JP4415554B2 - Manufacturing method of multilayer ceramic electronic component - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method of manufacturing a multilayer ceramic electronic component such as a multilayer ceramic capacitor.
[0002]
[Prior art]
The following processes are taken for the production of the multilayer ceramic electronic component (see Patent Documents 1 and 2).
[0003]
{Circle around (1)} A long film wound up in a roll shape is drawn out, and a ceramic green sheet is applied and formed to a predetermined thickness on the drawn film (base material).
[0004]
(2) The film on which the ceramic green sheet is formed is again wound into a roll.
[0005]
(3) The green sheet forming film is pulled out from the roll, and an electrode pattern for a plurality of parts is formed on the ceramic green sheet using appropriate means such as pressure film printing or sputtering.
[0006]
(4) Only the ceramic green sheet on which the electrode pattern is formed is sequentially extracted in a rectangular shape using a cutting blade and a vacuum suction head.
[0007]
(5) A laminated body block is formed by laminating a predetermined number of ceramic green sheets with electrodes extracted in a rectangular shape.
[0008]
(6) The laminate block is cut into parts and fired.
[0009]
(7) External electrodes are formed on the fired component unit.
[0010]
[Patent Document 1]
Japanese Patent Application No. 2001-118743
[Patent Document 2]
Japanese Patent Application No. 4-78118
[0011]
[Problems to be solved by the invention]
The conventional method using a long film as a base material on which a ceramic green sheet is applied and formed has the following problems.
First, the manufacturing characteristics of the long film will be described. When a long film with high smoothness is wound up at a high speed in a roll shape, air is easily caught between film layers, and winding deviation is likely to occur. In addition, the sliding of the film is poor, and scratches are likely to occur due to rubbing between the guide roller and the films. In order to suppress the occurrence of such problems, in the production of long films, fillers are intentionally mixed in the raw material resin, and fine protrusions are formed on the film surface to improve air escape and slipperiness. ing.
[0012]
Further, in the film manufacturing process, protrusions due to contamination that cannot be removed may exist on the film surface. In particular, when a release agent for facilitating the peeling of the ceramic green sheet is applied to the film surface, solid materials that cannot be filtered are mixed in the release agent stock solution. Such solids may appear as protrusions on the film surface. In addition, there are inhomogeneous portions such as local alteration, dents, and uneven thickness on the film surface.
[0013]
When the green sheet is formed using the long film thus produced as a base material, the ceramic green sheet is applied and formed on an abnormal part such as a protrusion existing on the film surface. Then, the ceramic green sheet in the abnormal part becomes a defect shape. For example, if there are high protrusions on the film surface, the thickness of the ceramic green sheet is reduced at that part, and the sheet breaks when the ceramic green sheet is handled or fired. Cause a short circuit. An electronic component in which a short circuit has occurred becomes a defective product.
Such an inconvenience is less likely to occur in a multilayer capacitor having a large element thickness and a relatively thick sheet to be laminated. However, in response to recent demands for miniaturization, for example, multilayer capacitors having a ceramic green sheet thickness of 3 μm or less are manufactured. However, there are protrusions with a height of about 1 to 3 μm as abnormal parts on the film surface that is the base material, so this abnormal part may break through the ceramic green sheet formed on the film surface, In this case, the thickness of the ceramic green sheet becomes extremely thin, and the ceramic green sheet is torn by a slight force due to external factors.
Therefore, in an electronic component formed by stacking sheets having such a shape, the probability of occurrence of a short circuit increases.
[0014]
Since abnormal portions on the long film are irregularly distributed on the film surface, the shape defects of the ceramic green sheet formed on the film are also irregularly distributed. Accordingly, the shape defects are more widely dispersed as the number of laminations increases in the laminate block produced by sequentially laminating ceramic green sheets. As a result, many parts obtained by cutting the laminated body block have shape defects. As a result, the yield of non-defective products decreases, which in turn causes a decrease in production capacity and an increase in manufacturing costs.
