CN103219252A - Deflash method and apparatus for strip-shaped element - Google Patents
Deflash method and apparatus for strip-shaped element Download PDFInfo
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- CN103219252A CN103219252A CN2012101622972A CN201210162297A CN103219252A CN 103219252 A CN103219252 A CN 103219252A CN 2012101622972 A CN2012101622972 A CN 2012101622972A CN 201210162297 A CN201210162297 A CN 201210162297A CN 103219252 A CN103219252 A CN 103219252A
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- chemical solution
- bar
- electrolysis
- unhairing
- unhairing limit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
Abstract
The invention relates to a deflash method and an apparatus for strip-shaped elements, and especially relates to the deflash method and the apparatus with the following characteristics. Directed at the electrolysis deflash step before and after the electroplate process, the method includes increasing the pressure on the strip-shaped elements in the form of jet flow of a chemical solution before or in the electrolysis deflash step to improve the efficiency in the electrolysis deflash step.
Description
Technical field
The present invention relates to a kind of unhairing limit method and device of bar-like member, and this bar-like member comprises the molded lead frame bar (Molded Lead Frame Strip) that carried out resin forming, the unhairing limit method and the device that particularly relate to a kind of bar-like member, the electrolysis unhairing limit step that this method is carried out at the front and back of electroplating processes process, before the step of electrolysis unhairing limit or in the step of electrolysis unhairing limit, increase is pressurizeed with the form of injection stream chemical solution to the surface of bar-like member step, thus the efficient of electrolysis unhairing limit step improved.
Background technology
Generally speaking, in the semi-conductive manufacturing step, after the seal process of carrying out according to resin forming, can carry out unhairing limit (Deflash) process, this unhairing limit process was used for before electroplating process for removing burr (Flash) for the position of carrying out electroplating after the position that will electroplate or the electroplating process.
In the process of existing unhairing limit, carry out impregnation steps, cleaning (Rinse) step, electrolysis unhairing limit step, cleaning step and water jet step once more in regular turn, wherein normally bar-like member be impregnated in certain hour in the chemical solution in the impregnation steps, clean the surface of bar-like member in the cleaning step, under the state of dipping, carry out electrolysis unhairing limit for the bar-like member of cleaning in the step of electrolysis unhairing limit and remove burr to peel off, clean the surface of bar-like member once more in the cleaning step once more, and the water jet step is to be used to remove residual burr.
Promptly, carry out impregnation steps in regular turn, cleaning step, electrolysis unhairing limit step, cleaning step once more, and water jet step, and the electrolysis unhairing limit step in the unhairing limit process of this existing mode, by carrying out: impregnated in the bar-like member that will clean under the state of chemical solution (for example potassium hydroxide solution) with following step, with bar-like member as negative electrode, insoluble petal such as titanium or platinum is as anode, under this state, apply power supply, and produce hydrogen, thereby the burr on the surface that is formed at bar-like member are peeled off from the surface that the chip of bar-like member carries position or lead frame.
Yet, in the time of existing electrolysis unhairing limit step mode will being applied to the bar-like member of different shape, owing to can't disposablely carry out peeling off of burr, produce defective products continually, cause the quality that requires that will reach the unhairing limit must carry out unhairing limit operation several times, thereby not only cause production efficiency low, the problem that also can cause manufacturing cost to rise.
Summary of the invention
The present invention develops in order to eliminate prior art problems, in order under the situation of bar-like member, more effectively to remove burr, when carrying out electrolysis unhairing limit step, chemical solution is not applied to with not missing any one all positions, surface of the bar-like member that is under the state that impregnated in chemical solution with the form of injection stream, then chemical solution soaks into easily between the real surface and burr of bar-like member, therefore under actual situation of carrying out electrolysis unhairing limit step, burr are taken place easily from the phenomenon of the sur-face peeling of bar-like member, the present invention is based on the research and development that above principle is invented.
