TWI438298B - Apparatus for supplying materials - Google Patents

Description

Equipment for supplying materials Cross-reference to related applications

The present invention claims priority to and the benefit of the Korean Patent Application No. 10-2011-0034341, filed on Jan.

The present invention relates to an apparatus for supplying a material, and more particularly to an apparatus for supplying a material which can evaporate and supply an organic substance to be deposited on a substrate in a film form.

The organic light-emitting device is a next-generation display device, and the next-generation display device can emit light in itself, and the viewing angle, contrast, and contrast of the next-generation display device are compared with the viewing angle, contrast, response speed, power consumption, and the like of the liquid crystal display (LCD) device. Response speed, power consumption, etc. are very good.

The organic light-emitting device includes an organic light-emitting diode, and the organic light-emitting diode is connected in a matrix type between the scan line and the data line to form a picture element. The organic light emitting diode includes an anode, a cathode, and an organic thin film layer formed between the anode and the cathode and having a hole transport layer, an organic light emitting layer, and an electron transport layer. When scheduled When a pressure is applied between the anode and the cathode, the holes injected from the anode and the electrons injected from the cathode are recombined in the light-emitting layer while emitting light based on the energy difference.

The organic substance used in the deposition process for the organic thin film layer does not require high vapor pressure, but the organic substance is easily decomposed and denatured into an inorganic substance at a high temperature. Due to these material characteristics, the source container made of a tungsten material is filled with an organic substance, and the source container is heated to evaporate the organic substance, thereby depositing a conventional organic thin film on the substrate.

Conventional manufacture of an organic light-emitting diode has been performed under vacuum conditions isolated from external conditions, and thus, when the source material for manufacturing the organic light-emitting diode is refilled, it is inevitable that the device is suspended. In addition, if a large-capacity source container is used to increase the filling amount and prolong the pause period, the source material may deteriorate and denature, and the equipment needs to be maintained each time the source container is replaced.

Further, in the conventional apparatus, the amount of evaporation varies depending on the consumption of the source material, and therefore, the device manufactured is not reliable due to the change in the thickness of the film deposited on the substrate.

Accordingly, the present invention has been conceived to solve the aforementioned problems, and an aspect of the present invention is to provide an apparatus for supplying a material in which a source material and a heater for supplying heat to the source material to evaporate the source material are provided Adjust the distance between the source material and the heater in one space and according to the evaporation of the source material Thereby, the constant thickness of the organic light-emitting diode deposited on the substrate is maintained and a reliable organic light-emitting diode is fabricated.

According to an exemplary embodiment of the present invention, there is provided an apparatus for supplying a material that evaporates a source material to be deposited as a thin film on a substrate, and the apparatus supplies the evaporation source material to an injection hole facing the substrate, the apparatus including a source container, the source material to be deposited on the substrate is contained in the source container in a solid or liquid state; an evaporation chamber including an inner space for mounting the source container therein, and the evaporated source material from the source container is worn a first heater, a first heater is provided above the source container located in the evaporation chamber, and the first heater supplies heat to the source container to evaporate the source material contained in the source container; and a transfer unit, The transfer unit reciprocates one of the first heater and the source container in a direction that is close to the other or away from the other.

The apparatus may further include a baffle provided above the first heater located within the evaporation chamber, and the baffle intercepts heat transferred from the outside to the inside of the evaporation chamber.

The apparatus may further include: a cooler installed in a lower portion of the evaporation chamber to be adjacent to the liquid or solid source material, and the cooler cooling the source material contained in the source container; and a second heater, the second heater Installed in the upper portion of the evaporation chamber and separated from the liquid or solid source material, and the second heater supplies heat to the evaporation chamber to prevent the vaporized source material passing through the evaporation chamber from becoming liquid or solid.

The transfer unit may include: a rod unit that penetrates the top of the evaporation chamber, The rod unit is coupled to the first heater, and the rod unit reciprocates up and down in the evaporation chamber together with the first heater; a driving source that supplies a driving force for reciprocating the rod unit; and a controller that is connected to the controller The drive source and the direction and speed of the joystick unit.

The transfer unit may include: a rod unit penetrating the bottom of the evaporation chamber, the rod unit being coupled to the source container, and the rod unit and the source container reciprocating up and down together in the evaporation chamber; the driving source and the driving source are supplied for reciprocating the rod unit The driving force of the motion; and the controller, the controller is connected to the driving source and the direction and speed of the control rod unit are transmitted.

