TWI443454B - Photosensitive composition, solder resist and photosensitive dry film - Google Patents

Photosensitive composition, solder resist and photosensitive dry film Download PDF

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TWI443454B
TWI443454B TW97107664A TW97107664A TWI443454B TW I443454 B TWI443454 B TW I443454B TW 97107664 A TW97107664 A TW 97107664A TW 97107664 A TW97107664 A TW 97107664A TW I443454 B TWI443454 B TW I443454B
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component
compound
photosensitive composition
mass
parts
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TW200844655A (en
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Makoto Hirakawa
Masao Takei
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Toagosei Co Ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/012Flame-retardant; Preventing of inflammation

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Description

感光性組成物,抗焊劑及感光性乾膜Photosensitive composition, solder resist and photosensitive dry film

本發明係關於一種可藉由曝光、顯像形成微細圖案之感光性組成物,使用該等組成物之抗焊劑及感光性乾膜。詳言之,本發明係關於可獲得難燃性、柔軟性、耐熱性、與金屬之密著性以及電絕緣性優異之硬化物的感光性組成物,使用該等組成物之抗焊劑及感光性乾膜。本發明之感光性組成物可使用作為光阻材料,尤其可使用作為印刷配線板之絕緣材料及抗焊劑材料,可使用於電氣、電子材料領域。The present invention relates to a photosensitive composition which can form a fine pattern by exposure and development, and uses a solder resist and a photosensitive dry film of the compositions. In particular, the present invention relates to a photosensitive composition which can obtain a cured product excellent in flame retardancy, flexibility, heat resistance, adhesion to metal, and electrical insulation, and uses the solder resist and photosensitive of the compositions. Dry film. The photosensitive composition of the present invention can be used as a photoresist material, and in particular, it can be used as an insulating material and a solder resist material for a printed wiring board, and can be used in the field of electrical and electronic materials.

最近伴隨著對電子設備之多機能化、高積體化、薄型化以及小型輕量化之要求,在印刷配線板中配線圖案進展為高密度化之同時,亦擴大需要薄且可彎曲之撓性配線板(以下稱為FPC)。伴隨於此,於配線板製造中所用之光阻材料等,除了要求有更高之高解像度以及高信賴性以外,為了對應於FPC,光阻劑本身具有柔軟性成為必要。Recently, with the demand for a large number of functions, high integration, thinning, and reduction in size and weight of electronic devices, wiring patterns have been increasing in density in printed wiring boards, and expansion is required to be thin and flexible. Wiring board (hereinafter referred to as FPC). Along with this, in addition to the higher resolution and high reliability required for the photoresist material used in the manufacture of the wiring board, it is necessary to have flexibility of the photoresist itself in accordance with the FPC.

再者電子設備中所用之零件大多為了確保安全性而有義務賦予符合UL規格之難燃性。尤其FPC時由於與印刷配線板相較其基板之滅火作用較小,故於FPC中所用之光阻劑本身要求有高的難燃性。In addition, most of the components used in electronic equipment are obligated to impart flame retardancy in accordance with UL specifications in order to ensure safety. In particular, in FPC, since the fire extinguishing effect of the substrate is small compared with the printed wiring board, the photoresist used in the FPC itself requires high flame retardancy.

印刷配線板製造中所用之具有難燃性之抗焊劑迄今提 出有溴化環氧化合物與銻化合物作為難燃劑者(專利文獻1)。A flame retardant solder used in the manufacture of printed wiring boards has been proposed so far. A brominated epoxy compound and a ruthenium compound are produced as a flame retardant (Patent Document 1).

然而,含有溴等鹵素之組成物雖顯示高的難燃效果,但另一方面,由於燃燒時有發生有害戴奧辛化合物之虞慮,因此近年來,要求有材料之非鹵素化。However, although a composition containing a halogen such as bromine exhibits a high flame retarding effect, on the other hand, since harmful dioxin compounds are generated during combustion, in recent years, non-halogenation of materials has been demanded.

作為非鹵素系之難燃性組成物已知有無機氫氧化物(專利文獻2)、由磷酸酯所構成之磷系難燃劑(專利文獻3)以及併用水合金屬化合物及氮化合物(專利文獻4)。然而,如無機氫氧化物(水合金屬化合物)般之無機填料成份其難燃效果比鹵素系難燃劑或磷系難燃劑等均為低,若調配可充分獲得難燃效果之量,則有絕緣信賴性降低之問題。又,尤其是使用於FPC用途時,若填料成份多則硬化物失去柔軟性而發生基板彎曲。另一方面,由磷酸酯所構成之磷系難燃劑之難燃效果比較高,一般以比無機氫氧化物少之調配量可獲得充分的難燃性。然而,磷酸酯等之難燃劑亦有耐熱性或絕緣信賴性降低之問題。又,尤其是曝光顯像時之解像性有大為降低的問題。An inorganic hydroxide (Patent Document 2), a phosphorus-based flame retardant composed of a phosphate ester (Patent Document 3), and a hydrated metal compound and a nitrogen compound are known as a non-halogen-based flame retardant composition (Patent Literature) 4). However, the inorganic filler component such as an inorganic hydroxide (hydrated metal compound) has a lower flame retarding effect than a halogen-based flame retardant or a phosphorus-based flame retardant, and if it is formulated to sufficiently obtain a flame retardant effect, There is a problem of reduced insulation reliability. Further, especially when used in FPC applications, if the filler component is large, the cured product loses flexibility and the substrate is bent. On the other hand, the phosphorus-based flame retardant composed of a phosphate ester has a relatively high flame retarding effect, and generally, a sufficient flame retardancy can be obtained with a smaller amount than the inorganic hydroxide. However, a flame retardant such as a phosphate ester also has a problem of lowering heat resistance or insulation reliability. Further, in particular, the resolution at the time of exposure development is greatly lowered.

磷系難燃劑亦已知有膦酸鹽(專利文獻5)。Phosphonates are also known as phosphorus-based flame retardants (Patent Document 5).

專利文獻1:特開平11-242331號公報 專利文獻2:特開2006-194968號公報 專利文獻3:特開2001-183819號公報 專利文獻4:特開2004-12810號公報 專利文獻5:特開2003-301013號公報Patent Document 1: Japanese Patent Publication No. 11-242331 Patent Document 2: JP-A-2006-194968 Patent Document 3: JP-A-2001-183819 Patent Document 4: JP-A-2004-12810 Patent Document 5: JP-A-2003-301013

如上述,過去之抗焊劑組成物於維持難燃性同時適用於薄型印刷配線板或FPC方面仍有問題。As described above, the conventional solder resist composition is still problematic in that it is suitable for a thin printed wiring board or FPC while maintaining flame retardancy.

本發明人等為了發現具有充分難燃性且解像性以及保存安定性優異、其硬化物之述及耐熱性及電絕緣性之作為抗焊劑所必須之特性得以維持同時進而柔軟性亦優異,而亦可使用於薄型印刷配線板或FPC基板之含有非鹵素系難燃劑之感光組成物而進行廣泛檢討。The inventors of the present invention have been found to have sufficient flame retardancy, and are excellent in resolution and storage stability, and the properties necessary for the solder resist, the heat resistance and the electrical insulating properties are maintained, and the flexibility is also excellent. Further, it can be widely used for a photosensitive composition containing a non-halogen-based flame retardant on a thin printed wiring board or an FPC board.

為解決上述問題,申請專利範圍第1項所述之本發明感光性組成物含有具有源自環氧化合物骨架且具備羧基以及游離基聚合性基之化合物(A)、丙烯酸胺基甲酸酯(B)、具有游離基聚合性基之除(A)與(B)以外之聚合性化合物(C)、含磷原子之填料(D)以及光聚合起始劑(E)。In order to solve the above problem, the photosensitive composition of the present invention described in claim 1 contains the compound (A) having a carboxyl group derived from an epoxy compound skeleton and having a carboxyl group and a radical polymerizable group, and an urethane amide ( B) A polymerizable compound (C) other than (A) and (B) having a radical polymerizable group, a filler (D) containing a phosphorus atom, and a photopolymerization initiator (E).

申請專利範圍第2項所述之本發明感光性組成物為如申請專利範圍第1項之發明,其中以成份(A)及成份(B)之合計量100質量份為基準,含有20~90質量份之成份(A),10~80質量份之成份(B),5~50質量份之成份(C)。The photosensitive composition of the present invention described in claim 2 is the invention of claim 1, wherein the composition of the component (A) and the component (B) is 100 parts by mass based on 100 parts by weight. Parts by mass (A), 10 to 80 parts by mass of component (B), and 5 to 50 parts by mass of component (C).

申請專利範圍第3項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中以成份(A)、成份(B)及成份(C)之合計量100質量份為基準,含有1~150質量份之成份(D)。The photosensitive composition of the present invention according to the third aspect of the invention is the invention of claim 1, wherein the total amount of the component (A), the component (B) and the component (C) is 100 parts by mass. As a standard, it contains 1 to 150 parts by mass of the component (D).

申請專利範圍第4項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中具有源自環氧化合物之骨架且具備羧基以及游離基聚合性基之化合物(A)係使環氧化合物與不飽和單羧酸進行加成反應,並使所生成之羥基與多元酸酐進行加成反應所得之化合物。The photosensitive composition of the present invention according to claim 4, which is the invention of claim 1, wherein the compound having a skeleton derived from an epoxy compound and having a carboxyl group and a radical polymerizable group (A) A compound obtained by subjecting an epoxy compound to an unsaturated monocarboxylic acid to an addition reaction and subjecting the produced hydroxyl group to a polybasic acid anhydride.

申請專利範圍第5項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中丙烯酸胺基甲酸酯(B)為具有聚碳酸酯多元醇骨架之化合物。The photosensitive composition of the present invention according to claim 5, wherein the urethane urethane (B) is a compound having a polycarbonate polyol skeleton.

申請專利範圍第6項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中丙烯酸胺基甲酸酯(B)為具有不具有羧基之聚碳酸酯多元醇骨架之化合物。The photosensitive composition of the present invention according to claim 6 is the invention of claim 1, wherein the urethane acrylate (B) is a polycarbonate polyol skeleton having no carboxyl group. Compound.

申請專利範圍第7項所述之本發明感光性組成物為如申請專利範圍第6項所述之發明,其中具備不具有羧基之聚碳酸酯多元醇骨架之化合物的丙烯酸胺基甲酸酯(B)之質量平均分子量為2,000~50,000。The photosensitive composition of the present invention described in claim 7 is the invention of claim 6, wherein the urethane amide having a compound of a polycarbonate polyol skeleton having no carboxyl group ( B) has a mass average molecular weight of 2,000 to 50,000.

申請專利範圍第8項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中具有游離基聚合性基之除(A)及(B)以外之聚合性化合物(C)為1分子中具有3個以上之(甲基)丙烯醯基之化合物。The photosensitive composition of the present invention described in claim 8 is the invention according to the first aspect of the invention, wherein the polymerizable compound other than (A) and (B) having a radical polymerizable group is C) is a compound having three or more (meth) acrylonitrile groups in one molecule.

申請專利範圍第9項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中含磷原子之填料(D)為磷之含氧酸類之金屬鹽。The photosensitive composition of the present invention described in claim 9 is the invention according to the first aspect of the invention, wherein the filler (D) containing a phosphorus atom is a metal salt of an oxyacid of phosphorus.

申請專利範圍第10項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中含磷原子之填料(D)為膦酸之金屬鹽。The photosensitive composition of the present invention as set forth in claim 10 is the invention of claim 1, wherein the filler (D) containing a phosphorus atom is a metal salt of a phosphonic acid.

申請專利範圍第11項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中含磷原子之填料(D)為膦酸之鋁鹽。The photosensitive composition of the present invention described in claim 11 is the invention according to claim 1, wherein the filler (D) containing a phosphorus atom is an aluminum salt of a phosphonic acid.

