TWI435837B - Storage device - Google Patents

Description

Storage device

The present invention relates to a storage device that stores articles to be transported in a transport trolley that travels on a rail provided on a ceiling.

For example, in a semiconductor manufacturing plant, there is a transport system as described below, which accommodates a transported object such as a front-mounted wafer cassette (FOUP) such as a semiconductor substrate, and a suspended unmanned transport vehicle that travels on a rail provided on a ceiling. Handling trolleys such as (OHT, Overhead Hoist Transport) are transported.

Further, in the case of the conveyance system, there is a case where a device for temporarily placing the conveyed object on the conveyance trolley is provided on the rail or the ceiling. For example, the storage rack described in Patent Document 1 has a horizontal shelf suspended directly below the track, and a box carried by the ceiling type traveling trolley can be placed in the storage rack.

[Patent Document 1] Japanese Patent Publication No. Hei 10-109887

In the above-described apparatus for temporarily placing the object to be transported, in order to smoothly place the object to be transported, the scaffold on which the object to be transported is placed is often a member having a large width such as a plate material. However, if the scaffold is made of a sheet or the like, the overall weight of the apparatus will increase. A device with a large weight is difficult to fix near the ceiling, and there is a hidden danger.

In addition, as in the case of semiconductor manufacturing plants, most of the devices are set to none. Dust indoors. In the clean room, airflow is generated to keep the room clean, and if the scaffold is made of a plate or the like, the airflow will be hindered, and the effect thereof may be affected. Further, if the airflow is disturbed, the dust adhering to the apparatus or the transporting trolley may be blown off, which adversely affects the yield of the semiconductor substrate or the like.

An object of the present invention is to provide a storage device for a conveyed object which can suppress the weight of the device while ensuring that the object to be transported is placed smoothly, and does not interfere with the air flow when there is airflow in the room.

In the storage device of the present invention, the storage device for storing the object to be conveyed in the conveyance trolley that holds the conveyed object and travels on the rail provided on the ceiling includes a scaffolding portion that is extended by a long type. The first and second frame members are configured to mount the object to be transported on a horizontal surface formed on the upper surface of the first and second frame members, and the plurality of scaffold fixing members are extended from the third to the fifth. The frame member is configured such that the third to fifth frame members are formed in a substantially "ㄈ" shape, and the shed frame portion is fixed to the rail and the ceiling so that the shed portion is positioned below the rail. At least one of the third and fourth frame members constituting both end portions of the "ㄈ" shape, wherein the transporting carriage traveling region is sandwiched in the vertical direction and in the horizontal direction in the respective longitudinal extension directions One of the above-described rails and the ceiling is fixed to the above-described rail and the ceiling, and the fifth frame member has a lengthwise extending direction in a direction from the third frame member toward the fourth frame member. With the aforementioned 3rd and 4th boxes Both isotropic member fixed to the under rail; the first and second lines to the upper frame member in the horizontal direction The fifth frame member is fixed to the fifth frame member with a width slightly narrower than the width of the object to be transported, and the plurality of scaffold fixing members are arranged to be spaced apart from each other along the track; the first and second frame members are arranged A through region penetrating the aforementioned scaffolding portion in the vertical direction is formed between each other.

In the storage device of the present invention, the scaffolding portion has two frame members, and the frame members form a penetration region smaller than the width of the object to be conveyed. Therefore, it is possible to realize a storage device that suppresses the weight while ensuring that the object to be transported is placed smoothly. Moreover, it is possible to realize a storage device that does not interfere with the downward flow of air, for example, in a clean room. Further, the entire system of the scaffold fixing member is constituted by a frame member extending into a long shape, and the scaffold fixing members are also spaced apart from each other, so that the overall weight of the device can be suppressed without obstructing the air flow.

