JP2008247561A - Storage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a storage device capable of suppressing the weight of the entire device while ensuring the consistent loading of an object to be conveyed, and hardly preventing the air flow from being blocked when the air flow is present in a chamber. <P>SOLUTION: A shelf unit 120 is constituted of bar-shaped frame members 121-125. The frame members 121-124 are arranged parallel to a track 92, and separated from each other. Penetration areas 120a-120c penetrating the shelf unit 120 in the vertical direction are formed between the frame members 121-124. The spacing between the frame members 121 and 122 is smaller than the width of an object to be conveyed, and the object is loaded on upper surfaces of the frame members 121 and 122. A fixing unit 110 for fixing the shelf unit 120 to the track 92 is constituted of frame members 111-114 which are long in one direction, and the fixing units 110 are also arranged separately from each other. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a storage device that stores an object to be transported from a transport carriage that travels on a track laid on a ceiling.

  For example, in a semiconductor manufacturing factory, a transported object such as a FOUP (Front Opening Unified Pod) containing a semiconductor substrate is transported to a transport cart such as an OHT (Overhead Hoist Transport) traveling on a track laid on the ceiling. There is a case where a conveying system is provided.

  In addition, a device for temporarily placing the object to be transported by the transport cart may be installed on the track or the ceiling accompanying the transport system. For example, the storage rack described in Patent Document 1 has a horizontal rack suspended just below the track, and a box conveyed by an overhead traveling vehicle is placed on this rack.

Japanese Patent Laid-Open No. 10-108887

  In the apparatus for temporarily placing the object to be transported as described above, in order to stably place the object to be transported, a wide plate material or the like is used for the shelf portion on which the object to be transported is placed. Often. However, if the shelf is made of a plate material or the like, the weight of the entire apparatus increases. A heavy device may be difficult or unstable to fix near the ceiling.

  For example, when a device is used in a semiconductor manufacturing factory, it is often installed in a clean room. In a clean room, an air flow is generated to keep the room clean. However, if the shelf is made of a plate material or the like, the air flow is hindered, and the effect may be impaired. Further, when the air flow is disturbed by this, dust adhering to the apparatus and the carriage is scattered, which may affect the yield of the semiconductor substrate and the like.

  An object of the present invention is to provide a storage device for a transported object that suppresses the weight of the apparatus while ensuring stable placement of the transported object, and that does not obstruct the airflow when there is an airflow in the room. is there.

  A storage device according to the present invention is a storage device that stores the transported object from a transport cart that travels on a track laid on a ceiling while gripping the transported object, and is a first device that extends in a long shape. A shelf portion on which the object to be transported is placed on a horizontal plane constituted by upper surfaces of the first and second frames, and third to fifth frames extending in a long shape. The shelf is fixed to at least one of the track and the ceiling so that the third to fifth frames are substantially U-shaped and the shelf is positioned below the track. A plurality of shelf fixing members, and the third and fourth frames constituting both ends of the U-shape are respectively arranged such that the extending direction is along the vertical direction and the transport carriage is The trajectory and the trajectory so as to sandwich the traveling areas in the horizontal direction. The third frame and the fourth frame so that the extending direction of the fifth frame is along the direction from the third frame to the fourth frame. The first frame and the second frame are spaced apart from each other by a distance smaller than the width of the conveyed object in the horizontal direction. The plurality of shelf fixing members are arranged to be separated from each other along the track, and penetrate the shelf in the vertical direction between the first and second frames. A through region is formed.

  According to the storage device of the present invention, the shelf has two frames, and a through region smaller than the width of the object to be conveyed is formed between these frames. Therefore, a storage device with reduced weight while ensuring stable placement of the object to be conveyed is realized. In addition, for example, in a clean room, a storage device is realized in which the shelf portion does not easily block the downward airflow. Furthermore, since the whole shelf fixing member is composed of a frame extending in a long shape, and the shelf fixing members are also separated from each other, the weight of the storage device as a whole is suppressed, and the airflow is not easily disturbed. Realized.

  In the present invention, it is preferable that the third frame has a plate portion extending in both a vertical direction and a direction away from the track along a plane intersecting the track. In the configuration in which the weight of the entire storage device is suppressed as described above, the strength may not be sufficiently ensured against the deformation of the device. According to said structure, the 3rd flame | frame has a board part extended in the direction separated from a track | orbit along the plane which cross | intersects a track | orbit. Therefore, the deformation | transformation of the apparatus regarding the direction along said plane is suppressed. Thereby, for example, shaking of the shelf in the left-right direction with respect to the traveling direction of the transport carriage is suppressed.

