TWI440728B - Adjustable fastening device - Google Patents
Adjustable fastening device Download PDFInfo
- Publication number
- TWI440728B TWI440728B TW101132557A TW101132557A TWI440728B TW I440728 B TWI440728 B TW I440728B TW 101132557 A TW101132557 A TW 101132557A TW 101132557 A TW101132557 A TW 101132557A TW I440728 B TWI440728 B TW I440728B
- Authority
- TW
- Taiwan
- Prior art keywords
- frame
- members
- adjustable
- fixing
- mask
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Description
本發明關於一種可調式固定裝置，尤指一種用以固定遮罩之可調式固定裝置。The invention relates to an adjustable fixing device, in particular to an adjustable fixing device for fixing a mask.
目前，有機發光二極體(organic light emitting diode,OLED)中的有機膜層多半採用熱蒸鍍方式鍍膜，主要選用具磁性的金屬來製作遮罩(mask)，在遮罩上蝕刻出細微的開口，於開口露出欲鍍膜的位置。蒸鍍時，以磁鐵吸引遮罩，使遮罩與欲鍍膜的基板緊密貼合，而在製作大面積遮罩時，目前是將遮罩製作成數個長條狀遮罩，再將每一條遮罩施以拉伸張力，利用遮罩上的細微開口對位，再焊接於框架上。At present, most of the organic film layers in organic light emitting diodes (OLEDs) are coated by thermal evaporation, mainly using magnetic metal to make a mask, and etching a fine mask on the mask. The opening is exposed at the opening to be coated. At the time of vapor deposition, the mask is attracted by the magnet, and the mask is closely adhered to the substrate to be coated. When a large-area mask is produced, the mask is currently formed into a plurality of long masks, and each mask is covered. The cover is stretched and tensioned by a fine opening in the mask and welded to the frame.
請參閱第1圖至第3圖，第1圖為先前技術之遮罩10固定於框架12上的俯視圖，第2圖為五種產生扭曲變形的遮罩10的示意圖，第3圖為兩種產生扭曲變形的框架12的示意圖。如第1圖所示，數個長條狀遮罩10的兩端施以拉伸張力F而分別焊接於框架12的兩側邊上。由於現行遮罩10是採用雷射點焊方式焊接於框架12上，因此焊接速度相當慢，而隨著焊接過程中遮罩10的力平衡狀態會逐漸改變，加上焊點的溫度造成膨脹，導致遮罩10會有偏移的狀況發生，進而產生扭曲變形，如第2圖所示。此外，由於每一條遮罩10 加工品質不同，且是依序焊接於框架12上的不同位置，故遮罩10的偏移會導致框架12產生不一樣的應力分佈，而產生扭曲形變，如第3圖所示。最後隨著蒸鍍次數增加，所有遮罩10可能會產生不一樣的偏移，甚至偏移量過大而無法使用。Please refer to FIG. 1 to FIG. 3 . FIG. 1 is a plan view of the mask 10 of the prior art fixed on the frame 12 , FIG. 2 is a schematic view of five kinds of masks 10 for generating distortion, and FIG. A schematic view of the frame 12 that produces a distortion. As shown in Fig. 1, both ends of the plurality of elongated masks 10 are respectively welded to the both side edges of the frame 12 by the tensile tension F. Since the current mask 10 is welded to the frame 12 by laser spot welding, the welding speed is relatively slow, and the force balance state of the mask 10 gradually changes as the welding process increases, and the temperature of the solder joint causes expansion. This causes a situation in which the mask 10 is deflected, which causes distortion, as shown in Fig. 2. In addition, due to each mask 10 The processing quality is different and is welded to different positions on the frame 12 in sequence, so that the offset of the mask 10 causes the frame 12 to have a different stress distribution, resulting in a distortion deformation, as shown in FIG. Finally, as the number of vapor depositions increases, all of the masks 10 may have different offsets, even if the offset is too large to be used.
因此，本發明的目的之一在於提供一種可調式固定裝置，其在框架上設置用以固定遮罩之可調式固定機構，以在遮罩產生偏移時對遮罩進行調整。Accordingly, it is an object of the present invention to provide an adjustable securing device having an adjustable securing mechanism for securing a mask on the frame to adjust the mask as the mask is deflected.
根據一實施例，本發明之可調式固定裝置用以固定一遮罩，且可調式固定裝置包含一框架以及二可調式固定機構。二可調式固定機構設置於框架之相對二側，且每一個可調式固定機構包含一座體、二支撐件、一固定件以及二第一調整件。座體設置於框架上。二支撐件可移動地設置於座體之相對二側。固定件之二端分別固定於二支撐件上，且遮罩固定於固定件上。二第一調整件對應二支撐件設置於座體之相對二側，且每一個第一調整件分別用以驅動二支撐件的其中之一相對框架前後移動。According to an embodiment, the adjustable fixing device of the present invention is used for fixing a mask, and the adjustable fixing device comprises a frame and two adjustable fixing mechanisms. The two adjustable fixing mechanisms are disposed on opposite sides of the frame, and each of the adjustable fixing mechanisms comprises a body, two supporting members, a fixing member and two first adjusting members. The seat is placed on the frame. The two support members are movably disposed on opposite sides of the base body. The two ends of the fixing member are respectively fixed on the two supporting members, and the mask is fixed on the fixing member. The two first adjusting members are disposed on opposite sides of the base body, and each of the first adjusting members is configured to drive one of the two supporting members to move back and forth relative to the frame.
於此實施例中，每一個可調式固定機構更可包含複數個第二調整件，用以將座體固定於框架上。每一個第二調整件可分別相對框架上下移動，以驅動座體相對框架上下移動。In this embodiment, each of the adjustable fixing mechanisms may further include a plurality of second adjusting members for fixing the base body to the frame. Each of the second adjustment members is movable up and down relative to the frame to drive the base body to move up and down relative to the frame.
綜上所述，本發明係在框架上設置可調式固定機構，並且將遮罩固定於可調式固定機構之固定件上。在遮罩產生前後偏移時，操作人員可操作第一調整件驅動支撐件相對框架前後移動，以帶動固定件相對框架前後移動或轉動，進而修正固定於固定件上的遮罩的前後偏移量。此外，在遮罩產生上下偏移時，操作人員可操作第二調整件驅動座體相對框架上下移動，以帶動固定件相對框架上下移動，進而修正固定於固定件上的遮罩的上下偏移量。藉此，即可有效改善遮罩的偏移情況，進而延長遮罩與框架的使用壽命。In summary, the present invention provides an adjustable fixing mechanism on the frame and fixes the mask to the fixing member of the adjustable fixing mechanism. When the mask is displaced back and forth, the operator can operate the first adjusting member to drive the supporting member to move back and forth relative to the frame to drive the fixing member to move back and forth relative to the frame, thereby correcting the front and rear offset of the mask fixed on the fixing member. the amount. In addition, when the mask is displaced up and down, the operator can operate the second adjusting member to drive the base body to move up and down relative to the frame to drive the fixing member to move up and down relative to the frame, thereby correcting the up and down offset of the mask fixed on the fixing member. the amount. Thereby, the offset of the mask can be effectively improved, thereby prolonging the service life of the mask and the frame.
關於本發明之優點與精神可以藉由以下的發明詳述及所附圖式得到進一步的瞭解。The advantages and spirit of the present invention will be further understood from the following detailed description of the invention.
請參閱第4圖至第8圖，第4圖為根據本發明一實施例之可調式固定裝置3的示意圖，第5圖為第4圖中的可調式固定裝置3於另一視角的示意圖，第6圖為遮罩30固定於第4圖中的可調式固定裝置3上的示意圖，第7圖為第4圖中的可調式固定機構34於另一視角的示意圖，第8圖為第4圖中的可調式固定機構34於另一視角的示意圖。Please refer to FIG. 4 to FIG. 8 , FIG. 4 is a schematic diagram of the adjustable fixing device 3 according to an embodiment of the present invention, and FIG. 5 is a schematic view of the adjustable fixing device 3 in FIG. 4 from another perspective. Figure 6 is a schematic view showing the mask 30 fixed to the adjustable fixing device 3 of Figure 4, and Figure 7 is a schematic view of the adjustable fixing mechanism 34 of Figure 4 in another view, and Figure 8 is the fourth drawing. A schematic view of the adjustable securing mechanism 34 in the other view.
