TWI496852B - Ceramic embryo chip and its manufacturing method - Google Patents

Description

Ceramic embryo sheet and manufacturing method thereof

The present invention relates to a ceramic green sheet and a method of producing a ceramic green sheet which is carried out using a ceramic slurry.

The ceramic green sheet is used, for example, to manufacture a laminated ceramic electronic component such as a laminated ceramic capacitor, a laminated chip coil, or a multilayer ceramic substrate.

When a ceramic green sheet is produced, it is usually carried out by preparing a ceramic slurry, applying a ceramic slurry to a substrate, and drying it, thereby obtaining a ceramic green sheet on the substrate. A substrate made of a resin film is described in JP-A-2001-93771 (Patent Document 1) and JP-A-2005-313601 (Patent Document 2). A base material using a drum or a roll is described in JP-A-2004-296641 (Patent Document 3) and JP-A-2011-258928 (Patent Document 4). .

As described above, in the case where a ceramic green sheet is obtained on a substrate, in order to be used for the production of the above laminated ceramic electronic component, the obtained ceramic green sheet must be peeled off from the substrate at any stage of the manufacturing process of the laminated ceramic electronic component. Therefore, a release layer made of a polysiloxane resin or the like for easily peeling off the ceramic green sheets is usually formed on the substrate.

However, the miniaturization of the above-mentioned laminated ceramic electronic components has been progressing, and thus it is necessary to thin the ceramic green sheets. However, the thinner the ceramic greensheet to be peeled off, the lower the strength of the ceramic green sheet and the more easily it breaks, so that it is difficult to peel it from the substrate stably and at a higher speed.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2001-93771

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2005-313601

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2004-296641

[Patent Document 4] Japanese Patent Laid-Open Publication No. 2011-258928

Therefore, an object of the present invention is to easily peel the ceramic green sheets from the substrate even if the ceramic green sheets formed on the substrate are relatively thin.

More specifically, it is an object of the present invention to provide a ceramic green sheet which satisfies the above requirements and a method for producing the same.

The present invention seeks to improve the ceramic green sheet in order to solve the technical problem that it can be easily peeled off from the substrate even if it is a relatively thin ceramic green sheet. Therefore, in the present invention, the composition of the ceramic slurry which is the material of the ceramic green sheet is first improved.

The ceramic slurry used in the present invention is characterized in that it contains ceramic particles, a solvent-soluble polymer having at least one of a hydroxyl group and a carboxyl group, and a solvent, and further contains a hydrophilic portion in order to solve the above technical problems and A release agent for both hydrophobic sites.

The method for producing a ceramic green sheet of the present invention is carried out using the above ceramic slurry. The method for producing a ceramic green sheet of the present invention is characterized in that it comprises the steps of: preparing the ceramic slurry, forming a ceramic green sheet on a substrate by applying the ceramic slurry to a substrate and drying, And then the step of peeling the ceramic green sheet from the substrate.

The present invention is also in the ceramic green sheet produced by the above production method. The ceramic green sheet of the present invention is produced by the step of drying the above ceramic slurry, and thus is substantially free of a solvent, and is characterized in that it contains ceramic particles, has a hydroxyl group and a carboxyl group. A solvent-soluble polymer of at least one functional group, and a release agent having both a hydrophilic portion and a hydrophobic portion, and which are carried on a substrate.

As the releasing agent, a polyether-modified polyalkyl siloxane having a hydrophilic portion as a polyether and a hydrophobic portion as a polyalkyl siloxane is preferably used. The polyalkyl siloxane which provides a hydrophobic moiety is, for example, polydimethyl siloxane.

Further, as the release agent, a polymer of acrylate or methacrylate can also be used. In this case, the release agent can be made to have little adverse effect on the electrical characteristics of the resulting laminated ceramic electronic component. The reason is that the polymers of acrylate and methacrylate do not contain Si, and all components are decomposed upon firing.

