TWI434744B - Wire saw - Google Patents

Description

Wire saw

The present invention relates to a wire saw for cutting a workpiece formed of a material such as a semiconductor material, a magnetic material, a ceramic, or the like by a steel wire.

Conventionally, such a wire saw has been proposed to have a structure disclosed, for example, in Patent Document 1. This conventional structure includes a plurality of processing rollers wound with one of the steel wires for machining the workpiece, and a plurality of processing rollers that roll between the two bobbins and the steel wire. Each of the spools is disposed oppositely to a reciprocating device that reciprocates along the axial direction of the spool to guide the winding and feeding of the steel wire. Then, the slurry containing the particles is supplied to the steel wire between the processing rollers while the steel wire is reciprocating in a specific cycle. In this state, the workpiece is pressed against the steel wire to apply a cutting process to the workpiece.

Patent Document 1: Japanese Patent Publication No. 9-70745

However, in the wire saw, it is preferable to control the angle of the steel wire between the spool and the traverser with respect to the rotation axis of the spool to be 90 degrees. If the angle of the steel wire is an angle other than 90 degrees, the steel wire may not be properly taken up in the reel, and the coiled steel wire may cause a problem of the winding. Or excessive tension acts on the steel wire that is sent from the reel, and there is a rupture of the steel wire.

When the traveling direction of the steel wire is reversed, if the shifting table of the spool from the take-up side to the take-up side is displaced, the steel wire will be turned off when the reverse running of the steel wire starts. It is impossible to correctly send out and be guided from the spool, and there is a problem that the tension of the steel wire to be sent out is uneven. Especially when the steel wire When the traveling direction is reversed, the shifting table that is converted from the feeding side to the winding drum on the take-up side is liable to be displaced, and the problem of the winding of the steel wire is apparent.

In the apparatus of the above Patent Document 1, a pair of contact rollers are provided at a position where the steel wire is caught, and when the steel wire contacts the contact roller, the reciprocating speed of the shift table is corrected in accordance with the position of the steel wire. However, in the above-described structure, the steel wire and the contact roller are in contact for a plurality of times in a short time to cause chattering, and there is no possibility of tying up from this state. When it is in the above state, since the shifting table moves little by little, the correction of the reciprocating speed becomes difficult, and the elimination of the curling block or the like is hindered.

The present invention is directed to the problems of the above-mentioned prior art, and an object thereof is to provide a wire saw which can suppress the positional displacement of the shifting table when the traveling direction of the steel wire is reversed, and can be walked on the subsequent steel wire. At the beginning, the steel wire is prevented from being caused by curling or uneven tension.

In order to achieve the above object, the wire saw of the present invention includes a roller for a plurality of processing rolls in a state in which a steel wire for workpiece machining is placed, and a pair of spools for winding and feeding the steel wire. Reciprocally rotatable about the axis; and the shifting table reciprocally moving in a direction parallel to the axis of each spool, and accompanying the reciprocating movement to respectively guide the winding and feeding of the steel wires of the respective reels; The steel wire reciprocates along with the reciprocating rotation of the processing roller and the reel, and the workpiece is cut by a steel wire at a position between the processing rollers; the feature is: detecting: The mechanism detects the steel wire between each reel and each shifting table relative to each reel when the traveling direction of the steel wire is reversed The angle of the axis; and the control mechanism, when the angle of the steel wire detected by the detecting mechanism is 90 degrees, the angle of the steel wire is moved to at least one of the coils at a set angle of 90 degrees Corresponding to the shifting table.

Therefore, in the wire saw of the present invention, the processing roller and the reel are reciprocally rotated in a specific cycle, and when the traveling direction of the steel wire is reversed, the steel between the reel and the shifting table is detected by the detecting mechanism. The angle of the line relative to the axis of rotation of the spool. Then, when the detected steel wire angle is other than 90, that is, greater than 90 degrees, or less than 90 degrees, the control mechanism is used to move the steel wire angle to the set 90 degree to adjust the shifting table. To correct the position of the shift table. Thereby, it is possible to suppress the positional shift of the shift stage when the traveling direction of the steel wire is reversed. Therefore, it is possible to prevent the steel wire wound on the take-up side reel from being wound up at the start of the subsequent steel wire running, or the tension of the steel wire fed from the delivery side reel to be uneven.