如第6圖所示，可調式固定裝置3用以固定數個長條狀遮罩30。遮罩30例如用以於熱蒸鍍製程中對有機發光二極體的基板進行鍍膜，以形成有機膜層。主要可選用具磁性的金屬來製作遮罩30， 在遮罩30上蝕刻出細微的開口，於開口露出欲鍍膜的位置。蒸鍍時，以磁鐵吸引遮罩30，使遮罩30與欲鍍膜的基板緊密貼合。As shown in Fig. 6, the adjustable fixing device 3 is used to fix a plurality of elongated masks 30. The mask 30 is used, for example, to coat a substrate of the organic light-emitting diode in a thermal evaporation process to form an organic film layer. The main choice is magnetic metal to make the mask 30, A fine opening is etched into the mask 30 to expose the position where the film is to be coated. At the time of vapor deposition, the mask 30 is attracted by a magnet, and the mask 30 is brought into close contact with the substrate to be coated.
可調式固定裝置3包含一框架32以及多個可調式固定機構34。如第4圖至第6圖所示，多個可調式固定機構34係兩個一組，設置於框架32之相對二側。每一個可調式固定機構34可分別包含一座體340、二支撐件342a、342b、一固定件344、二第一調整件346a、346b以及一軸桿348。座體340設置於框架32上。支撐件342a、342b分別可移動地設置於座體340之相對二側。於此實施例中，可於座體340之相對二側開設滑槽340a、340b，再將支撐件342a、342b的一端可移動地設置於座體340之相對二側的滑槽340a、340b中。固定件344之二端分別固定於二支撐件342a、342b上，且遮罩30固定於固定件344上。軸桿348之二端分別連接於座體340與固定件344。於此實施例中，可以軸桿348作為焊接的參考點，將遮罩30的一端焊接於固定件344上。二第一調整件346a、346b分別對應二支撐件342a、342b設置於座體340之相對二側。The adjustable fixture 3 includes a frame 32 and a plurality of adjustable securing mechanisms 34. As shown in FIGS. 4 to 6, a plurality of adjustable fixing mechanisms 34 are provided in groups of two and disposed on opposite sides of the frame 32. Each of the adjustable fixing mechanisms 34 can include a body 340, two support members 342a, 342b, a fixing member 344, two first adjusting members 346a, 346b, and a shaft 348. The seat body 340 is disposed on the frame 32. The support members 342a, 342b are movably disposed on opposite sides of the base 340, respectively. In this embodiment, the sliding grooves 340a and 340b may be formed on opposite sides of the seat body 340, and one end of the supporting members 342a and 342b may be movably disposed in the sliding grooves 340a and 340b of the opposite sides of the seat body 340. . The two ends of the fixing member 344 are respectively fixed to the two supporting members 342a and 342b, and the mask 30 is fixed to the fixing member 344. The two ends of the shaft 348 are respectively connected to the base 340 and the fixing member 344. In this embodiment, the shaft 348 can be used as a reference point for welding, and one end of the mask 30 is welded to the fixing member 344. The two first adjusting members 346a and 346b are respectively disposed on opposite sides of the base 340 corresponding to the two supporting members 342a and 342b.
每一個第一調整件346a、346b分別用以驅動二支撐件342a、342b的其中之一相對框架32前後移動。舉例而言，可將第一調整件346a、346b設計為旋鈕，並且於座體340中設置連接第一調整件346a與支撐件342a的連動機構(例如，齒輪組)以及連接第一調整件346b與支撐件342b的連動機構(例如，齒輪組)，使得當第一調整件346a、346b往箭頭A1或A2(如第7圖所示)的方向轉動 時，可分別帶動支撐件342a、342b相對框架32往箭頭A3或A4(如第7圖所示)的方向前後移動。Each of the first adjustment members 346a, 346b is used to drive one of the two support members 342a, 342b to move back and forth relative to the frame 32. For example, the first adjusting member 346a, 346b can be designed as a knob, and an interlocking mechanism (for example, a gear set) connecting the first adjusting member 346a and the supporting member 342a and a connecting first adjusting member 346b are disposed in the base 340. An interlocking mechanism (for example, a gear set) with the support member 342b such that when the first adjustment member 346a, 346b is rotated in the direction of the arrow A1 or A2 (as shown in Fig. 7) At this time, the support members 342a, 342b can be driven to move back and forth with respect to the frame 32 in the direction of the arrow A3 or A4 (as shown in Fig. 7).
