WO2007061957A8 - System and method for position control of a mechanical piston in a pump - Google Patents

System and method for position control of a mechanical piston in a pump

Info

Publication number
WO2007061957A8
WO2007061957A8 PCT/US2006/044907 US2006044907W WO2007061957A8 WO 2007061957 A8 WO2007061957 A8 WO 2007061957A8 US 2006044907 W US2006044907 W US 2006044907W WO 2007061957 A8 WO2007061957 A8 WO 2007061957A8
Authority
WO
WIPO (PCT)
Prior art keywords
bldcm
dispense
pump
control scheme
position control
Prior art date
Application number
PCT/US2006/044907
Other languages
French (fr)
Other versions
WO2007061957A3 (en
WO2007061957B1 (en
WO2007061957A2 (en
Inventor
George Gonnella
James Cedrone
Iraj Gashgaee
Original Assignee
Entegris Inc
George Gonnella
James Cedrone
Iraj Gashgaee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2005/042127 external-priority patent/WO2006057957A2/en
Application filed by Entegris Inc, George Gonnella, James Cedrone, Iraj Gashgaee filed Critical Entegris Inc
Priority to JP2008541407A priority Critical patent/JP5339915B2/en
Priority to EP06838071.6A priority patent/EP1954946B1/en
Priority to CN2006800506657A priority patent/CN101356373B/en
Priority to KR1020087014266A priority patent/KR101279747B1/en
Priority to KR1020137007190A priority patent/KR101283259B1/en
Publication of WO2007061957A2 publication Critical patent/WO2007061957A2/en
Publication of WO2007061957A8 publication Critical patent/WO2007061957A8/en
Publication of WO2007061957A3 publication Critical patent/WO2007061957A3/en
Publication of WO2007061957B1 publication Critical patent/WO2007061957B1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/12—Parameters of driving or driven means
    • F04B2201/1208—Angular position of the shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
PCT/US2006/044907 2004-11-23 2006-11-20 System and method for position control of a mechanical piston in a pump WO2007061957A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008541407A JP5339915B2 (en) 2005-11-21 2006-11-20 Piston control system and method for pump mechanical piston
EP06838071.6A EP1954946B1 (en) 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump
CN2006800506657A CN101356373B (en) 2004-11-23 2006-11-20 System for position control of a mechanical piston in a pump
KR1020087014266A KR101279747B1 (en) 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump
KR1020137007190A KR101283259B1 (en) 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
PCT/US2005/042127 WO2006057957A2 (en) 2004-11-23 2005-11-21 System and method for a variable home position dispense system
USPCT/US2005/042127 2005-11-21
US74166005P 2005-12-02 2005-12-02
US60/741,660 2005-12-02
US84172506P 2006-09-01 2006-09-01
US60/841,725 2006-09-01

Publications (4)

Publication Number Publication Date
WO2007061957A2 WO2007061957A2 (en) 2007-05-31
WO2007061957A8 true WO2007061957A8 (en) 2007-08-16
WO2007061957A3 WO2007061957A3 (en) 2007-10-04
WO2007061957B1 WO2007061957B1 (en) 2007-12-06

Family

ID=39592976

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/044907 WO2007061957A2 (en) 2004-11-23 2006-11-20 System and method for position control of a mechanical piston in a pump

Country Status (6)

Country Link
EP (1) EP1954946B1 (en)
JP (2) JP5339915B2 (en)
KR (2) KR101279747B1 (en)
CN (1) CN103016324B (en)
TW (2) TWI493107B (en)
WO (1) WO2007061957A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9753443B2 (en) * 2014-04-21 2017-09-05 Synerject Llc Solenoid systems and methods for detecting length of travel
DE102015201884B4 (en) * 2015-02-04 2023-07-27 Schaeffler Technologies AG & Co. KG Fluidic actuator assembly
FR3050513B1 (en) * 2016-04-26 2018-11-16 Erca DEVICE FOR DISPENSING LIQUID OR PASTY PRODUCT
DE102017112975B3 (en) * 2017-06-13 2018-10-25 KNF Micro AG diaphragm pump
JP6920923B2 (en) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス Pump equipment and substrate processing equipment
DE102019117731A1 (en) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Method for determining the position of the diaphragm of an electric motor-driven diaphragm pump

