassette 50 so that the cassette 50 supplied to the conveyor belt moves to the cassette supply position of the loader 100.

The cassette transport apparatus of the wafer for solar cells configured as described above may be connected to the texture processing apparatus 400 to move the cassette 50 containing the wafer, and may be connected to another apparatus using the cassette 50.

Referring to FIG. 5, a wafer texture processing apparatus 400 for a solar cell is installed in connection with a cassette transfer apparatus of a wafer for a solar cell. In the solar cell wafer texture processing apparatus 400, the cassette 50 containing the wafer is automatically supplied by the loader 100 of the cassette transfer apparatus, and the process of recovering by the unloader 200 after texture processing is completed is performed. It is done continuously.

In the texture processing apparatus 400, the loader 100 of the cassette transfer apparatus is installed at the front end portion, and the cassette 50 containing the wafer is transferred to the preprocessor 410 by the loader 100.

The pretreatment unit 410 removes contamination such as foreign matters before the wafer is textured. For example, the pretreatment unit 410 may remove contaminants by physical or chemical processing. In the present embodiment, the pretreatment unit 410 may undergo a polishing process, and may include a mirror treatment processor for this purpose. In addition, the pretreatment unit 410 may remove contaminants by processing a wafer damage removal (SDR).

The texture processor 420 is installed at the rear end of the preprocessor 410. The texture processing unit 420 has a plurality of processing tanks 422 in which a texture processing solution is stored. The treatment tank 422 is formed in a batch-dip manner, and the cassette 50 containing the wafer is sequentially immersed in the treatment tank 422, and texture processing is performed.

The texture processing unit 420 may further include a rinse unit 424 for neutralizing the texture solution on the wafer at the rear side of the processing tank 422 in which the texture solution is stored.

In addition, a post processor 430 is installed at the rear end of the texture processor 420 to remove the texture solution from the wafer on which the texturing is completed.

The post-processing unit 430 may include a cleaning unit 432 that performs a washing action, and a drying unit 436 that dries the washed wafer.

The cleaning unit 432 sprays the washing water onto the wafer, and washes the texture solution deposited on the wafer by the washing water. This wash water uses deionized water, and can be used by heating deionized water to increase the washing efficiency.

The drying unit 436 is configured to supply the heated air to the inside, and may dry and remove the water on the wafer by the air.

The drying unit 436 may further include an air chamber 438 to increase drying efficiency. The air chamber 438 may be formed with an open door to allow the cassette 50 containing the wafer to enter or exit. The door may also be equipped with a shutter to shield the opening. This shutter can open or close the opening by sliding or rotation.

In addition, the drying unit 436 may be further provided with a double shutter slidingly opening and closing the inlet portion. The double shutter installed at the inlet of the drying unit 436 prevents the heated air from flowing into the water washing unit or the texture processing unit 420, thereby stably maintaining the temperature condition of each process.

The texture processing apparatus 400 has a transfer unit 450 for continuously transferring the cassette 50 supplied from the loader 100.

6 is a cross-sectional view of a texture processing apparatus 400 for a solar cell wafer according to an embodiment of the present invention, Figure 7 is a transfer unit of the texture processing apparatus 400 for a solar cell wafer according to an embodiment of the present invention. One perspective view.

Referring to FIGS. 6 and 7, the transfer unit 450 may include a preprocessor 410, a texture processor 420, and a post processor 430 continuously on the moving line of the cassette 50. 410, the texture processor 420, and the post processor 430 may be provided with respective transfer units.

For example, in the present embodiment, the transfer unit 450 may be formed in plural, and may be provided in the form of modules in the preprocessor 410, the texture processor 420, and the post processor 430, respectively. Therefore, when the preprocessor 410, the texture processor 420, and the post processor 430 are connected in this embodiment, the respective transfer units 450 installed thereon are connected to form an overall movement path.

The transfer unit 450 is provided with a rail 452 along the moving line, the transfer unit 454 moving along the rail 452 is installed.

The transfer unit 454 is made to circulate repeatedly by a predetermined distance along the rail 452, and the handler 456 is installed on one side so as to be elevated.

The handler 456 is formed with a ring 458 for engaging the cassette 50 at the end.

