TWI467162B - Electro optical modulator electro optical sensor and detecting method thereof - Google Patents

Description

Electro-optical modulation device, electro-optical detector and detection method thereof

The present disclosure relates to an electro-optic modulation device, an electro-optical detector, and a detection method thereof, and more particularly to an electro-optical modulation device, an electro-optical detector, and a detection method thereof applicable to a flexible object to be tested.

Conventional circuit detection devices often use a probe to contact a test object and apply a voltage to verify the circuit condition of the object to be tested, such as a short circuit or an open circuit. Conventional contact probe circuit detection devices are commonly used to detect semiconductor die processes and PCB board process inspection. As the line width of the semiconductor process becomes smaller and smaller, the detection method using the probe is bound to be limited by the physical size of the probe, and the probe for the small-line line width detection is also expensive to manufacture. When the area of the object to be tested is getting larger and larger, the speed required for detection is getting faster and faster, and the demand for comprehensive detection is increasing, the detection of the circuit by probe contact is more and more inconsistent with detection. Demand.

If the etching of the object to be tested after the laser patterning process is not complete, the pixel will form a dead pixel and the yield will decrease. In addition, in the process of the object to be tested, the circuit of the object to be tested may cause short/open circuit, impurities, scratches, and the like. The above phenomenon can be detected by a fast-detecting non-contact detector to save the cost of the back-end process and ensure the quality of the product.

1 is a conventional electro-optical detector 100. The electro-optical detector 100 includes a light source 14 for generating light, a modulator 10 for modulating the light emitted from the light source 14, a mirror surface 10-3, and reflecting light from the mirror surface 10-3. The ratio of reflection is determined by the intensity of the electric field, a beam splitter 12, a lens 16, which can focus the light reflected from the modulator 10, convert the light into a video signal CCD camera 17, and convert the image signal into a digit. Image processor 18 of image signal. The digital image signal is analyzed by a display 20. The modulator 10 includes a modulator body 10-2, a mirror surface 10-3, and a support frame 10-1. The modulator body 10-2 is hexagonal and supported by the support frame 10-1. The modulator body 10-2 is provided with a conductive film on one side. The mirror surface 10-3 is formed at the bottom of the modulator body 10-2. The modulator body 10-2 includes an electrode connected to an external power source, the external power source supplies a reference voltage, and the electro-optic portion of the modulator body 10-2 scatters the incident light via the modulator body 10-2. The reflected light is transmitted to the beam splitter 12, and the ratio of the reflected light is determined by the electric field strength of the modulator body 10-2.

By varying the degree of gray scale of the digital image, the circuit and etch residual of the object to be tested can be determined to determine whether the conductive material is completely etched during the process, or to determine the electrical influence of the surface 瑕疵 on the conductive pattern. As shown in FIG. 1, a certain distance (about 10 um) must be maintained between the modulator 10 and the object to be tested 22. The positive and negative voltages are respectively applied to form a capacitive effect, and an induced electric field is generated to drive the electro-optical modulator 10. Since the distance (about 10 um) is too small, it is easy to cause the mirror surface 10-3 of the electro-optic modulator 10 to wear, which increases the cost of maintenance. Moreover, the mirror surface 10-3 cannot use the conventional coating method, and thus the manufacturing cost is quite expensive.

In order to improve the mirror surface wear, the prior art is coated with a buffer layer outside the mirror surface to reduce the direct wear of the mirror surface. However, the above prior art cannot quickly measure a test object having a warping property such as a flexible circuit board or the like.

Furthermore, the general appearance detection cannot know the electrical condition of the transparent conductive film pattern (for example, ITO or AZO) of the object to be tested. Since the object to be tested (such as a touch panel) has a very high transmittance (higher than 90%), the image contrast obtained by detecting an appearance image using a general automatic optical inspection system (AOI) is relatively low (especially across bridges). Part of the upper and lower two layers of ITO structure), it is easy to produce false positives.

The present disclosure provides an electro-optical modulation device including a body, a conductive film, and a transparent protective film. The body includes a first surface and a second surface. The conductive film is disposed on the first surface. The transparent protective film is disposed on the second surface and located on an object to be tested.

The present disclosure also provides an electro-optical detector comprising a light source generating device, an electro-optical modulation device, a support module and an image capturing module. The light source generating device emits a light beam. The electro-optical modulation device modulates the beam and the beam is incident on a sample to be tested. The support module supports the object to be tested and causes the modulated light beam to enter the support module. The image capturing module converts the light beam reflected by the support module to form an image signal.

