TWI447835B - A ingot holding composition and a method of sandwiching the ingot - Google Patents

A ingot holding composition and a method of sandwiching the ingot Download PDF

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TWI447835B
TWI447835B TW101119103A TW101119103A TWI447835B TW I447835 B TWI447835 B TW I447835B TW 101119103 A TW101119103 A TW 101119103A TW 101119103 A TW101119103 A TW 101119103A TW I447835 B TWI447835 B TW I447835B
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ingot
sensitive adhesive
pressure sensitive
adhesive material
composition
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TW101119103A
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TW201349372A (en
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Sheng Chieh Hsu
Ming Tzu Lan
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Gigastorage Corp
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晶錠夾持組合物及夾持晶錠之方法Ingot holding composition and method for holding the ingot

本發明係關於一種晶錠夾持組合物,尤其係關於一種在加工非磁性晶錠時用於夾持該晶錠之晶錠夾持組合物及其用於夾持晶錠之方法。The present invention relates to an ingot holding composition, and more particularly to an ingot holding composition for holding the ingot during processing of a nonmagnetic ingot and a method for clamping the ingot.

目前,對於單晶及定向結晶等晶體材料,如晶錠,進行加工時,舉例而言,在已習知技術中,如第1圖所示之切割程序進行時,其係利用線鋸40切割一晶錠20,且該晶錠20係置於一載台30之上,此時,為使進行精密切割過程中能夠準確定位,需要夾持並固定晶錠20於載台30上之位置。At present, when processing a crystal material such as a single crystal or a directional crystal, such as an ingot, for example, in the prior art, when the cutting process shown in FIG. 1 is performed, it is cut by a wire saw 40. An ingot 20 is placed on a stage 30. At this time, in order to enable accurate positioning during the precision cutting process, it is necessary to clamp and fix the position of the ingot 20 on the stage 30.

而針對晶錠之夾持方法,一般而言可分為兩類:其中一類係為針對磁性晶錠之夾持方法,該方法係利用電磁鐵之磁力吸引磁性晶錠以提供夾持之功效;另一類係為針對非磁性晶錠之夾持方法,該方法的先前技術已有提出一種利用真空吸引之方式以夾持晶錠,但由於該真空吸引方式需要對晶錠之一表面先進行拋平處理,才能利用該表面進行真空吸引以藉此夾持晶錠,故不僅需要對該晶錠額外增加一道拋平處理之程序,導致加工的程序繁複及時間耗費,且對於脆性的晶錠而言,真空吸引所施加的夾持力量亦會導致晶錠表面受損,降低產出的良率。The clamping method for the ingot can generally be divided into two categories: one of which is a clamping method for the magnetic ingot, which uses the magnetic force of the electromagnet to attract the magnetic ingot to provide the clamping effect; The other type is a clamping method for a non-magnetic ingot. The prior art of the method has proposed a method of vacuum inducing to hold the ingot, but since the vacuum suction method requires first throwing one surface of the ingot Flat processing, in order to use the surface for vacuum suction to thereby hold the ingot, so it is not only necessary to add an additional leveling process to the ingot, resulting in complicated processing and time consumption, and for the brittle ingot In other words, the clamping force exerted by vacuum suction can also cause damage to the surface of the ingot and reduce the yield of output.

而針對非磁性晶錠之夾持方法,習知技術亦有提出一 種利用泡沫膠作為夾持物以固定晶錠之夾持方法,請參照第2圖,該方法係在晶錠20與載台30之間先設置複數個間隙物50,利用該等間隙物50在該晶錠20與載台30之間形成一空間,接著將泡沫膠60注入該等間隙物50以外的空間,用以包覆並夾持該晶錠20之底面,藉此可避免機械式夾持所造成的晶錠表面損傷,且由於晶錠表面通常並非完全平整,故利用泡沫膠可恰當的包覆晶錠表面,此外,一方面可以固定晶錠之位置,另一方面亦可以吸收加工所產生之震動,避免脆性晶錠受到損傷。For the clamping method of non-magnetic ingots, the prior art also proposes a Referring to FIG. 2, a method of clamping the ingot by using the foam rubber as a holding material, the method firstly providing a plurality of spacers 50 between the ingot 20 and the stage 30, and using the spacers 50 A space is formed between the ingot 20 and the stage 30, and then the foam rubber 60 is injected into a space other than the spacer 50 for covering and clamping the bottom surface of the ingot 20, thereby avoiding the mechanical clamp. The surface damage of the ingot is caused by the holding, and since the surface of the ingot is usually not completely flat, the surface of the ingot can be properly covered by the foam rubber. In addition, the position of the ingot can be fixed on the one hand, and the absorption can be processed on the other hand. The vibration generated prevents the fragile ingot from being damaged.

然而利用泡沫膠作為夾持物以夾持晶錠亦產生多項缺點,第一,泡沫膠在施用後必須等到其完全膠聯固化才能提供足夠的強度,故必須花費相當長的時間等待而導致加工時間增加,且在等待期間內,晶錠必須保持靜置且避免碰撞,故使得加工的難度增加。其次,若為使泡沫膠提供足以有效夾持之強度,則導致後續移除泡沫膠之困難。再者,設置之間隙物若強度不足將降低泡沫膠緩衝之功效,而若間隙物強度過高則亦導致加工完成後移除間隙物之困難。However, the use of foam rubber as a gripping material to hold the ingot also has a number of disadvantages. First, the foam rubber must wait until its full gelation cure to provide sufficient strength after application, so it takes a considerable time to wait for the processing time. Increasing, and during the waiting period, the ingot must remain stationary and avoid collisions, making the processing more difficult. Secondly, if the foam is provided with sufficient strength for effective clamping, the subsequent difficulty in removing the foam is caused. Moreover, if the gap of the gap is insufficient, the effect of the foam buffer is reduced, and if the gap strength is too high, the difficulty of removing the spacer after the processing is completed is also caused.

