TWI487225B - Discharge electrode unit - Google Patents

Description

Discharge electrode unit

The present invention relates to a discharge electrode for corona discharge and a discharge electrode unit supporting the discharge electrode.

In the prior art, the invention described in the patent document 1 (JP-A-2007-134141, the name of the invention: the electrode needle unit and the ionization device of the ionization device) is already public. know.

In the prior art disclosed in Patent Document 1, the electrode needle is supported by the support member on a side close to the base of the electrode needle, and the air flows around the tip end portion of the electrode needle. Therefore, the dust near the front end of the electrode needle is made by air. The dirt and the like are blown away without adhering to the dust. Dirt and so on.

In addition, the invention described in the patent document 2 (Japanese Laid-Open Patent Publication No. Hei 8-88074, the name of the invention, the discharge electrode for the ion generator) is known to the public.

In addition, the invention described in the patent document 3 (Japanese Laid-Open Patent Publication No. 2004-247107, entitled: Nozzle Discharge Electrode) is known to the public.

In the prior art disclosed in Patent Documents 2 and 3, the tip end of the nozzle is formed in a needle shape, and the high-speed wind-driven ions blown from the center of the nozzle convey ions to a long distance. In the discharge electrode of the prior art disclosed in the above Patent Documents 2 and 3, it is expected that dust is caused by the wind. The effect that dirt or the like is difficult to adhere to.

[Patent Document 1] JP-A-2007-134141 (paragraph 0055, Fig. 1)

[Patent Document 2] Japanese Patent Publication No. 8-88074 (Fig. 1, Fig. 2)

[Patent Document 3] JP-A-2004-247107 (Fig. 1, Fig. 2)

In the conventional technique disclosed in Patent Documents 1, 2, and 3, in the case where a foreign matter adheres closely to the tip end of the electrode needle, there is a case where the foreign matter cannot be removed by the air current alone. Explain this point. Even with the wind, the dust near the front end of the electrode needle. When dirt or the like is blown away, dust, dirt, siloxane, or the like (hereinafter referred to as "foreign matter") is gradually accumulated at the tip end of the electrode needle to be enlarged. In particular, when a low molecular weight oxime contained in a silicone resin product is volatilized to generate a gaseous siloxane, and the gaseous siloxane is deposited and adhered to become a foreign substance (a siloxane), it is manufactured. In a clean room such as a semiconductor wafer, if the foreign matter adheres to the surface of the circuit, contact failure occurs, so it is necessary to remove it reliably.

Further, in the prior art disclosed in Patent Documents 1, 2, and 3, an ionizer in which air does not flow cannot be applied. Therefore, it is necessary to remove the method other than blowing air, which is an optional option.

Further, in the prior art disclosed in Patent Documents 2 and 3, since the electrode is not the tip end, there is a problem that the discharge characteristics are inferior to those of the needle electrode.

Here, the present invention has been made to solve the above problems, and an object thereof is to provide a discharge electrode and a discharge electrode unit for corona discharge, which can be easily removed even if a tip end portion of a tip end is adhered to a foreign matter. Achieve good discharge characteristics for a long time.

The discharge electrode unit according to the first aspect of the present invention is characterized in that: a discharge electrode having a needle electrode and a sliding body, wherein the needle electrode is formed by an electric conductor, and the sliding body has a a hole portion and a front end portion, wherein the needle electrode is inserted into the hole portion and fitted to a loose fit, and the front end portion is formed with an opening portion that communicates with the hole portion, and the sliding body faces the needle The electrode is slid; an electrode support portion supports the needle electrode; a slider support portion supports the slider; and a spring drives the electrode support portion and the slider support portion; wherein the needle electrode and the needle electrode The above sliding body is supported by relative movement.

Further, in the discharge electrode unit according to the first aspect of the invention, in the discharge electrode unit according to the first aspect of the invention, the sliding body is a cylindrical body.

Further, in the discharge electrode unit according to the first aspect of the invention, in the discharge electrode unit according to the first aspect of the invention, the sliding body is a cylindrical body and has a tip end portion.

Further, the discharge electrode unit according to the fourth aspect of the present invention is characterized in that the discharge electrode according to the first aspect of the patent application is In the middle unit, the sliding body is a cylindrical body, and a space portion having a diameter larger than a diameter of the opening is formed in the middle unit, and the space portion communicates with the hole portion.

Further, in the discharge electrode unit according to the first aspect of the invention, in the discharge electrode unit according to the first aspect of the invention, the sliding body is an annular body.

The discharge electrode unit according to any one of claims 1 to 5, wherein the sliding body is formed of an electric conductor; And the needle electrode is electrically connected to the sliding body.

Further, the discharge electrode unit according to the seventh aspect of the invention is characterized in that the discharge electrode unit according to the first aspect of the invention further includes a drive source for imparting the needle electrode and the above The sliding body is the driving force for relative movement.

Further, in the discharge electrode unit according to the seventh aspect of the invention, the drive source is a sounding body or an ultrasonic vibrator.

Further, in the discharge electrode unit according to the seventh aspect of the invention, the drive source is a vibration motor.

The discharge electrode unit according to claim 10, wherein the discharge electrode unit according to the first aspect of the invention includes an adjustment unit that adjusts the needle in the electrode support portion. The mounting position of the electrode.