申請專利範圍第12項所述之本發明感光性組成物為如申請專利範圍第1項所述之發明,其中亦含有含磷原子之填料(D)以外之磷化合物(F)。The photosensitive composition of the present invention described in claim 12 is the invention according to the first aspect of the invention, and further contains a phosphorus compound (F) other than the filler (D) containing a phosphorus atom.

申請專利範圍第13項所述之本發明抗焊劑之特徵為含有如申請專利範圍第1~12項中任一項所述之感光性組成物。The solder resist of the present invention according to claim 13 is characterized in that the photosensitive composition according to any one of claims 1 to 12 is contained.

申請專利範圍第14項所述之本發明感光性乾膜之特徵係在支撐薄膜上形成含有申請專利範圍第1~12項中任一項之感光性組成物之被覆膜。The photosensitive dry film of the present invention described in claim 14 is characterized in that a coating film containing the photosensitive composition according to any one of claims 1 to 12 is formed on a support film.

以下詳細的說明本發明。The invention is described in detail below.

另外,本說明書中丙烯酸酯及甲基丙烯酸酯統稱為(甲基)丙烯酸酯。又,丙烯基及甲基丙烯基統稱為(甲基 )丙烯基。Further, in the present specification, acrylate and methacrylate are collectively referred to as (meth) acrylate. Further, the propylene group and the methacryl group are collectively referred to as (methyl group). ) propylene based.

依據本發明,不使用含有鹵素原子之難燃劑,而獲得可賦予硬化物優異難燃性、柔軟性、耐熱性、電絕緣性,且解像性及儲存安定性良好之感光性組成物。According to the present invention, it is possible to obtain a photosensitive composition which is excellent in flame retardancy, flexibility, heat resistance and electrical insulating properties, and which is excellent in resolution and storage stability, without using a flame retardant containing a halogen atom.

另外,以成份(A)及成份(B)之總量100質量份為基準,於含有20~90質量份之成份(A)、10~80質量份之成份(B)、5~50質量份之成份(C)時,可成為藉由鹼性水溶液之顯像性充分且硬化塗膜之柔軟性充分之感光性組成物。In addition, the component (B) and the component (B) and 5 to 50 parts by mass of the component (A) and 10 to 80 parts by mass based on 100 parts by mass of the total of the component (A) and the component (B). In the case of the component (C), it is possible to obtain a photosensitive composition which is sufficiently developed by an aqueous alkaline solution and which has sufficient flexibility of the cured coating film.

再者,以成份(A)、成份(B)及成份(C)之總量100質量份為基準,含有1~150質量份之成份(D)時,可成為難燃性改善效果相當充分且硬化物被覆膜之柔軟性或絕緣信賴性等物性不會降低之感光性組成物。In addition, when the component (D) is contained in an amount of from 1 to 150 parts by mass based on 100 parts by mass of the total of the component (A), the component (B) and the component (C), the flame retardancy improvement effect is sufficiently sufficient. A photosensitive composition in which the physical properties of the cured coating film such as flexibility or insulation reliability are not lowered.

另外,具有源自環氧化合物之骨架且具備羧基以及游離基聚合性基之化合物(A),為使環氧化合物與不飽和單羧酸進行加成反應,且使產生之羥基與多元酸酐進行加成反應所得之化合物時,可成為解像性與硬化物之柔軟性優異之感光性組成物。Further, the compound (A) having a carboxyl group and a radical polymerizable group derived from a skeleton of an epoxy compound is subjected to an addition reaction of an epoxy compound and an unsaturated monocarboxylic acid, and the generated hydroxyl group and the polybasic acid anhydride are subjected to an addition reaction. When the compound obtained by the addition reaction is used, it is a photosensitive composition which is excellent in the resolvability and the softness of the cured product.

再者,丙烯酸胺基甲酸酯(B)為具有聚碳酸酯多元醇骨架之化合物時,可成為硬化物之絕緣信賴性優異之感光性組成物。In addition, when the urethane urethane (B) is a compound having a polycarbonate polyol skeleton, it can be a photosensitive composition excellent in insulation reliability of a cured product.

另外,丙烯酸胺基甲酸酯(B)為具備不具有羧基之聚碳酸酯多元醇骨架之化合物時,可以成為硬化物之耐水性 以及絕緣信賴‘∣生優異之感光‘∣生組成物。Further, when the urethane urethane (B) is a compound having a polycarbonate polyol skeleton having no carboxyl group, it can be water resistance of the cured product. And the insulation relies on the 'sensitive sensitization' twin composition.

再者,具備不具有羧基之聚碳酸酯多元醇骨架之化合物之丙烯酸胺基甲酸酯(B)之質量平均分子量為2,000~50,000時,可成為解像性與硬化物之柔軟性優異之感光性組成物。In addition, when the mass average molecular weight of the urethane urethane (B) having a compound having a polycarbonate polyol skeleton having no carboxyl group is 2,000 to 50,000, it is excellent in the resolution and the softness of the cured product. Sexual composition.

又,具有游離基之除(A)及(B)以外之聚合性化合物(C)為每1分子中具有3個以上(甲基)丙烯醯基之化合物時,可成為其硬化物具有高的絕緣信賴性之感光性組成物。In addition, when the polymerizable compound (C) other than (A) and (B) having a radical is a compound having three or more (meth)acryl fluorenyl groups per molecule, the cured product can be made high. A photosensitive composition that is insulating and reliable.

再者,若含有磷原子之填料(D)為磷之含氧酸之金屬鹽時,可成為解像性優異且硬化物具有高的難燃性以及絕緣信賴性之感光組成物。In addition, when the filler (D) containing a phosphorus atom is a metal salt of phosphorus oxyacid, it can be used as a photosensitive composition which is excellent in resolution and has high flame retardancy and insulation reliability.

又,含磷原子之填料(D)若為膦酸類之金屬鹽時,可成為解像性更優異,且硬化物具有更高難燃性及絕緣信賴性之感光性組成物。In addition, when the filler (D) containing a phosphorus atom is a metal salt of a phosphonic acid, it is excellent in resolution, and the cured product has a photosensitive composition having higher flame retardancy and insulation reliability.

再者,含磷原子之填料(D)若為膦酸類之鋁鹽時,可成為解像性特別優異且硬化物具有特別高的難燃性及絕緣信賴性之感光性組成物。In addition, when the filler (D) containing a phosphorus atom is an aluminum salt of a phosphonic acid, it can become a photosensitive composition which is especially excellent in resolution, and the hardened|cured material has the outstanding high flame retardance and insulation reliability.

另外,若含有除含磷原子之填料(D)以外之磷化合物(F)時,則可成為可獲得更有效之難燃性高之硬化物之感光性組成物。In addition, when the phosphorus compound (F) other than the filler (D) containing a phosphorus atom is contained, it is possible to obtain a photosensitive composition which is more effective and has a high flame retardancy.

本發明之抗焊劑可用於薄型印刷配線板或FPC基板之加工。The solder resist of the present invention can be used for processing of a thin printed wiring board or an FPC substrate.

本發明之感光性乾膜較好用作為電子材料The photosensitive dry film of the invention is preferably used as an electronic material

〔實施本發明之最佳形態〕[Best Mode for Carrying Out the Invention] 1.(A)成份1. (A) ingredients

(A)成份為具有源自環氧化合物骨架且具備羧基以及游離基聚合性基之化合物。The component (A) is a compound having a carboxyl group derived from an epoxy compound skeleton and a radical polymerizable group.

作為(A)成份,可使用各種化合物,較佳之具體例舉例為例如使環氧化合物(環氧樹脂)與不飽和單羧酸反應製造具有羥基之化合物,使該具有羥基之化合物之羥基一部分或全部與飽和或不飽和多元酸酐(以下稱為多元酸酐)進行加成反應而成之反應物等。As the component (A), various compounds can be used. Preferred examples are, for example, reacting an epoxy compound (epoxy resin) with an unsaturated monocarboxylic acid to produce a compound having a hydroxyl group, or a part of the hydroxyl group of the compound having a hydroxyl group or A reaction product obtained by subjecting all of a saturated or unsaturated polybasic acid anhydride (hereinafter referred to as a polybasic acid anhydride) to an addition reaction.

該情況下使用之環氧樹脂之例舉例為雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、苯酚酚醛型環氧樹脂、甲酚酚醛型環氧樹脂以及多酚型環氧樹脂等。Examples of the epoxy resin used in this case are bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, phenol novolak type epoxy resin, and cresol novolac type epoxy resin. And polyphenol type epoxy resin and the like.

不飽和單羧酸之例為丙烯酸、甲基丙烯酸、巴豆酸及桂皮酸等。Examples of the unsaturated monocarboxylic acid are acrylic acid, methacrylic acid, crotonic acid, and cinnamic acid.

多元酸酐為馬來酸酐、琥珀酸柑、衣康酸酐、苯二甲酸酐、四氫苯二甲酸酐及偏苯三酸酐等。The polybasic acid anhydrides are maleic anhydride, succinoic acid, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, and trimellitic anhydride.

多元酸酐相對於具有羥基之化合物之反應比例並無特別限制,但相對於具有羥基之化合物之羥基1莫耳,多元酸酐較好為0.1~1.0莫耳,更好為0.2~0.9莫耳。若該比例未達0.1莫耳,則由於於鹼液之溶解‘性不足,導致感光性組成物之鹼顯像性降低。另一方面,若該比例超過1.0莫 耳,則由於殘留未反應之多元酸酐,而有未反應之多元酸酐結晶化之顧慮,或者在大多情況下,由於保存期間會引起殘留羥基與未反應多元酸酐之反應,因此有組合物之保存安定性降低之顧慮。The reaction ratio of the polybasic acid anhydride to the compound having a hydroxyl group is not particularly limited, but the polybasic acid anhydride is preferably from 0.1 to 1.0 mol, more preferably from 0.2 to 0.9 mol, based on 1 mol of the hydroxyl group of the compound having a hydroxyl group. If the ratio is less than 0.1 mol, the alkali-developing property of the photosensitive composition is lowered due to insufficient solubility in the lye. On the other hand, if the ratio exceeds 1.0 In the case of the ear, there is a concern that the unreacted polybasic acid anhydride remains, and the unreacted polybasic acid anhydride is crystallized, or in most cases, the composition is preserved due to the reaction between the residual hydroxyl group and the unreacted polybasic acid anhydride during storage. Concerns about reduced stability.

(A)成份,於上述中,為了使之成為解像性與硬化物之柔軟性優異者,較佳為具有羧基之雙酚型環氧(甲基)丙烯酸酯。環氧(甲基)丙烯酸酯為具有使環氧化合物與(甲基)丙烯酸進行加成反應所得構造之化合物。In the above, the component (A) is preferably a bisphenol epoxy (meth)acrylate having a carboxyl group in order to provide excellent resolution and softness of the cured product. The epoxy (meth) acrylate is a compound having a structure obtained by subjecting an epoxy compound and (meth)acrylic acid to an addition reaction.

2.(B)成份2. (B) ingredients

(B)成份為(甲基)丙烯酸胺基甲酸酯化合物。The component (B) is a (meth)acrylic acid urethane compound.

(B)成份亦可使用各種市售品,舉例為例如多元醇與多價異氰酸酯及含有羥基之(甲基)丙烯酸酯之反應物等。As the component (B), various commercially available products can be used, and examples thereof include a reaction product of a polyhydric alcohol with a polyvalent isocyanate and a hydroxyl group-containing (meth) acrylate.

(B)成份,於上述中,為使成為硬化物之絕緣信賴性優異者,因此較好為具有聚碳酸酯多元醇骨架之(甲基)丙烯酸胺基甲酸酯。In the above, the component (B) is excellent in insulation reliability of the cured product, and therefore it is preferably a (meth)acrylic acid urethane having a polycarbonate polyol skeleton.