因此,有鑑於前述習知技術之缺失,本發明之目的在於提供一種晶錠夾持組合物以取代泡沫膠而作為夾持物,以用於在加工非磁性晶錠時有效夾持該晶錠並緩衝震動,且恰當地維持夾持強度與緩衝性之間的平衡,同時,該晶 錠夾持組合物係可迅速且及時地提供夾持功效,並可輕易自被貼合面移除以利於加工機台的重複利用。Therefore, in view of the above-mentioned shortcomings of the prior art, it is an object of the present invention to provide an ingot holding composition to replace the foam rubber as a holder for effectively clamping the ingot during processing of the non-magnetic ingot. Buffer vibration and properly maintain the balance between clamping strength and cushioning properties, while the crystal The ingot holding composition provides gripping efficiency quickly and in a timely manner and can be easily removed from the mating surface to facilitate reuse of the processing machine.

為達成上述之目的,本發明係提供一種晶錠夾持組合物,用於夾持一晶錠,並將該晶錠固定於一載台上,該晶錠夾持組合物包含:一緩衝材料層;一第一感壓膠材,設於該緩衝材料層之一面,用以將該晶錠固持於該緩衝材料層上;以及一第二感壓膠材,設於該緩衝材料層之另一面,用以將該緩衝材料層貼附於該載台上。In order to achieve the above object, the present invention provides an ingot holding composition for holding an ingot and fixing the ingot to a stage, the ingot holding composition comprising: a cushioning material a first pressure sensitive adhesive material disposed on one surface of the buffer material layer for holding the ingot on the buffer material layer; and a second pressure sensitive adhesive material disposed on the buffer material layer One side is for attaching the buffer material layer to the stage.

上述之晶錠夾持組合物中,該第一感壓膠材及該第二感壓膠材係各自獨立選自聚氨酯系(polyurethane)、矽氧樹脂系(polymerized siloxanes)、聚甲基丙烯酸甲酯系(polymethylmethacrylate)或合成橡膠系等聚合物。In the above-mentioned ingot holding composition, the first pressure sensitive adhesive material and the second pressure sensitive adhesive material are each independently selected from the group consisting of polyurethane, polymerized siloxanes, and polymethyl methacrylate. A polymer such as a polymethylmethacrylate or a synthetic rubber.

其中,該第一感壓膠材與該第二感壓膠材係可視晶錠特性而獨立地選用不同或相同的材質,進而提升選擇性與應用性,且該等感壓膠材的黏膠強度與正向壓力成正比的材料力學特性,進而控制晶錠在加工時之夾持強度,並可輕易地在加工完成後將晶錠夾持組合物從晶錠及載台表面剝離,以避免損傷晶錠及載台表面,並提升晶錠加工程序的方便性。Wherein, the first pressure sensitive adhesive material and the second pressure sensitive adhesive material independently select different or the same materials according to the characteristics of the ingot, thereby improving selectivity and applicability, and the adhesive of the pressure sensitive adhesive material The mechanical properties of the material proportional to the forward pressure, which in turn control the holding strength of the ingot during processing, and can easily peel the ingot holding composition from the surface of the ingot and the stage after processing to avoid Damage the ingot and the surface of the stage and enhance the convenience of the ingot processing program.

上述之晶錠夾持組合物中,構成該緩衝材料層之材料係可選自發泡聚苯乙烯(EPS)、發泡聚丙烯(EPP)、發泡聚乙烯(EPE)、發泡乙烯聚合物(EPO)、乙烯-醋酸乙烯共聚物(EVA)、矽氧樹脂(polymerized siloxanes)、聚氨酯(polyurethane)或合成橡膠。In the above-mentioned ingot holding composition, the material constituting the buffer material layer may be selected from expanded polystyrene (EPS), expanded polypropylene (EPP), expanded polyethylene (EPE), and foamed ethylene polymer. (EPO), ethylene-vinyl acetate copolymer (EVA), polymerized siloxanes, polyurethane or synthetic rubber.

此外,在另一實施例中,晶錠夾持組合物,更包含:一第一介質,設於該緩衝材料層與該第一感壓膠材之間;及一第二介質,設於該緩衝材料層與該第二感壓膠材之間;其中該第一介質與第二介質係可獨立選自聚苯乙烯、丙烯腈-丁二烯-苯乙烯、聚乙烯、乙二醇改性-聚對苯二甲酸乙二醇酯、聚硫酯、聚碳酸酯、聚氯乙烯、聚對苯二甲酸乙二醇酯及壓克力等塑膠材料之一者。In addition, in another embodiment, the ingot holding composition further includes: a first medium disposed between the buffer material layer and the first pressure sensitive adhesive material; and a second medium disposed on the Between the buffer material layer and the second pressure sensitive adhesive material; wherein the first medium and the second medium are independently selected from the group consisting of polystyrene, acrylonitrile-butadiene-styrene, polyethylene, and ethylene glycol modified - one of plastic materials such as polyethylene terephthalate, polythioester, polycarbonate, polyvinyl chloride, polyethylene terephthalate and acrylic.

以上,該緩衝材料層係用於提供緩衝外力的功效以有效吸收晶錠加工時所受的震動,避免脆性晶錠在加工時因震動而受到損傷。In the above, the buffer material layer is used to provide a buffering external force to effectively absorb the vibration received during the processing of the ingot, and to prevent the brittle ingot from being damaged by vibration during processing.

本發明亦另提供一種夾持晶錠之方法,其係將如上述之晶錠夾持組合物以提供至一晶錠與一載台之間,且該晶錠係藉由該晶錠夾持組合物的夾持而被固定於該載台。The present invention also provides a method of holding an ingot by sandwiching a composition as described above to provide an ingot to a stage, and the ingot is held by the ingot The composition is clamped and fixed to the stage.

再者,上述方法可在該晶錠藉由該晶錠夾持組合物的夾持而被固定於該載台時進行加工,待加工完成後,將單晶與定向結晶從側向取件。Furthermore, the above method can be processed when the ingot is fixed to the stage by the clamping of the ingot holding composition, and after the processing is completed, the single crystal and the oriented crystal are taken from the side.