The objective of the invention is to: soak into step and more effectively carry out electrolysis unhairing limit step by the injection stream pressurization that increases chemical solution, the injection of this chemical solution pressurization soak into step as the pre-treatment that is used to peel off burr (comprising sealing or bubble on the wire portion or foreign matter) attached to bar-like member to the intermediate treatment operation, and chemical solution pressurizeed to the surface that is in the bar-like member under the state that impregnated in chemical solution with the form of injection stream.
Another object of the present invention is to: can only carry out once electrolytic unhairing limit step and just can make peeling off of burr arrive the quality that requires, not only improve production efficiency, also save manufacturing cost, thereby guarantee competitiveness of product.
In order to reach each such purpose, the invention provides a kind of unhairing limit method of bar-like member, after the sealing step that this method is carried out according to resin forming in semi-conductive manufacturing step, be used to peel off remove before and after the plating step the unhairing limit method of bar-like member of residual burr, wherein, when carrying out electrolysis unhairing limit step, step is soaked in the injection stream pressurization that increases chemical solution, this electrolysis unhairing limit step is used to peel off the sealing that residues in bar-like member or the burr on the wire portion, and the pressurization of the injection stream of chemical solution to soak into step be that chemical solution is pressurizeed to being in the surface that impregnated in the bar-like member under the chemical solution state with the form of injection stream.
Again, the invention provides a kind of unhairing limit device of bar-like member, after the sealing step that this device is carried out according to resin forming in semi-conductive manufacturing step, be used to peel off remove before and after the plating step the unhairing limit device of bar-like member of residual burr, wherein, with the bar-like member is that the center is provided with the jet stream generator body in both sides, and on this jet stream generator body, connect and be provided for the anxious anxious mechanism that send of chemical solution pressurization that send chemical solution under pressurized state, and with this bar-like member and this jet stream generator body, the inside of being arranged to be in the impregnation state of chemical solution and being positioned at the chemical solution unit.
According to the present invention, as being used to peel off the burr processing operation of (comprising sealing or bubble on the wire portion or foreign matter) attached to bar-like member, soak into step by the injection stream pressurization that increases the chemical solution that chemical solution is pressurizeed to the surface of bar-like member with the form of injection stream, can more effectively carry out electrolysis unhairing limit step, and can only carry out the quality that arrives requirement of peeling off that once electrolytic unhairing limit step just makes burr, thereby not only can improve production efficiency, can also save manufacturing cost, reach the effect of guaranteeing product competitiveness etc.
Description of drawings
Fig. 1 represents the block diagram of unhairing of the present invention limit method.
Fig. 2 represents the block diagram of another execution mode of unhairing of the present invention limit method.
Fig. 3 represents the block diagram of the another execution mode of unhairing of the present invention limit method.
Fig. 4 represents the general positive map of an execution mode of unhairing of the present invention limit method.
Fig. 5 represents the front elevation of another execution mode of unhairing of the present invention limit method.
Fig. 6 represents the plane graph of a preferred execution mode of unhairing of the present invention limit device.
Fig. 7 is the front elevation of Fig. 6.
Fig. 8 is that the part of Fig. 6 is omitted amplification profile.
Fig. 9 represents the plane graph of preferred another execution mode of unhairing of the present invention limit device.
Figure 10 represents the plane graph of preferred another execution mode of unhairing of the present invention limit device.
Figure 11 is the front elevation of Figure 10.
Figure 12 represents the plane graph of preferred another execution mode of unhairing of the present invention limit device.
Figure 13 is the front elevation of Figure 12.
Figure 14 represents the plane graph of preferred another execution mode of unhairing of the present invention limit device.
Figure 15 is the front elevation of Figure 14.
Description of reference numerals
1 bar-like member
2 jet stream generator bodies
The anxious mechanism that send of 3 chemical solutions pressurization
4 chemical solution unit
The 5 anxious bands that send
20 chemical solutions are supplied with the space
22 spray-holes
The 30 anxious pipes that send
The anxious pump that send of 32 pressurizations
40 electrolysis unhairing edge elements
42 electrolysis unhairing limit pretreatment units
50 control with referring to
Embodiment
Below, with reference to Figure of description, more specifically and explain the present invention.