The transfer unit 454 may move a predetermined distance while the cassette 50 is coupled to the handler 456, and the handler 456 may be lifted and lowered so that the cassette 50 may be immersed in the treatment tank containing the treatment solution.

The handler 454 may move the plurality of cassettes 50, for example, by moving the two cassettes 50 to both sides.

On the other hand, the configuration of the transfer unit 450 is not limited by this embodiment, it is also possible to transfer the cassette by the conveyor belt.

For example, a conveyor belt may be installed in the drying unit 436, and thus, the cassette 50 containing the wafer may be continuously moved to a predetermined height.

8 is a cross-sectional view of a state in which a wafer is accommodated in a cassette of a texture processing apparatus 400 for a solar cell wafer according to an embodiment of the present invention.

Referring to FIG. 8, in the cassette 50, both side plate portions 52 and 54 are disposed to face each other with a predetermined distance apart. In addition, the hook grooves 58 are formed at both side plates 52 and 54 of the cassette 50 at positions corresponding to the hooks 458 to be coupled to the handler 454.

For example, in the present embodiment, the hook groove 58 may be formed in a hook shape. In addition, the hook groove 58 and the ring 458 may be formed in plurality. In one example, the hook groove 58 and the ring 458 may be made of two, respectively, thereby allowing a stable coupling.

In addition, the cassette 50 may be provided with two lower support portions 56a and 56b on both lower sides of both side plate portions 52 and 54. The two lower supports 56a and 56b support both lower edges of the wafer 60. Accordingly, the wafer 60 accommodated in the cassette 50 maintains the inclined state.

In addition, one upper support part 56c may be installed at one upper side of both side plate parts 52 and 54. The upper support portion 56c supports the upper edge of the wafer 60 and can prevent the wafer 60 from falling during the movement process.

As such, the lower support parts 56a and 56b and the upper support part 56c installed in the cassette 50 respectively support three different corners of the wafer 60, and thus the wafer 60 may be inclined and accommodated therein. .

As described above, the cassette 50 can stably accommodate the wafer 60, and the cassette 50 containing the wafer 60 is immersed in the treatment tank 422, so that the treatment solution is buried, and then moved upward. Once removed, the treatment solution on the wafer 60 flows down the edge of the inclined wafer 60. In this case, the lower support portions 56a and 56b of the cassette and the wafer 60 may be in point or line contact, thereby minimizing an area in contact with the wafer.

As such, when the wafer 60 is inclinedly received, the processing solution may easily flow down, thereby minimizing the processing solution remaining on the wafer 60.

On the other hand, the wafer that has been cleaned and dried in the post-processing unit 430 is supplied to the unloader 200 as the cassette 50 moves by the transfer unit 450.

The unloader 200 may be configured in the same manner as the loader 100, and after separating the wafer from the cassette 50, the cassette 50 is returned to the loader 100 so that the cassette 50 is returned to the loader 100. 300).

To this end, the unloader 200 is installed at the rear end of the post processor 430. When the cassette 50 is discharged from the drying unit 436 of the post-processing unit 430, the holder of the unload 200 holds the cassette 50. Then, the two-axis rotation unit and the three-axis transfer unit are driven to position the cassette 50 to the wafer separation position. Here, the wafer can be separated by an operator or a separator having a vacuum chuck.

Then, the cassette 50 in which the wafer is separated is moved to the cassette return position by the unloader 200, and then, the cassette 50 is returned to the cassette supply position by the return unit 300 and then supplied again to the loader 100. Done.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the appended claims. It will be understood that the invention may be varied and varied without departing from the scope of the invention.

1 is a perspective view showing a loader of a cassette transport apparatus of a wafer for a solar cell according to an embodiment of the present invention.

Figure 2 is a side view of the cassette transport apparatus of the wafer for solar cells according to an embodiment of the present invention.

Figure 3 is an enlarged perspective view of the main portion of the cassette transport apparatus of the wafer for solar cells according to an embodiment of the present invention.

Figure 4 is a perspective view showing a return portion of the cassette transport apparatus of the wafer for solar cells according to an embodiment of the present invention.

Figure 5 is a side view showing an overall texture processing apparatus of a wafer for a solar cell according to an embodiment of the present invention.

6 is a cross-sectional view of a texture processing apparatus of a wafer for a solar cell according to an embodiment of the present invention.