According to an exemplary embodiment of the present invention, there is provided an apparatus for supplying a material that evaporates a source material to be deposited as a thin film on a substrate, and the apparatus supplies the evaporation source material to an injection hole facing the substrate, the apparatus including a source container, the source material to be deposited on the substrate is contained in a lower portion of the source container in a solid or liquid state, and the evaporation source material passes through the source container at an upper portion of the source container; the first heater, the first heater is installed at Located above the solid or liquid source material within the source container, and the first heater supplies heat to the solid or liquid source material to evaporate the source material; and a transfer unit that causes one of the first heater and the source material Reciprocating in a direction that is close to or away from the other.

The apparatus can further include a baffle provided above the first heater located within the source container, and the baffle intercepts heat transferred from the outside to the inside of the source container.

The apparatus may further include: a cooler installed in a lower portion of the source container to be adjacent to the liquid or solid source material, and the cooler cooling the source material contained in the source container; and a second heater, the second heater Installed in the upper portion of the source vessel and separated from the liquid or solid source material, and the second heater supplies heat to the source vessel to prevent the vaporized source material passing through the source vessel from becoming liquid or solid.

The transfer unit may include: a rod unit penetrating the top of the source container, the rod unit being coupled to the first heater, and the rod unit and the first heater reciprocating up and down in the source container; the driving source, the driving source supply a driving force for reciprocating the lever unit; and a controller that is connected to the driving source and that controls the direction and speed of the lever unit.

The transfer unit may include: a rod unit penetrating the bottom of the source container, the rod unit contacting the source material, and the rod unit and the source material reciprocating up and down together in the source container; the driving source, the driving source is supplied for reciprocating the rod unit The driving force of the motion; and the controller, the controller is connected to the driving source and the direction and speed of the control rod unit are transmitted.

As described above, in an apparatus for supplying a material according to an exemplary embodiment of the present invention, a source material and a heater for supplying heat to the source material to evaporate the source material are provided in one space, and according to the source material The amount of evaporation adjusts the distance between the source material and the heater, thereby maintaining a constant thickness of the organic light-emitting diode deposited on the substrate regardless of the consumption of the source material, and producing a reliable organic light-emitting diode.

Moreover, in an apparatus for supplying a material according to an exemplary embodiment of the present invention, in the absence of a medium, heat is directly transferred from the first heater to the source container so that the first heater can be used The temperature control quickly realizes the temperature rising reaction of the source material in the source container; the source material can be stably evaporated to achieve uniform deposition and large-area deposition; and a large amount of source material can be prevented from denaturation.

Further, in the apparatus for supplying a material according to an exemplary embodiment of the present invention, the baffle serves to completely intercept heat transferred from the outside to the inside of the evaporation chamber, thereby eliminating external factors that may affect the amount of the evaporation source material.

An exemplary embodiment of an apparatus for supplying materials according to the present invention will hereinafter be described with reference to the accompanying drawings.

1 is a schematic view of an apparatus for supplying materials according to a first exemplary embodiment of the present invention, and FIG. 2 is a view showing a first heater moving to approach a source container in the apparatus for supplying materials of FIG. 1. .

Referring to FIGS. 1 and 2, the apparatus for supplying materials in this exemplary embodiment is an apparatus capable of evaporating and supplying an organic substance to be deposited on a substrate in a film form, the apparatus including a source container 110, an evaporation chamber 120, The first heater 130, the transfer unit 140, the baffle 150, the cooler 160, and the second heater 170.

The present invention provides an apparatus for manufacturing an organic light emitting device (OLED), For example, in the apparatus, the source material used in the exemplary embodiment may be an organic substance.

The syringe 10 shown in Fig. 1 is formed internally with a passage, the passage is in communication with the connecting tube 20, and the syringe 10 has an injection hole 11 through which the evaporation source material 1 is sprayed at the end of the syringe. At this time, the syringe 10 is linearly formed such that the ejection holes 11 are aligned to face the substrate. Further, the injection hole 11 may be formed as a separation portion in the form of a nozzle and coupled to the end of the syringe 10, or the injection hole 11 may be integrally molded at the end of the syringe 10 in the form of a through hole.

