TWI499353B - Mask - Google Patents

Description

Mask

The present invention relates to the technical field of a manufacturing process of an organic EL display device, particularly a mask which forms a shadow on a substrate.

Now, an organic EL (Electro Luminescence) display device is a display device which excites an organic EL film by a voltage applied to an electrode and converts the energy after excitation into light. Since the organic EL film itself does not generate heat and emits light, it does not require a backlight, so that it can be more energy-saving and thinner.

In the manufacturing process of the organic EL display device, a substrate such as a glass substrate on which wiring is disposed on the surface is carried in the vacuum processing apparatus, and the photomask is placed on the substrate.

The mask is configured to prevent the wiring formed on the glass substrate from being covered by film formation. The mask and the substrate are aligned by mechanically observing the mask and the alignment mark provided on the substrate by a CCD camera or the like, and then performing electrostatic CVD, vapor deposition, sputtering, or the like to perform the anode electrode and the organic layer. Film formation of an EL film, a protective film, or the like.

On the glass substrate, a dicing street for dividing the glass substrate is provided. After film formation, it is divided along the cutting path.

Now, this mask is mainly made of ceramics such as alumina (Al ₂ O ₃ ).

In the case of using a shadow mask portion of a mask such as alumina, there will be In the vicinity of the shadow mask portion on the substrate, the thickness of the mask of the alumina causes the reaction plasma to be blocked, and the film cannot be formed, and becomes closer to the center between the shadow mask portions. The problem that the film thickness of the film is thinner.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-335123

The present invention has been developed in order to solve the above-described problems of the prior art, and an object thereof is to provide a photomask which can be uniformly formed by a shadow mask portion which is thinner than the conventional one.

In order to solve the above problems, the photomask of the present invention is a mask that is disposed on the surface of the substrate and forms a non-film formation region in the film formation object, and has a strip-shaped or sheet-like shadow mask portion; and is attached to the shadow The tension generating portion of the other end portion of the mask portion applies tension between both ends of the shadow mask portion by the tension generating portion.

In the reticle of the present invention, the shadow mask portion is stretched in the direction of the tension by the tension generating portion to generate a recovery force to return to the original length.

In the reticle of the present invention, the tension generating portion is configured to move in the direction in which the tension occurs in the frame body.

In the reticle of the present invention, the tension generating portion is configured to have a first holding member that is in contact with a single surface of the shadow mask portion; and The second holding member that is in contact with the surface on the opposite side of the shadow mask portion has one of a concave portion shape and a convex portion shape that are fitted to each other, and one of the recessed portion and the convex portion is provided on the first sandwiching member, and the other is disposed on the second clamp. The holding member holds the shadow mask by the first and second clamping members.

In the reticle of the present invention, the tension generating portion has a weight, and the shadow mask portion is fixed at one end, and the other end is connected to the weight, and the tension is generated by the weight of the weight.

In the photomask of the present invention, the shadow mask portion has a thickness of 0.05 mm or more and less than 2.0 mm.

According to the present invention, the film formation of the organic EL film can be performed more uniformly in the peripheral portion of the shadow mask portion on the substrate.

Reference numeral 10 in Fig. 1 denotes a vacuum processing apparatus 10 having a film forming chamber 9, a vacuum exhausting device 11, and a gas introducing device 12, and when the inside of the film forming chamber 9 is vacuumed by the vacuum exhausting device 11, After the exhaust, the gas introduction device 12 is actuated, and when the reaction gas is introduced, the inside of the film formation chamber 9 can be made into a reaction gas atmosphere having a desired pressure.

Inside the film forming chamber 9, a substrate supporting table 7 on which the substrate 6 is placed and a mask 1 are disposed.

In the inside of the film forming chamber 9, a film forming means such as an RF electrode (spraying plate) 13 is disposed, and the gas introducing device 12 is actuated to introduce the gas into the gas. Inside the film chamber 9, a film is formed on the surface of the substrate 6 and the photomask 1 by plasma CVD.