The control mechanism can move the shifting table when the steel wire travels to stop.

The control mechanism can move the shifting table corresponding to the spool after the steel wire is sent out in the pair of spools.

The control mechanism moves the spool after the completion of the wire feeding and the shifting table corresponding to the spool after the winding is completed.

The processing roller and the shifting table may be provided with a tension roller for adjusting the tension of the steel wire; the detecting mechanism may be respectively disposed on the tension roller and the shifting table to detect the tension of the steel wire acting on the tension roller and the shifting table. The complex sensor is composed of a judging mechanism for judging the angle of the steel wire based on the detection signals from the sensors.

When the detection signal from the sensor shows the tension load equal to the advance When the specific value is set, the judging mechanism can judge that the angle of the steel wire is 90 degrees.

Hereinafter, an embodiment of the wire saw according to the present invention will be described with reference to the drawings.

As shown in Fig. 1, in the wire saw of this embodiment, one of the bobbins 12A and 12B wound around the workpiece processing steel wire 11 is spaced apart from each other and is rotatably supported around the axis. In the frame not shown. Each of the spools 12A and 12B is connected to a reel rotating motor 13A, 13B that can rotate in the forward and reverse directions. Then, the reels 12A, 12B are reciprocally rotated at specific time intervals by the reel rotating motors 13A, 13B, and the steel wire 11 is taken up in one of the reels 12A, 12B, and wound from the winding. The other of the cylinders 12B, 12A feeds the steel wire 11.

At a position between the two bobbins 12A, 12B, the frame of the jigs is slidably supported by a plurality of (in the embodiment) a plurality of processing rollers 14A, 14B. The outer peripheral surfaces of the two processing rollers 14A, 14B are formed with a plurality of annular grooves at a specific pitch, and are rolled between the annular grooves of the processing rollers 14A, 14B with the steel wire 11 interposed. Then, in the state in which the steel wire 11 is placed, the two processing rollers 14A and 14B are reciprocally rotated at the same time intervals as the spools 12A and 12B by a processing roller rotating motor (not shown). The steel wire 11 reciprocates along the rolling direction between the processing rollers 14A, 14B.

A saddle (not shown) is disposed above and below the steel wire 11 between the two processing rollers 14A and 14B, and the workpiece W is detachably attached to the support plate 15 while being attached thereto. Below the seat. Then, as described above, The steel wire 11 travels between the processing rollers 14A, 14B in the rolling direction, and supplies the slurry containing the fine particles to the steel wire 11. In this state, the workpiece W is pressed against the steel wire 11 by lowering the holder, and the workpiece W is subjected to a cutting process. Further, when the steel wire 11 is attached with fine particles such as diamond, it is not necessary to supply the slurry.

At the position near the respective spools 12A, 12B, traversers 16A, 16B are provided which are reciprocally movable in a direction parallel to the axis of each of the spools 12A, 12B. Each of the shifting stages 16A, 16B rotatably supports traverse rollers 17A, 17B for guiding the winding and unwinding of the steel wire 11 with respect to the spools 12A, 12B. Then, when the steel wire 11 is traveling, the shift tables 16A, 16B are reciprocated by the shift table moving motors 18A, 18B shown in Fig. 2, and by a ball screw or the like (not shown). The winding and feeding of the steel wire 11 with respect to the spools 12A, 12B are guided by the reciprocating rollers 17A, 17B.

Between each of the processing rollers 14A, 14B and each of the shifting stages 16A, 16B, each of the tension arms (or tension arms) 19A, 19B is swingably supported by the frame. A front end portion of each of the tension arms 19A, 19B rotatably supports a dancer roller (or a dancer roller, or a dancer roller) 20A, 20B for adjusting the tension of the steel wire 11. The base end portions of the tension arms 19A, 19B are connected to the tension arm turning motors 21A, 21B constituted by a servo motor (Servomotor) or the like for rotating the tension arms 19A, 19B to change the tension of the steel wire 11. Guide rollers 22A, 22B for guiding the steel wire 11 are rotatably disposed between the tension rollers 20A, 20B and the two processing rollers 14A, 14B at positions near the processing rollers 14A, 14B. .