[0015]
The present invention has been made by paying attention to such a situation, and is capable of increasing the yield of non-defective products by forming a laminated body block in a state where dispersion of shape defects is suppressed. It is an object to provide a method.
[0016]
[Means for Solving the Problems]
In order to achieve the above object, the present invention is configured as follows.
[0017]
That is, the present invention On the surface that is the work area for forming the ceramic green sheet Substrate having a convex defect-shaped part In contrast, a ceramic green sheet is formed by applying a ceramic slurry to the surface of the base material, and a plurality of the ceramic green sheets are formed by repeatedly using the base material. A method of manufacturing a multilayer ceramic electronic component by forming a multilayer block by laminating a plurality of ceramic green sheets, and cutting the formed multilayer block in component units,
All of the plurality of ceramic green sheets constituting the same laminate block are made the same base material. And forming the thickness of each ceramic green sheet Formed at 3 μm or less, and in-plane direction of each ceramic green sheet and position of each ceramic green sheet One And the position of the defect forming part of each ceramic green sheet formed by the defect forming part of the base material One Laminated and stacked.
[0020]
According to these methods, the shape defects formed in the plurality of ceramic green sheets formed on the same substrate are substantially at the same position in a plan view. When such ceramic green sheets are laminated, planar dispersion of shape defects in the laminate block is suppressed. Therefore, defective parts such as a short circuit caused by a shape defect can be concentrated on a specific part part without being dispersed.
[0021]
Conventionally, the number of electronic components to be discarded has increased because the defective portions have been dispersed. On the other hand, in the present invention, the number of electronic components to be disposed of can be greatly reduced by concentrating defective parts.
[0022]
In order to maximize the effects of the present invention, all the ceramic green sheets constituting the same laminate block are made the same base material. Surface of It is preferable to form by.
The present invention provides the same base material A ceramic green sheet is formed on the surface of the The ceramic green sheet is preferably formed with a thickness of 3 μm or less. In the manufacture of electronic components that require the formation of green sheets with such a thickness, application of the present invention will cause defects such as short circuits of electronic components caused by protrusions present on the surface of the film that will be the substrate. A particularly remarkable effect can be expected in that the yield can be improved by solving the problem of facilitating the process.
[0023]
In the present invention, a ceramic green sheet is preferably formed by subjecting the surface of the same base material to a mold release treatment. If it does so, a ceramic green sheet can be peeled from a base material with a small force without difficulty, and a deformation | transformation of the ceramic green sheet at the time of peeling can be suppressed. Further, even if the base material is soft, it can be used repeatedly without being deformed.
[0024]
In the present invention, it is preferable to use a hard flat plate or a hard cylindrical body as the same base material, and form a ceramic green sheet on the flat surface of the hard flat plate or on the outer peripheral surface of the hard cylindrical body. By doing so, the hard base material is not deformed even when the ceramic green sheet is repeatedly peeled, and the frequency of replacement of the base material can be reduced.
[0025]
In this case, it is preferable to use a glass flat plate as the hard flat plate which is the same base material. If it does so, a base material with high surface accuracy can be obtained cheaply.
[0027]
In addition, each invention of the present invention mentions that the direction of the in-plane direction of each ceramic green sheet and the position of each ceramic green sheet are substantially matched to be laminated as a constituent requirement. The term “substantially coincidence” in this case is not a concept including only perfectly matching the positions of the ceramic green sheets. The state in which the ceramic green sheet is shifted within the range of the component unit size of the multilayer ceramic electronic component obtained by cutting the multilayer body block is also included in the substantially aligned state defined in the present invention. In the present invention, the ceramic green sheets may be laminated so that parts having the same defect shape portion of the ceramic green sheet due to the same defect shape portion existing on the substrate surface are formed in the same component unit. All methods in which the stacking positions of the ceramic green sheets are shifted within such a range fall within the scope of the technical idea of the present invention.
[0028]
In addition, the ceramic green sheet laminating step performed in the present invention may be performed by peeling the ceramic green sheet from the base material and then pressing the ceramic green sheet with another ceramic green sheet. It may be carried out by peeling off from the base material after pressure bonding to another ceramic green sheet.