Further, in the invention, it is preferable that the third frame member has a plate member extending in a direction perpendicular to a plane intersecting the track and a direction away from the track. As described above, the configuration of suppressing the overall weight of the storage device may cause an increase in the strength required for the device not to be deformed. According to the above configuration, the third frame member has a sheet member extending in a direction away from the rail along a plane intersecting the rail. Therefore, deformation of the device in the direction along the aforementioned plane can be suppressed. According to this, for example, the shaking of the scaffolding portion in the left-right direction of the traveling direction of the transporting trolley is suppressed.

Further, in the present invention, the scaffold fixing member further includes a sixth frame member extending in a horizontal direction and fixed to the rail surface so as to intersect the rail in a plan view, and the third and fourth frame members are preferably The positions of the rails fixed to the sixth frame member are sandwiched by each other in a plan view. According to this configuration, the scaffold fixing member is fixed to the rail via the sixth frame member. Above the road, it is ensured that the storage device is fixed to the track smoothly and firmly.

Further, in the present invention, it is preferable that both ends of the scaffold fixing members adjacent to the track have a fixed skew member. According to this configuration, deformation of the device in a plane direction parallel to the vertical direction parallel to the track can be suppressed. According to this, the sway of the scaffolding portion along the aforementioned plane can be suppressed.

Further, in the present invention, the line segment connecting the third frame members and the line segment connecting the third frame member and the skew member are preferably not intersected with the track in a plan view. According to this configuration, the third frame member is disposed so as not to sandwich the rails in the plan view, and the third frame member and the oblique member are not placed on the rail. In other words, it means that the third frame member and the skew member are disposed only in one of the left and right directions when viewed from the viewpoint of the transport trolley traveling on the rail. Therefore, when viewed from the transport trolley that travels on the rail, one of the third frame members or the skew members is not disposed, and the manufacturing device or other storage device can be disposed adjacent to the scaffold portion.

Further, in the invention, the first and second frame members each extend along the rail, and the rack portion further includes seventh and eighth frame members extending along the rail, and the seventh and eighth frame members are The first frame member is sandwiched between the first and second frame members in a direction toward the second frame member, and is fixed to the fifth frame without being in contact with the first and second frame members. Preferably, between the seventh and eighth frame members and the first and second frame members, a through region penetrating the scaffold portion is formed. According to this configuration, the scaffolding portion has two frame members in addition to the first and second frame members. Therefore, the frame members and the first and second frame members each have a through region. Therefore, it is possible to achieve a structure that ensures the strength of the scaffolding portion, suppresses the weight, and does not hinder the airflow.

Further, in the invention, it is preferable that either or both of the first and second frame members have a positioning member when the object to be conveyed is placed. According to this configuration, the alignment member is fixed only to the first and second frame members. For example, when the third to eighth frame members are fixed to the rail or the ceiling and then aligned, it is only necessary to adjust the positions at which the first and second frame members are fixed to the fifth frame member. Therefore, the alignment work can be done simply and quickly.

Further, in the invention, it is preferable that the plate member is fixed to the upper end of the scaffold portion and extends upward from the upper portion of the scaffold portion. According to this configuration, the object to be transported can be prevented from falling from one end of the scaffolding portion to the lower side.

[Best implementation]

Hereinafter, a buffer device 100 according to an embodiment of the preferred embodiment of the present invention will be described with reference to the drawings. 1 to 3 are schematic views showing the structure of a buffer device 100 (storage device).

The buffer device 100 can be used, for example, in a clean room provided by a semiconductor manufacturing factory. As shown in FIGS. 1 to 3, the shock absorber 100 is disposed on the rail 92. The track 92 is placed along the clean room ceiling 99 above the manufacturing equipment provided in the clean room. A transport carriage 91 is provided on the rail 92. The transport carriage 91 is controlled by a control device (not shown), and travels on the rail 92 in the direction A of FIG. Then, the container 93 is moved in the vertical direction in the direction B of Fig. 1. Thereby, the container 93 is conveyed between the respective manufacturing apparatuses. After the container 93 and the like are housed in the container 93 and the container 93 is transported to the manufacturing apparatus, the manufacturing apparatus performs various manufacturing processes on the semiconductor substrate in the container 93.