By the present invention, a ceramic green sheet containing a release agent can be obtained. The release agent in the ceramic green sheet is formed in the ceramic green sheet on the substrate with the hydrophobic portion facing the substrate side and the hydrophilic portion facing the at least one of the hydroxyl group and the carboxyl group of the polymer. The state of the base exists at the interface between the ceramic slurry and the substrate, and provides so-called self-release property to the ceramic green sheets. Therefore, the peeling of the ceramic green sheets from the substrate becomes easy.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the molecular structure of a polyether-modified dimethyl methoxy oxane which is an example of a polyether-modified polyalkyl siloxane which is advantageously used in the present invention, and graphically illustrates the application of a ceramic slurry. A diagram showing the relative positional relationship of the polyether-modified dimethyl methoxy oxane and the substrate and the polymer when coated on a substrate.

Fig. 2 is a view showing the molecular structure of dimethyloxane used as a comparative example in the experimental example.

The ceramic slurry used in the present invention is characterized in that it basically comprises ceramic particles, a solvent-soluble polymer having at least one of a hydroxyl group and a carboxyl group, and a solvent, in order to form a ceramic on the substrate with the ceramic slurry. Ceramic slabs can be easily placed after the embryo The release agent from the substrate further includes a release agent having both a hydrophilic portion and a hydrophobic portion.

In the production of the ceramic slurry, for example, a ball mill or a circulating mill or a high-pressure disperser using a medium having a diameter of 0.05 to 5 mm is used.

According to the present invention, in order to manufacture a ceramic green sheet, the above ceramic slurry is first prepared. Then, the ceramic slurry is applied onto a substrate and dried to form a ceramic green sheet on the substrate.

When the ceramic slurry is applied, a die coating method, a spray method, a pulling method, an inkjet method, a gravure printing method, or the like is used. Further, as the substrate, a long resin film, a short resin film, a metal roll or a drum, a metal strip, a metal plate or the like is used. Hot air, near infrared rays, reduced pressure, and the like are suitably used for drying the ceramic slurry.

Further, the thickness of the ceramic green sheet on the substrate is, for example, 0.5 to 100 μm. Further, if the thickness of the ceramic green sheet to be obtained is as thin as 0.5 to 1.0 μm, the significance of applying the present invention is greater.

The ceramic green sheets are then peeled from the substrate. In the case of peeling, a surface peeling method in which almost the entire ceramic green sheet is peeled off may be used, or a line peeling method in which the ceramic green sheets are sequentially peeled off from a specific portion may be employed. In the peeling step, the release agent contained in the ceramic slurry as the material of the ceramic green sheet acts as a mold release, so that the ceramic green sheet peels off from the substrate smoothly even if the release layer is not formed on the substrate. .

As the releasing agent, for example, a polyether-modified polyalkyl siloxane having a hydrophilic portion as a polyether and a hydrophobic portion being a polyalkyl siloxane is advantageously used. The polyether modified polyalkyl siloxane is one of the surfactants. Fig. 1 is a view showing the molecular structure of a specific example of a polyether-modified polyalkyl siloxane, that is, a polyether-modified dimethyl methoxy olefin.

Referring to Fig. 1, the above-mentioned release action is more specifically described for polyether modified polyalkyl siloxane (polyether modified dimethyl methoxy oxane). It is presumed that the polyether-modified polyalkylsiloxane is a hydrophilic portion, that is, an ether moiety, which is toward at least one of a hydroxyl group and a carboxyl group of the polymer (the illustration of the functional group is omitted), and the hydrophobic portion is Polyalkyl oxane The position is toward the substrate side and exists at the interface between the polymer and the substrate. It is presumed that by using this structure, bonds (hydrogen bonds, etc.) between the polymer and the substrate are weakened.

In order to confirm the above speculation, the surface free energy was examined. By adding a polyether modified polyalkyl siloxane to the ceramic slurry, the surface free energy of the ceramic green sheet on the surface of the ceramic green sheet in contact with the substrate is reduced. The reason for this is that, as described above, the polyether modified polyalkyl siloxane is present at the interface between the polymer and the substrate. The reduction in the surface free energy of the ceramic green sheet leads to a decrease in the adhesion work, which is one of the factors affecting the adhesion of the ceramic green sheet to the substrate.