具有聚碳酸酯多元醇骨架之(甲基)丙烯酸胺基甲酸酯亦可使用各種市售品,例如可使用聚碳酸酯多元醇與多價異氰酸酯及含有羥基之(甲基)丙烯酸酯之反應產物等。A (meth)acrylic acid urethane having a polycarbonate polyol skeleton can also be used in various commercial products, for example, a reaction of a polycarbonate polyol with a polyvalent isocyanate and a hydroxyl group-containing (meth) acrylate can be used. Product, etc.

聚碳酸酯多元醇之例舉例為使具有伸烷基、烷基、芳香族烴基、環鏈烷系烴基等之碳酸酯與具有伸烷基、烷基 、芳香族烴基、環鏈烷系烴基等之多元醇反應而獲得之聚碳酸酯多元醇。Examples of the polycarbonate polyol are exemplified by a carbonate having an alkyl group, an alkyl group, an aromatic hydrocarbon group, a cycloalkane hydrocarbon group, or the like, and an alkyl group having an alkyl group and an alkyl group. A polycarbonate polyol obtained by reacting a polyhydric alcohol such as an aromatic hydrocarbon group or a cycloalkane hydrocarbon group.

碳酸酯之較佳具體例為例如碳酸二甲酯、碳酸二乙酯、碳酸二苯酯、碳酸乙二酯、碳酸丙二酯以及碳酸二環己酯等。Preferable specific examples of the carbonate are, for example, dimethyl carbonate, diethyl carbonate, diphenyl carbonate, ethylene carbonate, propylene carbonate, and dicyclohexyl carbonate.

另外,多元醇之較佳具體例為例如1,6-己二醇、1,4-環己烷二甲醇、3-甲基-1,5-戊烷二醇、1,5-戊烷二醇、聚氧乙二醇、聚氧丙二醇、聚氧丁二醇、聚己內酯二醇、三甲基己烷二醇、以及1,4-丁二醇等。Further, preferred specific examples of the polyhydric alcohol are, for example, 1,6-hexanediol, 1,4-cyclohexanedimethanol, 3-methyl-1,5-pentanediol, 1,5-pentane 2 Alcohol, polyoxyethylene glycol, polyoxypropylene glycol, polyoxybutylene glycol, polycaprolactone diol, trimethyl hexane diol, and 1,4-butanediol.

此處,碳酸酯以及多元醇可使用1種或者亦可併用2種以上之分子量或組成不同者。Here, the carbonate and the polyhydric alcohol may be used alone or in combination of two or more kinds of molecular weights or compositions.

較佳之多價異氰酸酯為甲苯二異氰酸酯、二苯基甲烷二異氰酸酯、異佛爾酮二異氰酸酯、六亞甲基二異氰酸酯及氫化二苯基甲烷二異氰酸酯等。Preferred polyvalent isocyanates are toluene diisocyanate, diphenylmethane diisocyanate, isophorone diisocyanate, hexamethylene diisocyanate, hydrogenated diphenylmethane diisocyanate and the like.

較佳之含有羥基之(甲基)丙烯酸酯為(甲基)丙烯酸羥基乙酯及(甲基)丙烯酸羥基丙酯等(甲基)丙烯酸羥基烷酯。Preferred (meth) acrylates having a hydroxyl group are hydroxyalkyl (meth)acrylates such as hydroxyethyl (meth)acrylate and hydroxypropyl (meth)acrylate.

作為(B)成份,於上述中,為使硬化物之耐水性以及絕緣信賴性優異,因此較好為不具有羧基之(甲基)丙烯酸胺基甲酸酯。In the above, the (B) component is excellent in water resistance and insulation reliability of the cured product, and therefore it is preferably a (meth)acrylic acid urethane having no carboxyl group.

較佳之(B)成份,亦即不具有羧基之(甲基)丙烯酸胺基甲酯,其質量平均分子量較好為2,000~50,000,更好為5,000~20,000,若質量平均分子量未達2,000,則有時硬 化物之柔軟性不足,另一方面,若超過50,000則由於解像度降低因此較不佳。Preferably, the component (B), that is, the aminomethyl (meth)acrylate having no carboxyl group, has a mass average molecular weight of preferably 2,000 to 50,000, more preferably 5,000 to 20,000, and if the mass average molecular weight is less than 2,000, Sometimes hard The softness of the compound is insufficient, and on the other hand, if it exceeds 50,000, the resolution is lowered, which is not preferable.

(A)成份、(B)成份之較佳調配比例,以(A)成份與(B)成份之合計作為100質量份,(A)成份在20~90質量份之範圍內。未達20質量份時,藉由鹼性水溶液之顯像性不足,超過90質量份時,則硬化物之柔軟性不足而不佳。更好之範圍為40~80質量份。The preferred blending ratio of the component (A) and the component (B) is 100 parts by mass of the total of the components (A) and (B), and the component (A) is in the range of 20 to 90 parts by mass. When the amount is less than 20 parts by mass, the development property of the alkaline aqueous solution is insufficient, and when it exceeds 90 parts by mass, the softness of the cured product is insufficient. A better range is 40 to 80 parts by mass.

3.(C)成份3. (C) ingredients

(C)成份為具有游離聚合性基之除(A)及(B)以外之聚合性化合物。The component (C) is a polymerizable compound other than (A) and (B) having a free polymerizable group.

作為(C)成份所具有之游離基聚合性基可舉例較佳者為游離基聚合性之碳-碳雙鍵,最佳者為丙烯醯基、甲基丙烯醯基、烯丙基或乙烯基等。The radical polymerizable group which the (C) component has may be preferably a radical polymerizable carbon-carbon double bond, and the most preferred one is an acrylonitrile group, a methacryl fluorenyl group, an allyl group or a vinyl group. Wait.

具有1個游離基聚合性基之聚合性化合物(C)之具體例可舉例為(甲基)丙烯酸甲酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸羥基乙酯及(甲基)丙烯酸羥基丙酯等之官能基(甲基)丙烯酸酯;苯乙烯等具有乙烯基之化合物;以及烯丙基酚等具有烯丙基之化合物等。Specific examples of the polymerizable compound (C) having one radical polymerizable group may, for example, be methyl (meth)acrylate, butyl (meth)acrylate, or 2-ethylhexyl (meth)acrylate, ( A functional group (meth) acrylate such as hydroxyethyl methacrylate or hydroxypropyl (meth) acrylate; a compound having a vinyl group such as styrene; and a compound having an allyl group such as allyl phenol.

具有2個游離基聚合性基之聚合性化合物(C)之具體例可舉例為1,3-丁烷二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯及聚 丙二醇二(甲基)丙烯酸酯等二(甲基)丙烯酸酯;二乙烯基苯等之乙烯基化合物;以及苯二甲酸二烯丙酯等之烯丙基化合物。Specific examples of the polymerizable compound (C) having two radical polymerizable groups are 1,3-butanediol di(meth)acrylate, diethylene glycol di(meth)acrylate, and poly Ethylene glycol di(meth)acrylate and poly a di(meth)acrylate such as propylene glycol di(meth)acrylate; a vinyl compound such as divinylbenzene; and an allyl compound such as diallyl phthalate.

具有3個以上游離基聚合性基之聚合性化合物(C)之具體例可舉例為三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯及三烯丙基異尿氰酸酯等。Specific examples of the polymerizable compound (C) having three or more radical polymerizable groups include trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, and dipentaerythritol hexa(methyl). ) acrylate and triallyl isocyanurate.

為成為硬化物為具有較高絕緣信賴性者,較好使用具有3個以上之游離基聚合性基之化合物作為(C)成份。更好為1分子中具有3個以上(甲基)丙烯醯基之化合物。In order to obtain a cured product having high insulation reliability, a compound having three or more radical polymerizable groups is preferably used as the component (C). More preferably, it is a compound which has three or more (meth) propylene groups in one molecule.

(C)成份之較佳調配比例,相對於以(A)成份及(B)成份之合計為100質量份,為5~50質量份,尤其是在5~20質量份之範圍內。若該比例未達5質量份,則硬化物之交聯密度變得不足且焊料耐熱性或絕緣信賴性降低,若超過50質量份則會使硬化物之柔軟性降低。The preferred blending ratio of the component (C) is 5 to 50 parts by mass, particularly in the range of 5 to 20 parts by mass, based on 100 parts by mass of the total of the components (A) and (B). When the ratio is less than 5 parts by mass, the crosslinking density of the cured product becomes insufficient, and solder heat resistance or insulation reliability is lowered. When the ratio exceeds 50 parts by mass, the softness of the cured product is lowered.

4.(D)成份4. (D) ingredients

(D)成份為含磷原子之填料。本發明中,填料意指無法溶解於感光性組成物中而係經分散,亦即在常溫(10~30℃)下為固體者。成份(D)係用以對組成物賦予難燃性之成份。(D) The component is a filler containing a phosphorus atom. In the present invention, the filler means that it is insoluble in the photosensitive composition and is dispersed, that is, it is solid at normal temperature (10 to 30 ° C). Ingredient (D) is a component which imparts flame retardancy to the composition.

作為難燃成份之含磷原子之填料般之與組成物中之樹脂成份、有機溶劑等不相溶而藉由以微粒子使用,對於源 自樹脂〔成份(A)、(B)、(C)〕之組成物或硬化物之物性,尤其是感光性或對於顯像液之溶解性之不良影響可變小,而使用作為光阻劑時可展現高的解像性。再者含磷原子者與無機氫氧化物般之填料相比較,可以低調配量獲得高的難燃性。As a filler containing a phosphorus atom as a flame retardant component, it is incompatible with a resin component, an organic solvent, or the like in the composition, and is used as a microparticle. The physical properties of the composition of the resin [component (A), (B), (C)] or the cured product, especially the photosensitivity or the solubility to the developing solution, may be small, and used as a photoresist. It exhibits high resolution. Further, those having a phosphorus atom can obtain a high flame retardancy at a low dosage compared with an inorganic hydroxide-like filler.

含磷原子之填料之具體例可舉例為膦酸鹽化合物、二乙基膦酸鹽化合物、二丁基膦酸鹽化合物、二羥基甲基膦酸鹽化合物、聚磷酸銨、聚磷酸三聚氰胺、磷酸胍等。Specific examples of the filler containing a phosphorus atom are exemplified by a phosphonate compound, a diethylphosphonate compound, a dibutylphosphonate compound, a dihydroxymethylphosphonate compound, ammonium polyphosphate, melamine polyphosphate, and phosphoric acid. Hey.

作為(D)成份,為使感光性組成物具有高的解像性且使硬化物具有高的難燃性以及絕緣信賴性,較好使用磷之含氧酸之金屬鹽類,更好使用膦酸類之金屬鹽。本發明中,膦酸類意指膦酸或與膦酸之磷原子鍵結之氫原子之1個或2個經烷基、芳基或鹵素原子取代之化合物合稱之化合物群。上述之烷基以及芳基亦可具有羥基、烷氧基等取代基。As the component (D), in order to impart high resolution to the photosensitive composition and to have high flame retardancy and insulation reliability of the cured product, it is preferred to use a metal salt of phosphorus oxyacid, and it is preferable to use phosphine. A metal salt of an acid. In the present invention, the phosphonic acid means a group of compounds which are collectively referred to as a phosphonic acid or a compound in which one or two hydrogen atoms bonded to a phosphorus atom of a phosphonic acid are substituted by an alkyl group, an aryl group or a halogen atom. The above alkyl group and aryl group may have a substituent such as a hydroxyl group or an alkoxy group.