Further, in the discharge electrode unit according to the first aspect of the invention, in the discharge electrode unit of the first aspect of the invention, the discharge electrode is plural; the electrode support portion supports a plurality of a discharge electrode; and the slider support portion supports a plurality of sliders.

Further, in the discharge electrode unit according to the eleventh aspect of the invention, in the discharge electrode unit of the invention of claim 11, the discharge electrodes are arranged in a line.

Further, in the discharge electrode unit according to claim 11, the discharge electrode is arranged in a plurality of rows and a plurality of columns in the discharge electrode unit according to claim 11 of the invention.

According to the present invention as described above, it is possible to provide a discharge electrode and a discharge electrode unit for corona discharge, which can be easily removed even if the tip end portion of the tip end is adhered to a foreign matter, thereby achieving good discharge for a long period of time. characteristic.

[Best form for implementing the invention]

Next, the best mode for carrying out the invention will be described with reference to the drawings. Fig. 1 is an explanatory view of a discharge electrode and a discharge electrode unit of the present embodiment, wherein Fig. 1(a) is an enlarged view of the tip end of the discharge electrode, and Fig. 1(b) is a view showing a configuration of the discharge electrode unit, and 1(c). The figure is an explanatory diagram of the operation of the discharge electrode unit. The discharge electrode 1 has a needle electrode 1a and a slider 1b as shown in Fig. 1(a).

The needle electrode 1a is formed of a conductor and has a needle-like body whose tip end portion is formed as a tip end.

The slider 1b is formed into a cylindrical body, and further has a distal end portion 1c, an opening portion 1d, and a hole portion 1e. The front end portion 1c is formed in an annular shape. The opening 1d is formed on both sides of the hole 1e, and the opening 1d and the hole 1e are formed to have the same diameter. The hole portion 1e is a linear hole.

The needle electrode 1a described above is inserted into the hole 1e of the slider 1b. The cross-sectional diameter of the hole portion 1e of the slider 1b is formed to be larger than the cross-sectional diameter of the needle electrode 1a so as to be fitted into a loose fit, so that the slider 1b can be easily moved along the needle electrode 1a, and It is said that the needle electrode 1a moves along the slider 1b, that is, the relative movement of the needle electrode 1a and the slider 1b.

Next, the principle of foreign matter removal using the discharge electrode 1 will be described. In particular, as shown in Fig. 1(a), when a foreign matter D such as an insulating siloxane is attached to the foremost end of the needle electrode 1a, the sliding body 1b is directed to the side of the foreign matter D. In the direction of the arrow a, the front end portion 1c directly contacts the foreign matter D and pushes the foreign matter D toward the side of the arrow a to remove the foreign matter D.

Next, the discharge electrode unit 100 including the discharge electrode 1 described above will be described. The discharge electrode unit 100 has a discharge electrode 1, an electrode support portion 10, a slider support portion 20, and a spring 30 as shown in Fig. 1(b). The voltage supply line 40 is electrically connected to the discharge electrode 1 and supplies a high voltage for generating ions.

Next, the configuration of such a discharge electrode unit 100 will be described.

The electrode support portion 10 is formed by using an insulator as a material, and supports the needle electrode 1a.

The slider support portion 20 is formed by using an insulator as a material, and supports the slider 1b.

The spring 30 is a specific example of the actuating portion of the present invention, which drives the electrode support portion 10 and the slider support portion 20. The actuation force is a compression actuation force that is in the state shown in the first (b) state from the state shown in Fig. 1(c). On the other hand, in the discharge electrode unit 100, the needle electrode 1a and the slider 1b are relatively moved.

Next, the operation of such a discharge electrode unit 100 will be described. For example, the electrode support portion 10 is attached to a casing (not shown) to fix the needle electrode 1a at a predetermined position, and the movement of the slider 1b with respect to the needle electrode 1a will be described. In this case, as shown in FIG. 1(b), the foreign matter D is in a state of being attached to the tip end of the needle electrode 1a. Then, for example, once the slider 1b (or the slider supporting portion 20) is manually moved, the distal end portion 1c hits the foreign matter D, and as shown in Fig. 1(c), the foreign matter D is directed to the side of the arrow b. Push to remove foreign matter D. After the removal, the slider 1b (or the slider support portion 20) is released, and the spring force (compression force) of the spring 30 is returned to the original position as shown in Fig. 1(b).

When the discharge electrode 1 and the discharge electrode unit 100 of the present embodiment are used, it is only necessary to add a simple mechanical structure and the mechanical structure is actuated, so that foreign matter can be removed, and a long-term discharge of the discharge electrode 1 can be maintained. The characteristics, in addition, by removing the foreign matter such as helium oxide in advance, without the foreign matter being ejected to the object to be removed, it is possible to surely remove only the charge for the object to be removed.

Next, other aspects for carrying out the invention will be described based on the drawings. Fig. 2 is an explanatory view of a discharge electrode and a discharge electrode unit of another embodiment, in which Fig. 2(a) is an enlarged view of the tip end of the discharge electrode, Fig. 2(b) is a view showing a configuration of the discharge electrode unit, and 2(c) The figure is an explanatory diagram of the operation of the discharge electrode unit. The discharge electrode 2 has a needle electrode 2a and a slider 2b as shown in Fig. 2(a).