The mold release agent may have both a hydrophilic portion and a hydrophobic portion. Therefore, in addition to the above polyether-modified polyalkyl siloxane, a polymer such as acrylate or methacrylate may be used. The polymers of acrylates and methacrylates do not contain Si and all components are decomposed upon firing. Therefore, when a laminated ceramic electronic component is produced using a ceramic green sheet containing the same as a release agent, the release agent hardly adversely affects the electrical characteristics of the obtained laminated ceramic electronic component.

As described above, since the ceramic slurry as the material of the ceramic green sheet contains the release agent, the ceramic green sheet can be peeled off from the substrate without forming the release layer on the substrate. This case means that the following problems which are encountered when using the substrate on which the release layer is formed can also be solved.

When the resin film (carrier film) described in Patent Documents 1 and 2 is used as the substrate, first, when the carrier film is produced, a release agent for preparing a release layer is required and a release layer is formed using the same. The step, therefore, the cost of carrying the film increases. Further, in the step of forming the release layer, if the foreign matter is mixed in the release layer or the mold release agent is agglomerated, the resulting ceramic green sheet is poor in quality such as pinholes, and the ceramic green sheet is used. A short circuit failure or poor reliability occurs in a laminated ceramic electronic component.

Further, if the carrier film from which the ceramic green sheet is peeled off can be used repeatedly, the consumption of the carrier film can be reduced, which contributes to lowering the cost of the carrier film. But by overcoating The cloth and the peeled ceramic slurry are gradually worn or dissolved by the release layer on the carrier film, and the ceramic green sheets cannot be stably peeled off. Therefore, it is necessary to clearly check the surface state of the release layer which cannot achieve stable peeling of the ceramic green sheet, but it is difficult to measure the state change of the release layer. Therefore, the status quo is that the carrier film is discarded once it is used.

On the other hand, in the case of using a drum-shaped or roll-shaped base material described in Patent Documents 3 and 4 as a base material, the release layer is gradually worn or dissolved. Therefore, it is necessary to periodically reform the release layer at this time. However, in the step of forming the release layer, similarly to the case where the release layer is formed on the carrier film, problems such as foreign matter in the release layer or agglomeration of the release agent may occur. Therefore, the obtained ceramic green sheet has poor quality such as pinholes, and may cause short-circuit failure and poor reliability in the laminated ceramic electronic component formed using the ceramic green sheet.

The problem as described above can be solved without forming a release layer on the substrate. In the present invention, since the ceramic slurry as the material of the ceramic green sheet contains the release agent, the release layer can be omitted from the substrate.

Further, when the method for producing a ceramic green sheet of the present invention is carried out, the substrate on which the release layer is not formed can be used without any problem, but the use of the substrate on which the release layer is formed is not excluded. In particular, in the case where the ceramic green sheet to be obtained is extremely thin, for example, having a thickness of 0.5 to 1.0 μm, the ceramic green sheet is easily broken in the peeling step, and therefore it is preferable to form a release layer on the substrate in advance.

The ceramic green sheets obtained by the present invention are supplied to the manufacture of laminated ceramic electronic components. Therefore, a necessary electrode or the like is formed on the ceramic green sheet, and the electrode can be formed by a screen printing method, a gravure printing method, a stamp printing method, an inkjet printing method, a lithography method using a pattern formed by the above, and the like. Various printing methods, plating methods, and various film forming methods. Further, a step of laminating and crimping a plurality of ceramic green sheets is carried out, and the lamination and pressure bonding of the ceramic green sheets may be performed after peeling off from the base material, or may be performed before peeling off from the base material. Further, the printing of the electrodes or the like may be performed before or after the lamination of the ceramic green sheets.

Hereinafter, an experimental example performed to confirm the effects of the present invention will be described.

