JP4704192B2

JP4704192B2 - Electrode needle unit of ionizer and ionizer

Info

Publication number: JP4704192B2
Application number: JP2005325470A
Authority: JP
Inventors: 浩司深井
Original assignee: Keyence Corp
Current assignee: Keyence Corp
Priority date: 2005-11-09
Filing date: 2005-11-09
Publication date: 2011-06-15
Anticipated expiration: 2025-11-09
Also published as: JP2007134141A

Description

本発明は、空気中の静電気を除去するイオン化装置の構造に関する。 The present invention relates to a structure of an ionization device for removing static electricity in the air.

ウェハ製造工場などでは、クリーンルームにおける静電気を除去するために、イオン化装置（除電器）が使用されている。イオン化装置は、電極針に高電圧をかけて空気をイオン化させ、空気イオンを対象物に送り込むことで、対象物周辺の静電気を中和させるようにしている。このように、イオン化装置の電極針には高電圧がかけられるため、長期使用によりその電極針にごみ等が付着する。このごみが、あるタイミングでウェハに落下すると、ウェハの歩留まりが落ちるといった問題が発生していた。 In a wafer manufacturing factory or the like, an ionization device (a static eliminator) is used to remove static electricity in a clean room. The ionization device neutralizes static electricity around the object by applying high voltage to the electrode needle to ionize the air and sending air ions to the object. As described above, since a high voltage is applied to the electrode needle of the ionization apparatus, dust or the like adheres to the electrode needle after long-term use. If this dust falls on the wafer at a certain timing, there has been a problem that the yield of the wafer is lowered.

また、電極針自身が磨耗し、電極針の小さな破片がウェハに落下するという問題も発生している。電極針には、タングステンなどの金属が用いられているが、この金属片がウェハに落下すると、金属汚染により、半導体製造に重大な問題を引き起こすことになる。この問題を解決するためには、ウェハと同物質のシリコンで電極針を作成するという方法が考えられる。ウェハと同物質の電極針を使用することで、例え、電極針の破片が落下したとしても、ウェハに与える影響を小さくできるからである。しかし、シリコン製の電極針は、延性展性が低いため、電極に強く接触させようとすると脆く割れてしまうとう問題があった。 There is also a problem that the electrode needles themselves are worn and small pieces of the electrode needles fall on the wafer. A metal such as tungsten is used for the electrode needle. If this metal piece falls on the wafer, metal contamination will cause a serious problem in semiconductor manufacturing. In order to solve this problem, a method of creating an electrode needle with silicon of the same material as the wafer can be considered. This is because by using an electrode needle made of the same material as the wafer, even if a broken piece of the electrode needle falls, the influence on the wafer can be reduced. However, since the electrode needle made of silicon has low ductility and malleability, there is a problem that it is fragile and cracks when it is brought into strong contact with the electrode.

この問題を解決するため、本願出願人は、特許文献１で示す技術を開示している。特許文献１の図８に示すように、この電極針は、上部電極とシリコン製の下部電極とで構成され、この２つの電極間には、コイルバネが介装されている。これにより、シリコン製の電極針が、コイルバネを介して電極に接触するため、シリコン針を柔軟に支持することが可能となり、シリコン針が破損するといった問題を解決している。 In order to solve this problem, the applicant of the present application discloses a technique shown in Patent Document 1. As shown in FIG. 8 of Patent Document 1, the electrode needle is composed of an upper electrode and a lower electrode made of silicon, and a coil spring is interposed between the two electrodes. Thereby, since the electrode needle made of silicon comes into contact with the electrode via the coil spring, the silicon needle can be flexibly supported, and the problem that the silicon needle is damaged is solved.

特開２００２−２６０８２１号公報Japanese Patent Laid-Open No. 2002-260821

特許文献１のイオン化装置は、シリコン針の支持構造という面では、上記の問題を解決しているが、シリコン針の先端周囲に付着するごみの対策が充分でなかった。特許文献１で示すイオン化装置では、シリコン針は、略全長に亘って、その周囲に近接する部材で支持されており、イオン化装置からエアを噴出する開口部は、シリコン針の先端部より外方に少し離れた位置に設けられていた。 The ionization apparatus of Patent Document 1 solves the above problem in terms of the support structure of the silicon needle, but measures against dust adhering to the periphery of the tip of the silicon needle are not sufficient. In the ionization apparatus shown in Patent Document 1, the silicon needle is supported by a member close to the periphery of the silicon needle over substantially the entire length, and the opening for ejecting air from the ionization apparatus is outward from the tip of the silicon needle. It was provided at a position slightly away.

このため、イオン化装置は、電極針先端より放電された空気イオンを、対象物に向けて押し出す役割は担っているものの、電極針先端付近のごみを除去するという役割は充分でなかった。 For this reason, although the ionization device has a role to push out air ions discharged from the tip of the electrode needle toward the object, the role of removing dust near the tip of the electrode needle has not been sufficient.

そこで、本発明は前記問題点に鑑み、シリコン針を柔軟に支持しつつ、シリコン針先端にごみが付着することを有効に防止しえるイオン化装置を提供することを目的とする。 Accordingly, an object of the present invention is to provide an ionization apparatus capable of effectively preventing dust from adhering to the tip of the silicon needle while flexibly supporting the silicon needle.

上記課題を解決するため、請求項１記載の発明は、装置本体の電源手段から電力を得て、イオン放電を行うイオン化装置の電極針ユニットであって、放電電極針と、電極針ケースと、を備え、前記放電電極針は、筒部材と、少なくとも前記筒部材の先端側内部に挿入されるシリコン針と、少なくとも前記筒部材の他端側内部に挿入され、前記電源手段からの配電ラインに接続される導電性部材と、前記シリコン針と前記導電性部材の間に挟まれる弾性部材と、を備え、前記筒部材と前記弾性部材の少なくとも一方が導電性の部材で構成されており、前記電極針ケースは、前記電極針ケース外部と連通する開口部を持ったエア供給室を有し、前記エア供給室には、前記電極針ユニットの外部に設けられたエア供給手段からのエアが供給されるエア供給口が設けられ、前記エア供給室内において、前記シリコン針が前記開口部側に位置するように、前記放電電極針が前記エア供給口よりも前記他端側で支持部材を介して支持されており、前記エア供給手段から供給されたエアが、前記シリコン針の外周部の開口部から前記電極針ユニットの外方に向けて供給されることを特徴とする。 In order to solve the above-mentioned problem, an invention according to claim 1 is an electrode needle unit of an ionization device that performs electric discharge by obtaining electric power from a power source means of an apparatus body, and includes a discharge electrode needle, an electrode needle case, The discharge electrode needle is inserted into a cylindrical member, at least a silicon needle inserted into the distal end side of the cylindrical member, and at least inserted into the other end side of the cylindrical member, and is connected to a power distribution line from the power supply means. A conductive member to be connected; and an elastic member sandwiched between the silicon needle and the conductive member, wherein at least one of the cylindrical member and the elastic member is formed of a conductive member, The electrode needle case has an air supply chamber having an opening communicating with the outside of the electrode needle case, and air is supplied to the air supply chamber from an air supply means provided outside the electrode needle unit. D A supply port is provided, and in the air supply chamber, the discharge electrode needle is supported via a support member on the other end side of the air supply port so that the silicon needle is positioned on the opening side. The air supplied from the air supply means is supplied from the opening of the outer peripheral portion of the silicon needle toward the outside of the electrode needle unit.

請求項２記載の発明は、装置本体の電源手段から電力を得て、イオン放電を行うイオン化装置の電極針ユニットであって、放電電極針と、電極針ケースと、を備え、前記放電電極針は、前記電源手段からの配電ラインに接続される導電性の筒部材と、少なくとも前記筒部材の先端側内部に挿入されるシリコン針と、少なくとも前記筒部材の他端側内部に挿入される係止部材と、前記シリコン針と前記係止部材の間に挟まれる弾性部材と、を備え、前記電極針ケースは、前記電極針ケース外部と連通する開口部を持ったエア供給室を有し、前記エア供給室には、前記電極針ユニットの外部に設けられたエア供給手段からのエアが供給されるエア供給口が設けられ、前記エア供給室内において、前記シリコン針が前記開口部側に位置するように、前記放電電極針が前記エア供給口よりも前記他端側で支持部材を介して支持されており、前記エア供給手段から供給されたエアが、前記シリコン針の外周部の開口部から前記電極針ユニットの外方に向けて供給されることを特徴とする。 The invention according to claim 2 is an electrode needle unit of an ionization device that obtains electric power from power supply means of the apparatus main body and performs ion discharge, and includes a discharge electrode needle and an electrode needle case, and the discharge electrode needle Is a conductive cylindrical member connected to a power distribution line from the power supply means, a silicon needle inserted at least inside the distal end side of the cylindrical member, and an engagement inserted at least inside the other end side of the cylindrical member. A stop member, and an elastic member sandwiched between the silicon needle and the locking member, the electrode needle case has an air supply chamber having an opening communicating with the outside of the electrode needle case, The air supply chamber is provided with an air supply port for supplying air from an air supply means provided outside the electrode needle unit, and the silicon needle is positioned on the opening side in the air supply chamber. Like The discharge electrode needle is supported by a support member on the other end side of the air supply port, and the air supplied from the air supply means is supplied from the opening of the outer peripheral portion of the silicon needle to the electrode needle. It is supplied toward the outside of the unit.

