CN107723663B - A kind of device and method in high strength steel surface continuous vacuum evaporation metal antimony - Google Patents

A kind of device and method in high strength steel surface continuous vacuum evaporation metal antimony Download PDF

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CN107723663B
CN107723663B CN201710881086.7A CN201710881086A CN107723663B CN 107723663 B CN107723663 B CN 107723663B CN 201710881086 A CN201710881086 A CN 201710881086A CN 107723663 B CN107723663 B CN 107723663B
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antimony
strength steel
heater
adsorbent
evaporation
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CN107723663A (en
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苏旭平
卓鑫池
刘亚
王建华
吴长军
涂浩
彭浩平
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Changzhou University
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Changzhou University
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/26Methods of annealing
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/68Temporary coatings or embedding materials applied before or during heat treatment
    • C21D1/70Temporary coatings or embedding materials applied before or during heat treatment while heating or quenching
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present invention relates to a kind of device and method in high strength steel surface continuous vacuum evaporation metal antimony.By being heated at high temperature metallic antimony; gasification and antimony molecule deposition are allowed to the lower surface of steel plate of temperature; form fine and close solid protective film; the problem of making platability be deteriorated because of surface generation selective oxidation when fundamentally improving continuous zinc coating; guarantee is provided to provide high hot dip plated steel quality, there is considerable Social benefit and economic benefit.