膦酸類之例可舉例為膦酸、苯基膦酸、二苯基膦酸、甲基膦酸、二甲基膦酸、乙基膦酸、二乙基膦酸、丁基膦酸、二丁基膦酸、苯基氯膦酸、二羥基甲基膦酸等。Examples of the phosphonic acid can be exemplified by phosphonic acid, phenylphosphonic acid, diphenylphosphonic acid, methylphosphonic acid, dimethylphosphonic acid, ethylphosphonic acid, diethylphosphonic acid, butylphosphonic acid, and dibutyl. Phosphonic acid, phenylchlorophosphonic acid, dihydroxymethylphosphonic acid, and the like.

磷之含氧酸之例除上述膦酸類以外,可舉例為次磷酸、二次磷酸、磷酸、焦磷酸、偏磷酸、過氧磷酸、過氧二磷酸、二磷酸、二硫代磷酸、苯基次磷酸、甲基次磷酸、乙基次磷酸、羥基甲基次磷酸等。Examples of the phosphorus oxyacid include, in addition to the above phosphonic acids, hypophosphorous acid, phosphoric acid, phosphoric acid, pyrophosphoric acid, metaphosphoric acid, peroxyphosphoric acid, peroxydiphosphate, diphosphoric acid, dithiophosphoric acid, and phenyl. Hypophosphorous acid, methyl hypophosphorous acid, ethyl hypophosphorous acid, hydroxymethyl hypophosphorous acid, and the like.

另外,構成金屬鹽之元素可舉例為鈉等鹼金屬、鎂等 鹼土類金屬、屬於週期表13族之鋁等金屬元素,以及屬於週期表8族等之鐵等過渡金屬元素,作為金屬尤其是鋁鹽,由於可使組成物具有高的解像性,以及易成為具有高的難燃性、絕緣信賴性之硬化物故而較佳,且最好為膦酸鋁鹽。Further, the element constituting the metal salt can be exemplified by an alkali metal such as sodium, magnesium, or the like. An alkaline earth metal, a metal element such as aluminum belonging to Group 13 of the periodic table, and a transition metal element such as iron belonging to Group 8 of the periodic table, as a metal, particularly an aluminum salt, can make the composition have high resolution and easy It is preferably a cured product having high flame retardancy and insulation reliability, and is preferably an aluminum phosphonate salt.

(D)成份較好為平均粒徑0.5~15μm,尤其是1~5μm者。若平均粒徑超過15μm則會有柔軟性變差之情況。又,尤其是使用作為膜厚50μm以下之薄膜之感光性乾膜時,有薄膜之表面狀態惡化之情況。另一方面,若平均粒徑未達0.5μm,由於含磷原子之薄膜之鬆密度變小,因此有將含磷原子之填料分散於其他成份中變困難之情況。The component (D) preferably has an average particle diameter of 0.5 to 15 μm, especially 1 to 5 μm. If the average particle diameter exceeds 15 μm, the flexibility may be deteriorated. Further, in particular, when a photosensitive dry film which is a film having a film thickness of 50 μm or less is used, the surface state of the film may be deteriorated. On the other hand, when the average particle diameter is less than 0.5 μm, since the bulk density of the film containing a phosphorus atom becomes small, it is difficult to disperse the filler containing a phosphorus atom in other components.

(D)成份之調配量,以(A)成份、(B)成份及(C)成份之合計100質量份為基準,較好為1~150質量份,更好為10~100質量份。若未達1質量份,則有難燃性提高效果變得不充分之情況,另一方面,若超過150質量份,則有使硬化物之柔軟性或絕緣信賴性等物性降低之情況。The amount of the component (D) is preferably from 1 to 150 parts by mass, more preferably from 10 to 100 parts by mass, based on 100 parts by mass of the total of the components (A), (B) and (C). When the amount is less than 1 part by mass, the effect of improving the flame retardancy may be insufficient. On the other hand, when it exceeds 150 parts by mass, physical properties such as flexibility of the cured product or insulation reliability may be lowered.

5.(E)成份5. (E) ingredients

(E)成份為光聚合起始劑。The component (E) is a photopolymerization initiator.

(E)成份為可藉由紫外線等照射起始游離基聚合者,具體而言舉例為苯偶因、苯偶因甲基醚、苯偶因乙基醚、苯偶因異丙基醚等苯偶因及苯偶因烷基醚類;苯乙酮、2,2-二甲氧基-2-苯乙酮、2,2-二乙氧基-2-苯乙酮、1,1-二氯苯 乙酮等之苯乙酮類;2-甲基蒽醌、2-乙基蒽醌、2-第三丁基蒽醌、1-氯蒽醌、2-戊基蒽醌等之蒽醌類;噻噸酮、2-氯噻噸酮、2-烷硫基噻噸酮、2,4-二烷基噻噸酮等噻噸酮類;二苯甲酮、4-氯二苯甲酮、4,4'-二氯二苯甲酮、4,4'-雙二甲基胺基二苯甲酮等二苯甲酮類等。(E) The component is a radical polymerization which can be initiated by irradiation with ultraviolet rays or the like, and specific examples thereof include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether and the like. Occasion and benzoin alkyl ethers; acetophenone, 2,2-dimethoxy-2-acetophenone, 2,2-diethoxy-2-acetophenone, 1,1-di chlorobenzene An acetophenone such as ethyl ketone; an anthracene such as 2-methyl hydrazine, 2-ethyl hydrazine, 2-tert-butyl fluorene, 1-chloroindole or 2-pentyl hydrazine; Thioxanthone such as thioxanthone, 2-chlorothioxanthone, 2-alkylthiothioxanthone, 2,4-dialkylthioxanthone; benzophenone, 4-chlorobenzophenone, 4 , benzophenones such as 4'-dichlorobenzophenone and 4,4'-bisdimethylaminobenzophenone.

(E)成份之調配量,以(A)成份、(B)成份及(C)成份之合計作為100質量份,為0.5~10質量份,較好為1~5質量份。若未達0.5質量份則反應無法充分起始,使經由曝光獲得之塗膜之機械強度變弱,使顯像步驟中於硬化塗膜剝離後造成圖案蛇行。另一方面,當超過10質量份時,則曝光時沒有被使用之光聚合起始劑會大量殘留在塗膜中,導致硬化塗膜之耐熱性等物性降低。The amount of the component (E) is 0.5 to 10 parts by mass, preferably 1 to 5 parts by mass, based on 100 parts by mass of the total of the components (A), (B) and (C). If it is less than 0.5 part by mass, the reaction does not sufficiently start, and the mechanical strength of the coating film obtained by the exposure is weakened, so that the pattern is serrated after the peeling of the cured coating film in the developing step. On the other hand, when it exceeds 10 parts by mass, the photopolymerization initiator which is not used at the time of exposure may remain in a large amount in the coating film, resulting in deterioration of physical properties such as heat resistance of the cured coating film.

本發明中,上述(E)成份較好與增感劑一起併用。In the present invention, the above component (E) is preferably used in combination with a sensitizer.

作為增感劑可舉例為N,N-二甲基胺基苯甲酸、N,N-二甲基胺基苯甲酸異戊酯、三乙胺、二乙基噻噸酮以及三乙醇胺等。增感劑可為市售者,例如新日曹化工公司製之商品名「Nissocure EPA、EMA、IAMA」等,日本化藥公司製之商品名「卡雅久雅EPA、DETX、DMBI」等,大阪有機公司製之商品名「DABA」等。The sensitizer may, for example, be N,N-dimethylaminobenzoic acid, isoamyl N,N-dimethylaminobenzoate, triethylamine, diethylthioxanthone or triethanolamine. The sensitizer may be a commercially available product, such as the trade name "Nissocure EPA, EMA, IAMA" manufactured by Shin-Nisho Chemical Co., Ltd., and the product name "Kayajaya EPA, DETX, DMBI" manufactured by Nippon Kayaku Co., Ltd., Osaka, etc. The product name "DABA" made by the organic company.

該等增感劑之調配量,以(A)成份、(B)成份及(C)成份之合計作為100質量份,較好為0.5~10質量份。若未達0.5質量份則無法充分的提升以紫外線等硬化之反應速度,當超過10質量份時,會使反應加速造成感光性組 成物之儲存安定性惡化。The blending amount of the sensitizer is preferably 100 parts by mass, preferably 0.5 to 10 parts by mass, based on the total of the components (A), (B) and (C). If it is less than 0.5 part by mass, the reaction rate of curing by ultraviolet rays or the like cannot be sufficiently increased, and when it exceeds 10 parts by mass, the reaction is accelerated to cause the photosensitive group. The storage stability of the adult has deteriorated.

6.(F)成份6. (F) ingredients

本發明之感光性組成物亦可添加除含磷原子之填料(D)以外之磷化合物(F)。該化合物與含磷原子之填料(D)不同,係可溶解於組成物中而存在之磷化合物。The photosensitive composition of the present invention may also contain a phosphorus compound (F) other than the filler (D) containing a phosphorus atom. This compound, unlike the filler (D) containing a phosphorus atom, is a phosphorus compound which is soluble in the composition.

(F)成份調配之目的係提高難燃性,藉由與擔任賦予難燃性之必要成份之(D)成份之相乘效果,可更有效地發揮組成物難燃性之提高。(F) The purpose of the composition is to improve the flame retardancy, and the synergistic effect of the component (D) which is a necessary component for imparting flame retardancy can be utilized to more effectively improve the flame retardancy of the composition.

(F)成份之例可舉例為磷酸三苯酯、磷酸三甲酚酯、磷酸三(二甲苯)酯、磷酸三乙酯、磷酸甲酚苯酯、磷酸二甲苯基二苯酯等磷酸酯類,間苯二酚雙(二苯基)磷酸酯、雙酚A雙(二苯基)磷酸酯、雙酚A雙(二甲酚)磷酸酯、間苯二酚雙(二-2,6-伸二甲苯)磷酸酯等縮合型磷酸酯類,以及丙氧基磷腈、苯氧基磷腈、胺基磷腈等磷腈化合物等。Examples of the component (F) include phosphates such as triphenyl phosphate, tricresyl phosphate, tris(xylylene) phosphate, triethyl phosphate, cresyl phenyl phosphate, and xylylene diphenyl phosphate. Resorcinol bis(diphenyl)phosphate, bisphenol A bis(diphenyl)phosphate, bisphenol A bis(xylenol) phosphate, resorcinol bis (di-2,6-extension Condensation type phosphates such as toluene phosphates, and phosphazene compounds such as propoxyphosphazene, phenoxyphosphazene, and aminophosphazene.

最佳之(F)成份為縮合型磷酸酯類、磷腈化合物。The most preferred (F) component is a condensed phosphate or phosphazene compound.

添加(F)成份時之調配量,以(A)成份、(B)成份以及(C)成份之合計100質量份為基準,較好為1~50質量份,更好為1~30質量份,最好為1~25質量份。若添加未達1質量份則難燃性之提高效果不充分,另一方面,若超過50質量份則有時造成塗膜曝光顯像而形成圖案時之解像性或硬化塗膜之絕緣信賴性等物性降低。The amount of the component (F) to be added is preferably from 1 to 50 parts by mass, more preferably from 1 to 30 parts by mass based on 100 parts by mass of the total of the components (A), (B) and (C). It is preferably 1 to 25 parts by mass. When the amount is less than 1 part by mass, the effect of improving the flame retardancy is insufficient. On the other hand, when it exceeds 50 parts by mass, the coating film may be exposed to light to form a pattern, and the resolution of the pattern or the insulation of the cured film may be obtained. Physical properties such as sex are reduced.

為了抑制對上述解像性或絕緣信賴性之不良影響,(F)成份之調配量,較好與(D)成份之調配量相同量以下,更好為2/3以下,且最好為1/2以下。In order to suppress the adverse effect on the above-mentioned resolution or insulation reliability, the amount of the component (F) is preferably equal to or less than the amount of the component (D), more preferably 2/3 or less, and most preferably 1 /2 or less.