請求項３記載の発明は、装置本体の電源手段から電力を得て、イオン放電を行うイオン化装置の電極針ユニットであって、放電電極針と、電極針ケースと、を備え、前記放電電極針は、筒部材と、少なくとも前記筒部材の先端側内部に挿入されるシリコン針と、少なくとも前記筒部材の他端側内部に挿入され、前記電源手段からの配電ラインに接続される導電性部材と、前記シリコン針と前記導電性部材の間に挟まれる弾性部材と、を備え、前記筒部材と前記弾性部材の少なくとも一方が導電性の部材で構成されており、前記電極針ケースは、略中央部に開口部を有するディスク上のプレートと、前記プレート上に立設されたケース筒部と、を備え、前記ケース筒部は、内部に略円筒形状のエア供給室を有し、前記エア供給室は、前記開口部を通じて、前記電極針ケースの外部と連通しており、前記エア供給室には、前記電極針ユニットの外部に設けられたエア供給手段からのエアが供給されるエア供給口が設けられ、前記エア供給室内において、前記シリコン針が前記開口部側に位置するように、前記放電電極針が前記エア供給口よりも前記他端側で支持部材を介して支持されており、前記エア供給手段から供給されたエアが、前記シリコン針の外周部の開口部から前記電極針ユニットの外方に向けて供給されることを特徴とする。 The invention according to claim 3 is an electrode needle unit of an ionization device that obtains electric power from power supply means of the apparatus main body and performs ion discharge, and includes a discharge electrode needle and an electrode needle case, and the discharge electrode needle Is a cylindrical member, at least a silicon needle inserted into the inside of the distal end side of the cylindrical member, and a conductive member inserted into at least the other end side of the cylindrical member and connected to a power distribution line from the power supply means An elastic member sandwiched between the silicon needle and the conductive member, wherein at least one of the cylindrical member and the elastic member is formed of a conductive member, and the electrode needle case has a substantially central position A plate on the disk having an opening in the portion, and a case cylinder standing upright on the plate, the case cylinder having a substantially cylindrical air supply chamber therein, and the air supply The chamber has the opening Communicated with the outside of the electrode needle case, and the air supply chamber is provided with an air supply port for supplying air from an air supply means provided outside the electrode needle unit, In the air supply chamber, the discharge electrode needle is supported via a support member on the other end side with respect to the air supply port so that the silicon needle is located on the opening side. The supplied air is supplied from the opening of the outer peripheral portion of the silicon needle toward the outside of the electrode needle unit.

請求項４記載の発明は、装置本体の電源手段から電力を得て、イオン放電を行うイオン化装置の電極針ユニットであって、放電電極針と、電極針ケースと、を備え、前記放電電極針は、前記電源手段からの配電ラインに接続される導電性の筒部材と、少なくとも前記筒部材の先端側内部に挿入されるシリコン針と、少なくとも前記筒部材の他端側内部に挿入される係止部材と、前記シリコン針と前記係止部材の間に挟まれる弾性部材と、を備え、前記電極針ケースは、略中央部に開口部を有するディスク上のプレートと、前記プレート上に立設されたケース筒部と、を備え、前記ケース筒部は、内部に略円筒形状のエア供給室を有し、前記エア供給室は、前記開口部を通じて、前記電極針ケースの外部と連通しており、前記エア供給室には、前記電極針ユニットの外部に設けられたエア供給手段からのエアが供給されるエア供給口が設けられ、前記エア供給室内において、前記シリコン針が前記開口部側に位置するように、前記放電電極針が前記エア供給口よりも前記他端側で支持部材を介して支持されており、前記エア供給手段から供給されたエアが、前記シリコン針の外周部の開口部から前記電極針ユニットの外方に向けて供給されることを特徴とする。 The invention according to claim 4 is an electrode needle unit of an ionization device that obtains electric power from power supply means of the apparatus main body and performs ion discharge, and includes a discharge electrode needle and an electrode needle case, and the discharge electrode needle Is a conductive cylindrical member connected to a power distribution line from the power supply means, a silicon needle inserted at least inside the distal end side of the cylindrical member, and an engagement inserted at least inside the other end side of the cylindrical member. A stopper member, and an elastic member sandwiched between the silicon needle and the locking member, and the electrode needle case is provided on a plate on a disk having an opening at a substantially central portion, and stands on the plate. A case cylinder portion having a substantially cylindrical air supply chamber therein, and the air supply chamber communicates with the outside of the electrode needle case through the opening. In the air supply chamber, The discharge electrode is provided with an air supply port for supplying air from an air supply means provided outside the electrode needle unit, and the silicon needle is positioned on the opening side in the air supply chamber. A needle is supported via a support member on the other end side of the air supply port, and the air supplied from the air supply means passes through the opening of the outer peripheral portion of the silicon needle to the outside of the electrode needle unit. It is characterized by being supplied toward the direction.

請求項５記載の発明は、請求項１ないし請求項４のいずれかに記載のイオン化装置の電極針ユニットであって、前記筒部材の先端部は、他の部分と比べて内径が小さくなるように形成されていることを特徴とする。 A fifth aspect of the present invention is the electrode needle unit of the ionization apparatus according to any one of the first to fourth aspects, wherein the tip of the cylindrical member has a smaller inner diameter than other portions. It is characterized by being formed.

請求項６記載の発明は、請求項１ないし請求項５のいずれかに記載のイオン化装置の電極針ユニットであって、前記シリコン針の先端部の側面断面が台形形状であることを特徴とする。 A sixth aspect of the present invention is the electrode needle unit of the ionization apparatus according to any one of the first to fifth aspects, wherein a side cross section of a tip portion of the silicon needle has a trapezoidal shape. .

請求項７記載の発明は、請求項１ないし請求項６のいずれかに記載のイオン化装置の電極針ユニットであって、前記支持部材の前記電極針ケースとの接続部表面がローレット加工されていることを特徴とする。 A seventh aspect of the present invention is the electrode needle unit of the ionization apparatus according to any one of the first to sixth aspects, wherein the surface of the connection portion of the support member with the electrode needle case is knurled. It is characterized by that.

請求項８記載の発明は、請求項１ないし請求項７のいずれかに記載のイオン化装置の電極針ユニットであって、前記エア供給室内で支持される前記シリコン針の先端部が、前記開口部より内側に位置することを特徴とする。 The invention according to claim 8 is the electrode needle unit of the ionization apparatus according to any one of claims 1 to 7, wherein the tip of the silicon needle supported in the air supply chamber has the opening. It is characterized by being located more inside.

請求項９記載の発明は、互いに離間して複数の電極針ユニットが配置されるイオン化装置であって、電源手段と、前記電極針ユニットに前記電源手段からの電力を供給する配電ラインと、前記電極針ユニットにエア供給手段からのエアを供給するエア通路と、を備え、前記電極針ユニットは、放電電極針と電極針ケースとを備えており、前記放電電極針は、筒部材と、少なくとも前記筒部材の先端側内部に挿入されるシリコン針と、少なくとも前記筒部材の他端側内部に挿入され、前記配電ラインに接続される導電性部材と、前記シリコン針と前記導電性部材の間に挟まれる弾性部材と、を備え、前記筒部材と前記弾性部材の少なくとも一方が導電性の部材で構成されており、前記電極針ケースは、前記電極針ケース外部と連通する開口部を持ったエア供給室を有し、前記エア供給室には、前記エア通路と連通するエア供給口が設けられ、前記エア供給室内において、前記シリコン針が前記開口部側に位置するように、前記放電電極針が前記エア供給口よりも前記他端側で支持部材を介して支持されており、前記エア供給手段から供給されたエアが、前記シリコン針の外周部の開口部から前記電極針ユニットの外方に向けて供給されることを特徴とする。 The invention according to claim 9 is an ionization apparatus in which a plurality of electrode needle units are arranged apart from each other, and includes a power supply means, a power distribution line for supplying power from the power supply means to the electrode needle unit, An air passage for supplying air from the air supply means to the electrode needle unit, the electrode needle unit includes a discharge electrode needle and an electrode needle case, and the discharge electrode needle includes at least a cylindrical member, A silicon needle inserted into the inside of the distal end side of the cylindrical member, a conductive member inserted into at least the other end side of the cylindrical member and connected to the power distribution line, and between the silicon needle and the conductive member And at least one of the cylindrical member and the elastic member is made of a conductive member, and the electrode needle case has an opening communicating with the outside of the electrode needle case. The air supply chamber is provided with an air supply port communicating with the air passage, and the silicon needle is positioned on the opening side in the air supply chamber. A discharge electrode needle is supported by a support member on the other end side of the air supply port, and the air supplied from the air supply means is supplied to the electrode needle unit from an opening of an outer peripheral portion of the silicon needle. It is characterized by being supplied towards the outside.

