TWI502609B - Photovoltaic cell element, and photovoltaic cell - Google Patents

Description

Solar cell components and solar cells

The present invention relates to a gel composition for an electrode, a solar cell element, and a solar cell.

Usually, an electrode is formed on the light receiving surface and the back surface of the lanthanide solar cell. In order to efficiently conduct electric energy converted into a solar cell by the incident of light, the volume resistivity of the above electrode is required to be sufficiently low, and a good ohmic contact with the Si substrate is required. In particular, in order to minimize the loss of incident amount of sunlight, the electrode on the light-receiving surface tends to have a reduced wiring width and an increased aspect ratio of the electrode.

The electrode for the light receiving surface of the solar cell is usually formed in the following manner. In other words, the conductive composition is applied by screen printing or the like on the n-type germanium layer formed by forming a texture (concavity and convexity) on the light-receiving surface side of the p-type germanium substrate and then thermally diffusing phosphorus or the like at a high temperature. The material is then calcined at 800 ° C to 900 ° C in the atmosphere to form a light-receiving surface electrode. The conductive composition forming the light-receiving surface electrode contains conductive metal powder, glass particles, various additives, and the like.

As the conductive metal powder, silver powder is usually used. The reason for this is as follows: the volume resistivity of the silver particles is 1.6×10 ^-6 Ω. Cm is lower; the silver particles self-reduced and sintered under the above calcination conditions; can form a good ohmic contact with the ruthenium substrate; and the solder material is excellent in wettability to the electrode containing silver particles, and is sealed by using a glass substrate or the like. In the so-called modularization of the solar cell element, a bonding wire for electrically connecting the solar cell elements can be preferably adhered.

As described above, the conductive composition containing silver particles exhibits excellent characteristics as an electrode of a solar cell. On the other hand, since silver is a noble metal and the price of the raw material metal itself is high, it is desirable to propose a rubber material instead of the conductive composition containing silver. Further, in terms of resources, it is also desired to provide a conductive alternative to containing silver. The gel material of the sexual composition. As a material which is expected to replace silver, copper which is applied to a semiconductor wiring material can be cited. Copper is not only rich in resources, but also the cost of raw metal is also about 1% of silver and cheap. However, copper is a material which is easily oxidized at a high temperature of 200 ° C or higher in the atmosphere, and it is difficult to form an electrode by the above steps.

In order to solve the problems of the above-mentioned problems, the following copper particles are reported in the copper, and the copper is imparted with oxidation resistance by various methods, even if it is used in the case of the above-mentioned problems, for example, in the case of the above-mentioned Japanese Patent Publication No. 2005-217755, and the like. High temperature calcination does not oxidize.

However, even if the copper particles have oxidation resistance up to 300 ° C and are substantially oxidized at a high temperature of 800 ° C to 900 ° C, the electrode for solar cells has not yet reached practical use. Further, there is a problem that an additive or the like applied to impart oxidation resistance inhibits sintering of copper particles during firing, and as a result, an electrode having a low resistance such as silver cannot be obtained.

Further, as another method for suppressing oxidation of copper, a special step of firing a conductive composition using copper for a conductive metal powder in an atmosphere such as nitrogen gas is exemplified.

However, when the above method is used, in order to completely suppress the oxidation of the copper particles, an environment completely sealed by the above-mentioned ambient gas is required, in the step Cost is not suitable for mass production of solar cell components.

Another problem to apply copper to a solar cell electrode is ohmic contact with a tantalum substrate. That is, even if the electrode containing copper can be formed without oxidation during high-temperature firing, since copper is in direct contact with the ruthenium substrate, interdiffusion of copper and ruthenium may occur, and copper is formed at the interface between the electrode and the ruthenium substrate. Reaction phase with ruthenium (Cu ₃ Si).

The formation of the Cu ₃ Si may be repeated from the interface of the ruthenium substrate to several μm, and cracks may occur on the Si substrate side. In addition, there is a case where the semiconductor performance (pn junction characteristics) of the solar cell is deteriorated through the n-type germanium layer previously formed on the germanium substrate. Further, there is a possibility that the formed Cu ₃ Si raises the electrode or the like containing copper, and the adhesion between the electrode and the ruthenium substrate is inhibited, resulting in a decrease in mechanical strength of the electrode.

The present invention has been made in view of the above-described problems, and an object of the invention is to provide a battery composition for an electrode, and a solar cell element and a solar cell having an electrode formed using the electrode composition, wherein the electrode composition is The composition is such that oxidation of copper during firing is suppressed, an electrode having a low specific resistance can be formed, and formation of a reaction phase between copper and a tantalum substrate can be suppressed, and a copper-containing electrode having good ohmic contact can be formed.

The inventors of the present invention have diligently studied in order to solve the above problems, and as a result, have completed the present invention. That is, the present invention includes the following aspects.

A first aspect of the present invention is a paste composition for an electrode comprising: copper alloy particles containing phosphorus, particles containing tin, glass particles, a solvent, and a resin.

The electrode composition for an electrode preferably has a phosphorus content of the phosphorus-containing copper alloy particles of 6 mass% or more and 8 mass% or less.

In addition, the tin-containing particles are preferably at least one selected from the group consisting of tin particles and tin alloy particles having a tin content of 1% by mass or more.

Further, the glass particles preferably have a glass softening point of 650 ° C or less and a crystallization onset temperature of more than 650 ° C.

The content of the tin-containing particles when the total content of the phosphorus-containing copper alloy particles and the tin-containing particles is 100% by mass is preferably 5% by mass or more and 70% by mass. %the following.

The electrode composition for an electrode preferably further contains silver particles, and more preferably contains the silver particles when the total content of the phosphorus-containing copper alloy particles, the tin-containing particles, and the silver particles is 100% by mass. The rate is 0.1% by mass or more and 10% by mass or less.

The electrode composition for an electrode preferably has a total content of the phosphorus-containing copper alloy particles, the tin-containing particles, and the silver particles of 70% by mass or more and 94% by mass or less, and the content of the glass particles is 0.1% by mass. The total content of the solvent and the resin is 3% by mass or more and 29.9% by mass or less.

According to a second aspect of the invention, there is provided a solar cell element comprising an electrode formed by baking the electrode composition applied to the electrode substrate on the crucible substrate.

Preferably, the electrode comprises a Cu-Sn alloy phase and a Sn-P-O glass phase, and more preferably, the Sn-P-O glass phase is disposed between the Cu-Sn alloy phase and the ruthenium substrate.

A third aspect of the present invention provides a solar battery comprising: the solar cell element; and a bonding wire disposed on an electrode of the solar cell element.

According to the present invention, it is possible to provide a solar cell component and a solar cell having an electrode formed using the electrode composition, and the electrode composition for electrode is a composition: copper at the time of firing The oxidation is suppressed, and an electrode having a low specific resistance can be formed, whereby formation of a reactant phase of copper and a tantalum substrate can be suppressed, and a copper-containing electrode having a good ohmic contact can be formed.

In the present specification, the term "step" means not only an independent step, but even if it cannot be clearly distinguished from other steps, it is included in the term as long as the intended effect of the step is achieved. In addition, in the present specification, the numerical range indicated by "~" indicates a range in which the numerical values described before and after including "~" are the minimum value and the maximum value. Further, in the present specification, when the amount of each component in the composition is referred to, when a plurality of substances corresponding to the respective components are present in the composition, unless otherwise specified, the presence of the composition is indicated. The total amount of the plurality of substances.

<electrode composition for electrodes>

The electrode composition for an electrode of the present invention comprises at least one type of copper alloy particles containing phosphorus, at least one type of tin-containing particles, at least one type of glass particles, at least one type of solvent, and at least one type of resin. With this composition, in the atmosphere Oxidation of copper during calcination is suppressed, and an electrode having a low specific resistance can be formed. Further, the formation of the reactant phase of the copper and the tantalum substrate is suppressed, and the formed electrode and the tantalum substrate can form a good ohmic contact.

(copper alloy particles containing phosphorus)

The electrode paste composition contains at least one type of copper alloy particles containing phosphorus. As a copper alloy containing phosphorus, a solder material called a phosphor bronze solder (phosphorus concentration: about 7 mass% or less) is known. Phosphorus copper solder can also be used as a bonding agent of copper and copper. By using phosphorus-containing copper alloy particles in the electrode composition for electrodes of the present invention, phosphorus can be used for the reduction of copper oxide to form oxidation resistance. An electrode with excellent properties and low volume resistivity. Further, it is possible to obtain low-temperature calcination of the electrode, and it is possible to reduce the cost of the process.

The content of phosphorus contained in the phosphorus-containing copper alloy of the present invention is preferably 6 mass% or more and 8 mass% or less, from the viewpoint of oxidation resistance and low electrical resistivity. It is 6.3 mass% or more and 7.8% by mass or less, and more preferably 6.5% by mass or more and 7.5% by mass or less. When the content of phosphorus contained in the phosphorus-containing copper alloy is 8% by mass or less, a lower electrical resistivity can be achieved, and the phosphorus-containing copper alloy particles are excellent in productivity. In addition, by setting the phosphorus content to 6% by mass or more, more excellent oxidation resistance can be achieved.

The phosphorus-containing copper alloy particles are an alloy containing copper and phosphorus, but may further contain other atoms. Examples of the other atom include Ag, Mn, Sb, Si, K, Na, Li, Ba, Sr, Ca, Mg, Be, Zn, Pb, Cd, Tl, V, Sn, Al, Zr, and W. Mo, Ti, Co, Ni, and Au, and the like.

In addition, the content of the other atom contained in the phosphorus-containing copper alloy particles can be, for example, 3% by mass or less based on the phosphorus-containing copper alloy particles, from the viewpoint of oxidation resistance and low electrical resistivity. It is preferably 1% by mass or less.

Further, in the present invention, the phosphorus-containing copper alloy particles may be used singly or in combination of two or more kinds.