7.(G)成份7. (G) ingredients

本發明之感光性組成物亦可為添加有經由加熱而產生游離基之熱聚合起始劑(G)。The photosensitive composition of the present invention may be a thermal polymerization initiator (G) to which a radical is generated by heating.

(G)成份可舉例為例如有機過氧化物、具有偶氮雙結構之起始劑等。若由由於分解開始溫度高故儲存安定性良好之觀點,以及分解時低分子量揮發成份產生較少之觀點,則較好為二烷基過氧化物,具體而言舉例為二枯烯基過氧化物、第三丁基枯烯基過氧化物、2,5-二甲基-2,5-二(第三丁基過氧基)己烷以及2,5-二甲基-2,5-(第三丁基過氧基)己烷等。The (G) component can be exemplified by, for example, an organic peroxide, an initiator having an azo double structure, and the like. It is preferably a dialkyl peroxide, specifically a di- cumenyl peroxidation, from the viewpoint that storage stability is high due to high decomposition initiation temperature and that low molecular weight volatile components are generated at the time of decomposition. , tert-butyl cumyl peroxide, 2,5-dimethyl-2,5-di(t-butylperoxy)hexane, and 2,5-dimethyl-2,5- (Third butylperoxy)hexane or the like.

又,添加(G)成份時之調配量,以(A)成份、(B)成份及(C)成份之合計100質量份為基準,較好為0.5~10質量份。若未達0.5質量份則添加效果不足,若超過10質量份則組成物之儲存安定性易變差,同時由於發生大量之起始劑分解物,因而有損及硬化物耐熱性之顧慮。In addition, the amount of the component (G) is preferably 0.5 to 10 parts by mass based on 100 parts by mass of the total of the component (A), the component (B) and the component (C). If it is less than 0.5 part by mass, the effect of addition is insufficient, and if it exceeds 10 parts by mass, the storage stability of the composition tends to be deteriorated, and at the same time, a large amount of the decomposition product of the initiator is generated, which may impair the heat resistance of the cured product.

本發明之感光性組成物較好為實質上不含具有環氧基之化合物(以下稱為環氧化合物)者。若組成物含有環氧化合物,則有組成物儲存安定性劣化之情況,故用途受到限制。The photosensitive composition of the present invention is preferably one which does not substantially contain a compound having an epoxy group (hereinafter referred to as an epoxy compound). When the composition contains an epoxy compound, the stability of storage of the composition may be deteriorated, so that the use is limited.

但,在沒有要求高度儲存安定性之下,若有必要進一步提高硬化物之耐熱性以及耐藥品性時,亦可依據需要於感光性組成物中添加環氧化合物。該情況下,推薦利用使用前才混合之二液型組成物。However, if it is not necessary to have high storage stability, if it is necessary to further improve the heat resistance and chemical resistance of the cured product, an epoxy compound may be added to the photosensitive composition as needed. In this case, it is recommended to use a two-liquid type composition which is mixed before use.

環氧化合物之具體例可舉例為甲酚酚醛環氧樹脂、苯酚酚醛環氧樹脂、聚有異尿氰酸酯骨架之環氧樹脂以及雙酚A型環氧樹脂等。Specific examples of the epoxy compound are cresol novolac epoxy resin, phenol novolac epoxy resin, epoxy resin having an isocyanurate skeleton, and bisphenol A epoxy resin.

至於環氧化合物,較好為具有2個以上環氧基之化合物。As the epoxy compound, a compound having two or more epoxy groups is preferred.

使用環氧化合物時,通常較好併用胺系硬化劑、酸系硬化劑以及酸酐系硬化劑等。When an epoxy compound is used, an amine-based curing agent, an acid-based curing agent, an acid anhydride-based curing agent, or the like is usually preferably used in combination.

8.感光性組成物8. Photosensitive composition

本發明之感光性組成物可藉由使上述必要成份(A)~(E)成份以及視需要之(F)、(G)成份、其他成份依據慣用方法攪拌、混合而製造。The photosensitive composition of the present invention can be produced by stirring and mixing the above-mentioned essential components (A) to (E) and optionally (F), (G) components and other components according to a conventional method.

至於本發明之感光性組成物之使用方法,在作為塗佈劑、接著劑或光阻劑等使用之情況下,可舉例為例如在基材上塗佈組成物後,照射活性能量線,隨後加熱之方法等。As a method of using the photosensitive composition of the present invention, when it is used as a coating agent, an adhesive, a photoresist, or the like, for example, after coating a composition on a substrate, the active energy ray is irradiated, followed by Heating method, etc.

至於基材可舉例為聚碳酸酯、聚甲基丙烯酸甲酯以及聚氯乙烯等之成形樹脂加工品(塑膠)、金屬、玻璃、陶瓷、混凝土、天然木材以及合成木材等木材、石材以及紙 等。As the substrate, wood, stone, and paper such as polycarbonate, polymethyl methacrylate, and polyvinyl chloride, and the like, processed resin (plastic), metal, glass, ceramic, concrete, natural wood, and synthetic wood can be exemplified. Wait.

至於活性能量線可舉例為電子線、紫外線以及可見光,以可見光及紫外線照射時之光源,雖可依據所用之光聚合起始劑適當的選擇,但較佳者為高壓水銀燈以及金屬鹵化物燈。活性能量線照射之條件可依據所使用成份以及目的適當設定。The active energy ray may be exemplified by electron rays, ultraviolet rays, and visible light. The light source when irradiated with visible light or ultraviolet rays may be appropriately selected depending on the photopolymerization initiator used, but is preferably a high pressure mercury lamp and a metal halide lamp. The conditions of the active energy ray irradiation can be appropriately set depending on the components used and the purpose.

上述加熱中,加熱方法及條件可依據一般方法。In the above heating, the heating method and conditions can be based on a general method.

本發明之感光性組成物可用於各種用途。具體而言可舉例為塗料等之塗佈劑、油墨、光阻劑以及成形材等,較好作為光阻劑使用,更好作為抗焊劑使用。The photosensitive composition of the present invention can be used for various purposes. Specifically, it can be exemplified by a coating agent such as a paint, an ink, a photoresist, a molded material, etc., and is preferably used as a photoresist, and is preferably used as a solder resist.

以下說明使用本發明之組成物作為光阻劑使用之情況。The case where the composition of the present invention is used as a photoresist is described below.

使用本發明之感光性組成物作為光阻劑之情況,可對應需要添加光阻劑中通常所調配之無機填充劑、平流劑、消泡劑、顏料以及離子捕捉劑等添加劑。至於無機填充劑可舉例為滑石、黏土、無機氫氧化物以及氧化矽等。至於顏料可舉例為酞花青、酞花綠以及碳黑等。該等調配量可在不損及組成物之解像性以及儲存安定性、硬化物之耐熱性、柔軟性以及電絕緣性等性能之範圍內調整。When the photosensitive composition of the present invention is used as a photoresist, an additive such as an inorganic filler, a flow agent, an antifoaming agent, a pigment, and an ion trapping agent which are usually formulated in a photoresist can be added. As the inorganic filler, talc, clay, inorganic hydroxide, cerium oxide or the like can be exemplified. As the pigment, for example, phthalocyanine, phthalocyanine, and carbon black can be exemplified. These blending amounts can be adjusted within a range that does not impair the resolution of the composition, the storage stability, the heat resistance of the cured product, the flexibility, and the electrical insulating properties.

使用本發明之感光性組成物作為光阻劑時,可以液態光阻劑之形態,亦可以乾膜光阻劑之形態使用。When the photosensitive composition of the present invention is used as a photoresist, it may be used in the form of a liquid photoresist or a dry film photoresist.

作為液狀光阻劑使用時,亦可視情況於本發明之感光性組成物中添加高沸點溶劑。該情況下所用之高沸點溶劑 之例可舉例為乙基溶纖素、丁基溶纖速、丁基卡必醇、乙基溶纖素乙酸酯、丁基溶纖素乙酸酯、乙基卡必醇乙酸酯以及丁基卡必醇乙酸酯等。When it is used as a liquid photoresist, a high boiling point solvent may be added to the photosensitive composition of the present invention as the case may be. High boiling point solvent used in this case Examples thereof include ethyl cellosolve, butyl solvolysis, butyl carbitol, ethyl cellosolve acetate, butyl cellosolve acetate, ethyl carbitol acetate, and butyl carbene. Alcohol acetate and the like.

本發明之感光性組成物作為液狀光阻劑使用時之使用方法可舉例為將組成物塗佈或印刷在基材上,以加熱使塗膜乾燥,接著照射紫外線等活性能量線,再經加熱之方法等。The method for using the photosensitive composition of the present invention as a liquid photoresist can be exemplified by coating or printing a composition on a substrate, drying the coating film by heating, and then irradiating an active energy ray such as ultraviolet rays, and then passing through Heating method, etc.

將組成物塗佈在基材上時之塗佈裝置可舉例為旋塗器、輥塗器以及簾幕式塗佈器等。至於膜厚亦可依目的適當設定,但較好為1~100μm,最好為5~50μm。The coating device when the composition is coated on a substrate can be exemplified by a spin coater, a roll coater, a curtain coater, and the like. The film thickness can also be appropriately set depending on the purpose, but is preferably from 1 to 100 μm, preferably from 5 to 50 μm.

至於基材可舉例為矽、鋁、鐵、鎳及銅等金屬;玻璃;聚對苯二甲酸乙二醇酯、聚醯亞胺以及聚碳酸酯等塑膠等基材,以及玻璃環氧基材等複合基材等。The substrate may be exemplified by metals such as bismuth, aluminum, iron, nickel, and copper; glass; substrates such as polyethylene terephthalate, polyimine, and polycarbonate, and glass epoxy substrates. Such as composite substrates.

在印刷配線板上形成光阻劑時,銅表面經研磨後,若在不形成氧化皮膜之銅箔表面上形成光阻劑時,由於可獲得更高之密著性因而較佳。又,在進行銅表面之氧化處理或粗糙面處理而形成凹凸後若形成光阻劑則密著性變得更良好。When a photoresist is formed on a printed wiring board, if the photoresist is formed on the surface of the copper foil on which the oxide film is not formed after the copper surface is polished, it is preferable because higher adhesion can be obtained. Further, when the copper surface is oxidized or roughened to form irregularities, the adhesion is further improved when a photoresist is formed.

感光性組成物含有溶劑時,塗佈或印刷組成物後,係藉由加熱使組成物中之溶劑蒸發。該情況下之加熱裝置可舉例為烘箱及加熱板等。至於加熱條件,可依據所用之組成物種類及目的適當的設定,較佳之加熱溫度為70℃~120℃,較佳之加熱時間為5~30分鐘。When the photosensitive composition contains a solvent, after coating or printing the composition, the solvent in the composition is evaporated by heating. The heating device in this case can be exemplified by an oven, a heating plate, and the like. The heating conditions may be appropriately set depending on the type and purpose of the composition to be used, and the heating temperature is preferably 70 ° C to 120 ° C, and preferably the heating time is 5 to 30 minutes.

以上述獲得之塗膜上通過形成有特定圖案之光罩以活性能量線照射。The coating film obtained above was irradiated with an active energy ray through a reticle formed with a specific pattern.

至於組成物硬化所用之活性能量線可舉例為電子線及紫外線等,由可使用便宜裝置之觀點,較好使用紫外線。As the active energy ray used for hardening the composition, for example, an electron beam, an ultraviolet ray or the like can be exemplified, and from the viewpoint of using an inexpensive device, ultraviolet rays are preferably used.