The reciprocating rollers 17A, 17B are provided to detect the acting on the reciprocating roller The steel wires 11 of the wheels 17A, 17B are tension-loaded by the first sensors 23A, 23B. Each of the tension rollers 20A, 20B is provided with second sensors 24A, 24B for detecting the tensile load of the steel wire 11 acting on the tension rollers 20A, 20B. Then, when the steel wire 11 is in the running direction and the traveling direction of the steel wire 11 is reversed, the detection signals indicating the tensile load of the steel wire 11 are output from the first sensors 23A, 23B and the second sensors 24A, 24B. .

Next, the circuit configuration of the wire saw constructed as described above will be described.

As shown in FIG. 2, the control device 31 constitutes a control mechanism for controlling the overall operation of the wire saw. The detection signals from the first sensors 23A, 23B and the second sensors 24A, 24B are input to the control device 31. The control device 31 outputs a signal for causing the spool rotating motors 13A, 13B, the shift table moving motors 18A, 18B, and the tension arm turning motors 21A, 21B to be actuated or stopped.

Then, when the steel wire 11 is running and the control signal 31 is input from the first sensors 23A, 23B with respect to the detection signal of the tensile load of the steel wire 11 acting on the reciprocating rollers 17A, 17B, the control device 31 will according to the detection signal. The actuation signal is output to the shift table moving motors 18A, 18B to adjust the moving speed of the shift tables 16A, 16B. Further, when the steel wire 11 is traveling and the control signal 31 is input from the second sensors 24A, 24B with respect to the detection signal of the tensile load of the steel wire 11 acting on the tension rollers 20A, 20B, the control signal 31 will actuate the signal according to the signal. The tension arm rotating motors 21A, 21B are output to rotate the tension arms 19A, 19B to adjust the tension of the steel wire 11.

The control device 31 is provided with a determination unit 32 as a determination means. Then, when the traveling direction of the steel wire 11 is reversed, the determining unit 32 inputs the steel wire 11 from the first sensors 23A, 23B and the second sensors 24A, 24B at the time when the running of the steel wire is stopped. The tension signal is detected by the load. Then, based on the detection signals Further, as shown in Figs. 5(a) and (b), the angle ? of the steel wire 11 between the spools 12A, 12B and the reciprocating rollers 17A, 17B with respect to the rotation axes of the spools 12A, 12B is judged. That is, when the tension load value of the steel wire 11 from the first sensors 23A, 23B and the second sensors 24A, 24B is equal to a predetermined specific value, it is judged that the angle α is 90 degrees. Further, when the values of the first sensors 23A, 23B of the reciprocating rollers 17A, 17B are lower than the specific value, it is judged that the angle α is an acute angle, and if the second sensors 24A, 24B of the tension rollers 20A, 20B are When the value is lower than a specific value, it is judged that the angle α is an obtuse angle. In this embodiment, the first sensors 23A, 23B, the second sensors 24A, 24B, and the judging portion 32 are configured to detect the angle α between the rotation axis of the spools 12A, 12B and the steel wire 11. Detection mechanism.

Then, the control device 31 when the angle α of the detected steel wire 11 is other than 90, that is, an acute angle of less than 90 degrees as shown in FIG. 5(a), or as shown in FIG. 5(b) When the obtuse angle is more than 90 degrees as indicated by a broken line, the actuation signal is output to the shift stage moving motors 18A, 18B. By this output, when the running of the steel wire 11 is stopped, the adjustment shifting stages 16A, 16B are moved to make the angle α of the steel wire 11 as shown by the broken lines in Figs. 5(a) and (b). The position correction of the shift stages 16A, 16B is performed 90 degrees as set. In this case, when the traveling direction of the steel wire 11 is reversed, the shifting stages 16A and 16B of the spools 12A and 12B after the completion of the feeding from the feeding side to the winding side are likely to be displaced. In the embodiment, the movement control is performed mainly by the shift stages 16A and 16B of the spools 12A and 12B after the completion of the delivery.

Next, the wire saw configured as described above will mainly explain the action of the traveling control of the steel wire in accordance with the flowcharts of FIGS. 3 and 4.

