200903694 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種保管裝置，其對在天花板所設軌道上 行走之搬運台車中之被搬運物加以保管。 【先前技術】 例如，半導體製造工廠中有如下所述之搬運系統，收納 半導體基板之前置式晶圓盒（F0UP : Front 0pening UnifiedBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage device for storing articles to be transported in a transport trolley that travels on a rail provided on a ceiling. [Prior Art] For example, a semiconductor manufacturing factory has a handling system as described below, and a semiconductor wafer front-mounted wafer cassette (F0UP: Front 0pening Unified)
Pod)等被搬運物，由在天花板所設轨道上行走之懸吊式無 人搬運車（OHT，Overhead Hoist Transport)等搬運台車進 行搬運。 另，附隨於所述搬運系統，有於執道或天花板上設置用 於使搬運台車臨時載置被搬運物之裝置之情況。比如專利 文獻1中所述之儲存架，其具有懸掛於軌道正下方之水平 擱物板，由天花板式行走台車所搬運之箱子可載置於該儲 存架中。 [專利文獻1]特開平10-109887號公報 【發明内容】 [發明所欲解決之問題] 、如前述之用以臨時载置被搬運物之裝置，為了平穩载置 被搬運物’載置被搬運物之棚架大多採用板材等寬度較大 之構件，，棚架若以板材等構成，則裝置整體重；將增 ^重量大的裝置難以喊於天花板附近，存在不穩^ 另，如用於半導體製造工薇之情形，裝置The object to be transported, such as Pod), is transported by a transport trolley such as an OHT (Overhead Hoist Transport) that travels on a track provided on the ceiling. Further, in the case of the above-described conveyance system, there is a case where a device for temporarily placing the conveyed object on the conveyance trolley is provided on the road or the ceiling. For example, the storage rack described in Patent Document 1 has a horizontal storage board suspended directly below the track, and a box carried by the ceiling type traveling trolley can be placed in the storage rack. [Problem to be Solved by the Invention] As described above, the apparatus for temporarily placing the object to be transported is placed in order to smoothly mount the object to be transported. Most of the scaffolds for transporting objects are made of members with a large width such as plates. If the scaffolding is made of plates or the like, the whole device is heavy; the device with large weight increase is difficult to shout near the ceiling, and there is instability. In the case of semiconductor manufacturing workers, devices
卜*_ V、 jivT 130220.doc 200903694 塵室内。無塵室内為保持室内清潔會產生氣流，棚架若採 用板材等構成，將妨礙前述氣流，有導致其效果受到影響 之情況。$ ’氣流若因此而资亂，裝置或搬運台車上所附 著之塵埃就可能被吹散’對半導體基板等的成品率產生不 良影響。 本發明之目的係、提供一種被搬送物之保管裝i，該裝置 可在確保被搬運物載置平穩下，抑制裝置重量，室内有、氣 流時也不會妨礙該氣流。 [解決問題之技術手段] μ本發明之保管裝置，其係對把持被搬送物且在天花板所 =軌道上行走之搬運台車中之上述被搬運物加以保管的保 管裝置’其係具有··長型延伸之第卜第2框架件所構成之 棚架部，於前述第i、第2框架件之上面所形成之水平面載 置前述被搬運物；複數個長型延伸之第3〜第5框架件所構 成之棚架固定部件，前述第3〜第5框架件形成略似字 型’與前述棚架部同位於前述軌道之下方，將前述棚架部 固定於前述軌道及天花板中至少一方上；構成前述字 型兩端部之前述第3及第4框架件，垂直於各自前述延伸方 向且水平於前述搬運台車行走區域彼此予以包夾；固定於 剛述軌道及天花板中之上述任一者之前述第5框架件，盆 沿者於前述延伸方向自前述第3框架件朝向前述第4框架件 之方向，：前述第3及第4框架件兩者—併固定於前述軌道 ::方’可述第1及第2框架件係於前述上面於水平方向以 略乍於前述被搬運物之寬度相互隔開之方式，固定於前述 130220.doc 200903694 第5框架件，前述複數個棚架固定部 此間隔地排列配置^述第i及第2框:：…述執道彼 士 』 第框M牛之間形成有於垂 直方向貫通前述棚架部的貫通區域。 本發明之保管裝置，其棚架部具有2心_， 架件之間形成小於被搬運物寬度的貫通區域。因此。 現在確保被搬運物載置平穩下抑制重量之保管裝置，I實 可實現例如於無塵室内亦不妨礙向下方之^之保^ Γ: 置。再者，棚架固定部件全#伤士 Λ 衣 王體係由延伸為長型狀之框架件 所構成，棚架固定部件彼此亦有間 什 重量，又不會妨礙氣流。 故可抑制裝置整體 軌=發：中，前述第3框架件最好具有在沿著與前述 二t ®之垂直方向以及自前述執道遠離之方向之 兩方向延伸之板材構件。如針 如^之抑制保管裝置整體重量 之構成，可能會擔心無法確保裝置不變形所要求 如按前述之構成，第3框架件在沿著與軌道交又之平: =遠：之方向延伸有板材構件。因此，於沿前述平面之 置變形可受到抑制。據此，例如對於搬運台車行 走方向之左右方向上棚架部之摇晃等受到抑制。 另’本發明中’前述棚架固定部件進而具有一第6框竿 :水平方向長型延伸’以俯視時與前述執道交又之方式 在前述第6框架件上之前H弟4框架件較好係固定於 位置。攄+ 边執道之俯視圖中為彼此包夾之 道上面=’棚架固定部件經由第6框架件固定於軌 面，故可確保保"置平穩而牢固地固定於軌道。 130220.(j〇c 200903694 另本么明中，較好於沿前述執 定部件之兩端進而罝敎兩别述棚架固 可抑制與軌道平行之沿與牛右错此構成， 的變形。據此，…… 平面方向之裝置 ° p制沿珂述平面之棚架部之晃動。 ，本發明中’連接前述第3框架件彼 接則述第3框架件與斜交 及連 盥針'十-w 丨之線奴’較好於俯視時均不 興刖述軌道父又。如此έ士谌 y 、 °構相當於俯視時，第3框架件Bu*_ V, jivT 130220.doc 200903694 Dust indoor. In the clean room, airflow is generated to keep the room clean, and if the scaffold is made of a plate or the like, the airflow will be hindered, and the effect may be affected. If the airflow of the $' is disordered, the dust attached to the device or the transporting trolley may be blown away, which may adversely affect the yield of the semiconductor substrate or the like. It is an object of the present invention to provide a storage device i for transporting articles, which can suppress the weight of the device while ensuring that the object to be transported is placed smoothly, and does not interfere with the airflow when there is air or air in the room. [Means for Solving the Problem] The storage device of the present invention is a storage device that stores the object to be transported in the transport vehicle that is transported on the ceiling or on the track. a scaffolding portion formed by the second type of frame member, wherein the object to be transported is placed on a horizontal surface formed on the upper surface of the i-th and second frame members; and the plurality of elongated third to fifth frames are extended The scaffold fixing member formed by the member, wherein the third to fifth frame members are formed in a slightly font-like shape, and the scaffold portion is located below the rail, and the scaffold portion is fixed to at least one of the rail and the ceiling. And the third and fourth frame members constituting both end portions