The mask 1 has a strip-shaped or sheet-like shadow mask portion 2, a fixing member 3, a conversion member 4, a weight 5, and a frame 8 made of metal or a heat resistant resin. Regarding the thickness of the reticle, it is preferable to consider the influence of the film-forming substance flying in the vicinity of the opening of the reticle on the slanting component, and it is preferable to be thin. However, the thickness of the shadow mask portion 2 is preferably 0.05 mm or more and less than 2.0 mm in consideration of the extension of the mask, the durability, and the possibility of cleaning. As the material of the shadow mask portion 2, for example, a low-expansion alumina can be used as the metal, and a metal having corrosion resistance and heat resistance can be used. Moreover, it is not limited to a metal or a heat resistant resin, if it has corrosion resistance and heat resistance, and is formed in the strip shape or the sheet shape. For example, a film glass, quartz, or the like which is corrosion-resistant can also be used. It is also possible to use a film glass which is subjected to corrosion resistance and has a thickness of 50 to 200 μm.

The fixing member 3 is formed, for example, by a hole formed in the frame body 8 and a screw that can be screwed into the hole, and a hole is provided at one end of the shadow mask portion 2 by screwing the screw into the shadow mask portion. The hole of 2 is used to fix the shadow mask portion 2 to the frame 8.

One end of the shadow mask portion 2 is held by the fixing member 3 and extends in the horizontal direction. The conversion member 4 is fixed to the side of the frame body 8 on the side opposite to the side on which the frame body 8 of the fixing member 3 is disposed. The conversion member 4 has a corner portion that is rounded and curved downward from the horizontal direction. Therefore, when the weight 5 is attached to the other end of the shadow mask portion 2, the shadow mask portion 2 is horizontally shifted from the conversion member 4. The rounded corners are in contact and are transformed to face vertically downward.

The shadow mask portion 2 is heated and extended by applying heat by discharge, and is extended by the shadow mask portion 2 drawn by the weight 5 so that the plasma does not enter between the substrate 6 and the shadow mask portion 2. The amount will be greater than the amount of heat generated by the extension to determine the weight of the counterweight 5.

Since the shadow mask portion 2 is pulled by the weight 5, it is not loosened and is in close contact with the surface of the substrate 6.

Since the shadow mask portion 2 is in close contact with the substrate 6 in a state where tension is applied, when the substrate 6 is formed into a film, the film forming material does not enter between the shadow mask portion 2 and the substrate 6.

The substrate support table 7 on which the substrate 6 is placed is relatively moved to the mask 1 to be mechanically aligned, and after the alignment is performed, gas is introduced into the film forming chamber 9 from the gas introduction device 12 to make electricity. When the slurry is formed and film formation is performed by the plasma CVD method, a film is formed on the surface of the substrate 6 which is not covered by the shadow mask portion 2. In the present invention, the film formation method is not particularly limited, and a conventional technique such as sputtering, CVD, or vapor deposition can be applied.

The alignment of the substrate 6 with the photomask 1 can be performed by observing the alignment mark by a CCD camera or the like without using a mechanical method.

2(a) is a plan view of the photomask 1 and the substrate 6. A light-emitting region 20 is formed in a portion of the surface of the substrate 6 where the mask 1 is not disposed.

Although not shown in the vertical direction, a dicing street 37 is provided between each of the light-emitting regions 20 on the substrate 6.

2(b) is an enlarged view of the light-emitting region 20. In the light-emitting region 20, a transparent electrode 21 is formed on the surface of the substrate 6, and is transparent. On the surface of the electrode 21, an organic EL film 22 is laminated. Although not shown, a cathode is formed on the surface of the organic EL film 22, and a protective film is formed on the surface of the cathode.

After the protective film is formed, when the substrate 6 is cut along the dicing street 37, an organic EL element is produced.

Fig. 3 (a) is a plan view of the first holding member 31 having an annular recess and having a ring shape, and Fig. 3 (b) is a cross-sectional view taken along line AA of Fig. 3, and Fig. 3 (b) is a portion of the shadow mask portion 2 Fig. 3(c) is a plan view of the second holding member 32 having a ring-shaped convex portion and having a ring shape, as shown in Fig. 3(c). The CC line cuts the sectional view.