綜上所述,本發明之晶錠夾持組合物係藉由貼合晶錠與載台以提供晶錠後續加工處理之夾持及緩衝功效,同時,該晶錠夾持組合物係具有移除方便之優點,而且由於並無使用泡沫膠來夾持晶錠,故減少膠聯固化的等待時間,又由於不需要設置間隙物,故改良因間隙物強度不足而降低緩衝性的缺點,以及解決因間隙物強度過高而導致 移除困難的問題,從而使得晶錠加工程序簡化及快速,以及提升加工機台重複利用性之功效。In summary, the ingot holding composition of the present invention provides the clamping and buffering effect of the subsequent processing of the ingot by laminating the ingot and the stage, and at the same time, the ingot holding composition has a shift In addition to the advantages of convenience, and since the ingot is not used to hold the ingot, the waiting time for the curing of the bonding is reduced, and since the spacer is not required, the disadvantage of reducing the cushioning property due to insufficient strength of the spacer, and Solve the problem caused by excessive strength of the gap Remove difficult problems, simplifying and fasting the ingot processing program, and improving the reusability of the processing machine.

為充分說明本發明之目的、特徵及功效,使本發明所屬技術領域中具有通常知識者能瞭解本發明之內容並可據以實施,茲藉由下述具體之實施例,並配合所附之圖式,對本發明做一詳細說明,說明如後:To fully clarify the objects, features, and advantages of the present invention, those of ordinary skill in the art of the invention can understand the invention and practice the invention. Schematic, a detailed description of the present invention, illustrated as follows:

晶錠夾持組合物Ingot holding composition

請參照第3圖,其係為本發明之晶錠夾持組合物的斷面示意圖。晶錠夾持組合物1係用於夾持晶錠以固定於載台之上,其包含緩衝材料層11、第一感壓膠材12及第二感壓膠材13。其中,該緩衝材料層11係可呈現與待夾持之晶錠約略相近的尺寸,並於該緩衝材料層11之一面設有第一感壓膠材12,且於另一面設有第二感壓膠材13。換言之,該緩衝材料層11之相對的兩面均承載有感壓膠以分別形成第一感壓膠材12及第二感壓膠材13。Please refer to Fig. 3, which is a schematic cross-sectional view of the ingot holding composition of the present invention. The ingot holding composition 1 is for holding an ingot to be fixed on a stage, and comprises a buffer material layer 11, a first pressure sensitive adhesive material 12, and a second pressure sensitive adhesive material 13. Wherein, the buffer material layer 11 can be approximately the same size as the ingot to be clamped, and the first pressure sensitive adhesive material 12 is disposed on one surface of the buffer material layer 11 and has a second sense on the other side. Pressing material 13. In other words, the opposite sides of the buffer material layer 11 are loaded with pressure sensitive adhesive to form the first pressure sensitive adhesive material 12 and the second pressure sensitive adhesive material 13, respectively.

再者,本發明晶錠夾持組合物之第一感壓膠材及第二感壓膠材係各自獨立選自聚氨酯系、矽氧樹脂系、聚甲基丙烯酸甲酯系或合成橡膠系等聚合物。換言之,在本發明之實施態樣中,第一感壓膠材與第二感壓膠材係可由不同的材質所構成,例如第一感壓膠材係為聚氨酯系聚合物,第二感壓膠材係為矽氧樹脂系聚合物;在其他可能的實施態樣中,第一感壓膠材與第二感壓膠材係可由相同的材質 所構成,例如其皆由聚氨酯系聚合物所構成。再者,本發明之感壓膠材的膠黏強度係與施加於膠材上之正向壓力成正比,意即所施加的正向壓力越大,該等感壓膠材的膠黏強度越大,而待正向壓力消除後,則會降低感壓膠材的膠黏強度。Furthermore, the first pressure sensitive adhesive material and the second pressure sensitive adhesive material of the ingot holding composition of the present invention are each independently selected from the group consisting of a polyurethane type, a silicone resin type, a polymethyl methacrylate type, a synthetic rubber type, and the like. polymer. In other words, in the embodiment of the present invention, the first pressure sensitive adhesive material and the second pressure sensitive adhesive material may be composed of different materials, for example, the first pressure sensitive adhesive material is a polyurethane polymer, and the second pressure sensitive The rubber material is a silicone resin; in other possible embodiments, the first pressure sensitive rubber and the second pressure sensitive rubber may be the same material. The composition is, for example, composed of a polyurethane-based polymer. Furthermore, the adhesive strength of the pressure sensitive adhesive of the present invention is proportional to the forward pressure applied to the adhesive material, that is, the greater the applied forward pressure, the more the adhesive strength of the pressure sensitive adhesive material is. Large, and after the positive pressure is removed, the adhesive strength of the pressure sensitive adhesive is reduced.

應瞭解的是,本發明之感壓膠材並不限於上述的材質,亦可使用其他購自商業來源之感壓膠材。It should be understood that the pressure sensitive adhesive of the present invention is not limited to the above materials, and other pressure sensitive adhesives commercially available from commercial sources may also be used.

藉由上述感壓膠材所構成之晶錠夾持組合物,可使第一感壓膠材貼附於晶錠及第二感壓膠材貼附於載台時,提供夾持的功效以有效固定晶錠於載台上之位置。By the ingot holding composition composed of the pressure sensitive adhesive material, the first pressure sensitive adhesive material can be attached to the ingot and the second pressure sensitive adhesive material is attached to the stage, thereby providing the effect of clamping. Effectively fix the position of the ingot on the stage.

