TWI455789B - - Google Patents

Info

Publication number
TWI455789B
TWI455789B TW100142664A TW100142664A TWI455789B TW I455789 B TWI455789 B TW I455789B TW 100142664 A TW100142664 A TW 100142664A TW 100142664 A TW100142664 A TW 100142664A TW I455789 B TWI455789 B TW I455789B
Authority
TW
Taiwan
Application number
TW100142664A
Other languages
Chinese (zh)
Other versions
TW201321120A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW100142664A priority Critical patent/TW201321120A/zh
Priority to CN201110451213.2A priority patent/CN103137532B/zh
Publication of TW201321120A publication Critical patent/TW201321120A/zh
Application granted granted Critical
Publication of TWI455789B publication Critical patent/TWI455789B/zh

Links

TW100142664A 2011-11-22 2011-11-22 共平面三軸定位裝置 TW201321120A (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW100142664A TW201321120A (zh) 2011-11-22 2011-11-22 共平面三軸定位裝置
CN201110451213.2A CN103137532B (zh) 2011-11-22 2011-12-23 共平面三轴定位装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW100142664A TW201321120A (zh) 2011-11-22 2011-11-22 共平面三軸定位裝置

Publications (2)

Publication Number Publication Date
TW201321120A TW201321120A (zh) 2013-06-01
TWI455789B true TWI455789B (ja) 2014-10-11

Family

ID=48497169

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100142664A TW201321120A (zh) 2011-11-22 2011-11-22 共平面三軸定位裝置

Country Status (2)

Country Link
CN (1) CN103137532B (ja)
TW (1) TW201321120A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI725500B (zh) * 2019-07-31 2021-04-21 和碩聯合科技股份有限公司 扭力測試設備及其待測物定位座

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201509587A (zh) * 2013-09-05 2015-03-16 yuan-long Lai 多軸加工機
TWI487593B (zh) * 2013-12-30 2015-06-11 中原大學 三軸共平面斜向驅動式平台
CN113691098B (zh) * 2021-08-09 2023-01-24 中南大学 用于光电子器件封装的单边直线电机驱动的共面运动装置

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5163651A (en) * 1990-03-13 1992-11-17 Ntn Corporation Movable table
JP2001238485A (ja) * 2000-02-21 2001-08-31 Sharp Corp ステージ装置
CN1921026A (zh) * 2005-09-08 2007-02-28 北京慧摩森电子系统技术有限公司 X－Y－θ三自由度微动平台
TW200734112A (en) * 2006-03-10 2007-09-16 Icf Technology Co Ltd Rotation module, sliding rotation module and double housing apparatus
JP2007266585A (ja) * 2006-03-02 2007-10-11 Sumitomo Heavy Ind Ltd ステージ装置
TWM324557U (en) * 2007-06-08 2008-01-01 Smart Chain Entpr Co Ltd Linear moving apparatus of positioning theta angle of main axis
EP1632953B1 (en) * 2003-06-27 2010-05-05 CKD Corporation Supporting unit, and moving table device and linear-motion guiding device using the supporting unit
CN201530059U (zh) * 2009-04-30 2010-07-21 苏州德龙激光有限公司 新型应用于LED激光切割设备的X-Y-θ运动平台
TWM400904U (en) * 2009-12-11 2011-04-01 mao-xiang Wu Alignment stage
TWM408100U (en) * 2007-01-17 2011-07-21 Qiu Ren You Four-drive alignment mechanism
CN201954205U (zh) * 2011-01-05 2011-08-31 河南科技大学 精密气浮工作台
TW201129987A (en) * 2007-01-17 2011-09-01 Qiu Ren You Rotation unit for 4-driving alignment mechanism

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2700050B2 (ja) * 1994-10-04 1998-01-19 ヒーハイスト精工株式会社 縦横移動旋回テーブル機構
KR101156901B1 (ko) * 2005-10-26 2012-06-21 이와사키 시스템 가부시키가이샤 테이블의 위치 결정 제어 장치
JPWO2007055339A1 (ja) * 2005-11-11 2009-04-30 ヒーハイスト精工株式会社 三次元位置決めテーブル
JP2010274429A (ja) * 2009-05-26 2010-12-09 Ihi Corp アライメントステージ

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5163651A (en) * 1990-03-13 1992-11-17 Ntn Corporation Movable table
JP2001238485A (ja) * 2000-02-21 2001-08-31 Sharp Corp ステージ装置
EP1632953B1 (en) * 2003-06-27 2010-05-05 CKD Corporation Supporting unit, and moving table device and linear-motion guiding device using the supporting unit
CN1921026A (zh) * 2005-09-08 2007-02-28 北京慧摩森电子系统技术有限公司 X－Y－θ三自由度微动平台
JP2007266585A (ja) * 2006-03-02 2007-10-11 Sumitomo Heavy Ind Ltd ステージ装置
TW200734112A (en) * 2006-03-10 2007-09-16 Icf Technology Co Ltd Rotation module, sliding rotation module and double housing apparatus
TWM408100U (en) * 2007-01-17 2011-07-21 Qiu Ren You Four-drive alignment mechanism
TW201129987A (en) * 2007-01-17 2011-09-01 Qiu Ren You Rotation unit for 4-driving alignment mechanism
TWM324557U (en) * 2007-06-08 2008-01-01 Smart Chain Entpr Co Ltd Linear moving apparatus of positioning theta angle of main axis
CN201530059U (zh) * 2009-04-30 2010-07-21 苏州德龙激光有限公司 新型应用于LED激光切割设备的X-Y-θ运动平台
TWM400904U (en) * 2009-12-11 2011-04-01 mao-xiang Wu Alignment stage
CN201954205U (zh) * 2011-01-05 2011-08-31 河南科技大学 精密气浮工作台

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI725500B (zh) * 2019-07-31 2021-04-21 和碩聯合科技股份有限公司 扭力測試設備及其待測物定位座

Also Published As

Publication number Publication date
CN103137532B (zh) 2015-10-21
TW201321120A (zh) 2013-06-01
CN103137532A (zh) 2013-06-05

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