  In the present invention, the shelf fixing member further includes a sixth frame that extends in a horizontal direction and is fixed to the upper surface of the track so as to intersect the track in plan view. In addition, it is preferable that the third and fourth frames are fixed at positions that sandwich the track on the sixth frame in plan view. According to this configuration, since the shelf fixing member is fixed to the upper surface of the track by the sixth frame, the storage device can be fixed to the track stably and reliably.

  Moreover, in this invention, it is preferable to further provide the oblique member by which both ends were fixed to the two said shelf fixing members adjacent to each other along the said track | orbit. According to this structure, the deformation | transformation of the apparatus regarding the direction along the plane parallel to a track | orbit and parallel to a perpendicular direction is suppressed. As a result, shaking of the shelf along the plane is suppressed.

  In the present invention, it is preferable that a line segment connecting the third frames and a line segment connecting the third frame and the oblique members do not intersect the trajectory in plan view. . This configuration corresponds to the third frames being arranged so that the third frame does not sandwich the track and the third frame and the oblique member are disposed so as not to sandwich the track in plan view. That is, it means that both the third frame and the oblique members are disposed only in either the left or right direction when viewed from the transport carriage traveling on the track. Therefore, it is possible to arrange the manufacturing apparatus and other storage apparatus adjacent to the shelf part on the side where the third frame and the oblique members are not arranged when viewed from the transport carriage traveling on the track. .

  In the present invention, the first and second frames both extend along the track, and the shelf includes the seventh and eighth frames extending along the track. The seventh and eighth frames sandwich both of the first and second frames with respect to the direction from the first frame to the second frame, and The shelf is fixed to the fifth frame so as to be separated from both the first and second frames, and the shelf is between the seventh and eighth frames and the first and second frames. It is preferable that a penetrating region penetrating through is formed. According to this configuration, the shelf has two frames in addition to the first and second frames. Each of these frames has a penetrating region between the first and second frames. Therefore, the weight is suppressed while further ensuring the strength of the shelf, and a configuration that does not disturb the airflow is realized.

  Moreover, in this invention, it is preferable that the alignment member at the time of mounting the said to-be-conveyed object is being fixed to both or one of the said 1st and 2nd frames. According to this configuration, the alignment member is fixed only to the first and second frames. For example, when positioning is performed after the third to eighth frames are fixed to the track or the ceiling, it is only necessary to adjust the positions at which the first and second frames are fixed to the fifth frame. Therefore, the alignment operation can be completed easily and quickly.

  Moreover, in this invention, it is preferable to be further equipped with the board member fixed to the end vicinity of the upper surface of the said shelf, and extending upwards from the upper surface of the said shelf. According to this structure, it can prevent that a to-be-conveyed object falls from the one end of a shelf part below.

  Hereinafter, a buffer 100 which is an example of a preferred embodiment of the present invention will be described with reference to the drawings. 1-3 is a figure which shows the structure of the buffer 100 (storage device).

  The buffer 100 is used, for example, in a clean room installed in a semiconductor manufacturing factory. As shown in FIGS. 1 to 3, the buffer 100 is installed on the track 92. The track 92 is laid along the ceiling 99 of the clean room above various manufacturing apparatuses installed in the clean room. A transport carriage 91 is installed on the track 92. The transport carriage 91 is controlled by a control device (not shown) and travels on the track 92 along the direction A in FIG. Then, the container 93 is moved in the vertical direction along the direction B in FIG. Thereby, the container 93 is conveyed between each manufacturing apparatus. A semiconductor substrate or the like is accommodated in the container 93, and when the container 93 is transferred to the manufacturing apparatus, various manufacturing processes are performed on the semiconductor substrate in the container 93.

  The buffer 100 has a shelf unit 120 on which the container 93 is placed. As shown in FIG. 2, the shelf unit 120 has a substantially rectangular shape in plan view, and is arranged so that the longitudinal direction follows the track 92. The shelf unit 120 includes frame members 121 to 125 (first, second, seventh, and eighth frames). Of the shelf unit 120, a portion formed by the frame members 121 and 122 functions as a shelf portion on which the container 93 is placed on the upper surface.

