TWI405905B - 用於在一幫浦中一機械活塞之位置控制之系統及方法 - Google Patents
用於在一幫浦中一機械活塞之位置控制之系統及方法 Download PDFInfo
- Publication number
- TWI405905B TWI405905B TW095142923A TW95142923A TWI405905B TW I405905 B TWI405905 B TW I405905B TW 095142923 A TW095142923 A TW 095142923A TW 95142923 A TW95142923 A TW 95142923A TW I405905 B TWI405905 B TW I405905B
- Authority
- TW
- Taiwan
- Prior art keywords
- pump
- motor
- dispensing
- brushless
- piston
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract description 19
- 239000012530 fluid Substances 0.000 claims abstract description 91
- 238000005086 pumping Methods 0.000 claims abstract description 19
- 230000020169 heat generation Effects 0.000 claims abstract description 9
- 230000007246 mechanism Effects 0.000 claims description 22
- 238000004891 communication Methods 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000009499 grossing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000003247 decreasing effect Effects 0.000 abstract description 4
- 238000010926 purge Methods 0.000 description 23
- 230000004888 barrier function Effects 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 10
- 238000002955 isolation Methods 0.000 description 9
- 238000009826 distribution Methods 0.000 description 8
- 230000002829 reductive effect Effects 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000001914 filtration Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 230000013011 mating Effects 0.000 description 5
- 238000000746 purification Methods 0.000 description 5
- 230000002411 adverse Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 230000002939 deleterious effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000003467 diminishing effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000004836 empirical method Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0081—Special features systems, control, safety measures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/02—Piston parameters
- F04B2201/0201—Position of the piston
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/12—Parameters of driving or driven means
- F04B2201/1208—Angular position of the shaft
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Reciprocating Pumps (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2005/042127 WO2006057957A2 (en) | 2004-11-23 | 2005-11-21 | System and method for a variable home position dispense system |
| US74166005P | 2005-12-02 | 2005-12-02 | |
| US84172506P | 2006-09-01 | 2006-09-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200726914A TW200726914A (en) | 2007-07-16 |
| TWI405905B true TWI405905B (zh) | 2013-08-21 |
Family
ID=39592976
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102126755A TWI493107B (zh) | 2005-11-21 | 2006-11-21 | 用於在一幫浦中一機械活塞之位置控制之系統及方法 |
| TW095142923A TWI405905B (zh) | 2005-11-21 | 2006-11-21 | 用於在一幫浦中一機械活塞之位置控制之系統及方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102126755A TWI493107B (zh) | 2005-11-21 | 2006-11-21 | 用於在一幫浦中一機械活塞之位置控制之系統及方法 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1954946B1 (de) |
| JP (2) | JP5339915B2 (de) |
| KR (2) | KR101279747B1 (de) |
| CN (1) | CN103016324B (de) |
| TW (2) | TWI493107B (de) |
| WO (1) | WO2007061957A2 (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9753443B2 (en) * | 2014-04-21 | 2017-09-05 | Synerject Llc | Solenoid systems and methods for detecting length of travel |
| DE102015201884B4 (de) * | 2015-02-04 | 2023-07-27 | Schaeffler Technologies AG & Co. KG | Fluidische Betätigungsanordnung |
| FR3050513B1 (fr) * | 2016-04-26 | 2018-11-16 | Erca | Dispositif de distribution de produit liquide ou pateux |
| DE102017112975B3 (de) * | 2017-06-13 | 2018-10-25 | KNF Micro AG | Membranpumpe |
| JP6920923B2 (ja) * | 2017-08-25 | 2021-08-18 | 株式会社Ｓｃｒｅｅｎホールディングス | ポンプ装置および基板処理装置 |
| DE102019117731A1 (de) * | 2019-07-01 | 2021-01-07 | Ebm-Papst St. Georgen Gmbh & Co. Kg | Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5336884A (en) * | 1992-07-01 | 1994-08-09 | Rockwell International Corporation | High resolution optical hybrid absolute incremental position encoder |
| TW477862B (en) * | 1998-09-24 | 2002-03-01 | Rule Industries | Pump and controller system and method |
| US6520519B2 (en) * | 2000-10-31 | 2003-02-18 | Durrell U Howard | Trimming apparatus for steer wheel control systems |
| US6575264B2 (en) * | 1999-01-29 | 2003-06-10 | Dana Corporation | Precision electro-hydraulic actuator positioning system |