請求項１０記載の発明は、互いに離間して複数の電極針ユニットが配置されるイオン化装置であって、電源手段と、前記電極針ユニットに前記電源手段からの電力を供給する配電ラインと、前記電極針ユニットにエア供給手段からのエアを供給するエア通路と、を備え、前記電極針ユニットは、放電電極針と電極針ケースとを備えており、前記放電電極針は、前記配電ラインに接続される導電性の筒部材と、少なくとも前記筒部材の先端側内部に挿入されるシリコン針と、少なくとも前記筒部材の他端側内部に挿入される係止部材と、前記シリコン針と前記係止部材の間に挟まれる弾性部材と、を備え、前記電極針ケースは、前記電極針ケース外部と連通する開口部を持ったエア供給室を有し、前記エア供給室には、前記エア通路と連通するエア供給口が設けられ、前記エア供給室内において、前記シリコン針が前記開口部側に位置するように、前記放電電極針が前記エア供給口よりも前記他端側で支持部材を介して支持されており、前記エア供給手段から供給されたエアが、前記シリコン針の外周部の開口部から前記電極針ユニットの外方に向けて供給されることを特徴とする。 The invention according to claim 10 is an ionization apparatus in which a plurality of electrode needle units are arranged apart from each other, and includes a power supply means, a power distribution line for supplying power from the power supply means to the electrode needle unit, An air passage for supplying air from the air supply means to the electrode needle unit, the electrode needle unit includes a discharge electrode needle and an electrode needle case, and the discharge electrode needle is connected to the power distribution line An electrically conductive cylinder member, at least a silicon needle inserted into the inside of the distal end side of the cylinder member, an engagement member inserted into at least the other end side of the cylinder member, and the silicon needle and the engagement An elastic member sandwiched between members, and the electrode needle case has an air supply chamber having an opening communicating with the outside of the electrode needle case, and the air supply chamber includes the air passage and Communicate The discharge electrode needle is supported via a support member on the other end side of the air supply port so that the silicon needle is positioned on the opening side in the air supply chamber. The air supplied from the air supply means is supplied from the opening of the outer peripheral portion of the silicon needle toward the outside of the electrode needle unit.

請求項１１記載の発明は、互いに離間して複数の電極針ユニットが配置されるイオン化装置であって、電源手段と、前記電極針ユニットに前記電源手段からの電力を供給する配電ラインと、前記電極針ユニットにエア供給手段からのエアを供給するエア通路と、を備え、前記電極針ユニットは、放電電極針と電極針ケースとを備えており、前記放電電極針は、筒部材と、少なくとも前記筒部材の先端側内部に挿入されるシリコン針と、少なくとも前記筒部材の他端側内部に挿入され、前記配電ラインに接続される導電性部材と、前記シリコン針と前記導電性部材の間に挟まれる弾性部材と、を備え、前記筒部材と前記弾性部材の少なくとも一方が導電性の部材で構成されており、前記電極針ケースは、略中央部に開口部を有するディスク上のプレートと、前記プレート上に立設されたケース筒部と、を備え、前記ケース筒部は、内部に略円筒形状のエア供給室を有し、前記エア供給室は、前記開口部を通じて、前記電極針ケースの外部と連通しており、前記エア供給室には、前記エア供給手段からのエアが供給されるエア供給口が設けられ、前記エア供給室内において、前記シリコン針が前記開口部側に位置するように、前記放電電極針が前記エア供給口よりも前記他端側で支持部材を介して支持されており、前記エア供給手段から供給されたエアが、前記シリコン針の外周部の開口部から前記電極針ユニットの外方に向けて供給されることを特徴とする。 The invention according to claim 11 is an ionization apparatus in which a plurality of electrode needle units are arranged apart from each other, and includes a power supply means, a power distribution line for supplying power from the power supply means to the electrode needle unit, and An air passage for supplying air from the air supply means to the electrode needle unit, the electrode needle unit includes a discharge electrode needle and an electrode needle case, and the discharge electrode needle includes at least a cylindrical member, A silicon needle inserted into the inside of the distal end side of the cylindrical member, a conductive member inserted into at least the other end side of the cylindrical member and connected to the power distribution line, and between the silicon needle and the conductive member An elastic member sandwiched between, and at least one of the cylindrical member and the elastic member is formed of a conductive member, and the electrode needle case is provided on a disk having an opening at a substantially central portion. And a case cylinder portion erected on the plate, the case cylinder portion having a substantially cylindrical air supply chamber therein, the air supply chamber through the opening, The air supply chamber communicates with the outside of the electrode needle case, and the air supply chamber is provided with an air supply port through which air from the air supply means is supplied. In the air supply chamber, the silicon needle is connected to the opening side. The discharge electrode needle is supported via a support member on the other end side of the air supply port so that the air supplied from the air supply means is located on the outer peripheral portion of the silicon needle. It is supplied toward the outside of the electrode needle unit from the opening.

請求項１２記載の発明は、互いに離間して複数の電極針ユニットが配置されるイオン化装置であって、電源手段と、前記電極針ユニットに前記電源手段からの電力を供給する配電ラインと、前記電極針ユニットにエア供給手段からのエアを供給するエア通路と、を備え、前記電極針ユニットは、放電電極針と電極針ケースとを備えており、前記放電電極針は、前記配電ラインに接続される導電性の筒部材と、少なくとも前記筒部材の先端側内部に挿入されるシリコン針と、少なくとも前記筒部材の他端側内部に挿入される係止部材と、前記シリコン針と前記係止部材の間に挟まれる弾性部材と、を備え、前記電極針ケースは、略中央部に開口部を有するディスク上のプレートと、前記プレート上に立設されたケース筒部と、を備え、前記ケース筒部は、内部に略円筒形状のエア供給室を有し、前記エア供給室は、前記開口部を通じて、前記電極針ケースの外部と連通しており、前記エア供給室には、前記エア供給手段からのエアが供給されるエア供給口が設けられ、前記エア供給室内において、前記シリコン針が前記開口部側に位置するように、前記放電電極針が前記エア供給口よりも前記他端側で支持部材を介して支持されており、前記エア供給手段から供給されたエアが、前記シリコン針の外周部の開口部から前記電極針ユニットの外方に向けて供給されることを特徴とする。 The invention according to claim 12 is an ionization apparatus in which a plurality of electrode needle units are arranged apart from each other, and includes a power supply means, a power distribution line for supplying power from the power supply means to the electrode needle unit, An air passage for supplying air from the air supply means to the electrode needle unit, the electrode needle unit includes a discharge electrode needle and an electrode needle case, and the discharge electrode needle is connected to the power distribution line An electrically conductive cylinder member, at least a silicon needle inserted into the inside of the distal end side of the cylinder member, an engagement member inserted into at least the other end side of the cylinder member, and the silicon needle and the engagement An elastic member sandwiched between members, and the electrode needle case includes a plate on a disk having an opening at a substantially central portion, and a case tube portion standing on the plate, K The tube portion has a substantially cylindrical air supply chamber therein, and the air supply chamber communicates with the outside of the electrode needle case through the opening, and the air supply chamber includes the air supply chamber. An air supply port for supplying air from the means is provided, and the discharge electrode needle is located on the other end side of the air supply port so that the silicon needle is positioned on the opening side in the air supply chamber. The air supplied from the air supply means is supplied toward the outside of the electrode needle unit from the opening of the outer peripheral portion of the silicon needle. .

請求項１３記載の発明は、請求項９または請求項１１に記載のイオン化装置において、前記配電ラインの電極端子は、略Ω字形状の部材であり、前記導電性部材の端部が、前記電極端子の内部に押し込まれることで、前記電極端子と前記導電性部材とが導通することを特徴とする。 According to a thirteenth aspect of the present invention, in the ionization apparatus according to the ninth or eleventh aspect, the electrode terminal of the power distribution line is a substantially Ω-shaped member, and the end of the conductive member is the electrode. The electrode terminal is electrically connected to the conductive member by being pushed into the terminal.

請求項１４記載の発明は、請求項１０または請求項１２に記載のイオン化装置において、前記配電ラインの電極端子は、略Ω字形状の部材であり、前記筒部材の端部が、前記電極端子の内部に押し込まれることで、前記電極端子と前記筒部材とが導通することを特徴とする。 According to a fourteenth aspect of the present invention, in the ionization apparatus according to the tenth or twelfth aspect, the electrode terminal of the power distribution line is a substantially Ω-shaped member, and the end of the cylindrical member is the electrode terminal. The electrode terminal and the cylindrical member are electrically connected by being pushed into the interior of the casing.