The particle diameter of the phosphorus-containing copper alloy particles is not particularly limited, and the particle diameter when the cumulative weight is 50% (hereinafter sometimes abbreviated as "D50%") is preferably 0.4 μm to 10 μm, more preferably 1μm~7μm. By setting the particle diameter to 0.4 μm or more, the oxidation resistance is more effectively improved. In addition, when the particle diameter is 10 μm or less, the contact area of the phosphorus-containing copper alloy particles in the electrode or the tin-containing particles to be described later increases, and the specific resistance decreases more effectively. Further, the particle diameter of the phosphorus-containing copper alloy particles was measured by a Microtrac particle size distribution measuring apparatus (manufactured by Nikkiso Co., Ltd., model MT3300).

Further, the shape of the phosphorus-containing copper alloy particles is not particularly limited, and may be any of a substantially spherical shape, a flat shape, a block shape, a plate shape, and a scaly shape, and is resistant to oxidation and low electrical resistivity. In other words, it is preferably substantially spherical, flat, or plate-shaped.

The content ratio of the phosphorus-containing copper alloy particles in the electrode composition is not particularly limited. From the viewpoint of the low resistivity, it is preferably 20% by mass or more and 85% by mass or less, more preferably 25% by mass or more, 80% by mass or less, and still more preferably 30% by mass. The above is 75 mass% or less.

The copper alloy containing phosphorus can be produced by a method generally used. Further, the phosphorus-containing copper alloy particles can be prepared by using a phosphorus-containing copper alloy prepared to have a desired phosphorus content, and can be produced by a usual method for preparing a metal powder, for example, by a water atomization method. It is manufactured by the usual method. In addition, the details of the water atomization method can be referred to the description of the Metal Handbook (Maruzen (Stock) Publishing Division).

Specifically, the phosphorus-containing copper alloy is dissolved, powdered by nozzle spraying, and the obtained powder is dried and classified, whereby a desired phosphorus-containing copper alloy particle can be produced. Further, phosphorus-containing copper alloy particles having a desired particle diameter can be produced by appropriately selecting classification conditions.

(particles containing tin)

The electrode composition for an electrode of the present invention contains at least one type of tin-containing particles. Since the particles containing tin are contained in addition to the copper alloy particles containing phosphorus, an electrode having a low specific resistance can be formed in the calcination step to be described later.

This case can be considered as follows, for example. The phosphorus-containing copper alloy particles and the tin-containing particles react with each other in the calcination step to form an electrode including a Cu-Sn alloy phase and a Sn-P-O glass phase. Here, it is considered that the Cu-Sn alloy phase forms a dense block in the electrode, and the block functions as a conductive layer, whereby an electrode having a low specific resistance can be formed.

Further, the dense block described herein means that the bulk Cu-Sn alloy phases are in close contact with each other to form a three-dimensionally continuous structure.

Further, when the electrode composition for an electrode of the present invention is used to form an electrode on a substrate including ruthenium (hereinafter, simply referred to as a "ruthenium substrate"), a pair can be formed. The electrode having high adhesion to the substrate can achieve good ohmic contact between the electrode and the germanium substrate.

This case can be considered as follows, for example. The phosphorus-containing copper alloy particles and the tin-containing particles react with each other in the calcination step to form an electrode including a Cu-Sn alloy phase and a Sn-PO glass phase. Since the Cu-Sn alloy phase is a dense block, the Sn-PO glass phase is formed between the Cu-Sn alloy phase and the tantalum substrate. Thereby, it is considered that the adhesion of the Cu-Sn alloy to the ruthenium substrate is improved. Further, it is considered that the Sn-PO glass phase functions as a barrier layer for preventing interdiffusion of copper and tantalum, and good ohmic contact between the electrode formed by firing and the tantalum substrate can be achieved. In other words, it is considered that formation of a reaction phase (Cu ₃ Si) formed when the electrode containing copper is directly contacted with ruthenium and heated, and the semiconductor performance (for example, pn junction characteristics) is not deteriorated and the ruthenium substrate is maintained. Adhesive and exhibits good ohmic contact.

When the electrode composition is formed on the substrate containing ruthenium using the electrode composition for an electrode of the present invention, such an effect is usually exhibited, and the type of the substrate including ruthenium is not particularly limited. Examples of the substrate including ruthenium include a ruthenium substrate for forming a solar cell, a ruthenium substrate used for the production of a semiconductor element other than a solar cell, and the like.

In the present invention, by combining the copper alloy particles containing phosphorus and the particles containing tin in the electrode composition for an electrode, first, the reduction of the copper oxide by the phosphorus atom in the copper alloy particles containing phosphorus is utilized. An electrode having excellent oxidation resistance and a low volume resistivity is formed. Secondly, the volume resistivity is kept low by the reaction of the phosphorus-containing copper alloy particles with the tin-containing particles. A conductive layer containing a Cu-Sn alloy phase and a Sn-P-O glass phase were formed in a state of being formed. Further, it is considered that, for example, the Sn-PO glass phase functions as a barrier layer for preventing mutual diffusion of copper and yttrium, and the following two characteristic functions can be simultaneously realized in the calcination step: formation between the suppression electrode and the ruthenium substrate The reactant phase forms a good ohmic contact with the copper electrode.

The tin-containing particles are not particularly limited as long as they are tin-containing particles. In particular, it is preferably at least one selected from the group consisting of tin particles and tin alloy particles, and more preferably at least one selected from the group consisting of tin particles and tin alloy particles having a tin content of 1% by mass or more.

The purity of tin in the tin particles is not particularly limited. For example, the purity of the tin particles can be 95% by mass or more, preferably 97% by mass or more, and more preferably 99% by mass or more.

Further, the tin alloy particles are not particularly limited as long as they are alloy particles containing tin. In view of the melting point of the tin alloy particles and the reactivity with the copper alloy particles containing phosphorus, tin alloy particles having a tin content of 1% by mass or more are preferable, and tin content is more preferable. The tin alloy particles of 3% by mass or more, more preferably tin alloy particles having a tin content of 5% by mass or more, particularly preferably tin alloy particles having a tin content of 10% by mass or more.

Examples of the tin alloy particles include a Sn-Ag alloy, a Sn-Cu alloy, a Sn-Ag-Cu alloy, a Sn-Ag-Sb alloy, a Sn-Ag-Sb-Zn alloy, and a Sn-Ag. -Cu-Zn alloy, Sn-Ag-Cu-Sb alloy, Sn-Ag-Bi alloy, Sn-Bi alloy, Sn-Ag-Cu-Bi alloy, Sn-Ag-In-Bi alloy , Sn-Sb alloy, Sn-Bi-Cu alloy, Sn-Bi-Cu-Zn alloy, Sn-Bi-Zn alloy, Sn-Bi-Sb-Zn alloy, Sn-Zn alloy, Sn-In alloy, Sn-Zn-In alloy, Sn- Pb alloys, etc.

Among the above tin alloy particles, in particular, Sn-3.5Ag, Sn-0.7Cu, Sn-3.2Ag-0.5Cu, Sn-4Ag-0.5Cu, Sn-2.5Ag-0.8Cu-0.5Sb, and Sn-2Ag-7.5Bi Tin alloy particles such as Sn-3Ag-5Bi, Sn-58Bi, Sn-3.5Ag-3In-0.5Bi, Sn-3Bi-8Zn, Sn-9Zn, Sn-52In, and Sn-40Pb have a melting point with Sn ( 232 ° C) the same or lower melting point. Therefore, the tin alloy particles can be preferably used in the following manner: melting at the initial stage of calcination, thereby covering the surface of the phosphorus-containing copper alloy particles and uniformly reacting with the phosphorus-containing copper alloy particles. . In addition, when the expression of the tin alloy particles is, for example, Sn-AX-BY-CZ, it means that the tin alloy particles contain an element X of A mass%, an element Y of B mass%, and an element Z of C mass%.

In the present invention, the tin-containing particles may be used singly or in combination of two or more.

The tin-containing particles may further contain other atoms that are inevitably mixed. Examples of other atoms that are inevitably mixed include Ag, Mn, Sb, Si, K, Na, Li, Ba, Sr, Ca, Mg, Be, Zn, Pb, Cd, Tl, V, Al, and Zr. , W, Mo, Ti, Co, Ni, and Au, etc.

In addition, the content of the other atom contained in the tin-containing particles may be, for example, 3% by mass or less based on the tin-containing particles, and the melting point and the reactivity with the phosphorus-containing copper alloy particles. In other words, it is preferably 1% by mass or less.

The particle diameter of the tin-containing particles is not particularly limited, and the particle diameter when the cumulative weight is 50% (hereinafter sometimes abbreviated as "D50%") is preferably 0.5 μm to 20 μm, more preferably 1 μm. 15 μm, and more preferably 5 μm to 15 μm. By setting the particle diameter to 0.5 μm or more, the oxidation resistance of the tin-containing particles themselves is improved. In addition, by setting the particle diameter to 20 μm or less, the contact area with the phosphorus-containing copper alloy particles in the electrode is increased, and the reaction with the phosphorus-containing copper alloy particles is effectively performed.

Further, the shape of the tin-containing particles is not particularly limited, and may be any of a substantially spherical shape, a flat shape, a block shape, a plate shape, and a scaly shape, and the oxidation resistance and the low electrical resistivity are considered. Preferably, it is substantially spherical, flat, or plate-shaped.

Further, the content ratio of the tin-containing particles in the electrode composition for an electrode of the present invention is not particularly limited. In particular, the content of the tin-containing particles when the total content of the phosphorus-containing copper alloy particles and the tin-containing particles is 100% by mass is preferably 5% by mass or more and 70% by mass or less, more preferably 7 mass% or more and 65 mass% or less, and more preferably 9% by mass or more and 60% by mass or less.

By setting the content of the tin-containing particles to 5% by mass or more, the reaction with the phosphorus-containing copper alloy particles can be more uniformly produced. In addition, by setting the particles containing tin to 70% by mass or less, a Cu-Sn alloy phase having a sufficient volume can be formed, and the volume resistivity of the electrode is further lowered.

(glass particles)

The adhesive composition for an electrode of the present invention contains at least one kind of glass particles. by The electrode composition for an electrode contains glass particles, and the adhesion between the electrode portion and the substrate is improved at the time of firing. Further, particularly in the case of forming an electrode on the light-receiving surface side of the solar cell, the tantalum nitride film as an anti-reflection film is removed by so-called fire through during firing to form an ohmic contact between the electrode and the tantalum substrate.