  The shelf unit 120 has one frame member 121-124. The frame members 121 to 124 are members having a bar shape that are arranged so as to extend linearly along the direction A. The frame members 123 and 124 are arranged on the outermost side in the direction C that is parallel to the horizontal plane and perpendicular to the direction A. The frame members 121 and 122 are disposed inside the frame members 123 and 124 with respect to the direction C. Four frame members 125 are arranged so as to extend along the direction C. Both ends of the frame member 125 are fixed to the frame members 121 and 122.

  The frame members 121 to 124 are separated from each other in the direction C. The frame members 125 are separated from each other in the direction A. Thereby, a penetrating region penetrating the shelf unit 120 in the vertical direction is formed between the frame members 121 to 125. For example, a through region 120a is formed between the frame members 121, 122, and 125. A penetrating region 120b is formed between the frame members 121 and 123. A penetrating region 120 c is formed between the frame members 122 and 124.

  The frame members 121 and 122 have upper surfaces 121a and 122a along a plane, and the upper surfaces 121a and 122a are arranged so as to be included in the same horizontal plane. The frame members 121 and 122 are arranged such that the distance between them is smaller than the width of the container 93 in the direction C. The container 93 is placed on the upper surfaces 121a and 122a so as to straddle the penetrating region 120a between the frame members 121 and 122. On the shelf unit 120, as shown by broken lines in FIG. 1, eight placement areas for the containers 93 are prepared.

  A plurality of protrusions 126 are fixed on the upper surfaces 121a and 122a as shown in FIG. Eight protrusions 126 are fixed on the upper surface 121a (not shown), and sixteen protrusions 126 are fixed on the upper surface 122a. The protrusions 126 on the upper surface 121 a are disposed in the placement regions of the container 93 and are arranged at equal intervals along the direction A. Further, the protrusions 126 on the upper surface 122 a are arranged in each placement region of the container 93, with two as one set. In other words, a total of three protrusions 126, one protrusion 126 on the upper surface 121a and two protrusions 126 on the upper surface 122a, are arranged in each placement region. The three protrusions 126 are arranged so as to have a predetermined positional relationship with each other in the horizontal direction.

  On the other hand, three alignment holes having a shape such that the protrusion 126 fits are formed on the lower surface of the container 93 (not shown). These three alignment holes are also formed to have the same positional relationship as the above-mentioned predetermined positional relationship. When the container 93 is placed on the shelf unit 120, the corresponding alignment holes And the protrusion 126 are aligned.

  A plurality of fall prevention plates 103 are fixed around the shelf unit 120. The fall prevention plate 103 has a substantially square shape. Eight of these fall prevention plates 103 are fixed to the outermost one side surface of the shelf unit 120 in the direction C. This side surface corresponds to the side surface of the frame member 123. As shown in FIG. 1, these eight fall prevention plates 103 are arranged so as to overlap with the placement position of the container 93 on the shelf unit 120 in a front view.

  Further, the other eight of the fall prevention plates 103 are fixed to the other outermost side surface of the shelf unit 120 in the direction C. This side surface corresponds to the side surface of the frame member 124. These eight fall prevention plates 103 are arranged at the same position in the direction A as the other eight fall prevention plates 103 fixed to the frame member 123. That is, each fall prevention plate 103 fixed to the frame member 123 and each fall prevention plate 103 fixed to the frame member 124 are arranged so as to sandwich each placement region of the container 93 with respect to the direction C.

  Further, the fall prevention plates 103 are also fixed to both side surfaces of the shelf unit 120 in the direction A. These fall prevention plates 103 are fixed to the frame member 125 and are arranged so as to sandwich the eight placement regions of the container 93 with respect to the direction A.

  The buffer 100 has four fixed units 110. These fixed units 110 are arranged apart from each other in the direction along the track 92 (direction A). The upper end of each fixed unit 110 is fixed to the upper surface of the track 92, and the shelf unit 120 is fixed to the lower end of the fixed unit 110. Thus, the shelf unit 120 is suspended below the track 92. Hereinafter, the configuration of the fixed unit 110 will be described. The four fixed units 110 all have the same configuration, and the following description is the same for all the fixed units 110.

  As shown in FIGS. 1 to 3, the fixing unit 110 includes frame members 111 to 114 (third to sixth frames). The frame member 111 is a member having a substantially rectangular flat plate shape, and is arranged so that the longitudinal direction is along the vertical direction. Moreover, it arrange | positions so that the planar surface direction may follow the vertical direction and the direction C (refer FIG. 3). The frame member 112 is a member having a bar shape that is arranged to extend linearly along the vertical direction. Each of the frame members 111 and 112 has an upper end fixed to the frame member 114 and a lower end fixed to the frame member 113. As shown in FIG. 3, the frame members 111 to 113 are generally U-shaped, and the frame members 111 and 113 constitute both ends of the U-shape. The frame members 111 to 113 function as a shelf fixing member for fixing the shelf portion to the track.