of the font are vertically sandwiched from the respective extending directions and horizontally in the traveling trolley traveling region; and are fixed to any one of the track and the ceiling In the fifth frame member, the basin member is oriented in the extending direction from the third frame member toward the fourth frame member, and the third and fourth frame members are both fixed to the track: The first and second frame members are fixed to the 130220.doc 200903694 fifth frame member so as to be spaced apart from each other in the horizontal direction so as to be slightly spaced apart from the width of the object to be transported, and the plurality of scaffolds are fixed. The i-th and the second frame are arranged in this interval. The following is a case where the first frame and the second frame are arranged in the vertical direction. In the storage device of the present invention, the scaffolding portion has two cores, and a through region having a width smaller than the width of the object to be conveyed is formed between the frame members. therefore. At present, it is possible to ensure that the object to be transported is placed in a safe storage device with a reduced weight, and it is possible to realize, for example, in a clean room without hindering the protection of the lower side. Furthermore, the scaffolding fixing members are all made up of a frame member extending into a long shape, and the scaffold fixing members are also weighted each other without obstructing the airflow. Therefore, it is possible to suppress the entire frame of the apparatus. The third frame member preferably has a plate member extending in two directions which are perpendicular to the direction of the two t ® and the direction away from the preceding path. If the needle is such as to suppress the overall weight of the storage device, there may be a fear that it is impossible to ensure that the device is not deformed. As described above, the third frame member is extended along the line with the track: = far: Sheet metal parts. Therefore, deformation along the aforementioned plane can be suppressed. According to this, for example, the shaking of the scaffolding portion in the left-right direction of the traveling direction of the transporting carriage is suppressed. In the 'invention of the present invention, the above-mentioned scaffold fixing member further has a sixth frame 竿: a horizontally long extension ′ in a plan view and a crossover manner in front of the sixth frame member before the second frame member Good is fixed in position.摅+ In the top view of the side road, it is the top of each other. = The scaffold fixing member is fixed to the rail through the sixth frame member, so that it can be securely and securely fixed to the rail. 130220. (j〇c 200903694 In addition, it is better to use the two ends of the above-mentioned holding member to further suppress the deformation of the frame parallel to the track and the right side of the track. Accordingly, the device in the plane direction is swayed by the scaffolding portion along the plane of the description. In the present invention, 'the third frame member is connected to the third frame member and the oblique frame and the ligature pin are connected'. Ten-w 丨 线 奴 ' ' is better than overlooking the track father again. So gentleman 谌 y, ° structure is equivalent to looking down, the third frame
_、、灭執道且第3框架件與斜交部件亦不包夹 道之方式配置。即’意指第3框架件及斜交部件，從行 走於執道上之搬運台車之角度看時，只配置於左右方向中 之任-方。因此，從行走於執道上之搬運台車看時，未配 置第3框架件或斜交部件之一方，製造裝置或其它保管裝 置可鄰接於棚架部而配置。 ^ 另，本發明巾，前述^及第2框㈣均為沿前述軌道延 伸，前述棚架部進而具有沿前述執道延伸之第7及第8框架 件，前述第7及第8框架件於自前述第丨框架件朝向前述第2 框架件之方向上彼此包夾上述第丨及第2框架件兩者，且與 別述第1及第2框架件均不接觸，而是固定於前述第5框架 件上’前述第7及第8框架件與前述第1及第2框架件之間較 好形成貫通前述棚架部之貫通區域。若據此結構，棚架部 除第1及第2框架件外進而具有2根框架件。因此，該等框 架件與第1及第2框架件之間均具有貫通區域.因此，可實 現確保棚架部強度、抑制重量' 不妨礙氣流之構成。 另’本發明中’前述第1及第2框架件中之雙方或一方較 130220.doc 200903694 好固定有載置前述被搬運物時之位置對準部件。據此結 構，位置對準部件只固定於第〗及第2框架件上。例如於第 3〜第8框架件固定於軌道或天花板後進行位置對準時，只 需調整第1及第2框架件固定於第5框架件之位置。因此， 位置對準作業可簡單快速完成。 另，本發明中，較好具備有固定於前述棚架部之上面一 端，從前述棚架部之上面向上延伸之板材構件。據此結 構，可防止被搬運物從棚架部之一端跌落至下方。 【實施方式】 [最佳實施方式] 以下，參照圖式對本發明之較佳實施形態之一例之緩衝 裝置100進行說明。圖丨〜圖3為緩衝裝置1〇〇(保管裝置）之 結構示意圖。 緩衝裝置100，例如可用於半導體製造工廠所設之無塵 室内。如圖1〜圖3所示，缓衝裝置1〇〇設置於軌道92上。軌 道92著無塵室天花板99，設於無塵室内所設置之各製造 裝置之上方。軌道92上設置有搬運台車91。搬運台車91經 由未圖示之控制裝置進行控制，沿著圖丨之方向入行走於軌 C 92上然後，使谷器93沿著圖1之方向Β於垂直方向移 動從而，在各製造裝置間搬運容器93。容器93内收納半 導體基板等物件，將容器93搬運至製造裝置後，製造裝置 即對容器93内之半導體基板進行各項製造處理。 緩衝裝置100具有載置有容器93之棚架單元12〇。棚架單 元120如圖2所示俯視時其具有長方形之概略形狀，配置 130220.doc 200903694 為其長度方向係沿著執道9 2。棚架單元12 〇具有框架件 121〜125(第1、第2、第7及第8框架件）。棚架12〇中，框架 件121及122所組成部分於上面作為載置容器93之棚架而發 揮機能。 棚架單元120中框架件121〜124各有一根β框架件 121〜124為沿方向Α直線延伸配置之具有棒狀之部件。框架 件123及124對平行於水平面之方向a為鉛直方向c上配置 於最外側。框架件121及122在方向C上配置於框架件in及 1 24之内側。框架件125以沿方向C延伸之方式配置4根。框 架件125之兩端固定於框架件121及122上。 框架件1 2 1〜12 4在方向C上彼此間隔安置。另，各框架件 12 5在方向A上彼此間隔安置。據此，框架件1 21〜1 2 5彼此 之間’於錯直方向形成貫通棚架單元120之貫通區域。例 如’框架件121、122及125彼此之間形成有貫通區域 120a。框架件121及123彼此之間形成有貫通區域12〇b。框 架件122及124彼此之間形成有貫通區域12〇c。 框架件121及122沿平面具有上面i21a及122a，該等上面 121a及122a配置為包含於同一水平面上。