本発明のイオン化装置の電極針ユニットは、電極針の先端部をシリコンで構成した。これにより、半導体製造工場などで使用した場合、針先端部が磨耗してウェハなどに落下した場合にも、その悪影響を低減させることができる。また、電極に接する導電性部材とシリコン針の間に弾性部材を介在させたので、組み立て時などにおいて、シリコン針が破損することを防止できる。そして、電極針は、支持部材を用いて電極針ケース内で支持され、シリコン針の先端部周囲をエアが流れる空間としている。これにより、シリコン針の針先端に埃、ごみが付着するのを有効に防止することが可能である。また、支持部材は、エア供給口よりも他端側（エア供給口から見てシリコン針とは反対側）において電極針を支持する。これにより、支持部材は、エアがシリコン針とは反対側に流れるのを防ぐ役割も成している。 In the electrode needle unit of the ionization apparatus of the present invention, the tip of the electrode needle is made of silicon. Thereby, when used in a semiconductor manufacturing factory or the like, even when the tip of the needle is worn and dropped onto a wafer or the like, the adverse effect can be reduced. Further, since the elastic member is interposed between the conductive member in contact with the electrode and the silicon needle, it is possible to prevent the silicon needle from being damaged during assembly. The electrode needle is supported in the electrode needle case using a support member, and a space in which air flows around the tip of the silicon needle. Thereby, it is possible to effectively prevent dust and dirt from adhering to the needle tip of the silicon needle. The support member supports the electrode needle on the other end side (the side opposite to the silicon needle as viewed from the air supply port) from the air supply port. Thereby, the support member also serves to prevent air from flowing to the opposite side of the silicon needle.

以下、図面を参照しつつ本発明の実施の形態について説明する。図１は、本発明の実施の形態に係るイオン化装置１の外形を示す側面図である。イオン化装置１は、コロナ放電により、イオンを発生させ、空気イオンを対象物や対象物周辺に送り込むことで、対象物やその周辺の静電気を除去するものである。特に、本実施の形態においては、イオン化装置１は、クリーンルーム内において静電気を除去するために用いられる場合を例に説明する。たとえば、イオン化装置１は、クリーンルーム内のウェハや液晶表示パネルの製造装置で使用され、ウェハおよびその周辺の静電気を除去する目的で使用される。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a side view showing an outer shape of an ionization apparatus 1 according to an embodiment of the present invention. The ionization apparatus 1 generates ions by corona discharge and sends air ions around the object and the object to remove static electricity from the object and the periphery. In particular, in the present embodiment, the ionization apparatus 1 will be described as an example in which it is used to remove static electricity in a clean room. For example, the ionization apparatus 1 is used in a wafer or liquid crystal display panel manufacturing apparatus in a clean room, and is used for the purpose of removing static electricity from the wafer and its periphery.

図に示すように、イオン化装置１は、横長形状のケース１０内に、各構成部品を収容して構成されている。また、イオン化装置１の下部側には、複数の互いに離間した電極針ユニット１２が配置されている。なお、以下の説明において、便宜上、図１に示した矢視Ｘを上方向として説明する。 As shown in the figure, the ionization apparatus 1 is configured by housing each component in a horizontally elongated case 10. A plurality of electrode needle units 12 spaced apart from each other are disposed on the lower side of the ionization apparatus 1. In the following description, for the sake of convenience, the arrow X shown in FIG.

図２は、イオン化装置１の内部構造を模式的に示した図である。イオン化装置１は、ケース１０内の下部側に、２つのエア供給ユニット１１を備えている。そして、１つのエア供給ユニット１１に対して４つの電極針ユニット１２が装着される構成となっている。また、ケース１０内の上部側には、高電圧ユニット１３と、電源回路や例えば表示回路やＣＰＵを含む制御ユニット１４が配置されている。 FIG. 2 is a diagram schematically showing the internal structure of the ionization apparatus 1. The ionization apparatus 1 includes two air supply units 11 on the lower side in the case 10. The four electrode needle units 12 are attached to one air supply unit 11. Further, a high voltage unit 13 and a control unit 14 including a power supply circuit, for example, a display circuit and a CPU are arranged on the upper side in the case 10.

ケース１０の両端面には、エアポート１５が設けられ、このエアポート１５を通じて、エア供給部２からのエアがエア供給ユニット１１に供給される。エア供給ユニット１１内に供給されたエアは、各電極針ユニット１２に供給され、各電極針ユニット１２から外部に送り出される。このエアの流れにより、電極針ユニット１２から放出された空気イオンが対象物（たとえば、ウェハ）に向けて送り込まれるのである。 Air ports 15 are provided on both end faces of the case 10, and air from the air supply unit 2 is supplied to the air supply unit 11 through the air ports 15. The air supplied into the air supply unit 11 is supplied to each electrode needle unit 12 and sent out from each electrode needle unit 12 to the outside. This air flow causes air ions released from the electrode needle unit 12 to be sent toward an object (for example, a wafer).

図３は、イオン化装置１の断面図（図１の矢視Ａ−Ａ断面図）である。エア供給ユニット１１は、図に示すように、上部第１部材３１と、上部第２部材３２と、下部部材３３とが組み立てられて構成されている。上部第１部材３１、上部第２部材３２、下部部材３３は、いずれも、イオン化装置１の長手方向（図１の左右方向）に延びる細長い形状をしている。また、上部第１部材３１の下部には、電極プレート３６が取り付けられている。 3 is a cross-sectional view of the ionization apparatus 1 (a cross-sectional view taken along line AA in FIG. 1). As shown in the drawing, the air supply unit 11 is configured by assembling an upper first member 31, an upper second member 32, and a lower member 33. The upper first member 31, the upper second member 32, and the lower member 33 all have an elongated shape extending in the longitudinal direction of the ionization apparatus 1 (the left-right direction in FIG. 1). An electrode plate 36 is attached to the lower portion of the upper first member 31.

図４は、上部第２部材３２の模式断面図である。上部第２部材３２は、図に示すように、長手方向に延びるプレート部３２１と、プレート部３２１の底面から下方に延設される４つのスリーブ３２２とから構成されている。スリーブ３２２の内側は、貫通孔となっており、後述するように、この貫通孔に電極針ユニット１２の先端側が挿入されるようになっている。なお、図４は、上部第２部材３２の機能面を表現する模式図であり、図３で示したような実際の部材形状は、正確に図示されていない。 FIG. 4 is a schematic cross-sectional view of the upper second member 32. As shown in the drawing, the upper second member 32 includes a plate portion 321 extending in the longitudinal direction and four sleeves 322 extending downward from the bottom surface of the plate portion 321. The inside of the sleeve 322 is a through hole, and the distal end side of the electrode needle unit 12 is inserted into the through hole as will be described later. FIG. 4 is a schematic diagram representing the functional surface of the upper second member 32, and the actual member shape as shown in FIG. 3 is not accurately shown.

図５は、下部部材３３の模式図である。下部部材３３は、図に示すように、長手方向に延びるボックス部３３１と、ボックス部３３１の底面から下方に延設される４つのスリーブ３３２とから構成されている。スリーブ３３２の内側は、貫通孔となっており、後述するように、この貫通孔に電極針ユニット１２が挿入されるようになっている。なお、図５は、下部部材３３の機能面を表現する模式図であり、図３で示したような実際の部材形状は、正確に図示されていない。 FIG. 5 is a schematic diagram of the lower member 33. As shown in the drawing, the lower member 33 includes a box portion 331 extending in the longitudinal direction and four sleeves 332 extending downward from the bottom surface of the box portion 331. The inside of the sleeve 332 is a through hole, and the electrode needle unit 12 is inserted into the through hole as will be described later. FIG. 5 is a schematic diagram representing the functional surface of the lower member 33, and the actual member shape as shown in FIG. 3 is not accurately shown.

そして、スリーブ３２２とスリーブ３３２の位置を合わせるようにして、上部第２部材３２と下部部材３３が接合され、さらに、上部第２部材３２の上部に上部第１部材３１が接合されることにより、エア供給ユニット１１が組み立てられる。下部部材３３のボックス部３３１は、上方つまり上部第２部材３２側に開放しており、上部第２部材３２および装着された電極針ユニット１２と共に、エア通路の一部を構成する空間Ｓ１（図３参照）を形成している。上述したエアポート１５に連接されるエア供給用のチューブが、この空間Ｓ１に連通しており、この構成により、エア供給部２から供給されたエアが空間Ｓ１に供給されるようになっている。 Then, the upper second member 32 and the lower member 33 are joined so that the positions of the sleeve 322 and the sleeve 332 are aligned, and further, the upper first member 31 is joined to the upper part of the upper second member 32, The air supply unit 11 is assembled. The box portion 331 of the lower member 33 is opened upward, that is, toward the upper second member 32 side, and together with the upper second member 32 and the attached electrode needle unit 12, a space S1 that forms part of the air passage (see FIG. 3). The above-described air supply tube connected to the air port 15 communicates with the space S1. With this configuration, the air supplied from the air supply unit 2 is supplied to the space S1.

このようにして組み立てられたエア供給ユニット１１には、各スリーブ３３２に対して電極針ユニット１２が差し込むようにして装着される。つまり、１つのエア供給ユニット１１には、４つのスリーブ３２２が下方に向けて延設されており、それぞれのスリーブ３３２に電極針ユニット１２が差し込まれるのである。 The air supply unit 11 assembled in this manner is mounted so that the electrode needle unit 12 is inserted into each sleeve 332. That is, in one air supply unit 11, four sleeves 322 are extended downward, and the electrode needle unit 12 is inserted into each sleeve 332.

そして、エア供給ユニット１１に取り付けられた電極針ユニット１２は、エア供給ユニット１１から下方に向けて垂下し、電極針ユニット１２の下端部分が図１に示したように、ケース１０から外部に露出した状態になる。 The electrode needle unit 12 attached to the air supply unit 11 hangs downward from the air supply unit 11, and the lower end portion of the electrode needle unit 12 is exposed to the outside from the case 10 as shown in FIG. It will be in the state.

