TWI502713B - 具有蜿蜒形狀的導線和蜿蜒形狀的強磁核心之半導體電感器以及形成該電感器之方法 - Google Patents
具有蜿蜒形狀的導線和蜿蜒形狀的強磁核心之半導體電感器以及形成該電感器之方法 Download PDFInfo
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- TWI502713B TWI502713B TW100135198A TW100135198A TWI502713B TW I502713 B TWI502713 B TW I502713B TW 100135198 A TW100135198 A TW 100135198A TW 100135198 A TW100135198 A TW 100135198A TW I502713 B TWI502713 B TW I502713B
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/20—Inductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/497—Inductive arrangements or effects of, or between, wiring layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W44/00—Electrical arrangements for controlling or matching impedance
- H10W44/501—Inductive arrangements
Landscapes
- Coils Or Transformers For Communication (AREA)
- Semiconductor Integrated Circuits (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/943,391 US8338913B2 (en) | 2010-11-10 | 2010-11-10 | Semiconductor inductor with a serpentine shaped conductive wire interlaced with a serpentine shaped ferromagnetic core |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201230280A TW201230280A (en) | 2012-07-16 |
| TWI502713B true TWI502713B (zh) | 2015-10-01 |
Family
ID=46018808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100135198A TWI502713B (zh) | 2010-11-10 | 2011-09-29 | 具有蜿蜒形狀的導線和蜿蜒形狀的強磁核心之半導體電感器以及形成該電感器之方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8338913B2 (https=) |
| JP (1) | JP2013542619A (https=) |
| CN (1) | CN103222054A (https=) |
| TW (1) | TWI502713B (https=) |
| WO (1) | WO2012064398A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9601833B2 (en) | 2013-03-25 | 2017-03-21 | Wavcatcher | Broadband notch antennas |
| WO2016159986A1 (en) | 2015-03-31 | 2016-10-06 | Halliburton Energy Services Inc. | Plug tracking through surface mounted equipment |
| GB2557706A (en) | 2015-05-15 | 2018-06-27 | Halliburton Energy Services Inc | Geometrically configurable multi-core inductor and methods for tools having particular space constraints |
| US11348875B2 (en) * | 2020-02-27 | 2022-05-31 | Micron Technology, Inc. | Semiconductor devices with flexible connector array |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61196505A (ja) * | 1985-02-26 | 1986-08-30 | Nec Corp | インダクタンス構造体 |
| JPH03125412A (ja) * | 1989-10-11 | 1991-05-28 | Amorufuasu Denshi Device Kenkyusho:Kk | インダクタンス素子 |
| EP0725407A1 (en) * | 1995-02-03 | 1996-08-07 | International Business Machines Corporation | Three-dimensional integrated circuit inductor |
| JPH0992538A (ja) * | 1995-09-21 | 1997-04-04 | Canon Inc | プリントインダクタおよびプリント基板 |
| JPH10233315A (ja) * | 1997-02-19 | 1998-09-02 | Citizen Electron Co Ltd | 表面実装型コイルおよびその製造方法 |
| US6452247B1 (en) | 1999-11-23 | 2002-09-17 | Intel Corporation | Inductor for integrated circuit |
| US6493861B1 (en) | 1999-12-28 | 2002-12-10 | Intel Corporation | Interconnected series of plated through hole vias and method of fabrication therefor |
| US6990725B2 (en) * | 2001-10-05 | 2006-01-31 | Fontanella Mark D | Fabrication approaches for the formation of planar inductors and transformers |
| US7705421B1 (en) | 2005-11-18 | 2010-04-27 | National Semiconductor Corporation | Semiconductor die with an integrated inductor |
| KR100725714B1 (ko) | 2006-08-29 | 2007-06-07 | 동부일렉트로닉스 주식회사 | 인덕터 및 인덕터 제조방법 |
| US20100259349A1 (en) | 2009-04-09 | 2010-10-14 | Qualcomm Incorporated | Magnetic Film Enhanced Inductor |
-
2010
- 2010-11-10 US US12/943,391 patent/US8338913B2/en active Active
-
2011
- 2011-08-31 CN CN2011800541007A patent/CN103222054A/zh active Pending
- 2011-08-31 JP JP2013538718A patent/JP2013542619A/ja active Pending
- 2011-08-31 WO PCT/US2011/049903 patent/WO2012064398A1/en not_active Ceased
- 2011-09-29 TW TW100135198A patent/TWI502713B/zh active
Non-Patent Citations (3)
| Title |
|---|
| C H Ahn. et. al "A new toroidal meander type integrated inductor with a multilevel meander magnetic core" January 1994, IEEE Transactions on Magnetic ,Vol.30, No.1, Page 73-79 * |
| C H Ahn. et. al "Micromachined planar inductors on silicon wafer for MEMS applications" December 1998, IEEE Transactions on industrial electronics ,Vol.45, No.6, Page 866-876 * |
| K Shirakawa et. al "Thin film cloth structured inductor for magnetic integrated circuit" September 1990, IEEE Transactions on Magnetic ,Vol.26, No.5, Page 2262-2264 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US20120112296A1 (en) | 2012-05-10 |
| JP2013542619A (ja) | 2013-11-21 |
| CN103222054A (zh) | 2013-07-24 |
| US8338913B2 (en) | 2012-12-25 |
| WO2012064398A1 (en) | 2012-05-18 |
| TW201230280A (en) | 2012-07-16 |
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