TWI471926B - Deflash apparatus for strip-shaped elements - Google Patents

Description

Deburring device for strip parts

The present invention relates to a method and apparatus for deburring a strip-shaped part, and the strip-shaped part comprises a molded lead frame strip (Molded Lead Frame Strip), in particular, a method and a device for deburring a strip-shaped part The method is directed to the electrolytic deburring step before and after the electroplating process, and the chemical solution is additionally pressurized on the surface of the strip part in the form of a jet stream before the electro-deburring step or in the electro-deburring step. The steps to improve the efficiency of the electrolysis deburring step.

In general, in the manufacturing step of the semiconductor, after the sealing process performed according to the resin molding, a deflashing process is performed, which is used for the portion to be electroplated before the electroplating process or After the electroplating process, the flash is removed for the portion where the electroplating has been performed.

In the previous deburring process, the impregnation step, the Rinse step, the electrolytic deburring step, the re-cleaning step, and the water jetting step are sequentially performed, wherein the impregnation step is usually performed by immersing the strip-shaped part in the chemical solution. Time, in the cleaning step, the surface of the strip-shaped part is cleaned, and in the step of electrolyzing the burr, the cleaned strip-shaped part is electrolytically deburred in a state of being immersed to peel off the burr, and the surface of the strip-shaped part is washed again in the cleaning step again. Also, the water jetting step is used to remove residual burrs.

That is, the impregnation step, the washing step, the electrolytic deburring step, the re-cleaning step, and the water jetting step are sequentially performed, and the electrolytic deburring step in the deburring process of the prior mode is performed in the following steps: In the state where the cleaned strip-shaped part is immersed in a chemical solution (for example, a potassium hydroxide solution), a strip-shaped part is used as a cathode, and an insoluble metal such as titanium or platinum is used as an anode, and a power source is applied from the strip-shaped part in this state. Hydrogen is generated on the surface of the wafer mounting portion or the lead frame, and the burrs formed on the surface of the strip member are peeled off.

However, when the previous electrolytic deburring step method is actually applied to the strip-shaped parts of various shapes, the defective product is frequently generated due to the inability to peel the burrs beautifully, and as a result, the quality required to achieve the deburring must be performed. Several times, the disadvantages of the burrs were not only caused by low productivity, but also caused by the increase in manufacturing costs.

The present invention has been developed in order to eliminate the problems of the prior art. In order to remove the burrs more perfectly in the case of strip-shaped parts, if the electro-deburring step is carried out, the chemical solution is not leaked in the form of the jet stream. When the place is applied to the entire surface of the strip-shaped part in a state of being immersed in the chemical solution, the chemical solution is easily permeated between the actual surface of the strip-shaped part and the burr, so in the case where the electrolytic deburring step is actually performed The phenomenon that the burrs are peeled off from the surface of the strip-shaped part can be easily caused, and the present invention is based on the above principle and is researched and developed.

It is an object of the present invention to more effectively perform an electrolytic deburring step by adding a jet flow pressure impregnation step of a chemical solution, the jet pressure impregnation step of the chemical solution being used as a peeling burr (including adhesion to strip parts) Pre-treatment of air bubbles or foreign matter on the sealing portion or the lead portion to the intermediate processing operation, and pressurizing the surface of the strip-shaped member in a state of being immersed in the chemical solution in a form of a jet stream .

Another object of the present invention is to enable the peeling of the burrs to a desired quality by performing only one electrolytic deburring step, thereby improving not only productivity but also manufacturing cost while ensuring the competitiveness of the product.

In order to achieve the object, the present invention provides a method for deburring a strip-shaped part, which is a strip for removing the burrs remaining before and after the electroplating step after the sealing step performed in accordance with the resin molding in the manufacturing step of the semiconductor. a method for deburring a part, for the step of electrolyzing the burr, adding a jet of a chemical solution to the immersion step for stripping the burrs remaining on the seal or the wire portion of the strip part, and chemistry The jet flow pressure impregnation step of the solution is to pressurize the chemical solution in the form of a jet stream against the surface of the strip-shaped part immersed in the chemical solution state.