The needle electrode 2a is formed of a conductor, and is a needle-like body whose tip end portion is formed as a tip end.

The slider 2b is formed into a cylindrical body, and further has a distal end portion 2c, an opening portion 2d, an inclined portion 2e, and a hole portion 2f. The tip end of the slider 2b is a trapezoidal conical tip formed with the inclined portion 2e as a slope, and the tip end portion 2c at the foremost end thereof has an annular shape. The opening 2d is formed on both sides of the hole 2f, and the opening 2d and the hole 2f are formed to have the same diameter. The hole portion 2f is a linear hole.

The needle electrode 2a described above is inserted into the hole 2f of the slider 2b. The cross-sectional diameter of the hole portion 2f of the slider 2b is formed to be larger than the cross-sectional diameter of the needle electrode 2a, so that it is fitted into a loose fit, and the slider 2b is easily moved along the needle electrode 2a. It is said that the needle electrode 2a moves along the slider 2b, that is, the relative movement of the needle electrode 2a and the slider 2b.

Next, the principle of foreign matter removal using the discharge electrode 2 will be described. In particular, as shown in Fig. 2(a), when a foreign matter D such as an insulating siloxane is attached to the foremost end of the needle electrode 2a, the sliding body 2b is directed to the side of the foreign matter D. In the direction of the arrow c, the front end portion 2c directly contacts the foreign matter D and pushes the foreign matter D toward the side of the arrow c to remove the foreign matter D.

Next, the discharge electrode unit 200 including the discharge electrode 2 will be described. The discharge electrode unit 200 has a discharge electrode 2, an electrode support portion 10, a slider support portion 20, and a spring 30 as shown in Fig. 2(b). The voltage supply line 40 is electrically connected to the discharge electrode 2 and supplies a high voltage for generating ions.

Next, the configuration of such a discharge electrode unit 200 will be described.

The electrode support portion 10 is formed by using an insulator as a material, and supports the needle electrode 2a.

The slider support portion 20 is formed of an insulator as a material, and supports the slider 2b.

The spring 30 is a specific example of the actuating portion of the present invention, which drives the electrode support portion 10 and the slider support portion 20. The actuation force is a compression actuation force that is in the state shown in the second (b) state from the state shown in Fig. 2(c). On the other hand, in the discharge electrode unit 200, the needle electrode 2a and the slider 2b are relatively moved.

Next, the operation of such a discharge electrode unit 200 will be described. For example, the electrode support portion 10 is attached to a casing (not shown) to fix the needle electrode 2a at a predetermined position, and the movement of the slider 2b with respect to the needle electrode 2a will be described. In this case, as shown in FIG. 2(b), the foreign matter D is in a state of being attached to the tip end of the needle electrode 2a. Then, for example, when the slider 2b is manually moved, the distal end portion 1c hits the foreign matter D, and as shown in the second (c), the foreign matter D is pushed toward the side of the arrow d to remove the foreign matter D. After the removal, the slider 2b is released, and the spring force (compression force) of the spring 30 is returned to the original position as shown in Fig. 2(b).

When the discharge electrode 2, the discharge electrode unit 200, and the like of the present embodiment are used, it is only necessary to add a simple mechanical structure and the mechanical structure is actuated, so that foreign matter can be removed, and a long-term discharge of the discharge electrode 2 can be maintained. The characteristics, in addition, by removing the foreign matter such as helium oxide in advance, without the foreign matter being ejected to the object to be removed, it is possible to surely remove only the charge for the object to be removed.

Further, particularly in the present embodiment, since the discharge electrode 2 is a tip end, since a gas flow such as a lamina flow flows to the front end along the inclined portion 2e, the aforementioned low molecular weight contained in the silicone resin article. Since the gas-like siloxane which is generated by the volatilization of the oxyalkylene is difficult to reach the tip end of the discharge electrode 2 due to the gas flow, it is expected that the gas pentoxide can be prevented from being deposited and adhered to become the foreign matter D.

Next, other aspects for carrying out the invention will be described based on the drawings. Fig. 3 is an explanatory view of a discharge electrode and a discharge electrode unit of another embodiment, in which Fig. 3(a) is an enlarged view of the tip end of the discharge electrode, Fig. 3(b) is a view showing a configuration of the discharge electrode unit, and Fig. 3(c) The figure is an explanatory diagram of the operation of the discharge electrode unit. The discharge electrode 3 has a needle electrode 3a and a slider 3b as shown in Fig. 3(a).

The needle electrode 3a is formed of a conductor and has a needle-like body whose tip end portion is formed as a tip end.

The slider 3b is formed into a cylindrical body, and further has a distal end portion 3c, an opening portion 3d, a hole portion 3e, and a space portion 3f. The front end portion 3c is formed in an annular shape. The opening 3d is formed on both sides of the hole 3e, and the opening 3d and the hole 3e are formed to have the same diameter. The hole portion 3e is a linear hole. The space portion is in communication with the hole portion 3e, and the cross-sectional diameter of the space portion 3f is formed to be larger than the cross-sectional diameter of the hole portion 3e. The space portion 3f and the hole portion 3e form a plurality of holes. Further, although not shown in the drawing, a support portion for supporting the needle electrode 3a can be disposed in the hole portion 3e.