於此實施例中，由於軸桿348之二端分別連接於座體340與固定件344，使得當二第一調整件346a、346b同時驅動二支撐件342a、342b相對框架32反向前後移動時，二支撐件342a、342b會帶動固定件344以軸桿348為軸心往箭頭A5或A6(如第7圖所示)的方向轉動。因此，在遮罩30產生前後偏移時，操作人員即可操作第一調整件346a、346b驅動支撐件342a、342b相對框架32往箭頭A3或A4的方向反向前後移動，以帶動固定件344相對框架32往箭頭A5或A6的方向轉動，進而修正固定於固定件344上的遮罩30在箭頭A3或A4的方向的前後偏移量。In this embodiment, since the two ends of the shaft 348 are respectively coupled to the base 340 and the fixing member 344, when the two first adjusting members 346a, 346b simultaneously drive the two supporting members 342a, 342b to move back and forth relative to the frame 32, The two supporting members 342a, 342b will drive the fixing member 344 to rotate in the direction of the arrow A5 or A6 (as shown in Fig. 7) with the shaft 348 as the axis. Therefore, when the mask 30 is displaced back and forth, the operator can operate the first adjusting members 346a, 346b to drive the supporting members 342a, 342b to move back and forth in the direction of the arrow A3 or A4 with respect to the frame 32 to drive the fixing member 344. The frame 32 is rotated in the direction of the arrow A5 or A6 to correct the amount of offset of the mask 30 fixed to the fixing member 344 in the direction of the arrow A3 or A4.
此外，如第5圖與第8圖所示，每一個可調式固定機構34更可包含複數個第二調整件350，用以將座體340固定於框架32上。於此實施例中，每一個可調式固定機構34係於座體340的四個角落設置四個第二調整件350。需說明的是，第二調整件350的數量及設置位置可根據實際應用來決定，不以第5圖與第8圖所繪示之實施例為限。每一個第二調整件350可分別相對框架32往箭頭A7或A8(如第8圖所示)的方向上下移動，以驅動座體340的對應角落相對框架32往箭頭A7或A8的方向上下移動。於此實施例中，第二調整件350可為調整螺絲，但不以此為限。因此，在遮罩30產生上下偏移時，操作人員即可操作第二調整件350驅動座體340相對 框架32往箭頭A7或A8的方向上下移動，以帶動固定件344相對框架32往箭頭A7或A8的方向上下移動，進而修正固定於固定件344上的遮罩30在箭頭A7或A8的方向的上下偏移量。In addition, as shown in FIGS. 5 and 8, each of the adjustable fixing mechanisms 34 further includes a plurality of second adjusting members 350 for fixing the base 340 to the frame 32. In this embodiment, each of the adjustable fixing mechanisms 34 is provided with four second adjusting members 350 at four corners of the seat body 340. It should be noted that the number and setting position of the second adjusting member 350 may be determined according to actual applications, and are not limited to the embodiments illustrated in FIGS. 5 and 8. Each of the second adjusting members 350 can be moved up and down with respect to the frame 32 in the direction of the arrow A7 or A8 (as shown in FIG. 8) to drive the corresponding corners of the base 340 to move up and down relative to the frame 32 in the direction of the arrow A7 or A8. . In this embodiment, the second adjusting member 350 can be an adjusting screw, but is not limited thereto. Therefore, when the mask 30 is up and down, the operator can operate the second adjusting member 350 to drive the base 340 relative to The frame 32 moves up and down in the direction of the arrow A7 or A8 to drive the fixing member 344 to move up and down with respect to the frame 32 in the direction of the arrow A7 or A8, thereby correcting the mask 30 fixed on the fixing member 344 in the direction of the arrow A7 or A8. Up and down offset.
再者，每一個可調式固定機構34更可包含複數個彈性件352，設置於座體340與框架32之間。每一個第二調整件350分別穿過彈性件352的其中之一而連接於座體340。於此實施例中，每一個彈性件352可為一彈簧墊片(spring washer)或其他彈性體。彈性件352可在第二調整件350驅動座體340相對框架32往箭頭A8的方向向下移動時被壓縮而儲存彈性位能，且在第二調整件350驅動座體340相對框架32往箭頭A7的方向向上移動時被釋放而提供彈性力。Moreover, each of the adjustable fixing mechanisms 34 further includes a plurality of elastic members 352 disposed between the base 340 and the frame 32. Each of the second adjustment members 350 is coupled to the base 340 through one of the elastic members 352, respectively. In this embodiment, each of the elastic members 352 can be a spring washer or other elastomer. The elastic member 352 can be compressed to store the elastic potential energy when the second adjusting member 350 drives the seat body 340 to move downward relative to the frame 32 in the direction of the arrow A8, and the second adjusting member 350 drives the seat body 340 to the frame 32 toward the arrow. When the direction of A7 moves upward, it is released to provide elastic force.