Further, the present invention provides a deburring device for a strip-shaped member, which is a strip-shaped member for peeling off the burrs remaining before and after the plating step after the sealing step performed in accordance with resin molding in the manufacturing step of the semiconductor. a deburring device, wherein a jet flow generator body is disposed on both sides of the strip-shaped member, and a chemical solution pressurizing and rushing mechanism for rapidly supplying a chemical solution under pressure is connected to the jet flow generator body And the strip-shaped part and the jet flow generator body are disposed in an immersed state of the chemical solution and located inside the chemical solution unit.

According to the present invention, as a processing operation for peeling a burr (including a bubble or a foreign matter adhering to a sealing portion or a lead portion of a strip-shaped member), by adding a chemical solution to the strip-shaped member in the form of a jet stream The spray-flow pressure-soaking step of the chemical solution having a pressurized surface can perform the electro-deburring step more efficiently, and the electro-deburring step can be performed only once to obtain the desired quality of the burrs, and not only the productivity can be improved. There is also the effect of saving manufacturing costs and ensuring the competitiveness of products.

Hereinafter, the present invention will be described more specifically and in detail with reference to the drawings attached to the specification.

As shown in the drawings, first, a preferred embodiment of the deburring device of the present invention will be seen. These preferred embodiments are commonly used in the deburring device of the strip member 1 (this device is used to form a resin in the manufacturing step of the semiconductor. After the sealing step is performed, the burrs remaining before and after the plating step are removed and removed, and the jet flow generator body 2 is disposed on both sides of the strip-shaped member 1 and is connected to the jet flow generator body 2 a chemical solution for rapidly feeding a chemical solution under pressure to pressurize the squeezing mechanism 3, and set the strip member 1 and the jet flow generator body 2 to be in an immersion state of the chemical solution and located in the chemical solution unit The inside of (cell) 4.

At this time, the jet flow generator body 2 is fixedly disposed on the inner wall of the chemical solution unit 4 in such a manner that the strip-shaped member 1 is located on both sides of the strip-shaped member 1, and is in the jet flow generator body. The inside of the 2 is provided with a long chemical solution supply space 20, and the plurality of injection holes 22 and the chemical solution supply space 20 communicate with each other to form a position opposite to the strip-shaped member 1, and the chemical solution supply space 20 is described later. The chemical solution pressurization rush mechanism 3 is composed of a configuration in which the rush pipe 30 is connected to each other.

At this time, the injection holes 22 are formed at various heights in such a manner that the height of the installation position is different, so that the chemical solution is not leaked anywhere to the entire portion of the surface of the strip member 1 that is rushed, and The injection hole 22 is configured to perform a jet flow pressure soaking step of the chemical solution, the jet flow pressure soaking step causes a plurality of jets to simultaneously hit the surface of the strip member 1, and the strip member 1 is in the chemical solution The inside of the unit 4 is immersed in a state of a chemical solution.

Further, the chemical solution pressurizing and rushing mechanism 3 is composed of a configuration in which the rapid feed pipe 30 and the pressurizing burrow pump 32 are connected to each other, and the chemical feed supply space 20 of the ejector pipe 30 and the above-described jet flow generator body 2 are mutually connected. The pressurized rush pump 32 and the rush tube 30 are coupled to each other for pressurizing the rush chemical solution.

Further, the chemical solution unit 4 is configured to be filled with a chemical solution inside, and can maintain the state in which the above-described strip member 1 and the jet flow generator body 2 are immersed in a chemical solution, but the chemical solution unit 4 is subjected to electrolysis. The electrolytic deburring unit 40 of the deburring step and the electrolytic deburring pretreatment unit 42 additionally disposed at the position of the previous stage of the electrolytic deburring unit 40 can make a distinction.

At this time, the strip-shaped component 1 is placed in a state of being held by the annular feed belt 5 at regular intervals, and the annular feed belt 5 is provided with a finger 50 for gripping, and is dipped in the strip-shaped member 1. In the state of the chemical solution inside the chemical solution unit 4, an electrolysis deburring pretreatment step or an electrolytic depilation step is performed between the acute feed belts 5 by the rush.

Further, in the above-described jet flow generator main body 2, an example in which the strip-shaped components 1 for performing the electro-deburring step are provided on both sides is shown. However, as shown in Fig. 9, The strip-shaped member 1 for performing the electro-deburring step is centered and provided only on one side, and this method can be used for the case where the specification of the strip-shaped member 1 has to be subjected to the deburring step centering on one of the surfaces.