The above-mentioned needle electrode 3a is inserted into the hole portion 3e of the slider 3b, and is fitted with a loose fit, so that the slider 3b is easily moved along the needle electrode 3a, and can also be said to be needle-shaped. The electrode 3a moves along the slider 3b, which is the relative movement of the needle electrode 3a and the slider 3b.

Next, the principle of foreign matter removal using the discharge electrode 3 will be described. In particular, as shown in Fig. 3(a), when a foreign matter D such as an insulating siloxane is attached to the foremost end of the needle electrode 3a, the sliding body 3b is directed to the side of the foreign matter D. When the arrow e moves, the front end portion 3c directly contacts the foreign matter D and pushes the foreign matter D toward the side of the arrow e to remove the foreign matter D.

Next, the discharge electrode unit 300 including the discharge electrode 3 described above will be described. The discharge electrode unit 300 has a discharge electrode 3, an electrode support portion 10, a slider support portion 20, and a spring 30 as shown in Fig. 3(b). The voltage supply line 40 is electrically connected to the discharge electrode 3 and supplies a high voltage for generating ions.

Next, the configuration of such a discharge electrode unit 300 will be described.

The electrode support portion 10 is formed by using an insulator as a material, and supports the needle electrode 3a.

The slider support portion 20 is formed of an insulator as a material, and supports the slider 3b.

The spring 30 is a specific example of the actuating portion of the present invention, which drives the electrode support portion 10 and the slider support portion 20. The actuation force is a compression actuation force that is in the state shown in Fig. 3(b) and is in the state shown in Fig. 3(b). On the other hand, in the discharge electrode unit 300, the needle electrode 3a and the slider 3b are relatively moved.

Next, the operation of such a discharge electrode unit 300 will be described. For example, the electrode support portion 10 is attached to a casing (not shown) to fix the needle electrode 3a at a predetermined position, and the movement of the slider 3b with respect to the needle electrode 3a will be described. In this case, as shown in FIG. 3(b), the foreign matter D is in a state of being attached to the tip end of the needle electrode 3a. Then, for example, when the slider 3b is manually moved, the distal end portion 3c hits the foreign matter D, and as shown in the third (c), the foreign matter D is pushed toward the side of the arrow f to remove the foreign matter D. After the removal, the slider 3b is released, and the spring force (compression force) of the spring 30 is returned to the original position as shown in Fig. 3(b).

When the discharge electrode 3, the discharge electrode unit 300, and the like of the present embodiment are used, it is only necessary to add a simple mechanical structure and the mechanical structure is actuated, so that foreign matter can be removed, and a long-term discharge of the discharge electrode 3 can be maintained. The characteristics, in addition, by removing the foreign matter such as helium oxide in advance, without the foreign matter being ejected to the object to be removed, it is possible to surely remove only the charge for the object to be removed.

Further, the cleaning gas can be caused to flow from the fluid system circuit into the space portion 3f, and the cleaning gas can be ejected from the opening portion 3d via the hole portion 3e. The function of the space portion 3f is as a flow path, and this configuration can also be employed.

Next, other aspects for carrying out the invention will be described based on the drawings. Fig. 4 is an explanatory view of a discharge electrode and a discharge electrode unit of another embodiment, in which Fig. 4(a) is an enlarged view of the tip end of the discharge electrode, Fig. 4(b) is a view showing a configuration of the discharge electrode unit, and Fig. 4(c) The figure is an explanatory diagram of the operation of the discharge electrode unit. The discharge electrode 4 has a needle electrode 4a and a slider 4b as shown in Fig. 4(a).

The needle electrode 4a is formed of a conductor and has a needle-like body whose tip end portion is formed as a tip end.

The slider 4b is formed in an annular shape, and further has a distal end portion 4c, an opening portion 4d, and a hole portion 4e. The front end portion 4c is formed in an annular shape. The opening portion 4d is formed on both sides of the hole portion 4e, and the opening portion 4d and the hole portion 4e are formed to have the same diameter. The hole portion 4e is a linear hole.

The needle electrode 4a described above is inserted into the hole portion 4e of the slider 4b. The cross-sectional diameter of the hole portion 4e of the slider 4b is formed to be larger than the cross-sectional diameter of the needle electrode 4a so as to be fitted into a loose fit, so that the slider 4b is easily moved along the needle electrode 4a, and It is said that the needle electrode 4a moves along the slider 4b, that is, the relative movement of the needle electrode 4a and the slider 4b.

Next, the principle of foreign matter removal using the discharge electrode 4 will be described. In particular, as shown in Fig. 4(a), when a foreign matter D such as an insulating siloxane is attached to the foremost end of the needle electrode 4a, the sliding body 4b is directed to the side of the foreign matter D. In the direction in which the arrow g is moved, the distal end portion 4c directly contacts the foreign matter D and pushes the foreign matter D toward the side of the arrow g to remove the foreign matter D.

Next, the discharge electrode unit 400 including the discharge electrode 4 described above will be described. The discharge electrode unit 400 has a discharge electrode 4, an electrode support portion 10, a slider support portion 20, and a spring 30 as shown in Fig. 4(b). The voltage supply line 40 is electrically connected to the discharge electrode 4 and supplies a high voltage for generating ions.

Next, the configuration of such a discharge electrode unit 400 will be described.