請參閱第9圖，第9圖為根據本發明另一實施例之可調式固定機構34'的示意圖。可調式固定機構34'與上述之可調式固定機構34的主要不同之處在於，可調式固定機構34'不包含上述之軸桿348。因此，當二第一調整件346a、346b同時驅動二支撐件342a、342b相對框架32同向前後移動時，二支撐件342a、342b即會帶動固定件344相對框架32前後移動。另一方面，當二第一調整件346a、346b同時驅動二支撐件342a、342b相對框架32反向前後移動時，二支撐件342a、342b即會帶動固定件344相對框架32轉動。藉此，可增加調整時的彈性。需說明的是，第9圖中與第7圖中所示相同標號的元件，其作用原理皆相同，在此不再贅述。Please refer to FIG. 9. FIG. 9 is a schematic view of an adjustable fixing mechanism 34' according to another embodiment of the present invention. The main difference between the adjustable fixing mechanism 34' and the above-described adjustable fixing mechanism 34 is that the adjustable fixing mechanism 34' does not include the above-mentioned shaft 348. Therefore, when the two first adjusting members 346a, 346b simultaneously drive the two supporting members 342a, 342b to move forward and backward with respect to the frame 32, the two supporting members 342a, 342b will drive the fixing member 344 to move back and forth with respect to the frame 32. On the other hand, when the two first adjusting members 346a, 346b simultaneously drive the two supporting members 342a, 342b to move back and forth relative to the frame 32, the two supporting members 342a, 342b will drive the fixing member 344 to rotate relative to the frame 32. Thereby, the elasticity at the time of adjustment can be increased. It should be noted that the components of the same reference numerals as those shown in FIG. 7 have the same principle of operation, and are not described herein again.
請參閱第10圖，第10圖為根據本發明另一實施例之支撐件342a、342b與固定件344的示意圖。於此實施例中，固定件344之二端分別以樞接的方式固定於二支撐件342a、342b上。如第10圖所示，固定件344之二端分別藉由樞軸354a、354b固定於二支撐件342a、342b上。因此，當二第一調整件346a、346b的其中之一驅動二支撐件342a、342b的其中之一相對框架32前後移動時，支撐件342a或342b即會帶動固定件344相對框架32轉動。如第10圖所示，當只有支撐件342a往箭頭A9的方向移動時，固定件344即會往箭頭A10的方向轉動；當只有支撐件342b往箭頭A9的方向移動時，固定件344即會往箭頭A11的方向轉動。Referring to FIG. 10, FIG. 10 is a schematic view of the support members 342a, 342b and the fixing member 344 according to another embodiment of the present invention. In this embodiment, the two ends of the fixing member 344 are respectively pivotally fixed to the two supporting members 342a and 342b. As shown in Fig. 10, the two ends of the fixing member 344 are fixed to the two supporting members 342a, 342b by pivots 354a, 354b, respectively. Therefore, when one of the two first adjusting members 346a, 346b drives one of the two supporting members 342a, 342b to move back and forth relative to the frame 32, the supporting member 342a or 342b will drive the fixing member 344 to rotate relative to the frame 32. As shown in Fig. 10, when only the support member 342a moves in the direction of the arrow A9, the fixing member 344 will rotate in the direction of the arrow A10; when only the support member 342b moves in the direction of the arrow A9, the fixing member 344 will Turn in the direction of arrow A11.
綜上所述，本發明係在框架上設置可調式固定機構，並且將遮罩固定於可調式固定機構之固定件上。在遮罩產生前後偏移時，操作人員可操作第一調整件驅動支撐件相對框架前後移動，以帶動固定件相對框架前後移動或轉動，進而修正固定於固定件上的遮罩的前後偏移量。此外，在遮罩產生上下偏移時，操作人員可操作第二調整件驅動座體相對框架上下移動，以帶動固定件相對框架上下移動，進而修正固定於固定件上的遮罩的上下偏移量。藉此，即可有效改善遮罩的偏移情況，進而延長遮罩與框架的使用壽命。In summary, the present invention provides an adjustable fixing mechanism on the frame and fixes the mask to the fixing member of the adjustable fixing mechanism. When the mask is displaced back and forth, the operator can operate the first adjusting member to drive the supporting member to move back and forth relative to the frame to drive the fixing member to move back and forth relative to the frame, thereby correcting the front and rear offset of the mask fixed on the fixing member. the amount. In addition, when the mask is displaced up and down, the operator can operate the second adjusting member to drive the base body to move up and down relative to the frame to drive the fixing member to move up and down relative to the frame, thereby correcting the up and down offset of the mask fixed on the fixing member. the amount. Thereby, the offset of the mask can be effectively improved, thereby prolonging the service life of the mask and the frame.