框架件121及122 以在方向C上之彼此間隔距離略小於容器93之寬度之方式 配置。容器93載置於跨越框架件i2i及122之貫通區域120a 之上面12 la及122a上。棚架單元12〇上，如圖1虛線所示， 具有8個區塊用以載置容器93。 上面121a及122a之上，如圖2所示固定有複數個凸起 126。上面1213上固定有8個凸起126(未圖示），上面122&之 130220.doc -10· 200903694 上固定有16個凸起126。上面121 a上各凸起126配置於容器 93之各載置區域内，沿方向a彼此等間隔排列配置。另， 上面122a上之凸起126以2個為1組，按組配置於容器93之 各載置區域内。即，各載置區域内配置有於上面1213上之 1個凸起126及於上面I22a上之2個凸起126，合計共3個凸 起126。且，該等3個凸起126配置成在水平方向上保持一 定位置關係。 另一方面，容器93下面形成有與凸起126嵌合之3個定位 孔（未圖示）。該等3個定位孔亦形成為具有與上述特定位置 關係相同之位置關係，容器93載置於棚架單元12〇上時， 相互對應之定位孔與凸起i 26相互嵌合而使位置對準。 棚架單το 120周圍固定有多塊掉落防止板1〇3。掉落防止 板1〇3具有大致正方形之形狀。該等掉落防止板1〇3中之8_,, annihilation and the third frame member and the oblique member are also arranged without the inclusion. In other words, it means that the third frame member and the skew member are disposed only in the left-right direction when viewed from the perspective of the transport trolley that travels on the road. Therefore, when viewed from the transport trolley traveling on the road, one of the third frame members or the skew members is not disposed, and the manufacturing apparatus or other storage device can be disposed adjacent to the scaffold portion. Further, in the towel of the present invention, the frame and the second frame (four) extend along the track, and the frame portion further has seventh and eighth frame members extending along the road, and the seventh and eighth frame members are The second and second frame members are sandwiched by the second frame member in a direction toward the second frame member, and are not in contact with the first and second frame members, but are fixed to the first In the frame member, it is preferable that the seventh and eighth frame members and the first and second frame members have a through region penetrating through the boss portion. According to this configuration, the scaffolding portion has two frame members in addition to the first and second frame members. Therefore, the frame members and the first and second frame members each have a through region. Therefore, it is possible to ensure the strength of the scaffold portion and suppress the weight 'without obstructing the air flow. Further, in the present invention, either or both of the first and second frame members are fixed to the positional alignment member when the object to be conveyed is placed, as compared with 130220.doc 200903694. According to this configuration, the position aligning members are fixed only to the first and second frame members. For example, when the third to eighth frame members are fixed to the rail or the ceiling and then aligned, it is only necessary to adjust the positions at which the first and second frame members are fixed to the fifth frame member. Therefore, the alignment work can be done simply and quickly. Further, in the invention, it is preferable to provide a plate member which is fixed to the upper end of the scaffold portion and extends upward from the upper portion of the scaffold portion. According to this configuration, the object to be transported can be prevented from falling from one end of the scaffolding portion to the lower side. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a buffer device 100 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 3 to Fig. 3 are schematic diagrams showing the structure of a buffer device 1 (storage device). The buffer device 100 can be used, for example, in a clean room provided by a semiconductor manufacturing factory. As shown in FIGS. 1 to 3, the shock absorber 1 is disposed on the rail 92. The track 92 has a clean room ceiling 99 which is placed above each of the manufacturing devices provided in the clean room. A transport carriage 91 is provided on the rail 92. The transport carriage 91 is controlled by a control device (not shown), and travels on the rail C 92 in the direction of the figure, and then moves the grain 93 in the vertical direction in the direction of FIG. 1 to be between the respective manufacturing apparatuses. Carrying the container 93. The container 93 accommodates an object such as a semiconductor substrate, and after transporting the container 93 to the manufacturing apparatus, the manufacturing apparatus performs various manufacturing processes on the semiconductor substrate in the container 93. The cushioning device 100 has a shelving unit 12 that carries a container 93. The scaffolding unit 120 has a rectangular shape as viewed in plan as shown in Fig. 2, and its configuration 130220.doc 200903694 has its length direction along the lane 92. The scaffolding unit 12 has frame members 121 to 125 (first, second, seventh and eighth frame members). In the scaffolding 12, the components of the frame members 121 and 122 function as a scaffold for mounting the container 93 thereon. Each of the frame members 121 to 124 in the scaffold unit 120 has a β frame member 121 to 124 which is a rod-like member which is disposed in a straight line extending in the direction. The