As shown in the figure, at first, all (this device is to be used for after the sealing step that semi-conductive manufacturing step is carried out according to resin forming to the preferred implementation of unhairing of the present invention limit device at the unhairing limit of bar-like member 1 device, peel off remove before and after the plating step residual burr) in, with bar-like member 1 is that the center is provided with jet stream generator body 2 in both sides, and on this jet stream generator body 2, connect and be provided for the anxious anxious mechanism 3 that send of chemical solution pressurization that send chemical solution under pressurized state, and this bar-like member 1 and this jet stream generator body 2 be arranged to be in the impregnation state of chemical solution, and be positioned at the inside of chemical solution unit (cell) 4.
At this moment, this jet stream generator body 2, be to be the center with bar-like member 1, be positioned at the mode of these bar-like member 1 both sides, and be fixedly set in the inwall of chemical solution unit 4, supply with space 20 and be provided with long chemical solution in the inside of jet stream generator body 2, and a plurality of spray-holes 22 are supplied with space 20 with this chemical solution and are interconnected, thereby be formed on the position relative with bar-like member 1, this chemical solution is supplied with space 20 and is made up of the institute that constitutes that send pipe 30 to interconnect setting with the anxious urgency of sending mechanism 3 of chemical solution pressurization described later.
At this moment, this spray-hole 22 is formed on the various height in the different mode of the height that the position is set, so that chemical solution is not injected into all positions on the surface that is subjected to the anxious bar-like member of sending 1 with not missing any one, and step is soaked in the injection stream pressurization that this spray-hole 22 is constructed for carrying out chemical solution, step is soaked in the pressurization of this injection stream makes a plurality of injection streams hit the surface of bar-like member 1 simultaneously, thereby this bar-like member 1 is in the inside of chemical solution unit 4 and impregnated in state in the chemical solution.
Again, the anxious mechanism 3 that send of this chemical solution pressurization, send the anxious institute that constitutes that send pump 32 to interconnect setting of pipe 30 and pressurization to form by anxious, this urgency is sent pipe 30 to supply with space 20 with the chemical solution of described jet stream generator body 2 and is interconnected, thereby anxious pump 32 and this urgency sent of this pressurization send pipe 30 to interconnect setting, with the anxious chemical solution that send that pressurizes.
In addition, chemical solution unit 4, be constituted as at inner filling chemical solution is arranged, and can keep described bar-like member 1 and jet stream generator body 2 to impregnated in state in the chemical solution, but this chemical solution unit 4 and the electrolysis unhairing edge element 40 that carries out electrolysis unhairing limit step and be arranged at the electrolysis unhairing limit pretreatment unit 42 of position of the last stage of this electrolysis unhairing edge element 40 in addition can be different.
At this moment, this bar-like member 1, be configured at regular intervals apart from just suddenly sending the state of controlling with 5 by ring-type, and this ring-type is anxious send the finger 50 that possesses the usefulness of controlling with 5, impregnated in this bar-like member 1 under the state of chemical solution of inside of these chemical solution unit 4, be with between 5 anxious the sending by anxious sending, carry out electrolysis unhairing limit pre-treatment step or electrolysis unhairing limit step.
Again, for described jet stream generator body 2, though expression is used to carry out the bar-like member 1 of electrolysis unhairing limit step is arranged at both sides for the center example, but as shown in Figure 9, can be the center also with the bar-like member 1 that is used to carry out electrolysis unhairing limit step, only be arranged at a side, it must be the situation that unhairing limit step is carried out at the center with the surface of a side wherein that this method can be applied flexibly in the specification of bar-like member 1.
Then, with the electrolysis unhairing edge element 40 that carries out electrolysis unhairing limit step is center jet stream generator body 2, extremely shown in Figure 9 as Fig. 6, send from the urgency of bar-like member 1 under the situation of direction judgement, can make the formation of after step is soaked in the injection stream pressurization of carrying out chemical solution, in electrolysis unhairing edge element 40, carrying out electrolysis unhairing limit step, wherein to soak into step be that other electrolysis unhairing limit pretreatment unit 42 is set on the anterior position of electrolysis unhairing edge element 40 for the injection stream of this chemical solution pressurization, and jet stream generator body 2 is set in the inside of this electrolysis unhairing limit pretreatment unit 42, soak into step with the injection stream pressurization of carrying out chemical solution according to the surface of 2 pairs of bar-like member 1 of jet stream generator body.