The disclosure also provides a detection method, comprising the steps of: applying a driving voltage to the object to be tested; grounding the electro-optical modulation device; projecting the beam to the electro-optic modulation device; and capturing the image of the electro-optical modulation device a signal; and determining whether the object to be tested has a defect by the image signal.

The technical features of the present disclosure have been broadly described above, and the detailed description of the present disclosure will be better understood. Other technical features that form the subject matter of the claims of the present disclosure will be described below. It is to be understood by those of ordinary skill in the art that the present invention may be practiced otherwise. It is also to be understood by those of ordinary skill in the art that this invention is not limited to the spirit and scope of the disclosure as defined by the appended claims.

The directions discussed herein are electro-optical modulation devices, electro-optical detectors, and detection methods thereof. In order to fully understand the present disclosure, detailed steps and structures will be set forth in the following description. Obviously, the implementation of the present disclosure is not limited to the specific details familiar to those skilled in the relevant art. On the other hand, well-known structures or steps are not described in detail to avoid unnecessarily limiting the disclosure. The preferred embodiments of the present disclosure will be described in detail below, but the disclosure may be widely practiced in other embodiments, and the scope of the disclosure is not limited, which is subject to the scope of the following patents. .

The disclosure provides an electro-optical modulation device, an electro-optical detector, and a detection method thereof. The disclosure mainly uses the induced electric field generated by the capacitance generated between the object to be tested and the electro-optical modulation device to drive the electro-optical modulation device, thereby obtaining the modulated image data. In addition, since the present disclosure can be used to detect a miniaturized object to be tested and can be quickly detected in a contact or non-contact manner, it can be applied to a flexible or warped property to be tested which cannot be applied by the prior art. On the object.

The applicable electro-optic modulation device, electro-optical detector and detection method thereof include a pattern processing detection of a transparent conductive film (ITO) of a touch panel, a semiconductor die process detection, a thin film transistor liquid crystal array process detection, and a solar energy The pattern process detection of the transparent conductive film and the pattern detection of the transparent conductive film of the flexible display.

As shown in the electro-optic modulation device 30 of the embodiment of the present disclosure, the electro-optic modulation device 30 includes a body 31, a conductive film 34, and a transparent protective film 35. The body 31 includes a first surface 32 and a second surface 33. The conductive film 34 is disposed on the first surface 32, and the transparent protective film 35 is disposed on the second surface 33 and directly contacts the object to be tested (not shown). In this embodiment, the conductive film 34 is a transparent conductive film (ITO) through which a light beam can pass. The body 31 of the electro-optical modulation device 30 can be a polymer-dispersed liquid crystal display (PDLC display) or an optical crystal. The material of the optical crystal is selected from the group consisting of potassium dihydrogen phosphate, potassium dipotassium phosphate and ammonium dihydrogen phosphate. Group. When the conductive film 34 is electrically connected to a power source (not shown), the transparent protective film 35 can maintain a certain distance from the object to be tested (not shown) or directly contact with the object to be tested to generate a similar capacitance effect, thereby driving The electro-optical modulation device body 31 modulates the incident beam for image generation.

FIG. 3 shows an electro-optical modulation device 30 ′ according to another embodiment of the present disclosure. The electro-optical modulation device 30 ′ includes a body 31 , a conductive film 34 ′, a transparent protective film 35 , and a transparent substrate 36 . The structure and connection relationship between the body 31 and the transparent protective film 35 are similar to those of the above embodiment, and are not described herein. The transparent substrate 36 is disposed on the conductive film 34'. The conductive film 34 ′ is also disposed on the transparent substrate 36 outside the body 31 when the conductive film 34 ′ is disposed on the transparent substrate 36 .

In the embodiment shown in FIG. 3, the disclosure is applicable to the structure of the electro-optic modulator of the prior case being too complicated, difficult to manufacture in a large area, expensive in manufacturing, and easy to wear the mirror surface, thereby increasing the detection cost. Therefore, the present disclosure uses the transparent substrate 36 as a substrate, and applies the conductive film 34' on the transparent substrate 36, and then applies the upper body 31 material (such as a polymer dispersed liquid crystal or an optical crystal, and the optical crystal material is selected. a group consisting of potassium dihydrogen phosphate, potassium dipotassium phosphate and ammonium dihydrogen phosphate). Finally, the transparent protective film 35 is placed on the body 31. In this embodiment, the transparent protective film 35 has abrasion resistance and scratch resistance to protect the liquid crystal layer. This structure can make the electro-optic modulator 30' structure avoid excessive complexity, large-area fabrication, high manufacturing cost, and also make the machine Maintenance costs are reduced.