frame members 123 and 124 are disposed on the outermost side in the vertical direction c with respect to the direction a parallel to the horizontal plane. The frame members 121 and 122 are disposed inside the frame members in and 14 in the direction C. The frame member 125 is disposed in such a manner as to extend in the direction C. Both ends of the frame member 125 are fixed to the frame members 121 and 122. The frame members 1 2 1 to 12 4 are spaced apart from each other in the direction C. Further, the frame members 125 are spaced apart from each other in the direction A. Accordingly, the frame members 1 21 to 1 2 5 are formed to penetrate the through region of the scaffold unit 120 in the wrong direction. For example, the frame members 121, 122, and 125 are formed with a through region 120a therebetween. The frame members 121 and 123 are formed with a through region 12〇b therebetween. The frame members 122 and 124 are formed with a through region 12〇c therebetween. The frame members 121 and 122 have upper faces i21a and 122a along the plane, and the upper faces 121a and 122a are configured to be included on the same horizontal plane. The frame members 121 and 122 are disposed in such a manner that the distances from each other in the direction C are slightly smaller than the width of the container 93. The container 93 is placed on the upper faces 12la and 122a of the through-region 120a of the frame members i2i and 122. The scaffolding unit 12 is provided with eight blocks for placing the container 93 as shown by the dashed line in FIG. Above the upper portions 121a and 122a, a plurality of projections 126 are fixed as shown in FIG. Eight protrusions 126 (not shown) are fixed on the upper surface 1213, and 16 protrusions 126 are fixed on the upper 122 & 130220.doc -10·200903694. The projections 126 on the upper surface 121a are disposed in the respective mounting regions of the container 93, and are arranged at equal intervals in the direction a. Further, the projections 126 on the upper surface 122a are arranged in groups of two, and are disposed in groups in the respective mounting regions of the container 93. That is, one projection 126 on the upper surface 1213 and two projections 126 on the upper surface I22a are disposed in each of the mounting regions, and a total of three projections 126 are provided. Moreover, the three projections 126 are arranged to maintain a certain positional relationship in the horizontal direction. On the other hand, three positioning holes (not shown) fitted to the projections 126 are formed on the lower surface of the container 93. The three positioning holes are also formed to have the same positional relationship as the specific positional relationship. When the container 93 is placed on the scaffolding unit 12, the corresponding positioning holes and the projections i 26 are fitted to each other to make a positional pair. quasi. A plurality of drop preventing plates 1〇3 are fixed around the scaffolding single το 120. The drop preventing plate 1〇3 has a substantially square shape. 8 of the drop prevention plates 1〇3
塊固定於棚架單元120之方向c上最外側之 相當於框架件123之側面。該箅8拔揸茨^ 另’掉落防止板1 03中之另8祕in令μ — “ _ _ _The block is fixed to the outermost side in the direction c of the scaffolding unit 120 corresponding to the side of the frame member 123. The 箅8 揸 揸 另 ^ another 'dropping prevention plate 1 03 in the other 8 secret in order μ - " _ _ _
130220.doc 200903694 再者’棚架單元120之方向A上兩側面亦分別固定有掉落 防止板103。該等掉落防止板103固定於框架件125上，並 配置為以在方向A上相互包夾容器93之8個載置區域。 緩衝裝置100具有4個固定單元110。該等固定單元11〇沿 軌道92之方向（方向a)彼此間隔排列配置。各固定單元i 1〇 之上端固定於軌道92之上面，固定單元11〇之下端固定於 棚架單元120。據此，棚架單元12〇懸掛於軌道“之下方。 以下，對固定單元110之結構進行說明。另，4個固定單元 110之結構全部相同，以下之說明適用於所有固定單元 110。 戈口圃所不，固疋皁元110具有框架件lu〜ιΐ4(第3〜 為大致長方形之平板狀部件，係 配置為長度方向係沿鉛直方向。又， M叆十板之面方向沿 錯直方向及方向C之方式配置（參照圖3)。才匡架件112為沿130220.doc 200903694 Furthermore, the fall prevention plate 103 is also fixed to both sides of the direction A of the scaffolding unit 120. The drop preventing plates 103 are fixed to the frame member 125 and are disposed to sandwich the eight mounting regions of the container 93 in the direction A. The buffer device 100 has four fixing units 110. The fixing units 11 are arranged side by side in the direction (direction a) of the track 92. The upper end of each fixing unit i 1 固定 is fixed to the upper side of the rail 92, and the lower end of the fixing unit 11 固定 is fixed to the scaffolding unit 120. Accordingly, the scaffolding unit 12 is hung below the track. Hereinafter, the structure of the fixing unit 110 will be described. In addition, the structures of the four fixing units 110 are all the same, and the following description applies to all the fixing units 110. In any case, the solid soap element 110 has a frame member lu~ιΐ4 (the third to the substantially rectangular flat member is arranged in the longitudinal direction along the vertical direction. And the configuration of the direction C (refer to Figure 3).