When the wire saw is in operation, the control is performed by the control device 31. The operation of each step (hereinafter abbreviated as S) of the flowchart shown in FIG. 3 is followed. That is, when the wire saw is operated, the processing rollers 14A, 14B are rotated, and the spools 12A, 12B are rotated by the driving of the spool rotating motors 13A, 13B in S1. Then, in S2, by the driving of the shift table moving motors 18A, 18B, the shift tables 16A, 16B are reciprocated along the axis of the spools 12A, 12B to start the reciprocating operation. By these actions, the steel wire 11 is fed out from one of the spools 12A, 12B, and travels in the rolling direction between the processing rollers 14A, 14B and is taken up in the spool 12B, 12A. The other one. Then, the workpiece W is pressed against the steel wire 11 that is traveling between the processing rollers 14A, 14B, and the workpiece W is subjected to a cutting process.

In the next S3, the tension load of the steel wire 11 acting on the reciprocating rollers 17A, 17B is detected by the first sensors 23A, 23B, and it is judged whether or not the detected value is equal to a predetermined specific value. In this determination, if the detected value is not equal to the specific value, the shifting table moving motors 18A, 18B are operated and controlled in S4 to adjust the moving speed of the shifting stages 16A, 16B during the traveling of the steel wire.

Next, in S5, the steel wire 11 is caused to travel in a certain direction with a certain amount, and it is judged whether or not the traveling direction reversal time point of the steel wire 11 has been reached. In this determination, if the traveling direction reversal time point of the steel wire 11 is not reached, the process returns to the above S3, and the operations of S3 to S5 are repeated. On the other hand, when the traveling direction reversal time point of the steel wire 11 has been reached, the rotation of the spools 12A, 12B of the spool rotating motors 13A, 13B is stopped in S6, and the shifting table moving motor 18A is stopped. Movement of the shifting stages 16A, 16B of 18B. At the same time, the rotation of the processing rollers 14A, 14B is also stopped. Thereby, the walking of the steel wire 11 is stopped for a certain period of time.

The next S7 system detects the steel wire when the steel wire 11 is in the traveling stop state. 11 is at an angle a with respect to the axis of rotation of the spools 12A, 12B. When the angle α of the steel wire 11 is detected, as shown in the flow chart of Fig. 4, first, in S7a, the steel wires acting on the reciprocating rollers 17A, 17B are detected by the first sensors 23A, 23B. 11 tension load. Next, in S7b, the tension load of the steel wire 11 acting on the tension rollers 20A, 20B is detected by the second sensors 24A, 24B. Then, in S7c, based on the detection signals from the first sensors 23A, 23B and the second sensors 24A, 24B, as shown in Figs. 5(a) and (b), the steel wire 11 is judged relative to The angle a of the axis of rotation of the spools 12A, 12B.

Next, in S8 of Fig. 3, it is judged whether or not the angle ? of the detected steel wire 11 is 90 degrees. In this determination, if the angle α of the steel wire 11 is other than 90 degrees, that is, less than 90 degrees as shown in FIG. 5(a), or greater than 90 as shown by the broken line in FIG. 5(b) In the next step, in the next S9, the shift stages 16A, 16B are moved by the shift stage moving motors 18A, 18B. By this movement adjustment, the shift tables 16A, 16B are displaced from the position indicated by the solid line in Figs. 5 (a) and (b) to the position indicated by the broken line in the traveling stop state of the steel wire 11 to make The angle α of the steel wire 11 is corrected by the position of the shift tables 16A and 16B at the set 90 degrees.

Next, in S10, it is judged whether or not the processing of the workpiece W has ended. In the case where the processing is not completed, the spools 12A, 12B are rotated in the direction opposite to the above in the next S11 by the spool rotating motors 13A, 13B. At the same time, the processing rollers 14A, 14B are also rotated in the opposite direction to the above. Thereby, the steel wire 11 walks in a state where the traveling direction is reversed. Thereafter, the process returns to the above S2, and the operations of S2 to S11 are repeated. On the other hand, in the determination of the above S10, if the machining is completed, the running operation of the steel wire 11 is ended.