至於活性能量線之照射條件亦可依據慣用之方法。至於照射條件,可依據所使用之感光性組成物種類及目的適當的使用,較好為10~5,000mJ/cm2 ,更好為50~500mJ/cm2The irradiation conditions of the active energy rays can also be based on conventional methods. The irradiation conditions may be appropriately used depending on the type and purpose of the photosensitive composition to be used, and are preferably from 10 to 5,000 mJ/cm 2 , more preferably from 50 to 500 mJ/cm 2 .

上述活性能量線照射之後,使未硬化部份鹼性顯像。After the above-mentioned active energy ray irradiation, the uncured portion is alkali-developed.

至於顯像所使用之稀鹼性水溶液,亦可依據所用感光性組成物之種類及目的適當的選擇,舉例例如0.5~2%之碳酸鈉水溶液等。The dilute alkaline aqueous solution used for the development may be appropriately selected depending on the type and purpose of the photosensitive composition to be used, and for example, a 0.5 to 2% aqueous solution of sodium carbonate or the like is used.

至於顯像條件可依所用之感光性組成物種類以及目的適當設定,作為顯像溫度為15~50℃,最好是20~40℃,顯像時間為15~180杪,最好為30~120秒。The development conditions can be appropriately set depending on the type and purpose of the photosensitive composition to be used, and the development temperature is 15 to 50 ° C, preferably 20 to 40 ° C, and the development time is 15 to 180 °, preferably 30 °. 120 seconds.

本發明之感光性組成物可使用作為抗焊劑,最好是作為鹼性顯像型之照相法抗焊劑。The photosensitive composition of the present invention can be used as a solder resist, and is preferably used as an alkaline development type photographic solder resist.

該情況下,經照射活性能量線、顯像後,為了進一步提升各種物性,因此可經加熱或活性能量線照射進行充分的硬化。至於該加熱方法以及條件,亦可依據所用組成物之種類及目的適當設定,至於加熱溫度為100~250℃,最·好為130~230℃,加熱時間為5分鐘~5小時,最好為30分鐘~2小時。活性能量線之照射條件可依據慣用之方法。照 射條件亦可依據所用組成物之種類及目的適當選擇,較好為10~5,000mJ/cm2 ,更好為500~3,000mJ/cm2In this case, after the active energy ray is irradiated and developed, in order to further improve various physical properties, it is sufficiently cured by heating or active energy ray irradiation. The heating method and conditions may be appropriately set depending on the type and purpose of the composition to be used, and the heating temperature is 100 to 250 ° C, preferably 130 to 230 ° C, and the heating time is 5 minutes to 5 hours, preferably 30 minutes to 2 hours. The irradiation conditions of the active energy rays can be determined according to a conventional method. The irradiation conditions may be appropriately selected depending on the kind and purpose of the composition to be used, and are preferably from 10 to 5,000 mJ/cm 2 , more preferably from 500 to 3,000 mJ/cm 2 .

本發明之感光性組成物作為乾膜之感光層使用時,乾膜之製造方法可舉例為將本發明之組成物塗佈在聚對苯二甲酸乙二醇酯等支撐薄膜上,經由加熱乾燥去除溶劑後,使聚丙烯等聚烯烴薄膜等作為覆蓋薄膜加以重疊之方法等。至於組成物塗膜(光阻層)之厚度為1~200μm,最好為5~50μm。When the photosensitive composition of the present invention is used as a photosensitive layer of a dry film, the method for producing a dry film can be exemplified by applying the composition of the present invention to a support film such as polyethylene terephthalate and drying it by heating. After the solvent is removed, a polyolefin film such as polypropylene or the like is laminated as a cover film. The thickness of the composition coating film (photoresist layer) is 1 to 200 μm, preferably 5 to 50 μm.

該情況下,亦可在所用支撐薄膜之塗佈中加入適當溶劑。組成物中之溶劑必須在塗佈薄膜後在不使該組成物聚合程度之加熱溫度與時間下揮發,因此該溶劑可舉例為甲基乙基酮、乙酸乙酯、乙酸丁酯、甲醇以及乙醇等沸點較低者。In this case, a suitable solvent may be added to the coating of the support film used. The solvent in the composition must be volatilized after coating the film at a heating temperature and time which does not allow polymerization of the composition, and thus the solvent can be exemplified by methyl ethyl ketone, ethyl acetate, butyl acetate, methanol, and ethanol. The lower boiling point.

〔實施例〕[Examples]

以下顯示實施例及比較例以更具體說明本發明。The examples and comparative examples are shown below to more specifically illustrate the present invention.

以下實施例及比較例中,「份」意指質量份,「%」意指質量%。In the following examples and comparative examples, "parts" means parts by mass, and "%" means mass%.

○合成例1〔(A)成份之製造〕○ Synthesis Example 1 [Production of (A) component]

於配置有溫度計、攪拌機及冷卻器之4頸瓶中注入950克(5.0環氧當量)雙酚A型環氧樹脂[油化蜆殼環氧公司製,商品名「Epicot828」〕與450克作為溶劑之甲苯,加 熱至110℃獲得均勻溶液。於該溶液中添加0.50克作為聚合抑制劑之吩噻嗪、10克作為觸媒之溴化四丁基銨以及360克(5.0羧基當量)丙烯酸,一面吹入空氣一面在110℃下反應製造含有丙烯醯基及羥基之化合物(環氧丙烯酸酯)。由酸價計算之丙烯酸消耗率接近100%。Into a 4-neck bottle equipped with a thermometer, a stirrer, and a cooler, 950 g (5.0 epoxy equivalent) of bisphenol A type epoxy resin (manufactured by Oiled Shell Epoxy Co., Ltd., trade name "Epicot 828") and 450 g as a solvent were injected. Toluene, plus Heat to 110 ° C to obtain a homogeneous solution. To the solution, 0.50 g of phenothiazine as a polymerization inhibitor, 10 g of tetrabutylammonium bromide as a catalyst, and 360 g (5.0 carboxy equivalent) of acrylic acid were added, and the reaction was carried out at 110 ° C while blowing air. A compound of an acryloyl group and a hydroxyl group (epoxy acrylate). The acrylic acid consumption rate calculated from the acid value is close to 100%.

於上述產物之溶液中添加220克(1.5莫耳)之苯二甲酸酐,加熱至110℃使苯二甲酸酐完全溶解後,再反應3小時。於該溶液中添加1040克丁基溶纖素後,減壓去除300克甲苯,獲得固成份60%之具有羧基之環氧丙烯酸酯(a-1)溶液。220 g (1.5 mol) of phthalic anhydride was added to the solution of the above product, and after heating to 110 ° C to completely dissolve the phthalic anhydride, the reaction was further carried out for 3 hours. After 1040 g of butyl cellosolve was added to the solution, 300 g of toluene was removed under reduced pressure to obtain a solution of 60% of a carboxyl group-containing epoxy acrylate (a-1).

○合成例2〔(B)成份之製造〕○ Synthesis Example 2 [Manufacture of component (B)]

於配置有溫度計、攪拌機及冷卻器之4頸瓶中注入64克甲苯二異氰酸酯及200ppm之二月桂酸二丁基錫,一面維持在70℃,一面於攪拌下緩慢加入390克聚碳酸酯二醇[東亞合成公司製,碳酸二乙酯與1,6-己二醇之反應產物之碳酸二醇〕,攪拌1小時使之反應。於該溶液中添加50ppm之二月桂酸二丁基錫,接著在攪拌下且維持在70℃下緩慢添加48克丙烯酸2-羥基乙酯而進行反應,以紅外線吸收光譜分析反應產物,繼續反應直到確定-NCO基之特性吸收消失為止。Into a 4-neck bottle equipped with a thermometer, a stirrer and a cooler, 64 g of toluene diisocyanate and 200 ppm of dibutyltin dilaurate were added while maintaining the temperature at 70 ° C, and slowly adding 390 g of polycarbonate diol under stirring [East Asia A carbonate diol of a reaction product of diethyl carbonate and 1,6-hexanediol produced by Synthetic Co., Ltd. was stirred for 1 hour to cause a reaction. 50 ppm of dibutyltin dilaurate was added to the solution, followed by slowly adding 48 g of 2-hydroxyethyl acrylate while stirring at 70 ° C to carry out a reaction, and the reaction product was analyzed by infrared absorption spectroscopy, and the reaction was continued until it was determined - The absorption of the characteristics of the NCO group disappears.

結果獲得500克不具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(b-1)之橡膠狀固形物。As a result, 500 g of a rubbery solid of acrylamide (b-1) having a polycarbonate polyol skeleton having no carboxyl group was obtained.

○合成例3〔(B)成份之製造〕○ Synthesis Example 3 [Manufacture of component (B)]

於配置有溫度計、攪拌機及冷卻器之4頸瓶中注入72克甲苯二異氰酸酯及50ppm之二月桂酸二丁基錫,一面維持在70℃,一面於攪拌下緩慢加入280克聚碳酸酯二醇[旭化成化學公司製,商品名「PCDL T6001」〕及12克二羥甲基丙酸,攪拌1小時使之反應。於該溶液中添加50ppm之二月桂酸二丁基錫,接著在攪拌下且維持在70℃下緩慢添加17克丙烯酸2-羥基乙酯進行反應,以紅外線吸收光譜分析反應產物,繼續反應直到確定-NCO基之特性吸收消失為止。Into a four-necked flask equipped with a thermometer, a stirrer, and a cooler, 72 g of toluene diisocyanate and 50 ppm of dibutyltin dilaurate were added, and while maintaining at 70 ° C, 280 g of polycarbonate diol was slowly added while stirring [Asahi Kasei Chemical company, trade name "PCDL T6001") and 12 g of dimethylolpropionic acid were stirred for 1 hour to react. 50 ppm of dibutyltin dilaurate was added to the solution, followed by slowly adding 17 g of 2-hydroxyethyl acrylate with stirring at 70 ° C to carry out the reaction, and the reaction product was analyzed by infrared absorption spectroscopy, and the reaction was continued until the -NCO was determined. The absorption of the characteristics of the base disappears.

結果獲得380克具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(b-3)之橡膠狀固形物。As a result, 380 g of a rubbery solid of acrylamide (b-3) having a carboxyl group-containing polycarbonate polyol skeleton was obtained.

○合成例4〔(B)成份之製造〕○ Synthesis Example 4 [Production of Component (B)]

於配置有溫度計、攪拌機及冷卻器之4頸瓶中注入33克六亞甲基二異氰酸酯及50ppm之二月桂酸二丁基錫,一面維持在70℃,一面於攪拌下緩慢加入100克聚碳酸酯二醇〔旭化成化學公司製,商品名「PCDL T5650J」〕,攪拌30分鐘使之反應。於該溶液中添加50ppm之二月桂酸二丁基錫,接著在攪拌下且維持在70℃下緩慢添加24克丙烯酸2-羥基乙酯進行反應,以紅外線吸收光譜分析反應產物,繼續反應直到確定-NCO基之特性吸收消失為止。Into a 4-neck bottle equipped with a thermometer, a stirrer and a cooler, 33 g of hexamethylene diisocyanate and 50 ppm of dibutyltin dilaurate were added while maintaining the temperature at 70 ° C while slowly adding 100 g of polycarbonate under stirring. Alcohol (manufactured by Asahi Kasei Chemicals Co., Ltd., trade name "PCDL T5650J") was stirred for 30 minutes to react. 50 ppm of dibutyltin dilaurate was added to the solution, followed by slowly adding 24 g of 2-hydroxyethyl acrylate with stirring at 70 ° C to carry out the reaction, and the reaction product was analyzed by infrared absorption spectroscopy, and the reaction was continued until the -NCO was determined. The absorption of the characteristics of the base disappears.

結果獲得156克不具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(b-4)之橡膠狀固形物。As a result, 156 g of a rubbery solid of an acrylic urethane (b-4) having a polycarbonate polyol skeleton having no carboxyl group was obtained.

