TWI429111B - Method for manufacturing led package - Google Patents

Method for manufacturing led package Download PDF

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Publication number
TWI429111B
TWI429111B TW100132175A TW100132175A TWI429111B TW I429111 B TWI429111 B TW I429111B TW 100132175 A TW100132175 A TW 100132175A TW 100132175 A TW100132175 A TW 100132175A TW I429111 B TWI429111 B TW I429111B
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layer
substrate
emitting diode
light emitting
wafer
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TW100132175A
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Chinese (zh)
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TW201310718A (en
Inventor
Hsing Fen Lo
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Advanced Optoelectronic Tech
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/95001Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips involving a temporary auxiliary member not forming part of the bonding apparatus, e.g. removable or sacrificial coating, film or substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/9512Aligning the plurality of semiconductor or solid-state bodies
    • H01L2224/95136Aligning the plurality of semiconductor or solid-state bodies involving guiding structures, e.g. shape matching, spacers or supporting members
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Led Device Packages (AREA)
  • Led Devices (AREA)

Description

發光二極體封裝結構的製造方法 Method for manufacturing light emitting diode package structure

本發明涉及一種半導體發光元件的製造方法,特別涉及一種發光二極體封裝結構的製造方法。 The present invention relates to a method of fabricating a semiconductor light emitting device, and more particularly to a method of fabricating a light emitting diode package structure.

一般的發光元件例如發光二極體封裝結構都需要經複數製造步驟後形成單個顆粒,再應用到各個領域,例如顯示、照明等。 A general light-emitting element such as a light-emitting diode package structure needs to form a single particle after a plurality of manufacturing steps, and then applied to various fields such as display, illumination, and the like.

發光二極體封裝結構的製造過程通常都包括磊晶、切割、封裝等工藝流程。在封裝階段,通常先在一個基板的表面上設置固晶膠,再將發光二極體晶粒逐個固著於上述固晶膠上。批量封裝發光二極體時,必須重複上述步驟再接著進行後續其他工藝流程。 The manufacturing process of the LED package structure usually includes processes such as epitaxy, cutting, and packaging. In the packaging stage, a solid crystal glue is usually disposed on the surface of a substrate, and the light-emitting diode grains are fixed to the above-mentioned solid crystal glue one by one. When the LEDs are packaged in batches, the above steps must be repeated and then followed by other processes.

上述封裝過程中,需要重複實施形成固晶膠及固定發光二極體晶粒的步驟,造成封裝的時間冗長而降低效率。因此,如何提供一種更加高效的發光二極體封裝結構的製造方法仍是業界需要解決的一個課題。 In the above packaging process, the steps of forming a solid crystal glue and fixing the light-emitting diode die are repeated, resulting in a long package time and reduced efficiency. Therefore, how to provide a more efficient manufacturing method of the LED package structure is still a problem to be solved in the industry.

有鑒於此,有必要提供一種更加高效的發光二極體封裝結構的製造方法。 In view of the above, it is necessary to provide a more efficient method of fabricating a light emitting diode package structure.

一種發光二極體封裝結構的製造方法,包括以下步驟:提供一晶圓層及一具有撓性的第一基板,所述第一基板一側設置 有一玻璃層,將所述晶圓層的一側表面貼設在所述玻璃層上;於所述晶圓層背向玻璃層的一側表面上形成複數間隔的圖形化金屬層;切割所述晶圓層及玻璃層,從而形成複數發光二極體晶粒;拉伸所述第一基板,使得所述發光二極體晶粒相互分離;提供一側表面形成有電路結構的一第二基板,使晶粒的金屬層與第二基板的電路結構電性連接並使晶粒固定於第二基板一側;移除所述第一基板,形成複數發光二極體粗胚;封裝所述粗胚,使第二基板一側形成一完全覆蓋所述晶粒的封裝層。 A manufacturing method of a light emitting diode package structure, comprising the steps of: providing a wafer layer and a flexible first substrate, wherein the first substrate side is disposed a glass layer, a side surface of the wafer layer is pasted on the glass layer; a plurality of patterned metal layers are formed on a surface of the wafer layer facing away from the glass layer; a wafer layer and a glass layer to form a plurality of light emitting diode crystal grains; stretching the first substrate to separate the light emitting diode crystal grains from each other; and providing a second substrate having a circuit structure formed on one side surface thereof And electrically connecting the metal layer of the die to the circuit structure of the second substrate and fixing the die to the side of the second substrate; removing the first substrate to form a plurality of light-emitting diode blanks; and packaging the coarse The embryo is such that one side of the second substrate forms an encapsulation layer that completely covers the die.