The connection tube 20 connects the evaporation chamber 120 and the syringe 10 so that the source material 1 evaporated via the first heater 130 described later can flow to the syringe 10. The connecting tube 20 is detachably coupled to the syringe 10 and the evaporation chamber 120.

The source material 1 to be deposited on the substrate 10 is housed in the source container 110 in a solid or liquid state, and the source container 110 is shaped like a cylinder that is opened on one side. For example, the source container 110 is made of a tungsten material, and the source container 110 is disposed below the evaporation chamber 120. The source container 110 is internally filled with an organic substance as the source material 1 to be deposited on the substrate.

The evaporation chamber 120 has an internal space in which the source container 110 is installed. Below the internal space of the evaporation chamber 120, the source container 110 is disposed in communication with the evaporation chamber 120. Above the internal space of the evaporation chamber 120, a space through which the evaporation source material 1 passes is formed.

The source material 1 housed in the source container 110 in a solid or liquid state is heated by the first heater 130, and is heated and vaporized upward in the inner space of the evaporation chamber 120 via the heat source material 1. The evaporation source material 1 passes through the evaporation chamber 120 and is sprayed toward the substrate via the ejection holes 11.

Source container 110 is detachably coupled to evaporation chamber 120. When the source material 1 (i.e., organic matter) to be deposited on the substrate 10 is filled in the source container 110, the deposition process is suspended, and the source container 110 is separated from the evaporation chamber 120. Thereafter, if the source material 1 is completely filled in the source container 110, the source container 110 is again disposed in the internal space of the evaporation chamber 120, and the deposition process is restarted.

The first heater 130 that supplies heat to the source container 110 to evaporate the source material 1 contained in the source container 110 is installed above the source container 110 in the evaporation chamber 120.

The first heater 130 can have various shapes as long as the first heater 130 can supply the heat energy of the evaporation source material 1. For example, a magnetic core heater, a lamp heater, or the like can be used. In this exemplary embodiment, a core heater is used as the first heater 130. At this time, the resistive hot wire may include Ta, W, Mo or an alloy of the above substances.

However, in this exemplary embodiment, the first heater 130 is installed in the same space as the source container 110 accommodating the source material 1 so that the heat from the first heater 130 can be directly in the absence of a medium Passed to source container 110 1 . Therefore, the temperature rise reaction of the source material 1 in the source container 110 can be quickly achieved by temperature control of the first heater 130.

The transfer unit 140 reciprocates one of the first heater 130 and the source container 110 in a direction approaching or away from each other. In this exemplary embodiment, the first heater 130 is reciprocated. The distance between the source container 110 and the first heater 130 is adjusted via the transfer unit 140, and thus it is possible to control the amount of the source material 1 evaporated in the source container 110.

For example, if the amount of the evaporation source material 1 is small, the first heater 130 is transferred in a direction close to the source material 1, and more heat is supplied to the source container 110, thereby increasing evaporation in the source container 110. The amount of source material 1. On the other hand, if the amount of the evaporation source material 1 is large, the first heater 130 is transferred in a direction away from the source material 1, and less heat is supplied to the source container 110, thereby reducing the source of evaporation in the source container 110. The amount of material 1.

Depending on the amount of source material 1 remaining in the source container 110, it is possible to adjust the distance between the source container 110 and the first heater 130. If the source material 1 is consumed, and thus the volume of the source material 1 remaining in the source container 110 is reduced, then only a small amount of heat is supplied to the source container 110 to maintain a uniform amount of evaporation. In this case, the first heater 130 is transferred in a direction away from the source material 1. On the other hand, if the source container 110 is refilled with the new source material 1 and the volume of the source material 1 remaining in the source container 110 is increased, more heat needs to be supplied to the source container 110 to maintain a uniform evaporation amount. In this case, the first heater 130 is transferred in a direction close to the source material 1.

In this exemplary embodiment, the transfer unit 140 includes a lever unit 141, a drive source 142, and a controller 143.

The rod unit 141 penetrates the top of the evaporation chamber 120 and is coupled to the first heater 130 such that the rod unit 141 can reciprocate up and down within the evaporation chamber 120 together with the first heater 130. At this time, the bellows 144 is provided around the rod unit 141 in the evaporation chamber 120, and thus the attachment of the evaporation source material 1 to the rod unit 141 is prevented.