[Experimental Example 1]

(1) Manufacture of ceramic slurry

<sample 1>

In the sample 1, as the release agent for reducing the peel strength from the substrate, a polyether-modified dimethyloxane having the structure shown in Fig. 1 was used.

In order to obtain a ceramic slurry as a material of the ceramic green sheet, the ceramic particles: 100 parts by weight of a polyvinyl butyral resin containing a hydroxyl group as a functional group (degree of polymerization: 2000, hydroxyl concentration: 31 mol%): 12 parts by weight Phthalate as a plasticizer: 2 parts by weight, polyether modified dimethyloxane: 0.3 parts by weight and a mixed solvent of toluene/ethanol (50% by weight / 50% by weight): 60 parts by weight The mixture was stirred and mixed with a ball mill to prepare a ceramic slurry of Sample 1.

<sample 2>

In the sample 2, the dimethyl methoxy oxane shown in Fig. 2 having a molecular structure similar to that of the polyether-modified dimethyl methoxy hydride but having no polyether-modified hydrophilic group was used instead of the sample 1 Ether-modified dimethyloxane.

In order to obtain a ceramic slurry as a material of the ceramic green sheet, ceramic particles: 100 parts by weight, polyvinyl butyral resin (degree of polymerization: 2000, hydroxyl concentration: 31 mol%): 12 parts by weight, phthalic acid Ester: 2 parts by weight, dimethyloxane: 0.3 parts by weight and a mixed solvent of toluene/ethanol (50% by weight/50% by weight): 60 parts by weight were stirred and mixed with a ball mill to prepare a ceramic slurry of Sample 2.

<sample 3>

In Sample 3, any surfactant which can act as a release agent was not used.

In order to obtain a ceramic slurry as a material of the ceramic green sheet, ceramic particles: 100 parts by weight, polyvinyl butyral resin (degree of polymerization: 2000, hydroxyl concentration: 31 mol%): 12 parts by weight, phthalic acid Ester: 2 parts by weight and a mixed solvent of toluene/ethanol (50% by weight/50% by weight): 60 parts by weight was stirred and mixed with a ball mill to prepare a ceramic slurry of Sample 3.

(2) Manufacture of ceramic slabs

Then, the ceramic slurry of each of the samples 1, 2, and 3 was applied onto a PET film as a substrate by a strip forming method using a doctor blade, and dried at 60 ° C for 1 minute to obtain a sample. Ceramic embryos of 1, 2 and 3. At this time, the forming speed was 2.4 m/min, and the gap of the doctor blade was 50 μm. In the case of production under this condition, the thickness of the ceramic green sheet was 7.0 μm. Moreover, the PET film as the substrate did not form a release layer, and its surface free energy was 43 mJ. m ^-2 .

(3) Evaluation of peel strength

Then, the ease of peeling of each of the ceramic green sheets of the formed samples 1, 2, and 3 from each of the substrates was evaluated. In order to evaluate the ease of peeling, the peel strength was measured with reference to JIS Z0237. In this experimental example, the peeling speed was different from that of JIS Z0237. That is, a 10 cm slit was drawn on the ceramic green sheet, and a peeling test was performed under the conditions of a peeling angle of 90 degrees and a peeling speed of 10 cm/min, and the maximum stress during the test was divided by the width (1 cm) of the test specimen. The value is defined as the peel strength.

The results are shown in Table 1.

Referring to Table 1, Samples 2 and 3 which are comparative examples are not contained in the polyether-modified dimethyloxane, and the peel strength is large, that is, it is difficult to peel off.

On the other hand, the sample 1 which is a polyether-modified dimethyl methoxyalkane as an example of the present invention has a significantly lower peel strength than the above-mentioned samples 2 and 3. That is, it is easy to peel off.

In particular, when the sample 1 and the sample 2 are compared, as described above, the peel strength of the sample 1 is smaller than the peel strength of the sample 2, and it is considered that the reason is that the dimethyl oxime used in the sample 2 is There is no hydrophilic polyether modified functional group in the alkane, so the dimethyloxane is uniform It is dissolved in the polyvinyl butyral resin and does not affect the hydroxyl group of the polyvinyl butyral resin.