As such, according to this embodiment, the following effects can be obtained.

(1) The wire saw is reciprocally rotated with a specific cycle of the processing rollers 14A, 14B and the spools 12A, 12B, and when the traveling direction of the steel wire 11 is reversed, the spool 12A is detected by the detecting mechanism. The angle 11 between the steel wire 11 between the 12B and the shift tables 16A, 16B with respect to the axis of rotation of the spools 12A, 12B. Then, when the angle α of the detected steel wire 11 is other than 90, that is, greater than 90 degrees or less than 90 degrees, the angle α of the steel wire 11 is set to 90 degrees by the control device 31. The ground shift adjustment stages 16A, 16B are moved. Therefore, when the traveling direction of the steel wire 11 is reversed, the positional displacement of the shift tables 16A, 16B can be suppressed. Therefore, it is possible to prevent the steel wire 11 wound up on the take-up side reels 12A, 12B from being wound up at the start of the subsequent running of the steel wire 11, or the tension of the steel wire 11 sent from the delivery side reels 12B, 12A. Unevenness.

(2) In the wire saw, the control device 31 corrects the angle α of the steel wire 11 to 90 degrees as set when the running direction of the steel wire 11 is stopped when the running direction of the steel wire 11 is reversed. The position of the shift tables 16A, 16B. Therefore, at the start of the subsequent travel of the steel wire 11, the winding and the feeding of the steel wire 11 with respect to the spools 12A, 12B can be quickly started by the shifting stages 16A, 16B in which the positional displacement has not occurred. . Thereby, the tension of the steel wire 11 can be kept constant to perform processing with high precision.

(3) In the wire saw, the control device 31 moves the shift tables 16A, 16B on the spools 12A, 12B side after the end of the feed. Therefore, when the traveling direction of the steel wire 11 is reversed, the shifting stages 16A, 16B of the spools 12A, 12B after the end of the delivery from the delivery side to the winding side are likely to be displaced, and the position can be appropriately adjusted. The positional shift of the shift stages 16A, 16B is corrected. Thus, in the subsequent steel wire When the walking starts, the steel wire 11 is effectively prevented from being generated by the winding.

(4) In the wire saw, the detecting mechanism detects the tension load of the steel wire 11 acting on the tension rollers 20A, 20B and the shifting tables 16A, 16B by the tension rollers 20A, 20B and the shifting tables 16A, 16B, respectively. The sensors 24A, 24B, 23A, and 23B are configured by a judging unit 32 that judges the angle α of the steel wire 11 based on the detection signals from the sensors 24A, 24B, 23A, and 23B. Therefore, when the traveling direction of the steel wire 11 is reversed, the tensile load of the steel wire 11 acting on the tension rollers 20A, 20B and the shifting tables 16A, 16B can be directly detected by the sensors 24A, 24B, 23A, 23B. And correctly detecting the angle α of the steel wire 11 based on the detection results.

(variation)

Further, this embodiment can be modified as described below.

In this embodiment, although the moving speed of the shifting stages 16A, 16B in which the steel wire 11 is traveling is adjusted according to the detection signals of the first sensors 23A, 23B, it may be omitted and controlled by a program. .

It is also possible to move the predetermined distance by shifting the movement adjustment of the shift stages 16A, 16B when the steel wire 11 is reversed.

In this embodiment, the detecting means for detecting the angle ? of the steel wire 11 can be changed to, for example, a mechanism for optically detecting the steel wire 11.

In this embodiment, a pair of guide rollers are provided for guiding the steel wire 11, but the present invention can also be embodied in a wire saw provided with two or more guide rollers.

The control performed by the control mechanism of the present invention is executed only for the shift stages 16A, 16B at the end of the delivery. That is, when the steel wire 11 is fed out, the angle of the steel wire 11 is based on the feeding start point on the spools 12A, 12B and the shifting table 16A, 16B. It is determined by the position, so it is easy to become an angle other than 90 degrees. On the other hand, when the steel wire 11 is taken up, since the steel wire 11 is wound around the spools 12A and 12B only in accordance with the reciprocation of the shift tables 16A and 16B, the steel wire angle is maintained at 90 degrees. Thus, it is possible to control the shift stages 16A, 16B at the end of the delivery.