Next, the jet flow generator body 2 is viewed as the center of the electrolytic deburring unit 40 performing the electrolytic deburring step, as shown in FIGS. 6 to 9, from the direction of the sharp feed of the strip member 1 The electrolysis deburring step may be performed in the electrolysis deburring unit 40 after performing the jet flow pressure impregnation step of the chemical solution, wherein the jet flow pressure impregnation step of the chemical solution is in front of the electrolysis deburring unit 40. An additional electrolytic deburring pre-processing unit 42 is disposed at a position, and the jet flow generator body 2 is disposed inside the electrolytic deburring pretreatment unit 42 to perform the surface of the strip member 1 according to the jet flow generator body 2. The jet of chemical solution is subjected to a pressure soaking step.

Further, as shown in Figs. 10 and 11, a jet flow generator body 2 is provided at an intermediate portion of the electrolytic deburring unit 40 to perform a jet flow pressure soaking step of the chemical solution on the way of the electrolytic deburring step. Alternatively, as shown in Figs. 12 and 13, the jet flow generator body 2 is disposed in the additional electrolytic deburring pretreatment unit 42 at the front position of the electro-deburring unit 40, and at the same time, the deburring is also performed in the electrolysis. The jet flow generator body 2 is disposed in the unit 40 to perform a jet pressurization soaking step of the chemical solution on both the pre-electrolysis deburring step and the electrolytic deburring step.

Further, as shown in Figs. 14 and 15, in the other electrolytic deburring pretreatment unit 42 at the position in front of the electro-deburring unit 40, the jet flow generator body 2 is provided, and at the same time, in the electrolysis The jet flow generator body 2 is provided in a plurality of stages in the burr unit 40, whereby a plurality of chemical solution injection pressure soaking steps are performed on the middle of the electrolytic burring step and the electrolytic burring step.

That is, the installation position or the number of the jet flow generator body 2 can be adjusted for use in accordance with various shapes and specifications of the strip-shaped member 1 required for the burring step.

Unexplained component symbol 6 is a damper between the electrolytic deburring unit 40 and the electrolytic deburring pretreatment unit 42.

Next, as described above, the operation of the deburring device of the present invention in various types is observed based on the deburring method of the present invention.

That is, the deburring method for stripping the strip-shaped part 1 which removes the burrs remaining before and after the electroplating step after the sealing step performed in accordance with the resin molding in the manufacturing step of the semiconductor, wherein The burr step is performed by adding a jet flow pressure impregnation step of the chemical solution for stripping the burrs remaining on the sealing portion or the lead portion of the strip member 1 and the jet of the chemical solution is subjected to a pressure impregnation step The chemical solution is pressurized in the form of a jet stream against the surface of the strip-shaped member 1 in a state of being immersed in a chemical solution.

At this time, the jet flow pressure soaking step of the chemical solution is accompanied by the electrolysis deburring step, but is distinguished from the period before the electrolysis deburring step, only in the electrolysis, according to the period of the chemical solution jet pressurization soaking step. The case where the process of removing the burrs is carried out, and the case where it is performed in the middle of the step of performing the electro-deburring step and the step of performing the electro-deburring step are respectively described below.

Only before the electrolytic deburring step

As shown in FIGS. 6 to 9, in the chemical solution unit 4, the jet flow generator body 2 is disposed inside the electrolytic deburring pretreatment unit 42, and the strip member 1 is rushed by the spur belt 5 In the state of being immersed in the chemical solution, the chemical feed solution is pressurized to the injection by the pressurization pump 32 of the pressurizing and rushing mechanism 3 of the chemical solution, and the chemical solution is pressurized under the pressurized state. The chemical solution of the flow generator body 2 is supplied to the space 20 and ejected through the plurality of injection holes 22. Further, the inside of the electrolytic deburring pretreatment unit 42 is filled with a chemical solution, and the strip member 1 allows the chemical solution to be ejected through the plurality of injection holes 22 in a state of being immersed in the chemical solution, so that it can be internally Performing a change in the shape of the jet flow to perform a jet flow pressure impregnation step of the chemical solution, and the jet flow pressurization soaking step of the chemical solution is such that the jet streams are simultaneously applied to both sides of the strip member 1 or only to one side thereof In the case where the electrolytic burring step is performed in the electrolytic burring unit 40, the effect of electrolytic burring is increased, and the burr is more effectively peeled off.