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5018A (en) * 1847-03-13 Improvement in machinery for combing wool
JPS63255575A (en) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk Pump device
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
US5312233A (en) 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US5336884A (en) * 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
US5947702A (en) * 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
JPH11356081A (en) * 1998-06-09 1999-12-24 Matsushita Electric Ind Co Ltd Inverter device
US6390780B1 (en) * 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
CN1590761A (en) * 1998-11-23 2005-03-09 米利波尔公司 Pump controller for precision pumping apparatus
US6203288B1 (en) 1999-01-05 2001-03-20 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
US6575264B2 (en) * 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
EP1129290B1 (en) * 1999-09-03 2011-10-19 Fenwal, Inc. Systems and methods for control of pumps
US6348124B1 (en) * 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
JP2001342989A (en) * 2000-05-30 2001-12-14 Matsushita Electric Ind Co Ltd Method of driving and controlling dc pump
JP2002106467A (en) * 2000-09-28 2002-04-10 Techno Excel Co Ltd Traverse mechanism driving type fluid pump
US6520520B2 (en) * 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
JP4576739B2 (en) * 2001-04-02 2010-11-10 パナソニック電工株式会社 Motor drive control device for pump
JP4684478B2 (en) * 2001-07-04 2011-05-18 株式会社荏原製作所 Control method of water supply device
GB0130602D0 (en) * 2001-12-21 2002-02-06 Johnson Electric Sa Brushless D.C. motor
US6914543B2 (en) * 2002-06-03 2005-07-05 Visteon Global Technologies, Inc. Method for initializing position with an encoder
JP4191437B2 (en) * 2002-06-26 2008-12-03 並木精密宝石株式会社 Board-integrated brushless motor
JP2004225672A (en) * 2003-01-27 2004-08-12 Ebara Densan Ltd Operation controlling device of rotary machine
US20050173463A1 (en) * 2004-02-09 2005-08-11 Wesner John A. Dispensing pump having linear and rotary actuators
DE602004007247T2 (en) * 2004-06-04 2008-02-28 Société Industrielle de Sonceboz S.A., Sonceboz pump drive

Also Published As

Publication number Publication date
JP2009529847A (en) 2009-08-20
WO2007061957A3 (en) 2007-10-04
KR101279747B1 (en) 2013-06-27
KR101283259B1 (en) 2013-07-11
TW201350680A (en) 2013-12-16
EP1954946A4 (en) 2010-05-26
CN103016324B (en) 2016-08-10
TW200726914A (en) 2007-07-16
EP1954946A2 (en) 2008-08-13
CN103016324A (en) 2013-04-03
TWI493107B (en) 2015-07-21
KR20130036380A (en) 2013-04-11
KR20080068918A (en) 2008-07-24
JP5674853B2 (en) 2015-02-25
JP2013150549A (en) 2013-08-01
JP5339915B2 (en) 2013-11-13
WO2007061957B1 (en) 2007-12-06
EP1954946B1 (en) 2014-11-05
TWI405905B (en) 2013-08-21
WO2007061957A2 (en) 2007-05-31

Similar Documents

Publication Publication Date Title
US8083498B2 (en) System and method for position control of a mechanical piston in a pump
WO2007061957A8 (en) System and method for position control of a mechanical piston in a pump
KR100724392B1 (en) Driving control apparatus and method for reciprocating compressor
JP5339914B2 (en) System and method for a pump having reduced form factor
KR100774470B1 (en) Driving control apparatus and method for reciprocating compressor
WO2007035567A3 (en) Infusion pump with closed loop control and algorithm
EP1724914A3 (en) System and method for controlling linear compressor
WO2018070339A1 (en) Linear motor control device and compressor equipped with same
WO2000025416A1 (en) Pressure control system using input current sensing
US20120076667A1 (en) Electric motor pump control incorporating pump element position information
JP2015117696A (en) Method for calibrating membrane vacuum pump and membrane vacuum pump
EP2273133A3 (en) Active hydraulic regeneration for motion control
JP2009529847A5 (en)
KR101401849B1 (en) Electronic camshaft motor control for piston pump
KR101955399B1 (en) High pressure pump for pumping high viscosity material
EP1631061A3 (en) Image-capturing apparatus and driving method for an optical system
EP1403569A3 (en) Speed change ratio control unit for continuously variable transmission
JPH0219670A (en) Control method for nonpulsating pump
JP4977775B2 (en) Liquid pump system
JP4610582B2 (en) Liquid pump system
JP2004353659A (en) Operation control device and operation control method for reciprocating compressor
KR20090047191A (en) Linear motion actuator

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2008541407

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2006838071

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 1020087014266

Country of ref document: KR

WWE Wipo information: entry into national phase

Ref document number: 200680050665.7

Country of ref document: CN

WWE Wipo information: entry into national phase

Ref document number: 1020137007190

Country of ref document: KR