[0029]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows a basic conceptual diagram of a method for manufacturing a multilayer ceramic electronic component according to the present invention.
[0030]
In this method, a ceramic green sheet 2 as a dielectric layer between internal electrodes is formed to a predetermined thickness by applying a ceramic slurry to the surface of the substrate 1 by an appropriate means. Formed ceramic green sheet 2 An electrode pattern 3 is formed thereon by appropriate means. The formed ceramic green sheet with electrode 2 is peeled from the substrate 1. And the ceramic green sheet 2 with an electrode is repeatedly formed using the same base material 1. FIG. The laminated ceramic block 2 is formed by laminating the formed ceramic green sheets 2 with electrodes.
[0031]
According to this manufacturing method, the ceramic green sheet 2 formed using the same base material 1 has a probability that the shape defect 6 exists at the same position corresponding to the abnormal part 5 such as a protrusion on the surface of the base material 1. Become very expensive. Therefore, such a ceramic green sheet 2 In the laminate block 4 that is laminated by aligning front and rear, left and right, the shape defect 6 of each layer is present at the same position in a plane. When the laminated body block 4 formed in this way is cut in parts, the shape defects 6 tend to concentrate on the same parts.
[0032]
In this manufacturing method, in the process of forming one laminated body block 4, all layers are formed by repeatedly using the same base material 1 as described above, so that shape defects 6 are concentrated and the highest defect reduction is achieved. The effect can be expected. However, the surface of the base material may deteriorate due to repeated sheet formation and peeling, and it may be difficult to form all the layers with the same base material. If it does so, it will be necessary to replace the base material 1 in the middle several times. In this case, as shown in the conceptual diagram of FIG. 2, the shape defect 6 corresponding to the abnormal part 5 on the surface of the base material is dispersed. However, even if it does so, the concentration degree of the shape defect 6 will become high compared with the case where each layer is formed on a respectively different base material (long film etc.).
[0033]
Furthermore, in the manufacturing method described above, ceramic green sheets formed on the same substrate 1 2 Are aligned in the front-rear and left-right directions so that the shape defect 6 of each layer is present at the same position in a plane. However, ceramic green sheets formed on the same substrate 1 2 If so, the shape defects 6 of each layer can be concentrated to some extent even if they are stacked without being aligned in the front-rear and left-right directions. Therefore, as compared with the conventional manufacturing method in which the shape defects are dispersed, the degree of concentration of the shape defects 6 is increased, and as a result, the yield is improved. In short, the shape defect 6 may be stored in one region that becomes an electronic component after cutting.
[0034]
The present invention can also be implemented in a manufacturing method using the following wet lamination method. As shown in FIG. 3, the ceramic green sheet 2 and the electrode pattern 3 are formed on the substrate 1. A ceramic green sheet 2 and an electrode pattern 3 are again formed thereon. This is repeated a plurality of times, and then the multi-layer sheet with electrodes is peeled from the substrate 1. The peeled multi-layer sheet is fed into the lamination stage. Furthermore, a plurality of multi-layer sheets with electrodes are formed by the same manufacturing method using the same base material 1. The multilayer block 4 is formed by laminating the formed multilayer sheets with electrodes on the lamination stage. Even in the laminate block 4 formed in this way, the shape defects 6 can be concentrated.
[0035]
By the way, in general, in the multilayer capacitor, when the counter electrode of the capacitor is formed on the ceramic green sheet 2 on the substrate, it is necessary to change the electrode position every other layer. As a manufacturing method therefor, there are the following methods.
The first method is a method called “fixed lamination method”, in which a plurality of ceramic green sheets 2 formed on the same substrate 1 are positioned with respect to each other as shown in FIG. The electrode pattern is formed by changing. A plurality of types of ceramic green sheets 2 having different electrode positions are alternately laminated.