The electrode support portion 10 is formed by using an insulator as a material, and supports the needle electrode 4a.

The slider support portion 20 is formed of an insulator as a material, and supports the slider 4b.

The spring 30 is a specific example of the actuating portion of the present invention, which drives the electrode support portion 10 and the slider support portion 20. The actuation force is a compression actuation force that is in the state shown in Fig. 4(b) from the state shown in Fig. 4(c). On the other hand, in the discharge electrode unit 400, the needle electrode 4a and the slider 4b are relatively moved.

Next, the operation of such a discharge electrode unit 400 will be described. For example, the electrode support portion 10 is attached to a casing (not shown) to fix the needle electrode 4a at a predetermined position, and the movement of the slider 4b with respect to the needle electrode 4a will be described. In this case, as shown in FIG. 4(b), the foreign matter D is in a state of being attached to the tip end of the needle electrode 4a. Then, for example, when the slider 4b is manually moved, the distal end portion 4c hits the foreign matter D, and as shown in Fig. 4(c), the foreign matter D is pushed toward the side of the arrow h to remove the foreign matter D. After the removal, the slider 4b is released, and the spring force (compression force) of the spring 30 is returned to the original position as shown in Fig. 4(b).

When the discharge electrode 4, the discharge electrode unit 400, and the like of the present embodiment are used, it is only necessary to add a simple mechanical structure and the mechanical structure is actuated, so that foreign matter can be removed, and a long-term discharge of the discharge electrode 4 can be maintained. The characteristics, in addition, by removing the foreign matter such as helium oxide in advance, without the foreign matter being ejected to the object to be removed, it is possible to surely remove only the charge for the object to be removed.

In particular, the slider 4b of the present embodiment is an annular body having a short vertical direction. When the general ions are generated, the slider 4b may be configured such that the slider 4b is disposed as far as possible from the tip end of the needle electrode 4a. It does not affect the formation of the electric field.

Next, other aspects for carrying out the invention will be described based on the drawings. Fig. 5 is an explanatory view showing a discharge electrode and a discharge electrode unit of another embodiment, wherein Fig. 5(a) is an explanatory view showing a modified form of the first discharge electrode and the discharge electrode unit, and Fig. 5(b) is a second discharge. Description of the improved form of the electrode and the discharge electrode unit, FIG. 5(c) is an explanatory view showing a modified form of the third discharge electrode and the discharge electrode unit, and FIG. 5(d) is a view showing the fourth discharge electrode and the discharge electrode unit An explanatory diagram of the improved form.

The discharge electrode 1 has a configuration including a connection portion 50 as shown in Fig. 5(a), and the connection portion 50 is a slider 1b formed by electrically connecting the needle electrode 1a and the conductor. The connecting portion 50 is a wire that is much longer than the amount of movement of the needle electrode 1a and the slider 1b, and the event of cutting the connecting portion 50 by the movement does not occur. Further, as the discharge electrode unit 100, a discharge electrode 1 further including the above-described connection portion 50 is provided.

If the slider 1b is assumed to be an insulator, once the needle electrode 1a is applied with a high voltage, the slider 1b is locally charged by electrostatic induction, and the electric field formed by the needle electrode 1a becomes unstable. Here, by electrically connecting the slider 1b composed of the needle electrode 1a and the conductor, local charging does not occur, and the electric field formed by the needle electrode 1a is stabilized. As a result, since the connecting portion 50 is further provided, the performance, particularly the discharge characteristics, is improved.

Further, as shown in FIG. 5(b), the discharge electrode 200 can be realized by electrically connecting the needle electrode 2a and the slider 2b of the discharge electrode 2 described above with reference to FIG. 2(a) via the connection portion 50. The performance of the discharge electrode unit 200 and the like, particularly the improvement of the discharge characteristics.

Further, as shown in Fig. 5(c), the discharge electrode can be realized by electrically connecting the needle electrode 3a and the slider 3b of the discharge electrode 3 described above with reference to Fig. 3(a) via the connection portion 50. 300. Improvement in performance, particularly discharge characteristics, of the discharge electrode unit 300 and the like.

Further, as shown in Fig. 5(d), the discharge electrode can be realized by electrically connecting the needle electrode 4a and the slider 4b of the discharge electrode 4 described above with reference to Fig. 4(a) via the connection portion 50. 400, the performance of the discharge electrode unit 400, and the like, in particular, an improvement in discharge characteristics.

Next, other aspects for carrying out the invention will be described based on the drawings. Fig. 6 is an explanatory view showing a discharge electrode and a discharge electrode unit of another embodiment, wherein Fig. 6(a) is an explanatory view showing a modified form of the first discharge electrode and the discharge electrode unit, and Fig. 6(b) is a second discharge. Description of the improved form of the electrode and the discharge electrode unit, FIG. 6(c) is an explanatory view showing a modified form of the third discharge electrode and the discharge electrode unit, and FIG. 6(d) is a view showing the fourth discharge electrode and the discharge electrode unit An explanatory diagram of the improved form.

The discharge electrode 1 has a configuration including a connection portion 50 as shown in Fig. 6(a), and the connection portion 50 is a slider 1b formed by electrically connecting the needle electrode 1a and the conductor. Then, as the discharge electrode unit 100, which is equipped with the discharge electrode 1 and further including a drive source 60, the drive source 60 is provided with power for relatively moving the needle electrode 1a and the slider 1b. And the function brought by the connection part 50. The effect is the stabilization of the electric field, the improvement of the discharge characteristics, and the like as described above. Therefore, the description of the drive source 60 will be omitted.