The glass particles are preferably glass particles containing glass having a glass softening point of 650 ° C or less and a crystallization starting temperature of more than 650 ° C from the viewpoint of adhesion to the substrate and low resistivity of the electrode. Further, the glass softening point is measured by a usual method using a thermomechanical analyzer (TMA), and the crystallization initiation temperature is a thermogravimetric/thermal differential analysis device (Thermo-Gravimetric/ Differential Thermal Analyzer (TG-DTA) was measured by a usual method.

When the electrode composition for an electrode of the present invention is used as an electrode on the light-receiving surface side of the solar cell, the glass particles are not particularly limited, and glass particles generally used in the technical field can be used without any limitation: The glass particles are softened and melted at the electrode formation temperature, and the contacted tantalum nitride film is oxidized and mixed with the oxidized cerium oxide, whereby the antireflection film can be removed.

Usually, the glass particles contained in the electrode composition for electrodes contain glass containing lead because the cerium oxide can be efficiently mixed. As such a glass containing lead, for example, the glass described in Japanese Patent No. 3050064 and the like can be used, and the glass can be preferably used in the present invention.

Further, in the present invention, it is preferable to consider the influence on the environment. To use lead-free glass that is substantially free of lead. For example, the lead-free glass described in paragraphs 0024 to 0025 of JP-A-2006-313744, or the lead-free glass described in JP-A-2009-188281, etc., is used as the lead-free glass. It is also preferred that the lead-free glasses are suitably selected for use in the present invention.

In addition, when the electrode composition for an electrode of the present invention is used as an electrode other than the electrode on the light-receiving surface side of the solar cell, for example, a back-receiving electrode, a via-hole electrode and a back electrode in a reverse-contact type solar cell element, A glass particle of glass having a glass softening point of 650 ° C or less and a crystallization initiation temperature of more than 650 ° C may not contain a component required for the calcination penetration as in the above-mentioned lead at the time of use.

Examples of the glass component constituting the glass particles used in the electrode composition for an electrode of the present invention include cerium oxide (SiO ₂ ), phosphorus oxide (P ₂ O ₅ ), alumina (Al ₂ O ₃ ), and oxidation. Boron (B ₂ O ₃ ), vanadium oxide (V ₂ O ₅ ), potassium oxide (K ₂ O), bismuth oxide (Bi ₂ O ₃ ), sodium oxide (Na ₂ O), lithium oxide (Li ₂ O), BaO, BaO(R), CaO, MgO, BeO, ZnO, PbO, CdO, Tin Oxide (SnO), zirconia (ZrO ₂ ), tungsten oxide (WO ₃ ), molybdenum oxide (MoO ₃ ), lanthanum oxide (La ₂ O ₃ ), niobium oxide (Nb ₂ O ₅ ), tantalum oxide (Ta ₂ O ₅ ), yttrium oxide (Y ₂ O ₃ ), titanium oxide (TiO ₂ ), yttrium oxide (GeO ₂ ), yttrium oxide (TeO ₂ ), lanthanum oxide (Lu ₂ O ₃ ), yttrium oxide (Sb ₂ O ₃ ), Copper oxide (CuO), iron oxide (FeO), silver oxide (AgO), and manganese oxide (MnO).

Among them, as the glass component, it is preferred to use a group selected from the group consisting of SiO ₂ , P ₂ O ₅ , Al ₂ O ₃ , B ₂ O ₃ , V ₂ O ₅ , Bi ₂ O ₃ , ZnO, and PbO. At least one of them is more preferably one selected from the group consisting of SiO ₂ , PbO, B ₂ O ₃ , Bi ₂ O ₃ and Al ₂ O ₃ . In the case of such glass particles, the softening point is more effectively reduced. Further, since the wettability of the phosphorus-containing copper alloy particles and, if necessary, the silver particles is improved, sintering between the particles during the firing is progressed, and an electrode having a lower specific resistance can be formed.

On the other hand, from the viewpoint of low contact resistivity, glass particles (phosphoric acid glass, P ₂ O ₅ -based glass particles) containing phosphorus pentoxide are preferable, and it is more preferable to contain five in addition to phosphorus pentoxide. Glass particles of vanadium oxide (P ₂ O ₅ -V ₂ O ₅ -based glass particles). Further, by further including vanadium pentoxide, the oxidation resistance is further improved and the electrical resistivity of the electrode is further lowered. The reason for this is considered to be that the softening point of the glass is lowered by further containing, for example, vanadium pentoxide. When phosphorus pentoxide-vanadium pentoxide-based glass particles (P ₂ O ₅ -V ₂ O ₅ -based glass particles) are used, the content of vanadium pentoxide is preferably 1 in the total mass of the glass. The mass% or more is more preferably from 1% by mass to 70% by mass.

The particle diameter of the glass particles in the present invention is not particularly limited, and the particle diameter (D50%) when the cumulative weight is 50% is preferably 0.5 μm or more and 10 μm or less, more preferably 0.8 μm or more and 8 μm or less. By setting the particle diameter to 0.5 μm or more, the workability in producing the electrode composition for an electrode is improved. In addition, by setting the particle diameter to 10 μm or less, the glass particles are uniformly dispersed in the electrode composition for an electrode, and the calcination penetration can be efficiently performed in the calcination step, and the adhesion to the tantalum substrate is also improved.

Further, the shape of the glass particles is not particularly limited and may be approximate Any of a spherical shape, a flat shape, a block shape, a plate shape, and a scaly shape is preferably a substantially spherical shape, a flat shape, or a plate shape from the viewpoint of oxidation resistance and low electrical resistivity.

The content of the glass particles is preferably 0.1% by mass to 10% by mass, more preferably 0.5% by mass to 8% by mass, even more preferably 1% by mass to 8% by mass based on the total mass of the electrode composition for an electrode. quality%. By including the glass particles in the content ratio in the range, oxidation resistance, low resistivity of the electrode, and low contact resistance can be more effectively achieved, and the phosphorus-containing copper alloy particles and the tin-containing particles can be promoted. The reaction of the particles.

(solvent and resin)

The adhesive composition for an electrode of the present invention contains at least one solvent and at least one resin. By this, the liquid physical properties (for example, viscosity, surface tension, and the like) of the electrode composition for an electrode of the present invention can be adjusted to liquid physical properties, that is, liquid physical properties required for the method of imparting the composition to the ruthenium substrate or the like.

The above solvent is not particularly limited. For example, a hydrocarbon solvent such as hexane, cyclohexane or toluene; a chlorinated hydrocarbon solvent such as dichloroethylene, dichloroethane or dichlorobenzene; tetrahydrofuran, furan, tetrahydropyran, pyran and dioxins; a cyclic ether solvent such as an alkane, a 1,3-dioxolane or a trioxane; a guanamine solvent such as N,N-dimethylformamide or N,N-dimethylacetamide; An anthraquinone solvent such as dimethyl hydrazine or diethyl hydrazine; a ketone solvent such as acetone, methyl ethyl ketone, diethyl ketone or cyclohexanone; ethanol, 2-propanol, 1-butanol, An alcohol compound such as diacetone alcohol; 2,2,4-trimethyl-1,3-pentanediol monoacetate, 2,2,4-trimethyl-1,3-pentanediol monopropionic acid Ester, 2,2,4-trimethyl-1,3-pentanediol monobutyrate, 2,2,4-trimethyl-1,3-pentanediol monoisobutyrate, 2,2 ,4-triethyl-1,3- An ester solvent of a polyhydric alcohol such as pentanediol monoacetate, ethylene glycol monobutyl ether acetate or diethylene glycol monobutyl ether acetate; butyl cellosolve, diethylene glycol monobutyl ether, diethyl An ether solvent of a polyol such as diol diethyl ether; α-terpinene, α-terpineol, laurylene, allo-ocimene, limonene, dipentene, α-pinene, β-pinene, rosinol a terpene solvent such as sulphonone, ocene, and celery, and a mixture thereof.

The solvent of the present invention is preferably an ester solvent selected from a polyol, a terpene solvent, or the like, in view of applicability and printability when the electrode composition for an electrode is formed on a ruthenium substrate. At least one of the ether solvent of the polyhydric alcohol is more preferably at least one selected from the group consisting of an ester solvent of a polyhydric alcohol and a terpene solvent.

Further, in the present invention, the solvent may be used singly or in combination of two or more.

In addition, as the resin, a resin which can be thermally decomposed by calcination can be used, and a resin which is generally used in the technical field can be used without particular limitation. Specific examples thereof include cellulose resins such as methyl cellulose, ethyl cellulose, carboxymethyl cellulose, and nitrocellulose; polyvinyl alcohols; polyvinylpyrrolidone; acrylic resins; and acetic acid. Vinyl ester-acrylate copolymer; butyral resin such as polyvinyl butyral; alkyd resin such as phenol modified alkyd resin, castor oil fatty acid modified alkyd resin; epoxy resin; phenol resin; rosin ester resin, etc. .

The resin in the present invention is preferably at least one selected from the group consisting of a cellulose resin and an acrylic resin from the viewpoint of the disappearance at the time of firing.

Further, in the present invention, the above resins may be used alone or in combination of two or more.

Further, the weight average molecular weight of the above resin in the present invention is not particularly limited. Among them, the weight average molecular weight is preferably 5,000 or more and 500,000 or less, more preferably 10,000 or more and 300,000 or less. When the weight average molecular weight of the above resin is 5,000 or more, the viscosity of the electrode composition for an electrode can be suppressed from increasing. This is considered to be because the steric repulsion of the copper alloy particles containing phosphorus and the particles containing tin is insufficient, and the particles are agglomerated. On the other hand, when the weight average molecular weight of the resin is 500,000 or less, the resin is agglomerated in a solvent, and the viscosity of the electrode composition for an electrode can be suppressed from increasing.

In addition, when the weight average molecular weight of the resin is 500,000 or less, the burning temperature of the resin is suppressed, and when the rubber composition for electrode is calcined, the resin is not completely burned and is suppressed as a foreign matter. The electrode can be formed with a lower resistance.