図６は、電極針ユニット１２の断面図であり、図７は、電極針ユニット１２の斜視図である。電極針ユニット１２は、電極針ケース４１と、電極針ケース４１の内部に装着される電極針４２とから構成される。 FIG. 6 is a cross-sectional view of the electrode needle unit 12, and FIG. 7 is a perspective view of the electrode needle unit 12. The electrode needle unit 12 includes an electrode needle case 41 and an electrode needle 42 mounted inside the electrode needle case 41.

電極針ケース４１は、電極針４２に沿って延びる小径内筒部分４１１と、小径内筒部分４１１の下端つまり電極針４２の先端部分から径方向外方に広がる円形ディスク部分４１２と、円形ディスク部分４１２の外周縁から上方向に延びる大径外筒部分４１３とを有している。そして、小径内筒部分４１１の内部空間であるエア供給室Ｓ２に、電極針４２を収容している。また、小内径筒部分４１１の先端（上端）部の外周部分には、略円筒形状のゴム４３が取り付けられている。 The electrode needle case 41 includes a small-diameter inner cylinder portion 411 extending along the electrode needle 42, a circular disk portion 412 extending radially outward from the lower end of the small-diameter inner cylinder portion 411, that is, the tip portion of the electrode needle 42, and a circular disk portion. 412 and a large-diameter outer cylinder portion 413 extending upward from the outer peripheral edge of 412. The electrode needle 42 is accommodated in the air supply chamber S2 which is the internal space of the small diameter inner cylinder portion 411. A substantially cylindrical rubber 43 is attached to the outer peripheral portion of the tip (upper end) portion of the small inner diameter cylindrical portion 411.

電極針４２は、図８にも示すように、略円筒形状の細長いパイプ部材４２１と、パイプ部材４２１内の上部側に装着される電極針基部４２２と、パイプ部材４２１内の下部側（先端側）に装着されるシリコン針４２３と、電極針基部４２２とシリコン針４２３の間に介装されるコイルバネ４２４と、パイプ部材４２１の外周部に取り付けられる略円筒形状の支持部材４２５とから構成されている。本実施の形態においては、パイプ部材４２１と電極針基部４２２は、ステンレス等の導電性の部材で構成されている。 As shown in FIG. 8, the electrode needle 42 includes a substantially cylindrical elongated pipe member 421, an electrode needle base 422 mounted on the upper side in the pipe member 421, and a lower side (tip side) in the pipe member 421. ), A coil spring 424 interposed between the electrode needle base 422 and the silicon needle 423, and a substantially cylindrical support member 425 attached to the outer periphery of the pipe member 421. Yes. In the present embodiment, the pipe member 421 and the electrode needle base 422 are made of a conductive member such as stainless steel.

支持部材４２５は、図に示すように筒状の部材であり、パイプ部材４２１の上部付近の外周部に取り付けられる。また、支持部材４２５の外周面は、図に示すようにローレット加工されている。本実施の形態において、電極針４２は、エア供給室Ｓ２内において中空状態で、支持部材４２５によってのみ支持されている。つまり、支持部材４２５の外周面が小径内筒部分４１１の内周面に取り付けられることによって、電極針４２が支持されるのである。そして、支持部材４２５の外周面は、接着剤などで電極針ケース４１に接着されても良いが、より好ましくは外周面をローレット加工することにより、その接着性が強化されるようにすればよい。エア供給室Ｓ２内の封止性を高めるために、支持部材４２５よりシリコン針４２３側にＯリングやパッキンなどを配置してもよい。その場合には、支持部材４２５は、完全にエア供給室Ｓ２内を封止しなくてもよい。 The support member 425 is a cylindrical member as shown in the drawing, and is attached to the outer peripheral portion near the upper portion of the pipe member 421. The outer peripheral surface of the support member 425 is knurled as shown in the figure. In the present embodiment, the electrode needle 42 is supported only by the support member 425 in a hollow state in the air supply chamber S2. That is, the electrode needle 42 is supported by attaching the outer peripheral surface of the support member 425 to the inner peripheral surface of the small-diameter inner cylinder portion 411. The outer peripheral surface of the support member 425 may be bonded to the electrode needle case 41 with an adhesive or the like, but more preferably the outer peripheral surface may be knurled to enhance its adhesion. . In order to improve the sealing performance in the air supply chamber S2, an O-ring, packing, or the like may be disposed on the silicon needle 423 side from the support member 425. In that case, the support member 425 may not completely seal the inside of the air supply chamber S2.

また、支持部材４２５が、電極針４２のシリコン針４２３とは反対側の他端側を支持することで、電極針ケース４１への接合の際の応力などが、シリコン針４２３へ伝わることを防ぐことができる。そのことにより、延性展性の低いシリコン針が割れるのを防ぐことができる。さらには、エア供給室Ｓ２内に送り込まれたエアがシリコン針４２３とは反対側に流れるのを防ぐ役割も成している。 In addition, the support member 425 supports the other end side of the electrode needle 42 opposite to the silicon needle 423, thereby preventing the stress at the time of joining to the electrode needle case 41 from being transmitted to the silicon needle 423. be able to. As a result, the silicon needle having low ductility can be prevented from cracking. Furthermore, it also serves to prevent the air sent into the air supply chamber S2 from flowing to the side opposite to the silicon needle 423.

本実施例では、支持部材４２５が電極針４２に接着されてから電極針ケース４１に挿入される例を説明したが、もちろん電極針ケース４１側に支持部材が存在してもよい。その場合は、パイプ部材４２１の他端側にローレット加工を施して電極針ケースに挿入して支持しても良い。加工上、成型上の点から言えば支持部材４２５が電極針４２に固定されてから電極針ケース４１に固定される方が好ましい。 In the present embodiment, an example in which the support member 425 is inserted into the electrode needle case 41 after being bonded to the electrode needle 42 has been described. Of course, a support member may exist on the electrode needle case 41 side. In that case, the other end side of the pipe member 421 may be knurled and inserted into the electrode needle case to be supported. In terms of processing and molding, it is preferable that the support member 425 is fixed to the electrode needle 42 after being fixed to the electrode needle 42.

図９は、電極針ユニット１２の分解図である。パイプ部材４２１には、上部側からシリコン針４２３、コイルバネ４２４、電極針基部４２２の順で、各部材が挿入される。そして、パイプ部材４２１の外周に支持部材４２５が取り付けられた状態で、電極針ケース４１内に収納されるのである。 FIG. 9 is an exploded view of the electrode needle unit 12. Each member is inserted into the pipe member 421 in the order of the silicon needle 423, the coil spring 424, and the electrode needle base 422 from the upper side. Then, it is housed in the electrode needle case 41 with the support member 425 attached to the outer periphery of the pipe member 421.

図１０は、電極針４２の先端断面図である。図に示すように、パイプ部材４２１の先端部４２１ａは、少し窄まり、その内径が小さくなるように形成されている。したがって、挿入されたシリコン針４２３のテーパー部分が、この内径が小さくなった先端部４２１ａで係止される構造になっている。つまり、シリコン針４２３を完全に固定することなく、少し遊びを持たせた状態で、パイプ部材４２１の先端部に収納するようにしている。 FIG. 10 is a front sectional view of the electrode needle 42. As shown in the drawing, the tip end portion 421a of the pipe member 421 is formed to be slightly narrowed and the inner diameter thereof to be reduced. Therefore, the taper portion of the inserted silicon needle 423 is structured to be locked by the tip portion 421a having a reduced inner diameter. That is, the silicon needle 423 is not fixed completely, but is housed in the distal end portion of the pipe member 421 with a little play.

一方、図９に示すように、電極針基部４２２の基部４２２ｂは、少し、外径が大きく形成されている。したがって、挿入された電極針基部４２２が、この基部４２２ｂの部分で、パイプ部材４２１に強く差し込むようにして係止されるようになっている。そして、このように組み立てられたシリコン針４２３と電極針基部４２２との間には、コイルバネ４２４が介装されているので、この弾性力により、シリコン針４２３が、上下に摺動可能な状態で収納される構造となっている。図１１は、シリコン針４２３が、電極針基部４２２側に少し押し込まれた状態を示している。つまり、コイルバネ４２４が少し縮んだ状態の電極針４２の先端断面図である。 On the other hand, as shown in FIG. 9, the base 422b of the electrode needle base 422 is formed to have a slightly larger outer diameter. Therefore, the inserted electrode needle base 422 is locked so as to be strongly inserted into the pipe member 421 at the portion of the base 422b. Since the coil spring 424 is interposed between the silicon needle 423 and the electrode needle base 422 assembled in this manner, the silicon needle 423 can slide up and down by this elastic force. The structure is stored. FIG. 11 shows a state where the silicon needle 423 is pushed a little toward the electrode needle base 422 side. That is, it is a cross-sectional view of the tip of the electrode needle 42 with the coil spring 424 slightly contracted.