The cushioning device 100 has a shelving unit 120 on which a container 93 is placed. Scaffolding list The element 120 has a rectangular shape in plan view as shown in Fig. 2, and is disposed such that its longitudinal direction is along the track 92. The scaffolding unit 120 has frame members 121 to 125 (first, second, seventh, and eighth frame members). In the scaffolding 120, the components of the frame members 121 and 122 function as a scaffold on which the container 93 is placed.

Each of the frame members 121 to 124 in the scaffolding unit 120 has one. The frame members 121 to 124 are rod-shaped members that are arranged to extend in a straight line in the direction A. The frame members 123 and 124 are disposed on the outermost side in the vertical direction C in the direction A parallel to the horizontal plane. The frame members 121 and 122 are disposed inside the frame members 123 and 124 in the direction C. The frame member 125 is disposed in such a manner as to extend in the direction C. Both ends of the frame member 125 are fixed to the frame members 121 and 122.

The frame members 121 to 124 are spaced apart from each other in the direction C. In addition, the frame members 125 are spaced apart from each other in the direction A. Accordingly, the frame members 121 to 125 form a through region that penetrates the scaffold unit 120 in the vertical direction. For example, the frame members 121, 122, and 125 are formed with a through region 120a therebetween. The frame members 121 and 123 are formed with a through region 120b therebetween. The frame members 122 and 124 are formed with a through region 120c therebetween.

The frame members 121 and 122 have upper faces 121a and 122a along the plane, and the upper faces 121a and 122a are configured to be included on the same horizontal plane. The frame members 121 and 122 are disposed such that they are spaced apart from each other in the direction C by a distance slightly smaller than the width of the container 93. The container 93 is placed on the upper faces 121a and 122a of the through regions 120a of the frame members 121 and 122. The scaffolding unit 120 has eight blocks for placing the container 93 as shown by the dashed line in FIG.

Above the above 121a and 122a, as shown in FIG. 2, a plurality of protrusions are fixed 126. Eight protrusions 126 (not shown) are fixed to the upper surface 121a, and 16 protrusions 126 are fixed on the upper surface 122a. The projections 126 on the upper surface 121a are disposed in the respective mounting regions of the container 93, and are arranged at equal intervals in the direction A. Further, the projections 126 on the upper surface 122a are arranged in groups of two, and are disposed in groups in the respective mounting regions of the container 93. That is, one projection 126 on the upper surface 121a and two projections 126 on the upper surface 122a are disposed in each of the mounting regions, and a total of three projections 126 are provided. Moreover, the three protrusions 126 are arranged to maintain a certain positional relationship in the horizontal direction.

On the other hand, three positioning holes (not shown) fitted to the projections 126 are formed on the lower surface of the container 93. The three positioning holes are also formed to have the same positional relationship as the specific positional relationship described above. When the container 93 is placed on the scaffolding unit 120, the corresponding positioning holes and the projections 126 are fitted to each other to be aligned.

A plurality of drop preventing plates 103 are fixed around the scaffolding unit 120. The drop preventing plate 103 has a substantially square shape. Eight of the drop preventing plates 103 are fixed to one of the outermost sides in the direction C of the stud unit 120. This side corresponds to the side of the frame member 123. The eight drop prevention plates 103 are arranged to overlap with the mounting position of the container 93 on the scaffold unit 120 as shown in FIG.

Further, the other eight of the drop preventing plates 103 are fixed to the other side of the outermost side in the direction C of the stud unit 120. This side corresponds to the side of the frame member 124. The eight drop prevention plates 103 and the other eight drop prevention plates 103 fixed to the frame member 123 are disposed at the same position in the direction A. That is, each of the drop preventing plates 103 fixed to the frame member 123 and the respective drop preventing plates 103 fixed to the frame member 124 are disposed to sandwich the respective containers 93 in the direction C. Place the area.