The electro-optical modulation device 30 and the electro-optical modulation device 30 ′ of the embodiment of the present invention are not provided with any mirror surface, and the electro-optic modulation device 30 and the electro-optical modulation device 30 ′ of the present disclosure have a transparent protective film 35 . It is directly or indirectly contacted with the object to be tested and detected to facilitate the detection of the object to be tested having warpage characteristics or surface irregularities.

The object to be tested detected in the present disclosure is a conductive film after the patterning process. Since the conductive film is subjected to the pattern etching process, if the etching is incomplete, the circuit design of the conductive film may be different from the original design, and a short circuit or an open circuit may occur. If the etched conductive film is somewhat residual, the electro-optical detector of the present invention can simultaneously detect scratches, dust, collision or residue.

As shown in the embodiment of FIG. 4, the electro-optical detector 40 includes a light source generating device 420, an electro-optical modulation device 430, a support module 440, and an image capturing module 450. The light source generating device 420 emits a light beam that is incident on the beam splitter 410 of the electro-optic detector 40. The beam splitter 410 can reflect the light beam to the electro-optical modulation device 430. The electro-optical modulation device 430 includes a body 431, a conductive film 432, and a transparent protective film 433. The body 431 includes a first surface 4311 and a second surface 4312. The conductive film 432 is disposed on the first surface 4311. The transparent protective film 433 is disposed on the second surface 4312 and directly or indirectly contacts the object to be tested 490, so that the object can be tested according to different warping properties, and the micro structure can be quickly detected and the electro-optical detection of false positives can be reduced. Device. The test object 490 further includes a transparent substrate 441 having a transparent conductive film (such as ITO or AZO), and the transparent substrate 441 may also be a flexible transparent substrate 441. The body 431 can be a polymer-dispersed liquid crystal display (PDLC display) or an optical crystal. The material of the optical crystal is selected from the group consisting of potassium dihydrogen phosphate, potassium dipotassium phosphate and ammonium dihydrogen phosphate.

As shown in FIG. 4, the support module 440 includes a mirror 442. The support module 440 can support the object to be tested 490 and allow the light beam modulated by the electro-optical modulation device 430 to enter the mirror 442 of the support module 440. The power module 460 is electrically connected to the conductive film 432 and the transparent substrate 441 of the object to be tested 490, respectively. When the power module 460 is electrically connected to the conductive film 432 and the transparent substrate 441, respectively, after the electro-optical modulation device 430 contacts or approaches the object to be tested 490, the transparent conductive film pattern 491 on the object to be tested 490 and the electro-optic modulation device 430 forms a capacitive state, which in turn generates an induced electric field and drives electro-optic modulation device 430. Since the induced electric field will drive the electro-optical modulation device 430, the pattern 491 of the object to be tested 490 will be indirectly presented on the electro-optical modulation device 430. After the light beam of the light source generating device 420 is incident on the electro-optical modulation device 430, the image capturing module 450 captures the induced voltage image modulated by the electro-optical modulation device 430, and converts the light beam reflected by the electro-optical modulation device 430. Become an image signal. The residual state of the transparent conductive film can be detected by the gray scale intensity of the image signal. Similarly, the defects generated by the process can also utilize the detection method proposed by the present disclosure to detect whether the defect has an electrical influence on the line of the transparent conductive film.

As shown in FIG. 4, after the electro-optical modulation device 430 modulates the beam, part of the beam is incident on the object to be tested 490. The mirror 442 of the support module 440 is disposed under the transparent substrate 441. In this embodiment, the mirror 442 directly contacts the transparent substrate 441. However, in other embodiments, the mirror 442 and the transparent substrate 441 of the object 490 to be side 490. There is a gap, and the mirror 442 reflects the light beam incident on the object to be tested 490, so the mirror 442 can be improved by the image capturing module 450 (such as a photosensitive coupling element (CCD) camera or a complementary metal oxide semiconductor The camera captures the contrast value of the image, which in turn reduces the occurrence of false positives. However, in the embodiment shown in FIG. 5, the support module 440' of the electro-optic detector 40' may also omit the mirror 442.

Referring back to FIG. 3, the light transmissive substrate 36 of the electro-optical modulation device 30' may be a BK7 glass or an ethylene terephthalate (PET) soft board. In this embodiment, the thinner the transparent protective film 35 is, the preferred thickness range is between about 5 microns and 15 microns. The main purpose of the transparent protective film 35 is to protect the body 31 and to create a capacitive effect between the body 31 and the object to be tested. The material of the transparent protective film 35 may be metal, organic, inorganic or ceramic. However, as shown in the embodiments of the electro-optical detectors 40", 40"" of FIGS. 6 and 7 (various embodiments of FIGS. 4 and 5, respectively), the transparent protective film 433 of the electro-optical modulation device 430' may be combined. The body 431 is provided with the anti-wear and scratch resistance characteristics. The light beam of the embodiment of the above various electro-optical detectors will penetrate the electro-optical modulation device and the object to be tested, and the beam of the former case is in the electro-optic modulation device. The mirror surface is reflected and does not illuminate the object to be tested, so the image contrast of the present disclosure is better.