In the electrode composition for an electrode of the present invention, the content of the solvent and the resin may be appropriately selected in accordance with the desired liquid physical properties and the type of the solvent and the resin to be used. For example, in the total mass of the electrode composition for an electrode, the total content of the solvent and the resin is preferably 3% by mass or more and 29.9% by mass or less, more preferably 5% by mass or more and 25% by mass or less, and still more preferably 7 mass% or more and 20 mass% or less.

When the total content of the solvent and the resin is within the above range, the imparting property when the electrode composition for an electrode is applied to the ruthenium substrate is improved, and an electrode having a desired width and height can be formed more easily.

Further, in the electrode composition for an electrode of the present invention, from the viewpoint of oxidation resistance and low electrical resistivity of the electrode, the total content of the copper alloy particles containing phosphorus and the particles containing tin is preferably 70% by mass. The content of the glass particles is 0.1% by mass or more and 10% by mass or less, and the total content of the solvent and the resin is 3% by mass or more and 29.9% by mass or less, and more preferably phosphorus-containing copper alloy particles. The total content of the tin-containing particles is 74% by mass or more and 88% by mass or less, and the content of the glass particles is 0.5% by mass or more and 8% by mass or less, and the total content of the solvent and the resin is 7% by mass or more. It is more preferable that the total content of the copper alloy particles containing phosphorus and the particles containing tin is 74% by mass or more and 88% by mass or less, and the content of the glass particles is 1% by mass or more and 8% by mass or less. The total content of the solvent and the resin is 7% by mass or more and 20% by mass or less.

(silver particles)

The electrode composition for an electrode of the present invention preferably further contains silver particles. By containing silver particles, the oxidation resistance is further improved, and the electrical resistivity as an electrode is further lowered. Further, Ag particles are precipitated in the Sn-PO-based glass phase formed by the reaction of the phosphorus-containing copper alloy particles and the tin-containing particles, whereby the Cu-Sn alloy phase and the tantalum substrate in the electrode layer are Ohmic contact is further improved. Further, the effect of improving the solder connectivity when the solar cell module is fabricated can be obtained.

The silver constituting the above silver particles may also contain other atoms inevitably mixed. Examples of other atoms that are inevitably mixed include Sb, Si, K, Na, Li, Ba, Sr, Ca, Mg, Be, Zn, Pb, Cd, Tl, V, Sn, Al, Zr, W. , Mo, Ti, Co, Ni, and Au, etc.

In addition, the content of the other atom contained in the silver particles is, for example, 3% by mass or less in the silver particles, and is preferably 1% by mass or less from the viewpoint of the melting point and the low resistivity of the electrode. .

The particle diameter of the silver particles in the present invention is not particularly limited, and the particle diameter (D50%) when the cumulative weight is 50% is preferably 0.4 μm or more and 10 μm or less, more preferably 1 μm or more and 7 μm or less. By setting it as 0.4 micrometer or more, oxidation resistance improves more effectively. In addition, when the particle diameter is 10 μm or less, the contact area between the silver particles in the electrode and the copper alloy particles containing phosphorus and the particles containing tin becomes large, and the specific resistance is more effectively lowered.

Further, the shape of the silver particles is not particularly limited, and may be any of a substantially spherical shape, a flat shape, a block shape, a plate shape, and a scaly shape, and is preferably a viewpoint of oxidation resistance and low electrical resistivity. It is roughly spherical, flat, or plate-shaped.

In addition, when the gel composition for an electrode of the present invention contains silver particles, the content of the silver particles is preferably such that the total content of the phosphorus-containing copper alloy particles, the tin-containing particles, and the silver particles is The content of the silver particles at 100% by mass is 0.1% by mass or more and 10% by mass or less, more preferably 0.5% by mass or more and 8% by mass or less.

Further, in the electrode composition for an electrode of the present invention, the electrode composition for electrode is preferably a copper alloy containing phosphorus from the viewpoint of oxidation resistance, low resistivity of the electrode, and coating property to the ruthenium substrate. The total content of the particles, the tin-containing particles, and the silver particles is 70% by mass or more and 94% by mass or less, and more preferably 74% by mass or more and 88% by mass or less. The total content of the copper alloy particles containing phosphorus, the particles containing tin, and the silver particles is 70% by mass. As described above, when the adhesive composition for an electrode is provided, an appropriate viscosity can be easily achieved. In addition, when the total content of the phosphorus-containing copper alloy particles, the tin-containing particles, and the silver particles is 94% by mass or less, the occurrence of blurring when the electrode composition for electrodes is applied can be more effectively suppressed.

Further, when the electrode composition for an electrode of the present invention further contains silver particles, from the viewpoint of oxidation resistance and low electrical resistivity of the electrode, copper alloy particles containing phosphorus, particles containing tin, and silver particles are preferable. The total content is 70% by mass or more and 94% by mass or less, and the content of the glass particles is 0.1% by mass or more and 10% by mass or less, and the total content of the solvent and the resin is 3% by mass or more and 29.9% by mass or less. The total content of the phosphorus-containing copper alloy particles, the tin-containing particles, and the silver particles is 74% by mass or more and 88% by mass or less, and the content of the glass particles is 0.5% by mass or more and 8% by mass or less, and the solvent and the resin are contained. The total content is 7% by mass or more and 20% by mass or less, and more preferably the total content of the copper-containing alloy particles containing phosphorus, the particles containing tin, and the silver particles is 74% by mass or more and 88% by mass or less. The content ratio is 1% by mass or more and 8% by mass or less, and the total content of the solvent and the resin is 7 mass% or more and 20 mass% or less.

(flux)

The electrode composition for an electrode may further comprise at least one flux. By including a flux, the oxide film formed on the surface of the phosphorus-containing copper alloy particles can be removed, and the reduction reaction of the phosphorus-containing copper alloy particles in the calcination can be promoted. Further, since the melting of the tin-containing particles in the calcination is also performed, the reaction with the phosphorus-containing copper alloy particles proceeds, and as a result, the oxidation resistance is further improved, and the resistivity of the formed electrode is further lowered. Furthermore, an electrode can also be obtained The adhesion of the material to the ruthenium substrate enhances this effect.

The flux in the present invention is not particularly limited as long as it is an oxide film capable of removing the oxide film formed on the surface of the phosphorus-containing copper alloy particles and promoting the melting of the tin-containing particles. Specifically, examples of preferred fluxing agents include fatty acids, boric acid compounds, fluorinated compounds, and borofluorinated compounds.

Specific examples of the flux include lauric acid, myristic acid, palmitic acid, stearic acid, sorbic acid, hard acetylene acid, propionic acid, boron oxide, potassium borate, sodium borate, lithium borate, and boron fluoride. Potassium, sodium borofluoride, lithium borofluoride, acidic potassium fluoride, acidic sodium fluoride, acidic lithium fluoride, potassium fluoride, sodium fluoride, lithium fluoride, and the like.

Among them, the heat resistance at the time of firing the electrode material (the characteristic that the flux does not volatilize at the low temperature of firing) and the oxidation resistance of the copper alloy particles containing phosphorus are particularly preferable as the flux. Potassium borate and potassium borofluoride.

In the present invention, one type of the flux may be used alone or two or more types may be used in combination.

When the content of the flux in the flux composition of the electrode composition of the present invention contains a flux, the oxidation resistance of the phosphorus-containing copper alloy particles is effectively exhibited, and the melting of the tin-containing particles is promoted, and the electrode material is used. From the viewpoint of reducing the void ratio of the portion where the flux is removed at the end of the calcination, the total mass of the electrode composition for the electrode is preferably from 0.1% by mass to 5% by mass, more preferably from 0.3% by mass to 4% by mass. %, and more preferably 0.5% by mass to 3.5% by mass, particularly preferably 0.7% by mass to 3% by mass, and preferably 1 Mass%~2.5% by mass.

(other ingredients)

The electrode composition for an electrode of the present invention may further contain other components generally used in the technical field, in addition to the above components. Examples of other components include a plasticizer, a dispersant, a surfactant, an inorganic binder, a metal oxide, a ceramic, and an organometallic compound.

The method for producing the electrode composition for an electrode of the present invention is not particularly limited. Can be used to disperse the usual use. In the mixing method, the phosphorus-containing copper alloy particles, the tin-containing particles, the glass particles, the solvent, the resin, and, if necessary, the silver particles are dispersed. By mixing, the adhesive composition for electrodes of the present invention is produced.

dispersion. The mixing method is not particularly limited and can be dispersed from the usual use. The mixing method is suitable for application.

<Method for Producing Electrode Using Electrode Composition for Electrode>

As a method of producing an electrode using the electrode composition for an electrode of the present invention, the electrode composition can be applied to a region where the electrode is formed, and after drying, the electrode can be formed in a desired region by firing. By using the above-described electrode composition for an electrode, even if it is subjected to a calcination treatment in the presence of oxygen (for example, in the atmosphere), an electrode having a low specific resistance can be formed.

Specifically, for example, when the electrode for a solar cell is formed using the electrode composition for an electrode, the electrode composition for the electrode is applied to the ruthenium substrate so as to have a desired shape, and after drying, it is calcined. The solar cell electrode having a low resistivity is formed into a desired shape. In addition, by using the above-mentioned electrode composition for an electrode, even in the presence of oxygen (for example, the atmosphere In the case of calcination treatment, an electrode having a low specific resistance can also be formed. Further, the electrode formed on the ruthenium substrate is excellent in adhesion to the ruthenium substrate, and good ohmic contact can be achieved.

Examples of the method of applying the gel composition for the electrode include screen printing, an inkjet method, a dispenser method, and the like. However, from the viewpoint of productivity, coating by screen printing is preferred.

When the electrode composition for electrode of the present invention is applied by screen printing, the electrode composition for electrodes preferably has 20 Pa. s~1000Pa. The viscosity of the range of s. Further, the viscosity of the electrode composition for the electrode was measured at 25 ° C using a Brookfield HBT viscometer.

The amount of the above-mentioned electrode composition to be applied can be appropriately selected in accordance with the size of the electrode to be formed. For example, the amount of the adhesive composition for the electrode can be 2 g/m ² to 10 g/m ² , preferably 4 g/m ² to 8 g/m ² .