Again, can be as Figure 10 and shown in Figure 11, middle part at electrolysis unhairing edge element 40 is provided with jet stream generator body 2, soak into step with the injection stream pressurization of in the process of electrolysis unhairing limit step, carrying out chemical solution, perhaps can be as Figure 12 and shown in Figure 13, in the other electrolysis unhairing limit pretreatment unit 42 on the anterior position of electrolysis unhairing edge element 40 jet stream generator body 2 is set, again, in electrolysis unhairing edge element 40, jet stream generator body 2 is set also, soaks into step with the injection pressurization of in the process of last stage of electrolysis unhairing limit step and electrolysis unhairing limit step, all carrying out chemical solution.
And then, can be as Figure 14 and shown in Figure 15, in the other electrolysis unhairing limit pretreatment unit 42 on the anterior position of electrolysis unhairing edge element 40, jet stream generator body 2 is set, again, in electrolysis unhairing edge element 40, also be provided with the jet stream generator body 2 in a plurality of stages, soak into step by the injection pressurization of in the process of last stage of electrolysis unhairing limit step and electrolysis unhairing limit step, carrying out repeatedly chemical solution.
That is difformity that, can the desired bar-like member 1 of corresponding unhairing limit step, specification and regulate the position being set or quantity being set of jet stream generator body 2.
Then, as mentioned above, observe the operation of the unhairing of the present invention limit device that carries out with various forms based on unhairing of the present invention limit method.
Promptly, after the sealing step of in semi-conductive manufacturing step, carrying out according to resin forming, be used to peel off remove before and after the plating step the unhairing limit method of bar-like member 1 of residual burr, wherein, for passing through in electrolysis unhairing limit step, the injection stream pressurization of increase chemical solution is soaked into step and is carried out, this electrolysis unhairing limit step is used to peel off the sealing that residues in bar-like member 1 or the burr on the wire portion, thereby the pressurization of the injection stream of chemical solution is soaked into step chemical solution is pressurizeed to the surface that is in the bar-like member 1 under the state that impregnated in chemical solution with the form of injection stream.
At this moment, step is soaked in the injection stream pressurization of chemical solution can follow electrolysis unhairing limit step, but the difference in period that step is soaked in pressurization according to the injection stream of chemical solution is divided into situation, the situation of only carrying out of only carrying out and is carrying out electrolysis unhairing limit step before carrying out electrolysis unhairing limit step in the process of electrolysis unhairing limit step before with the process of electrolysis unhairing limit step in the situation of carrying out in regular turn, below above-mentioned various situations are described respectively.
The situation of before carrying out electrolysis unhairing limit step, carrying out only
Extremely shown in Figure 9 as Fig. 6, in the chemical solution unit 4, inside at electrolysis unhairing limit pretreatment unit 42 is provided with jet stream generator body 2, and impregnated under the state in the chemical solution by the anxious bar-like member of sending with 5 urgency 1 of sending, send the pressurization of mechanism 3 suddenly to send pump 32 and send pipe 30 pressurizations the anxious chemical solution that send by the pressurization of chemical solution is anxious via anxious, then chemical solution can be supplied with space 20 by the anxious chemical solution of delivering to jet stream generator body 2 under pressurized state, and ejects by a plurality of spray-holes 22.And, the inside of electrolysis unhairing limit pretreatment unit 42 has been filled with chemical solution, bar-like member 1 allows chemical solution spray by 22 pairs of bar-like member 1 of a plurality of spray-holes impregnated under the state of chemical solution, therefore, can carry out the variation of injection stream shape in inside, step is soaked in the injection stream pressurization of carrying out chemical solution, step is soaked in the pressurization of the injection stream of this chemical solution allows these injection streams simultaneously the surperficial both sides of bar-like member 1 or the pressurization of only a side wherein not being missed any one be soaked into, therefore, then in electrolysis unhairing edge element 40, carry out under the situation of electrolysis unhairing limit step, the effect on electrolysis unhairing limit is risen, thereby more effectively carry out peeling off of burr.