Furthermore, as shown in FIG. 8, a detection method using the above apparatus includes the following steps: step 8010 applies a driving voltage to the object to be tested; step 8020, grounds the electro-optical modulation device; and step 8030 projects the beam to the electro-optic beam. The modulating device; the step 8040 captures the image signal of the electro-optic modulating device; and the step 8050 determines whether the object to be tested has a defect by using the image signal. The above steps are not in a sequential relationship depending on the numerical size of the steps.

Results taken with a photocoupler (CCD) camera: (1) If no voltage is applied, the coarse grayscale value is 25; (2) If there is voltage applied, but no mirror is provided, the transparent conductive film (ITO) The coarse grayscale value of the region is 50, the rough grayscale value of the etched region is 35, and the black and white contrast is about 15; (3) if a voltage is applied and the mirror is set, the coarse grayscale value of the transparent conductive film region is 80. The rough grayscale value of the etched area is 40, the black-and-white contrast is about 40, and the black-and-white contrast of the set mirror is less than 2.5 times that of the no-arranged mirror, so the unpredictable effect of the disclosure can be verified.

In addition, as shown in FIG. 9, another embodiment of the detecting method includes the following steps: Step 9010, measuring and calculating an average brightness value of the object to be tested without applying voltage; and applying a driving voltage to the step 9020. Step 9030: grounding the electro-optical modulation device; step 9040, projecting the beam to the electro-optic modulation device; step 9050, capturing the image signal of the electro-optic modulation device; and step 9060, determining the image signal by the image signal Whether the object to be tested has defects. Step 9060 further includes, as shown in FIG. 10, step 9061, setting a preset threshold range according to the average brightness value, and step 9062, filtering a plurality of pixels of the image signal according to the preset threshold range, and step 9063 is to be tested. The pattern of the object and the screening pixels, and step 9064 analyze each of the pixels in the object to be tested, and the steps are not in a sequential relationship according to the numerical size of the steps.

Taking the above detection method as an example, before each measurement, the average brightness value (for example, 25 units) of the object to be tested is measured and calculated without applying voltage, and then measured according to the embodiment shown in FIG. After the voltage is applied, a preset threshold range (eg, 40 to 45 units) may be set according to the difference of the object to be tested, and the pattern of the object to be tested usually has many different detection areas (eg, conductive). The film area and the etched area) have different brightness values, so some areas (such as etched areas (average brightness value of 40 units)) may be considered defective with the defective area. Therefore, the plurality of pixels selected by the preset threshold range have portions that are indeed defective, and the other portion is normal. In order to distinguish each of the pixels having defects, the present invention can use the known pattern of the object to be tested to compare with the selected pixels and analyze which pixels in the object to be tested do have defects.

The technical content and the technical features of the present disclosure have been disclosed as above, but those skilled in the art should understand that the teachings and disclosures of the present disclosure are disclosed without departing from the spirit and scope of the disclosure as defined by the appended claims. Can be used for various substitutions and modifications. For example, many of the devices or structures or method steps disclosed above may be implemented in different ways or substituted with other structures, or a combination of the two.

The scope of the present invention is not limited to the process, machine, manufacture, compositions, means, methods, or steps of the particular embodiments disclosed. It should be understood by those of ordinary skill in the art that, based on the teachings of the present disclosure, the process, the machine, the manufacture, the composition of the material, the device, the method, or the steps, whether present or future developers, The revealer performs substantially the same function in substantially the same manner, and achieves substantially the same result, and can also be used in the present disclosure. Accordingly, the scope of the following claims is intended to cover such <RTIgt; </ RTI> processes, machines, manufactures, compositions, devices, methods or steps.