Fig. 4 shows another example of the photomask of the present invention, and the vacuum processing apparatus 10 is not shown. The mask 50 has a strip-shaped shadow mask portion 2 which is made of metal or a heat-resistant resin and which can be stretched and bent, and has a frame body 34 which is thicker than the shadow mask portion 2 and has rigidity; and A clamping device 36 composed of a rigid first clamping member 31, a second clamping member 32, and a set screw 33.

Here, the mask screw holes 43 are formed at both ends of the shadow mask portion 2, and the frame holes 47 are provided on one side and the opposite side of the frame body 34, respectively.

In the frame hole 47 of both sides of the frame body 34 and the periphery thereof, the first sandwiching member 31 having the first fitting shape 42 formed by the annular recessed portion and the shadow mask portion 2 are formed with the mask a portion of the screw hole 43 and a second clamping member having a second fitting shape 46 formed by an annular convex portion 32. In this order, the laminated bodies are arranged side by side from the frame 34, and the stacked members are superposed at positions where the holes communicate with each other, and the shadow mask portion 2 is placed across the opening of the frame 34.

Alternatively, the first sandwiching member 31 having the first fitting shape 42 formed by the annular convex portion, the portion of the shadow mask portion 2 where the mask screw hole 43 is formed, and the second portion formed by the concave portion In this order, the second holding members 32 having the downwardly fitting shape 46 are arranged in a stacked manner from the side of the frame 34, and the respective members to be stacked are overlapped at positions where the holes communicate with each other.

That is, the first holding member 31 is formed on the upward facing surface, and the first fitting shape 42 having a concave shape or a convex shape is provided, and the concave shape or the convex shape is formed on the downward facing surface. The second clamping member 32 of the second fitting shape 46 opposite to the first clamping member 31 is disposed on the first clamping member 31.

The first fitting shape 42 and the second fitting shape 46 may have a concave shape and a convex shape, and the first fitting shape 42 and the second fitting shape 46 may be fitted, but here The first fitting shape 42 is a concave shape, and the second fitting shape 46 is a convex shape.

The first holding member 31 is disposed on the periphery of the frame hole 47 on one side of the frame body 34 and on the periphery of the frame hole 47 on the opposite side.

The first holding member 31 is provided with a first fixing hole 41, and similarly, the second holding member 32 is provided with a second fixing hole 45.

As described above, the mask screw holes 43 are provided at both ends of the shadow mask portion 2, and the first holding member is sequentially superposed from the lower side of the frame hole 47 of the frame body 34 and the area including the frame hole 47. 31. The end of the shadow mask portion 2 When the second holding member 32 is used, both ends of the shadow mask portion 2 are sandwiched by the first holding member 31 and the second holding member 32.

The first clamping member 31, the end portion of the shadow mask portion 2, and the second clamping member 32 are attached to the frame body 34, and the first fixing hole 41, the mask screw hole 43, and the second fixing hole 45 are located. Above the frame hole 47, each of the holes 41, 43, 45, 47 communicates with each other to form one screw hole.

A screw groove is provided in each of the holes 41, 43, 45, 47, and a fixing screw 33 is screwed into the screw hole.

In this state, the fixing screw 33 penetrates the second holding member 32, the end portion of the shadow mask portion 2, and the first holding member 31 from above, and the lower end portion of the fixing screw 33 is inserted into the frame 34 to be fixed. The spiral 33 is stationary with respect to the frame 34, and the position of the mask screw hole 43 of the shadow mask portion 2 does not move to the frame 34.