  The frame members 111 and 112 are fixed in the vicinity of both ends in the direction C of the frame members 113 and 114, respectively. Thus, the frame members 111 and 112 are arranged so that the shelf unit 120 is sandwiched with respect to the direction C in the lower part and the traveling region of the track 92 and the transport carriage 91 is sandwiched with respect to the direction C in the upper part. For all the fixed units 110, the frame member 111 is disposed at the same position near the left end of the buffer 100 in FIG. Further, the frame member 112 is disposed at the same position in the vicinity of the right end of the buffer 100 in FIG.

  Both of the frame members 113 and 114 are arranged so as to extend linearly along the direction C. Each of them has a U-shaped shape with respect to a cross section perpendicular to the direction C. The frame member 113 is arranged so that the U-shape opens downward with respect to the cross section. The frame member 114 is arranged such that the U-shape opens upward with respect to the cross section. Frame members 111, 112, and 121 to 124 are fixed to the upper surface of the frame member 113. Frame members 111 and 112 are fixed to the lower surface of the frame member 114.

  As shown in FIGS. 1 to 3, the buffer 100 has two oblique members 102. All the oblique members 102 are arranged in the vicinity of the left end of the buffer 100 in FIG. One end 102 a of the oblique member 102 is fixed to one end of the frame member 114 in the direction C in the outermost fixing unit 110 in the direction A. The other end 102b of the oblique member 102 is fixed to one end in the direction C of the frame member 113 in the fixing unit 110 adjacent to the fixing unit 110 to which the one end 102a is fixed. Accordingly, any of the oblique members 102 are fixed to the two fixing units 110 adjacent to each other so as to extend obliquely along one side surface in the direction C of the buffer 100.

  Hereinafter, further detailed configurations of the frame members 111 to 114 and the frame members 121 to 125 will be described with reference to FIGS. 4 and 5. FIG. 4A shows a cross section perpendicular to the length direction of the frame member 121. In addition, since all the frame members 121-124 have the same cross-sectional shape, about structures other than the frame member 121, it abbreviate | omits. The frame member 121 has a substantially square cross-sectional shape. Cavities 121b to 121d are formed in the frame member 121. The cavities 121b to 121d are opened on each of the left side surface, the bottom surface, and the right side surface of the frame member 121 in FIG. The cavities 121b to 121d extend along the length direction of the frame member 121. The frame member 121 is formed symmetrically in the cross-sectional shape described above.

  FIG. 4B is a cross-sectional view of the lower portion of the buffer 100 taken along the line IV-IV in FIG. All of the frame members 121 to 124 are fixed to the upper surface of the frame member 123 via bolts 131. The bolt 131 passes through the upper plate 113a of the frame member 113 from below and is fixed to a hollow opening formed on the lower surface of the frame members 121 to 124.

  In addition, the fall prevention plate 103 is fixed to the left side surface of the frame member 123 in FIG. The bolt 133 passes through the fall prevention plate 103 from the left side and is fixed to a hollow opening formed on the left side surface of the frame member 123. A fall prevention plate 103 is fixed to the right side surface of the frame member 124 via a bolt 133 in FIG. The bolt 133 passes through the fall prevention plate 103 from the right side and is fixed to a hollow opening formed on the right side surface of the frame member 124.

  Further, a frame member 125 is fixed to the frame members 121 and 122 via two bolts 132. One of the bolts 132 penetrates from the opening formed on the left side surface of the frame member 121 to the opening on the right side surface, and is further fixed to the left end of the frame member 125. The other of the bolts 132 penetrates from the opening formed on the right side surface of the frame member 122 to the opening on the left side surface, and is further fixed to the right end of the frame member 125.

  Although illustration of the frame members 111 and 112 is omitted in FIG. 4B, these members are also fixed to the upper surface of the frame member 113 via bolts, like the frame members 121 to 124. .

  Hereinafter, the fixed part of the frame member 114 and the track 92 will be described. The frame member 114 is fixed to the track 92 through two bolts 141 as shown in FIG. FIG. 5 is an enlarged view of a region surrounded by a dashed line in FIG. FIG. 5 shows a cross section of the track 92 and a part of the frame member 114. A screw part 144 is formed at the upper end of the frame member 112. The screw portion 144 passes through the bottom plate 114 a of the frame member 114 via two nuts 145. The frame member 112 is fixed to the frame member 114 by these screw portions 144 and two nuts 145.