The situation of in the process of electrolysis unhairing limit step, carrying out only
In the case, as Figure 10 and shown in Figure 11, in the chemical solution unit 4, inside at electrolysis unhairing edge element 40 is provided with jet stream generator body 2, and impregnated under the state in the chemical solution by the anxious bar-like member of sending with 5 urgency 1 of sending, send the pressurization of mechanism 3 suddenly to send pump 32 and send pipe 30 pressurizations the anxious chemical solution that send by the pressurization of chemical solution is anxious via anxious, then chemical solution can be supplied with space 20 by the anxious chemical solution of delivering to jet stream generator body 2 under pressurized state, and ejects by a plurality of spray-holes 22.And, the inside of electrolysis unhairing edge element 40 has been filled with chemical solution, bar-like member 1 allows chemical solution spray by 22 pairs of bar-like member 1 of a plurality of spray-holes impregnated under the state of chemical solution, therefore can carry out the variation of injection stream shape in inside, step is soaked in the injection stream pressurization of carrying out chemical solution, the pressurization of the injection stream of this chemical solution is soaked into the pressurization that step allows these injection streams that any one is not missed in the surface of bar-like member 1 and is soaked into, therefore, after step is soaked in the injection stream pressurization of carrying out chemical solution, in electrolysis unhairing edge element 40, carry out under the situation of electrolysis unhairing limit step, the effect on electrolysis unhairing limit is risen, thereby more effectively carry out peeling off of burr.
Before carrying out electrolysis unhairing limit step with step process in the situation of carrying out in regular turn
In the case, extremely shown in Figure 15 as Figure 12, in the chemical solution unit 4, in the inside of electrolysis unhairing limit pretreatment unit 42 and electrolysis unhairing edge element 40, jet stream generator body 2 is set respectively, and impregnated under the state in the chemical solution by the anxious bar-like member of sending with 5 urgency 1 of sending, send the pressurization of mechanism 3 suddenly to send pump 32 and send pipe 30 pressurizations the anxious chemical solution that send via anxious by the pressurization of chemical solution is anxious, then chemical solution can be supplied with space 20 and eject by a plurality of spray-holes 22 by the anxious chemical solution that be delivered to jet stream generator body 2 of quilt under pressurized state.And, the inside of electrolysis unhairing limit pretreatment unit 42 and electrolysis unhairing edge element 40 has been filled with chemical solution, bar-like member 1 allows chemical solution spray by 22 pairs of bar-like member 1 of a plurality of spray-holes impregnated under the state of chemical solution, therefore can carry out the variation of injection stream shape in inside, step is soaked in the injection stream pressurization of carrying out chemical solution, it is to allow these injection streams simultaneously the surperficial both sides of bar-like member 1 or the pressurization of only a side wherein not being missed any one be soaked into that step is soaked in the pressurization of the injection stream of this chemical solution, therefore, then in electrolysis unhairing edge element 40, carry out under the situation of electrolysis unhairing limit step, the effect on electrolysis unhairing limit is risen, thereby more effectively carry out peeling off of burr.
Particularly, be provided with in the inside of electrolysis unhairing edge element 40 under the situation of jet stream generator body 2 in a plurality of stages, soak into step owing to can carry out repeatedly the injection stream pressurization of chemical solution during the course, even under the situation of the bar-like member 1 of the form that is difficult for removing burr, also can more effectively carry out unhairing limit step.
Therefore, according to the present invention, as being used to peel off the burr processing operation of (comprising sealing or bubble on the wire portion or foreign matter) attached to bar-like member 1, soak into step by the injection stream pressurization that increases the chemical solution that chemical solution is pressurizeed to the surface of bar-like member 1 with the form of injection stream, can more effectively carry out electrolysis unhairing limit step.Again, can only carry out the quality of fully reaching requirement of peeling off that once electrolytic unhairing limit step just makes burr, not only can improve production efficiency, also can obtain saving manufacturing cost, thereby guarantee the excellent results of product competitiveness etc.