| TWI225908B (en) * | 1999-03-24 | 2005-01-01 | Itt Mfg Enterprises Inc | Method for controlling a pump system |
| US20050173463A1 (en) * | 2004-02-09 | 2005-08-11 | Wesner John A. | Dispensing pump having linear and rotary actuators |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5018A (en) * | 1847-03-13 | Improvement in machinery for combing wool | ||
| JPS63255575A (ja) * | 1987-04-10 | 1988-10-21 | Yoshimoto Seisakusho:Kk | ポンプ装置 |
| US5167837A (en) * | 1989-03-28 | 1992-12-01 | Fas-Technologies, Inc. | Filtering and dispensing system with independently activated pumps in series |
| US5312233A (en) | 1992-02-25 | 1994-05-17 | Ivek Corporation | Linear liquid dispensing pump for dispensing liquid in nanoliter volumes |
| US5947702A (en) * | 1996-12-20 | 1999-09-07 | Beco Manufacturing | High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm |
| JPH11356081A (ja) * | 1998-06-09 | 1999-12-24 | Matsushita Electric Ind Co Ltd | インバータ装置 |
| US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
| CN1590761A (zh) * | 1998-11-23 | 2005-03-09 | 米利波尔公司 | 用于精密泵设备的泵调节器 |
| US6203288B1 (en) | 1999-01-05 | 2001-03-20 | Air Products And Chemicals, Inc. | Reciprocating pumps with linear motor driver |
| EP1129290B1 (de) * | 1999-09-03 | 2011-10-19 | Fenwal, Inc. | Vorrichtung und verfahren zur regelung von pumpen |
| US6348124B1 (en) * | 1999-12-14 | 2002-02-19 | Applied Materials, Inc. | Delivery of polishing agents in a wafer processing system |
| JP2001342989A (ja) * | 2000-05-30 | 2001-12-14 | Matsushita Electric Ind Co Ltd | Ｄｃポンプの駆動制御方法 |
| JP2002106467A (ja) * | 2000-09-28 | 2002-04-10 | Techno Excel Co Ltd | トラバース機構駆動式流体ポンプ |
| JP4576739B2 (ja) * | 2001-04-02 | 2010-11-10 | パナソニック電工株式会社 | ポンプ用モータ駆動制御装置 |
| JP4684478B2 (ja) * | 2001-07-04 | 2011-05-18 | 株式会社荏原製作所 | 給水装置の制御方法 |
| GB0130602D0 (en) * | 2001-12-21 | 2002-02-06 | Johnson Electric Sa | Brushless D.C. motor |
| US6914543B2 (en) * | 2002-06-03 | 2005-07-05 | Visteon Global Technologies, Inc. | Method for initializing position with an encoder |
| JP4191437B2 (ja) * | 2002-06-26 | 2008-12-03 | 並木精密宝石株式会社 | 基板一体型ブラシレスモータ |
| JP2004225672A (ja) * | 2003-01-27 | 2004-08-12 | Ebara Densan Ltd | 回転機械の運転制御装置 |
| DE602004007247T2 (de) * | 2004-06-04 | 2008-02-28 | Société Industrielle de Sonceboz S.A., Sonceboz | Pumpenantrieb |
-
2006
- 2006-11-20 WO PCT/US2006/044907 patent/WO2007061957A2/en active Application Filing
- 2006-11-20 KR KR1020087014266A patent/KR101279747B1/ko active IP Right Grant
- 2006-11-20 EP EP06838071.6A patent/EP1954946B1/de active Active
- 2006-11-20 JP JP2008541407A patent/JP5339915B2/ja active Active
- 2006-11-20 KR KR1020137007190A patent/KR101283259B1/ko active IP Right Grant
- 2006-11-20 CN CN201210365592.8A patent/CN103016324B/zh active Active
- 2006-11-21 TW TW102126755A patent/TWI493107B/zh active
- 2006-11-21 TW TW095142923A patent/TWI405905B/zh active
-
2013
- 2013-04-17 JP JP2013086392A patent/JP5674853B2/ja active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5336884A (en) * | 1992-07-01 | 1994-08-09 | Rockwell International Corporation | High resolution optical hybrid absolute incremental position encoder |
| TW477862B (en) * | 1998-09-24 | 2002-03-01 | Rule Industries | Pump and controller system and method |
| US6575264B2 (en) * | 1999-01-29 | 2003-06-10 | Dana Corporation | Precision electro-hydraulic actuator positioning system |
| TWI225908B (en) * | 1999-03-24 | 2005-01-01 | Itt Mfg Enterprises Inc | Method for controlling a pump system |
| US6520519B2 (en) * | 2000-10-31 | 2003-02-18 | Durrell U Howard | Trimming apparatus for steer wheel control systems |
| US20050173463A1 (en) * | 2004-02-09 | 2005-08-11 | Wesner John A. | Dispensing pump having linear and rotary actuators |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009529847A (ja) | 2009-08-20 |
| WO2007061957A3 (en) | 2007-10-04 |
| KR101279747B1 (ko) | 2013-06-27 |
| KR101283259B1 (ko) | 2013-07-11 |
| TW201350680A (zh) | 2013-12-16 |
| EP1954946A4 (de) | 2010-05-26 |
| CN103016324B (zh) | 2016-08-10 |
| TW200726914A (en) | 2007-07-16 |
| EP1954946A2 (de) | 2008-08-13 |
| CN103016324A (zh) | 2013-04-03 |
| TWI493107B (zh) | 2015-07-21 |
| KR20130036380A (ko) | 2013-04-11 |
| KR20080068918A (ko) | 2008-07-24 |
| JP5674853B2 (ja) | 2015-02-25 |
| JP2013150549A (ja) | 2013-08-01 |
| JP5339915B2 (ja) | 2013-11-13 |
| WO2007061957B1 (en) | 2007-12-06 |
| EP1954946B1 (de) | 2014-11-05 |
| WO2007061957A8 (en) | 2007-08-16 |
| WO2007061957A2 (en) | 2007-05-31 |
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