Further, the drop preventing plate 103 is also fixed to both side faces in the direction A of the scaffolding unit 120. The drop preventing plates 103 are fixed to the frame member 125 and are disposed to sandwich the eight mounting regions of the container 93 in the direction A.

The buffer device 100 has four fixing units 110. The fixing units 110 are arranged side by side in the direction of the track 92 (direction A). The upper end of each fixing unit 110 is fixed on the upper side of the rail 92, and the lower end of the fixing unit 110 is fixed to the scaffolding unit 120. Accordingly, the scaffolding unit 120 is suspended below the rail 92. Hereinafter, the configuration of the fixing unit 110 will be described. In addition, the structures of the four fixed units 110 are all the same, and the following description applies to all of the fixed units 110.

As shown in FIGS. 1 to 3, the fixing unit 110 has frame members 111 to 114 (third to sixth frame members). The frame member 111 is a substantially rectangular flat member and is disposed such that its longitudinal direction is in the vertical direction. Further, the surface direction of the flat plate is arranged in the vertical direction and the direction C (see FIG. 3). The frame member 112 is a rod-shaped member that is linearly extended in the vertical direction. The upper ends of the frame members 111 and 112 are fixed to the frame member 114, and the lower ends are fixed to the frame member 113. The frame members 111 to 113 are formed in a shape similar to "ㄈ" as shown in Fig. 3, and the frame members 111 and 112 constitute both ends of the "ㄈ" shape. The frame members 111 to 113 function as a scaffold fixing member for fixing the scaffold portion to the rail.

The frame members 111 and 112 are respectively fixed in the direction C near the both ends of the frame members 113 and 114. Accordingly, the frame members 111 and 112 are disposed to sandwich the scaffolding unit 120 in the lower direction thereof in the direction C, and the rails 92 are sandwiched in the upper direction thereof in the direction C. And the walking area of the transport trolley 91. In addition, the frame members 111 of all the fixing units 110 are disposed at the same position near the left end of the buffer device 100 as shown in FIG. Moreover, the frame members 112 of all the fixing units 110 are disposed at the same position near the right end of the buffer device 100 as shown in FIG.

Each of the frame members 113 and 114 is linearly extended in the direction C. Therefore, each of the sections perpendicular to the direction C has a shape of a "ㄈ" shape. The frame member 113 is configured such that the opening of the aforementioned "ㄈ"-shaped cross section faces downward. The frame member 114 is configured such that the opening of the aforementioned "ㄈ" shaped section faces upward. Frame members 111, 112 and 121-124 are fixed to the upper surface of the frame member 113. Frame members 111 and 112 are fixed to the lower surface of the frame member 114.

As shown in FIGS. 1 to 3, the shock absorber 100 has two skew members 102. Each of the skew members 102 is disposed near the left end of the shock absorber 100 as shown in FIG. One end 102a of the skew member 102 is fixed to one end in the direction C of the frame member 114 in the fixed unit 110 of the outermost direction of the direction A. The other end 102b of the skew member 102 is fixed to one end of the frame member 113 in the adjacent fixed unit 110 of the fixed unit 110 to which the one end 102a is fixed. Accordingly, any of the skew members 102 extend obliquely along a side of the buffer device 100 in the direction C and are fixed to the two adjacent fixing units 110.

Hereinafter, detailed configurations of the frame members 111 to 114 and the frame members 121 to 125 will be described with reference to Figs. 4 and 5 . Figure 4 (a) is a cross-sectional view of the frame member 121 perpendicular to the longitudinal direction. In addition, since the frame members 121 to 124 have the same cross-sectional shape, the description of the structure other than the frame member 121 will be omitted. The frame member 121 has a substantially square cross-sectional shape. Holes 121b to 121d are formed in the frame member 121. The holes 121b to 121d are as shown in Fig. 4(a) of the frame member 121, respectively. Opening on the left side, the lower side and the right side. Each of the aforementioned holes 121b to 121d extends in the longitudinal direction of the frame member 121. The frame member 121 is formed to have a bilaterally symmetrical shape in the aforementioned cross-sectional shape.

