JP5250376B2 - Wire winding device and wire saw - Google Patents

Description

  The present invention relates to a wire winding device applied to a wire saw or the like and a wire saw equipped with the wire winding device.

  Conventionally, a wire saw is known as means for cutting a workpiece such as a semiconductor ingot into slices (for example, Patent Document 1). The wire saw is stretched in a state where a large number of wires are arranged by winding a cutting wire between a plurality of guide rollers, and the wire saw is orthogonal to the axial direction of the wire while moving the wire at a high speed in the axial direction. By cutting and feeding the workpieces in the direction, the workpieces are configured to be cut out at the same time in a slice shape.

  Both ends of the wire are wound around the reel of the wire feeding / winding device, respectively, while the wire is fed from the reel of the one side winding / winding device and the other side of the wire is fed via the guide roller By switching the wire take-up winding state of each device between a state of winding by the reel of the winding device and a state opposite thereto, the operation is performed while switching the traveling direction of the wire.

In addition, a traverser (traverse device) is incorporated in the wire feeding / winding device, and the wire is wound evenly in a state of being aligned in the axial direction with respect to the reel, thereby preventing the occurrence of wire bending or the like. The next wire feeding can be performed smoothly.
Japanese Patent Laid-Open No. 11-42547

  The traverser generally has a guide pulley that guides the wire to the reel, and is configured to change the winding position of the wire by the reel by reciprocating the guide pulley in the axial direction of the reel. When the guide pulley rotates around an axis orthogonal to the axis of the reel as in Patent Document 1, there are the following problems.

  That is, when the wire guide surface (inner bottom surface of the groove) of the guide pulley is worn by contact with the wire, the position of the wire guided by the guide pulley is shifted in the axial direction of the reel. In such a case, the wire is wound in an eccentric manner from the reel's original winding area toward one end in the axial direction. For example, the wire is wound in a state where the wire is in contact with the flange portion of the reel end. It may be caused by disconnection or drowning. Therefore, it is desirable to improve this point.

  The present invention has been made in view of the above-described circumstances, and an object of the present invention is to enable a wire to be appropriately wound on a predetermined winding area of a reel in the long term.

In order to solve the above problems, the present invention provides a reel for winding a wire, a guide pulley that is rotatably supported about an axis orthogonal to the axial direction thereof, and guides the wire wound around the reel. And winding the wire in a state in which the wire is aligned in the axial direction by reciprocally moving the guide pulley relative to the reel in the axial direction during winding of the wire by the reel. In the apparatus, including a support member that supports the guide pulley, and together with the support member, driving means for moving the guide pulley relative to the reel in the axial direction, and controlling the driving means, and control means for relatively reciprocating the guide pulley within which the wire to a predetermined winding area of the reel is set to be wound, the support Assembled to a detection means for detecting the axial position of the wire relative to the guide pulley in the process leading to the reel from the guide pulley, based on the deviation between the detected position of the wire by the detecting means and the reference position Correction means for obtaining a correction value of the movement range of the guide pulley so that the wire is wound in the winding area, and the control means is based on the correction value during winding of the wire by the reel. The relative movement range of the guide pulley is changed.

  In this wire winding device, the guide pulley that guides the wire to the reel rotates about an axis orthogonal to the axial direction of the reel. As described above, the position of the wire with respect to the guide pulley is detected, and this detection is performed. Since the movement range of the guide pulley is changed (corrected) so that the wire is wound in a predetermined winding area based on the deviation between the position and the reference position, the wire guide surface of the guide pulley is temporarily worn. Even when the position of the wire with respect to the guide pulley is deviated, the movement range of the guide pulley is changed according to the deviation, so that the wire is properly wound in a predetermined winding area of the reel.

In particular, by pre-Symbol detector is assembled to the support member, it becomes possible to detect the position of the wire relative to the guide pulley accurately.