與習知技術相比,本發明利用具有撓性的第一基板同時固定複數晶粒,以協助這些晶粒同時與第二基板的電路結構導電連接,簡化了工藝流程,提升了製造效率。 Compared with the prior art, the present invention utilizes a flexible first substrate to simultaneously fix a plurality of crystal grains to assist the conductive connection of the crystal grains to the circuit structure of the second substrate at the same time, which simplifies the process flow and improves the manufacturing efficiency.

10‧‧‧襯底 10‧‧‧Substrate

11‧‧‧晶圓層 11‧‧‧ Wafer layer

12‧‧‧發光二極體晶粒 12‧‧‧Light-emitting diode grains

20‧‧‧第一基板 20‧‧‧First substrate

21‧‧‧玻璃層 21‧‧‧ glass layer

30‧‧‧金屬層 30‧‧‧metal layer

40‧‧‧第二基板 40‧‧‧second substrate

41‧‧‧電路結構 41‧‧‧ Circuit structure

50‧‧‧封裝層 50‧‧‧Encapsulation layer

60、60a、60b、60c‧‧‧螢光粉層 60, 60a, 60b, 60c‧‧‧ fluorescent powder layer

212‧‧‧玻璃體 212‧‧‧Glass

圖1為本發明一實施例的發光二極體製造方法的工藝流程圖。 1 is a process flow diagram of a method of fabricating a light emitting diode according to an embodiment of the invention.

圖2至圖14為本發明一實施例的發光二極體製造方法的各步驟示意圖。 2 to FIG. 14 are schematic diagrams showing respective steps of a method of manufacturing a light-emitting diode according to an embodiment of the present invention.

以下將結合附圖對本發明作進一步的詳細說明。 The invention will be further described in detail below with reference to the accompanying drawings.

圖1示出了本發明一實施例的發光二極體封裝結構的製造過程的流程。該發光二極體封裝結構的製造方法大致包括如下流程: 提供一晶圓層及一撓性的第一基板,所述第一基板一側設置有一玻璃層,將所述晶圓層的一側表面貼設在所述玻璃層上;於所述晶圓層相背玻璃層的一側表面上形成圖形化金屬層;切割所述晶圓層及玻璃層,從而形成複數發光二極體晶粒;拉伸所述第一基板,使所述第一基板彈性擴展而使得所述發光二極體晶粒相互分離;提供一側表面形成電路結構的一第二基板,使晶粒的金屬層與第二基板的電路結構電性連接並使晶粒固定於第二基板一側;移除所述第一基板,形成複數發光二極體粗胚;封裝所述粗胚,使第二基板一側形成一完全覆蓋所述晶粒的封裝層。 FIG. 1 shows a flow of a manufacturing process of a light emitting diode package structure according to an embodiment of the present invention. The manufacturing method of the LED package structure generally includes the following processes: Providing a wafer layer and a flexible first substrate, wherein a side of the first substrate is provided with a glass layer, and one surface of the wafer layer is pasted on the glass layer; Forming a patterned metal layer on one side surface of the layer back glass layer; cutting the wafer layer and the glass layer to form a plurality of light emitting diode crystal grains; stretching the first substrate to make the first substrate Elastically expanding to separate the light-emitting diode dies from each other; providing a second substrate having a circuit structure on one side surface, electrically connecting the metal layer of the die to the circuit structure of the second substrate and fixing the die a second substrate side; removing the first substrate to form a plurality of light-emitting diode blanks; and encapsulating the rough blanks to form an encapsulation layer completely covering the crystal grains on a side of the second substrate.

下面結合其他圖示對該流程作詳細說明。 The process will be described in detail below in conjunction with other diagrams.

請同時參考圖2至圖4,首先,提供一晶圓層11及一撓性的第一基板20。該晶圓層11為氮化鎵材料且生長在一襯底10上。所述第一基板20的一表面上嵌設有一玻璃層21。將所述晶圓層11藉由黏接等方式貼設在所述玻璃層21上,然後移除所述襯底10。所述玻璃層21的尺寸大於所述晶圓層11的尺寸,並且玻璃層21四周的邊界均超出晶圓層11的邊界。 Referring to FIG. 2 to FIG. 4 simultaneously, first, a wafer layer 11 and a flexible first substrate 20 are provided. The wafer layer 11 is a gallium nitride material and is grown on a substrate 10. A glass layer 21 is embedded on a surface of the first substrate 20. The wafer layer 11 is attached to the glass layer 21 by bonding or the like, and then the substrate 10 is removed. The size of the glass layer 21 is larger than the size of the wafer layer 11, and the boundary around the glass layer 21 exceeds the boundary of the wafer layer 11.

請同時參閱圖5,然後在晶圓層11的背離玻璃層21的表面上形成圖形化金屬層30。這些金屬層30藉由電鍍、濺鍍等方式形成於所述晶圓層11的表面上,做為發光二極體的電極使用。 Referring also to FIG. 5, a patterned metal layer 30 is then formed on the surface of the wafer layer 11 that faces away from the glass layer 21. These metal layers 30 are formed on the surface of the wafer layer 11 by plating, sputtering, or the like, and are used as electrodes of the light-emitting diode.