11‧‧‧Steel wire

12A, 12B‧‧‧ spool

13A, 13B‧‧‧Roller motor for reel

14A, 14B‧‧‧Processing rollers

15‧‧‧Support board

16A, 16B‧‧‧ shifting table

17A, 17B‧‧‧ reciprocating roller

18A, 18B‧‧‧Shifting table moving motor

19A, 19B‧‧‧ Tension (adjustment) arm

20A, 20B‧‧‧Tension (adjustment) roller

21A, 21B‧‧‧Tension arm rotation motor

22A, 22B‧‧‧ Guide roller

23A, 23B‧‧‧1st sensor that constitutes the detection mechanism

24A, 24B‧‧‧2nd sensor that constitutes the detection mechanism

31‧‧‧Control devices that constitute the control mechanism

32‧‧‧The judging unit that constitutes the testing agency and serves as the judging body

W‧‧‧Workpiece

‧‧‧‧ angle

S‧‧‧ steps

Fig. 1 is a schematic block diagram showing a wire saw of an embodiment.

2 is a block diagram showing the circuit structure of the wire saw of FIG. 1.

Figure 3 is a flow chart showing the related actions of the steel wire in the same wire saw.

Fig. 4 is a flow chart showing the details of the steel wire angle detecting operation in the flow chart of Fig. 3.

5(a) and 5(b) are structural diagrams showing the position adjustment operation of the shift table.

11‧‧‧Steel wire

12A, 12B‧‧‧ spool

13A, 13B‧‧‧Roller motor for reel

14A, 14B‧‧‧Processing rollers

15‧‧‧Support board

16A, 16B‧‧‧ shifting table

17A, 17B‧‧‧ reciprocating roller

19A, 19B‧‧‧ Tension (adjustment) arm

20A, 20B‧‧‧Tension (adjustment) roller

21A, 21B‧‧‧Tension arm rotation motor

22A, 22B‧‧‧ Guide roller

23A, 23B‧‧‧1st sensor that constitutes the detection mechanism

24A, 24B‧‧‧2nd sensor that constitutes the detection mechanism

W‧‧‧Workpiece

Claims (6)

A wire saw comprising: a plurality of processing rollers rolled in a state in which a steel wire for processing a workpiece is placed; and a pair of spools are respectively wound around the winding wire for winding and feeding the steel wire The axis of the cylinder reciprocally rotates; and the shifting table reciprocates along a direction parallel to the axis of each spool, and along with the reciprocating movement, respectively guides the winding and feeding of the steel wires; wherein the steel wire will follow The rolling of the processing roller and the reciprocating rotation of the spool are reciprocated, and at a position between the processing rollers, the workpiece is subjected to a cutting process by a steel wire; and the wire saw is provided with : a detecting mechanism, when the traveling direction of the steel wire is reversed, detecting an angle of a steel wire between each of the spools and each of the shifting stages with respect to an axis of each of the spools; and a control mechanism when the detecting mechanism detects When the angle of the steel wire is 90 degrees or more, the corresponding shifting table of at least one of the reels is moved so that the angle of the steel wire is set to 90 degrees. A wire saw according to claim 1, wherein the control mechanism moves the shifting table when the steel wire travels to stop. A wire saw according to claim 1 or 2, wherein the control mechanism moves the shifting table corresponding to a spool of the wire after the end of the wire feeding in the pair of spools. For example, in the wire saw of claim 1 or 2, wherein the control mechanism will respectively send a wire bobbin after the steel wire is sent out and a winding wire after the winding of the steel wire is completed. The shifting table corresponding to the cylinder moves. The wire saw according to claim 1 or 2, wherein the processing roller and the shifting table are provided with a tension roller for adjusting the tension of the steel wire; the detecting mechanism is respectively disposed on the tension roller and the shifting The platform detects a complex sensor that acts on the tension of the steel wire tension of the tension roller and the shifting table, and a judging mechanism that judges the angle of the steel wire based on the detection signals from the sensors. The wire saw of claim 5, wherein the judging mechanism judges that the angle of the steel wire is 90 degrees when the tension load indicated by the detection signal from the sensor is equal to a predetermined specific value.