  In this wire winding device, if the control means controls the drive means so as to reciprocate the guide pulley by a predetermined stroke, the correction means moves the guide pulley while maintaining the predetermined stroke. It is preferable that the correction value is obtained so that the range is shifted in the axial direction of the reel.

  For example, when correcting the movement range of the guide pulley, only the position on one end side of the movement range may be changed. However, as described above, the movement range is shifted in the axial direction of the reel while maintaining a predetermined stroke. By doing so, it is possible to prevent the wire from being biased toward a specific portion of the reel and to wind the wire more evenly within a predetermined winding area.

  On the other hand, the wire saw according to the present invention is a wire saw in which a cutting wire fed from a reel of a wire feeding device is wound around a plurality of guide rollers and wound around the reel of the wire winding device. As mentioned above, a wire winding device as described above is provided.

  According to such a wire saw, it becomes possible to prevent troubles such as defective winding and disconnection of the cutting wire due to wear of the guide pulley incorporated in the wire winding device. It becomes possible to drive stably.

  According to the present invention, in a wire winding device such as a wire saw, the wire guide surface of the guide pulley can be wound while being wound on the reel while guiding the wire by the guide pulley rotating around the axis orthogonal to the axial direction of the reel. The wire can be properly wound in the long term without being affected by wear.

  A preferred embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 schematically shows an embodiment of a wire saw according to the present invention (a wire saw to which a wire winding device according to the present invention is applied).

  The wire saw shown in this figure includes a pair of wire feeding / winding devices 10A and 10B, guide pulleys 14A and 14B, guide pulleys 16A and 16B, wire tension adjusting devices 18A and 18B, guide pulleys 22A and 22B, and four guide rollers. 24A, 24B, 26A, 26B are provided.

  The guide rollers 24A and 24B are arranged at the same height position, and the guide rollers 26A and 26B are arranged at positions below the guide rollers 24A and 24B, respectively, so that the guide roller 26A is rotationally driven by the drive motor 25. It has become.

  Each of the wire feeding / winding devices 10A and 10B includes reels 9A and 9B around which a wire W for cutting is wound, reel drive motors 11A and 11B for rotating the wires, and a state in which the wires W are aligned with the reels 9A and 9B. And traversers 12A and 12B for even winding. The wire W fed from the reel 9A in one wire feeding / winding device 10A is hung in the order of the guide pulley 40 of the traverser 12A, the guide pulleys 14A and 16A, the pulley 20A of the wire tension adjusting device 18A, and the guide pulley 22A. Further, the guide pulleys 24A, 24B, 26B, 26A are inserted into guide grooves (not shown) on the outer circumferential surfaces of the guide rollers 24A, 24B, 26B, 26A, and are wound (wound) around the guide rollers a number of times in a spiral manner. 22B, the pulley 20B of the wire tension adjusting device 18B, and the guide pulleys 16B and 14B are wound in this order, and are wound around the reel 9B while being guided by the guide pulley 40 described later on the traverser 12B of the other wire feeding / winding device 10B. The wires are adjusted by the wire tension adjusting devices 18A and 18B. Appropriate tension is given to. Then, the rotation driving direction of the guide roller 26A by the drive motor 25 and the rotation driving direction of the reels 9A and 9B by the reel driving motors 11A and 11B are switched between forward and reverse, whereby the wire W is fed out from the reel 9A and reels. The state can be switched between a state where the wire W is wound around 9B and a state where the wire W is unwound from the reel 9B and wound around the reel 9A.

  That is, in this wire saw, a number of wires W are stretched in parallel with each other between the guide rollers 24A and 24B to form a wire group, and the wire group is driven to reciprocate in the wire axis direction. It has become.

  Above the wire W stretched between the guide rollers 24A and 24B, a work feeding device 30 for moving a cylindrical work (for example, a semiconductor ingot) 28 is provided. The workpiece feeding device 30 includes a workpiece holding unit 32 and a workpiece feeding motor 34.