The second method is a method called “lamination laminating method”, and as shown in FIG. 4B, one type of ceramic green in which electrode patterns at the same position are formed on the same substrate 1. A plurality of sheets 2 are formed. Then, the formed plurality of ceramic green sheets 2 are stacked with the positions shifted every other layer.
[0036]
If the present invention is implemented in the “fixed lamination method” (a), the shape defects of the ceramic green sheet 2 can be efficiently concentrated in a plane, and it is most effective in reducing the occurrence rate of defective products. Even when the present invention is carried out in the “lamination laminating system” (b), the defective product occurrence rate is sufficiently low as compared with the case where the ceramic green sheets 2 of the respective layers are formed with different base materials.
[0037]
Here, the base material 1 utilizes not only a flat plate shape but also a cylindrical shape, and its flat surface or circumferential surface can be used as a sheet forming surface. As the material of the substrate 1, resin (including a film-like material), metal, glass, ceramic, or the like can be used. On the sheet-forming surface of the substrate 1, a ceramic green sheet 2 Easy peeling of ceramic green sheet 2 In order to prevent deformation of itself, it is desirable to perform a mold release process such as a coating process of a silicon resin solution.
[0038]
As means for applying the ceramic slurry to the surface of the substrate 1, means such as a blade coater, a die coater, a gravure coater, screen printing, and a spin coater can be appropriately selected. When applying the ceramic slurry, in order to realize repeated use of the same base material 1 that is a feature of the present invention, the ceramic slurry is intermittently applied to the surface of the base material, and after the sheet is dried, peeling and lamination are performed. Thereafter, the same treatment may be repeated on the same substrate 1 again.
[0039]
Further, as will be described later, the ceramic green sheet 2 formed on the surface of the substrate 1 may be directly laminated by thermocompression bonding, or may be laminated by a separately prepared lamination stage.
[0040]
Moreover, as a formation means of the electrode pattern 3 used as an internal electrode, screen printing, gravure printing, inkjet printing, electrophotography, gas deposition, sputtering, vapor deposition, a die coater, etc. can be selected suitably. In addition to forming the electrode pattern 3 directly on the ceramic green sheet 2 on the substrate using these means, it is also possible to transfer the electrode pattern formed on another substrate onto the ceramic green sheet 2.
[0041]
Next, some of the manufacturing methods of various multilayer ceramic electronic components that can achieve the same effect by implementing the method of the present invention will be described with reference to FIGS.
[0042]
First example (see FIG. 5)
In this example, first, as shown in FIG. 5 (a), a plate-like base material 1 made of a hard material such as glass is moved relative to a coating die 7 that receives the supply of a ceramic slurry, to thereby form a base material. A ceramic green sheet 2 having a predetermined thickness is formed on the surface of 1.
Next, as shown in FIG. 5B, an electrode pattern 3 is formed on the surface of the formed ceramic green sheet 2 by appropriate means. Next, as shown in FIG. 5C, the ceramic green sheet 2 provided with the electrode pattern 3 is peeled from the base material 1 using a suction roller 8 or the like. The base material 1 from which the ceramic green sheet 2 has been peeled returns. After the return movement, the next sheet is formed on the substrate 1.
[0043]
The ceramic green sheet 2 with the electrode pattern peeled off from the substrate 1 is carried onto the lamination stage 9, and the front, rear, left and right edges are formed on the ceramic green sheet 2 with the electrode pattern similarly formed using the same substrate 1. Laminate sequentially with the parts properly aligned.
[0044]
Thereafter, this is repeated to form a laminate block 4 in which a predetermined number of ceramic green sheets 2 with electrode patterns are laminated.