  A protrusion 92 a that protrudes upward is formed on the upper surface of the track 92. A cavity 92b is formed in the protrusion 92a. The cavity 92b opens upward on the upper surface of the protrusion 92a, and an opening 92c is formed. The cavity 92b extends linearly along the length direction of the track 92 (the direction from the front toward the back in FIG. 5). The cross-sectional shape of the cavity 92b is adjusted so that the bolt head 141a of the bolt 141 is accommodated and the main body of the bolt projects upward through the opening 92c. Thus, the protrusion 92 a is configured such that the bolt 141 can move along the track 92 while the bolt head 141 a is accommodated in the cavity 92 b. The frame member 114 is fixed to the track 92 via a bolt 141 and a nut 142 in which a bolt head 141a is accommodated in the cavity 92b. In FIG. 3, the configuration around the other bolt 141 is also the same as the configuration shown in FIG.

  The following effects are exhibited by the present embodiment having the above-described configuration. The fixed unit 110 and the shelf unit 120 are mainly configured by members mainly having a bar shape, such as frame members 111 to 114 and 121 to 125. The fixed unit 110 and the frame members are spaced apart from each other, and as a whole, have a configuration with very good air permeability. Therefore, the weight of the entire buffer 100 is suppressed, and a configuration that does not hinder the airflow in the clean room is realized.

  In particular, the shelf unit 120 is mainly configured by frame members 121 to 124 arranged so as to extend along the extending direction (direction A) of the track 92. Between these frame members, penetrating regions 120a, 120b, and 120c that penetrate the shelf unit 120 in the vertical direction are formed. Therefore, it is suppressed that the shelf unit 120 prevents the downward flow from the ceiling downward in the clean room. Moreover, since the shelf unit 120 is configured by a frame member having a bar shape, each through region can be secured widely. Therefore, the structure which is hard to prevent a downflow is implement | achieved.

  In addition, if it is mainly composed of a rod-shaped frame member as described above, there is a possibility that the strength of the buffer 100 is not sufficiently secured against deformation. However, in this embodiment, the frame member 111 has a flat plate shape extending along a plane perpendicular to the direction A (see FIG. 3). Therefore, the deformation of the buffer 100 in the direction along the plane perpendicular to the direction A is prevented. For example, the shelf unit 120 is prevented from shaking along the direction C (see FIGS. 2 and 3). Further, in the present embodiment, two oblique members 102 are installed. Thereby, the deformation of the buffer 100 in the direction along the plane perpendicular to the direction C is prevented. For example, the shelf unit 120 is prevented from shaking along the direction A (see FIGS. 2 and 3).

  Further, according to the present embodiment, both the oblique member 102 and the frame member 111 are disposed in the vicinity of the left end of the buffer 100 in FIG. 3, and the frame member 112 is disposed in the vicinity of the right end of the buffer 100. Therefore, the distance from the placement region of the container 93 on the shelf unit 120 to the right end of the buffer 100 can be shortened as compared with the case where the oblique member 102 and the frame member 111 are arranged at the right end of the buffer 100. it can. Therefore, as shown by a broken line 999 in FIG. 3, it is possible to arrange a manufacturing apparatus or the like in a range close to the container 93 on the buffer 100.

  Further, according to the present embodiment, all the alignment protrusions 126 are fixed on the frame members 121 and 122. Then, only the frame members 121 and 122 can be attached to and detached from the frame member 113 by tightening or removing the two bolts 131 in FIG. Therefore, when the placement position of the container 93 is adjusted with respect to the direction (direction A) along the track 92, a frame unit in which the frame members 121, 122 and 125 are fixed to each other is assembled and the frame unit is aligned By fixing to the frame member 113, the alignment can be completed for all the mounting positions. Accordingly, the alignment operation is completed easily and quickly as compared with the case where the alignment protrusion is aligned and fixed for each placement position. Also, when positioning is performed after the frame members 121 to 125 are once fixed to the buffer 100, only the frame unit composed of the frame members 121, 122, and 125 is removed from the frame member 113 and slid along the track 92. By fixing the frame member 113 again, the alignment is completed with respect to all the mounting positions. Therefore, operations such as readjustment of the placement position can be completed easily and quickly.