Then, in order to examine the effect of the polyether-modified dimethyloxane on the peel strength of the ceramic green sheet from the substrate, the surface free energy of the ceramic green sheet was evaluated.

The ceramic green sheet was peeled off from the substrate, and the surface free energy of the contact surface with the substrate was measured for the contact angle of the known liquid, water and methylene iodide. Thereafter, the surface free energy was calculated from the contact angle using the following formula.

γ _L (1+cosθ)=2(γ _S ^d ×γ _L ^d ) ^1/2 +2(γ _S ^p ×γ _L ^p ) ^1/2

γ _S =γ _S ^d +γ _S ^p

(Reference) W. A. Zisman: J. Paint Technol, 44 (1972)

Here, γ _L , γ _L ^d , and γ _L ^p respectively represent the surface free energy of water and diiodomethane, the dispersive force component of surface free energy, and the polar force component of surface free energy, γ _S , γ _S ^d , γ _S ^p denotes the surface free energy of the ceramic green sheet, the dispersive force component of the surface free energy, and the polar force component of the surface free energy, and θ represents the contact angle of water on the ceramic green sheet and diiodomethane.

Further, the data relating to the surface free energy of water and diiodomethane, etc., are shown in the following references, and are shown in Table 2.

(Reference) D. H. Kaeble, K. C. Uy, J. Adhesion, 2, 50 (1970)

Table 3 shows the surface free energies of the respective ceramic green sheets of Samples 1, 2 and 3.

In the ceramic green sheet of the sample 1, by adding a polyether-modified dimethyl methoxy olefin, the surface free energy γ _{S was} reduced as compared with the other samples, that is, the ceramic green sheets of the samples 2 and 3. In particular, the polar force component γ _S ^p of the surface free energy is reduced. The polar force component of the surface free energy here mainly represents the influence of the hydroxyl group. The results in Table 3 show that the polyether modified dimethyl methoxyoxane acts on the hydroxyl group to reduce the effect of the hydroxyl group.

[Experimental Example 2]

In Experimental Example 2, the ceramic green sheets were produced by changing the blending amount of the polyether-modified dimethyl methoxy olefin as a releasing agent contained in the ceramic slurry, and the peeling strength of the ceramic green sheets from the substrate was evaluated.

(1) Manufacture of ceramic slurry

In order to obtain a ceramic slurry as a material of the ceramic green sheet, the ceramic particles: 100 parts by weight of a polyvinyl butyral resin containing a hydroxyl group as a functional group (degree of polymerization: 2000, hydroxyl concentration: 31 mol%): 12 parts by weight Phthalate as a plasticizer: 2 parts by weight and a mixed solvent of toluene/ethanol (50% by weight/50% by weight): 60 parts by weight of the "polyether modified dimethyl hydrazine" in Table 4 Polyether-modified dimethyloxane was added to the amount shown in the column of the amount of oxane, and the ceramic slurry of each of the samples 11 to 16 was prepared by stirring and mixing the ball mill.

(2) Manufacture of ceramic slabs

Then, each of the ceramic samples of the above samples 11 to 16 was applied to a PET film and a stainless steel (SUS) plate as a substrate by a strip forming method using a doctor blade, and dried at 60 ° C for 1 minute. Thus, each of the ceramic green sheets of the samples 11 to 16 was obtained. Here, the forming speed was 2.4 m/min, and the gap of the doctor blade was 20 μm. In the case of production under this condition, the thickness of the ceramic green sheet was 2.5 μm. Further, the PET film and the SUS plate as the substrate did not form a release layer, and the PET film was 43 mJ with respect to the surface free energy. m ^-2 , SUS board is 700mJ. m ^-2 .

(3) Evaluation of peel strength

Then, in order to evaluate the ceramic slabs of the formed samples 11 to 16 from each substrate The peeling strength was measured by the same method as in the case of Experimental Example 1 in terms of the ease of peeling off from the time.