Claims (14)
1. the unhairing limit method of a bar-like member, after the sealing step that this method is carried out according to resin forming in semi-conductive manufacturing step, be used to peel off remove before and after plating step residual burr, it is characterized in that:
When carrying out electrolysis unhairing limit step, step is soaked in the injection stream pressurization that increases chemical solution, this electrolysis unhairing limit step is to be used to peel off the sealing that residues in bar-like member or the burr on the wire portion, and the pressurization of the injection stream of chemical solution to soak into step be that chemical solution is pressurizeed to being in the surface that impregnated in the bar-like member under the chemical solution state with the form of injection stream.
2. the unhairing limit method of bar-like member as claimed in claim 1, wherein:
Step is soaked in the injection stream pressurization of described chemical solution, carries out before carrying out electrolysis unhairing limit step.
3. the unhairing limit method of bar-like member as claimed in claim 1, wherein:
Step is soaked in the injection stream pressurization of described chemical solution, carries out in the process of electrolysis unhairing limit step.
4. the unhairing limit method of bar-like member as claimed in claim 1, wherein:
Step is soaked in the pressurization of the injection stream of described chemical solution, carries out before the step of electrolysis unhairing limit with in the process of electrolysis unhairing limit step in regular turn.
5. the unhairing limit device of a bar-like member, after the sealing step that this device is carried out according to resin forming in semi-conductive manufacturing step, be used to peel off remove before and after plating step residual burr, it is characterized in that:
With the bar-like member is that the center is provided with the jet stream generator body in both sides;
On described jet stream generator body, be connected with the anxious mechanism that send of chemical solution pressurization that is used under pressurized state, suddenly sending chemical solution;
And, described bar-like member and described jet stream generator body, the inside that is configured to be in the impregnation state of chemical solution and is positioned at the chemical solution unit.
6. the unhairing limit device of bar-like member as claimed in claim 5, wherein:
Described jet stream generator body is to be center and the mode that is positioned at both sides with the bar-like member, thereby is fixedly installed on the inwall of chemical solution unit;
In the inside of jet stream generator body, be provided with long chemical solution and supply with the space, and a plurality of spray-hole is interconnected with this chemical solution supply space, thereby be formed on the position relative with bar-like member;
And described chemical solution is supplied with the space, is to send the urgency of mechanism to send pipe to interconnect the formation of setting with the chemical solution pressurization is anxious.
7. the unhairing limit device of bar-like member as claimed in claim 6, wherein:
Described spray-hole is constituted as the height difference that the position is set.
8. the unhairing limit device of bar-like member as claimed in claim 5, wherein:
The anxious mechanism that send of described chemical solution pressurization, be suddenly to send pipe and pressurization suddenly to send pump to interconnect the formation of setting, described urgency is sent pipe to supply with the space with the chemical solution of jet stream generator body and is interconnected, and described pressurization is anxious send pump and described urgency to send pipe to interconnect setting, is used for the anxious chemical solution that send of pressurization.
9. the unhairing limit device of bar-like member as claimed in claim 5, wherein:
Described chemical solution unit, its inner filling has chemical solution, and keeps bar-like member and jet stream generator body to be immersed in state in the chemical solution;
And, this chemical solution unit and the electrolysis unhairing edge element that carries out electrolysis unhairing limit step and to be arranged on the electrolysis unhairing limit pretreatment unit of position of last stage of described electrolysis unhairing edge element in addition different.
10. the unhairing limit device of bar-like member as claimed in claim 5, wherein:
Described jet stream generator body is the center with the bar-like member that is used to carry out electrolysis unhairing limit step, only is arranged on a side.
11. the unhairing limit device of bar-like member as claimed in claim 9, wherein, this device by following constitute the institute form:
In the anterior position of described electrolysis unhairing edge element, be provided with other electrolysis unhairing limit pretreatment unit;
And the inside at described electrolysis unhairing limit pretreatment unit is provided with the jet stream generator body.
12. the unhairing limit device of bar-like member as claimed in claim 9, wherein, this device by following constitute the institute form:
On the middle part of described electrolysis unhairing edge element, be provided with the jet stream generator body.