  Further, according to this embodiment, the fall prevention plate 103 is installed on the shelf unit 120. This prevents the container 93 placed on the shelf unit 120 from falling down from the shelf unit 120.

  Further, according to the present embodiment, the frame member 114 can be moved along the track 92 by loosening the nut 142 and moving the bolt head 141a along the track 92 in the cavity 92b (see FIG. 5). . As a result, the fixing unit 110 can be moved along the track 92, and alignment when the buffer 100 is fixed to the track 92 can be easily performed.

<Modification>
The above is a description of a preferred embodiment of the present invention, but the present invention is not limited to the above-described embodiment, and various modifications can be made within the scope described in the means for solving the problem. It is possible.

  For example, in the above-described embodiment, the fixed unit 110 is fixed to the track 92, but the fixed unit 110 may be directly fixed to the ceiling 99.

  Moreover, in the above-mentioned embodiment, some frame members 111-114 and 121-125 have rod shape. However, each has a shape extending in a long direction along one direction, and any shape may be used as long as the buffer can be configured by being fixed to be separated from each other. For example, a plate shape may be used.

It is a side view of a buffer concerning one embodiment of the present invention, and a peripheral view of a buffer. It is a perspective view of the buffer of FIG. It is a front view of the buffer of FIG. 4A is a longitudinal sectional view perpendicular to the length direction of one frame member constituting the buffer of FIGS. 1 to 3, and FIG. 4B is a buffer taken along the line IV-IV of FIG. FIG. FIG. 4 is an enlarged view of a region surrounded by an alternate long and short dash line in FIG. 3.

Explanation of symbols

91 Transport cart 92 Track 93 Container 99 Ceiling 100 Buffer 102 Oblique member 103 Fall prevention plate 110 Fixed unit 111-114 Frame member 120 Shelf unit 120a-120c Penetration area 121-125 Frame member

Claims (8)

A storage device for storing the transported object from a transport cart that travels on a track laid on the ceiling while gripping the transported object,
A shelf part, which is composed of first and second frames extending in a long shape, and on which the object to be transported is placed on a horizontal plane constituted by the upper surfaces of the first and second frames,
The third to fifth frames extending in a long shape, the third to fifth frames are configured in a substantially U shape, and the shelf is positioned below the track. A plurality of shelf fixing members for fixing the shelf to at least one of the track and the ceiling,
The third and fourth frames constituting both ends of the U-shape are arranged such that the extending direction is along the vertical direction and the region where the transport carriage runs is sandwiched between each other with respect to the horizontal direction. Fixed to either the track or the ceiling,
The fifth frame is fixed to both the third and fourth frames and below the track so that the extending direction is along the direction from the third frame to the fourth frame. Has been
The first and second frames are
Fixed to the fifth frame such that the upper surfaces are separated from each other by a distance smaller than the width of the conveyed object in the horizontal direction;
The plurality of shelf fixing members are arranged to be separated from each other along the track,
A storage device, wherein a penetrating region penetrating the shelf in the vertical direction is formed between the first and second frames.   2. The storage according to claim 1, wherein the third frame has a plate portion extending in both a vertical direction and a direction away from the track along a plane intersecting the track. 3. apparatus. The shelf fixing member is
A sixth frame that extends in the horizontal direction and is fixed to the upper surface of the track so as to intersect the track in plan view;
The third and fourth frames are
The storage device according to claim 1 or 2, wherein the track on the sixth frame is fixed at a position sandwiching each other in plan view.   The storage device according to claim 2, further comprising an oblique member having both ends fixed to the two shelf fixing members adjacent to each other along the track.   The line segment connecting the third frames and the line segment connecting the third frame and the oblique members do not intersect the trajectory in plan view. Storage device. The first and second frames both extend along the trajectory;
The shelf is
Further comprising seventh and eighth frames extending along said trajectory;
The seventh and eighth frames are
The first and second frames are both sandwiched with respect to a direction from the first frame to the second frame, and are separated from both the first and second frames. Is fixed to the frame of 5,
The penetration area | region which penetrates the said shelf part is formed between the said 7th and 8th flame | frame and the said 1st and 2nd flame | frame, The any one of Claims 1-5 characterized by the above-mentioned. The storage device described.   The storage device according to claim 6, wherein an alignment member for mounting the object to be transported is fixed to both or one of the first and second frames.   The plate member that is fixed in the vicinity of one end of the upper surface of the shelf and extends upward from the upper surface of the shelf is further provided. Storage device.

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