以上所述僅為本發明之較佳實施例，凡依本發明申請專利範圍所做之均等變化與修飾，皆應屬本發明之涵蓋範圍。The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.
3‧‧‧可調式固定裝置3‧‧‧Adjustable fixture
10、30‧‧‧遮罩10, 30‧‧‧ mask
12、32‧‧‧框架12, 32‧‧‧ framework
34、34'‧‧‧可調式固定機構34, 34'‧‧‧Adjustable fixing mechanism
340‧‧‧座體340‧‧‧ body
340a、340b‧‧‧滑槽340a, 340b‧‧ ‧ chute
342a、342b‧‧‧支撐件342a, 342b‧‧‧support
344‧‧‧固定件344‧‧‧Fixed parts
346a、346b‧‧‧第一調整件346a, 346b‧‧‧ first adjustment
348‧‧‧軸桿348‧‧‧ shaft
350‧‧‧第二調整件350‧‧‧Second adjustment
352‧‧‧彈性件352‧‧‧Flexible parts
354a、354b‧‧‧樞軸354a, 354b‧‧‧ pivot
A1-A11‧‧‧箭頭A1-A11‧‧‧ arrow
第1圖為先前技術之遮罩固定於框架上的俯視圖。Figure 1 is a top plan view of a prior art mask secured to a frame.
第2圖為五種產生扭曲變形的遮罩的示意圖。Figure 2 is a schematic illustration of five masks that produce distortion.
第3圖為兩種產生扭曲變形的框架的示意圖。Figure 3 is a schematic illustration of two frames that produce a distortion.
第4圖為根據本發明一實施例之可調式固定裝置的示意圖。Figure 4 is a schematic illustration of an adjustable fixture in accordance with an embodiment of the present invention.
第5圖為第4圖中的可調式固定裝置於另一視角的示意圖。Figure 5 is a schematic view of the adjustable fixture of Figure 4 in another perspective.
第6圖為遮罩固定於第4圖中的可調式固定裝置上的示意圖。Figure 6 is a schematic view of the mask fixed to the adjustable fixture of Figure 4.
第7圖為第4圖中的可調式固定機構於另一視角的示意圖。Figure 7 is a schematic view of the adjustable fixing mechanism of Figure 4 in another perspective.
第8圖為第4圖中的可調式固定機構於另一視角的示意圖。Figure 8 is a schematic view of the adjustable fixing mechanism of Figure 4 in another perspective.
第9圖為根據本發明另一實施例之可調式固定機構的示意圖。Figure 9 is a schematic illustration of an adjustable securing mechanism in accordance with another embodiment of the present invention.
第10圖為根據本發明另一實施例之支撐件與固定件的示意圖。Figure 10 is a schematic view of a support member and a fixing member according to another embodiment of the present invention.