電極針４２が、このような構成となっていることで、次のようなメリットがある。まず、電極針４２の先端部、つまり、イオンが発生される部分がシリコン製の部材となっているため、半導体製造装置等における使用に適している。たとえば、針先端部が磨耗して、部材の一部が落下したとしても、飛散する部材が、半導体の構成部材と同じシリコンであるので、半導体（ウェハ）に対する悪影響を低減させることが可能である。 The electrode needle 42 having such a configuration has the following advantages. First, since the tip portion of the electrode needle 42, that is, the portion where ions are generated is a silicon member, it is suitable for use in a semiconductor manufacturing apparatus or the like. For example, even if the tip of the needle is worn and a part of the member falls, the scattering member is the same silicon as the constituent member of the semiconductor, so it is possible to reduce adverse effects on the semiconductor (wafer). .

さらに、針先端部に比較的硬質の弱いシリコン針を用いているが、電極（後述する電極プレート３６）と接する電極針基部４２２とシリコン針４２３との間には、弾性部材であるコイルバネ４２４が介装されている。これにより、シリコン針４２３への衝撃を吸収し、組み立て時などにおいて、シリコン針４２３が破損することを防止できるのである。 Furthermore, although a relatively hard and weak silicon needle is used at the tip of the needle, a coil spring 424 that is an elastic member is provided between the electrode needle base 422 and the silicon needle 423 that are in contact with the electrode (electrode plate 36 described later). It is intervened. As a result, the impact on the silicon needle 423 is absorbed, and the silicon needle 423 can be prevented from being damaged during assembly or the like.

図１２は、シリコン針４２３の先端拡大図である。図１２および図１０の断面図に示すように、シリコン針４２３の先端は、その側面断面が台形形状となっている。このように、シリコン針４２３の先端を少しカットすることで、シリコン針４２３の先端部の電界強度を弱め、磨耗等により、部材の一部が落下することを防止するようにしている。 FIG. 12 is an enlarged view of the tip of the silicon needle 423. As shown in the cross-sectional views of FIGS. 12 and 10, the tip of the silicon needle 423 has a trapezoidal side cross section. In this way, by slightly cutting the tip of the silicon needle 423, the electric field strength at the tip of the silicon needle 423 is weakened to prevent a part of the member from falling due to wear or the like.

図１３は、電極針ユニット１２が、エア供給ユニット１１に装着された状態を示す拡大図である。電極針ケース４１の小径内筒部分４１１の上端側には、その筒部の周囲を覆うように、ゴム４３が装着されている。図３に示すように、電極針ユニット１２の組み立て時には、このゴム４３が装着された小径内筒部分４１１の上端部が、上部第２部材３２のスリーブ３２２内に押し込まれる。 FIG. 13 is an enlarged view showing a state where the electrode needle unit 12 is attached to the air supply unit 11. A rubber 43 is attached to the upper end side of the small diameter inner cylinder portion 411 of the electrode needle case 41 so as to cover the periphery of the cylinder portion. As shown in FIG. 3, when assembling the electrode needle unit 12, the upper end portion of the small-diameter inner cylinder portion 411 to which the rubber 43 is attached is pushed into the sleeve 322 of the upper second member 32.

また、上部第１部材３１の底面側には、各スリーブ３２２の位置に合わせるようにして、電極プレート３６が取り付けられている。この電極プレート３６は、配電ライン（図示せぬ）を介して、高電圧ユニット１３に接続されている。つまり、電極プレート３６は、高電圧ユニット１３で発生した高電圧を、各電極針ユニット１２に供給する電極端子として機能する。 An electrode plate 36 is attached to the bottom surface side of the upper first member 31 so as to match the position of each sleeve 322. The electrode plate 36 is connected to the high voltage unit 13 via a power distribution line (not shown). That is, the electrode plate 36 functions as an electrode terminal that supplies the high voltage generated by the high voltage unit 13 to each electrode needle unit 12.

電極プレート３６は、図３および図１３に示すように、側面視で、Ω字状に形成されており、その内部側に、電極針基部４２２が押し込まれるようになっている。図１４は、電極プレート３６を底面側から見た図である。つまり、電極針ユニット１２が取り外されている状態で、エア供給ユニット１１のスリーブ３３２内を覗いた図である。 As shown in FIGS. 3 and 13, the electrode plate 36 is formed in a Ω shape in a side view, and the electrode needle base 422 is pushed into the inner side thereof. FIG. 14 is a view of the electrode plate 36 as seen from the bottom side. That is, it is a view of the inside of the sleeve 332 of the air supply unit 11 with the electrode needle unit 12 removed.

小径内筒部分４１１の先端部のゴム４３がスリーブ３２２に押し込まれ、電極プレート３６の内側に電極針基部４２２が押し込まれることにより、電極針ユニット１２がエア供給ユニット１１に装着される。このようにして、電極針ユニット１２がエア供給ユニット１１に装着されると、上述したように、下部部材３３の内周面と、電極針ユニット１２の小径内筒部分４１１の外周面と、上部第２部材３２の下面とで、空間Ｓ１が形成される。 The rubber 43 at the tip of the small-diameter inner cylinder portion 411 is pushed into the sleeve 322, and the electrode needle base 422 is pushed inside the electrode plate 36, whereby the electrode needle unit 12 is attached to the air supply unit 11. Thus, when the electrode needle unit 12 is mounted on the air supply unit 11, as described above, the inner peripheral surface of the lower member 33, the outer peripheral surface of the small-diameter inner cylinder portion 411 of the electrode needle unit 12, and the upper portion A space S <b> 1 is formed with the lower surface of the second member 32.

一方、図６に示すように、小径内筒部分４１１には、支持部材４２５との接合部分よりやや下方に、エア供給口４１４が設けられている。したがって、小径内筒部分４１１内のエア供給室Ｓ２は、エア供給口４１４を介して空間Ｓ１と連通している。つまり、エア供給部２から供給されたエアが、空間Ｓ１を経由して、エア供給室Ｓ２に流れるようになっている。 On the other hand, as shown in FIG. 6, the small-diameter inner cylinder portion 411 is provided with an air supply port 414 slightly below the joint portion with the support member 425. Therefore, the air supply chamber S2 in the small diameter inner cylinder portion 411 communicates with the space S1 via the air supply port 414. That is, the air supplied from the air supply unit 2 flows into the air supply chamber S2 via the space S1.

そして、エア供給室Ｓ２は、電極針ケース４１の底面側に開口部４１５を有しており、エア供給部２から空間Ｓ１を介して供給されたエアが、開口部４１５より、外部に噴出されるのである。ここで、エアが噴出される開口部４１５は、シリコン針４２３の外周に接する空間である。つまり、エア供給部２から供給されたエアが、シリコン針４２３の先端部に接する空間を流れるのである。このため、シリコン針４２３の先端部に、常にエアの流れが発生しているため、針先端部にごみ、埃が付着することを有効に防止できるのである。 The air supply chamber S2 has an opening 415 on the bottom surface side of the electrode needle case 41, and the air supplied from the air supply unit 2 via the space S1 is ejected from the opening 415 to the outside. It is. Here, the opening 415 through which air is ejected is a space in contact with the outer periphery of the silicon needle 423. That is, the air supplied from the air supply unit 2 flows through the space in contact with the tip of the silicon needle 423. For this reason, since the air flow is always generated at the tip of the silicon needle 423, it is possible to effectively prevent dust and dirt from adhering to the tip of the needle.

また、図６、図７等に示すように、シリコン針４２３の先端部は、電極針ケース４１の開口部４１５の開口面より少し内側に位置するように構成されている。つまり、電極針ユニット１２の側面視では、シリコン針４２３の先端部が見えないように構成されている。このように、シリコン針４２３の先端をケース内にわずかに隠すことで、針先端にごみが吸着するのを、さらに有効に防止している。 As shown in FIGS. 6, 7, etc., the tip of the silicon needle 423 is configured to be located slightly inside the opening surface of the opening 415 of the electrode needle case 41. That is, the tip of the silicon needle 423 is configured not to be visible when the electrode needle unit 12 is viewed from the side. Thus, by slightly hiding the tip of the silicon needle 423 in the case, dust is more effectively prevented from adsorbing to the tip of the needle.

以上の構成において、高電圧ユニット１３から供給された高電圧が、図示せぬ配電ラインを介して、電極プレート３６に供給される。そして、電極プレート３６には、電極針基部４２２が嵌合しており、さらに、導電性のパイプ部材４２１は、電極針基部４２２とシリコン針４２３と接触しているので、高電圧ユニット１３より供給された高電圧が、電極針基部４２２、パイプ部材４２１を介してシリコン針４２３に供給される。これにより、シリコン針４２３に高電圧が印加され、シリコン針４２３がコロナ放電により、イオンを発生するのである。 In the above configuration, the high voltage supplied from the high voltage unit 13 is supplied to the electrode plate 36 via a power distribution line (not shown). The electrode needle base 422 is fitted to the electrode plate 36, and the conductive pipe member 421 is in contact with the electrode needle base 422 and the silicon needle 423, and thus is supplied from the high voltage unit 13. The high voltage thus supplied is supplied to the silicon needle 423 via the electrode needle base 422 and the pipe member 421. As a result, a high voltage is applied to the silicon needle 423, and the silicon needle 423 generates ions by corona discharge.