Figure 4 (b) is a lower cross-sectional view of the cushioning device 100 taken along line IV-IV of Figure 2; The frame members 121 to 124 are all fixed to the frame member 113 by bolts 131. The bolt 131 passes through the upper plate 113a of the frame member 113 from the bottom to the top, and is fixed to the opening of the hole formed under the frame members 121 to 124.

Further, the frame member 123 is fixed with a drop preventing plate 103 by a bolt 133 as shown in the left side surface of Fig. 4(b). The bolt 133 penetrates from the left side of the drop preventing plate 103 and is fixed to the opening of the hole formed by the left side surface of the frame member 123. The frame member 124 is fixed to the right side surface of Fig. 4(b) by a bolt 133 to which the drop preventing plate 103 is fixed. The bolt 133 penetrates from the right side of the drop preventing plate 103 and is fixed to the opening of the hole formed by the right side surface of the frame member 124.

Further, the frame members 121 and 122 are fixed to the frame member 125 by two bolts 132. The one bolt 132 is formed to open from the left side surface of the frame member 121 to the right side opening, and is fixed to the left end of the frame member 125. . The other bolt 132 passes through the opening formed on the right side surface of the frame member 122 to the left side opening, and is fixed to the right end of the frame member 125.

Further, although the frame members 111 and 112 in Fig. 4(b) are not shown, these members are fixed to the upper surface of the frame member 113 by bolts, similarly to the frame members 121 to 124.

Hereinafter, the fixing of the frame member 114 and the rail 92 will be described. The frame member 114 is fixed to the rail 92 by two bolts 141 as shown in FIG. Figure 5 is an enlarged view of the area enclosed by the dotted line of Figure 3. Figure 5 shows the section of the track 92. Part of the frame member 114. The upper end of the frame member 112 is a screw 144. The screw 144 passes through the bottom plate 114a of the frame member 114 by two nuts 145. The frame member 112 is fixed to the frame member 114 by the screws 144 and the two nuts 145.

Above the rail 92, a convex portion 92a that protrudes upward is formed. A hole 92b is formed in the boss portion 92a, and the hole 92b is opened upward from the upper surface of the boss portion 92a to form an opening portion 92c. The pocket 92b extends linearly along the length of the track 92 (facing the direction from the front of the eye toward the inside thereof in Fig. 5). The cross-sectional shape of the hole 92b is adjusted to accommodate the bolt head 141a of the bolt 141, and the bolt body is protruded upward through the opening 92c. According to this, the boss portion 141a of the bolt 141 is accommodated in the cavity 92b, and the bolt 141 can travel along the rail 92. The frame member 114 is fixed to the rail 92 by the bolt 141 and the nut 142 which are housed in the hole 92b by the bolt head 141a. In addition, the configuration of the periphery of the other bolt 141 in Fig. 3 is also the same as that shown in Fig. 5, and the description thereof will be omitted.

According to the embodiment having the above configuration, the following effects can be achieved. The fixing unit 110 and the scaffold unit 120 are roughly constituted by members having a rod shape such as the frame members 111 to 114 and 121 to 125. Further, the fixing unit 110 and the frame member are arranged to be spaced apart from each other, and as a whole, have a very good air permeability. Therefore, it is possible to suppress the configuration of the airflow in the clean room without suppressing the overall weight of the shock absorber 100.

In particular, the scaffolding unit 120 is mainly composed of frame members 121 to 124 extending in the extending direction (direction A) of the rail 92. Further, the frame members are formed with through regions 120a, 120b, and 120c penetrating the scaffold unit 120 in the vertical direction. Therefore, the hindrance of the scaffolding unit 120 to the downward flow of air from the ceiling in the clean room can be suppressed. Scaffolding unit The 120 is composed of a frame member having a rod shape to ensure that each of the penetration regions is sufficiently large. Thereby, it is possible to realize a configuration that does not hinder the blown airflow.