Description

A kind of device and method in high strength steel surface continuous vacuum evaporation metal antimony
Technical field
The present invention relates to galvanizing by dipping technical field, it is related to a kind of method before annealing in high strength steel surface preparation, Specifically, referring to a kind of method in three hole continuous vacuum evaporation metal antimony of high strength steel surface.
Background technique
Vacuum vapor plating (vapor deposition) is that under vacuum conditions, heating evaporation substance is allowed to gasify and is deposited on substrate surface Solid film is formed, is a kind of physical phenomenon.It is widely used in machinery, electrovacuum, radio, optics, atomic energy, space skill The fields such as art.Its oxidation potential of metallic antimony is lower than iron, and oxidation reaction when annealing is not related to the element substantially.Meanwhile the steam of antimony Press higher, in vacuum environment, antimony vapour pressure corresponding to 677 DEG C is 10-2Torr。
Galvanizing by dipping is that steel component immerses in the zinc liquid of melting a kind of method for obtaining metal cladding.With high pressure Transmission of electricity, traffic, communication career rapidly develop, also higher and higher to the quality requirement of galvanizing by dipping.Currently, being applied to industrial production Continuous zinc coating method there are many kinds of, such as Sendzimir method, U.S. steel join method, Wheeling method, Selas method.
But major part galvanizing production is produced by Sendzimir method at present.Typical Sendzimir method, steel plate are necessary Through over cleaning, to remove cold rolling, the oil on surface, carbon and ferrous powder granules.The solution of cleaning is usually 1.5%~2.5% NaOH Solution.Next steel plate is dried up with low-pressure gas.Then it enters back into heating and heat preservation zone carries out recrystallization annealing.From annealing furnace After out, steel plate is cooled to the temperature of slightly above zinc pond (460 DEG C), is then immersed in zinc pond.
It is well known that, since temperature is excessively high, steel and active gases can occur very in the annealing stage of continuous zinc coating line Complicated reaction, wherein so-called selective oxidation will occur for the alloying element of surface of steel plate;" selective oxidation " refers in steel With the stronger alloying element of oxygen affinity prior to the behavior of matrix Fe Element generation oxide.And in DP steel, due to Si, The selective oxidation of the alloying elements such as Mn, surface of steel plate cover the oxide of these alloying elements, and platability can be deteriorated.Institute With aiming at the problem that DP steel platability is deteriorated, it is necessary to find and reduce the effective way that selective oxidation occurs for its surface.
Summary of the invention
The present invention is intended to provide one kind is easy to operate, economical and practical and is adapted to industrial quantity-produced high strength steel annealing Preceding preprocess method is allowed to gasification and antimony molecule deposition to the lower surface of steel plate of temperature, shape by being heated at high temperature metallic antimony At fine and close solid protective film, as shown in Figure 1, 2, implementation through the invention can effectively reduce the selective oxygen of surface of steel plate Change, makes oxide on surface SiO2, MnO and Mn-Si composite oxides significantly reduce, enhancing later period zinc-plated platability.
The technical solution that the present invention implements its purpose is:
A kind of device and method in three hole continuous vacuum evaporation metal antimony of high strength steel surface, are technically characterized in that Vacuum vapor plating pre-processes high strength steel, and oxide when high strength steel being made to anneal significantly reduces, and specific steps are such as Under:
1. entire vapor deposition process carries out in a vacuum chamber, vacuum degree is 1 × 10-2Pa。
2. the matrix of high strength steel is iron, trace additives include carbon, silicon, manganese, chromium.
3. vapor deposition described device includes: vacuum chamber, detection contact pilotage and three hole antimony regulus vaporization chambers;Three hole antimony regulus vaporization chambers are located at In vacuum chamber wall body, along high-strength steel sheet mirror symmetry, face centered on the high-strength steel sheet for occuping entire vacuum chamber center The two-sided two sides of high strength steel, be divided into left side vaporization chamber and right side vaporization chamber, structure are identical: left side vaporization chamber includes vaporization chamber wall Body, around resistance band, adsorbent, adsorbent heater, temperature measurer, evaporation source antimony regulus, evaporation heater, cooling circulating water, absolutely Edge substrate.Vaporization chamber wall bottom end is equipped with dielectric base, and dielectric base is equipped with evaporation source antimony regulus, and evaporation source antimony regulus is surrounded by Evaporation heater, is equipped with cooling circulating water between evaporation source antimony regulus and dielectric base, evaporation heater is equipped with temperature measurer, is steaming Wall outer side is placed equidistant with three tongues with holes on the right side of hair room, and tongue is equipped with tongue mouth, nestles up wall on the right side of vaporization chamber Outside is scattered adsorbent and adsorbent heater, and adsorbent and adsorbent heater abut, and substrate heater is against high-strength Steel plate is spent, detection contact pilotage contacts detection below steel plate with steel plate.The evaporation heater is frequency spiral coil;The absorption Agent heater is electromagnetic heater;The substrate heater is around resistance band.
Tongue uses square structure, is highly 50~70 ㎝, width is bigger by 5~10 than the high strength steel board width of required vapor deposition ㎝。
Tongue mouth uses square structure, is highly 5~10 ㎝, width is consistent with tongue.
High-strength steel sheet is 15 ㎝ at a distance from tongue with holes.