以上説明したように、本実施の形態によれば、イオン化装置１の電極針４２として、その先端部の部材をシリコンで構成したので、半導体製造工場などで使用する場合に適している。また、電極に接する電極針基部４２２とシリコン針４２３の間に弾性部材であるコイルバネ４２４を介在させたので、組み立て時などにおいて、シリコン針４２３が破損することを防止できる。 As described above, according to the present embodiment, as the electrode needle 42 of the ionization apparatus 1, the member at the tip portion is made of silicon, which is suitable for use in a semiconductor manufacturing factory or the like. Further, since the coil spring 424, which is an elastic member, is interposed between the electrode needle base 422 that is in contact with the electrode and the silicon needle 423, the silicon needle 423 can be prevented from being damaged during assembly.

また、電極針４２は、支持部材４２５を用いて、電極針４２の基部に近い側の一部で支持するようにし、電極針４２の先端側、つまり、シリコン針４２３の先端部周囲をエアが流れる空間としている。これにより、シリコン針４２３の針先端に埃、ごみが付着するのを有効に防止することが可能である。 Further, the electrode needle 42 is supported by a part of the side close to the base portion of the electrode needle 42 using the support member 425, and air flows around the distal end side of the electrode needle 42, that is, around the distal end portion of the silicon needle 423. It is a flowing space. Thereby, it is possible to effectively prevent dust and dirt from adhering to the needle tip of the silicon needle 423.

なお、上記の実施の形態においては、パイプ部材４２１を導電性部材で構成することにより、電極針基部４２２、パイプ部材４２１を介してシリコン針４２３に高電圧を供給したが、パイプ部材４２１の代わりにコイルバネ４２４を導電性部材で構成するようにしてもよい。この場合には、電極針基部４２２、コイルバネ４２４を介して、シリコン針４２３に高電圧を供給することが可能である。 In the above embodiment, a high voltage is supplied to the silicon needle 423 via the electrode needle base 422 and the pipe member 421 by configuring the pipe member 421 with a conductive member. Alternatively, the coil spring 424 may be made of a conductive member. In this case, a high voltage can be supplied to the silicon needle 423 via the electrode needle base 422 and the coil spring 424.

また、別の実施例として、パイプ部材４２１の長さを長くすることで、電極プレート３６が、直接パイプ部材４２１に接触するように構成してもよい。その実施例を図１５に示す。図で示す電極針ユニット１２Ａに装着された電極針４２Ａは、長いパイプ部材４２１Ａの中にキャップ４２２Ａが挿入されている。キャップ４２２Ａは、上記の実施の形態における電極針基部４２２とは異なり、導電性の部材で構成されている必要はない。キャップ材４２２Ａは、シリコン針４２３とコイルバネ４２４がパイプ部材４２１Ａの中から飛び出さないように蓋をする役割を備えていればよい。この場合には、パイプ部材４２１Ａを導電性部材で構成することにより、電極プレート３６、パイプ部材４２１Ａを介して、シリコン針４２３に高電圧を供給することが可能である。図１６は、電極プレート３６と、パイプ部材４２１Ａの接触部分を示す図である。このように、パイプ部材４２１Ａが、Ω字状に形成された電極プレート３６の内側に押し込まれることにより、パイプ部材４２１Ａが電極プレート３６と直接導通するのである。 As another example, the length of the pipe member 421 may be increased so that the electrode plate 36 directly contacts the pipe member 421. An example thereof is shown in FIG. The electrode needle 42A attached to the electrode needle unit 12A shown in the figure has a cap 422A inserted in a long pipe member 421A. Unlike the electrode needle base 422 in the above-described embodiment, the cap 422A does not need to be formed of a conductive member. The cap material 422A only needs to have a role of covering the silicon needle 423 and the coil spring 424 so that the silicon needle 423 and the coil spring 424 do not jump out of the pipe member 421A. In this case, it is possible to supply a high voltage to the silicon needle 423 via the electrode plate 36 and the pipe member 421A by configuring the pipe member 421A with a conductive member. FIG. 16 is a view showing a contact portion between the electrode plate 36 and the pipe member 421A. Thus, the pipe member 421A is directly conducted to the electrode plate 36 by being pushed into the electrode plate 36 formed in the Ω-shape.

なお、図１５においては、コイルバネ４２４の外周部とパイプ部材４２１Ａの内周面に隙間があるが、パイプ部材４２１Ａの内周面とコイルバネ４２４の外周部とが接触するように構成してもよい。これにより、パイプ部材４２１Ａとコイルバネ４２４が接触した部分からは、コイルバネ４２４を介してシリコン針４２３に高電圧が供給される構成とすることもできる。その接触部分からシリコン針４２３側では、パイプ部材が導電性である必要はない。 In FIG. 15, there is a gap between the outer peripheral portion of the coil spring 424 and the inner peripheral surface of the pipe member 421A, but the inner peripheral surface of the pipe member 421A and the outer peripheral portion of the coil spring 424 may be in contact with each other. . Thereby, it can also be set as the structure by which the high voltage is supplied to the silicon needle | hook 423 via the coil spring 424 from the part which the pipe member 421A and the coil spring 424 contacted. On the silicon needle 423 side from the contact portion, the pipe member does not need to be conductive.

また、上記実施の形態において、電極針基部４２２とシリコン針４２３との間に介装される弾性部材は、コイルバネを例に説明したが、この他、スポンジ、弾性接着剤などを利用することも可能である。 In the above embodiment, the elastic member interposed between the electrode needle base 422 and the silicon needle 423 has been described by taking a coil spring as an example. However, other than this, a sponge, an elastic adhesive, or the like may be used. Is possible.

本発明のイオン化装置および電極針ユニットは、プラスイオンとマイナスイオンを交互に発生するパルスＡＣ式、パルスＤＣ式、いずれにおいても適用可能である。また、プラスイオンとマイナスイオンが同時に発生するＳＳＤＣ式にも適用可能である。 The ionization apparatus and the electrode needle unit of the present invention can be applied to either a pulse AC type or a pulse DC type that alternately generate positive ions and negative ions. Further, the present invention can also be applied to an SSDC type in which positive ions and negative ions are generated simultaneously.

本実施の形態に係るイオン化装置の外形側面図である。It is an outline side view of the ionization device concerning this embodiment. イオン化装置の内部構造を示す模式図である。It is a schematic diagram which shows the internal structure of an ionization apparatus. イオン化装置の矢視Ａ−Ａ断面図である。It is arrow AA sectional drawing of an ionizer. 上部第２部材の模式断面図である。It is a schematic cross section of the upper second member. 下部部材の模式断面図である。It is a schematic cross section of a lower member. 電極針ユニットの断面図である。It is sectional drawing of an electrode needle unit. 電極針ユニットの斜視図である。It is a perspective view of an electrode needle unit. 電極針の断面図である。It is sectional drawing of an electrode needle. 電極針ユニットの分解図である。It is an exploded view of an electrode needle unit. 電極針の先端断面図である。It is a front end sectional view of an electrode needle. シリコン針が押し込まれた状態の電極針の先端断面図である。It is a front end sectional view of an electrode needle in the state where a silicon needle was pushed. シリコン針の先端拡大図である。It is the front-end | tip enlarged view of a silicon needle. 電極針が電極プレートに嵌合した状態を示す図である。It is a figure which shows the state which the electrode needle fitted to the electrode plate. 電極プレートをイオン化装置の底面側から見た図である。It is the figure which looked at the electrode plate from the bottom face side of the ionization apparatus. 別実施例の電極針ユニットの断面図である。It is sectional drawing of the electrode needle unit of another Example. 別実施例において電極針が電極プレートに嵌合した状態を示す図である。It is a figure which shows the state which the electrode needle fitted in the electrode plate in another Example.

Explanation of symbols

１イオン化装置
１１エア供給ユニット
１２電極針ユニット
４１電極針ケース
４２電極針
４２１パイプ部材
４２２電極針基部
４２３シリコン針
４２４コイルバネ
４２５支持部材
1 Ionizer 11 Air Supply Unit 12 Electrode Needle Unit 41 Electrode Needle Case 42 Electrode Needle 421 Pipe Needle 422 Electrode Needle Base 423 Silicon Needle 424 Coil Spring 425 Support Member

Claims

An electrode needle unit of an ionization apparatus that obtains electric power from a power supply means of the apparatus main body and performs ion discharge,
A discharge electrode needle;
An electrode needle case,
With
The discharge electrode needle is
A tubular member;
A silicon needle inserted into at least the inside of the distal end of the cylindrical member;
A conductive member inserted into at least the other end side of the cylindrical member and connected to a power distribution line from the power supply means;
An elastic member sandwiched between the silicon needle and the conductive member;
Comprising at least one of the cylindrical member and the elastic member as a conductive member,
The electrode needle case has an air supply chamber having an opening communicating with the outside of the electrode needle case, and air from an air supply means provided outside the electrode needle unit is supplied to the air supply chamber. An air supply port to be supplied is provided, and in the air supply chamber, the discharge electrode needle is located on the other end side of the air supply port via a support member so that the silicon needle is positioned on the opening side. The electrode needle of the ionization apparatus is characterized in that the air supplied from the air supply means is supplied toward the outside of the electrode needle unit from the opening of the outer peripheral portion of the silicon needle. unit.