請同時參閱圖6及圖7,對晶圓層11及玻璃層21進行切割,從而形 成複數發光二極體晶粒12。每一發光二極體晶粒12具有相應數量的金屬層30。本實施例中,所述玻璃層21在與晶圓層11結合前就被預先切割成複數單獨的玻璃體212,從而使在切割晶圓層11時,沿著所述玻璃體212的對應的邊界進行即可。可以理解,在其他實施例中,所述玻璃層21也可不預先切割,使其與晶圓層11一同切割便可。 Please refer to FIG. 6 and FIG. 7 to cut the wafer layer 11 and the glass layer 21 to form a shape. The plurality of light-emitting diode crystal grains 12 are formed. Each of the light emitting diode dies 12 has a corresponding number of metal layers 30. In this embodiment, the glass layer 21 is pre-cut into a plurality of individual glass bodies 212 before being bonded to the wafer layer 11, so that when the wafer layer 11 is diced, along the corresponding boundary of the glass body 212. Just fine. It can be understood that in other embodiments, the glass layer 21 may not be cut in advance so as to be cut together with the wafer layer 11.

接下來拉伸所述第一基板20,使第一基板20彈性擴展而使得所述發光二極體晶粒12沿第一基板20拉伸的方向上相互分離。 Next, the first substrate 20 is stretched to elastically expand the first substrate 20 such that the light emitting diode chips 12 are separated from each other in the direction in which the first substrate 20 is stretched.

請參閱圖8及圖9,提供一側表面形成有電路結構41的一第二基板40,使晶粒12的金屬層30與第二基板40的電路結構41藉由導電膠(圖未示)電性連接並使晶粒12固定於第二基板40一側。然後移除所述第一基板20,從而形成複數發光二極體粗胚。 Referring to FIG. 8 and FIG. 9 , a second substrate 40 having a circuit structure 41 on one side is provided, so that the metal layer 30 of the die 12 and the circuit structure 41 of the second substrate 40 are made of conductive adhesive (not shown). The electrical connection is made and the die 12 is fixed to the side of the second substrate 40. The first substrate 20 is then removed to form a plurality of light emitting diode blanks.

請參閱圖10,最後封裝所述粗胚,使第二基板40一側形成一完全覆蓋所述晶粒12的封裝層50。 Referring to FIG. 10, the rough blank is finally encapsulated such that an encapsulation layer 50 completely covering the die 12 is formed on one side of the second substrate 40.

本發明利用具有撓性的第一基板20同時固定複數晶粒12,以協助這些晶粒12同時與第二基板40的電路結構41導電連接,簡化了工藝流程,提升了製造效率。 The present invention utilizes the first substrate 20 having flexibility to simultaneously fix the plurality of crystal grains 12 to assist in electrically connecting the crystal grains 12 to the circuit structure 41 of the second substrate 40 at the same time, which simplifies the process flow and improves the manufacturing efficiency.

所述發光二極體可設置螢光粉層60(見圖11),所述螢光粉層60塗覆在所述玻璃層21與晶圓層11相對的一側表面上,且形成於玻璃層21與晶圓層11結合之前。可以理解地,螢光粉層60a(見圖12)也可塗覆在玻璃層21與第一基板20之間,並形成在所述玻璃層21與所述晶圓層11結合之前;螢光粉層60b(見圖13)也可以於封裝步驟後塗覆於封裝層50表面;螢光粉層60c(見圖14)也 可在封裝時混合形成於封裝層50內。 The light emitting diode may be provided with a phosphor layer 60 (see FIG. 11), and the phosphor layer 60 is coated on a surface of the glass layer 21 opposite to the wafer layer 11 and formed on the glass. Before the layer 21 is bonded to the wafer layer 11. It can be understood that the phosphor layer 60a (see FIG. 12) can also be coated between the glass layer 21 and the first substrate 20 and formed before the glass layer 21 is bonded to the wafer layer 11; The powder layer 60b (see FIG. 13) may also be applied to the surface of the encapsulation layer 50 after the encapsulation step; the phosphor layer 60c (see FIG. 14) is also It can be formed in the encapsulation layer 50 by mixing at the time of packaging.

另外,本領域技術人員還可在本發明精神內做其他變化,當然,這些依據本發明精神所做之變化,都應包含在本發明所要求保護之範圍之內。 In addition, those skilled in the art can make other changes in the spirit of the present invention. Of course, the changes made in accordance with the spirit of the present invention should be included in the scope of the present invention.