Therefore, the first fitting shape 42 and the second fitting shape 46 are inserted with the fixing screws 33 at the ejector screw holes 43 at both ends thereof, and the position of the reticle screw holes 43 is stationary on the frame 34, and is in the first inlay. When the one of the portions of the mask screw holes 43 of the shadow mask portion 2 is disposed between the combined shape 42 and the second fitting shape 46, when the first fitting shape 42 and the second fitting shape 46 are fitted, Then, a part of the shadow mask portion 2 is deformed along the shape of the first fitting shape 42 and the second fitting shape 46, and the shadow mask portion 2 is extended, and the force of the extended portion is restored to the original length. The shadow mask portion 2 located on the opening of the frame 34 applies a force pulled from both ends so that it is not loosely stretched.

In other words, when screwing the fixing screw 33 in the communicating hole, it comes with the frame When the screw holes are engaged, when the first clamping member 31 that has been laminated, the second clamping member 32, and the shadow mask portion 2 are fixed by the screw head of the fixing screw, the first clamping member is fixed 31 and the second holding member 32 increase the shadow mask portion 2, and apply tension to the shadow mask portion 2.

Therefore, the second clamping member 32, the first clamping member 31, the fixing screw 33, and the frame hole 47 of the frame 34 are fixing means for fixing one end of the shadow mask portion 2, and further, the fixing screw 33, and The frame hole 47 of the frame body 34 is a tension generating portion that is attached to the other end portion of the shadow mask portion 2.

FIG. 5 is a plan view of the photomask 50 and the substrate 6.

Alternatively, the shadow mask portion 2 can be fixed to the frame body 34 without the fixing screw 33, and both ends of the shadow mask portion 2 can be fixed to the frame body 34, and the first clamping member 31 and the second member can be used. The holding member 32 sandwiches between the fixed ends and fits them to extend the shadow mask portion 2 to generate tension.

Further, one end of the shadow mask portion 2 may be one end of the shadow mask portion 2 by inserting the fixing screw 33 into the mask screw hole 43 and sandwiched by the first holding member 31 and the second holding member 32. At the other end, it is fitted to generate a pulling force.

In the above description, the film forming means is disposed above and the substrate is placed below, and the mask means is disposed therebetween. However, the present invention is not limited thereto, and the film forming means may be disposed below and the substrate may be disposed. It is disposed above and the reticle means is disposed between these. Alternatively, the film forming means and the substrate are placed in the vertical direction, and the mask means is disposed between them, and the tension is applied in the downward direction.

In the above description, the first sandwiching member 31 and the second sandwiching member 32 are shown as being annular. However, the first sandwiching member 31 and the second sandwiching member 32 are not limited to the annular shape, and one of the concave portions and the other is the convex portion. The one fitting shape 42 and the second fitting shape 46 may be other shapes such as a rectangle. Further, the shadow mask portion 2 may be sandwiched between the concave portion and the convex portion, and the shadow mask portion 2 may be fixed while applying tension to the shadow mask portion 2.

Moreover, the method of applying tension to the shadow mask portion 2 may fix the other end of the shadow mask portion 2 whose one end is fixed to a moving member that is movable to the frame body, and move the moving member to the frame body. A tension is applied to the shadow mask portion 2. For example, the position of the moving member to which the other end of the shadow mask portion 2 is fixed may be applied to the shadow mask by moving the tension to the shadow mask portion 2 by the screw. Department 2.

In the above example, a tension member composed of the first holding member 31 and the second holding member 32 is provided at each end of each of the shade mask portions 2, but one tension member may be fixed. The shadow mask portion 2, in turn, causes it to exert a pulling force.

The mask 81 of FIG. 6 is an example in which the mask 81 has a plurality of strip-shaped shadow mask portions 2 and a frame 60.

The thickness of the frame 60 is thicker than that of the shadow mask portion 2, and has rigidity. One side of the frame body 60 and one side opposite to the one side of the frame body 60 are respectively disposed with a mounting portion 61 having a thickness smaller than that of the frame body 60.

The length of the shadow mask portion 2 is set to be longer than the distance between one side and the opposite side of the frame 60 on which the mounting portion 61 is disposed, and one end of the shadow mask portion 2 is attached to one side of the frame 60. Part 61, another The end is located on the mounting portion 61 on the opposite side of the frame 60. Therefore, the shadow mask portion 2 is disposed so as to straddle the opening 69 of the casing 60.

