TWI457290B - Treatment of photoresist developing wastewater - Google Patents

Treatment of photoresist developing wastewater Download PDF

Info

Publication number
TWI457290B
TWI457290B TW101109490A TW101109490A TWI457290B TW I457290 B TWI457290 B TW I457290B TW 101109490 A TW101109490 A TW 101109490A TW 101109490 A TW101109490 A TW 101109490A TW I457290 B TWI457290 B TW I457290B
Authority
TW
Taiwan
Prior art keywords
photoresist
water
entire entire
wastewater
treatment
Prior art date
Application number
TW101109490A
Other languages
English (en)
Chinese (zh)
Other versions
TW201245053A (en
Inventor
Satoshi Yamada
Original Assignee
Kurita Water Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Ind Ltd filed Critical Kurita Water Ind Ltd
Publication of TW201245053A publication Critical patent/TW201245053A/zh
Application granted granted Critical
Publication of TWI457290B publication Critical patent/TWI457290B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/58—Multistep processes
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F3/00—Biological treatment of water, waste water, or sewage
    • C02F3/02—Aerobic processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/025—Reverse osmosis; Hyperfiltration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/147—Microfiltration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C02F2001/425—Treatment of water, waste water, or sewage by ion-exchange using cation exchangers
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
    • C02F2103/40—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from the manufacture or use of photosensitive materials
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2303/00—Specific treatment goals
    • C02F2303/20—Prevention of biofouling
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F3/00—Biological treatment of water, waste water, or sewage
    • C02F3/02—Aerobic processes
    • C02F3/06—Aerobic processes using submerged filters
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F3/00—Biological treatment of water, waste water, or sewage
    • C02F3/02—Aerobic processes
    • C02F3/08—Aerobic processes using moving contact bodies
    • C02F3/085—Fluidized beds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W10/00—Technologies for wastewater treatment
    • Y02W10/10—Biological treatment of water, waste water, or sewage

Landscapes

  • Water Supply & Treatment (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Hydrology & Water Resources (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Microbiology (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Biological Treatment Of Waste Water (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
TW101109490A 2011-03-23 2012-03-20 Treatment of photoresist developing wastewater TWI457290B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011064368 2011-03-23

Publications (2)

Publication Number Publication Date
TW201245053A TW201245053A (en) 2012-11-16
TWI457290B true TWI457290B (zh) 2014-10-21

Family

ID=46879271

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101109490A TWI457290B (zh) 2011-03-23 2012-03-20 Treatment of photoresist developing wastewater

Country Status (5)

Country Link
JP (1) JPWO2012128119A1 (ja)
KR (1) KR20130125387A (ja)
CN (1) CN103443032B (ja)
TW (1) TWI457290B (ja)
WO (1) WO2012128119A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7501075B2 (ja) * 2020-04-24 2024-06-18 ニプロ株式会社 排液の前処理方法および前処理システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW464637B (en) * 1998-01-05 2001-11-21 Organo Corp Process and equipment for rejuvenation treatment of photoresist development waste
TW201102362A (en) * 2009-07-14 2011-01-16 Mega Union Technology Inc Recycling equipment for tetramethyl ammonium hydroxide and method thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597460B1 (en) * 1992-11-10 1997-01-22 Tama Chemicals Co., Ltd. Method of processing organic quaternary ammonium hydroxide-containing waste liquid
JP2730610B2 (ja) * 1992-11-10 1998-03-25 多摩化学工業株式会社 水酸化有機第四アンモニウム含有廃液の処理方法
CN1298636C (zh) * 2002-11-29 2007-02-07 长濑产业株式会社 废显影液再生装置和废显影液再生方法
JP4655570B2 (ja) * 2004-09-28 2011-03-23 栗田工業株式会社 有機性窒素化合物を含有する排水の処理装置
KR100954250B1 (ko) * 2004-11-30 2010-04-23 가부시끼가이샤 도꾸야마 현상 폐액의 처리 방법
JP5115271B2 (ja) * 2008-03-27 2013-01-09 栗田工業株式会社 リン酸含有水からリン酸を回収する方法および装置
JP2010017614A (ja) * 2008-07-08 2010-01-28 Kurita Water Ind Ltd 有機性排水の処理方法及び装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW464637B (en) * 1998-01-05 2001-11-21 Organo Corp Process and equipment for rejuvenation treatment of photoresist development waste
TW201102362A (en) * 2009-07-14 2011-01-16 Mega Union Technology Inc Recycling equipment for tetramethyl ammonium hydroxide and method thereof

Also Published As

Publication number Publication date
KR20130125387A (ko) 2013-11-18
JPWO2012128119A1 (ja) 2014-07-24
CN103443032B (zh) 2016-06-01
CN103443032A (zh) 2013-12-11
WO2012128119A1 (ja) 2012-09-27
TW201245053A (en) 2012-11-16

Similar Documents

Publication Publication Date Title
Li et al. Treatment of river water by a hybrid coagulation and ceramic membrane process
KR101193902B1 (ko) 정수 생산을 위한 막여과 정수 처리 시스템 및 방법
JP2005288442A (ja) 膜モジュールの洗浄方法
JP3800450B2 (ja) 高濃度の塩類を含有する有機性廃水の処理方法及び装置
KR101550702B1 (ko) 높은 회수율로 정수 생산을 위한 막여과 정수 처리 시스템 및 방법
JP2012213676A (ja) 水質評価方法及び水処理装置の運転管理方法
JP4655643B2 (ja) 生物処理水含有水の処理方法及び処理装置
TWI457290B (zh) Treatment of photoresist developing wastewater
Kucera Reverse osmosis: Fundamental causes of membrane deposition and approaches to mitigation
JP2012200696A (ja) 脱塩方法および脱塩装置
JP2006095425A (ja) 廃水の生物処理水含有水の浄化方法及び浄化装置
JP2002253931A (ja) 再生テトラアルキルアンモニウムヒドロオキシドの製造方法および製造装置
CN107055853A (zh) 一种电镀含镍废水的全膜法处理方法
KR100352740B1 (ko) 가압부상조 및 연속식 정밀여과기를 이용한 하·폐수재이용 시스템의 전처리 방법
JP5106182B2 (ja) 水処理方法および水処理装置
WO2021246161A1 (ja) 水処理方法及び水処理装置
JPH03270800A (ja) 有機性汚水の処理方法
JPWO2018105569A1 (ja) 水処理方法および装置
CN113072235A (zh) 一种偏光片生产的聚乙烯醇膨润废水处理方法
JP3444202B2 (ja) 水処理装置
JP2022167144A (ja) 水処理方法および水処理装置
Qin et al. Pilot study of a submerged membrane bioreactor for water reclamation
WO2023047732A1 (ja) 純水製造用原水の処理方法
JP7460004B1 (ja) フッ素含有排水の処理装置及び方法
Pellegrin et al. Membrane processes

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees