TWI438799B - 線圈架、帶電粒子束系統用偏向器單元及製造線圈架之方法 - Google Patents
線圈架、帶電粒子束系統用偏向器單元及製造線圈架之方法 Download PDFInfo
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- TWI438799B TWI438799B TW095130934A TW95130934A TWI438799B TW I438799 B TWI438799 B TW I438799B TW 095130934 A TW095130934 A TW 095130934A TW 95130934 A TW95130934 A TW 95130934A TW I438799 B TWI438799 B TW I438799B
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- ceramic sheets
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- bobbin
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- 239000002245 particle Substances 0.000 title claims description 12
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000919 ceramic Substances 0.000 claims description 73
- 229910010293 ceramic material Inorganic materials 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- IJVRPNIWWODHHA-UHFFFAOYSA-N 2-cyanoprop-2-enoic acid Chemical compound OC(=O)C(=C)C#N IJVRPNIWWODHHA-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910003468 tantalcarbide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F5/00—Coils
- H01F5/02—Coils wound on non-magnetic supports, e.g. formers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/14—Arrangements for focusing or reflecting ray or beam
- H01J3/20—Magnetic lenses
- H01J3/22—Magnetic lenses using electromagnetic means only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/26—Arrangements for deflecting ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/06—Coil winding
- H01F41/071—Winding coils of special form
- H01F2041/0711—Winding saddle or deflection coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/20—Electromagnets; Actuators including electromagnets without armatures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
- Y10T156/1062—Prior to assembly
- Y10T156/1075—Prior to assembly of plural laminae from single stock and assembling to each other or to additional lamina
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Particle Accelerators (AREA)
- Electromagnets (AREA)
- Windings For Motors And Generators (AREA)
- Insulating Of Coils (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Description
本發明係關於一種線圈架(coil former)。
例如電子束平版印刷系統等帶電粒子束系統中,線圈係被用來使帶電粒子束偏向及聚焦。該線圈係裝設在含有陶瓷或塑膠等電絕緣性材料之線圈架上。
在GB-A-2389225中有描述一種由具有高熱傳導及低熱膨脹性之高強度非磁性及非電導性陶瓷材料製成之線圈架。但,只有極少數之具有適當磁性、電氣及熱性質之陶瓷能被使用,因為它們難用機製法在避免破裂情形下成形為複雜的形狀。能夠用機製法形成之適宜陶瓷雖有SHAPAL-M(註冊商標),但價格昂貴。即使陶瓷材料能機製成形,但亦難將其製成複雜之形狀。
本發明尋找可將上述若干缺失改良之方案。
本發明提供一種疊層式陶瓷線圈架。
該線圈架可包含複數之陶瓷片,將其配置成在第一及第二端部形成一疊層體(laminate),各陶瓷片上具有一開口,使得當該等陶瓷片配置成疊層體時,在該等第一及第二端部之間界定一通道(passage)。
本發明亦提供一種線圈架,其包含配置成在第一及第二端部之間形成一疊層體之複數之陶瓷片,各陶瓷片具有一開口,使得將該等陶瓷片配置成疊層體時,在該第一及
第二端部之間界定一通道。
這能有助於簡化線圈架之製造,因為各個陶瓷片可從陶瓷板切割而得,如此可擴大陶瓷材料之應用範圍。
陶瓷片可同心地配置且可包含平坦、環狀盤。各個陶瓷片可包含由開口延伸之至少一對槽孔(slots),使得當該等陶瓷片疊層配置及轉動地對準時,該疊層體界定至少一對之長形槽孔以供容納線圈。此等陶瓷片可為完全相同,而且可藉耐熱性粘膠或第一及第二端部之間之箝,結合成一體。陶瓷片的厚度為0.5~2.0mm,直徑為10~50mm範圍。上述線圈架可包含10~30片之陶瓷片。
本發明更提供一種帶電粒子束系統用之偏向器單元(deflector unit),該偏向器單元含有如同上述任何主張內容之線圈架及纏繞於該線圈架上之至少一線圈。該偏向器單元可包含一對線圈,其以互相徑向相對的配置於該通道之任一側。
本發明另又提供一種線圈架之製造方法,該方法包括如下步驟:從陶瓷材料板切取多數之陶瓷片,每一陶瓷片具有一開口,以及配置此陶瓷片,使這些複數之陶瓷片在第一及第二端部之間形成一疊層體並且在該等第一及第二端部界定一通道。
由圖1~4所示,根據本發明之線圈架1的一實施例包含複數之陶瓷片2,其配置來在第一及第二端部4,5之間形成疊層體3。該等陶瓷片2通常為平坦環形盤之形式。
每一陶瓷片2具有一開口6,致使它們配置成形成疊層體3時,在第一及第二端部4,5之間界定一個通道7。該疊層體3較佳地由10~30片之陶瓷片2構成。該疊層體3大致呈管體狀。該疊層體3可沿陶瓷片2配置之軸線Γ延伸。
上述陶瓷片2係由氮化鋁形成,但氮化硼、碳化矽及氧化鋁等其他非磁性及非電導性陶瓷材料亦可用。將於下面詳細說明,陶瓷片2可從陶瓷材料板以例如雷射切割法來切取使用。因此該陶瓷材料不需要為可機製材料,於是亦可用軟質陶瓷材料。
陶瓷片2可用例如氰基丙烯酸等耐熱性粘膠疊合一體。另外或可替代地,該等陶瓷片2可利用一箝(未繪示)疊合一體。
每一陶瓷片2均具有內側及外側緣或周緣部8、9。當陶瓷片2配置成疊層體3時,其內側及外側緣8、9乃分別界定內側壁10及外側壁11。內側壁10界定該通道7。該通道7沿其長度通常具有均一之厚度。
每一陶瓷片2之內側緣8均備有至少一對之徑向槽孔12。因此,當多數之陶瓷片2係遭配置且轉動地對準時,則可在叠層體3之第一及第二端部4、5之間形成沿通道7之內壁10延伸之一組長形槽孔13。上述之轉動的對準可將相同之陶瓷片2同心地疊置或堆疊而達成。
陶瓷片2最好為平坦環狀盤的形式,其具有同軸心之內側及外側周緣8、9。
上述陶瓷片2最好地具有一直徑d1
,其介於10~50mm,
且開口6具有一直徑d2
,其介於5~25mm。該等槽孔12最好地具有徑向深度r,其介於0.5~2mm,寬度w,其介於0.5~2mm,且以30度及60度之間隔θ交替的配置。陶瓷片2之厚度t最好為0.5~2mm。實施例中,每一片陶瓷片2厚度為1mm。
次說明陶瓷片2之製造方法。
含有開口6之陶瓷片2係從商業上可得之陶瓷材料(未圖示),藉由例如Nd:YAG雷射,依習知方法切割而得。
於陶瓷片2之上表面塗佈抗熱性低粘度之粘膠,然後在其上面同心地放置另一片陶瓷片2。低粘度之粘膠具有可塗佈均勻厚度之粘膠的優點。堆疊陶瓷片2時必須確保各陶瓷片的槽孔12以沿著與軸Γ平行之一線配置(如圖1)。
現說明圖5及6,用於帶電粒子束系統(未圖示)之偏向器單元14包含線圈架1(圖1所示者)及被此線圈架1所支持之至少一個線圈15。為清楚起見,在圖中只示出一個線圈15。線圈15包含具有絕緣皮層之銅線形成之一至多環圈。此線圈15之至少一部分係安置於一對之長形槽孔13中。
在使用時,當電流流過線圈15時,產生磁場(未圖示),該磁場影響帶電粒子束16通過偏向器單元14。
上述偏向器單元14可用於電子束平版印刷系統、離子束注入系統或電子顯微鏡。有關偏向器單元在帶電粒子束系統中之配置及操作之細節可參見前文所提之
GB-A-2389225。
應知,對於上面所述之實例尚可作許多之變更及修改。例如陶瓷片不必全部相同;陶瓷片不必一定是圓形,可為多角形。此外,開口不必是圓形,可為多角形。另外,陶瓷片不必環繞開口形成為密閉之構造。
1‧‧‧線圈架
2‧‧‧陶瓷片
3‧‧‧疊層體
4‧‧‧第一端部
5‧‧‧第二端部
6‧‧‧開口
7‧‧‧通道
8‧‧‧內側緣
9‧‧‧外側緣
10‧‧‧內側壁
11‧‧‧外側壁
12‧‧‧槽孔
13‧‧‧槽孔
14‧‧‧偏向器單元
15‧‧‧線圈
16‧‧‧帶電粒子束
圖1為本發明線圈架之斜視圖;圖2為本發明陶瓷片之斜視圖;圖3為圖2所示陶瓷片的平面圖;圖4為圖2所示陶瓷片的正面圖(即前視圖);圖5為圖1所示線圈架上裝有線圈之斜視圖;及圖6為圖5所示線圈之斜視圖。
1‧‧‧線圈架
2‧‧‧陶瓷片
3‧‧‧疊層體
4‧‧‧第一端部
5‧‧‧第二端部
7‧‧‧通道
10‧‧‧內側壁
11‧‧‧外側壁
13‧‧‧槽孔
Γ‧‧‧軸線
Claims (14)
- 一種非磁性疊層式陶瓷線圈架,其係用於一偏向器單元,該偏向器單元係用以將一帶電粒子束偏向通過該偏向器單元以供於一帶電粒子束系統中使用,該線圈架包括:複數之陶瓷片,其係配置來於第一及第二端部之間形成一疊層體,每一陶瓷片具有一開口,使得當該等陶瓷片配置成疊層體時,在該等第一及第二端部間界定一通道。
- 如請求項1之線圈架,其中該等陶瓷片係同心地配置。
- 如請求項2之線圈架,其中該等陶瓷片包含平坦環狀盤。
- 如請求項2之線圈架,其中每一陶瓷片包括從該開口伸展之至少一對槽孔,使得當將該等陶瓷片配置成疊層體並且轉動地對準時,該疊層體界定用以容納一線圈之至少一對長形槽孔。
- 如請求項2之線圈架,其中該等陶瓷片係皆相同。
- 如請求項2之線圈架,其中該等陶瓷片係使用抗熱性粘膠保持一體。
- 如請求項2之線圈架,其中該等陶瓷片係使用該等第一及第二端部間之一箝保持一體。
- 如請求項2之線圈架,其中該等陶瓷片包含氮化鋁。
- 如請求項2之線圈架,其中該等陶瓷片具有一厚度,其係介於0.5~2mm。
- 如請求項2之線圈架,其中該等陶瓷片具有一直 徑,其係介於10~50mm。
- 如請求項2之線圈架,包含介於10到30片之間的陶瓷片。
- 一種帶電粒子束系統用折射偏向器單元,其包含:如請求項1所述之一線圈架;及纏繞於該線圈架上之至少一線圈。
- 如請求項12之偏向器單元,其包含一對線圈,其係互相徑向相對地配置於該通道之任一側。
- 一種製造線圈架以供於帶電粒子束系統中使用之方法,該方法含下列步驟:從陶瓷材料板切取複數陶瓷片,各陶瓷片具有一開口;及配置該等陶瓷片,使得該等複數陶瓷片在第一及第二端部之間形成一非磁性疊層體,並且在該等第一及第二端部之間界定一通道。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0517859A GB2429834C (en) | 2005-09-02 | 2005-09-02 | Coil former |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200715317A TW200715317A (en) | 2007-04-16 |
TWI438799B true TWI438799B (zh) | 2014-05-21 |
Family
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TW095130934A TWI438799B (zh) | 2005-09-02 | 2006-08-23 | 線圈架、帶電粒子束系統用偏向器單元及製造線圈架之方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20090114855A1 (zh) |
EP (1) | EP1920446B1 (zh) |
CN (1) | CN101253584B (zh) |
GB (1) | GB2429834C (zh) |
TW (1) | TWI438799B (zh) |
WO (1) | WO2007026181A1 (zh) |
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DE102014211694B4 (de) * | 2014-06-18 | 2016-06-16 | Siemens Healthcare Gmbh | Röntgenröhre |
US20240266143A1 (en) * | 2023-02-03 | 2024-08-08 | Ii-Vi Delaware, Inc. | Systems and methods for aluminum ion beam generation source technology |
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US2982889A (en) * | 1957-05-23 | 1961-05-02 | Rea Magnet Wire Company Inc | Disc type hermetically sealed electrical component |
GB964006A (en) * | 1960-12-15 | 1964-07-15 | James Gagg | Mechanism for joining webs of material |
US3787696A (en) * | 1972-03-15 | 1974-01-22 | Etec Corp | Scanning electron microscope electron-optical column construction |
US3808568A (en) * | 1973-07-27 | 1974-04-30 | Display Co Inc | Stator yoke |
US4093132A (en) * | 1973-08-29 | 1978-06-06 | International Business Machines Corporation | Method of winding a magnetic deflection yoke |
GB2131626B (en) * | 1982-11-12 | 1986-02-05 | Gen Electric Plc | Variable set core for choke or transformer |
EP0238261B1 (en) * | 1986-03-19 | 1991-01-16 | Kabushiki Kaisha Toshiba | Deflection device for a cathode ray tube |
US4707313A (en) * | 1986-07-02 | 1987-11-17 | A. O. Smith Corporation | Method of making a laminated structure for use in an electrical apparatus |
US5012104A (en) * | 1990-05-17 | 1991-04-30 | Etec Systems, Inc. | Thermally stable magnetic deflection assembly and method of making same |
CN2121076U (zh) * | 1992-04-11 | 1992-11-04 | 东南大学 | 叠层式内偏转线圈 |
GB2389225B (en) * | 2002-05-31 | 2004-07-28 | Leica Microsys Lithography Ltd | Device for influencing an electron beam |
US6838811B2 (en) * | 2002-06-07 | 2005-01-04 | Matsushita Electric Industrial Co., Ltd. | Deflection yoke and CRT device |
US9659758B2 (en) * | 2005-03-22 | 2017-05-23 | Honeywell International Inc. | Coils utilized in vapor deposition applications and methods of production |
-
2005
- 2005-09-02 GB GB0517859A patent/GB2429834C/en active Active
-
2006
- 2006-08-23 TW TW095130934A patent/TWI438799B/zh active
- 2006-09-01 US US11/991,433 patent/US20090114855A1/en not_active Abandoned
- 2006-09-01 WO PCT/GB2006/050268 patent/WO2007026181A1/en active Application Filing
- 2006-09-01 EP EP06779622.7A patent/EP1920446B1/en active Active
- 2006-09-01 CN CN2006800320821A patent/CN101253584B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
WO2007026181A1 (en) | 2007-03-08 |
GB2429834A (en) | 2007-03-07 |
GB2429834C (en) | 2011-08-24 |
GB2429834B (en) | 2011-08-10 |
EP1920446A1 (en) | 2008-05-14 |
CN101253584B (zh) | 2012-08-08 |
CN101253584A (zh) | 2008-08-27 |
GB0517859D0 (en) | 2005-10-12 |
TW200715317A (en) | 2007-04-16 |
US20090114855A1 (en) | 2009-05-07 |
EP1920446B1 (en) | 2014-12-10 |
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