When the rod unit 141 is installed to penetrate the top of the evaporation chamber 120, it is possible to reduce the overall size of the apparatus. That is, the region that evaporates and passes through the source material 1 partially overlaps the region of the mounting bar unit 141, so that the additional space required for fixing the full stroke of the lever unit 141 can be correspondingly reduced.

The drive source 142 provides a driving force for reciprocating the lever unit 141. As long as the drive source 142 can perform linear reciprocating motion, the drive source 142 can be configured in various forms. For example, a pneumatic cylinder, a linear motor, a combination of a swing motor and a ball screw, and the like, which are well known to those skilled in the art, can be used, and thus a detailed description of the above apparatus will be omitted.

The controller 143 is connected to the drive source 142 and controls the direction and speed of transmission of the lever unit 141.

The baffle 150 will intercept heat transferred from the outside of the evaporation chamber 120 to the inside, and the baffle 150 is installed above the first heater 130 in the internal space of the evaporation chamber 120.

Heat emitted from the evaporation source material 1 accommodated in the syringe 10 or the connecting tube 20 may be transferred to the internal space of the evaporation chamber 120 via a communication process. here In this case, the amount of the evaporation source material 1 is changed by an unexpected external factor, and the amount is controlled based on the distance between the first heater 130 and the source material 1 or the temperature of the first heater 130. The change in the amount of the evaporation source material 1 directly affects the thickness of the organic light-emitting diode and results in a defective product.

Therefore, the baffle 150 serves to completely intercept the heat transferred from the outside to the inside of the evaporation chamber 120, thereby eliminating external factors that can affect the amount of the evaporation source material 1.

The baffle 150 is shaped like a flat plate and spaced apart from the inner wall of the evaporation chamber 120 by a predetermined distance. The evaporation source material 1 can move through the space between the baffle 150 and the inner wall of the evaporation chamber 120.

The cooler 160 cools the source material 1 housed in the source container 110 to prevent the source material 1 contained in the source container 110 from being denatured due to heat from the first heater 130. The cooler 160 is mounted outside the source container 110 so as to be adjacent to the liquid or solid source material 1 and may be configured to surround the outer wall of the evaporation chamber 120 below the evaporation chamber 120.

The cooler 160 may be in various forms capable of cooling the inside of the source container 110 in which the active material 1 is filled. In this exemplary embodiment, a cooling jacket is used as an example. The cooler 160 is disposed by surrounding the outer wall of the evaporation chamber 120 with a cooling passage through which a coolant flows.

The second heater 170 is installed at an upper portion of the evaporation chamber 120 to be separated from the liquid or solid source material 1, and the second heater 170 supplies heat to the evaporation chamber 120 to prevent the evaporation source material 1 passing through the evaporation chamber 120 from being phase-changed to Liquid or solid.

For example, the second heater 170 may use a core heater, a lamp heater, or the like, and is formed in such a manner that an upper outer wall of the evaporation chamber 120 is surrounded by a resistive hot wire. The resistive hot wire used at this time may contain Ta, W, Mo or an alloy of the above.

As described above, in an apparatus for supplying a material according to an exemplary embodiment of the present invention, a source material and a heater for supplying heat to the source material to evaporate the source material are provided in one space, and according to the source material The amount of evaporation adjusts the distance between the source material and the heater, thereby maintaining a constant thickness of the organic light-emitting diode deposited on the substrate regardless of the consumption of the source material, and producing a reliable organic light-emitting diode.

Further, in an apparatus for supplying a material according to an exemplary embodiment of the present invention, heat is directly transferred from the first heater to the source container without a medium so that the temperature of the first heater can be utilized Controls the rapid temperature reaction of the source material in the source vessel; the source material can be stably evaporated to achieve uniform deposition and large area deposition; and a large amount of source material can be prevented from denaturation.

Further, in an apparatus for supplying a material according to an exemplary embodiment of the present invention, a baffle is used to completely intercept heat transferred from the outside of the evaporation chamber to the inside, thereby reducing external factors that may affect the amount of evaporation source material. .

Further, in an apparatus for supplying a material according to an exemplary embodiment of the present invention, a first heater is reciprocated rather than a heavier source container accommodating a source material to avoid an excessive load transfer motion and to have a constant The quality of the first heater instead of the quality of the source material changes the source of the container reciprocating Exercise to easily control the transfer movement.

