EP1954946B1 - System und verfahren zur positionssteuerung eines mechanischen kolbens in einer pumpe - Google Patents

System und verfahren zur positionssteuerung eines mechanischen kolbens in einer pumpe Download PDF

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Publication number
EP1954946B1
EP1954946B1 EP06838071.6A EP06838071A EP1954946B1 EP 1954946 B1 EP1954946 B1 EP 1954946B1 EP 06838071 A EP06838071 A EP 06838071A EP 1954946 B1 EP1954946 B1 EP 1954946B1
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EP
European Patent Office
Prior art keywords
dispense
pump
motor
pumping system
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP06838071.6A
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English (en)
French (fr)
Other versions
EP1954946A4 (de
EP1954946A2 (de
Inventor
George Gonnella
James Cedrone
Iraj Gashgaee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
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Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2005/042127 external-priority patent/WO2006057957A2/en
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of EP1954946A2 publication Critical patent/EP1954946A2/de
Publication of EP1954946A4 publication Critical patent/EP1954946A4/de
Application granted granted Critical
Publication of EP1954946B1 publication Critical patent/EP1954946B1/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/12—Parameters of driving or driven means
    • F04B2201/1208—Angular position of the shaft

Claims (9)

  1. Pumpsystem (10) zur Regelung von Fluidbewegungen und Ausgabemengen in einem Halbleiterherstellungsprozess, welches Pumpsystem (10) enthält:
    eine Pumpe (100);
    einen bürstenlosen Gleichstrommotor, der dafür ausgelegt ist, eine kontinuierliche Bewegung zum Antrieb einer Ausgabepumpe (180) bereitzustellen, die in der Pumpe (100) angeordnet ist;
    ein computerlesbares Medium (27), welches Softwareanweisungen zur Regelung der Pumpe (100) trägt; und
    einen Prozessor (35), der mit dem computerlesbaren Medium (27) und der Pumpe (100) in Kommunikationsverbindung steht,
    wobei die Softwareanweisungen durch den Prozessor (35) ausführbar sind, um das Umdrehungsausmaß des Gleichstrommotors in Übereinstimmung mit einem Regelschema zu regeln,
    dadurch gekennzeichnet, dass das Regelschema dafür konfiguriert ist, eine Betriebsfrequenz eines Regelkreises, welcher den bürstenlosen Gleichstrommotor regelt, für kritische Funktionen, wie etwa Ausgabe, zu erhöhen und die Betriebsfrequenz für unkritische Funktionen, wie etwa Nicht-Ausgabebetriebsabläufe auf einen optimalen Bereich zu reduzieren.
  2. Pumpsystem (10) nach Anspruch 1, wobei die Ausgabepumpe (180) eine Kolbenverdrängerpumpe ist, enthaltend:
    eine Ausgabekammer (185);
    einen Kolben (192),
    eine Ausgabestufenmembran (190), die zwischen der Ausgabekammer (185) und dem Kolben (192) angeordnet ist; und
    eine Gewindespindel (195), welche den Kolben (192) und den bürstenlosen Gleichstrommotor verbindet.
  3. Pumpsystem (10) nach Anspruch 2, ferner enthaltend einen Positionssensor (3040), der mit dem bürstenlosen Gleichstrommotor gekoppelt ist und mit dem Prozessor (35) in Kommunikationsverbindung steht, um eine Echtzeit-Positionsrückkopplung des Kolbens (192) bereitzustellen.
  4. Pumpsystem (10) nach Anspruch 3, wobei der Positionssensor (3040) mit dem bürstenlosen Gleichstrom Motor intern oder extern verbunden ist.
  5. Pumpsystem (10) nach Anspruch 3, wobei der Positionssensor (3040) ein Fein-Zeilen-Encoder ist, der so betätigbar ist, dass er eine Echtzeitrückkopplung der Position des bürstenlosen Gleichstrommotors an den Prozessor abgibt, so dass der Prozessor in der Lage ist, den Kolben (192) mit 0,045 Grad Drehung zu regeln.
  6. Pumpsystem (10) nach Anspruch 3, wobei der Positionssensor (3040) ein Encoder mit 1000, 2000 oder 8000 Zeilen ist.
  7. Pumpsystem (10) nach Anspruch 1, wobei das Regelschema dafür konfiguriert ist, die Wärmeerzeugung durch den bürstenlosen Gleichstrommotor während des Betriebs der Ausgabepumpe (180) zu minimieren, indem der Regelkreis mit zwei unterschiedlichen Frequenzen während eines einzelnen Zyklus des Pumpsystems ausgeführt wird.
  8. Pumpsystem (10) nach Anspruch 7, wobei das Regelschema dafür konfiguriert ist, den Regelkreis mit einer höheren Frequenz während des Ausgabeteils des Zyklus auszuführen und den Regelkreis während des übrigen Zyklus mit einer niedrigeren Frequenz auszuführen.
  9. Pumpsystem nach einem der vorhergehenden Ansprüche, wobei der Regelkreis, der den bürstenlosen Gleichstrommotor steuert, der Positionsregelungsalgorithmus des Motors ist, so dass die Betriebsfrequenz für kritische Funktionen, wie etwa Ausgeben, erhöht wird und für unkritische Funktionen auf einen optimalen Bereich reduziert wird.
EP06838071.6A 2005-11-21 2006-11-20 System und verfahren zur positionssteuerung eines mechanischen kolbens in einer pumpe Active EP1954946B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
PCT/US2005/042127 WO2006057957A2 (en) 2004-11-23 2005-11-21 System and method for a variable home position dispense system
US74166005P 2005-12-02 2005-12-02
US84172506P 2006-09-01 2006-09-01
PCT/US2006/044907 WO2007061957A2 (en) 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump

Publications (3)

Publication Number Publication Date
EP1954946A2 EP1954946A2 (de) 2008-08-13
EP1954946A4 EP1954946A4 (de) 2010-05-26
EP1954946B1 true EP1954946B1 (de) 2014-11-05

Family

ID=39592976

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06838071.6A Active EP1954946B1 (de) 2005-11-21 2006-11-20 System und verfahren zur positionssteuerung eines mechanischen kolbens in einer pumpe

Country Status (6)

Country Link
EP (1) EP1954946B1 (de)
JP (2) JP5339915B2 (de)
KR (2) KR101283259B1 (de)
CN (1) CN103016324B (de)
TW (2) TWI405905B (de)
WO (1) WO2007061957A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9753443B2 (en) * 2014-04-21 2017-09-05 Synerject Llc Solenoid systems and methods for detecting length of travel
DE102015201884B4 (de) * 2015-02-04 2023-07-27 Schaeffler Technologies AG & Co. KG Fluidische Betätigungsanordnung
FR3050513B1 (fr) * 2016-04-26 2018-11-16 Erca Dispositif de distribution de produit liquide ou pateux
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
JP6920923B2 (ja) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置および基板処理装置
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312233A (en) * 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US20050244276A1 (en) * 2004-04-06 2005-11-03 Jean-Francois Pfister Pump drive

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5018A (en) * 1847-03-13 Improvement in machinery for combing wool
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
US5336884A (en) * 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
US5947702A (en) * 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
JPH11356081A (ja) * 1998-06-09 1999-12-24 Matsushita Electric Ind Co Ltd インバータ装置
US6390780B1 (en) * 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
EP1133639B1 (de) * 1998-11-23 2004-06-09 Mykrolis Corporation Pumpensteuergerät für hochpräzisionsdosierpumpe
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US6203288B1 (en) * 1999-01-05 2001-03-20 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
US6575264B2 (en) * 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
CN100357599C (zh) * 1999-09-03 2007-12-26 巴克斯特国际公司 泵送流体的系统
US6348124B1 (en) 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
JP2001342989A (ja) * 2000-05-30 2001-12-14 Matsushita Electric Ind Co Ltd Ｄｃポンプの駆動制御方法
JP2002106467A (ja) * 2000-09-28 2002-04-10 Techno Excel Co Ltd トラバース機構駆動式流体ポンプ
US6520520B2 (en) * 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
JP4576739B2 (ja) * 2001-04-02 2010-11-10 パナソニック電工株式会社 ポンプ用モータ駆動制御装置
JP4684478B2 (ja) * 2001-07-04 2011-05-18 株式会社荏原製作所 給水装置の制御方法
GB0130602D0 (en) * 2001-12-21 2002-02-06 Johnson Electric Sa Brushless D.C. motor
US6914543B2 (en) * 2002-06-03 2005-07-05 Visteon Global Technologies, Inc. Method for initializing position with an encoder
JP4191437B2 (ja) * 2002-06-26 2008-12-03 並木精密宝石株式会社 基板一体型ブラシレスモータ
JP2004225672A (ja) * 2003-01-27 2004-08-12 Ebara Densan Ltd 回転機械の運転制御装置
US20050173463A1 (en) * 2004-02-09 2005-08-11 Wesner John A. Dispensing pump having linear and rotary actuators

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312233A (en) * 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US20050244276A1 (en) * 2004-04-06 2005-11-03 Jean-Francois Pfister Pump drive

Also Published As

Publication number Publication date
KR20080068918A (ko) 2008-07-24
TWI493107B (zh) 2015-07-21
WO2007061957A3 (en) 2007-10-04
JP2009529847A (ja) 2009-08-20
TW201350680A (zh) 2013-12-16
KR20130036380A (ko) 2013-04-11
TW200726914A (en) 2007-07-16
WO2007061957A2 (en) 2007-05-31
KR101279747B1 (ko) 2013-06-27
KR101283259B1 (ko) 2013-07-11
JP5339915B2 (ja) 2013-11-13
EP1954946A4 (de) 2010-05-26
CN103016324B (zh) 2016-08-10
WO2007061957B1 (en) 2007-12-06
TWI405905B (zh) 2013-08-21
CN103016324A (zh) 2013-04-03
JP5674853B2 (ja) 2015-02-25
JP2013150549A (ja) 2013-08-01
WO2007061957A8 (en) 2007-08-16
EP1954946A2 (de) 2008-08-13

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