[0045]
Second example (see FIG. 6)
In this example, as shown in FIG. 6A, a ceramic green sheet 2 having a predetermined thickness is formed on the surface of a flat substrate 1 made of a hard material such as glass. Next, as shown in FIG. 6B, the ceramic green sheet 2 is peeled off from the base material 1 using the suction roller 8 or the like, and is attached to the suction roller 8 or the like. Next, as shown in FIG. 6C, the ceramic green sheet 2 attached to the suction roller 8 or the like is carried onto the lamination stage 9. The ceramic green sheet 2 on which the electrode pattern 3 is formed is first placed and laminated on the lamination stage 9, and the ceramic green sheet 2 carried on the uppermost sheet is aligned and laminated. When the suction roller 8 is used, the lamination process is performed as follows. Lamination is performed while releasing suction to the suction roller 8 and ejecting air or the like to the suction roller 8 instead. Then, the ceramic green sheet 2 can be easily peeled from the suction roller 8.
Next, as shown in FIG. 6D, the electrode pattern 3 is formed on the surface of the ceramic green sheet 2 on the lamination stage 9. Thereafter, this is repeated to form a laminate block 4 in which a predetermined number of ceramic green sheets 2 with electrode patterns are laminated.
[0046]
Third example (see FIG. 7)
In this example, as shown in FIG. 7A, a ceramic green sheet 2 having a predetermined thickness is formed on the surface of a flat substrate 1 made of a hard material such as glass using a coating die 7. Next, as shown in FIG. 7B, an electrode pattern 3 is formed on the surface of the formed ceramic green sheet 2. Next, as shown in FIG. 7C, the lamination stage 9 is lowered from above the ceramic green sheet 2 provided with the electrode pattern 3, and the ceramic green sheet 2 with the electrode pattern is pressed and transferred to the lower surface of the lamination stage 9. To do.
[0047]
Thereafter, by repeating this, a laminated body block 4 in which a predetermined number of ceramic green sheets 2 with electrode patterns are laminated is formed on the lower surface of the laminated stage 9.
[0048]
Fourth example (see FIG. 8)
In this example, as shown in FIG. 8A, a ceramic green sheet 2 having a predetermined thickness is formed on the surface of a flat substrate 1 made of a hard material such as glass using a coating die 7. Next, as shown in FIG. 8 (b), the lamination stage 9 is lowered from above the ceramic green sheet 2, the ceramic green sheet 2 is pressure transferred, and then, as shown in FIG. 8 (c), The electrode pattern 3 is formed on the lower surface of the ceramic green sheet 2 held on the lower surface of the lamination stage 9.
[0049]
Thereafter, by repeating this, a laminated body block 4 in which a predetermined number of ceramic green sheets 2 with electrode patterns are laminated is formed on the lower surface of the laminated stage 9.
[0050]
5th example (refer FIG. 9)
In this example, a cylindrical material made of a hard material is used as the base material 1. First, as shown in FIG. 9A, the base material 1 and the coating die 7 are relatively rotated to rotate the base material 1. A ceramic green sheet 2 having a predetermined thickness is formed on the outer peripheral surface of the substrate. Next, as shown in FIG. 9B, the electrode pattern 3 is formed on the surface of the formed ceramic green sheet 2 by appropriate means. Next, as shown in FIG. 9C, the ceramic green sheet 2 provided with the electrode pattern 3 is peeled from the substrate 1 using the suction plate 10 or the like. The ceramic green sheet 2 with the electrode pattern peeled off from the substrate 1 is carried onto the lamination stage 9. Next, as shown in FIG. 9 (d), the same base material 1 is used to sequentially laminate on the ceramic green sheet 2 with the electrode pattern formed in the same manner with the front, rear, left and right end portions aligned correctly.
[0051]
This is repeated to form a laminate block 4 in which a predetermined number of ceramic green sheets 2 with electrode patterns are laminated.
[0052]
Sixth example (see FIG. 10)
In this example, as shown in FIG. 10A, a ceramic green sheet 2 having a predetermined thickness is formed on the outer peripheral surface of a cylindrical base material 1 made of a hard material by using a coating die 7. Next, as shown in FIG. 10B, the ceramic green sheet 2 is peeled off from the base material 1 using the suction plate 10 or the like and attached to the suction plate 10 or the like. Next, as shown in FIG. 10 (c), the ceramic green sheet 2 attached to the suction plate 10 or the like is carried onto the lamination stage 9. The ceramic green sheet 2 on which the electrode pattern 3 is formed is placed on the lamination stage 9 in advance, and the ceramic green sheet 2 carried on the uppermost sheet is aligned with the lamination stage from the suction plate 10. 9 is transferred and laminated. Next, as shown in FIG. 10 (d), the electrode pattern 3 is formed on the surface of the ceramic green sheet 2 on the lamination stage 9.