Only on the way to the electrolytic deburring step

In this case, as shown in Figs. 10 and 11, if the chemical solution unit 4 is provided with the jet flow generator body 2 inside the electrolytic deburring unit 40, and the strip which is rushed by the spur belt 5 When the component 1 is immersed in the chemical solution, the pressurized spur pump 32 of the pressurizing and rushing mechanism 3 of the chemical solution is used to pressurize the rush chemical solution via the rush tube 30, and the chemical solution is pressurized. The chemical solution supply space 20 is rushed to the jet flow generator body 2 and ejected through the plurality of injection holes 22. Further, the inside of the electrolytic deburring unit 40 is filled with a chemical solution, and the strip member 1 allows the chemical solution to be ejected through the plurality of injection holes 22 in a state of being immersed in the chemical solution, so that the strip member 1 can be ejected internally. The flow shape is changed to perform a jet flow pressure soaking step of the chemical solution, and the jet flow pressure soaking step of the chemical solution is such that the jet flow does not leak any pressure in the surface of the strip part 1 In the case where the electrolytic deburring step is performed in the electrolytic deburring unit 40 after the jet flow pressure infiltration step of the chemical solution is performed, the effect of electrolytic deburring is increased, and the burr is more effectively peeled off.

In the process of performing the electro-deburring step and the steps in the middle of the step

In this case, as shown in FIGS. 12 to 15, if the chemical solution unit 4 is provided, the jet flow generator body 2 is disposed in the inside of the electrolytic deburring pretreatment unit 42 and the electrolytic deburring unit 40, respectively, and In a state in which the strip-shaped component 1 which is fed by the spurt 5 is immersed in the chemical solution, the rushing pump 32 is pressurized by the pressurizing and rushing pump 32 of the chemical rushing mechanism 3, and the rushing chemical solution is pressurized. Then, the chemical solution is suddenly sent to the chemical solution supply space 20 of the jet flow generator body 2 under pressure and ejected through the plurality of injection holes 22. Further, the inside of the electrolytic deburring pretreatment unit 42 and the electrolytic deburring unit 40 are filled with a chemical solution, and the strip member 1 is subjected to immersion in a chemical solution to pass the chemical solution through the plurality of injection holes 22 to the strip member 1. Spraying, so that the shape of the jet stream can be internally changed to perform a jet flow pressure soaking step of the chemical solution, and the jet stream pressure soaking step of the chemical solution is to allow the jet streams to simultaneously face both sides of the strip member 1 Or only one side of the pressure impregnation is not missed, and in the case where the electrolysis deburring step is subsequently performed in the electrolysis deburring unit 40, the effect of electrolytic deburring is increased and the extraction is performed more efficiently. Peeling of the burrs.

In particular, in the case where the jet flow generator body 2 of a plurality of stages is provided inside the electrolytic deburring unit 40, since the jet flow pressure infiltration step of the chemical solution is performed a plurality of times on the way, even in the form in which the burrs are not easily removed In the case of the strip-shaped part 1, the deburring step can be performed more efficiently.

Therefore, according to the present invention, as a processing operation for peeling the burrs (including bubbles or foreign matter adhering to the sealing portion or the lead portion of the strip member 1), the chemical solution is added in the form of the jet flow. The jet flow pressure impregnation step of the chemical solution of the surface of the shaped part 1 can perform the electrolysis deburring step more efficiently. Further, the electrolytic burring step can be performed only once, and the detachment of the burrs can be sufficiently achieved to achieve the desired quality, and not only the productivity can be improved, but also an excellent effect of saving the manufacturing cost and ensuring the competitiveness of the product can be obtained.