A holding device 63 is disposed on each of the mounting portions 61 of the two sides.

The clamping device 63 has a first clamping member 64 and a second clamping member 65. The first clamping member 64 is formed with a plurality of first fixing holes, and the second clamping member 65 is formed with a plurality of first members. Two fixing holes.

8(a) and 8(b) are enlarged views showing the side surface of the holding device 63.

As shown in FIG. 8(a), the plurality of first fixing holes of the first clamping member 64 and the plurality of second fixing holes of the second clamping member 65 are configured to dispose the second clamping member 65 When the first clamping member 64 is on, each of the first fixing holes and each of the second fixing holes can communicate in a one-to-one manner, and as shown in FIG. (b), the fixing screws 67 can be inserted from the second fixing holes while making While rotating, the second holding member 65 is pressed against the first holding member 64 through the mask screw hole 43 and the first fixing hole.

9(a) to 9(c) are diagrams for explaining the sequence when the shadow mask portion 2 is attached to the holding device 63. First, a plurality of shadow mask portions are removed in a state where the fixing screw 67 is removed. The ends of the shadow mask portion 2 are disposed in a pair between the first holding member 64 of the one holding device 63 and the second holding member 65 without overlapping. A first fixing hole and a second fixing hole of one of the connected groups, and a position between the first fixing hole and the second fixing hole of the other group which are adjacent to each other and which are in one-to-one communication.

In this example, since the mask screw hole 43 is not used, the mask screw hole 43 may not be formed in the shadow mask portion 2.

Fig. 9(a) shows a state in which the shadow mask portion 2 is placed on the first holding member 64, and reference numeral 74 denotes a first fixing hole, and reference numeral 75 denotes a second fixing hole. The second fixing hole 75 is a through hole.

Next, the second holding member 65 is placed on the end portion of the shadow mask portion 2, the first fixing hole 74 is communicated with the second fixing hole 75, and the fixing screw 67 is inserted from the second fixing hole 75 while being The rotation side passes the mask screw hole 43 and the first fixing hole 74 to press the second clamping member 65 against the first clamping member 64, and the shadow mask portion 2 is sandwiched by the second clamping member 65 and the first clamping member 65. The member 64 is clamped.

The first fitting portion 71 and the second fitting portion 72 are formed on the mutually facing surfaces of the first sandwiching member 64 and the second sandwiching member 65, respectively. One of the first fitting portion 71 and the second fitting portion 72 has a concave shape and the other has a convex shape, and the first fitting portion 71 and the second fitting portion 72 are formed to be fitted to each other.

A screw groove is provided in the first fixing hole, and the fixing screw 67 is screwed when the both ends of the shadow mask portion 2 are sandwiched therebetween, and the second fitting portion 72 is fitted to the first fitting portion 71 and pressed, and the shadow is formed. Both ends of the mask portion 2 are fixed to the holding device 63, respectively.

Fig. 9(b) shows this state. The first fitting portion 71 and the second fitting portion 72 are located outside the opening 69 of the frame 60, and the portion between the clamped portions of the shadow mask portion 2 is spanned across the opening 69. Configured.

The gripping device 63 is disposed to contact or reduce the gap between the frame 60, but even in the fitted state, there is a slack in the portion of the opening 69 of the shadow mask portion 2. .

The holding device 63 is provided with a tension generating portion. When the tension is applied to one end and the other end of the shadow mask portion 2, and the end portion of the shadow mask portion 2 is moved so that the distance between the end portions becomes large, the shadow light is applied. The slack portion of the cover portion 2 disappears, and when the holding device 63 is stationary to maintain the state, a film formed by the shadow mask portion 2 can be formed.

Here, the tension generating portion has a tension screw hole for the mask opening on the surface in contact with the frame 60 and the opposite side of the gripping device 63, and a tension screw 68 disposed in the tension screw hole. A screw groove is provided in the tension screw 68.