Further, in an apparatus for supplying a material according to an exemplary embodiment of the present invention, a rod unit is installed to penetrate a top portion of an evaporation chamber such that an area that evaporates and passes through the source material may be associated with a region portion of the mounting rod unit Overlap, thereby correspondingly reducing the additional space required to secure the full stroke and reducing the overall size of the device.

3 is a schematic diagram of an apparatus for supplying materials in accordance with a second exemplary embodiment of the present invention.

Referring to FIG. 3, the apparatus 200 for supplying materials according to the present exemplary embodiment is characterized in that, unlike the apparatus of the first exemplary embodiment in which the first heater 130 reciprocates, the apparatus 200 reciprocates the source container 110 motion. In FIG. 3, elements have the same configurations and functions as those of the elements of the same element symbols shown in FIGS. 1 and 2, and thus detailed descriptions of the elements will be omitted.

The transfer unit 240 in this exemplary embodiment reciprocates the source container 110 to reciprocally transfer the first heater 130 and the source container 110 in directions toward or away from each other. The influence caused by adjusting the distance between the source container 110 and the first heater 130 via the transfer unit 240 is the same as that of the first exemplary embodiment, and thus a detailed description of this influence will be omitted.

In this exemplary embodiment, the transfer unit 240 includes a lever unit 241, a drive source 242, and a controller 243.

The rod unit 241 penetrates the bottom of the evaporation chamber 120 and is coupled to the source container 110 such that the rod unit 241 can reciprocate up and down within the evaporation chamber 120 along with the source container 110.

The driving source 242 supplies a driving force for reciprocating the lever unit 241, and the controller 243 is connected to the driving source 242 and controls the transmission direction and speed of the lever unit 241.

4 is a schematic diagram of an apparatus for supplying materials in accordance with a third exemplary embodiment of the present invention.

Referring to FIG. 4, the apparatus 300 for supplying materials according to the present exemplary embodiment is characterized in that the source container and the evaporation chamber are not separately provided, and the source container not only accommodates the source material but also passes the evaporation source material therethrough. Further, the apparatus 300 for supplying materials according to this exemplary embodiment includes a source container 310, a first heater 330, a transfer unit 340, a shutter 350, a cooler 360, and a second heater 370.

The source container 310 accommodates the source material 1 to be deposited on the substrate in a solid or liquid state in the lower portion of the source container 310, and passes the evaporation source material 1 therethrough in the upper portion of the source container 310. The lower portion of the source container 310 is filled with an organic substance as the source material 1 to be deposited on the substrate.

The solid or liquid source material 1 contained in the lower portion of the source container 310 is heated by the first heater 330, and is vaporized toward the upper portion of the source container 310 and evaporated by the heat source material 1. The evaporation source material 1 passes through the source container 310 and is subsequently passed via The ejection holes 11 are ejected toward the substrate.

The first heater 330 that supplies heat to the source container 310 to evaporate the source material 1 contained in the source container 310 is installed above the source material 1 in the source container 310. The material and function of the first heater 330 are the same as those of the first heater 130 of the first exemplary embodiment, and thus a detailed description of the materials and functions of the first heater 330 will be omitted.

The transfer unit 340 reciprocates the first heater 330 in a direction close to the source material 1 or away from the source material 1. The influence caused by adjusting the distance between the first heater 330 and the source material 1 via the transfer unit 340 is the same as that of the first exemplary embodiment, and thus a detailed description of this influence will be omitted.

In this exemplary embodiment, the transfer unit 340 includes a lever unit 341, a drive source 342, and a controller 343.

The rod unit 341 penetrates the top of the source container 310 and is coupled to the first heater 330, so the rod unit 341 can reciprocate up and down within the source container 310 along with the first heater 330. At this time, the bellows 344 is provided around the rod unit 341 inside the source container 310, and thus the attachment of the evaporation source material 1 to the rod unit 341 is prevented.

The driving source 342 supplies a driving force for reciprocating the lever unit 341, and the controller 343 is connected to the driving source 342 and controls the transmission direction and speed of the lever unit 341.

The baffle 350 will intercept the heat transferred from the outside of the source container 310 to the inside. The plate 350 is mounted above the first heater 330 in the internal space of the source container 310. The function and shape of the baffle 350 are the same as those of the baffle 150 of the first exemplary embodiment, and thus a detailed description of the function and shape of the baffle 350 will be omitted.