4. the adsorbent Zr-16Al of vaporization chamber wall outer side is preheated 3 hours at 800 DEG C using adsorbent heater, Active gases in vacuum chamber is removed, steel plate and antimony regulus are in room temperature at this time, after the completion of absorption, stop the heating of adsorbent.
5. keeping the temperature substrate steel disc around resistance band using evaporation heater by evaporation source antimony regulus in 677 DEG C of continuous heatings At low temperature (230~300 DEG C).
6. high-strength steel sheet slow transits through left and right sides tongue spray antimony mouth in three times from top to bottom, right at 677 DEG C using antimony Answering vapour pressure is 10-2Torr, the characteristic that evaporation effect is optimal and high temperature atomic can be moved to low temperature face are covered high strength steel is two-sided Cover uniform antimony protective film.
7. the steel plate after the completion of cooling utilizes detection contact pilotage detection vapor deposition film thickness.
The specific implementation step of described device are as follows:
The adsorbent Zr-16Al of vaporization chamber wall outer side is preheated 3 hours at 800 DEG C using adsorbent heater, is gone Except active gases in vacuum chamber, steel plate and antimony regulus are in room temperature at this time, after the completion of absorption, stop the heating of adsorbent.
Using evaporation heater by evaporation source antimony regulus in 677 DEG C of continuous heatings, while utilizing cooling circulating water regulation mutation Temperature makes the heat preservation of substrate steel disc at low temperature (230~300 DEG C), observes the variation of temperature measurer registration around resistance band.
Driving device, which generates driving force, makes high-strength steel sheet slow transit through left and right sides tongue spray antimony in three times from top to bottom Mouthful, it is 10 using saturated vapour pressure-2The characteristic that Torr evaporation effect is optimal and high temperature atomic can be moved to low temperature face, will be high-intensitive The uniform antimony protective film of the two-sided covering of steel.
Steel plate after the completion of cooling utilizes detection contact pilotage detection vapor deposition film thickness.
When replacing antimony regulus, it need to stop heating, after the completion of replacement, restart from step 1.
The method of three hole continuous vacuum evaporation metal antimony of high strength steel surface of the invention, provides one for continuous hot-dipping galvanizing The pretreated method of kind, the oxide on surface, preprocessing process are completed in a vacuum chamber when reducing zinc-plated.Fundamentally improve It the problem of making platability be deteriorated because of surface generation selective oxidation when continuous zinc coating, is provided to provide high hot dip plated steel quality Guarantee that there is considerable Social benefit and economic benefit.
Detailed description of the invention
Attached drawing described herein as is used to be further explained the present invention, constitutes part of this application, of the invention shows Meaning property diagram is used to explain the present invention, and is not constituted improper limitations of the present invention, protection scope of the present invention is not limited to following Schematic diagram.
Fig. 1 is the high strength steel surface FE-SEM figure of 1000 times of completion evaporation metal antimony.
Fig. 2 is the high strength steel surface FE-SEM figure of 10000 times of completion evaporation metal antimony.
Fig. 3 is internal vacuum chamber schematic device.
Drawing reference numeral
[1] dielectric base [2] cooling circulating water [3] evaporation source antimony regulus
[4] frequency spiral coil [5] temperature measurer [6] electromagnetic heater
[7] adsorbent [8] is around resistance band [9] high-strength steel sheet
[10] tongue sprays antimony mouth [11] tongue [12] vacuum chamber wall
[13] vaporization chamber wall [14] detects contact pilotage
Specific embodiment
Specifically introduce the present embodiment with reference to the accompanying drawing to elaborate: the present embodiment is being with technical solution of the present invention Under the premise of implemented, give detailed embodiment and process, but protection scope of the present invention is not limited to following embodiments.
The adsorbent 7 of vaporization chamber wall outer side is preheated 3 hours at 800 DEG C using electromagnetic heater 6, removes vacuum chamber Interior active gases, steel plate 9 and antimony regulus 3 are in room temperature at this time, after the completion of absorption, stop the heating of adsorbent.
Using frequency spiral coil 4 by evaporation source antimony regulus 3 in 677 DEG C of continuous heatings, while being regulated and controled using cooling circulating water 2 Abrupt temp makes the heat preservation of substrate steel disc 9 at low temperature (230~300 DEG C), observes the variation of 5 registration of temperature measurer around resistance band 8.
Driving device, which generates driving force, makes high-strength steel sheet 9 slow transit through left and right sides tongue 11 in three times from top to bottom Tongue sprays antimony mouth 10, is 10 using saturated vapour pressure-2The spy that Torr evaporation effect is optimal and high temperature atomic can be moved to low temperature face Property, by the uniform antimony protective film of the two-sided covering of high strength steel.
Steel plate 9 after the completion of cooling utilizes the detection detection vapor deposition film thickness of contact pilotage 14.
The method of three hole continuous vacuum evaporation metal antimony of high strength steel surface of the invention, provides one for continuous hot-dipping galvanizing The pretreated method of kind, the oxide on surface, preprocessing process are completed in a vacuum chamber when reducing zinc-plated.Fundamentally improve It the problem of making platability be deteriorated because of surface generation selective oxidation when continuous zinc coating, is provided to provide high hot dip plated steel quality Guarantee that there is considerable Social benefit and economic benefit.