Further, as described above, the cushioning device 100 is mainly composed of a rod-like frame member, and there may be a fear that the strength required for the device not to be deformed cannot be ensured. However, in the present embodiment, the frame member 111 has a flat plate shape extending in a plane perpendicular to the direction A (see Fig. 3). Therefore, deformation of the cushioning device 100 in the direction perpendicular to the plane of the direction A can be prevented. For example, the scaffold unit 120 can be prevented from shaking in the direction C (refer to FIGS. 2 and 3). Further, in the present embodiment, two skew members 102 are provided. According to this, it is possible to prevent the cushioning device 100 from being deformed in the direction perpendicular to the plane of the direction C. For example, the scaffold unit 120 can be prevented from shaking in the direction A (see FIGS. 2 and 3).

Further, according to the present embodiment, each of the skew member 102 and the frame member 111 is disposed near the left side of the shock absorber 100 as shown in FIG. 3, and the frame member 112 is disposed near the right side of the shock absorber 100. Therefore, the distance from the mounting area of the container 93 on the scaffolding unit 120 to the right side of the cushioning device 100 can be shortened as compared with the case where the skew member 102 and the frame member 111 are disposed on the right side of the cushioning device 100. Then, as shown by a broken line 999 in FIG. 3, a manufacturing apparatus or the like can be disposed in the vicinity of the container 93 on the shock absorber 100.

Further, according to the present embodiment, all the projections 126 for positioning are fixed to the frame members 121 and 122. However, by tightening or unscrewing the two bolts 131 in Fig. 4, only the frame members 121 and 122 can be attached or detached from the frame member 113. Therefore, when the mounting position of the container 93 is adjusted in the direction of the rail 92 (direction A), the frame members 121, 122, and 125 are fixedly assembled to each other as a frame unit, and the positional alignment of the frame unit is adjusted and fixed to the frame member 113. Finished It becomes the alignment of all the placement positions. According to this, the positioning work can be completed simply and quickly as compared with the case where the positioning projections are aligned and fixed for each of the placement positions. In addition, once the frame members 121 to 125 are fixed to the buffer device 100 and need to be realigned, the frame unit composed of the frame members 121, 122, and 125 is detached from the frame member 113 and slid along the rail 92. Further fixing to the frame member 113 completes the alignment of all the placement positions. Therefore, the work of re-adjusting the placement position and the like can be completed simply and quickly.

Further, according to the present embodiment, the drop preventing plate 103 is provided on the shelving unit 120. Accordingly, the container 93 placed on the scaffolding unit 120 can be prevented from falling from the scaffolding unit 120 to the lower side.

Further, according to the present embodiment, the nut 142 is unscrewed, and the bolt head 141a is moved in the hole 92b along the rail 92, whereby the frame member 114 can be moved along the rail 92 (refer to Fig. 5). Accordingly, the fixing unit 110 can be moved along the rails 92, and then the positional alignment of the cushioning device 100 to the rails 92 can be simply performed.

[Modification]

The above is a description of the preferred embodiments of the present invention, and the present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the technical means for solving the problems.

For example, in the foregoing embodiment, the fixing unit 110 is fixed to the rail 92, however, the fixing unit 110 may be directly fixed to the ceiling 99.

Further, in the above embodiment, some of the frame members 111 to 114 and 121 to 125 have a rod shape. However, as long as they have shapes extending in a long direction in one direction and are fixed to each other to form a cushioning device, Other shapes are also possible. For example, it can be a plate shape.