The drive source 60 is a sounding body, specifically an element like a buzzer. The sound of the buzzer sounds while vibrating, and vibration is applied to the electrode support portion 10 on which the drive source 60 is disposed. Thereby, the vibration is transmitted to the needle electrode 1a, the spring 30, and the like, and the slider 1b is vibrated in the direction of the arrow i. Thereby, the slider 1b contacts the foreign material located at the front end of the needle electrode 1a, and removes a foreign material.

In addition, the buzzer can be replaced with a small speaker as another sounding body as the driving source 60. The small speaker is connected to the output terminal of the amplifier, and the input terminal of the amplifier is connected to a frequency oscillator. Since the frequency oscillator can be used to emit a desired frequency or to perform continuous frequency scanning from a low frequency to a high frequency and to emit a predetermined volume, it is possible to impart any vibration required for the slider 1b to reliably reach the foreign matter. Further, it is also expected that the needle electrode 1a itself vibrates to shake the foreign matter.

Also, the sounding body can be replaced with an ultrasonic vibrator as the driving source 60. Vibration is applied to the electrode support portion 10 by giving a frequency exceeding the audible frequency region, and any vibration required to cause the slider 1b to reliably reach the foreign matter can be imparted. Further, it is also expected that the needle electrode 1a itself vibrates to shake the foreign matter.

Also, the sounding body can be replaced by a vibration motor. An ultrasonic vibrator is used as the drive source 60. In recent years, in the courtesy mode of the mobile phone (note: similar to the silent mode), the user is notified by applying vibration or the like, and vibration is applied to the electrode support portion 10 by setting a predetermined vibration, and the sliding body 1b can be imparted. Any vibration required to reach the foreign object. Further, it is also expected that the needle electrode 1a itself vibrates to shake the foreign matter.

Further, as shown in FIG. 6(b), in the discharge electrode unit 200 described above with reference to FIG. 2(a), by providing the drive source 60 in the electrode support portion 10, the discharge electrode unit 200 can be improved. Foreign matter removal effect.

Further, as shown in Fig. 6(c), in the discharge electrode unit 300 described above with reference to Fig. 3(a), the discharge electrode unit 300 can be improved by providing the drive source 60 in the electrode support portion 10. Foreign matter removal effect.

Further, as shown in FIG. 6(d), in the discharge electrode unit 400 described above with reference to FIG. 4(a), the discharge electrode unit 400 can be improved by providing the drive source 60 in the electrode support portion 10. Foreign matter removal effect.

Further, in the sixth (a), 6 (b), 6 (c), and 6 (d) drawings, the connection portion 50 and the drive source 60 are provided, but the drive source 60 may be used only, and the configuration may be adopted. The actual situation is to make the appropriate choice.

Next, other aspects for carrying out the invention will be described based on the drawings. Fig. 7 is an explanatory view showing a discharge electrode and a discharge electrode unit of another embodiment, wherein Fig. 7(a) is an explanatory view showing a modified form of the first discharge electrode and the discharge electrode unit, and Fig. 7(b) is a second discharge. Description of the improved form of the electrode and the discharge electrode unit, Fig. 7(c) is an explanatory view showing a modified form of the third discharge electrode and the discharge electrode unit, and Fig. 7(d) is a view showing the fourth discharge electrode and the discharge electrode unit An explanatory diagram of the improved form.

The discharge electrode 1 has a configuration including a connection portion 50 as shown in Fig. 7(a), and the connection portion 50 is a slider 1b electrically connected to the needle electrode 1a and the conductor. Then, the discharge electrode unit 1 further includes a drive source 60 and an adjustment unit 70 as the discharge electrode unit 100. The drive source 60 provides power for relatively moving the needle electrode 1a and the slider 1b, and the adjustment unit 70 is The mounting position of the needle electrode 1a in the electrode support portion 10 is adjusted. And the function brought by the connection part 50. The effect is the stabilization of the electric field, the improvement of the discharge characteristics, and the like as described above, and the function brought by the drive source 60. Since the effect is the vibration applied as described above, the overlapping description will be omitted, and the adjustment unit 70 will be described.

The adjustment portion 70 is a cylindrical body, and the needle electrode 1a is fixed by, for example, a central hole portion. Such an adjustment portion 70 is provided with a screw portion on the outer ring surface, and is screwed into the screw hole portion of the electrode support portion 10. When the adjustment unit 70 is rotated, the adjustment unit 70 is in the direction of the arrow j with respect to the electrode support unit 10, and as a result, the needle electrode 1a moves in the direction of the arrow j. In particular, when the needle electrode 1a is deteriorated, the adjustment portion 70 is rotated to extend the needle electrode 1a, and the tip end of the needle electrode 1a can be positioned at a predetermined position. Thereby, the electric field formed can be adjusted to be constant.

Further, as shown in Fig. 7(b), by providing the adjustment portion 70 in the discharge electrode unit 200 described above with reference to Fig. 2(a), the electric field formed by the discharge electrode unit 200 can be kept constant.