In addition, as heat treatment conditions (calcination conditions) when the electrode is formed using the electrode composition for an electrode of the present invention, heat treatment conditions generally used in the technical field can be applied.

Usually, the heat treatment temperature (calcination temperature) is 800 ° C to 900 ° C, but when the electrode composition for an electrode of the present invention is used, heat treatment conditions at a lower temperature can be applied, for example, heat treatment at 450 ° C to 850 ° C can be utilized. Temperature to form an electrode with good characteristics.

Further, the heat treatment time can be appropriately selected in accordance with the heat treatment temperature and the like, and can be, for example, 1 second to 20 seconds.

The heat treatment apparatus can be suitably used as long as it can be heated to the above temperature, and examples thereof include an infrared heating furnace and a tunnel furnace. Since the infrared heating furnace directly inputs electric energy into the heating material in the form of electromagnetic waves and converts the electric energy into heat energy, the efficiency is high, and the rapid heating can be performed in a short time. Further, there is no product produced by combustion, and it is non-contact heating, so that contamination of the generated electrode can be suppressed. Since the tunnel type furnace is automatically calcined during the period in which the sample is continuously conveyed from the inlet to the outlet, it can be uniformly fired by the division of the furnace body and the control of the conveying speed. From the viewpoint of power generation performance of the solar cell element, it is preferred to carry out heat treatment using a tunnel furnace.

<Solar battery element and method of manufacturing the same>

The solar cell element of the present invention has an electrode formed by firing the above-mentioned electrode adhesive composition applied to a crucible substrate. Thereby, a solar cell element having good characteristics can be obtained, and the solar cell element is excellent in productivity.

In the present specification, the term "solar cell element" means a germanium substrate having a pn junction and an electrode formed on the germanium substrate. In addition, the solar cell is a state in which a tab line is provided on the electrode of the solar cell element, and a plurality of solar cell elements are connected via a bonding wire as needed, and sealed by a sealing resin or the like.

Hereinafter, a specific example of the solar cell element of the present invention will be described with reference to the drawings, but the present invention is not limited thereto.

A cross-sectional view showing an example of a typical solar cell element, a light-receiving surface, and a back surface are shown in Figs. 1, 2, and 3.

As is generally shown in FIG. 1, generally, a single crystal germanium or a polycrystalline germanium or the like is used for the semiconductor substrate 1 of the solar cell element. The semiconductor substrate 1 contains boron or the like to constitute a p-type semiconductor. In order to suppress the reflection of sunlight, the light-receiving side is formed with an unevenness (also referred to as a texture, not shown) by an etching solution containing NaOH and IPA (isopropyl alcohol). Phosphorus or the like is doped on the light-receiving side thereof, and the n ⁺ -type diffusion layer 2 is provided in a thickness of a submicron order, and a pn junction portion is formed at a boundary with the p-type bulk portion. Further, on the light-receiving surface side, an anti-reflection film 3 such as tantalum nitride is placed on the n ⁺ -type diffusion layer at a film thickness of about 90 nm by plasma enhanced chemical vapor deposition (PECVD) or the like. 2 on.

Next, a method of forming the light-receiving surface electrode 4 provided on the light-receiving surface side and a current collecting electrode 5 and the output-removing electrode 6 which are formed on the back surface in FIG. 3 will be described.

The light-receiving surface electrode 4 and the back surface output extraction electrode 6 are formed of the above-described electrode adhesive composition of the present invention. Further, the back surface collecting electrode 5 is formed of an aluminum electrode paste composition containing glass powder. As a first method of forming the light-receiving surface electrode 4, the back surface current collecting electrode 5, and the back surface output extraction electrode 6, a method of applying the above-described gel composition to a desired pattern by screen printing or the like is exemplified. The electrode is dried, and then calcined at 450 ° C to 85 ° C in the atmosphere to form the electrode. In the present invention, by using the above-described electrode composition for an electrode, it is possible to form an electrode excellent in electrical resistivity and contact resistivity even when calcination is carried out at a relatively low temperature.

At this time, the glass particles contained in the electrode adhesive composition forming the light-receiving surface electrode 4 on the light-receiving surface side are reacted with the anti-reflection layer 3 (baking through), and the light-receiving surface electrode 4 and the n ⁺ -type diffusion layer are formed. 2 electrical connection (ohmic contact).

In the present invention, the light-receiving surface electrode 4 is formed by using the electrode composition for an electrode, and copper is used as a conductive metal to suppress oxidation of copper, and a low-resistivity light-receiving surface electrode 4 is formed with good productivity. .

Further, the electrode formed in the present invention preferably comprises a Cu-Sn alloy phase and a Sn-PO glass phase, and more preferably a Sn-PO glass phase is disposed between the Cu-Sn alloy phase and the ruthenium substrate (not shown). Show). Thereby, the reaction between the copper and the tantalum substrate is suppressed, and an electrode having excellent adhesion can be formed with a low electric resistance.

Further, on the back side, when calcination is performed, aluminum in the aluminum electrode paste composition forming the back surface current collecting electrode 5 is diffused to the back surface of the p-type germanium substrate 1, thereby forming the p ⁺ -type diffusion layer 7, whereby An ohmic contact is obtained between the p-type germanium substrate 1 and the back surface current collecting electrode 5 and the back surface output extracting electrode 6.

As a second method of forming the light-receiving surface electrode 4, the back surface current collecting electrode 5, and the back surface output extraction electrode 6, a method of first printing an aluminum electrode paste composition for forming the back surface current collecting electrode 5, after drying, The electrode 5 is formed by calcination at 750 ° C to 850 ° C in the atmosphere, and then the electrode composition for an electrode of the present invention is printed on the light-receiving surface side and the back surface side, and dried at 450 ° C to 650 ° C in the atmosphere. Calcination is performed right and left to form the light-receiving surface electrode 4 and the back surface output extraction electrode 6.

This method is effective, for example, in the following cases. In other words, when the aluminum electrode paste forming the back surface current collecting electrode 5 is fired, the firing temperature of 650 ° C or lower is based on the composition of the aluminum rubber: sintering of the aluminum particles and toward the p-type ruthenium substrate 1 The aluminum diffusion amount is insufficient, and the p ⁺ -type diffusion layer cannot be sufficiently formed. In this state, ohmic contact may not be sufficiently formed between the p-type germanium substrate 1 on the back surface, the back surface current collecting electrode 5, and the back surface output extracting electrode 6, and the power generation performance of the solar cell element may be lowered. Therefore, it is preferred to print the electrode composition for an electrode of the present invention after forming the electrode 5 for back surface current at a calcination temperature (for example, 750 ° C to 850 ° C) which is most suitable for the composition of the aluminum electrode paste, and to dry the paste composition at a relatively low level. Calcination is carried out at a temperature (450 ° C to 650 ° C) to form a light-receiving surface electrode 4 and a back surface output extraction electrode 6.

In addition, a schematic plan view of a back side electrode structure which is commonly used in a so-called reverse contact type solar cell element according to another aspect of the present invention is shown in Fig. 4, and shows a reverse contact type solar cell element as another embodiment. The perspective view of the schematic structure of the solar cell element is shown in Fig. 5, Fig. 6, and Fig. 7, respectively. 5, 6 and 7 are perspective views of the AA cross section in Fig. 4, respectively.

The solar cell element having the structure shown in the perspective view of FIG. 5 is formed with a through hole penetrating both sides of the light receiving surface side and the back surface side on the p-type germanium substrate 1 by laser drilling or etching. Further, a texture (not shown) that enhances light-in efficiency is formed on the light-receiving surface side. Further, an n ⁺ -type diffusion layer 2 formed by an n-type diffusion treatment is formed on the light-receiving surface side, and an anti-reflection film 13 is formed on the n ⁺ -type diffusion layer 2 . These are produced by the same steps as the previous crystalline Si type solar cell elements.

Further, the electrode composition for an electrode of the present invention is filled into the inside of the through hole formed by the printing method or the inkjet method, and the electrode composition for an electrode of the present invention is printed in the same manner on the light receiving surface side in the same manner. A composition layer is formed, and the composition layer forms the via electrode 9 and the light-receiving surface collecting electrode 8.

Here, the glue used for filling and printing is ideally used to have a viscosity of First, it is the most suitable glue for each process, but it can also be filled and printed at one time with the same composition of glue.

On the other hand, on the back side, an n ⁺ -type diffusion layer 2 and a p ⁺ -type diffusion layer 7 for preventing recombination of carriers are formed. Further, the n ⁺ -type diffusion layer 2 formed on the light-receiving surface side, the periphery of the via hole, and the back surface side is formed continuously around the light-receiving surface side - the via hole and the periphery of the via hole - the back surface side, but may be formed in each part They are formed independently or simultaneously. Further, boron (B) or aluminum (Al) is used here as an impurity element forming the p ⁺ -type diffusion layer 7. The p ⁺ -type diffusion layer 7 can be formed by performing a thermal diffusion treatment using, for example, B as a diffusion source in a solar cell element manufacturing step before forming the anti-reflection film 13 or, when Al is used, In the above printing step, aluminum paste is printed on the opposite surface side and calcined.

On the back side, as shown in the plan view of FIG. 4, the electrode composition for an electrode of the present invention is printed in a strip shape on the n ⁺ -type diffusion layer 2 and the p ⁺ -type diffusion layer 7, respectively, thereby forming the back surface electrode 10 And the back electrode 11. Here, when the p ⁺ -type diffusion layer 7 is formed using aluminum paste, the back electrode may be formed by using the electrode composition for an electrode of the present invention only on the n ⁺ -type diffusion layer 2 side.

Thereafter, it is dried, and then calcined in the air at about 450 to 850 ° C to form the light-receiving surface current collecting electrode 8 and the via electrode 9, the back surface electrode 10, and the back surface electrode 11. Further, as described above, when an aluminum electrode is used for one back electrode, the aluminum paste can be printed and the aluminum paste can be printed first from the viewpoint of the sinterability of the aluminum and the ohmic contact between the back electrode and the p ⁺ -type diffusion layer 7. After calcination, one back electrode is formed, and thereafter, the electrode composition for an electrode of the present invention is printed and filled, and calcined, whereby the light-receiving surface current collecting electrode 8 and the via electrode 9 and the other back surface electrode are formed.