The frame 60 is placed close to the frame 60, and the tension screw 68 is screwed in the direction of the frame 60 from the opening on the opposite side, and the tip end of the tension screw 68 is brought into contact with the frame 60. Fig. 9(b) and Fig. 10(a) of the plan view thereof show the state.

The holding device 63 is in a state in which the frame 60 is movable. When the front end of the tension screw 68 is brought into contact with the frame 60 and the tension screw 68 is further screwed, the tension screw 68 does not face the frame. Moving in the direction of 60, the gripping device 63 moves in a direction separating from the frame 60.

The plurality of tension screws 68 are provided in the clamp device 63, and the respective tension screws 68 are screwed to separate the clamp device 63 from the frame 60 in the longitudinal direction. At this time, since the slack portion of each of the shadow mask portions 2 on the opening 69 of the casing 60 disappears and then extends, When the shadow mask portion 2 is extended, the screwing operation of the tension screw 68 is completed.

Fig. 9(c), Fig. 10(b) of the plan view thereof, and Fig. 7 of the entire plan view show the state, and the gripping device 63 caused by the screwing operation of the tension screw 68 is held by the gripping device 63. A gap S is formed between the device 63 and the frame 60, and each of the shadow mask portions 2 is stretched without being loosened in the opening 69, and the tensioning screw 68 is pressed against the frame 60 by the extending restoring force of the shadow mask portion 2. Thereby, the holding device 63 is fixed to the frame 60.

Further, in Fig. 7, in the holding device 63 at one end of the shadow mask portion 2 and the holding device 63 at the other end, the tension of one of the holding devices 63 is screwed in by the screw 68, but it may also be a screw Both of the holding devices 63 that hold the ends of the shadow mask unit 2 are moved by the tensioning screws 68 of the holding devices 63 to be separated from the casing 60.

With respect to the holding device 63, since the first fitting portion 71 and the second fitting portion 72 are formed closer to the frame 60 than the first fixing hole 74 and the second fixing hole 75, the fixing portion 63 can be fixed. The shadow mask portion 2 is disposed further inside the position of the screw 67, and the shadow mask portion 2 is sandwiched and fixed by the first fitting portion 71 and the second fitting portion 72.

The mask 82 of Fig. 11 has a shadow mask portion 52 which is formed of a thin metal foil formed in a lattice shape, a resin foil, or the like, and has flexibility, and has a rectangular shape on the outer circumference, but has A plurality of portions having the same shape as the above-described shadow mask portion 2.

Further, the shadow mask portion 52 sandwiches the portion near the two sides of the parallel shape of the four sides by the two holding devices 63, as described above, by the first fitting The portion 71 and the second fitting portion 72 fix both ends of the shadow mask portion 52, and the tension of at least one of the holding devices 63 is rotated by the screw 68. As shown in Fig. 12, the holding device 63 is moved toward the frame. The direction in which the body 60 is separated moves so that the shadow mask portion 52 extends, and no slack occurs in the opening 69.

The clamp device 63 is pressed and fixed to the frame 60.

As such, the present invention is not limited to the use of the reticle of the elongated shadow mask portion 2.

One end of the plurality of strip-shaped shadow mask portions 2 is fixed by the above-described holding device 63 having the tension screw 68, but the width of the shadow mask portion 2 which is formed in a strip shape may be slightly longer and The mounting device having the tension screw 68 is pulled for each of the shadow mask portions 2.

Furthermore, in the above example, the holding device 63 is attached to each of the two ends of the shadow mask portions 2, 52. However, the shadow mask portions 2, 52 may be fixed to the frame 60 at one end, and The holding device 63 is attached to one end, and the tensioning device 68 moves the holding device 63 in a direction separating from the casing 60 to eliminate the slack of the shadow mask portions 2, 52.