  The workpiece holding unit 32 holds the workpiece 28 in a direction in which the axial direction of the workpiece and the wire arrangement direction coincide with each other. The workpiece feeding motor 34 is combined with the workpiece holding unit 32 by a combination with a ball screw (not shown). The work 28 is moved up and down (cutting feed) integrally.

  Above the wire W stretched between the guide rollers 24A and 24B, abrasive grain supply devices 36A and 36B are provided at positions on the left and right sides of the work 28. These abrasive grain supply devices 36 </ b> A and 36 </ b> B simultaneously supply a processing liquid (slurry) in which processing abrasive grains are mixed to each wire W that is driven at high speed, and adhere to the surface of the wire W.

  That is, in this wire saw, a large number of wires W stretched between the guide rollers 24A and 24B are simultaneously driven in the longitudinal direction at a high speed, and slurry is supplied to these wires W from the abrasive grain supply devices 36A and 36B. By cutting and feeding the workpiece 28 downward with respect to the wire W, a large number of wafers (thin pieces) are cut out simultaneously from the workpiece 28.

  Next, the configuration of the wire feeding / winding devices 10A and 10B, mainly the configuration of the traversers 12A and 12B and the control system thereof will be described with reference to FIG. Since the configuration of each wire feeding / winding device 10A, 10B is common, the configuration of one wire feeding / winding device 10A will be described here.

  As shown in FIG. 2, the traverser 12A of the wire feeding / winding device 10A includes a guide pulley 40 that guides the wire W wound around the reel 9A, and a direction parallel to the axial direction of the reel 9A. The guide pulley 40 is reciprocated in the axial direction (vertical direction) of the reel 9A while guiding the wire W by the guide pulley 40, whereby the reel 9A has a predetermined mechanism. It is configured so that the wires W are evenly wound in an aligned state in the winding area.

  The drive mechanism comprises a so-called screw feed mechanism, and is specifically configured as follows. That is, a frame 48 of the traverser 12A is fixed to a wire saw column (not shown) that supports the reel 9A, and a drive shaft 46 that extends parallel to the axial direction of the reel 9A is supported by the frame 48. The drive shaft 46 is supported in a state in which the drive shaft 46 can move in the axial direction and is prevented from rotating. A pulley mounting bracket 44 (corresponding to a support member of the present invention) is fixed to the tip of the drive shaft 46, and the bracket 44 is fixed in a direction (horizontal direction) perpendicular to the axial direction of the reel 9A. An extending support shaft 42 is fixed, and the guide pulley 40 is rotatably mounted on the support shaft 42. A screw shaft 50 parallel to the drive shaft 46 is rotatably supported on the frame 48, and a nut member 52 fixed to the drive shaft 46 is screwed to the screw shaft 50, and further the frame A traverse motor 54 fixed to 48 is connected to one end of the screw shaft 50. With this configuration, the guide pulley 40 is rotatably supported at the tip portion of the drive shaft 46, and the guide pulley 40 is moved up and down integrally with the drive shaft 46 by driving the traverse motor 54.

  Then, the wire W is stretched over the guide pulley 40 from the lower side while being fitted in the groove of the guide pulley 40 and is drawn out in the tangential direction of the guide pulley 40 and wound around the reel 9A.

  The bracket 44 is further assembled with a CCD linear sensor 56 (hereinafter referred to as a linear sensor 56; corresponding to the detection means of the present invention). Although not shown in detail, the linear sensor 56 is fixed to the bracket 44 so that the image pickup elements are aligned in the vertical direction, that is, in parallel with the axial direction of the reel 9A. The wire W from 40 to the reel 9 </ b> A is imaged and the image signal is output to the controller 60 described later.

  The wire saw is provided with a controller 60 for comprehensively controlling the drive. The controller 60 includes a deviation calculation means 61, a reverse position correction means 62, a motor control means 63, and the like as a control system for the traversers 12A and 12B.