而本發明緩衝材料層之材料係可選自發泡聚苯乙烯(EPS)、發泡聚丙烯(EPP)、發泡聚乙烯(EPE)或發泡乙烯聚合物(EPO)等發泡材料、乙烯-醋酸乙烯共聚物(EVA)、矽氧樹脂、聚氨酯或合成橡膠等可撓性材料,然並不限於此,本領域中具有通常知識者應瞭解的是,本發明亦可使用其他發泡材料或可撓性材料以形成該緩衝材料層。。The material of the buffer material layer of the present invention may be selected from foamed materials such as expanded polystyrene (EPS), expanded polypropylene (EPP), expanded polyethylene (EPE) or expanded ethylene polymer (EPO), and ethylene. - a flexible material such as a vinyl acetate copolymer (EVA), a silicone resin, a polyurethane or a synthetic rubber. However, it is not limited thereto, and those having ordinary knowledge in the art should understand that other foaming materials can also be used in the present invention. Or a flexible material to form the buffer material layer. .

藉由上述之緩衝材料層,可使其介於第一感壓膠材與第二感壓膠材之間時,係提供緩衝外力的功效以有效吸收晶錠加工時所受的震動,避免脆性晶錠的損傷。By the above-mentioned buffer material layer, when it is interposed between the first pressure sensitive adhesive material and the second pressure sensitive adhesive material, the external force is provided to effectively absorb the vibration received during the processing of the ingot, and the brittleness is avoided. Injury of the ingot.

此外,請參考第9圖,在一較佳實施例之晶錠夾持組合物1中,於緩衝材料層11與第一感壓膠材12之間另包含一第一介質14,而於緩衝材料層11與第二感壓膠材13之間另包含一第二介質15,該等介質係用於在最終撕除晶錠夾持組合物1時,提供更完整、迅速之剝離功效。In addition, referring to FIG. 9, in the ingot holding composition 1 of the preferred embodiment, a first medium 14 is further included between the buffer material layer 11 and the first pressure sensitive adhesive material 12, and is buffered. A second medium 15 is further included between the material layer 11 and the second pressure sensitive adhesive material 13, and the medium is used to provide a more complete and rapid peeling effect when the ingot holding composition 1 is finally torn off.

再者,該等介質係可獨立選自聚苯乙烯(PS)、丙烯腈-丁二烯-苯乙烯(ABS)、聚乙烯(PE)、乙二醇改性-聚對苯二甲酸乙二醇酯(PETG)、聚硫酯(PTE)、聚碳酸酯(PC)、聚氯乙烯(PVC)、聚對苯二甲酸乙二醇酯(PET)、壓克力(PMMA)等各種塑膠材料之一者,但不限於此,所有能夠使整面感壓膠材附著之材料,並在拔除晶錠夾持組合物時不會造成部分感壓膠材脫落於載台上,或甚至脫落於緩衝材料層11上,皆可作為上述介質之材料。Furthermore, the media may be independently selected from the group consisting of polystyrene (PS), acrylonitrile-butadiene-styrene (ABS), polyethylene (PE), and ethylene glycol modified-polyethylene terephthalate. Various plastic materials such as alcohol ester (PETG), polythioester (PTE), polycarbonate (PC), polyvinyl chloride (PVC), polyethylene terephthalate (PET), acrylic (PMMA), etc. One, but not limited to, all materials capable of attaching the whole surface pressure sensitive adhesive material, and when the ingot holding composition is removed, some of the pressure sensitive adhesive material does not fall off the stage, or even fall off The buffer material layer 11 can be used as the material of the above medium.

以下,利用實施例針對本發明進行更具體的說明,為本發明並不僅侷限於以下實施例。Hereinafter, the present invention will be more specifically described by way of examples, and the present invention is not limited to the following examples.

第4圖為本發明膠體組合物之使用狀態示意圖。將晶錠夾持組合物1設置於非磁性晶錠120與載台130之間,該晶錠夾持組合物1相對之兩面係分別貼附於該晶錠120與該載台130的表面,此時,該晶錠夾持組合物1之第一感壓膠12貼附於晶錠120,且第二感壓膠13貼附於載台130,使得晶錠120被夾持並固定於載台130上,如第4圖所示,以進行之後的加工程序。Figure 4 is a schematic view showing the state of use of the colloidal composition of the present invention. The ingot holding composition 1 is disposed between the non-magnetic ingot 120 and the stage 130, and the ingot holding composition 1 is attached to the surface of the ingot 120 and the stage 130, respectively. At this time, the first pressure sensitive adhesive 12 of the ingot holding composition 1 is attached to the ingot 120, and the second pressure sensitive adhesive 13 is attached to the stage 130, so that the ingot 120 is clamped and fixed on the carrier. On the stage 130, as shown in Fig. 4, the subsequent processing procedure is performed.

夾持晶錠之方法Method of holding an ingot

再請參照第5圖至第8圖,其更進一步描述在一線鋸切割的加工程序中,利用本發明晶錠夾持組合物作為夾持物的一種夾持晶錠之方法。Referring again to Figures 5 through 8, it further describes a method of holding an ingot using the ingot holding composition of the present invention as a holder in a wire saw cutting process.

首先,見第5圖,在載台130上方提供本發明之晶錠夾持組合物1,該晶錠夾持組合物1可依序將第二感壓膠材13、發泡材料所構成之緩衝材料層11及第一感壓膠材12 進行貼合以製成晶錠夾持組合物1,再將該晶錠夾持組合物1之第二感壓膠材13貼附於該載台130上。更詳細而言,該晶錠夾持組合物1可視所欲貼附的晶錠之材質、重量或形狀等特性而選擇適當的感壓膠材與緩衝材料層而被構成。First, referring to Fig. 5, the ingot holding composition 1 of the present invention is provided above the stage 130, and the ingot holding composition 1 can sequentially comprise the second pressure sensitive adhesive material 13 and the foamed material. Buffer material layer 11 and first pressure sensitive adhesive material 12 The ingot holding composition 1 is bonded to the ingot holding composition 1, and the second pressure sensitive adhesive 13 of the ingot holding composition 1 is attached to the stage 130. More specifically, the ingot holding composition 1 can be configured by selecting an appropriate pressure-sensitive adhesive material and a cushioning material layer depending on characteristics such as the material, weight, or shape of the ingot to be attached.

