TWI480942B - Polishing pad - Google Patents

Polishing pad Download PDF

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Publication number
TWI480942B
TWI480942B TW101131547A TW101131547A TWI480942B TW I480942 B TWI480942 B TW I480942B TW 101131547 A TW101131547 A TW 101131547A TW 101131547 A TW101131547 A TW 101131547A TW I480942 B TWI480942 B TW I480942B
Authority
TW
Taiwan
Prior art keywords
polishing
region
light
resin
polishing pad
Prior art date
Application number
TW101131547A
Other languages
English (en)
Chinese (zh)
Other versions
TW201330078A (zh
Inventor
木村毅
Original Assignee
東洋橡膠工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東洋橡膠工業股份有限公司 filed Critical 東洋橡膠工業股份有限公司
Publication of TW201330078A publication Critical patent/TW201330078A/zh
Application granted granted Critical
Publication of TWI480942B publication Critical patent/TWI480942B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
TW101131547A 2011-09-01 2012-08-30 Polishing pad TWI480942B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011190859A JP5732354B2 (ja) 2011-09-01 2011-09-01 研磨パッド

Publications (2)

Publication Number Publication Date
TW201330078A TW201330078A (zh) 2013-07-16
TWI480942B true TWI480942B (zh) 2015-04-11

Family

ID=47756182

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101131547A TWI480942B (zh) 2011-09-01 2012-08-30 Polishing pad

Country Status (6)

Country Link
US (1) US9156126B2 (https=)
JP (1) JP5732354B2 (https=)
KR (1) KR101633745B1 (https=)
CN (1) CN103747918A (https=)
TW (1) TWI480942B (https=)
WO (1) WO2013031692A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111183003A (zh) * 2017-08-07 2020-05-19 Skc株式会社 经表面处理的研磨垫窗口及包含该窗口的研磨垫

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8961266B2 (en) * 2013-03-15 2015-02-24 Applied Materials, Inc. Polishing pad with secondary window seal
TWI593511B (zh) * 2016-06-08 2017-08-01 智勝科技股份有限公司 研磨墊及研磨方法
CN109202693B (zh) * 2017-10-16 2021-10-12 Skc索密思株式会社 防泄漏抛光垫及其制造方法
JP7525271B2 (ja) * 2020-03-03 2024-07-30 富士紡ホールディングス株式会社 研磨パッド及び研磨パッドの製造方法
US11633830B2 (en) * 2020-06-24 2023-04-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. CMP polishing pad with uniform window
KR102488101B1 (ko) * 2021-05-04 2023-01-12 에스케이엔펄스 주식회사 연마 패드, 연마 패드의 제조 방법 및 이를 이용한 반도체 소자의 제조 방법
CN115555986B (zh) * 2021-07-02 2025-12-19 恩普士有限公司 抛光垫及使用其的半导体器件的制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004327779A (ja) * 2003-04-25 2004-11-18 Toray Ind Inc 研磨パッド、研磨装置及び半導体デバイスの製造方法
JP2004343090A (ja) * 2003-04-22 2004-12-02 Jsr Corp 研磨パッドおよび半導体ウェハの研磨方法
JP2008226911A (ja) * 2007-03-08 2008-09-25 Jsr Corp 化学機械研磨用パッド、化学機械研磨用積層体パッド、および化学機械研磨方法
JP2009045694A (ja) * 2007-08-20 2009-03-05 Toyo Tire & Rubber Co Ltd 研磨パッド及びその製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6832950B2 (en) * 2002-10-28 2004-12-21 Applied Materials, Inc. Polishing pad with window
US6454630B1 (en) 1999-09-14 2002-09-24 Applied Materials, Inc. Rotatable platen having a transparent window for a chemical mechanical polishing apparatus and method of making the same
US6524164B1 (en) 1999-09-14 2003-02-25 Applied Materials, Inc. Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus
DE60011798T2 (de) 1999-09-29 2005-11-10 Rohm and Haas Electronic Materials CMP Holdings, Inc., Wilmington Schleifkissen
US20020137431A1 (en) * 2001-03-23 2002-09-26 Labunsky Michael A. Methods and apparatus for polishing and planarization
KR100858392B1 (ko) * 2001-04-25 2008-09-11 제이에스알 가부시끼가이샤 반도체 웨이퍼용 연마 패드와, 이를 구비한 반도체웨이퍼용 연마 적층체와, 반도체 웨이퍼의 연마 방법
JP4131632B2 (ja) 2001-06-15 2008-08-13 株式会社荏原製作所 ポリッシング装置及び研磨パッド
JP2004327974A (ja) * 2003-04-09 2004-11-18 Jsr Corp 研磨パッド、その製造法と製造用金型および半導体ウエハの研磨方法
US20040224611A1 (en) 2003-04-22 2004-11-11 Jsr Corporation Polishing pad and method of polishing a semiconductor wafer
KR100532440B1 (ko) * 2003-06-05 2005-11-30 삼성전자주식회사 윈도로의 유체의 침투를 막는 실링 장벽부를 가지는 화학기계적 연마 장비에 사용되는 연마 패드
US6984163B2 (en) * 2003-11-25 2006-01-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with high optical transmission window
US7018581B2 (en) * 2004-06-10 2006-03-28 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method of forming a polishing pad with reduced stress window
US7520968B2 (en) * 2004-10-05 2009-04-21 Applied Materials, Inc. Conductive pad design modification for better wafer-pad contact
US7226339B2 (en) * 2005-08-22 2007-06-05 Applied Materials, Inc. Spectrum based endpointing for chemical mechanical polishing
US7621798B1 (en) * 2006-03-07 2009-11-24 Applied Materials, Inc. Reducing polishing pad deformation
JP5146927B2 (ja) 2006-10-18 2013-02-20 東洋ゴム工業株式会社 長尺研磨パッドの製造方法
US8083570B2 (en) 2008-10-17 2011-12-27 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad having sealed window

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004343090A (ja) * 2003-04-22 2004-12-02 Jsr Corp 研磨パッドおよび半導体ウェハの研磨方法
JP2004327779A (ja) * 2003-04-25 2004-11-18 Toray Ind Inc 研磨パッド、研磨装置及び半導体デバイスの製造方法
JP2008226911A (ja) * 2007-03-08 2008-09-25 Jsr Corp 化学機械研磨用パッド、化学機械研磨用積層体パッド、および化学機械研磨方法
JP2009045694A (ja) * 2007-08-20 2009-03-05 Toyo Tire & Rubber Co Ltd 研磨パッド及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111183003A (zh) * 2017-08-07 2020-05-19 Skc株式会社 经表面处理的研磨垫窗口及包含该窗口的研磨垫

Also Published As

Publication number Publication date
US9156126B2 (en) 2015-10-13
KR20140051441A (ko) 2014-04-30
CN103747918A (zh) 2014-04-23
KR101633745B1 (ko) 2016-06-27
WO2013031692A1 (ja) 2013-03-07
JP5732354B2 (ja) 2015-06-10
US20140213151A1 (en) 2014-07-31
JP2013052459A (ja) 2013-03-21
TW201330078A (zh) 2013-07-16

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