  The deviation calculating means 61 detects the position of the wire W in the vertical direction with respect to the guide pulley 40 by recognizing (detecting) the wire W based on the image signal output from the linear sensor 56, and is stored in advance as the detected position. In other words, the wear amount of the wire guide surface 40a of the guide pulley 40 is calculated. That is, as shown by a two-dot chain line in FIG. 3, when the wire guide surface 40a of the guide pulley 40 is worn due to contact with the wire W and the position thereof is shifted in the radial direction, the position of the wire W is shifted upward by that amount. It will be. The deviation calculating means 61 stores an initial value (for example, a position immediately after operation) of the wire W traveling from the guide pulley 40 to the reel 9A as the reference position (initial value). The deviation δ is calculated by comparing the position.

  The reverse position correction means 62 corrects the movement range of the guide pulley 40 when the deviation δ reaches the set value A, in other words, corrects the drive switching position of the traverse motor 54. That is, the reciprocating range of the guide pulley 40 is set in advance so that the wire W is wound around a predetermined winding area of the reel 9A. However, as shown in FIG. When the position of is shifted upward, the actual wire winding range (shown by a two-dot chain line) is shifted upward by the amount of the shift with respect to the original winding area indicated by hatching in FIG. The reverse position correction means 62 corrects the movement range of the guide pulley 40 so that the actual winding range of the wire W coincides with the predetermined winding area, that is, a correction value for the drive switching position of the traverse motor 54. It is to calculate. Specifically, the correction value of the drive switching position of the traverse motor 54 is calculated so that the movement range of the guide pulley 40 is shifted downward by the set value A while maintaining the movement stroke of the guide pulley 40 during reciprocation. To do.

  The motor control means 63 controls the drive of the traverse motor 54 based on the output from the encoder 45a built in the traverse motor 54. When the correction value is calculated by the reverse position correction means, the correction is performed. Based on the value, the driving of the traverse motor 54 is controlled.

  In this embodiment, in the functional configuration of the controller 60, the motor control means 63 functions as the control means of the present invention, and the deviation calculation means 61 and the reverse position correction means 62 function as the correction means of the present invention.

  Next, the control of the traverser 12A by the controller 60 when the wire W is wound by the wire feeding / winding device 10A will be described with reference to the flowchart of FIG.

  When winding of the wire W by the wire feeding / winding device 10A is started by driving the reel drive motor 11A, the traverse motor 54 is driven in synchronism with this, for example, the guide pulley 40 is moved from the lower end side to the upper end of the reel 9A. Start moving at a constant speed to the side. As a result, the wire 9 is wound in a state in which the wire W is aligned in the axial direction with respect to the reel 9A.

  When winding of the wire W is started, a deviation δ between the position of the wire W and its reference position is calculated by the deviation calculating means 61 based on the image signal output from the linear sensor 56 (step S1), and further reversed. The position correction means 62 determines whether or not the deviation δ has reached the set value A (step S3). If YES is determined here, the reverse position correction means 62 corrects the drive switching position of the traverse motor 54 (step S5), and the position of the wire W detected in step S1 is updated and set as the reference position. (Step S7). If NO is determined in step S3, the process proceeds to step S9.

  Next, based on the output from the encoder 45a, it is determined whether or not the guide pulley 40 has reached the drive switching position (step S9). If NO is determined here, the process returns to step S1. On the other hand, when it is determined that the guide pulley 40 has reached the drive switching position (YES in step S9), the traverse motor 54 is driven reversely to switch the moving direction of the guide pulley 40 (step S11). . In step S13, it is determined whether or not a predetermined length of wire W has been wound on the reel 9A. If NO is determined here, the process proceeds to step S1. If it is finally determined YES in step S13, the flowchart is ended.

  Here, the configuration of the traverser 12A on one side of the wire feeding / winding devices 10A, 10B has been described, but the traverser 12B on the other side has the same configuration.