接著在該晶錠夾持組合物1上設置待切割的晶錠120時,如第6圖所示,可利用一治具(未示出)調整並固定該晶錠120之位置,以使該晶錠120在切割時能準確定位,以利在切割後獲得精密切割的工件,且此時藉由該晶錠120本身的重量向該晶錠夾持組合物1之感壓膠材施加壓力,以使該等感壓膠材產生黏著性,據此可簡單地固定該晶錠120在該載台130上的位置而不至於偏離。Next, when the ingot 120 to be cut is placed on the ingot holding composition 1, as shown in Fig. 6, a jig (not shown) can be used to adjust and fix the position of the ingot 120 so that the The ingot 120 can be accurately positioned during cutting to obtain a precisely cut workpiece after cutting, and at this time, pressure is applied to the pressure sensitive adhesive material of the ingot holding composition 1 by the weight of the ingot 120 itself. In order to make the pressure sensitive adhesive material adhesive, the position of the ingot 120 on the stage 130 can be simply fixed without being deviated.

當利用線鋸100由上至下切割該晶錠120時,如第7圖所示,此時,由於該晶錠120處於下壓的狀態而將正向力傳遞至該第一感壓膠材12及該第二感壓膠材13,故藉由該等感壓膠材所具有的感壓黏著特性,使得該等感壓膠材更穩固的夾持住該晶錠120。同時,在加工切割的過程中所產生的震動,於傳遞至緩衝材料層11後,係藉由其中的發泡材料吸收,從而避免震動對易脆裂的晶錠120所造成的損傷,並提供夾持時的穩定度及緩衝性。When the ingot 120 is cut from the top to the bottom by the wire saw 100, as shown in FIG. 7, at this time, the positive force is transmitted to the first pressure sensitive adhesive material because the ingot 120 is in a depressed state. 12 and the second pressure sensitive adhesive material 13, so that the pressure sensitive adhesive material has a pressure-sensitive adhesive property of the pressure sensitive adhesive material, so that the pressure sensitive adhesive material can hold the ingot 120 more stably. At the same time, the vibration generated during the processing and cutting is absorbed by the foaming material after being transferred to the buffer material layer 11, thereby avoiding the damage caused by the vibration to the fragile ingot 120 and providing Stability and cushioning during clamping.

最後,在切割加工完成後可獲得複數個單晶121,請參照第8圖,此時線鋸已移除,因此藉由該線鋸所施加的正向向下壓力亦已消除,此時由於該第一感壓膠材12及該第二感壓膠材13已非處於受壓狀態,而第一感壓膠材12之 黏著強度下降,係有利於在該第一感壓膠材12上的單晶121之取件,此時,再從單晶121之側面取件,進一步消除第一感壓膠材12之黏合力,以輕易地分離單晶121與第一感壓膠材12;而待單晶121全部從第一感壓膠材12上取走後,單晶121之重量所施加在晶錠夾持組合物1上的正向壓力亦已消除,故第一感壓膠材12與緩衝材料層11之間、緩衝材料層11與第二感壓膠材13之間及第二感壓膠材與載台130之間的黏合力也同時降低,因此,可輕易且完整地將各層彼此分離或將第二感壓膠材13與載台130分離而不留下沾黏的殘留物,縮短下次加工前所需的清理時間,從而達成移除便利性及增進加工效率之功效。Finally, after the cutting process is completed, a plurality of single crystals 121 can be obtained. Referring to FIG. 8, the wire saw has been removed, so the positive downward pressure applied by the wire saw has been eliminated. The first pressure sensitive adhesive material 12 and the second pressure sensitive adhesive material 13 are not in a pressurized state, and the first pressure sensitive adhesive material 12 is The adhesive strength is reduced, which is advantageous for picking up the single crystal 121 on the first pressure sensitive adhesive material 12. At this time, the workpiece is taken from the side of the single crystal 121 to further eliminate the adhesive force of the first pressure sensitive adhesive material 12. To easily separate the single crystal 121 and the first pressure sensitive adhesive 12; and after the single crystal 121 is completely removed from the first pressure sensitive adhesive 12, the weight of the single crystal 121 is applied to the ingot holding composition. The forward pressure on 1 has also been eliminated, so that between the first pressure sensitive adhesive material 12 and the cushioning material layer 11, between the cushioning material layer 11 and the second pressure sensitive adhesive material 13, and the second pressure sensitive adhesive material and the stage The adhesion between the 130s is also reduced at the same time, so that the layers can be easily and completely separated from each other or the second pressure sensitive adhesive 13 can be separated from the stage 130 without leaving a sticky residue, shortening the time before the next processing. The cleaning time required to achieve the convenience of removal and the efficiency of processing.

晶錠夾持組合物功效之量測與比較Measurement and comparison of the efficacy of ingot holding compositions

以下分別針對本發明之實施例及習知技術之比較例之夾持與移除效果進行量測及比較,以進一步突顯本發明所提供之功效,其量測結果係如下表1及表2所示: The clamping and removal effects of the embodiments of the present invention and the comparative examples of the prior art are measured and compared to further highlight the effects provided by the present invention, and the measurement results are as shown in Tables 1 and 2 below. Show:

以上比較例之發泡膠及各實施例之晶錠夾持組合物係於設置晶錠與載台之間後,各自進行晶錠之切割,接著拔除切割後之各個小晶錠,最後移除載台上之發泡膠或晶錠夾持組合物。The styrofoam of the above comparative example and the ingot holding composition of each embodiment are arranged between the ingot and the stage, and then each of the ingots is cut, and then the cut small ingots are removed, and finally removed. The styrofoam or ingot on the stage holds the composition.

其中,比較例及各實施例所夾持之晶錠皆為多晶矽材料晶錠,並於該晶錠切割開方後形成25個小晶錠。再者,於實施例2及實施例3中,第一介質14及第二介質15之厚度皆為0.25 mm。The ingots held by the comparative examples and the respective examples are all ingots of polycrystalline germanium material, and 25 small ingots are formed after the ingot is cut. Furthermore, in the second embodiment and the third embodiment, the thickness of the first medium 14 and the second medium 15 are both 0.25 mm.