The cooler 360 cools the source material 1 contained in the source container 310 to prevent the source material 1 accommodated in the source container 110 from being denatured due to heat from the first heater 330. The cooler 360 is mounted to surround the outer wall of the source container 310 in the lower portion of the source container 310 so as to be adjacent to the liquid or solid source material 1.

The function and shape of the cooler 360 are the same as those of the cooler 160 of the first exemplary embodiment, and thus a detailed description of the function and shape of the cooler 360 will be omitted.

The second heater 370 supplies heat to the source container 310 to prevent phase change of the evaporated source material 1 through the source container 310 to a liquid or solid state, and the second heater 370 is installed in the upper portion of the source container 310, and is liquid or The solid source material 1 is separated.

The function and shape of the second heater 370 are the same as those of the second heater 170 of the first exemplary embodiment, and thus a detailed description of the function and shape of the second heater 370 will be omitted.

Figure 5 is a schematic illustration of an apparatus for supplying materials in accordance with a fourth exemplary embodiment of the present invention.

Referring to FIG. 5, an apparatus 400 for supplying materials according to this exemplary embodiment is characterized in that a source material 1 is reciprocally transferred, in which case A third exemplary embodiment of transferring the first heater 330 is contrasted. In FIG. 5, elements have the same configurations and functions as those of the elements of the same element symbols shown in FIG. 4, and thus detailed descriptions of the elements will be omitted.

The transfer unit 440 in this exemplary embodiment reciprocates the source material 1 to reciprocally transfer the first heater 330 and the source material 1 in a direction close to each other or away from each other. The influence caused by adjusting the distance between the first heater 330 and the source material 1 via the transfer unit 440 is the same as that of the first exemplary embodiment, and thus a detailed description of this influence will be omitted.

In this exemplary embodiment, the transfer unit 440 includes a lever unit 441, a drive source 442, and a controller 443.

The rod unit 441 penetrates the bottom of the source container 310 and contacts the source material 1. The rod unit 441 is transferred up and down in the source container 310 together with the source material 1 .

The driving source 442 supplies a driving force for reciprocating the lever unit 441, and the controller 443 is connected to the driving source 442 and controls the transmission direction and speed of the lever unit 441.

Although a few exemplary embodiments of the invention have been shown and described, it will be understood by those skilled in the art The scope of the invention is defined by the equivalents of the appended claims.

1‧‧‧ source material

10‧‧‧Syringe

11‧‧‧Spray hole

20‧‧‧Connecting tube

100‧‧‧ Equipment

110‧‧‧ source container

120‧‧ ‧Evaporation room

130‧‧‧First heater

140‧‧‧Transfer unit

141‧‧‧ rod unit

142‧‧‧ drive source

143‧‧‧ Controller

144‧‧‧ bellows

150‧‧ ‧ baffle

160‧‧‧cooler

170‧‧‧second heater

200‧‧‧ equipment

240‧‧‧transfer unit

241‧‧‧ rod unit

242‧‧‧ drive source

243‧‧‧ Controller

300‧‧‧ Equipment

310‧‧‧ source container

330‧‧‧First heater

340‧‧‧Transfer unit

341‧‧‧ rod unit

342‧‧‧ drive source

343‧‧‧ Controller

344‧‧‧ Bellows

350‧‧ ‧ baffle

360‧‧‧cooler

370‧‧‧second heater

400‧‧‧ equipment

440‧‧‧transfer unit

441‧‧‧ rod unit

442‧‧‧ drive source

443‧‧‧ Controller

The above and/or other aspects of the present invention will become more apparent from the following description of the exemplary embodiments of the invention in the <RTIgt; A schematic of an apparatus for supplying materials, and FIG. 2 is a view showing the first heater moving to approach the source container of the apparatus for supplying materials of FIG. 1.

3 is a schematic view of an apparatus for supplying materials according to a second exemplary embodiment of the present invention; FIG. 4 is a schematic view of an apparatus for supplying materials according to a third exemplary embodiment of the present invention; and FIG. A schematic diagram of an apparatus for supplying materials according to a fourth exemplary embodiment of the present invention.