7 is a perspective view showing a transfer unit of the texture processing apparatus of the wafer for a solar cell according to an embodiment of the present invention.

8 is a cross-sectional view of the wafer accommodated in the cassette of the texture processing apparatus of the wafer for solar cells according to an embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

50: cassette 58: hanger groove

100: loader 120: frame

130: transfer robot 132: first guide

133: the first plate 134: the second guide

135: second plate 136: third guide

137: third plate 138: first rotating block

139: transfer arm 140: second rotating block

141: holder 200: unloader

300: return unit 310: linear module

312 linear block 314 linear guide

320: loading plate 400: texture processing apparatus

410: preprocessing unit 420: texture processing unit

422: treatment tank 424: rinse section

430: post-processing unit 432: cleaning unit

436: drying unit 438: air chamber

450: transfer unit 452: rail

454 transfer unit 456 handler

458 rings

Claims (13)

A transfer device for supplying and recovering a cassette containing a wafer for solar cells to a texture processing device, A loader for moving the cassette to a wafer storage position and for moving the cassette housed in a wafer to the texture processing apparatus; When the texture processing is completed on the wafer in the texture processing apparatus, the unloader for moving the cassette to the wafer separation position, the unloader for moving the cassette separated from the wafer to the cassette transfer position, And a return unit for returning the cassette supplied from the unloader to the loader. The method according to claim 1, The transfer unit is a cassette transfer device of the wafer for solar cells, characterized in that installed on the moving line of the cassette. The method according to claim 2, The conveying unit cassette conveying apparatus of the wafer for solar cells, characterized in that it comprises a conveyor belt. The method according to claim 2, And the return unit includes a linear module reciprocating between the loader and the unloader, and a loading plate installed on the linear module and on which the cassette is seated. The method according to any one of claims 1 to 4, The loader and the unloader are a transfer robot including a frame, a three-axis transfer unit installed inside the frame to move the cassette three axes, and a two-axis rotation unit installed on the three axis transfer unit to rotate in two axes. And a holder installed on the biaxial rotation unit to hold the cassette. A loader for moving the cassette to a wafer storage position and for loading the cassette containing the wafer; A pretreatment unit installed at a rear end of the loader and preprocessing a wafer stored in the cassette; A texture processing unit for forming a texture by using a texture solution on the surface of the wafer where the pretreatment is completed in the pretreatment unit; A post-processing unit for removing a texture solution from the texture processing unit on the wafer, A plurality of transfer units arranged in series in the pre-processing unit, the texture processing unit, and the post-processing unit, and transferring the cassette loaded by the loader; An unloader for moving the cassette after the post-processing to the wafer separation position in the post-processing unit, and moving the cassette to the cassette transport position when separation of the wafer is completed; And a return unit for returning the cassette supplied from the unloader to the return position to the loader. The method according to claim 6, A solar cell wafer texture processing apparatus, characterized in that the storage unit for storing the cassette is provided at the lower end of the pre-processing unit or the post-processing unit. The method according to claim 6, The cassette is disposed opposite to each other on both sides and is provided by connecting a pair of side plate portions having hook grooves formed on the upper end to catch the handlers of the transfer unit, and connecting both lower sides of the side plate portions to support both lower edges of the wafer. And a plurality of lower support parts and an upper support part installed to connect upper ends of both side plate parts to support upper edges of the wafer. The method according to claim 6, And the return unit is continuously installed in the preprocessing unit, the texture processing unit, and the post-processing unit. The method according to claim 6, The return unit is a texture processing apparatus for a solar cell wafer, characterized in that installed on top of the transfer unit. The method according to claim 10, The return unit is a texture processing apparatus of a wafer for solar cells, characterized in that it comprises a conveyor belt. The method according to claim 10, And the return unit includes a linear module reciprocating between the loader and the unloader, and a loading plate installed on the linear module and on which the cassette is seated. The method according to any one of claims 6 to 12, The loader and the unloader are a transfer robot including a frame, a three-axis transfer unit installed inside the frame to move the cassette three axes, and a two-axis rotation unit installed on the three axis transfer unit to rotate in two axes. And a holder installed on the biaxial rotation unit to hold the cassette.

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