○合成例5〔(B)成份之製造〕○ Synthesis Example 5 [Production of Component (B)]

於配置有溫度計、攪拌機及冷卻器之4頸瓶中注入34克六亞甲基二異氰酸酯及50ppm之二月桂酸二丁基錫,一面維持在70℃,一面於攪拌下緩慢加入1000克聚碳酸酯二醇〔東亞合成公司製,商品名「PES-360」〕及200克聚碳酸酯二醇〔旭化成化學公司製,商品名「PCDL T5652」〕,攪拌1小時使之反應。於該溶液中添加50ppm之二月桂酸二丁基錫,接著在攪拌下且維持在70℃下緩慢添加13克丙烯酸2-羥基乙酯進行反應,以紅外線吸收光譜分析反應產物,繼續反應直到確定-NCO基之特性吸收消失為止。Into a 4-neck bottle equipped with a thermometer, a stirrer and a cooler, 34 g of hexamethylene diisocyanate and 50 ppm of dibutyltin dilaurate were added while maintaining the temperature at 70 ° C while slowly adding 1000 g of polycarbonate under stirring. An alcohol (manufactured by Toagosei Co., Ltd., trade name "PES-360") and 200 g of polycarbonate diol (manufactured by Asahi Kasei Chemicals Co., Ltd., trade name "PCDL T5652") were stirred for 1 hour to cause a reaction. 50 ppm of dibutyltin dilaurate was added to the solution, followed by slowly adding 13 g of 2-hydroxyethyl acrylate with stirring at 70 ° C to carry out the reaction, and the reaction product was analyzed by infrared absorption spectroscopy, and the reaction was continued until the -NCO was determined. The absorption of the characteristics of the base disappears.

結果獲得1246克不具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(b-5)之橡膠狀固形物。As a result, 1246 g of a rubbery solid of acrylamide (b-5) of a polycarbonate polyol skeleton having no carboxyl group was obtained.

○實施例1~11,比較例1~7○Examples 1 to 11, Comparative Examples 1 to 7

使用1份之2,4-二乙基塞噸酮(增感劑)及甲基乙基酮(溶劑)以及分別以固形分比例依據下表1及表2中所示之調配比例之下列所示之(A)成份~(J)成份,該等成份以三軸輥混練,調配固成份65%之組成物。Using 1 part of 2,4-diethyl ketoxime (sensitizer) and methyl ethyl ketone (solvent) and the following ratios in the solid content ratio according to the ratios shown in Table 1 and Table 2, respectively Show the ingredients of (A) ~ (J), which are mixed with a three-axis roll to blend 65% of the solid content.

表1與表2中各成份欄中之數值意指質量份。又,各成份之簡寫符號意義如下:(a-1):以合成例1製備之具有羧基之環氧丙烯酸酯 (b-l):以合成例2製備之不具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(質量平均分子量8000) (b-2):聚酯多元醇型丙烯酸胺基甲酸酯〔新中村化學(股)製「U-200AX」,數平均分子量13000〕 (b-3):以合成例3製備之具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(質量平均分子量10000) (b-4):以合成例4製備之不具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(質量平均分子量1800) (b-5):以合成例5製備之不具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(質量平均分子量60000) (c-1):二季戊四醇〔由丙烯酸戊酯與二季戊四醇六丙烯酸酯構成之組成物(東亞合成公司製,商品名「ARONIXM-400」)〕 (c-2):季戊四醇二丙烯酸酯單硬脂酸酯〔東亞合成公司製,商品名「ARONIXM-233」〕 (d-1):二乙基膦酸鋁〔日本Clariant's公司製,商品名「EXOLIT OP-930」,平均粒徑5μm,P含量23%〕 (d-2):聚磷酸三聚氰胺〔三和化學公司製,商品名「MPP-B」,平均粒徑12μm,p含量13%〕 (d-3):聚磷酸銨〔鈴祐化學公司製,商品名「FCP- 720」,平均粒徑20μm,P含量13%〕 (e-1):光聚合起始劑,2-甲基-〔4-(甲硫基)苯基〕-2-嗎啉基-1-丙酮〔汽巴特用化學品公司製造,商品名「Iregacure907」〕 (f-1):芳香族縮合磷酸酯〔大八化學公司製造,商品名「PX-200」,P含量14%〕 (f-2):聚磷腈〔大塚化學公司製,商品名「SPB-100」,P含量13%〕 (g-1):熱聚合觸媒,二枯烯過氧化物〔日本油脂公司製,商品名「Polkmil D」〕 (h-1):雙酚A型環氧樹脂〔油化蜆殼環氧公司製商品名「Epicot828」〕 (i-1):三聚氰胺〔上述(h-1)環氧樹脂之硬化劑〕 (j-1):氫氧化鎂〔無機氫氧化物系難燃劑,協和化學工業公司製,商品名「Kisma5A」,平均粒徑1μm〕The numerical values in the column of each component in Tables 1 and 2 mean parts by mass. Further, the abbreviated symbols of the respective components have the following meanings: (a-1): an epoxy acrylate having a carboxyl group prepared in Synthesis Example 1. (b-1): Acrylic urethane having a polycarbonate polyol skeleton having no carboxyl group prepared in Synthesis Example 2 (mass average molecular weight: 8,000) (b-2): Polyester polyol type urethane urethane [U-200AX, manufactured by Shin-Nakamura Chemical Co., Ltd., number average molecular weight 13000] (b-3): Acrylic urethane having a carboxyl group-containing polycarbonate polyol skeleton prepared by Synthesis Example 3 (mass average molecular weight: 10,000) (b-4): Acrylic urethane having a polycarbonate polyol skeleton having no carboxyl group prepared in Synthesis Example 4 (mass average molecular weight: 1800) (b-5): Acrylic urethane having a polycarbonate polyol skeleton having no carboxyl group prepared in Synthesis Example 5 (mass average molecular weight 60000) (c-1): dipentaerythritol [composition composed of amyl acrylate and dipentaerythritol hexaacrylate (manufactured by Toagosei Co., Ltd., trade name "ARONIXM-400")] (c-2): pentaerythritol diacrylate monostearate [manufactured by Toagosei Co., Ltd., trade name "ARONIXM-233"] (d-1): aluminum diethylphosphonate (manufactured by Clariant's, Japan, trade name "EXOLIT OP-930", average particle size 5 μm, P content 23%] (d-2): melamine polyphosphate (manufactured by Sanwa Chemical Co., Ltd., trade name "MPP-B", average particle size 12 μm, p content 13%] (d-3): Ammonium polyphosphate (manufactured by Suzuka Chemical Co., Ltd., trade name "FCP- 720", average particle size 20μm, P content 13%] (e-1): photopolymerization initiator, 2-methyl-[4-(methylthio)phenyl]-2-morpholinyl-1-propanone (manufactured by Steam Bart Chemical Co., Ltd., trade name " Iregacure907"] (f-1): Aromatic condensed phosphate ester (manufactured by Daiba Chemical Co., Ltd., trade name "PX-200", P content 14%] (f-2): polyphosphazene (manufactured by Otsuka Chemical Co., Ltd., trade name "SPB-100", P content 13%] (g-1): Thermal polymerization catalyst, dicumyl peroxide (manufactured by Nippon Oil & Fats Co., Ltd., trade name "Polkmil D") (h-1): bisphenol A type epoxy resin [trade name "Epicot 828" manufactured by oyster shell epoxy company] (i-1): melamine [hardener of (h-1) epoxy resin described above] (j-1): Magnesium hydroxide [Inorganic hydroxide-based flame retardant, manufactured by Kyowa Chemical Industry Co., Ltd., trade name "Kisma 5A", average particle diameter 1 μm]

將上述感光性組成物塗佈於厚度25μm之聚對苯二甲酸乙二醇酯製之薄膜(基底薄膜)上,於100℃下加熱10分鐘,蒸發揮發性成份,形成感光性組成物之被覆膜(厚度約30μm)。隨後,於該被覆膜上貼合厚度25μm之聚乙烯製薄膜(覆蓋薄膜)而製成乾膜。The photosensitive composition was applied onto a polyethylene terephthalate film (base film) having a thickness of 25 μm, and heated at 100 ° C for 10 minutes to evaporate volatile components to form a photosensitive composition. Film (thickness about 30 μm). Subsequently, a polyethylene film (cover film) having a thickness of 25 μm was bonded to the film to form a dry film.

為了評價乾膜而將覆蓋薄膜剝除。一面使剝除覆蓋薄膜之乾膜加溫至70℃,一面使感光性組成物之被覆膜(以下稱為感光層)附著於後述基板上之方式,使用層合機加 以層合。如此獲得之附有感光層之基板係在基板上形成感光層,於其上被覆基底薄膜者。The cover film was peeled off in order to evaluate the dry film. The coating film of the photosensitive composition (hereinafter referred to as a photosensitive layer) is attached to a substrate to be described later by heating the dry film of the cover film to 70 ° C, and using a laminator To laminate. The substrate with the photosensitive layer thus obtained is formed by forming a photosensitive layer on the substrate and coating the underlying film thereon.

依據以下之方法評價該附有感光層基板之解像度、儲存安定性、難燃性、基板彎曲、耐彎曲性、焊料耐熱性以及絕緣信賴性。評價結果列於表3及表4中。The resolution, storage stability, flame retardancy, substrate bending, bending resistance, solder heat resistance, and insulation reliability of the photosensitive layer-attached substrate were evaluated by the following methods. The evaluation results are shown in Tables 3 and 4.

(解像度,儲存安定性)(resolution, storage stability)

使用FR-4基板〔住友背光板公司製,銅箔厚度18μm〕做為基板。於所製成之附有感光層基板之感光層上,使用具有60μm、80μm、100μm及200μm線路寬度之圖案之光罩,以250mJ/cm2 之光量曝光。上述光罩係置於基底薄膜上,對感光層之曝光係通過光罩及基底薄膜進行。曝光後,剝離基底薄膜,以1.5kg/cm2 之壓力噴佈液溫30℃之濃度1%之碳酸鈉水溶液歷時60秒,藉由去除感光層之未曝光部分,進行鹼顯像獲得試驗片。以顯微鏡觀察所得之試驗片,對感光層之硬化膜狀態進行下列3階段評價。An FR-4 substrate [manufactured by Sumitomo Backlight Co., Ltd., copper foil thickness of 18 μm] was used as a substrate. On the photosensitive layer with the photosensitive layer substrate formed thereon, a photomask having a pattern of line widths of 60 μm, 80 μm, 100 μm, and 200 μm was used, and exposed at a light amount of 250 mJ/cm 2 . The photomask is placed on the base film, and the exposure to the photosensitive layer is performed through the photomask and the base film. After the exposure, the base film was peeled off, and a 1% sodium carbonate aqueous solution having a concentration of 30 ° C at a pressure of 1.5 kg/cm 2 was applied for 60 seconds, and the unexposed portion of the photosensitive layer was removed to obtain a test piece for alkali development. . The obtained test piece was observed under a microscope, and the state of the cured film of the photosensitive layer was evaluated in the following three stages.

○…沒有異常 △…觀察到一部份異常(殘渣、剝離、蛇行等) ×…觀察到全部異常(殘渣、剝離、蛇行等)○...no abnormalities △... observed a part of the abnormality (residue, peeling, snake, etc.) ×... observed all abnormalities (residues, peeling, snakes, etc.)

儲存安定性之評價係使乾膜在15℃下儲存1個月後,與上述相同作成附有感光層之基板,對曝光、顯像後之試驗片進行解像度評估者。The evaluation of the storage stability was carried out after the dry film was stored at 15 ° C for one month, and the substrate with the photosensitive layer was formed in the same manner as above, and the test piece after exposure and development was evaluated for resolution.