1‧‧‧ source material

10‧‧‧Syringe

11‧‧‧Spray hole

20‧‧‧Connecting tube

100‧‧‧ Equipment

110‧‧‧ source container

120‧‧ ‧Evaporation room

130‧‧‧First heater

140‧‧‧Transfer unit

141‧‧‧ rod unit

142‧‧‧ drive source

143‧‧‧ Controller

144‧‧‧ bellows

150‧‧ ‧ baffle

160‧‧‧cooler

170‧‧‧second heater

Claims (10)

An apparatus for supplying a material, the apparatus evaporating a source material to be deposited as a thin film on a substrate, and the apparatus supplies the evaporated source material to an ejection hole facing the substrate, the apparatus comprising: a source a container in which a source material to be deposited on a substrate is contained in a solid or liquid state; an evaporation chamber containing an internal space for mounting the source container therein, and from the source container The evaporated source material passes through the evaporation chamber; a first heater, the first heater is provided above the source container located in the evaporation chamber, and the first heater supplies heat to the source container to Evaporating the source material contained in the source container; and a transfer unit that reciprocates one of the first heater and the source container in a direction approaching or away from the other motion. The apparatus of claim 1, the apparatus further comprising a baffle provided above the first heater located in the evaporation chamber, and the baffle intercepting is transmitted from an outer side of the evaporation chamber to an inner side hot. The apparatus of claim 1, the apparatus further comprising: a cooler installed in a lower portion of the evaporation chamber so as to be adjacent to a liquid or solid source material, and the cooler is cooled to be housed in the source Capacity a source material in the device; and a second heater installed in an upper portion of the evaporation chamber and spaced apart from the liquid or solid source material, and the second heater supplies heat to the The evaporation chamber is configured to prevent the vaporized source material passing through the evaporation chamber from becoming liquid or solid. The apparatus of claim 1, wherein the transfer unit comprises: a rod unit penetrating a top of the evaporation chamber, the rod unit being coupled to the first heater, and the rod unit and the first The heater reciprocates up and down in the evaporation chamber together; a driving source that supplies a driving force for reciprocating the rod unit; and a controller that is connected to the driving source and controls the rod unit One pass direction and speed. The apparatus of claim 1, wherein the transfer unit comprises: a rod unit penetrating a bottom of the evaporation chamber, the rod unit being coupled to the source container, and the rod unit being together with the source container The evaporation chamber reciprocates up and down; a driving source that supplies a driving force for reciprocating the rod unit; A controller coupled to the drive source and controlling a direction and speed of transmission of the lever unit. An apparatus for supplying a material, the apparatus evaporating a source material to be deposited as a thin film on a substrate, and the apparatus supplies the evaporated source material to an ejection hole facing the substrate, the apparatus comprising: a source a container, the source material to be deposited on the substrate is contained in a lower portion of the source container in a solid or liquid state, and the evaporated source material passes through the source container in an upper portion of the source container; a first heater The first heater is mounted above the solid or liquid source material located within the source container, and the first heater supplies heat to the solid or liquid source material to evaporate the source material; and a transfer unit, The transfer unit reciprocates one of the first heater and the source material in a direction that is close to or away from the other. The apparatus of claim 6, the apparatus further comprising a baffle provided above the first heater located within the source container, and the baffle intercepting is transferred from the outside to the inside of the source container heat. The apparatus of claim 6, the apparatus further comprising: a cooler installed in a lower portion of the source container to be adjacent to a liquid or solid source material, and the cooler is cooled to be housed in the source a source material in the container; a second heater mounted in an upper portion of the source container and spaced apart from the liquid or solid source material, and the second heater supplies heat to the source container to prevent passage of the second heater The evaporated source material of the source container is changed to a liquid or solid state. The device of claim 6, wherein the transfer unit comprises: a rod unit penetrating a top of the source container, the rod unit being coupled to the first heater, and the rod unit and the first The heater reciprocates up and down in the source container together; a driving source that supplies a driving force for reciprocating the rod unit; and a controller that is connected to the driving source and controls the rod A direction and speed of the unit. The apparatus of claim 6, wherein the transfer unit comprises: a rod unit penetrating a bottom of the source container, the rod unit contacting the source material, and the rod unit and the source material are together a source container reciprocating up and down; a driving source that supplies a driving force for reciprocating the rod unit; and a controller connected to the driving source and controlling a direction of transmission of the rod unit And speed.