[0053]
This is repeated to form a laminate block 4 in which a predetermined number of ceramic green sheets 2 with electrode patterns are laminated.
[0054]
Seventh example (see FIG. 11)
In this example, as shown in FIG. 11A, a ceramic green sheet 2 having a predetermined thickness is formed on the outer peripheral surface of a columnar substrate 1 made of a hard material by using a coating die 7. Next, as shown in FIG. 11B, an electrode pattern 3 is formed on the surface of the formed ceramic green sheet 2. Next, as shown in FIG. 11C, the lamination stage 9 is lowered from above the ceramic green sheet 2 provided with the electrode pattern 3, and the ceramic green sheet 2 with the electrode pattern is pressed and transferred to the lower surface of the lamination stage 9. To do.
[0055]
By repeating this, a laminate block 4 in which a predetermined number of ceramic green sheets 2 with electrode patterns are laminated is formed on the lower surface of the lamination stage 9.
[0056]
Eighth example (see FIG. 12)
In this example, as shown in FIG. 12A, a ceramic green sheet 2 having a predetermined thickness is formed on the outer peripheral surface of a columnar base material 1 made of a hard material by using a coating die 7.
[0057]
Next, as shown in FIG. 12B, the lamination stage 9 is lowered from above the ceramic green sheet 2, and the ceramic green sheet 2 is pressure transferred from the substrate 1 to the lamination stage 9. Next, as shown in FIG. 12C, the electrode pattern 3 is formed on the lower surface of the ceramic green sheet 2 held on the lower surface of the lamination stage 9.
[0058]
By repeating this, a laminate block 4 in which a predetermined number of ceramic green sheets 2 with electrode patterns are laminated is formed on the lower surface of the lamination stage 9.
[0059]
Even if the present invention is carried out in each of the manufacturing methods described above, an effect comparable to that of the present invention can be obtained.
[0060]
Next, test results of manufacturing the multilayer capacitor by concretely carrying out the present invention will be shown.
[0061]
In this test, a 50 μm-thick PET (polyethylene tetrafluorite) film whose surface was subjected to a release treatment was cut into a strip shape, and the surface of the substrate 1 was ceramic green sheet 2 with a die coater. Is formed by coating. After the sheet is dried, the electrode pattern 3 is formed on the sheet by screen printing. The electrode-attached ceramic green sheet 2 formed in this way is laminated by thermocompression bonding to the laminate block 4 that has already been produced. After the sheet residue remaining on the base material 1 after the lamination is removed with a cleaner, the ceramic green sheet 2 is again formed on the base material 1 by coating. In order to form the counter electrode, the electrode pattern 3 is formed by shifting the position. Thereafter, the outer layer sheets are laminated to complete the laminate block 4. The completed laminate block 4 is cut into chips and fired. Furthermore, a multilayer ceramic capacitor is manufactured by subjecting the fired chip cut body to processing such as formation of external electrodes. In this case, the thickness of the ceramic green sheet is adjusted so that the thickness of the dielectric element between the internal electrodes is 1.0 μm.
[0062]
The short-circuit defect rate of a component (chip size 3216) prototyped using the laminate block thus formed is measured. At this time, the short defect rate was also measured as a comparative example in a product manufactured by a manufacturing method in which the substrate was not replaced and a product manufactured by a manufacturing method in which the number of substrate replacements was small. A comparison of the measurement results is shown in the chart of FIG. The surface of the base material used in this test had a projection of 1 mm or more in height of 500 mm. ² Those having an average of 8 per one were used. Moreover, as the base material 1,
A PET (polyethylene terephthalate) film and a glass substrate were used.