In addition, the solar cell element having the structure shown in the perspective view of FIG. 6 can be manufactured in the same manner as the solar cell element having the structure shown in the perspective view of FIG. 5 except that the electrode for collecting the light-receiving surface is not formed. That is, in the solar cell element having the structure shown in the perspective view of Fig. 6, the electrode composition for an electrode of the present invention can be used for the via electrode 9, the back electrode 10, and the back electrode 11.

The solar cell element having the structure shown in the perspective view of FIG. 7 has a structure in which an n-type germanium substrate 12 is used as a base substrate, and an n ⁺ -type diffusion layer 2 and a p ⁺ -type diffusion layer 7 are formed on the back surface side. The n ⁺ -type diffusion layer 2 and the p ⁺ -type diffusion layer 7 can be formed by the same method as the solar cell element having the configuration shown in the perspective view of Fig. 5 . Further, on the back side, as shown in the plan view of FIG. 4, the electrode composition for an electrode of the present invention is printed on a strip of a n ⁺ type diffusion layer 2 and a p ⁺ type diffusion layer 7 to form a back surface. Electrode 10 and back electrode 11. Here, when the p ⁺ -type diffusion layer 7 is formed using aluminum paste, the back electrode may be formed by using the electrode composition for an electrode of the present invention only on the n ⁺ -type diffusion layer 2 side.

Further, the electrode composition for an electrode of the present invention is not limited to the use of the solar cell electrode as described above, and may be preferably used for, for example, an electrode wire and a shield wire of a plasma display, a ceramic capacitor, an antenna circuit, and various The sensor circuit, the heat dissipation material of the semiconductor element, and the like.

Among them, in particular, it is preferably used in the case where an electrode is formed on a substrate including germanium.

<solar battery>

The solar cell of the present invention comprises at least one of the above solar cell elements, and is configured by arranging bonding wires on the electrodes of the solar cell elements. Further, the solar cell may be connected to a plurality of solar cell elements via a bonding wire as needed, and further sealed by a sealing material.

The bonding wire and the sealing material are not particularly limited, and can be suitably selected from bonding wires and sealing materials commonly used in the industry.

The entire contents disclosed in Japanese Patent Application No. 2011-090520 are incorporated herein by reference.

All documents, patent applications, and technical specifications described in the present specification are incorporated herein by reference to the same extent as the same as the same. Literature, patent applications, and technical specifications.

[Example]

Hereinafter, the present invention will be specifically described by way of examples, but the present invention is not limited to the examples, and the "parts" and "%" are the quality standards unless otherwise specified.

<Example 1> (a) Preparation of adhesive composition for electrodes

Phosphorus-containing copper alloy particles containing 7 mass% of phosphorus were prepared by a usual method, dissolved, and pulverized by a water atomization method, followed by drying and classification. The graded powder is mixed for deoxidation. Dehydration treatment was carried out to prepare phosphorus-containing copper alloy particles containing 7 mass% of phosphorus. Further, the phosphorus-containing copper alloy particles had a particle diameter (D50%) of 5.0 μm and a substantially spherical shape.

Preparation includes 3 parts of cerium oxide (SiO ₂ ), 60 parts of lead oxide (PbO), 18 parts of boron oxide (B ₂ O ₃ ), 5 parts of bismuth oxide (Bi ₂ O ₃ ), and aluminum oxide (Al ₂ O ₃ ) 5 parts of glass containing 9 parts of zinc oxide (ZnO) (hereinafter, abbreviated as "G01"). The obtained glass G01 had a softening point of 420 ° C and a crystallization temperature of more than 650 ° C.

Using the obtained glass G01, glass G01 particles having a particle diameter (D50%) of 2.5 μm were obtained. In addition, the shape is substantially spherical.

39.9 parts of the phosphorus-containing copper alloy particles obtained above, 41.5 parts of tin particles (Sn; particle diameter (D50%): 10.0 μm; purity: 99.9%), 4.1 parts of glass G01 particles, and terpene alcohol (Ter) 14.1. A portion and ethyl cellulose (EC) of 0.4 parts were mixed, and then stirred in an agate mortar for 20 minutes to prepare a gel composition 1 for an electrode.

(b) Production of solar cell components

A p-type semiconductor substrate having a thickness of 190 μm in which an n ⁺ -type diffusion layer and an anti-reflection film (tantalum nitride film) were formed on the textured light-receiving surface was prepared and cut into a size of 125 mm × 125 mm. The electrode composition 1 for electrodes obtained above was printed on the light-receiving surface so as to have an electrode pattern as shown in FIG. 2 by a screen printing method. The pattern of the electrode included a finger line having a width of 150 μm and a bus bar having a width of 1.5 mm, and the printing conditions (mesh of the screen, printing speed, and printing pressure) were appropriately adjusted so that the film thickness after firing became 20 μm. This was placed in an oven heated to 150 ° C for 15 minutes, and the solvent was removed by evaporation.

Then, in the same manner as described above, the electrode composition 1 and the aluminum electrode paste are printed by screen printing so as to form an electrode pattern as shown in FIG. On the back side of the p-type semiconductor substrate.

The pattern of the back surface output extraction electrode including the electrode composition 1 for electrodes was composed of 123 mm × 5 mm, and a total of two were printed. In addition, the back surface output extraction electrode is such that the film thickness after firing is 20 μm, and the printing conditions (mesh of the screen, printing speed, and printing pressure) are appropriately adjusted. Further, an aluminum electrode paste was printed on the entire surface other than the back surface output extraction electrode to form a back surface current collector electrode pattern. In addition, the printing conditions of the aluminum electrode paste are appropriately adjusted so that the film thickness of the back surface current collecting electrode after firing is 30 μm. This was placed in an oven heated to 150 ° C for 15 minutes, and the solvent was removed by evaporation.

Then, using a tunnel furnace (manufactured by Noritake Co., Ltd., one-row W/B tunnel furnace), the p-type semiconductor substrate was fired in a high temperature at a temperature of 800 ° C and a holding time of 10 seconds (calcination). Thereby, a solar cell element 1 forming a desired electrode is formed.

<Example 2>

In the example 1, the solar cell element 2 was produced in the same manner as in Example 1 except that the firing conditions at the time of electrode formation were changed from the maximum temperature of 800 ° C to 10 seconds to the maximum temperature of 850 ° C for 8 seconds.

<Example 3>

In the same manner as in Example 1, except that the phosphorus content of the phosphorus-containing copper alloy particles was changed from 7 mass% to 6 mass%, the electrode composition 3 for electrodes was prepared, and the solar cell element 3 was produced. .

<Example 4>

In Example 3, the calcination conditions at the time of electrode formation were from the highest temperature. The solar cell element 4 was produced in the same manner as in Example 3 except that the temperature was changed to the maximum temperature of 750 ° C for 12 seconds at 800 ° C for 10 seconds.

<Example 5>

In Example 1, the electrode composition 5 for an electrode was prepared in the same manner as in Example 1 except that the phosphorus content of the phosphorus-containing copper alloy particles was changed from 7 mass% to 8 mass%, and a solar cell element 5 was produced. .

<Example 6>

In the same manner as in Example 1, except that the particle diameter (D50%) of the phosphorus-containing copper alloy particles was changed from 5.0 μm to 1.5 μm, the electrode composition 6 for an electrode was prepared, and a solar cell was produced. Element 6.

<Example 7>

In Example 1, the content of the phosphorus-containing copper alloy particles and the tin-containing particles was changed, the content of the phosphorus-containing copper alloy particles was changed to 56.3 parts, and the content of the tin-containing particles was changed to 25.1 parts, and In the same manner as in Example 1, a gel composition 7 for an electrode was prepared, and a solar cell element 7 was produced.

<Example 8>

In Example 1, the content of the phosphorus-containing copper alloy particles and the tin-containing particles was changed, the content of the phosphorus-containing copper alloy particles was changed to 73.0 parts, and the content of the tin-containing particles was changed to 8.4 parts, and In the same manner as in Example 1, a gel composition 8 for an electrode was prepared, and a solar cell element 8 was produced.

<Example 9>

In Example 1, as a tin-containing particle, Sn-58Bi was used. The tin alloy particles (the alloy containing 58% by mass of Bi in Sn) were prepared in the same manner as in Example 1 except that the tin particles (Sn) were used instead of the tin particles (Sn), and the particle diameter (D50%) was changed to 15.0 μm. The electrode composition 9 was used for the electrode, and the solar cell element 9 was produced.

<Example 10>

In Example 1, as the tin-containing particles, tin alloy particles containing Sn-4Ag-0.5Cu (an alloy containing 4% by mass of Ag and 0.5% by mass of Cu in Sn) were used instead of tin particles (Sn), and The electrode composition 10 for an electrode was prepared in the same manner as in Example 1 except that the particle diameter (D50%) was 8.0 μm, and the solar cell element 10 was produced.

<Example 11>

In the same manner as in Example 1, except that the particle size (D50%) of the tin-containing particles was changed from 10.0 μm to 6.0 μm, the electrode composition 11 for an electrode was prepared, and a solar cell element 11 was produced. .

<Example 12>

In Example 1, silver particles (Ag; particle diameter (D50%): 3.0 μm; purity: 99.5%) were added to the electrode composition. Specifically, the content of each component was changed to 37.9 parts of copper alloy particles containing phosphorus, 39.5 parts of tin particles, 4.0 parts of silver particles, 4.1 parts of glass G01 particles, 14.1 parts of terpineol, and 0.4 parts of ethyl cellulose. Otherwise, the electrode composition 12 for an electrode was prepared in the same manner as in Example 1 to prepare a solar cell element 12.

<Example 13>

In Example 1, silver particles (Ag; particle diameter (D50%): 3.0 μm) were further added to the electrode composition for electrodes. Specifically, the ingredients The content was changed to 36.9 parts of phosphorus-containing copper alloy particles, 38.4 parts of tin particles, 6.1 parts of silver particles, 4.1 parts of glass G01 particles, 14.1 parts of terpineol, and 0.4 parts of ethyl cellulose, and the same as in Example 1. The electrode composition 13 for electrodes was prepared in the same manner, and the solar cell element 13 was produced.