  In the traverser 12A of the wire feeding / winding device 10A (10B) described above, the wire W is wound around the reel 9A while being guided by the guide pulley 40 that rotates about an axis orthogonal to the axial direction of the reel 9A. As described above, the position of the wire W from the guide pulley 40 to the reel 9A is detected by the linear sensor 56, and the drive switching position of the traverse motor 54 is corrected based on the deviation δ between the detected position and the reference position. Since the moving range of the guide pulley 40 is corrected so that the wire W can be wound around the predetermined winding area, even if the wire guide surface 40a of the guide pulley 40 is worn, the reel It becomes possible to appropriately wind the wire W in the predetermined winding area of 9A.

  In particular, when the drive switching position of the traverse motor 54 is corrected, the detected position of the wire W at that time is stored as a new reference position (step S7 in FIG. 4). Even when the wire guide surface 40a is worn, the wire W can be appropriately wound around the predetermined winding area of the reel 9A in the same manner. Accordingly, the winding of the wire W by the reel 9A can be appropriately performed in the long term.

  In this wire saw, the CCD linear sensor 56 is applied as means for detecting the position of the wire W. However, the detection means is not limited to the CCD linear sensor, and other non-contact type sensors are applied. Then, the position of the wire W may be detected. In addition to the non-contact type detection means, a contact type may be applied. For example, a touch roller incorporating a load cell may be assembled to the bracket 44 as the detection means, and the position of the wire W may be detected according to the strain of the load cell caused by the contact between the touch roller and the wire W. .

  In addition, this wire saw is configured to wind the wire W in an aligned state within a predetermined winding area of the reel 9A by reciprocating the guide pulley 40 in the axial direction with respect to the reel 9A. Of course, the reel 9A side of the guide pulley 40 may be reciprocated in the axial direction. In the case of this configuration, in the process of step S5 in FIG. 4, the drive switching position in the reciprocating direction of the reel 9A may be corrected.

It is the schematic which shows the whole structure of the wire saw which concerns on this invention (The wire saw to which the wire winding apparatus which concerns on this invention is applied). It is the schematic which shows the specific structure of a wire winding apparatus. It is the schematic explaining the relationship between abrasion of the wire guide surface in a guide pulley, and the shift | offset | difference of the wire winding position in a reel. It is a flowchart which shows an example of the drive control of the wire feeding and winding apparatus (mainly traverser) by a controller.

Explanation of symbols

9A, 9B Reel 10A, 10B Wire feeding / winding device 40 Guide pulley 54 Traverse motor 60 Controller 61 Deviation calculation means 62 Reverse position correction means 63 Motor control means

Claims (3)

A reel for winding the wire, and a guide pulley that is supported rotatably around an axis orthogonal to the axial direction of the reel and guides the wire wound around the reel. In a wire winding device for winding the wire in a state in which the wire is aligned in the axial direction by reciprocating the guide pulley relative to the reel in the axial direction,
Said guide includes a support member for supporting the pulley, and drive means for relatively moving the guide pulley in the axial direction with respect to the reel together with the support member,
By controlling this driving means, a control means for relatively reciprocating the guide pulley within a range set so that the wire is wound in a predetermined winding area of the reel;
Detecting means that is assembled to the support member and detects the axial position of the wire with respect to the guide pulley in the process from the guide pulley to the reel;
Correction means for obtaining a correction value of the moving range of the guide pulley so that the wire is wound in the winding area based on a deviation between the detection position of the wire by the detection means and its reference position;
The said control means changes the relative movement range of the said guide pulley based on the said correction value during the wire winding by the said reel, The wire winding apparatus characterized by the above-mentioned. In the wire winding device according to claim 1,
The control means controls the driving means so as to reciprocate the guide pulley by a predetermined stroke, and the correction means determines the movement range of the guide pulley while maintaining the predetermined stroke. wire winding apparatus according to claim Rukoto seek the correction value to shift in the direction. In a wire saw in which a cutting wire fed out from a reel of a wire feeding device is wound around a plurality of guide rollers and wound around a reel of a wire winding device,
A wire saw comprising the wire winding device according to claim 1 or 2 as the wire winding device.

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