Further, as shown in Fig. 7(c), the electric field formed by the discharge electrode unit 300 can be kept constant by providing the adjustment unit 70 in the discharge electrode unit 300 described above with reference to Fig. 3(a).

Further, as shown in Fig. 7(d), the electric field formed by the discharge electrode unit 400 can be kept constant by providing the adjustment unit 70 in the discharge electrode unit 400 described above with reference to Fig. 4(a).

In addition, in the seventh drawing, the connection unit 50, the drive source 60, and the adjustment unit 70 are provided. However, the configuration may be such that the adjustment unit 70 is provided, the connection unit 50 and the adjustment unit 70 are provided, and the drive source 60 and the adjustment are provided. Any form of the form of the part 70 is appropriately selected depending on the actual situation.

Next, other aspects of the present invention will be described based on the drawings. Fig. 8 is an explanatory view of a discharge electrode unit of another embodiment.

Each of the discharge electrode units 100, 200, 300, and 400 described above has a configuration in which only one discharge electrode 1, 2, 3, 4 is provided. However, as shown in FIG. 8, the discharge electrode unit 500 of the present embodiment has a plurality of (four in the present embodiment) discharge electrodes 1 (see FIG. 1(a)), and is The discharge electrodes 1 are arranged in a row. For example, it can be equipped with a strip-shaped ion generator. Such a configuration may be used, and the discharge electrode 2 shown in the second (a) diagram, the discharge electrode 3 shown in the third (a) diagram, and the discharge electrode 4 shown in the fourth (a) diagram may be used instead of the discharge. Electrode 1. In addition, in the eighth diagram, the discharge electrode unit 500 includes the connection portion 50, the drive source 60, and the adjustment portion 70. However, any configuration having only the connection portion 50 and only the drive source 60 may be employed, and only the adjustment portion 70 may be provided. The form of the connection unit 50 and the drive source 60, the form of the connection unit 50 and the adjustment unit 70, and the form of the drive source 60 and the adjustment unit 70 are appropriately selected in accordance with the actual situation.

Next, other aspects of the present invention will be described based on the drawings. Fig. 9 is an explanatory view of a discharge electrode unit of another form.

In the discharge electrode unit 500 described above, it is configured as a plurality of (four in FIG. 8) discharge electrodes 1 arranged in a line. However, as shown in Fig. 9, it is also possible to adopt a configuration in which array-shaped discharge electrodes 1 are arranged in a plurality of rows and a plurality of columns (two rows and two columns in Fig. 9). Such a configuration may be used, and the discharge electrode 2 shown in the second (a) diagram, the discharge electrode 3 shown in the third (a) diagram, and the discharge electrode 4 shown in the fourth (a) diagram may be used instead of the discharge. Electrode 1. In addition, in the eighth diagram, the discharge electrode unit 500 includes the connection portion 50, the drive source 60, and the adjustment portion 70. However, any configuration having only the connection portion 50 and only the drive source 60 may be employed, and only the adjustment portion 70 may be provided. The form of the connection unit 50 and the drive source 60, the form of the connection unit 50 and the adjustment unit 70, and the form of the drive source 60 and the adjustment unit 70 are appropriately selected in accordance with the actual situation.

The discharge electrode, the discharge electrode unit, and the like of each form have been described above. Since the above configuration is used, it is also possible to select a method other than blowing foreign matter by air. In addition, since the electrode has a tip end, its discharge characteristics are good. As a result, even if the foreign matter adheres tightly to the tip end of the tip end, the foreign matter can be removed, and a discharge electrode, a discharge electrode unit, or the like for corona discharge that achieves good discharge characteristics for a long period of time can be achieved. Such a discharge electrode and a discharge electrode unit can be used for a gun type ion generator, a fan type ion generator, and a strip type ion generator.

1. . . Discharge electrode

1a. . . Needle electrode

1b. . . Sliding body

1c. . . Front end

1d. . . Opening

1e. . . Hole

2. . . Discharge electrode

2a. . . Needle electrode

2b. . . Sliding body

2c. . . Front end

2d. . . Opening

2e. . . Inclined portion

2f. . . Hole

3. . . Discharge electrode

3a. . . Needle electrode

3b. . . Sliding body

3c. . . Front end

3d. . . Opening

3e. . . Hole

3f. . . Space department

4. . . Discharge electrode

4a. . . Needle electrode

4b. . . Sliding body

4c. . . Front end

4d. . . Opening

4e. . . Hole

10. . . Electrode support

20. . . Sliding body support

30. . . spring

40. . . Voltage supply line

50. . . Connection

60. . . Drive source

70. . . Adjustment department

100. . . Discharge electrode unit

200. . . Discharge electrode unit

300. . . Discharge electrode unit

400. . . Discharge electrode unit

500. . . Discharge electrode unit

600. . . Discharge electrode unit

a. . . Arrow

b. . . Arrow

c. . . Arrow

d. . . Arrow

D. . . foreign matter

e. . . Arrow

f. . . Arrow

g. . . Arrow

h. . . Arrow

i. . . Arrow

j. . . Arrow

Fig. 1 is an explanatory view of a discharge electrode and a discharge electrode unit for carrying out the best mode of the present invention, wherein the first (a) is an enlarged view of the front end of the discharge electrode, and the first (b) is a discharge electrode unit. The configuration diagram and the first (c) diagram are explanatory diagrams of the operation of the discharge electrode unit.