The results are shown in Table 4.

Referring to Table 4, Sample 16 which is a comparative example containing no polyether-modified dimethyloxane has a large peeling strength, and a PET film which does not form a release layer is used as a substrate, and a SUS plate is used as a base. In the case of the material, peeling failure such as breakage of the ceramic green sheet occurred at the time of peeling.

On the other hand, in the sample 11 in which the polyether-modified dimethyloxane was 10 parts by weight based on 100 parts by weight of the polyvinyl butyral resin, the elongation of the ceramic green sheets was large, and the PET film was used. In the case of a substrate, the peel strength is relatively large and it is difficult to peel off. When a SUS plate is used as the substrate, the peel strength cannot be measured. The reason for this is considered to be that the polyether-modified dimethyl methoxy olefin acts as a plasticizer for the polymer to lower the mechanical strength of the ceramic green sheet.

In contrast, the blending amount of the polyether-modified dimethyloxane is 0.5 parts by weight or more and less than 10 parts by weight, more specifically 0.5 parts by weight or more and 5 parts by weight based on 100 parts by weight of the polyvinyl butyral resin. In the following samples 12 to 15, in the case where a PET film was used as the substrate and when the SUS plate was used as the substrate, the peel strength was lowered and the peeling was easy.

[Experimental Example 3]

In Experimental Example 3, a polymer using acrylate and methacrylate was produced as a ceramic. The ceramic green sheets of the release agent contained in the porcelain slurry were evaluated for the peel strength of the ceramic green sheets from the substrate. Further, the polymer of acrylate and methacrylate used in the experimental examples also has both a hydrophilic portion and a hydrophobic portion.

(1) Manufacture of ceramic slurry

<sample 21>

In the sample 21, as a release agent for reducing the peel strength from the substrate, a polymer of acrylate and methacrylate, that is, a polyacrylate having a polyether structure of an alkyl ether type was used.

In order to obtain a ceramic slurry as a material of the ceramic green sheet, the ceramic particles: 100 parts by weight of a polyvinyl butyral resin containing a hydroxyl group as a functional group (degree of polymerization: 2000, hydroxyl concentration: 31 mol%): 12 parts by weight Phthalate as a plasticizer: 2 parts by weight of a polyacrylate having a polyether structure of an alkyl ether type: 1 part by weight and a mixed solvent of toluene/ethanol (50% by weight/50) Weight%): 60 parts by weight was stirred and mixed with a ball mill to prepare a ceramic slurry of Sample 21.

<sample 22>

In Sample 22, a polymer of acrylate and methacrylate, that is, a polyacrylate having a higher alkylamine ethoxylate structure, was used in place of the polyethylene oxide structure having an alkyl ether type in Sample 21. Polyacrylate. Except for this, the same mixing ratio as in the case of the sample 21 was employed, and the ceramic slurry of the sample 22 was prepared by the same operation.

<sample 23>

In Sample 23, any surfactant which can act as a release agent was not used.

That is, in order to obtain a ceramic slurry as a material of the ceramic green sheet, the ceramic particles: 100 parts by weight, a polyvinyl butyral resin (degree of polymerization: 2000, hydroxyl concentration: 31 mol%): 12 parts by weight, phthalic acid Formate: 2 parts by weight and a mixed solvent of toluene/ethanol (50% by weight/50% by weight): 60 parts by weight was stirred and mixed with a ball mill to prepare a ceramic slurry of Sample 23.

(2) Manufacture of ceramic slabs

Then, in the same manner as in the case of Experimental Example 1, each ceramic slurry of the above samples 21 to 23 was applied onto a PET film as a substrate by a strip forming method using a doctor blade, and dried at 60 ° C for 1 minute. Thereby, the ceramic green sheets of the samples 21 to 23 were obtained. Here, the forming speed was 2.4 m/min, and the gap of the doctor blade was 20 μm. In the case of production under this condition, the thickness of the ceramic green sheet was 2.5 μm. Moreover, the PET film as the substrate did not form a release layer, and its surface free energy was 43 mJ. m ^-2 .