100. . . Electro-optic detector

10. . . Modulator

10-1. . . Support frame

10-2. . . Modulator body

10-3. . . Mirror

12. . . Beam splitter

14. . . light source

16. . . lens

17. . . CCD camera

18. . . Image processor

20. . . monitor

twenty two. . . Analyte

30. . . Electro-optical modulation device

30'. . . Electro-optical modulation device

31. . . Ontology

32. . . First surface

33. . . Second surface

34. . . Conductive film

34'. . . Conductive film

35. . . Transparent protective film

36. . . Light transmissive substrate

40. . . Electro-optic detector

40'. . . Electro-optic detector

40"...electro-optic detector

40'''. . . Electro-optic detector

410. . . Beam splitter

420. . . Light source generating device

430. . . Electro-optical modulation device

430'. . . Electro-optical modulation device

431. . . Ontology

4311. . . First surface

4312. . . Second surface

432. . . Conductive film

433. . . Transparent protective film

440. . . Support module

440'. . . Support module

441. . . Transparent substrate

442. . . Reflector

450. . . Image capture module

460. . . Power module

490. . . Analyte

491. . . Transparent conductive film pattern

Figure 1 shows a schematic view of a conventional electro-optical detector;

2 is a cross-sectional view showing an electro-optic modulation device according to an embodiment of the present disclosure;

3 is a cross-sectional view showing an electro-optic modulation device according to another embodiment of the present disclosure;

4 shows a schematic diagram of an electro-optic detector according to an embodiment of the present disclosure;

FIG. 5 is a schematic diagram showing an electro-optical detector according to another embodiment of the present disclosure; FIG.

6 shows a schematic diagram of an electro-optic detector according to still another embodiment of the present disclosure;

FIG. 7 is a schematic diagram showing an electro-optic detector according to still another embodiment of the present disclosure; and

FIG. 8 is a flow chart showing a method for detecting an electro-optical detector according to an embodiment of the present disclosure;

FIG. 9 is a flow chart showing a method for detecting an electro-optical detector according to another embodiment of the present disclosure; and

FIG. 10 shows a partial flow chart of an electro-optical detector detection method according to another embodiment of the present disclosure.

40. . . Electro-optic detector

410. . . Beam splitter

420. . . Light source generating device

430. . . Electro-optical modulation device

431. . . Ontology

4311. . . First surface

4312. . . Second surface

432. . . Conductive film

433. . . Transparent protective film

440. . . Support module

441. . . Transparent substrate

442. . . Reflector

450. . . Image capture module

460. . . Power module

490. . . Analyte

491. . . Transparent conductive film pattern

Claims (12)

An electro-optical detector comprises: a light source generating device for emitting a light beam; an electro-optic modulation device, wherein the light beam is incident on a test object after the beam is modulated; a support module supports the object to be tested and is modulated The light beam penetrates the object to be tested and is incident on the support module, wherein the support module further includes a mirror disposed on the support module and reflecting the light beam incident on the support module; The image capturing module converts the light beam reflected by the electro-optical modulation device into an image signal. The electro-optic detector according to claim 1, wherein the electro-optical modulation device comprises a body, a conductive film and a transparent protective film, wherein the body comprises a first surface and a second surface, the conductive film is disposed on the The first surface, the transparent protective film is disposed on the second surface and located above the object to be tested. The electro-optical detector according to claim 2, wherein the body is a polymer-dispersed liquid crystal display (PDLC display). The electro-optical detector according to claim 2, wherein the body is an optical crystal, and the material of the optical crystal is selected from the group consisting of potassium dihydrogen phosphate, potassium dipotassium phosphate and ammonium dihydrogen phosphate. The electro-optical detector according to claim 2, further comprising a power module, wherein the power module is electrically connected to the conductive film and the object to be tested. The electro-optic detector according to claim 2, wherein the electro-optic modulation device further comprises a transparent substrate, the transparent substrate is disposed on the conductive film, and the transparent The area of the substrate is larger than the body, and the conductive film is disposed on the transparent substrate beyond the body. The electro-optical detector of claim 1, wherein the image capturing module is selected from the group consisting of a photosensitive coupling element (CCD) camera and a complementary metal oxide semiconductor camera. The electro-optical detector according to claim 2, wherein the material of the transparent protective film is selected from the group consisting of metals, organic substances, inorganic substances, and ceramics. A method for detecting an electro-optic detector using the claim 1, comprising the steps of: applying a driving voltage to the object to be tested; grounding the electro-optical modulation device; projecting the beam to the electro-optic modulation device; and extracting the electro-optic modulation The image signal of the device; and determining whether the object to be tested has a defect by the image signal. According to the detection method of claim 9, the method further comprises measuring and calculating an average brightness value of the object to be tested without applying voltage. The detecting method according to claim 10, wherein the determining the defect of the object to be tested further comprises setting a preset threshold range according to the average brightness value, and filtering a plurality of pixels of the image signal according to the preset threshold value range. . According to the detection method of claim 11, wherein the step of determining the defect of the object to be tested further comprises: comparing the pattern of the object to be tested with the pixels of the image signal and analyzing the defects in the object to be tested. Some pixels.