1. . . Strip part

2. . . Jet stream generator body

3. . . Chemical solution pressurized delivery mechanism

4. . . Chemical solution unit

5. . . Emergency belt

20. . . Chemical solution supply space

twenty two. . . Spray hole

30. . . Emergency pipe

32. . . Pressurized emergency pump

40. . . Electrolytic deburring unit

42. . . Electrolytic deburring pretreatment unit

50. . . Holding finger

Fig. 1 is a view showing the steps of the deburring method of the present invention.

Fig. 2 is a view showing the steps of another example of the deburring method of the present invention.

Fig. 3 is a view showing a step of still another example of the deburring method of the present invention.

Fig. 4 is a schematic front view showing an example of the deburring method of the present invention.

Fig. 5 is a front elevational view showing another example of the deburring method of the present invention.

Fig. 6 is a plan view showing a preferred example of the deburring device of the present invention.

Fig. 7 is a front view of Fig. 6.

Fig. 8 is a partially omitted enlarged side view of Fig. 6.

Fig. 9 is a plan view showing a preferred other example of the deburring device of the present invention.

Fig. 10 is a plan view showing a preferred other example of the deburring device of the present invention.

Figure 11 is a front view of Figure 10.

Fig. 12 is a plan view showing a preferred other example of the deburring device of the present invention.

Figure 13 is a front view of Figure 12.

Fig. 14 is a plan view showing a preferred other example of the deburring device of the present invention.

Figure 15 is a front view of Figure 14.

Claims (10)

A deburring device for a strip-shaped member, which is used for peeling off the burrs remaining before and after the plating step after the sealing step performed in accordance with resin molding in the manufacturing step of the semiconductor, and the device is characterized by having the following constitution a jet flow generator body is disposed on both sides of the strip-shaped part; and a chemical solution pressurizing and rushing mechanism for rapidly feeding the chemical solution under pressure is connected to the jet flow generator body; and The strip-shaped part and the jet flow generator body are disposed in an immersed state of the chemical solution and located inside the chemical solution unit. The deburring device for a strip-shaped component according to claim 1, wherein: the jet flow generator body is fixedly disposed on an inner wall of the chemical solution unit in a manner of being centered on the strip-shaped member; The inside of the jet flow generator body is provided with a long chemical solution supply space, and the plurality of injection holes and the chemical solution supply space communicate with each other to form at a position opposite to the strip-shaped member; and the chemical solution supply space is The structure is connected to the emergency feed pipe of the chemical solution pressurizing and rushing mechanism. The deburring device of the strip-shaped component according to claim 2, wherein the injection hole is configured to have a different height of the installation position. The deburring device for a strip-shaped component according to claim 1, wherein: the chemical solution pressurizing and rushing mechanism is a structure in which a rapid feed pipe and a pressurizing burrow pump are connected to each other, and the chemistry of the rush pipe and the jet flow generator body The solution supply spaces are connected to each other, and the pressurizing pump and the emergency feed pipe are connected to each other to pressurize the rapid chemical solution. The deburring device of the strip-shaped part according to claim 1, wherein: the chemical solution unit is configured to be filled with a chemical solution inside, and the strip-shaped part and the jet flow generator body are immersed in the chemical solution. And; the chemical solution unit is distinguished from the electrolytic deburring unit for performing the electrolytic deburring step and the electrolytic deburring pretreatment unit additionally disposed at the position of the previous stage of the electrolytic deburring unit. The deburring device for a strip-shaped member according to claim 1, wherein the jet flow generator body is disposed only on one side centering on the strip-shaped member for performing the electrolytic deburring step. The deburring device for a strip-shaped component according to claim 5, wherein the device is composed of: an additional electrolytic deburring pre-processing unit disposed at a position in front of the electrolytic deburring unit; and The inside of the above-mentioned electrolytic deburring pretreatment unit is provided with a spray The jet generator body. The deburring device for a strip-shaped member according to claim 5, wherein the device is composed of a configuration in which a jet flow generator body is disposed at an intermediate portion of the electrolytic deburring unit. The deburring device for a strip-shaped member according to claim 5, wherein the device is composed of: in the above-described electrolytic deburring pretreatment unit, a jet flow generator body is provided; and, at the same time, electrolysis In the deburring unit, the jet stream generator body is set. The deburring device for a strip-shaped member according to claim 9, wherein the device is composed of a configuration in which a plurality of stages of the jet flow generator body are also disposed in the electrolytic deburring unit.