<Example 14>

In Example 1, the content of the glass G01 particles was changed. Specifically, the content of each component was changed to 38.3 parts of phosphorus-containing copper alloy particles, 39.9 parts of tin particles, 7.8 parts of glass G01 particles, 13.5 parts of terpineol, and 0.4 parts of ethyl cellulose, and In the same manner as in Example 1, a gel composition 14 for an electrode was prepared, and a solar cell element 14 was produced.

<Example 15>

In the same manner as in Example 1, except that the composition of the glass particles was changed from the glass G01 to the glass G02 shown below, the electrode composition 15 for an electrode was prepared, and the solar cell element 15 was produced.

Glass G02 is composed of 45 parts of vanadium oxide (V ₂ O ₅ ), 24.2 parts of phosphorus oxide (P ₂ O ₅ ), 20.8 parts of barium oxide (BaO), ₅ parts of barium oxide (Sb ₂ O ₃ ), and tungsten oxide (WO). ₃ ) Prepared in 5 parts. Further, the glass G02 had a softening point of 492 ° C and a crystallization initiation temperature of more than 650 ° C.

Using the obtained glass G02, glass G02 particles having a particle diameter (D50%) of 2.5 μm were obtained. In addition, the shape is substantially spherical.

<Example 16>

In Example 1, the solvent was changed from terpineol to diethylene glycol monobutyl ether (BC), and the resin was changed from ethyl cellulose to polyethyl acrylate (EPA). Specifically, changing the content of each component to copper containing phosphorus An electrode composition for an electrode was prepared in the same manner as in Example 1 except that 39.9 parts of gold particles, 41.5 parts of tin particles, 4.1 parts of glass G01 particles, 12.3 parts of diethylene glycol monobutyl ether, and 2.2 parts of polyethyl acrylate were used. 16, and a solar cell element 16 is fabricated.

<Example 17 to Example 20>

In Example 1, as shown in Table 1, the phosphorus content, the particle diameter (D50%) and the content of the phosphorus-containing copper alloy particles were changed, the composition of the tin-containing particles, the particle diameter (D50%) and the content thereof, and silver. The content of the particles, the type and content of the glass particles, the type and content of the solvent, the type and content of the resin, and the composition of the electrode for the electrode 17 to the electrode were prepared in the same manner as in Example 1. Object 20.

Then, the obtained electrode composition 17 to electrode adhesive composition 20 was used, and the temperature and the treatment time of the heat treatment were changed as shown in Table 1, except that the same procedure as in Example 1 was carried out. The solar cell element 17 to the solar cell element 20 having the desired electrode are formed.

<Example 21>

A p-type semiconductor substrate having a thickness of 190 μm in which an n ⁺ -type diffusion layer and an anti-reflection film (tantalum nitride film) were formed on the textured light-receiving surface was prepared and cut into a size of 125 mm × 125 mm. Thereafter, an aluminum electrode paste was printed on the back surface to form a back surface current collecting electrode pattern. As shown in FIG. 3, the electrode pattern for the back surface current is printed on the entire surface except the back surface output extraction electrode. In addition, the printing conditions of the aluminum electrode paste are appropriately adjusted so that the film thickness of the back surface current collecting electrode after firing is 30 μm. This was placed in an oven heated to 150 ° C for 15 minutes, and the solvent was removed by evaporation.

Then, a tunnel furnace (manufactured by Noritake Co., Ltd., one-row W/B tunnel furnace) was used, and the heat treatment (calcination) at a maximum temperature of 800 ° C and a holding time of 10 seconds was performed in an atmosphere to form a back surface. Electrocollector electrode and p ⁺ type diffusion layer.

Thereafter, the electrode composition 1 for an electrode obtained as described above is printed so as to have an electrode pattern as shown in FIGS. 2 and 3. The pattern of the electrode on the light-receiving surface includes a finger line of 150 μm width and a bus bar of 1.5 mm width, and the printing conditions (mesh of the screen, printing speed, and printing pressure) are appropriately adjusted so that the film thickness after firing becomes 20 μm. . In addition, the pattern of the electrode on the back surface was composed of 123 mm × 5 mm, and two of them were printed in total so that the film thickness after firing became 20 μm. This was placed in an oven heated to 150 ° C for 15 minutes, and the solvent was removed by evaporation.

Using a tunnel furnace (manufactured by Noritake Co., Ltd., one-row W/B tunnel furnace), it is calcined in an air atmosphere at a maximum temperature of 650 ° C and a holding time of 10 seconds for heat treatment (calcination) to form A solar cell element 21 having a desired electrode.

<Example 22>

In the same manner as in Example 21, the solar cell element 22 was produced in the same manner as in Example 21 except that the electrode composition 5 for the electrode obtained above was used for the electrode on the light-receiving surface and the back-side output extraction electrode.

<Example 23>

In Example 21, the electrode composition 9 for an electrode obtained above was used for the production of the electrode on the light-receiving surface and the output electrode on the back surface, and the firing condition at the time of electrode formation was changed from the highest temperature of 650 ° C to 10 seconds to the highest temperature. The solar cell element 23 was fabricated in the same manner as in Example 21 except that at 620 ° C for 10 seconds.

<Example 24>

Using the electrode composition 1 for electrodes obtained above, a solar cell element 24 having the structure shown in Fig. 5 was produced. The specific production method is shown below. First, a through hole having a diameter of 100 μm penetrating both sides of the light receiving surface side and the back surface side by laser drilling is formed for the p-type germanium substrate. Further, a texture, an n ⁺ -type diffusion layer, and an anti-reflection film are sequentially formed on the light-receiving surface side. Further, an n ⁺ -type diffusion layer is also formed on each of the inside of the via hole and the back surface. Then, the electrode composition 1 for the electrode is filled into the inside of the through hole formed by the inkjet method, and the electrode composition 1 for the electrode is printed on the light receiving surface side in a grid shape.

On the other hand, it is formed on the back side in such a manner that the electrode composition 1 and the aluminum electrode paste are used, and they are printed in a strip shape as shown in FIG. 4, and the electrode paste is printed under the through hole. Composition 1. Using a tunnel furnace (manufactured by Noritake Co., Ltd., one-row W/B tunnel furnace), it is calcined in an atmospheric environment at a maximum temperature of 800 ° C and a holding time of 10 seconds for heat treatment. The solar cell element 24 of the electrode.

At this time, for the portion where the aluminum electrode paste was formed, Al was diffused into the p-type germanium substrate by firing, thereby forming a p ⁺ -type diffusion layer.

<Example 25>

In the example 24, the electrode composition 1 for the electrode was changed to the electrode composition 12 for the electrode obtained above, and the electrode for collecting the light-receiving surface was formed. A solar cell element 25 was produced in the same manner as in Example 24 except for the electrode and the back electrode.

<Example 26>

In the example 24, the solar cell element 26 was produced in the same manner as in Example 24 except that the firing conditions at the time of electrode formation were changed from the maximum temperature of 800 ° C to 10 seconds to the maximum temperature of 850 ° C for 8 seconds.

<Example 27>

In the example 24, the electrode composition 1 for the electrode was changed to the electrode composition 9 for the electrode obtained above, and the electrode for collecting the light-receiving surface, the via electrode, and the back electrode were formed, and the same procedure as in Example 24 was carried out. The solar cell element 27 is fabricated in a manner.

<Example 28>

In the same manner as in Example 1, except that the glass particles were changed from the glass G01 particles to the glass G03 particles in Example 1, the electrode composition 28 for electrodes was prepared.

Further, the glass G03 is composed of 13 parts of cerium oxide (SiO ₂ ), 58 parts of boron oxide (B ₂ O ₃ ), 38 parts of zinc oxide (ZnO), 12 parts of aluminum oxide (Al ₂ O ₃ ), and cerium oxide. (BaO) was prepared in 12 parts. The obtained glass G03 had a softening point of 583 ° C and a crystallization temperature of more than 650 ° C.

Using the obtained glass G03, glass G03 particles having a particle diameter (D50%) of 2.5 μm were obtained. In addition, the shape is substantially spherical.

Then, using the electrode composition 28 for electrodes obtained above, a solar cell element 28 having the structure shown in Fig. 6 was produced. The production method was the same as that of Example 24 to Example 27 except that the light-receiving surface electrode was not formed. Furthermore, The calcination conditions were set to a maximum temperature of 800 ° C and a holding time of 10 seconds.

<Example 29>

In the example 28, the solar cell element 29 was produced in the same manner as in Example 28 except that the firing conditions at the time of electrode formation were changed from the maximum temperature of 800 ° C to 10 seconds to the maximum temperature of 850 ° C for 8 seconds.

<Example 30>

Using the electrode composition 28 for electrodes obtained above, a solar cell element 30 having the structure shown in Fig. 7 was produced. The manufacturing method was the same as that of Example 24 except that the n-type germanium substrate was used as the substrate to be the substrate, and the light-receiving surface electrode, the via hole, and the via electrode were not formed. Further, the calcination conditions were set to a maximum temperature of 800 ° C and a holding time of 10 seconds.

<Example 31>

In the same manner as in Example 5 except that the glass particles were changed from the glass G01 particles to the glass G03 particles in Example 5, the electrode composition 31 for an electrode was prepared. Using the electrode composition 31 for an electrode, a solar cell element 31 having the configuration shown in Fig. 7 was produced in the same manner as in Example 30.

<Example 32>

In the same manner as in Example 12 except that the glass particles were changed from the glass G01 particles to the glass G03 particles in Example 12, the electrode composition 32 for electrodes was prepared. Using the electrode composition 32, a solar cell element 32 having the configuration shown in Fig. 7 was fabricated in the same manner as in Example 30.

<Comparative Example 1>

In the preparation of the adhesive composition for an electrode in Example 1, no use was contained. The electrode composition C1 for an electrode was prepared in the same manner as in Example 1 except that the copper alloy particles of phosphorus and the particles containing tin were changed so as to have the composition shown in Table 1.