1, 50‧‧‧ mask

2‧‧‧Shadow Mask Department

3‧‧‧Fixed components

4‧‧‧Transformation components

5‧‧‧weight

6‧‧‧Substrate

7‧‧‧Substrate support table

8, 34, 60‧‧‧ frames

9‧‧‧ Filming room

10‧‧‧Vacuum treatment unit

11‧‧‧Vacuum exhaust

12‧‧‧ gas introduction device

13‧‧‧RF electrode (spray plate)

20‧‧‧Lighting area

21‧‧‧Transparent electrode

22‧‧‧Organic EL film

31‧‧‧First clamping member

32‧‧‧Second clamping member

33‧‧‧ fixing screws

36, 63‧‧‧ clamping device

37‧‧‧scribe line

Fig. 1 is a cross-sectional view of a reticle that applies tension to a shadow mask portion by a weight of the present invention disposed in a film forming apparatus.

Fig. 2 is a view showing a first example of the present invention, wherein (a) is a plan view of a photomask for applying tension to a shadow mask portion by a weight, and (b) is an enlarged view of a light-emitting region on the substrate.

Figure 3 is a view showing a photomask according to a second example of the present invention, wherein (a) is a plan view of the first holding member, (b) is a plan view of the shadow mask portion, and (c) is A plan view of the second holding member, (d) is a cross-sectional view taken along line AA of the first holding member, (e) is a sectional view taken along the line BB of the shadow mask portion, and (f) is a second holding member. Cut the CC line section.

Figure 4 is a cross-sectional view showing the reticle of the present invention which applies tension to the shadow mask portion by means of two holding means.

Figure 5 is a plan view showing the reticle of the present invention which applies tension to the shadow mask portion by means of two holding means.

Fig. 6 is a plan view showing a photomask according to a third example of the present invention, wherein (a) is a plan view before the relaxation disappears, and (b) is a cross-sectional view taken along line D-D.

Fig. 7 is a plan view showing a photomask according to a third example of the present invention, wherein (a) is a plan view showing a state in which relaxation has disappeared, and (b) is a cross-sectional view taken along line E-E.

Fig. 8(a) is a side view showing the separation of the first and second holding members, and Fig. 8(b) is a side view showing the two holding members in close contact with each other.

9(a) to 9(c) are side views for explaining a mounting device and a shadow mask portion which form the order of the photomask of the third example.

Fig. 10 is a plan view showing a portion of the mounting device and the shadow mask portion, wherein (a) is a state before the slack disappears, and (b) is a state after the slack disappears.

Fig. 11 is a plan view showing a fourth embodiment of the present invention, wherein (a) is a plan view before the slack disappears, and (b) is a cross-sectional view taken along line F-F.

Fig. 12 is a plan view showing a fourth embodiment of the present invention, wherein (a) is a plan view showing a state in which slack has disappeared, and (b) is a cross-sectional view taken along line G-G.

1‧‧‧Photomask

2‧‧‧Shadow Mask Department

3‧‧‧Fixed components

4‧‧‧Transformation components

5‧‧‧weight

6‧‧‧Substrate

7‧‧‧Substrate support table

8‧‧‧ frame

9‧‧‧ Filming room

10‧‧‧Vacuum treatment unit

11‧‧‧Vacuum exhaust

12‧‧‧ gas introduction device

13‧‧‧RF electrode (spray plate)

Claims (3)

A photomask is disposed on a surface of a substrate, and forms a photomask in a non-film formation region on the film formation object, and has a stripe or sheet-like shadow mask portion; and a shadow mask portion attached to the shadow mask portion a tension generating portion at the other end, the tension generating portion having: a first holding member that is in contact with a single surface of the shadow mask portion; and a second clamping that is in surface contact with the opposite side of the shadow mask portion One of the recessed portion shape and the convex portion shape in which the members are fitted to each other is provided on the first sandwiching member, and the other is provided in the second sandwiching member, and the first and second sandwiching members sandwich the aforementioned The shadow mask portion is fitted to each other by sandwiching the shadow mask portion between the concave portion shape and the convex portion shape, and tension is applied between both ends of the shadow mask portion. The reticle of the first aspect of the invention, wherein the shadow mask portion is stretched in the direction of the tension by the tension generating portion to generate a recovery force to return to the original length. The photomask of claim 1 or 2, wherein the shadow mask portion has a thickness of 0.05 mm or more and less than 2.0 mm.