Claims (6)

1. a kind of device in high strength steel surface continuous vacuum evaporation metal antimony, it is characterised in that: described device includes: vacuum Room, detection contact pilotage and three hole antimony regulus vaporization chambers;Three hole antimony regulus vaporization chambers are located in vacuum chamber wall body, to occupy in entire vacuum chamber Along high-strength steel sheet mirror symmetry centered on the high-strength steel sheet of centre, the two-sided two sides of face high strength steel are divided into left side vaporization chamber With right side vaporization chamber, structure is identical: left side vaporization chamber includes vaporization chamber wall, around resistance band, adsorbent, adsorbent heating Device, temperature measurer, evaporation source antimony regulus, evaporation heater, cooling circulating water, dielectric base;Vaporization chamber wall bottom end is equipped with insulation base Bottom, dielectric base are equipped with evaporation source antimony regulus, and evaporation source antimony regulus is surrounded by evaporation heater, evaporation source antimony regulus and dielectric base Between be equipped with cooling circulating water, evaporation heater be equipped with temperature measurer, wall outer side is placed equidistant with three bands on the right side of vaporization chamber Hole tongue, tongue are equipped with tongue mouth, nestle up and are scattered adsorbent and adsorbent heating on the right side of vaporization chamber on the outside of wall Device, adsorbent and adsorbent heater abut, substrate heater abut high-strength steel sheet, detect contact pilotage below steel plate with steel plate Contact detection;Entire vapor deposition process carries out in a vacuum chamber, and vacuum degree is 1 × 10-2Pa。
2. a kind of device in high strength steel surface continuous vacuum evaporation metal antimony as described in claim 1, it is characterised in that: The evaporation heater is frequency spiral coil;The adsorbent heater is electromagnetic heater;The substrate heater is ring Around resistance band.
3. a kind of device in high strength steel surface continuous vacuum evaporation metal antimony as described in claim 1, it is characterised in that: Tongue uses square structure, is highly 50~70 ㎝, width is 5~10 ㎝ bigger than the high strength steel board width of required vapor deposition.
4. a kind of device in high strength steel surface continuous vacuum evaporation metal antimony as described in claim 1, it is characterised in that: Tongue mouth uses square structure, is highly 5~10 ㎝, width is consistent with tongue.
5. a kind of device in high strength steel surface continuous vacuum evaporation metal antimony as described in claim 1, it is characterised in that: High-strength steel sheet is 15 ㎝ at a distance from tongue with holes.
6. utilizing device as described in claim 1 in the method for high strength steel surface continuous vacuum evaporation metal antimony, feature exists In:
(1) the adsorbent Zr-16Al of vaporization chamber wall outer side is preheated 3 hours at 800 DEG C using adsorbent heater, removal Active gases in vacuum chamber, steel plate and antimony regulus are in room temperature at this time, after the completion of absorption, stop the heating of adsorbent;
(2) it utilizes evaporation heater by evaporation source antimony regulus in 677 DEG C of continuous heatings, so that the heat preservation of substrate steel disc is existed around resistance band 230~300 DEG C;
(3) high-strength steel sheet slow transits through left and right sides tongue spray antimony mouth in three times from top to bottom, using antimony in 677 DEG C of corresponding steamings Air pressure is 10-2Torr, the characteristic that evaporation effect is optimal and high temperature atomic can be moved to low temperature face are equal by the two-sided covering of high strength steel Even antimony protective film;
(4) steel plate after the completion of cooling utilizes detection contact pilotage detection vapor deposition film thickness.
CN201710881086.7A 2017-09-26 2017-09-26 A kind of device and method in high strength steel surface continuous vacuum evaporation metal antimony Active CN107723663B (en)

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WO2019239185A1 (en) * 2018-06-13 2019-12-19 Arcelormittal Vacuum deposition facility and method for coating a substrate
CN112505286B (en) * 2019-09-16 2023-08-11 中国科学院上海光学精密机械研究所 Detection device and method for zinc-induced liquid metal crack formation condition
CN116024529A (en) * 2021-10-27 2023-04-28 宝山钢铁股份有限公司 Galvanized sheet production method and production line

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CN2632980Y (en) * 2003-07-16 2004-08-11 上海大学 Vacuum evaporating heater for producing organic electroluminescent thin membrane
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CN103628025A (en) * 2012-08-21 2014-03-12 深圳富泰宏精密工业有限公司 Alloy coevaporation material and evaporation coating method employing alloy coevaporation material
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