定義:definition:

[黏著力][adhesion]

依據美國膠帶工會(PSTC)之鋼板黏著力測試。According to the American Tape Association (PSTC) steel adhesion test.

[殘膠率][residual gel rate]

分離小晶錠與載台時,分別對於小晶錠上的膠材殘留量或載台上的膠材殘留量。When the small ingot and the stage are separated, the residual amount of the glue on the small ingot or the residual amount of the glue on the stage, respectively.

[尺寸合格率][size pass rate]

一個晶錠開方後係形成25個小晶錠,其中小晶錠之工差落在±0.4mm以內的個數為X,尺寸合格率係定為X/25×100%。After the ingot is opened, 25 small crystal ingots are formed, wherein the number of small ingots falling within ±0.4 mm is X, and the dimensional pass rate is determined to be X/25×100%.

[黏著度][adhesion]

其係分成第一感壓膠材與晶錠和第二感壓膠材與載台的黏著效果。It is divided into the adhesion effect of the first pressure sensitive adhesive material and the ingot and the second pressure sensitive adhesive material and the stage.

[易拔除工件率][Easy to remove workpiece rate]

晶錠開方後,其中小晶錠上之膠材不需酒精和刀鋸(線鋸)刮除之個數為X,易拔除工件率係定為X/25×100%。After the ingot is opened, the number of the glue on the small ingot is not required to be scraped by alcohol and knife saw (wire saw), and the easy-to-extract workpiece rate is set to X/25×100%.

[工件缺角][Workpiece notch]

重度缺角:15/25個小晶錠有>10mm的缺角;中度缺角:10/25個小晶錠有5~10mm的缺角;輕度缺角:5/25個小晶錠有<5mm的缺角。Severe corners: 15/25 small crystal ingots with >10mm notch; moderate corners: 10/25 small ingots with 5~10mm corners; light corners: 5/25 small ingots There is a missing corner of <5mm.

功效比較:Comparison of efficacy:

比較例係為使用發泡膠以形成一緩衝和固定晶錠之材料,其缺點在於需要等待固化時間,且需要大量載台備料;在被夾持之晶錠開方完成後,由於發泡膠之黏著度相當高,故需要先利用線鋸將小晶錠及載台兩者分離,此時小晶錠與載台上皆存在大量殘膠,必須再利用另一刀鋸刮除殘膠才可完成製程。The comparative example is the use of styrofoam to form a material for buffering and fixing the ingot, which has the disadvantage of waiting for the curing time, and requires a large amount of carrier preparation; after the completion of the held ingot, due to the styrofoam The adhesion is quite high, so it is necessary to first separate the small ingot and the stage by using a wire saw. At this time, there are a large amount of residual glue on the small ingot and the stage, and the residual glue must be scraped off by another knife. Complete the process.

實施例1係為不具介質之晶錠夾持組合物,其亦具備緩衝與固定晶錠之特性,且該晶錠夾持組合物相較於比較例而言係不需等待發泡膠固化之時間,因而縮短製程之時間;而在分離小晶錠與載台時,其中係有8個小晶錠僅需施以側向力即可拔除,其餘17個小晶錠(68%)於加入酒精以輔佐剝離晶錠夾持組合物後,亦可輕易拔除,而不需使用刀鋸以刮除第一感壓膠材,故可在清除晶錠夾持組合物時大量節省人力及工時。Example 1 is an ingot holding composition without a medium, which also has the characteristics of buffering and fixing the ingot, and the ingot holding composition does not need to wait for the foaming rubber to be solidified compared with the comparative example. Time, thus shortening the process time; while separating the small ingots and the stage, 8 small ingots can be removed by applying only the lateral force, and the remaining 17 small ingots (68%) are added. After the alcohol is used to assist the peeling of the ingot to hold the composition, it can be easily removed without using a knife saw to scrape off the first pressure sensitive adhesive material, so that manpower and man-hour can be saved when the ingot holding composition is removed.

此外,為進一步在剝除晶錠夾持組合物中時,達到完整剝離之效果而無殘餘膠材之效果,故於實施例2及實施例3中,在第一感壓膠材與緩衝材料層間設置第一介質(PET),在第二感壓膠材與緩衝材料層間設置第二介質(PET),藉此形成一可撓性複合緩衝材(PET/EVA/PET),以使第一感壓膠材與第一介質可充分剝離,並使第二介質與第二感壓膠材可充分剝離,而設置該等介質所呈現之剝離功效係可由觀察殘膠率與易拔除工件率的表現而同理得到驗證。In addition, in the case of further removing the ingot holding composition, the effect of the complete peeling is achieved without the effect of residual glue, so in the second embodiment and the third embodiment, the first pressure sensitive adhesive and the cushioning material are used. A first medium (PET) is disposed between the layers, and a second medium (PET) is disposed between the second pressure sensitive adhesive material and the buffer material layer, thereby forming a flexible composite buffer material (PET/EVA/PET) to make the first The pressure sensitive adhesive material and the first medium can be sufficiently peeled off, and the second medium and the second pressure sensitive adhesive material can be sufficiently peeled off, and the peeling effect exhibited by the medium is set by observing the residual glue rate and the easy removal of the workpiece rate. Performance and the same reason are verified.