An electrode needle unit of an ionization apparatus that obtains electric power from a power supply means of the apparatus main body and performs ion discharge,
A discharge electrode needle;
An electrode needle case;
With
The discharge electrode needle is
A conductive cylinder member connected to a power distribution line from the power supply means;
A silicon needle inserted into at least the inside of the distal end of the cylindrical member;
A locking member inserted into at least the other end side of the cylindrical member;
An elastic member sandwiched between the silicon needle and the locking member;
With
The electrode needle case has an air supply chamber having an opening communicating with the outside of the electrode needle case, and air from an air supply means provided outside the electrode needle unit is supplied to the air supply chamber. An air supply port to be supplied is provided, and in the air supply chamber, the discharge electrode needle is located on the other end side of the air supply port via a support member so that the silicon needle is positioned on the opening side. The electrode needle of the ionization apparatus is characterized in that the air supplied from the air supply means is supplied toward the outside of the electrode needle unit from the opening of the outer peripheral portion of the silicon needle. unit.

An electrode needle unit of an ionization apparatus that obtains electric power from a power supply means of the apparatus main body and performs ion discharge,
A discharge electrode needle;
An electrode needle case,
With
The discharge electrode needle is
A tubular member;
A silicon needle inserted into at least the inside of the distal end of the cylindrical member;
A conductive member inserted into at least the other end side of the cylindrical member and connected to a power distribution line from the power supply means;
An elastic member sandwiched between the silicon needle and the conductive member;
Comprising at least one of the cylindrical member and the elastic member as a conductive member,
The electrode needle case is
A plate on a disk having an opening in a substantially central portion;
A case cylinder standing on the plate;
With
The case tube portion has a substantially cylindrical air supply chamber therein, and the air supply chamber communicates with the outside of the electrode needle case through the opening. The discharge electrode needle is provided with an air supply port for supplying air from an air supply means provided outside the electrode needle unit, and the silicon needle is positioned on the opening side in the air supply chamber. Is supported by a support member on the other end side of the air supply port, and the air supplied from the air supply means is moved outwardly of the electrode needle unit from the opening of the outer peripheral portion of the silicon needle. An electrode needle unit of an ionization apparatus, wherein the electrode needle unit is supplied toward

An electrode needle unit of an ionization apparatus that obtains electric power from a power supply means of the apparatus main body and performs ion discharge,
A discharge electrode needle;
An electrode needle case,
With
The discharge electrode needle is
A conductive cylinder member connected to a power distribution line from the power supply means;
A silicon needle inserted into at least the inside of the distal end of the cylindrical member;
A locking member inserted into at least the other end side of the cylindrical member;
An elastic member sandwiched between the silicon needle and the locking member;
With
The electrode needle case is
A plate on a disk having an opening in a substantially central portion;
A case cylinder standing on the plate;
With
The case tube portion has a substantially cylindrical air supply chamber therein, and the air supply chamber communicates with the outside of the electrode needle case through the opening. The discharge electrode needle is provided with an air supply port for supplying air from an air supply means provided outside the electrode needle unit, and the silicon needle is positioned on the opening side in the air supply chamber. Is supported by a support member on the other end side of the air supply port, and the air supplied from the air supply means is moved outwardly of the electrode needle unit from the opening of the outer peripheral portion of the silicon needle. An electrode needle unit of an ionization apparatus, wherein the electrode needle unit is supplied toward

An electrode needle unit of the ionization apparatus according to any one of claims 1 to 4,
The tip part of the said cylindrical member is formed so that an internal diameter may become small compared with another part, The electrode needle unit of the ionization apparatus characterized by the above-mentioned.

An electrode needle unit of the ionization apparatus according to any one of claims 1 to 5,
An electrode needle unit of an ionization device, wherein a side cross section of a tip portion of the silicon needle has a trapezoidal shape.

An electrode needle unit of an ionization apparatus according to any one of claims 1 to 6,
An electrode needle unit of an ionization apparatus, wherein a surface of a connection portion of the support member with the electrode needle case is knurled.

An electrode needle unit of an ionization apparatus according to any one of claims 1 to 7,
An electrode needle unit of an ionization device, wherein a tip end portion of the silicon needle supported in the air supply chamber is located inside the opening.

An ionization apparatus in which a plurality of electrode needle units are arranged apart from each other,
Power supply means;
A power distribution line for supplying power from the power supply means to the electrode needle unit;
An air passage for supplying air from an air supply means to the electrode needle unit;
With
The electrode needle unit includes a discharge electrode needle and an electrode needle case,
The discharge electrode needle is
A tubular member;
A silicon needle inserted into at least the inside of the distal end of the cylindrical member;
A conductive member inserted into at least the other end side of the cylindrical member and connected to the power distribution line;
An elastic member sandwiched between the silicon needle and the conductive member;
Comprising at least one of the cylindrical member and the elastic member as a conductive member,
The electrode needle case has an air supply chamber having an opening communicating with the outside of the electrode needle case, and the air supply chamber is provided with an air supply port communicating with the air passage. The discharge electrode needle is supported via a support member on the other end side of the air supply port so that the silicon needle is positioned on the opening side, and supplied from the air supply means. Air is supplied toward the outside of the electrode needle unit from the opening of the outer peripheral portion of the silicon needle.

An ionization apparatus in which a plurality of electrode needle units are arranged apart from each other,
Power supply means;
A power distribution line for supplying power from the power supply means to the electrode needle unit;
An air passage for supplying air from an air supply means to the electrode needle unit;
With
The electrode needle unit includes a discharge electrode needle and an electrode needle case,
The discharge electrode needle is
A conductive cylinder member connected to the power distribution line;
A silicon needle inserted into at least the inside of the distal end of the cylindrical member;
A locking member inserted into at least the other end side of the cylindrical member;
An elastic member sandwiched between the silicon needle and the locking member;
With
The electrode needle case has an air supply chamber having an opening communicating with the outside of the electrode needle case, and the air supply chamber is provided with an air supply port communicating with the air passage. The discharge electrode needle is supported via a support member on the other end side of the air supply port so that the silicon needle is positioned on the opening side, and supplied from the air supply means. Air is supplied toward the outside of the electrode needle unit from the opening of the outer peripheral portion of the silicon needle.

An ionization apparatus in which a plurality of electrode needle units are arranged apart from each other,
Power supply means;
A power distribution line for supplying power from the power supply means to the electrode needle unit;
An air passage for supplying air from an air supply means to the electrode needle unit;
With
The electrode needle unit includes a discharge electrode needle and an electrode needle case,
The discharge electrode needle is
A tubular member;
A silicon needle inserted into at least the inside of the distal end of the cylindrical member;
A conductive member inserted into at least the other end side of the cylindrical member and connected to the power distribution line;
An elastic member sandwiched between the silicon needle and the conductive member;
Comprising at least one of the cylindrical member and the elastic member as a conductive member,
The electrode needle case is
A plate on a disk having an opening in a substantially central portion;
A case cylinder standing on the plate;
With
The case tube portion has a substantially cylindrical air supply chamber therein, and the air supply chamber communicates with the outside of the electrode needle case through the opening. An air supply port for supplying air from an air supply means is provided, and the discharge electrode needle is located on the other side than the air supply port so that the silicon needle is positioned on the opening side in the air supply chamber. It is supported through a support member on the end side, and the air supplied from the air supply means is supplied from the opening of the outer peripheral portion of the silicon needle toward the outside of the electrode needle unit. An ionizer.

An ionization apparatus in which a plurality of electrode needle units are arranged apart from each other,
Power supply means;
A power distribution line for supplying power from the power supply means to the electrode needle unit;
An air passage for supplying air from an air supply means to the electrode needle unit;
With
The electrode needle unit includes a discharge electrode needle and an electrode needle case,
The discharge electrode needle is
A conductive cylinder member connected to the power distribution line;
A silicon needle inserted into at least the inside of the distal end of the cylindrical member;
A locking member inserted into at least the other end side of the cylindrical member;
An elastic member sandwiched between the silicon needle and the locking member;
With
The electrode needle case is
A plate on a disk having an opening in a substantially central portion;
A case cylinder standing on the plate;
With
The case tube portion has a substantially cylindrical air supply chamber therein, and the air supply chamber communicates with the outside of the electrode needle case through the opening. An air supply port for supplying air from an air supply means is provided, and the discharge electrode needle is located on the other side than the air supply port so that the silicon needle is positioned on the opening side in the air supply chamber. It is supported through a support member on the end side, and the air supplied from the air supply means is supplied from the opening of the outer peripheral portion of the silicon needle toward the outside of the electrode needle unit. An ionizer.

The ionization apparatus according to claim 9 or 11,
The electrode terminal of the distribution line is a substantially Ω-shaped member, and the end of the conductive member is pushed into the electrode terminal, whereby the electrode terminal and the conductive member are electrically connected. An ionizer characterized by the above.

The ionization apparatus according to claim 10 or 12,
The electrode terminal of the distribution line is a substantially Ω-shaped member, and the end of the cylindrical member is pushed into the electrode terminal, whereby the electrode terminal and the cylindrical member are electrically connected. An ionizer.