The solar cell element C1 was produced in the same manner as in Example 1 except that the electrode composition C1 for the electrode containing no phosphorus-containing copper alloy particles and tin-containing particles was used.

<Comparative Example 2 to Comparative Example 4>

Phosphorus-containing copper alloy particles having different phosphorus contents were used, and the electrode composition C2 to electrode adhesive composition C4 having the composition shown in Table 1 was prepared without using tin-containing particles.

The solar cell element C2 to the solar cell element C4 were produced in the same manner as in Comparative Example 1, except that the electrode composition C2 to the electrode composition C4 for the electrode were used.

<Comparative Example 5>

In the preparation of the electrode composition for an electrode in Example 1, copper particles (purity: 99.5%, particle diameter (D50%): 5.0 μm, content: 39.9 parts) were used instead of the phosphorus-containing copper alloy particles, and The electrode composition C5 for an electrode was prepared in the same manner as in Example 1 except that the components were changed in the manner of the composition shown in the above.

The solar cell element C5 was produced in the same manner as in Comparative Example 1, except that the electrode composition C5 for the electrode was used.

<Comparative Example 6>

In the example 24, the electrode composition 1 for the electrode was changed to the electrode composition C1 for the electrode obtained above, and the electrode for collecting the light-receiving surface and the via hole were formed. A solar cell element C6 was produced in the same manner as in Example 24 except for the electrode and the back electrode.

<Comparative Example 7>

In the example 28, the solar cell element C7 was produced in the same manner as in Example 28 except that the electrode composition 28 for the electrode was changed to the electrode composition C1 for the electrode obtained above.

<Comparative Example 8>

In the example 30, the solar cell element C8 was produced in the same manner as in Example 30 except that the electrode composition 28 for the electrode was changed to the electrode composition C1 for the electrode obtained above.

<evaluation>

The solar cell element produced was evaluated as WXS-155S-10 manufactured by Wacom Electric Co., Ltd. as artificial daylight, and IV CURVE TRACER MP-160 (manufactured by EKO INSTRUMENT Co., Ltd.) as a current-voltage (IV) evaluation tester. The measuring devices are combined and carried out. Jsc (short circuit current), Voc (open circuit voltage), FF (fill factor), and Eff (conversion efficiency) indicating the power generation performance of the solar cell are based on JIS-C-8912, JIS-C-8913, and JIS-, respectively. C-8914 was obtained by measurement. In the solar cell element of the double-sided electrode structure, the obtained measured values were converted into the relative values of 100.0 as measured values of Comparative Example 1 (solar battery element C1), and are shown in Table 2. Further, in Comparative Example 2, the electrical resistivity of the electrode was increased due to oxidation of the copper particles, and it was impossible to evaluate.

Furthermore, a cross section of the light-receiving surface electrode formed by firing the prepared electrode composition by observation was observed with a scanning electron microscope Miniscope TM-1000 (manufactured by Hitachi, Ltd.) at an acceleration voltage of 15 kV, and the inside of the electrode was examined. The Cu-Sn alloy phase, the presence or absence of the Sn-PO glass phase, and the formation site of the Sn-PO glass phase. The results are also shown in Table 2.

As is clear from Table 2, in Comparative Examples 3 to 5, the power generation performance was deteriorated as compared with Comparative Example 1.

This case can be considered as follows, for example. In Comparative Example 4, it is considered that since the particles containing tin are not contained, the mutual formation of the tantalum substrate and the copper is generated during the calcination. Diffusion, the pn junction characteristics in the substrate deteriorate. Further, in Comparative Example 5, it is considered that pure copper (phosphorus content is 0% by mass) is used because the phosphorus-containing copper alloy particles are not used, so that the copper particles are oxidized before the reaction with the tin-containing particles in the calcination, and are not formed. The Cu-Sn alloy phase and the resistance of the electrode increase.

On the other hand, the power generation performance of the solar cell element produced in Examples 1 to 23 was substantially the same as the measured value of the solar cell element of Comparative Example 1. In particular, the solar cell element 21 to the solar cell element 23 exhibit high electric power generation performance although the electrode composition for the electrode is calcined at a relatively low temperature (620 ° C to 650 ° C). Further, as a result of observing the structure, a Cu-Sn alloy phase and a Sn-P-O glass phase were present in the light-receiving electrode, and a Sn-P-O glass phase was formed between the Cu-Sn alloy phase and the tantalum substrate.

Then, among the solar cell elements having the structure of FIG. 5 among the solar cell elements of the reverse contact type, the obtained measured values were converted into the relative values of 100.0 as the measured values of Comparative Example 6, and are shown in Table 3. Further, the results of observing the cross section of the light-receiving surface electrode are also shown in Table 3.

According to Table 3, the solar cells produced in Examples 24 to 27 The cell element showed substantially the same power generation performance as the solar cell element of Comparative Example 6. Further, as a result of observing the structure, a Cu-Sn alloy phase and a Sn-P-O glass phase were present in the light-receiving electrode, and a Sn-P-O glass phase was formed between the Cu-Sn alloy phase and the tantalum substrate.

Then, among the solar cell elements having the structure of FIG. 6 among the solar cell elements of the reverse contact type, the obtained measured values were converted into the relative values of 100.0 as measured values of Comparative Example 7, and are shown in Table 4. Further, the results of the cross section of the electrode formed by firing the prepared electrode composition in the back electrode were also shown in Table 4.

According to Table 4, the solar cell elements produced in Examples 28 to 29 exhibited substantially the same power generation performance as the solar cell elements of Comparative Example 7. Further, as a result of observing the structure, among the back electrodes, the Cu-Sn alloy phase and the Sn-PO glass phase were present in the electrode formed by firing the prepared electrode composition, and the Sn-PO glass phase was formed. Between the Cu-Sn alloy phase and the tantalum substrate.

Then, among the solar cell elements having the structure of FIG. 7 among the solar cell elements of the reverse contact type, the obtained measured values are converted into ratios. The measured value of Comparative Example 8 is shown in Table 5 as a relative value of 100.0. Further, the results of the cross section of the electrode formed by firing the prepared electrode composition in the back electrode were also shown in Table 5.

It can be seen that the solar cell elements fabricated in Examples 30 to 32 exhibited substantially the same power generation performance as the solar cell elements of Comparative Example 8. Further, as a result of observing the structure, among the back electrodes, the Cu-Sn alloy phase and the Sn-PO glass phase were present in the electrode formed by calcining the prepared electrode composition, and the Sn-PO glass phase was formed. Between the Cu-Sn alloy phase and the tantalum substrate.

1‧‧‧Semiconductor substrate

2‧‧‧n ⁺ type diffusion layer

3‧‧‧Anti-reflective film

4‧‧‧Photon surface electrode

5‧‧‧Electrical electrodes

6‧‧‧Output electrode

7‧‧‧p ⁺ diffusion layer

8‧‧‧Accepting the surface of the light collecting electrode

9‧‧‧through hole electrode

10, 11‧‧‧ back electrode

12‧‧‧n type test substrate

13‧‧‧Anti-reflective film

Fig. 1 is a schematic cross-sectional view showing an example of a lanthanide solar cell element of the present invention.

2 is a schematic plan view showing an example of a light receiving surface of a lanthanide solar cell element of the present invention.

3 is a schematic plan view showing an example of a back surface of a lanthanide solar cell element of the present invention.

Figure 4 is a rear view showing the reverse contact type solar cell element of the present invention. A schematic plan view of an example of a side electrode structure.

FIG. 5 is a schematic perspective view showing an example of a cross-sectional configuration of AA of FIG. 4 in the reverse contact solar cell element of the present invention.

FIG. 6 is a schematic perspective view showing an example of a cross-sectional configuration of AA of FIG. 4 in the reverse contact solar cell element of the present invention.

FIG. 7 is a schematic perspective view showing an example of a configuration of a cross-sectional view taken along line AA of FIG. 4 of the reverse contact solar cell element of the present invention.

1‧‧‧Semiconductor substrate

2‧‧‧n ⁺ type diffusion layer

3‧‧‧Anti-reflective film

4‧‧‧Photon surface electrode

5‧‧‧Electrical electrodes

6‧‧‧Output electrode

7‧‧‧p ⁺ diffusion layer

Claims (10)

A solar cell element comprising an electrode formed by calcining an electrode composition applied to an electrode on a substrate, wherein the electrode composition comprises: copper alloy particles containing phosphorus, particles containing tin, glass particles, The solvent and the resin, the electrode includes a Cu-Sn alloy phase and a Sn-PO glass phase. The solar cell element according to the first aspect of the invention, wherein the phosphorus-containing copper alloy particles have a phosphorus content of 6 mass% or more and 8 mass% or less. The solar cell element according to the first or second aspect of the invention, wherein the tin-containing particles are at least one selected from the group consisting of tin particles and tin alloy particles having a tin content of 1% by mass or more. The solar cell element according to claim 1, wherein the glass particles have a glass softening point of 650 ° C or less and a crystallization starting temperature of more than 650 ° C. The solar cell element according to the first aspect of the invention, wherein the content of the tin-containing particles when the total content of the phosphorus-containing copper alloy particles and the tin-containing particles is 100% by mass is 5 The mass% or more and 70% by mass or less. The solar cell element according to claim 1, wherein the electrode composition for an electrode further comprises silver particles. The solar cell element according to claim 6, wherein the content ratio of the silver particles when the total content of the phosphorus-containing copper alloy particles, the tin-containing particles, and the silver particles is 100% by mass is 100% by mass. It is 0.1% by mass or more and 10% by mass or less. The solar cell element according to the sixth aspect or the seventh aspect, wherein the total content of the phosphorus-containing copper alloy particles, the tin-containing particles, and the silver particles is 70% by mass or more and 94% by mass or less. The content of the glass particles is 0.1% by mass or more and 10% by mass or less, and the total content of the solvent and the resin is 3% by mass or more and 29.9% by mass or less. The solar cell element according to claim 1, wherein the Sn-P-O glass phase is disposed between the Cu-Sn alloy phase and the tantalum substrate. A solar cell comprising: the solar cell element according to any one of claims 1 to 9; and a bonding wire disposed on an electrode of the solar cell element.