U 船直方向直線狀延伸配置之具有棒狀之部件。框架件⑴ 及112之上端均固定於框架件丨14上， 厂知均固定於框架件 11 3上。框架件111〜113如圖3所示槿出細 q 「丨不偁成類似„匚"之字型， 框架件111及112構成”匚”字型之兩總 兩^部。框架件111〜113為 作為用以將棚架部固定於軌道上之灿加^ 月木固定部件而發揮機 能。 框架件111及112在方向c上各自囡6 口疋於框架件113及114 之兩端附近。據此’框架件111及112 向C上包夹棚架單元120,在1上邻 ’、’、在其下部於方 八上#於方向c上包夾軌道92 及搬運台車91之行走區域。另， 虿固定單元110之框架 J30220.doc 12 200903694 件η 1均如圖3所示配置於緩衝裝置1〇〇之左端附近同一位 置。且，所有固定單元110之框架件112均如圖3所示配置 於緩衝裝置100之右端附近同一位置。 框架件113及114均沿方向C直線狀延伸配置。因此，各 於垂直於方向c之斷面上具有"匸"字型之形狀。框架件113 配置為前述”匸"字型斷面之開口朝下。框架件ιΐ4配置為 前述"C：，，字型斷面之開口朝上。框架件113之上面固定有 框架件111、112及121〜124。框架件114之下面固定有框架 件 111 及 112。 如圖1〜圖3所示，緩衝裝置100具有2根斜交部件1〇2。各 斜交部件102均如圖3所示配置於緩衝裝置1〇〇之左端附 近。斜交部件102之一端l〇2a固定於方向八最外側之固定單 元110中框架件114之方向C上之一端。斜交部件1〇2之另一 端102b固定於一端i〇2a所固定之固定單元11〇之相鄰固定 單元110中框架件113之方向C上之一端。據此，任一斜交 部件1 02均沿緩衝裝置100在方向c上一側面斜向延伸，固 定於兩相鄰固定單元11〇上。 以下，參照圖4及圖5對框架件ill〜114及框架件pi〜125 之詳細結構進行說明。圖4(a)為框架件121之垂直於長度方 向之斷面圖。另，因框架件121〜124均具有相同斷面形 狀，故對框架件121以外之結構省略其說明。框架件12丨具 有大致為正方形之斷面形狀。框架件121内形成有穴 121 b〜121 d。穴121 b〜121 d如框架件121之圖4(a)所示分別 開口於左側面、下面和右側面。前述穴丨21 b〜121 d均沿框 130220.doc -13· 200903694 架件⑵之長度方向延伸。框架件121形成為前述斷面形狀 左右對稱。 圖4(b)為圖2沿IV_IV線之緩衝裝置i 〇〇下部斷面圖。框架 件12丨〜124均藉由螺栓131固定於框架件ιΐ3之上面。螺栓 131從下往上貫通框架件113之上部板u3a，固定於框架件 121〜124之下面所形成之穴開口處。 另，框架件123如圖4(b)中之左側面上，#由螺检133固 ,^有料防止板⑻。螺栓133從料防止板1G3之左方貫 穿，固定於框架件123左側面所形成之穴開口處。框架件 124如圖4(b)中之右側面上，藉由螺栓133固定有掉落防止 板丨〇3。螺栓133從掉落防止板1〇3之右方貫穿，固定於框 架件124右側面所形成之穴開口處。 再者，框架件121及122上’藉由2根螺检132固定有框架 件125。i根螺栓132從框架件121之左側面所形成開口貫通 至右側面開口，進而固定於框架件125之左端。另丨根螺栓 )132從框架件122之右側面所形成之開口貫通至左側面開 口 ’進而固定於框架件125之右端。 另，圖4(b)中框架件U1及112雖省略圖示，但這些部件 與框架件121〜124相同，都藉由螺栓固定於框架件ιΐ3之上 面。 以下，對框架件114與軌道92之固定處進行說明。框架 件114如圖3所示藉由2根螺栓141固定於軌道”上。圖5為 圖3之點線所圍區域之放大圖。圖5t所示為軌道％之斷面 與框架件Π4之局部。框架件112之上端為螺絲144。螺絲 130220.doc • 14- 200903694 144藉由2個螺母145貫通框架件114之底板n4a。框架件 112藉由該等螺絲144及2個螺母145固定於框架件114上。 軌道92之上面，形成有向上突出之凸起部92a。凸起部 92a中形成有穴92b，穴92b向上於凸起部92a之上面開口， 形成開口部92c。穴似沿軌道92之長度方向（面對圖5從眼 前朝向其内部之方向）直線狀延伸。穴㈣之斷面形狀調整 為收納螺栓141之螺栓頭1413，並讓螺栓本體通過開口 向上方突出。據此，構成為凸起部92a於穴92b内收納螺拴 141之螺栓頭14^之同時，螺栓141可沿軌道％行走。框架 件114藉由螺栓頭141&收納於穴92b内之螺栓Μ〗盥螺母 固定於執道92上。另，圖3中另一根螺栓14/之周圍 構成亦與圖5所示之構成相同，故省略其說明。 依據具有前述構成之本實施形態，可以達到以下效果。 固定單S11G及棚架單元12〇概略如框架件iu〜⑴及 121〜125等之主要具有棒狀之部件所構成。而，固定單元 H0及框架件彼此互相間隔配置，整體而言具有非常良好 =氣性之構成。因此’可實現在抑制緩衝裝置ι〇〇整體重 罝之同時，不會妨礙無塵室内之氣流之構成。 ::::是，棚架單元120主要由沿執道92之延伸方向(方向 A)l伸配置之框架件^〜丨24所構成。 此之Η犯λ、士 叩 &些框架件彼 ^之間形成有於錯直方向貫通棚架單元⑵之貫通區域 ^ mum㈣m12()對無塵室内從天 m所吹氣流之妨礙可受到抑制。另，藉由棚架單元 (、有棒狀之框架件所構成’可確保各貫通區域足夠 130220.doc •15· 200903694 大攸而，可實現不妨礙下吹氣流之構成。 二如前所述緩衝裝置100主要由棒狀框架件構成，可 月匕會擔心無法確保裝置不變形所要求之 形態中’框架件⑴具有沿垂直於方向A之平面上-延= =參照圖3)。因此，可防止緩衝裝置_沿垂直於方 二ΓΓ方向產生變形。例如，可防止棚架單元⑽沿 方向c之晃動（參照圖2及圖3) 不貫轭形態中，設 置有根斜交部件1G2。據此，可防止緩衝裝置100沿垂直 於方向C之平面之方向產生變形。例如，可防止棚架單元 120沿方向A之晃動（參照圖2及圖3)。 另，依據本實施形態，斜交部件1〇2及框架件iu各如圖 3所㈣置於㈣裝置剛之左側附近’框架件ιΐ2配置於 緩衝裝置_之右側附近。因此，與在緩衝裝置⑽右側配 置斜父部件H)2及框架件⑴之情形相比，可以縮短從棚架 皁-m上容器93之載置區域至緩衝裝置1〇〇右側之距離。 繼，’如旧虛線999所示之與緩衝裝置ι〇〇上容器％之相 鄰範圍内’可配置製造裝置等。 另’依據本實施形態，所右用於—〜 吓秀用於疋位之凸起126均固定 於框架件121及122上。而，囍由揸驭山t 猎由擰緊或旋開圖4中2個螺栓 ⑶’可以只將框架件⑵及122褒上或卸下框架件ιΐ3。因 此’沿軌道92方向（方向A)調整容器的之載置位置時，只 要將框架件12 1、1 22及125彼此if]々知壯丄， 二 做此固疋組裝成框架單元，使 前述框架單元之位置對準調整固定 β正因疋於框架件113上，就完 成了所有載置位置之位置對準。播化 .. 據此，與每個載置位置使 130220.doc •16- 200903694 用定位用之凸起對進^^班# 芍對準位置並固定之情形相比，定位 間单快速完成。另，_ g 士广加从！ 、 j r〇 一框木件121〜125固定於緩衝穿詈\/ 後需再對準位置之情形時’只要將由框架件⑵m ,125所組成之框架單元從框架件113上卻下，沿執㈣滑動 後再固定於框架件113上，就完成了所有載置位置之位置 對^因此’載置位置之再度調整等情形之作業可簡單快 速完成。U The ship has a rod-shaped member that extends linearly in a straight direction. The upper ends of the frame members (1) and 112 are fixed to the frame members 14 and are fixed to the frame member 113. The frame members 111 to 113 are as shown in Fig. 3, and the frame members 111 and 112 constitute the two main portions of the "匚" shape. The frame members 111 to 113 function as a Canamu wood fixing member for fixing the scaffolding portion to the rail. The frame members 111 and 112 are respectively placed in the direction c near the ends of the frame members 113 and 114. Accordingly, the frame members 111 and 112 enclose the scaffolding unit 120 toward the C, and the rails 92 and the traveling region of the transporting carriage 91 are sandwiched between the upper side and the lower side of the frame in the direction c. In addition, the frame of the 虿 fixing unit 110 J30220.doc 12 200903694 η 1 is disposed at the same position near the left end of the buffer device 1 如图 as shown in FIG. 3 . Moreover, the frame members 112 of all the fixing units 110 are disposed at the same position near the right end of the shock absorbing device 100 as shown in FIG. Each of the frame members 113 and 114 is linearly extended in the direction C. Therefore, each has a shape of a "匸" shape on a section perpendicular to the direction c. The frame member 113 is disposed such that the opening of the aforementioned "匸" cross section is downward. The frame member ι 4 is configured as the aforementioned "C:, the opening of the font section faces upward. The frame member 113 is fixed with the frame member 111 on the upper surface thereof. 