(3) Evaluation of peel strength

Then, in order to evaluate the ease of peeling of each of the ceramic green sheets of the formed samples 21 to 23 from the respective base materials, the peel strength was measured by the same method as in the case of Experimental Example 1.

The results are shown in Table 5.

Referring to Table 5, the sample 23 which is a comparative example of a polymer which does not contain an acrylate and a methacrylate has a large peeling strength, that is, it is difficult to peel.

On the other hand, in the samples 21 and 22 which are examples of the present invention, the polymers containing acrylate and methacrylate showed a significant decrease in peel strength as compared with the sample 23 described above. That is, it is easy to peel off.

As described above, even when a polymer having acrylate and methacrylate having both a hydrophilic portion and a hydrophobic portion was used as a releasing agent, the peeling strength was the same as in the case of the sample 1 shown in Experimental Example 1. reduce. Further, as shown below, when the polymer is used, it has other effects different from those of the sample 1.

Polymers of acrylate and methacrylate used in samples 21 and 22 and sample 1 The polyether-modified dimethyl methoxy olefin used in the present invention has a molecular structure different from that of a monomer having a hydrophilic portion and a hydrophobic portion. Specifically, the polymers of acrylates and methacrylates differ from the polyether-modified dimethyloxane in that they do not contain Si.

The laminated ceramic electronic component is produced by laminating a plurality of ceramic green sheets and then baking them. If Si is contained in the ceramic green sheets, the Si remains in the laminated ceramic electronic components without being removed. As a result, the electrostatic capacitance and electrical resistance of the laminated ceramic electronic component may be adversely affected. In contrast, polymers of acrylates and methacrylates do not contain Si, and all components are decomposed upon firing. Therefore, the ceramic green sheet containing the polymer of acrylate and methacrylate as a release agent hardly adversely affects the electrical characteristics of the resulting laminated ceramic electronic component.

Further, in the samples 21 and 22 produced in Experimental Example 3, the weight ratio of the polymer of the acrylate and the methacrylate to the ceramic particles in the ceramic slurry: 100 parts by weight was set to 1 part by weight. But this is only an example. The weight ratio of the polymer of the acrylate and the methacrylate to the ceramic particles in the ceramic slurry of 100 parts by weight is, for example, 0.1 part by weight or more and 4 parts by weight or less, and it is confirmed that the peel strength is sufficiently lowered.

Claims (8)

A method for producing a ceramic green sheet, comprising: a step of preparing a ceramic slurry comprising ceramic particles, a solvent-soluble polymer having at least one of a hydroxyl group and a carboxyl group, a solvent, and a hydrophilic portion and a release agent for both hydrophobic portions, the ceramic slurry is applied onto a substrate and dried to form a ceramic green sheet on the substrate, and then the ceramic green sheet is then applied to the substrate The step of stripping. The method for producing a ceramic green sheet according to claim 1, wherein the hydrophilic portion of the release agent is a polyether, and the hydrophobic portion is a polyalkyl siloxane. The method for producing a ceramic green sheet according to claim 2, wherein the hydrophobic portion in the mold release agent is polydimethyl siloxane. The method for producing a ceramic green sheet according to claim 1, wherein the release agent is a polymer of acrylate and methacrylate. A ceramic green sheet comprising: ceramic particles, a solvent-soluble polymer having at least one of a hydroxyl group and a carboxyl group, a release agent having both a hydrophilic portion and a hydrophobic portion, and the ceramic green sheet is loaded Place on the substrate. The ceramic green sheet according to claim 5, wherein the hydrophilic portion of the mold release agent is a polyether, and the hydrophobic portion is a polyalkyl siloxane. The ceramic green sheet of claim 6, wherein the hydrophobic portion of the mold release agent is polydimethyl methoxyoxane. The ceramic green sheet of claim 5, wherein the release agent is a polymer of acrylate and methacrylate.