92‧‧‧ Track

100‧‧‧ buffer device

102‧‧‧ oblique parts

103‧‧‧Drop preventer

110‧‧‧Fixed unit

111~114‧‧‧3rd to 6th frame parts

120‧‧‧ Scaffolding unit

121,122‧‧‧1st, 2nd frame

123,124‧‧‧7th, 8th frame

126‧‧‧ Position Alignment Parts

131~133‧‧‧ bolt

141‧‧‧ bolt

144‧‧‧ screws

142,145‧‧‧ nuts

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view of a cushioning device and a peripheral view of a cushioning device according to an embodiment of the present invention.

2 is a perspective view of the cushioning device of FIG. 1.

Figure 3 is a front view of the cushioning device of Figure 1.

Fig. 4(a) is a longitudinal sectional view showing a frame member of the cushioning device of Figs. 1 to 3 perpendicular to the longitudinal direction, and Fig. 4(b) is a longitudinal sectional view of the cushioning device taken along line IV-IV of Fig. 2.

Figure 5 is an enlarged view of the area enclosed by the dotted line of Figure 3.

92‧‧‧ Track

100‧‧‧ buffer device

102‧‧‧ oblique parts

103‧‧‧Drop preventer

110‧‧‧Fixed unit

111~114‧‧‧3rd to 6th frame parts

120‧‧‧ Scaffolding unit

121,122‧‧‧1st, 2nd frame

123,124‧‧‧7th, 8th frame

126‧‧‧Correct position parts

Claims (6)

A storage device that stores the object to be transported in a transporting trolley that holds the object to be transported and travels on a rail on which the ceiling is laid, and is characterized in that it has a scaffolding portion that is extended by the first and second lengths a frame member, wherein the object to be transported is placed on a horizontal surface formed on an upper surface of the first and second frame members; and a plurality of scaffold fixing members are formed by long-length third to fifth frame members The third to fifth frame members are formed in a slightly "ㄈ" shape, and the scaffold portion is fixed to at least one of the rail and the ceiling so that the scaffold portion is positioned below the rail. The third and fourth frame members constituting the both end portions of the "ㄈ" shape are formed such that the respective elongated extension directions are in the vertical direction and are horizontally opposed to each other in the horizontal direction. And fixing the one of the rail and the ceiling; and the fifth frame member has a lengthwise extending direction along a direction from the third frame member toward the fourth frame member, and the 3 and 4th box The two members are fixed to the lower side of the rail; and the first and second frame members are fixed to the fifth frame member such that the upper surface is spaced apart from each other by a distance narrower than a width of the object to be transported in the horizontal direction. a plurality of the scaffold fixing members are arranged at intervals along the track; A through region that penetrates the boss portion in the vertical direction is formed between the first and second frame members, and is disposed outside the first and second frame members at a position away from the object to be transported. a first and a second reinforcing frame member; wherein the first and second reinforcing frame members extend in a direction along the rail, and connect the plurality of scaffold fixing members; the first and second reinforcing members a through region is formed between the frame member and the first and second frame members, and either or both of the first and second frame members have a predetermined positional relationship in a direction along the track. A positioning member that defines a mounting area of the object to be transported is fixed. The storage device according to claim 1, wherein the third frame member has a plate member extending in two directions in a direction perpendicular to a plane intersecting the track and a direction away from the track. The storage device according to claim 1, wherein the scaffold fixing member further includes a sixth frame member that is elongated in the horizontal direction and that is fixed to the rail surface so as to intersect the rail in a plan view; the third and the third The frame members are fixed to positions sandwiching the aforementioned rails on the sixth frame member in plan view. The storage device of claim 2, further comprising an oblique member having both ends fixed to the two aforementioned scaffold fixing members adjacent to each other along the track. The storage device of claim 4, wherein the line segment connecting the third frame members to each other, and the line segment connecting the third frame member and the oblique member are in a downward direction It does not cross the aforementioned track at all times. A storage device according to claim 1, further comprising a plate member extending in the vicinity of one end of the upper portion of the scaffold portion and extending upward from the upper portion of the scaffold portion.