112 and 121 to 124. Frame members 111 and 112 are fixed to the lower surface of the frame member 114. As shown in Fig. 1 to Fig. 3, the cushioning device 100 has two oblique members 1 and 2. Each of the oblique members 102 is as shown in Fig. 1 The arrangement shown in Fig. 3 is near the left end of the buffer device 1. The one end 10b of the oblique member 102 is fixed to one end of the frame member 114 in the direction of the outermost fixed unit 110 of the direction eight. The oblique member 1〇2 The other end 102b is fixed to one end of the frame member 113 in the adjacent fixed unit 110 of the fixing unit 11 fixed to the end i〇2a. According to this, any of the skew members 102 are located along the buffer device 100. The upper side of the direction c extends obliquely and is fixed to the two adjacent fixing units 11A. Hereinafter, the detailed structures of the frame members ill to 114 and the frame members pi to 125 will be described with reference to Figs. 4 and 5. Fig. 4 (a Is a cross-sectional view perpendicular to the longitudinal direction of the frame member 121. In addition, due to the frame members 121 to 12 4 has the same cross-sectional shape, and therefore the description of the structure other than the frame member 121 is omitted. The frame member 12 has a substantially square cross-sectional shape. The frame member 121 has holes 121 b to 121 d formed therein. 121 d is respectively opened on the left side surface, the lower side and the right side surface as shown in Fig. 4 (a) of the frame member 121. The aforementioned holes 21 b to 121 d are all extended along the length of the frame 130220.doc -13· 200903694 frame member (2) The frame member 121 is formed to be bilaterally symmetrical with respect to the cross-sectional shape. Fig. 4(b) is a lower cross-sectional view of the buffer device i 〇〇 along line IV_IV of Fig. 2. The frame members 12丨124 are fixed to the frame member by bolts 131. Above the ιΐ3, the bolt 131 passes through the upper plate u3a of the frame member 113 from the bottom to the top, and is fixed to the opening formed at the bottom of the frame members 121 to 124. Further, the frame member 123 is as shown in the left side of Fig. 4(b). Above, # is solidified by the screw inspection 133, and the material preventing plate (8) is penetrated from the left side of the material preventing plate 1G3 and fixed to the opening of the hole formed by the left side surface of the frame member 123. The frame member 124 is as shown in Fig. 4(b) On the right side surface of the middle, the drop preventing plate 3 is fixed by the bolt 133. The bolt 133 is dropped from the front side. The right side of the stop plate 1〇3 is penetrated and fixed to the opening of the hole formed by the right side surface of the frame member 124. Further, the frame members 121 and 122 are fixed with the frame member 125 by two screw inspections 132. 132 is formed from the opening formed on the left side surface of the frame member 121 to the right side opening, and is further fixed to the left end of the frame member 125. The other bolt) 132 passes through the opening formed by the right side surface of the frame member 122 to the left side opening' It is fixed to the right end of the frame member 125. Further, although the frame members U1 and 112 in Fig. 4(b) are not shown, these members are fixed to the upper surface of the frame member ι 3 by bolts, similarly to the frame members 121 to 124. Hereinafter, the fixing of the frame member 114 and the rail 92 will be described. The frame member 114 is fixed to the track by two bolts 141 as shown in Fig. 3. Fig. 5 is an enlarged view of the area surrounded by the dotted line of Fig. 3. Fig. 5t shows the section of the track % and the frame member Π4 The upper end of the frame member 112 is a screw 144. The screw 130220.doc • 14-200903694 144 is passed through the bottom plate n4a of the frame member 114 by two nuts 145. The frame member 112 is fixed by the screws 144 and the two nuts 145. The upper surface of the rail 92 is formed with an upwardly projecting convex portion 92a. A hole 92b is formed in the convex portion 92a, and the hole 92b is opened upwardly from the upper surface of the convex portion 92a to form an opening portion 92c. The longitudinal direction of the rail 92 (the