[0063]
As can be seen from the test results, it was found that the short-circuit defect rate decreases as the same substrate 1 is repeatedly used. It has also been found that the short-circuit defect rate of 30% or less can be suppressed if used repeatedly at least twice.
[0064]
【The invention's effect】
As is clear from the above description, according to the method for manufacturing a multilayer ceramic electronic component according to the present invention, a plurality of ceramic green sheets to be stacked are formed on the same base material, thereby forming a defect shape at the same position. It was possible to laminate a plurality of ceramic green sheets having Therefore, it was possible to suppress planar dispersion of the shape defect site in the laminate block. This makes it possible to concentrate specific parts on defective parts such as shorts due to shape defects, and as a result, the rate of defective products is reduced and the yield of non-defective products is increased, thereby reducing manufacturing costs. It became.
[0065]
In addition, the amount of the base material used can be remarkably reduced as compared with the method using a long film for the base material, and this also contributes to the reduction of the manufacturing cost.
[Brief description of the drawings]
FIG. 1 is a basic conceptual diagram of a method of the present invention.
FIG. 2 is a conceptual diagram showing a modification of the method of the present invention.
FIG. 3 is a conceptual diagram showing a modified example of the method of the present invention.
FIG. 4 is a conceptual diagram showing two forms when the method of the present invention is applied to the production of a multilayer capacitor.
FIG. 5 is a schematic process diagram showing a first example of an embodiment for carrying out the method of the present invention.
FIG. 6 is a schematic process diagram showing a second example of an embodiment for carrying out the method of the present invention.
FIG. 7 is a schematic process diagram showing a third example of the embodiment for carrying out the method of the present invention.
FIG. 8 is a schematic process diagram showing a fourth example of the embodiment of the method of the present invention.
FIG. 9 is a schematic process chart showing a fifth example of the embodiment for carrying out the method of the present invention.
FIG. 10 is a schematic process chart showing a sixth example of the embodiment for carrying out the method of the present invention.
FIG. 11 is a schematic process diagram showing a seventh example of the embodiment for carrying out the method of the present invention.
FIG. 12 is a schematic process diagram showing an eighth example of the embodiment for carrying out the method of the present invention.
FIG. 13 is a chart showing test results of the method of the present invention.
[Explanation of symbols]
1 Base material
2 Ceramic green sheet
3 Electrode pattern
4 Laminate block
5 abnormal parts
6 Shape defects

Claims (4)

A ceramic green sheet is formed by applying a ceramic slurry to the surface of the base material having a convex defect-shaped part on the surface, which is a work area for forming the ceramic green sheet, A plurality of ceramic green sheets are repeatedly formed , a multilayer block is formed by laminating the plurality of ceramic green sheets, and a multilayer ceramic electronic component is manufactured by cutting the formed multilayer block into parts. A way to
All of the plurality of ceramic green sheets constituting the same laminate block are formed on the surface of the same base material , and the thickness of each ceramic green sheet is 3 μm or less. and position causes one Itasa the orientation and the ceramic green sheets in the in-plane direction of the ceramic green sheets, one of the presence position of the defect portions of the barrier on each ceramic green sheet formed by the defect formation site of the substrate致Let them stack,
A method for producing a multilayer ceramic electronic component. In the manufacturing method of the multilayer ceramic electronic component according to claim 1,
Forming the ceramic green sheet subjected to release treatment wherein the surface of said same substrate,
A method for producing a multilayer ceramic electronic component. In the manufacturing method of the multilayer ceramic electronic component according to claim 1 or 2,
Using a hard flat plate or a hard cylinder as the same base material, forming the ceramic green sheet on the flat surface of the hard flat plate, or on the outer peripheral surface of the hard cylinder,
A method for producing a multilayer ceramic electronic component. In the manufacturing method of the multilayer ceramic electronic component according to claim 3,
A glass flat plate is used as the hard flat plate which is the same base material.
A method for producing a multilayer ceramic electronic component.

Images