Claims (9)

一種發光二極體封裝結構的製造方法,包括以下步驟:提供一晶圓層及一具有撓性的第一基板,所述第一基板一側設置有一玻璃層,將所述晶圓層的一側表面貼設在所述玻璃層上;於所述晶圓層背向玻璃層的一側表面上形成複數間隔的圖形化金屬層;切割所述晶圓層及玻璃層,從而形成複數發光二極體晶粒;拉伸所述第一基板,使得所述發光二極體晶粒相互分離;提供一側表面形成有電路結構的一第二基板,使晶粒的金屬層與第二基板的電路結構電性連接並使晶粒固定於第二基板一側;移除所述第一基板,形成複數發光二極體粗胚;封裝所述粗胚,使第二基板一側形成一完全覆蓋所述晶粒的封裝層;於切割晶圓層之前,所述玻璃層被預先切割成複數單獨的玻璃體。 A manufacturing method of a light emitting diode package structure, comprising the steps of: providing a wafer layer and a flexible first substrate, wherein a side of the first substrate is provided with a glass layer, and one of the wafer layers is a side surface is attached to the glass layer; a plurality of patterned metal layers are formed on a surface of the wafer layer facing away from the glass layer; and the wafer layer and the glass layer are cut to form a plurality of light-emitting diodes a polar body grain; stretching the first substrate such that the light emitting diode crystal grains are separated from each other; providing a second substrate having a circuit structure formed on one surface thereof, the metal layer of the crystal grain and the second substrate The circuit structure is electrically connected and the die is fixed on the side of the second substrate; the first substrate is removed to form a plurality of light-emitting diode blank blanks; and the rough blank is encapsulated to form a complete cover on the second substrate side The encapsulation layer of the die; before the wafer layer is diced, the glass layer is pre-cut into a plurality of individual glass bodies. 如申請專利範圍第1項所述的發光二極體封裝結構的製造方法,其中:所述玻璃層與所述晶圓層結合之前,所述玻璃層與晶圓層相對的一側表面塗覆有螢光粉層。 The method for manufacturing a light emitting diode package structure according to claim 1, wherein: before the glass layer is bonded to the wafer layer, a surface of the glass layer opposite to the wafer layer is coated. There is a layer of phosphor powder. 如申請專利範圍第1項所述的發光二極體封裝結構的製造方法,其中:所述玻璃層與所述晶圓層結合之前,所述玻璃層與第一基板之間塗覆有螢光粉層。 The method for manufacturing a light emitting diode package structure according to claim 1, wherein: before the glass layer is bonded to the wafer layer, the glass layer and the first substrate are coated with fluorescent light. Powder layer. 如申請專利範圍第1項所述的發光二極體封裝結構的製造方法,其中:於封裝步驟後,所述封裝層表面塗覆有螢光粉層。 The method for manufacturing a light emitting diode package structure according to claim 1, wherein after the packaging step, the surface of the encapsulation layer is coated with a phosphor powder layer. 如申請專利範圍第1項所述的發光二極體封裝結構的製造方法,其中:在封裝時,所述封裝層內混合形成有螢光粉層。 The method of manufacturing a light emitting diode package structure according to claim 1, wherein a phosphor powder layer is mixed and formed in the package layer during packaging. 如申請專利範圍第1項所述的發光二極體封裝結構的製造方法,其中:所 述晶圓層自一襯底一側表面形成,晶圓層與玻璃層結合後,所述襯底被移除。 The method for manufacturing a light emitting diode package structure according to claim 1, wherein: The wafer layer is formed from a surface of one substrate, and after the wafer layer is bonded to the glass layer, the substrate is removed. 如申請專利範圍第1項述的發光二極體封裝結構的製造方法,其中:所述晶圓層為氮化鎵材料。 The method of manufacturing a light emitting diode package structure according to claim 1, wherein the wafer layer is a gallium nitride material. 如申請專利範圍第1項所述的發光二極體封裝結構的製造方法,其中:所述圖形化金屬層藉由電鍍或濺鍍的方式形成於晶圓層上。 The method for manufacturing a light emitting diode package structure according to claim 1, wherein the patterned metal layer is formed on the wafer layer by electroplating or sputtering. 如申請專利範圍第1項所述的發光二極體封裝結構的製造方法,其中:所述電路結構與所述圖形化金屬層藉由導電膠電性連接。 The method for manufacturing a light emitting diode package structure according to claim 1, wherein the circuit structure and the patterned metal layer are electrically connected by a conductive paste.
TW100132175A 2011-08-19 2011-09-07 Method for manufacturing led package TWI429111B (en)

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TWI393277B (en) * 2009-11-13 2013-04-11 Everlight Electronics Co Ltd Method for packaging light-emitting diode
TWM383816U (en) * 2010-01-29 2010-07-01 Silitek Electronic Guangzhou Bearing fixing structure and bearing fixing assembly
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