(難燃性)(flammable)

使用25μm厚之聚亞醯胺薄膜〔東麗杜邦公司製,商品名「Capton」做為基板。對附有感光層之基板以1000mJ/cm2 之光量曝光。隨後剝離基底薄膜,在160℃下後硬化30分鐘獲得試驗片。A 25 μm-thick polyimide film (manufactured by Toray Dupont Co., Ltd., trade name "Capton" was used as a substrate. The substrate with the photosensitive layer was exposed to light at a light amount of 1000 mJ/cm 2 . Subsequently, the base film was peeled off, and post-hardened at 160 ° C for 30 minutes to obtain a test piece.

使用上述試驗片,以UL-94規格之薄材料垂直燃燒試驗方法為準評價難燃性。Using the above test piece, the flame retardancy was evaluated in accordance with the UL-94 standard thin material vertical burning test method.

(基板彎曲)(substrate bending)

使用25μm厚之聚亞醯胺薄膜〔東麗杜邦公司製,商品名「Capton」作為基板。對附有感光層之基板以1000mJ/cm2 之光量曝光。隨後剝離基底薄膜,在160℃下後硬化30分鐘,切成邊長100mm獲得試驗片。A 25 μm-thick polyimide film (manufactured by Toray Dupont Co., Ltd., trade name "Capton") was used as a substrate. The substrate with the photosensitive layer was exposed to light at a light amount of 1000 mJ/cm 2 . Subsequently, the base film was peeled off, post-hardened at 160 ° C for 30 minutes, and cut into side lengths of 100 mm to obtain test pieces.

將試驗片放置在水平地板上,以mm單位測定各試驗片之角距離地板之高度,以其平均值做為彎曲大小之評價。The test piece was placed on a horizontal floor, and the height of each test piece from the floor was measured in mm units, and the average value was used as the evaluation of the bending size.

×…由於完全捲曲因此無法測定彎曲度×...The curvature cannot be measured because it is completely curled

(耐彎曲性)(bending resistance)

使用25μm厚之聚亞醯胺薄膜〔東麗杜邦公司製,商品名「Capton」作為基板。對附有感光層之基板以1000mJ/cm2 之光量曝光。隨後剝離基底薄膜,在160℃下後硬化30分鐘,切成100mm邊長獲得試驗片。A 25 μm-thick polyimide film (manufactured by Toray Dupont Co., Ltd., trade name "Capton") was used as a substrate. The photosensitive layer of the substrate with an exposure light amount to 1000mJ / cm 2 of. Subsequently, the base film was peeled off, post-hardened at 160 ° C for 30 minutes, and cut into 100 mm sides to obtain test pieces.

使試驗片之感光層成為外側彎曲90∘或180∘,以目視觀察感光層之裂痕等損傷,且以下列3階段評價:○…感光層沒有異常 △…感光層表面異常(裂痕等) ×…裂痕到達感光層下面The photosensitive layer of the test piece was bent 90 ∘ or 180 外侧 outside to visually observe damage such as cracks in the photosensitive layer, and was evaluated in the following three stages: ○...the photosensitive layer was not abnormal. △...The surface of the photosensitive layer is abnormal (cracks, etc.) ×...The crack reaches below the photosensitive layer

(焊料耐熱性)(solder heat resistance)

使用FR-4基板〔住友背光板公司製,銅箔厚度18μm〕作為基板。對附有感光層之基板以1000mJ/cm2 之光量曝光。隨後剝離基底薄膜,在160℃下後硬化30分鐘,獲得試驗片。使試驗片浸漬在280℃之熔融焊料浴中歷時10秒作為1次循環,以目視觀察經過5次循環後之硬化膜狀態,且以下列3階段評價:○…感光層沒有剝離 △…感光層一部份剝離 ×…感光層大部份剝離或完全剝離As the substrate, an FR-4 substrate [manufactured by Sumitomo Backlight Co., Ltd., copper foil thickness: 18 μm] was used. The substrate with the photosensitive layer was exposed to light at a light amount of 1000 mJ/cm 2 . Subsequently, the base film was peeled off and post-hardened at 160 ° C for 30 minutes to obtain a test piece. The test piece was immersed in a molten solder bath of 280 ° C for 10 seconds as a single cycle, and the state of the cured film after 5 cycles was visually observed, and evaluated in the following three stages: ○...the photosensitive layer was not peeled off Δ...photosensitive layer Partial peeling ×... Most of the photosensitive layer is peeled off or completely peeled off

(絕緣信賴性)(insulation reliability)

使用由FR-4基板〔住友背光板公司製,銅箔厚度18μm〕作成之梳型試驗圖案(線路寬度100μm,線路間距100μm)基板,對附有感光層之基板以l000mJ/cm2 之光量曝光。隨後剝離基底薄膜,在160℃下後硬化30分鐘,獲得試驗片。使所得試驗片在溫度85℃、相對濕度85%之氛 圍中測定施加直流電50V之狀態放置250小時、500小時、1000小時後之絕緣電阻值。A comb-type test pattern (line width: 100 μm, line pitch: 100 μm) made of a FR-4 substrate (manufactured by Sumitomo Backlight Co., Ltd., copper foil thickness: 18 μm) was used, and the substrate with the photosensitive layer was exposed at a light amount of 1000 mJ/cm 2 . . Subsequently, the base film was peeled off and post-hardened at 160 ° C for 30 minutes to obtain a test piece. The obtained test piece was placed in an atmosphere of a temperature of 85 ° C and a relative humidity of 85% to measure the insulation resistance value after leaving the voltage of 50 V for 250 hours, 500 hours, and 1000 hours.

×…配線間短路,無法測得電阻值×... Short circuit between wiring lines, resistance value cannot be measured

依據表3,實施例1~8中之解像度、儲存安定性、難燃性、基板彎曲、耐彎曲性及焊料耐熱性之任何結果均良好,雖然絕緣信賴性在儲存1000小時後之電阻稍有降低,但可了解為實用上沒有任何問題之範圍內而為優異者。又,使用具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯之實施例9,其絕緣信賴性有稍微降低之傾向。另外,儘管使用不具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯,但質量平均分子量較小之實施例10中,基板彎曲及耐彎曲性稍有降低,但質量平均分子量較大之實施例11則有解像度降低之傾向。According to Table 3, any of the results in Examples 1 to 8 of resolution, storage stability, flame retardancy, substrate bending, bending resistance, and solder heat resistance were good, although the insulation reliability was slightly higher after 1000 hours of storage. It is reduced, but it can be understood that it is excellent in the range where there is no problem in practical use. Further, in Example 9 in which an urethane urethane having a polycarbonate polyol skeleton having a carboxyl group was used, the insulation reliability tends to be slightly lowered. Further, in the case of using the urethane urethane having a polycarbonate polyol skeleton having no carboxyl group, in the embodiment 10 having a small mass average molecular weight, the substrate bending and bending resistance were slightly lowered, but the mass average molecular weight was large. In the eleventh embodiment, there is a tendency that the resolution is lowered.

另一方面,依據表4,可了解比較例1~7中複數種評價項目均不良。尤其,全部比較例中之解像度均不良,絕緣信賴性除比較例6以外均相當的差,但比較例6之絕緣信賴性亦無法稱之為優良。On the other hand, according to Table 4, it can be understood that the plurality of evaluation items in Comparative Examples 1 to 7 are all bad. In particular, the resolution in all the comparative examples was poor, and the insulation reliability was not particularly good except for Comparative Example 6, but the insulation reliability of Comparative Example 6 could not be said to be excellent.

〔產業利用性〕[Industry Utilization]

本發明之感光性組成物為例如在薄膜支撐材上形成被覆膜,而可提供感光性乾膜,可較好使用作為光阻劑尤其作為抗焊劑等之電子材料,亦可使用於薄型印刷配線板或FPC基板之加工。The photosensitive composition of the present invention is, for example, a coating film formed on a film support material, and a photosensitive dry film can be provided. It can be preferably used as a photoresist, especially as an electronic material such as a solder resist, and can also be used for thin printing. Processing of wiring boards or FPC boards.

另外,亦可作為塗料等之塗覆劑、油墨而使用。Moreover, it can also be used as a coating agent and ink of a coating material.

Claims (8)

一種感光性組成物,其含有具有源自環氧化合物骨架且具備羧基以及游離基聚合性基之化合物(A)、具有不具有羧基之聚碳酸酯多元醇骨架之丙烯酸胺基甲酸酯(B)、具有游離基聚合性基之除(A)與(B)以外之聚合性化合物(C)、含磷原子之填料(D)及光聚合起始劑(E),上述丙烯酸胺基甲酸酯(B)之質量平均分子量為2,000~50,000,上述含磷原子之填料(D)為膦酸類之金屬鹽,以成份(A)、成份(B)及成份(C)之合計量100質量份為基準,含有1~70質量份之成份(D)。 A photosensitive composition containing a compound (A) having a carboxyl group and a radical polymerizable group derived from an epoxy compound skeleton, and an urethane urethane having a polycarbonate polyol skeleton having no carboxyl group (B) a polymerizable compound (C) other than (A) and (B) having a radical polymerizable group, a filler (D) containing a phosphorus atom, and a photopolymerization initiator (E), the above urethane carboxylic acid The ester (B) has a mass average molecular weight of 2,000 to 50,000, and the phosphorus atom-containing filler (D) is a phosphonic acid metal salt, and the total amount of the component (A), the component (B) and the component (C) is 100 parts by mass. As a standard, it contains 1 to 70 parts by mass of the component (D). 如申請專利範圍第1項之感光性組成物,其中以成份(A)及成份(B)之合計量100質量份為基準,含有20~90質量份之成份(A),10~80質量份之成份(B),5~50質量份之成份(C)。 The photosensitive composition of claim 1 which contains 20 to 90 parts by mass of the component (A), 10 to 80 parts by mass based on 100 parts by mass of the total of the component (A) and the component (B). Ingredient (B), 5 to 50 parts by mass of component (C). 如申請專利範圍第1項之感光性組成物,其中具有源自環氧化合物之骨架且具備羧基以及游離基聚合性基之化合物(A)係使環氧化合物與不飽和單羧酸進行加成反應,並使所生成之羥基與多元酸酐進行加成反應所得之化合物。 The photosensitive composition of claim 1, wherein the compound (A) having a skeleton derived from an epoxy compound and having a carboxyl group and a radical polymerizable group is added to an epoxy compound and an unsaturated monocarboxylic acid. The reaction is carried out, and the resulting hydroxyl group is reacted with a polybasic acid anhydride to carry out an addition reaction. 如申請專利範圍第1項之感光性組成物,其中具有游離基聚合性基之除(A)及(B)以外之聚合性化合物(C)為1分子中具有3個以上之(甲基)丙烯醯基之化 合物。 The photosensitive composition of the first aspect of the invention, wherein the polymerizable compound (C) other than (A) and (B) having a radical polymerizable group has three or more (meth) groups per molecule. Acrylamide Compound. 如申請專利範圍第1項之感光性組成物,其中含磷原子之填料(D)為膦酸類之鋁鹽。 The photosensitive composition of claim 1, wherein the filler (D) containing a phosphorus atom is an aluminum salt of a phosphonic acid. 如申請專利範圍第1項之感光性組成物,其中亦含有含磷原子之填料(D)以外之磷化合物(F)。 The photosensitive composition of claim 1, which also contains a phosphorus compound (F) other than the filler (D) containing a phosphorus atom. 一種抗焊劑,其係含有申請專利範圍第1~6項中任一項之感光性組成物。 A solder resist comprising the photosensitive composition according to any one of claims 1 to 6. 一種感光性乾膜,其係在支撐薄膜上形成含有申請專利範圍第1~6項中任一項之感光性組成物之被覆膜。 A photosensitive dry film which is formed on a support film to form a coating film containing the photosensitive composition according to any one of claims 1 to 6.
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