再更進一步,於實施例2中將第二感壓膠材的黏著力下降至1.5 kg,由表1可發現,實施例2中第二感壓膠材與載台間的殘膠率(36%)尚有不足;因此,為進一步強化晶錠夾持組合物之剝離能力,故於實施例3中將第二感壓膠材的黏著力下降至0.8 kg,雖然黏著力下降,但由於晶錠重量而施加在感壓膠材上之正向壓力仍使得感壓膠材具有相當大的黏著力,故第二感壓膠材的黏著力下降不會改變晶錠夾持組合物對於晶錠的固定能力,是以在實施例3中之晶錠夾持組合物係使得第二感壓膠材可完全自載台上剝離,故實施例3之晶錠夾持組合物係為本發明之最佳實施例。Further, in Example 2, the adhesion of the second pressure sensitive adhesive material was reduced to 1.5 kg, and the residual glue ratio between the second pressure sensitive adhesive material and the stage in Example 2 was found from Table 1. %) is still insufficient; therefore, in order to further strengthen the peeling ability of the ingot holding composition, the adhesion of the second pressure sensitive adhesive material is reduced to 0.8 kg in Example 3, although the adhesion is decreased, but the crystal The positive pressure exerted on the pressure sensitive adhesive by the weight of the ingot still makes the pressure sensitive adhesive material have a considerable adhesive force, so the adhesive force of the second pressure sensitive adhesive material does not change the ingot holding composition for the ingot. The fixing ability is such that the ingot holding composition in the embodiment 3 allows the second pressure sensitive adhesive to be completely peeled off from the stage, so the ingot holding composition of the third embodiment is the present invention. The preferred embodiment.

此外,在其它實施例中,本發明之晶錠夾持組合物所貼附的晶錠亦可進行其他種類的加工程序,在此所揭示的線鋸切割之加工程序僅為示例說明,然本發明之應用不限於此。In addition, in other embodiments, the ingot to which the ingot holding composition of the present invention is attached may be subjected to other kinds of processing procedures, and the processing procedure of the wire saw cutting disclosed herein is merely an example, but The application of the invention is not limited to this.

本發明在上文中已以較佳實施例揭露,然熟習本項技術者應理解的是,該實施例僅用於描繪本發明,而不應解讀為限制本發明之範圍。應注意的是,舉凡與該實施例等效之變化與置換,均應設為涵蓋於本發明之範疇內。因此,本發明之保護範圍當以申請專利範圍所界定者為準。The invention has been described above in terms of the preferred embodiments, and it should be understood by those skilled in the art that the present invention is not intended to limit the scope of the invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of protection of the present invention is defined by the scope of the patent application.

1‧‧‧晶錠夾持組合物1‧‧‧Ingot holding composition

11‧‧‧緩衝材料層11‧‧‧ cushioning material layer

12‧‧‧第一感壓膠材12‧‧‧First pressure sensitive adhesive

13‧‧‧第二感壓膠材13‧‧‧Second pressure sensitive adhesive

14‧‧‧第一介質14‧‧‧First medium

15‧‧‧第二介質15‧‧‧Second medium

100‧‧‧線鋸100‧‧‧ wire saw

120‧‧‧晶錠120‧‧‧Ingots

121‧‧‧單晶121‧‧‧ single crystal

130‧‧‧載台130‧‧‧stage

20‧‧‧晶錠20‧‧‧Ingots

30‧‧‧載台30‧‧‧stage

40‧‧‧線鋸40‧‧‧ wire saw

50‧‧‧間隙物50‧‧‧Interval

60‧‧‧泡沫膠60‧‧‧foam glue

第1圖為習知技術使用線鋸切割晶錠之示意圖。Figure 1 is a schematic view of a conventional technique for cutting an ingot using a wire saw.

第2圖為習知技術利用泡沫膠夾持晶錠時之使用狀態示意圖。Fig. 2 is a schematic view showing the state of use of a conventional technique for holding an ingot by using a foamed rubber.

第3圖為本發明之晶錠夾持組合物的斷面示意圖。Figure 3 is a schematic cross-sectional view of the ingot holding composition of the present invention.

第4圖為本發明晶錠夾持組合物之使用狀態示意圖。Fig. 4 is a view showing the state of use of the ingot holding composition of the present invention.

第5-8圖為本發明一具體實施例中,使用晶錠夾持組合物以夾持晶錠之流程示意圖。5-8 are schematic views showing the flow of holding an ingot by sandwiching a composition in an embodiment of the present invention.

第9圖為本發明較佳實施例之晶錠夾持組合物的段面示意圖。Figure 9 is a schematic cross-sectional view showing the ingot holding composition of the preferred embodiment of the present invention.

1‧‧‧晶錠夾持組合物1‧‧‧Ingot holding composition

11‧‧‧緩衝材料層11‧‧‧ cushioning material layer

12‧‧‧第一感壓膠材12‧‧‧First pressure sensitive adhesive

13‧‧‧第二感壓膠材13‧‧‧Second pressure sensitive adhesive

Claims (10)