direction from the front of the eye toward the inside thereof) extends linearly. The cross-sectional shape of the hole (4) is adjusted to accommodate the bolt head 1413 of the bolt 141, and the bolt body protrudes upward through the opening. The boss portion 14a is configured to receive the bolt head 14^ of the thread 141 in the hole 92b, and the bolt 141 can travel along the track %. The frame member 114 is supported by the bolt head 141 & the bolt contained in the hole 92b. The nut is fixed on the road 92. In addition, another screw in Fig. 3 The configuration of the plug 14/ is also the same as that shown in Fig. 5, and the description thereof is omitted. According to the present embodiment having the above configuration, the following effects can be obtained. The fixed single S11G and the scaffolding unit 12 are roughly as frame members iu~ (1) and 121 to 125, etc., which are mainly composed of rod-shaped members, and the fixing unit H0 and the frame member are arranged to be spaced apart from each other, and have a very good structure of gas as a whole. Therefore, it is possible to suppress the buffer device ι. At the same time as the overall weight, it does not hinder the composition of the airflow in the clean room. :::: Yes, the scaffolding unit 120 is mainly composed of frame members extending along the extending direction (direction A) of the obstruction 92.丨24. This Η λ, 叩 叩 amp 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些 些The obstruction can be suppressed. In addition, the scaffolding unit (which consists of a rod-shaped frame member) ensures that each penetration area is sufficient for 130220.doc •15·200903694, which can prevent the formation of the downward blowing airflow. Two buffers as described above The 100 is mainly composed of a rod-shaped frame member, and the mooncake may be worried about the form that is not required to ensure that the device is not deformed. The frame member (1) has a plane along the direction perpendicular to the direction A-- = (refer to Fig. 3). The damper device _ is deformed in a direction perpendicular to the square ridge. For example, it is possible to prevent the scaffold unit (10) from swaying in the direction c (see Figs. 2 and 3). In the yoke configuration, the root skew member 1G2 is provided. The deformation of the cushioning device 100 in a direction perpendicular to the plane of the direction C can be prevented. For example, the scaffolding unit 120 can be prevented from shaking in the direction A (refer to Figs. 2 and 3). Further, according to the present embodiment, each of the skew member 1〇2 and the frame member iu is placed near the left side of the device (4) as shown in Fig. 3 (4), and the frame member ι 2 is disposed near the right side of the cushioning device. Therefore, the distance from the mounting area of the container 93 on the scaffold soap-m to the right side of the cushioning device 1 can be shortened as compared with the case where the oblique member H) 2 and the frame member (1) are disposed on the right side of the cushioning device (10). Then, 'as shown by the old broken line 999, within the vicinity of the container on the buffer device ’', the configurable manufacturing device or the like. According to the present embodiment, the protrusions 126 for the right position are fixed to the frame members 121 and 122. However, by tightening or unscrewing the two bolts (3)' in Fig. 4, only the frame members (2) and 122 can be attached or removed from the frame member ιΐ3. Therefore, when the position of the container is adjusted in the direction of the track 92 (direction A), as long as the frame members 12 1 , 1 22 and 125 are mutually sturdy, the solid frame is assembled into a frame unit, so that the foregoing The positional alignment adjustment of the frame unit is positively caused by the frame member 113, and the alignment of all the placement positions is completed. Broadcasting.. According to this, the positioning order is completed quickly compared with the case where each mounting position is 130220.doc •16-200903694 with the positioning projections for positioning and fixing. In addition, _ g 士广加从! , jr〇 framed wood parts 121~125 are fixed in the case of buffering through// after re-alignment position. 'As long as the frame unit consisting of frame members (2)m, 125 is removed from the frame member 113, along the (4) After sliding and fixing to the frame member 113, the position of all the placement positions is completed, so that the work of re-adjusting the placement position can be completed simply and quickly.