Fig. 2 is an explanatory view of a discharge electrode and a discharge electrode unit of another embodiment, in which Fig. 2(a) is an enlarged view of the tip end of the discharge electrode, Fig. 2(b) is a view showing a configuration of the discharge electrode unit, and 2(c) The figure is an explanatory diagram of the operation of the discharge electrode unit.

Fig. 3 is an explanatory view of a discharge electrode and a discharge electrode unit of another embodiment, in which Fig. 3(a) is an enlarged view of the tip end of the discharge electrode, Fig. 3(b) is a view showing a configuration of the discharge electrode unit, and Fig. 3(c) The figure is an explanatory diagram of the operation of the discharge electrode unit.

Fig. 4 is an explanatory view of a discharge electrode and a discharge electrode unit of another embodiment, in which Fig. 4(a) is an enlarged view of the tip end of the discharge electrode, Fig. 4(b) is a view showing a configuration of the discharge electrode unit, and Fig. 4(c) The figure is an explanatory diagram of the operation of the discharge electrode unit.

Fig. 5 is an explanatory view showing a discharge electrode and a discharge electrode unit of another embodiment, wherein Fig. 5(a) is an explanatory view showing a modified form of the first discharge electrode and the discharge electrode unit, and Fig. 5(b) is a second discharge. Description of the improved form of the electrode and the discharge electrode unit, FIG. 5(c) is an explanatory view showing a modified form of the third discharge electrode and the discharge electrode unit, and FIG. 5(d) is a view showing the fourth discharge electrode and the discharge electrode unit An explanatory diagram of the improved form.

Fig. 6 is an explanatory view showing a discharge electrode and a discharge electrode unit of another embodiment, wherein Fig. 6(a) is an explanatory view showing a modified form of the first discharge electrode and the discharge electrode unit, and Fig. 6(b) is a second discharge. Description of the improved form of the electrode and the discharge electrode unit, FIG. 6(c) is an explanatory view showing a modified form of the third discharge electrode and the discharge electrode unit, and FIG. 6(d) is a view showing the fourth discharge electrode and the discharge electrode unit An explanatory diagram of the improved form.

Fig. 7 is an explanatory view showing a discharge electrode and a discharge electrode unit of another embodiment, wherein Fig. 7(a) is an explanatory view showing a modified form of the first discharge electrode and the discharge electrode unit, and Fig. 7(b) is a second discharge. Description of the improved form of the electrode and the discharge electrode unit, Fig. 7(c) is an explanatory view showing a modified form of the third discharge electrode and the discharge electrode unit, and Fig. 7(d) is a view showing the fourth discharge electrode and the discharge electrode unit An explanatory diagram of the improved form.

Fig. 8 is an explanatory view of a discharge electrode unit of another embodiment.

Fig. 9 is an explanatory view of a discharge electrode unit of another form.

1. . . Discharge electrode

1a. . . Needle electrode

1b. . . Sliding body

1c. . . Front end

1d. . . Opening

1e. . . Hole

10. . . Electrode support

20. . . Sliding body support

30. . . spring

40. . . Voltage supply line

100. . . Discharge electrode unit

D. . . foreign matter

Claims (13)

A discharge electrode unit comprising: a discharge electrode having a needle electrode and a sliding body, wherein the needle electrode is formed by an electric conductor, the sliding body having a hole portion and a front end portion, the needle The electrode is inserted into the hole and fitted to a loose fit, and the front end portion is formed with an opening communicating with the hole portion to slide the slider to the needle electrode; and an electrode support portion; Supporting the needle electrode; a sliding body supporting portion supporting the sliding body; and a spring for driving the electrode supporting portion and the sliding body supporting portion; wherein the needle electrode and the sliding body are relatively moved stand by. The discharge electrode unit according to claim 1, wherein the sliding body is a cylindrical body. The discharge electrode unit according to claim 1, wherein the sliding body is a cylindrical body and has a tip end portion. The discharge electrode unit according to claim 1, wherein the sliding body is a cylindrical body, and a space portion having a diameter larger than a diameter of the opening portion is formed in the interior, and the space portion and the hole portion are formed. Connected. The discharge electrode unit according to claim 1, wherein the sliding body is an annular body. The discharge electrode unit according to any one of claims 1 to 5, wherein: The sliding body is formed of a conductor; and the needle electrode is electrically connected to the sliding body. The discharge electrode unit according to claim 1, further comprising a drive source that imparts a power for relatively moving the needle electrode and the slider. The discharge electrode unit according to claim 7, wherein the driving source is a sounding body or an ultrasonic vibrator. The discharge electrode unit according to claim 7, wherein the drive source is a vibration motor. The discharge electrode unit according to claim 1, further comprising an adjustment portion that adjusts a mounting position of the needle electrode in the electrode support portion. The discharge electrode unit according to claim 1, wherein the discharge electrode is plural; the electrode support portion supports a plurality of discharge electrodes; and the slider support portion supports a plurality of sliders. The discharge electrode unit according to claim 11, wherein the discharge electrodes are arranged in a line. The discharge electrode unit according to claim 11, wherein the discharge electrodes are arranged in a plurality of rows and a plurality of columns.