13. the unhairing limit device of bar-like member as claimed in claim 9, wherein, this device by following constitute the institute form:
In the pretreatment unit of described electrolysis unhairing limit, be provided with the jet stream generator body;
And in electrolysis unhairing edge element, also be provided with the jet stream generator body.
14. the unhairing limit device of bar-like member as claimed in claim 13, wherein, this device by following constitute the institute form:
In described electrolysis unhairing edge element, also be provided with the jet stream generator body in a plurality of stages.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120006462A KR101303623B1 (en) | 2012-01-20 | 2012-01-20 | Deflash Apparatus for Strip-shaped Elements |
| KR10-2012-0006462 | 2012-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103219252A true CN103219252A (en) | 2013-07-24 |
| CN103219252B CN103219252B (en) | 2015-09-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210162297.2A Expired - Fee Related CN103219252B (en) | 2012-01-20 | 2012-05-23 | The burr removing method of bar-like member and device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5527351B2 (en) |
| KR (1) | KR101303623B1 (en) |
| CN (1) | CN103219252B (en) |
| TW (1) | TWI471926B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105986308A (en) * | 2014-10-24 | 2016-10-05 | 化研科技株式会社 | Electrolyte composition for removing burr and method of removing burr |
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| CN101218670A (en) * | 2005-08-10 | 2008-07-09 | 株式会社三井高科技 | Semiconductor device and method for manufacturing same |
| CN102044451A (en) * | 2009-10-22 | 2011-05-04 | 瑞萨电子株式会社 | Method of manufacturing semiconductor device and method of manufacturing electronic device |
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| JPH04107831U (en) * | 1991-02-28 | 1992-09-17 | 関西日本電気株式会社 | semiconductor manufacturing equipment |
| JPH1084008A (en) * | 1996-09-06 | 1998-03-31 | Hitachi Ltd | Burr removing method and device |
| JPH10195214A (en) * | 1997-01-10 | 1998-07-28 | Toray Eng Co Ltd | Resin etchant and etching |
| KR19980046087A (en) * | 1996-12-11 | 1998-09-15 | 김광호 | Deflash Systems for Semiconductor Packages |
| KR20000005417U (en) * | 1998-08-28 | 2000-03-25 | 김영환 | Plating pretreatment device for semiconductor manufacturing |
| KR100352122B1 (en) * | 1999-10-15 | 2002-09-12 | 앰코 테크놀로지 코리아 주식회사 | deflash method of semiconductor package |
-
2012
- 2012-01-20 KR KR1020120006462A patent/KR101303623B1/en active IP Right Grant
- 2012-04-20 JP JP2012096812A patent/JP5527351B2/en active Active
- 2012-04-23 TW TW101114396A patent/TWI471926B/en not_active IP Right Cessation
- 2012-05-23 CN CN201210162297.2A patent/CN103219252B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100203931B1 (en) * | 1996-10-04 | 1999-07-01 | 윤종용 | Chemical deflash device and method for deflashing/plating using the same |
| CN101218670A (en) * | 2005-08-10 | 2008-07-09 | 株式会社三井高科技 | Semiconductor device and method for manufacturing same |
| CN102044451A (en) * | 2009-10-22 | 2011-05-04 | 瑞萨电子株式会社 | Method of manufacturing semiconductor device and method of manufacturing electronic device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105986308A (en) * | 2014-10-24 | 2016-10-05 | 化研科技株式会社 | Electrolyte composition for removing burr and method of removing burr |
| CN105986308B (en) * | 2014-10-24 | 2018-04-13 | 化研科技株式会社 | Except the removing method of flash electrolyte composition and flash |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101303623B1 (en) | 2013-09-11 |
| TW201332004A (en) | 2013-08-01 |
| TWI471926B (en) | 2015-02-01 |
| JP2013147730A (en) | 2013-08-01 |
| JP5527351B2 (en) | 2014-06-18 |
| CN103219252B (en) | 2015-09-30 |
| KR20130085593A (en) | 2013-07-30 |
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