另依據本實施形態，掉落防止板103設置於棚架單元 Ή康此，可防止棚架單元12〇上所載置之容器93從棚 架單兀120上跌落至下方。 …另，依據本實施形態，旋開螺母142，螺栓頭l41a留於 穴灿内沿軌道92移動，藉此可使框架件114沿執道92移動 (參照。圖5)。據此，可使固定單元110沿執道92移動，繼而 可簡單進行緩衝裝置100固定於執道92之位置對準。 [變形例] 以上為對本發明之較佳實施形態之說明，本發明並不局 限於前述之實施形態，在解決問題之技術手段巾所屬範圍 内可進行各種各樣變形。 例如，在前述實施形態中，固定單元丨1 〇固定於軌道％ 上，然而，固定單元Π0也可直接固定於天花板99上。 立另，在前述實施形態中，框架件U1〜114及121〜中一 :分具有棒狀形狀。然而，只要是具有各沿一方向以長型 延^之形狀’以彼此間隔之方式固定而構成緩衝褒置，則 亦可為其它形狀。例如，可為板形狀。 130220.doc 17 200903694 【圖式簡單說明】 圖1係本發明之一實施形悲緩衝骏置之側視圖及缓衝裝 置周邊圖。 圖2係圖1之緩衝裝置之立體圖。 圖3係圖1之緩衝裝置之正視圖 圖4(a)係構成圖卜圖3緩衝裝置之框架件垂直於長度方向 之縱斷面圖，圖4(b)係沿圖3中I v - I v線之缓衝裝置縱 斷面圖。Further, according to the present embodiment, the drop preventing plate 103 is provided to the scaffolding unit, and the container 93 placed on the scaffolding unit 12 can be prevented from falling from the scaffolding unit 120 to the lower side. Further, according to the present embodiment, the nut 142 is unscrewed, and the bolt head l41a is moved in the pocket to move along the rail 92, whereby the frame member 114 can be moved along the lane 92 (refer to Fig. 5). Accordingly, the fixing unit 110 can be moved along the lane 92, and then the positional alignment of the cushioning device 100 to the lane 92 can be simply performed. [Modifications] The above is a description of the preferred embodiments of the present invention, and the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the technical means for solving the problems. For example, in the foregoing embodiment, the fixing unit 丨1 〇 is fixed to the track %, however, the fixing unit Π0 may be directly fixed to the ceiling 99. Further, in the above embodiment, the frame members U1 to 114 and 121 to have a rod shape. However, other shapes may be employed as long as they have a shape in which each of the shapes in the one direction is fixed to each other to be spaced apart from each other. For example, it can be a plate shape. 130220.doc 17 200903694 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view of a sorrow buffer and a peripheral view of a buffer device. 2 is a perspective view of the cushioning device of FIG. 1. Figure 3 is a front view of the cushioning device of Figure 1. Figure 4 (a) is a longitudinal section of the frame member of the cushioning device of Figure 3, perpendicular to the length direction, Figure 4 (b) is along the I v - Figure 3 A longitudinal section view of the buffering device of the I v line.
圖5係圖3之點線所圍區域之放大圖。 【主要元件符號說明】 92 軌道 100 102 103 110 111-114 120 121 ， 122 123 ， 124 126 131-133 141 緩衝裝置 斜交部件 掉落防止板 固定單元 第3〜第6框架件 棚架單元 第1，第2框架件 第7，第8框架件 位置對準部件 螺栓 螺栓 144 螺絲 142，145 螺母 130220.doc -18·Figure 5 is an enlarged view of the area enclosed by the dotted line of Figure 3. [Description of main component symbols] 92 Track 100 102 103 110 111-114 120 121 , 122 123 , 124 126 131-133 141 Cushioning device oblique member drop prevention plate fixing unit 3rd to 6th frame member scaffolding unit 1 , 2nd frame member, 7th, 8th frame member alignment member bolt bolt 144 screw 142, 145 nut 130220.doc -18·