3‧‧‧可調式固定裝置3‧‧‧Adjustable fixture
32‧‧‧框架32‧‧‧Frame
34‧‧‧可調式固定機構34‧‧‧Adjustable fixing mechanism
340‧‧‧座體340‧‧‧ body
340a、340b‧‧‧滑槽340a, 340b‧‧ ‧ chute
342a、342b‧‧‧支撐件342a, 342b‧‧‧support
344‧‧‧固定件344‧‧‧Fixed parts
346a、346b‧‧‧第一調整件346a, 346b‧‧‧ first adjustment
348‧‧‧軸桿348‧‧‧ shaft
Claims (8)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101132557A TWI440728B (en) | 2012-09-06 | 2012-09-06 | Adjustable fastening device |
| CN201210392425.2A CN102879997B (en) | 2012-09-06 | 2012-10-16 | Adjustable fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101132557A TWI440728B (en) | 2012-09-06 | 2012-09-06 | Adjustable fastening device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201410889A TW201410889A (en) | 2014-03-16 |
| TWI440728B true TWI440728B (en) | 2014-06-11 |
Family
ID=47481379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101132557A TWI440728B (en) | 2012-09-06 | 2012-09-06 | Adjustable fastening device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102879997B (en) |
| TW (1) | TWI440728B (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI519872B (en) * | 2013-09-18 | 2016-02-01 | 友達光電股份有限公司 | Mask module |
| CN104148257A (en) * | 2014-08-07 | 2014-11-19 | 国家电网公司 | Number brushing tool |
| NL2017912B1 (en) * | 2015-12-14 | 2018-01-11 | Asml Netherlands Bv | A membrane assembly |
| CN106885719B (en) * | 2015-12-16 | 2019-06-25 | 鞍钢股份有限公司 | Method for selecting position of thermal simulation sample for spraying carbon film |
| CN105607412A (en) * | 2016-01-04 | 2016-05-25 | 京东方科技集团股份有限公司 | Mask installation frame and method for fixing mask by using same |
| CN105810853B (en) * | 2016-05-19 | 2017-11-24 | 京东方科技集团股份有限公司 | Resistance bringing device, mask manufacture device and correlation method |
| CN209722281U (en) * | 2019-03-29 | 2019-12-03 | 昆山国显光电有限公司 | Support component and the exposure mask board mount for using the support component |
| CN110699638A (en) * | 2019-11-28 | 2020-01-17 | 云谷（固安）科技有限公司 | Screen stretching device and method for mask |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4341382B2 (en) * | 2003-11-21 | 2009-10-07 | 凸版印刷株式会社 | Manufacturing method of vapor deposition mask |
| JP4562488B2 (en) * | 2004-10-15 | 2010-10-13 | 大日本印刷株式会社 | Metal mask position alignment method and apparatus |
| JP4614749B2 (en) * | 2004-12-01 | 2011-01-19 | 大日本印刷株式会社 | Metal mask setting method and apparatus |
| JP5674767B2 (en) * | 2010-04-21 | 2015-02-25 | 株式会社アルバック | mask |
| CN102650820B (en) * | 2011-10-31 | 2014-02-26 | 北京京东方光电科技有限公司 | Mask frame and light curing method |
| CN202533096U (en) * | 2012-01-11 | 2012-11-14 | 昆山允升吉光电科技有限公司 | Mask plate bearing rack |
-
2012
- 2012-09-06 TW TW101132557A patent/TWI440728B/en active
- 2012-10-16 CN CN201210392425.2A patent/CN102879997B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| TW201410889A (en) | 2014-03-16 |
| CN102879997B (en) | 2014-05-07 |
| CN102879997A (en) | 2013-01-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI440728B (en) | Adjustable fastening device | |
| CN107002219B (en) | Mask arrangement, apparatus for depositing a layer on a substrate and method of aligning a mask arrangement | |
| TWI488541B (en) | Mask frame assembly for evaporation and passivation for manufacturing white oled panel, manufacturing method and apparatus thereof | |
| KR20070082317A (en) | Mask and manufacturing method thereof | |
| TW201245904A (en) | Lithographic apparatus, programmable patterning device and lithographic method | |
| JP2004349101A (en) | Film forming method, film forming device, manufacturing method of organic electroluminescent device, and organic electroluminescent device | |
| JP2013518408A (en) | A lithographic system in which the lens rotates | |
| JP7222629B2 (en) | optical unit | |
| RU181166U9 (en) | Two-axis piezoelectric ceramic wavefront tilt corrector | |
| JP2013209697A (en) | Film deposition apparatus and film deposition method | |
| JP2022055817A (en) | Optical unit | |
| JP2013204097A (en) | Film deposition apparatus and film deposition method | |
| JP6755412B2 (en) | Laser light source device and its manufacturing method | |
| JP5316135B2 (en) | Exposure equipment | |
| JP2012104272A (en) | X-ray generation device | |
| JP2007108557A (en) | Lens barrel | |
| US11640041B2 (en) | Optical unit | |
| JP2005281745A (en) | Film depositing apparatus and vapor deposition apparatus | |
| JP2007201134A (en) | Exposure apparatus, light source device therefor, and adjusting method of the exposure apparatus | |
| JPWO2010098340A1 (en) | Driving device and lens driving device | |
| WO2018008364A1 (en) | Optical device, exposure device, and method for manufacturing article | |
| JP2010123597A (en) | Laser optical apparatus | |
| JP5209567B2 (en) | Laser light source device | |
| US20210382297A1 (en) | Vibrating element | |
| JP2016540247A (en) | Support device for optical device, optical device and lithography system |