一種晶錠夾持組合物,用於夾持一晶錠,並將該晶定固定於一載台上,該晶錠夾持組合物包含:一緩衝材料層;一第一感壓膠材,設於該緩衝材料層之一面,用以將該晶錠固持於該緩衝材料層上;以及一第二感壓膠材,設於該緩衝材料層之另一面,用以將該緩衝材料層貼附於該載台上。An ingot holding composition for holding an ingot and fixing the crystal on a stage, the ingot holding composition comprising: a buffer material layer; a first pressure sensitive material, Provided on one surface of the buffer material layer for holding the ingot on the buffer material layer; and a second pressure sensitive adhesive material disposed on the other side of the buffer material layer for layering the buffer material layer Attached to the stage. 如申請專利範圍第1項所述之晶錠夾持組合物,其中該第一感壓膠材及該第二感壓膠材係各自獨立選自聚氨酯系、矽氧樹脂系、聚甲基丙烯酸甲酯系或合成橡膠系等聚合物。The ingot-clamping composition of claim 1, wherein the first pressure-sensitive adhesive material and the second pressure-sensitive adhesive material are each independently selected from the group consisting of polyurethane, silicone resin, and polymethacrylic acid. A polymer such as a methyl ester or a synthetic rubber. 如申請專利範圍第1或2項所述之晶錠夾持組合物,其中構成該緩衝材料層之材料係選自發泡聚苯乙烯、發泡聚丙烯、發泡聚乙烯、發泡乙烯聚合物、乙烯-醋酸乙烯共聚物、矽氧樹脂、聚氨酯或合成橡膠。The ingot holding composition according to claim 1 or 2, wherein the material constituting the buffer material layer is selected from the group consisting of expanded polystyrene, expanded polypropylene, expanded polyethylene, and foamed ethylene polymer. , ethylene-vinyl acetate copolymer, enamel resin, polyurethane or synthetic rubber. 如申請專利範圍第1項所述之晶錠夾持組合物,更包含:一第一介質,設於該緩衝材料層與該第一感壓膠材之間;及一第二介質,設於該緩衝材料層與該第二感壓膠材之間;其中該第一介質與第二介質係可獨立選自聚苯乙烯、丙烯腈-丁二烯-苯乙烯、聚乙烯、乙二醇改性-聚對苯二甲酸乙二醇酯、聚硫酯、聚碳酸酯、聚氯乙烯、聚對苯 二甲酸乙二醇酯及壓克力等塑膠材料之一者。The ingot holding composition according to claim 1, further comprising: a first medium disposed between the buffer material layer and the first pressure sensitive adhesive material; and a second medium disposed on the second medium The buffer material layer and the second pressure sensitive adhesive material; wherein the first medium and the second medium are independently selected from the group consisting of polystyrene, acrylonitrile-butadiene-styrene, polyethylene, and ethylene glycol. - polyethylene terephthalate, polythioester, polycarbonate, polyvinyl chloride, polyparaphenyl One of plastic materials such as ethylene glycol dicarboxylate and acrylic. 如申請專利範圍第4項所述之晶錠夾持組合物,其中該第一感壓膠材及該第二感壓膠材係各自獨立選自聚氨酯系、矽氧樹脂系、聚甲基丙烯酸甲酯系或合成橡膠系等聚合物。The ingot-clamping composition of claim 4, wherein the first pressure sensitive adhesive material and the second pressure sensitive adhesive material are each independently selected from the group consisting of polyurethane, silicone resin, and polymethacrylic acid. A polymer such as a methyl ester or a synthetic rubber. 如申請專利範圍第4或5項所述之晶錠夾持組合物,其中構成該緩衝材料層之材料係選自發泡聚苯乙烯、發泡聚丙烯、發泡聚乙烯、發泡乙烯聚合物、乙烯-醋酸乙烯共聚物、矽氧樹脂、聚氨酯或合成橡膠。The ingot-clamping composition of claim 4, wherein the material constituting the buffer material layer is selected from the group consisting of expanded polystyrene, expanded polypropylene, expanded polyethylene, and foamed ethylene polymer. , ethylene-vinyl acetate copolymer, enamel resin, polyurethane or synthetic rubber. 一種夾持晶錠之方法,其係將如申請專利範圍第1或4項之晶錠夾持組合物以提供至一晶錠與一載台之間,該晶錠係藉由該晶錠夾持組合物的夾持而被固定於該載台。A method of holding an ingot by sandwiching a composition of an ingot according to claim 1 or 4 to provide an ingot to a stage, the ingot being held by the ingot The holder is held by the holding of the composition. 如申請專利範圍第7項所述之方法,其中當該晶錠藉由該晶錠夾持組合物的夾持而被固定於該載台時進行加工,待加工完成後,將單晶從側向取件。The method of claim 7, wherein the ingot is processed while being fixed to the stage by the clamping of the ingot holding composition, and after the processing is completed, the single crystal is from the side. Pick up. 如申請專利範圍第7項所述之方法,其中該第一感壓膠材及該第二感壓膠材係各自獨立選自聚氨酯系、矽氧樹脂系、聚甲基丙烯酸甲酯系或合成橡膠系等聚合物。The method of claim 7, wherein the first pressure sensitive adhesive material and the second pressure sensitive adhesive material are each independently selected from the group consisting of polyurethane, silicone resin, polymethyl methacrylate or synthetic. A polymer such as rubber. 如申請專利範圍第7、8或9項所述之方法,其中構成該緩衝材料層之材料係選自發泡聚苯乙烯、發泡聚丙烯、發泡聚乙烯、發泡乙烯聚合物、乙烯-醋酸乙烯共聚物、矽氧樹脂、聚氨酯或合成橡膠。The method of claim 7, wherein the material constituting the buffer material layer is selected from the group consisting of expanded polystyrene, expanded polypropylene, expanded polyethylene, expanded ethylene polymer, and ethylene. Vinyl acetate copolymer, epoxy resin, polyurethane or synthetic rubber.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5135727A (en) * 1990-11-29 1992-08-04 Shin-Etsu Handotai Co., Ltd. Automatic single crystal ingot disconnector for single crystal pulling apparatus
US5824153A (en) * 1995-12-13 1998-10-20 Komatsu Electronic Metals Co., Ltd Apparatus with movable arms for holding a single-crystal semiconductor ingot
EP0947612A2 (en) * 1997-12-11 1999-10-06 Leybold Systems GmbH Apparatus for holding a crystal ingot
US6390889B1 (en) * 1999-09-29 2002-05-21 Virginia Semiconductor Holding strip for a semiconductor ingot
EP2123394A1 (en) * 2008-05-20 2009-11-25 Sermas Industrie Device for holding an ingot for making cuts

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5135727A (en) * 1990-11-29 1992-08-04 Shin-Etsu Handotai Co., Ltd. Automatic single crystal ingot disconnector for single crystal pulling apparatus
US5824153A (en) * 1995-12-13 1998-10-20 Komatsu Electronic Metals Co., Ltd Apparatus with movable arms for holding a single-crystal semiconductor ingot
EP0947612A2 (en) * 1997-12-11 1999-10-06 Leybold Systems GmbH Apparatus for holding a crystal ingot
US6390889B1 (en) * 1999-09-29 2002-05-21 Virginia Semiconductor Holding strip for a semiconductor ingot
EP2123394A1 (en) * 2008-05-20 2009-11-25 Sermas Industrie Device for holding an ingot for making cuts

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