TWI404571B - Maintenance apparatus and discharge apparatus - Google Patents

Abstract

The invention relates to a maintenance device which moves below a head and can perform cleaning and check on discharge ports and a discharge device provided with the maintenance device. The maintenance device (10) of the invention moves along a main guide rail (72) of a discharge device (70) which enables a substrate (95) to move along the main guide rail (72) and pass through beneath a head holder (80), liquid droplet is discharged from discharge ports (82) of the plurality of heads (81) and hits the substrate (95). The maintenance device (10) is provided with a first moving table (15a) carried on the main guide rail (72); a carrier (19) arranged on the first moving table (15a); a check device (20) and a sweeping device (30) which are carried on the carrier (19). Through enabling the first moving table (15a) to move along the main guide rail (72) and pass through beneath the head holder (80), and enabling the carrier (19) to move on the first moving table (15a), the sweeping device (30) is arranged beneath the heads (81), thereby being capable of removing attachment of the discharge ports (82); meanwhile, through arranging a camera of the check device (20) beneath the discharge ports (82) and focusing the camera to shoot the liquid droplet discharged, the discharge ports (82) can be checked.

Description

Maintenance device and discharge device

The present invention relates to a maintenance device for a discharge port and a discharge device having a maintenance device.

With the development of an information society in recent years, the demand for larger liquid crystal display devices has increased, and it is expected to improve productivity. In a color liquid crystal display device, a color filter is used in order to fully color the display image. The color filter is produced by arranging three colors of inks of R (red), G (green), and B (blue) in a predetermined pattern on a substrate.

Conventionally, an inkjet method has been used for the discharge of ink. In the inkjet method, the ink around the inside and outside of the discharge port is dried and solidified, or the dust is adhered to the discharge port to block the discharge port, and as a result, the deposit of the discharge port is hindered and the drop accuracy of the ink is deteriorated.

In order to solve this problem, as in the devices described in Patent Document 2 and Patent Document 3, it is necessary to provide an inspection device that detects a defective discharge port and a cleaning device that removes the deposit from the defective discharge port.

According to the apparatus described in Patent Document 1 in which the head moving method (the ink is ejected to the substrate in a state in which the head is reciprocated by scanning on the substrate), the inspection device and the cleaning device described in Patent Document 2 can be disposed. In a place different from the substrate moving area, the head is moved to the inspection device or the cleaning device to perform inspection and cleaning of the defective discharge port.

However, depending on the device for moving the head, the size of the substrate increases. It takes longer to cause the ink to spit out, and it is difficult to control the head to allow the ink to land at a uniform interval.

In order to discharge ink onto a large substrate, it is necessary to use a head rest mode, that is, to have a plurality of heads rest on the substrate moving area, and to pass the substrate underneath and eject ink toward the substrate.

[Patent Document 1] Japanese Patent Laid-Open No. Hei 11-248925

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2003-191492

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2008-265321

The present invention has been developed in order to solve the above problems of the prior art, and an object thereof is to provide a discharge device for allowing a substrate to pass through a discharge liquid toward a substrate under a plurality of heads (still with respect to a horizontal reference surface). A maintenance device capable of inspecting and cleaning each discharge port is provided.

In order to solve the above problems, the maintenance device of the present invention is a maintenance device that moves along the main rail of the discharge device. The discharge device mounts the substrate mounting table on which the substrate is placed on the main rail that is fixed horizontally. The substrate mounting table moves along the main rail and passes under the head holding portion, and discharges the liquid droplets of the discharge liquid toward the substrate on the substrate mounting table from the discharge port provided in the plurality of head portions of the head holding portion. Floating on the substrate; the maintenance device includes: a first mobile station mounted on the main rail; a main mobile device that moves the first mobile station along the main rail; and is disposed on the first mobile station a mounting table, a sub-moving mechanism for moving the mounting table on the first mobile station, and a loading device The inspection apparatus is provided with: an illumination device that emits illumination light toward the measurement target; and an imaging device that images the measurement target after the illumination light is irradiated; and moves the first mobile station to the foregoing The lower side of the head holding portion is stationary, and the mounting table is moved on the first moving stage while the first moving stage is stationary, and the focus of the imaging device is placed on each of the discharge ports from the head. When the droplet is ejected on the flight path of the droplet, the illumination device irradiates the illumination light toward the droplet from the side of the flight path of the droplet to be imaged, and the imaging device irradiates the droplet toward the image to be imaged. The incident position of the illumination light is photographed.

The maintenance device of the present invention includes a control device that determines the quality of the discharge port of the liquid droplet based on the result of the detection of the liquid droplet.

In the maintenance device of the present invention, the sub-moving mechanism includes a linear first sub-track fixed to the first moving stage, and is mounted on the first sub-track between the mounting table and the first moving stage a second mobile station, a first sub-moving device for moving the second mobile station along the first sub-track on the first mobile station, and a second sub-track fixed to the second mobile station And a second sub-moving device that moves the aforementioned mounting table along the second sub-track on the second mobile station; one of the first sub-track and the second sub-track is disposed in parallel with the main rail The other side is configured to be perpendicular to the aforementioned main track and horizontal.

In the maintenance device of the present invention, the illuminating device includes a light source that generates the illumination light, and the illumination light that is sent upward from the lower position and that is reflected horizontally and sent to the measurement target. a reflection means; the imaging device comprising: a second reflection means for reflecting the measurement light after the irradiation of the droplets to be sent downward; and receiving the illumination light sent from the second reflection means and capturing an image camera.

The maintenance device of the present invention has a cleaning device for absorbing the discharge liquid and a cleaning device for moving the suction cloth in the vertical direction, and is disposed on the mounting table; and moving the first moving table to the head to maintain The lower portion of the portion is stationary behind, and when the first moving table is stationary, the mounting table is moved on the first moving table, and when the cleaning device is disposed under the head, the cleaning device is The suction cloth contacts the discharge port to remove the discharge liquid adhering to the discharge port.

In the discharge device of the present invention, the substrate mounting table on which the substrate is placed is mounted on the main rail that is fixed horizontally, and the substrate mounting table is moved along the main rail to pass under the head holding portion, and is provided from the above-mentioned The discharge port of the plurality of heads of the head holding portion discharges the liquid droplets of the discharge liquid onto the substrate on the substrate mounting table and falls onto the substrate; the discharge device has a maintenance device that moves along the main rail; and the maintenance device The first mobile station mounted on the main rail, the main mobile device that moves the first mobile station along the main rail, the mounting table disposed on the first mobile station, and the mounting table a sub-moving mechanism that moves on the first mobile station and an inspection device that is placed on the mounting table; the inspection device includes an illumination device that emits illumination light toward the measurement object, and the illumination device is irradiated with the illumination light Photograph of the aforementioned measurement object a moving device that moves the first mobile station below the head holding portion and then rests, and moves the positioning table on the first mobile station while the first mobile station is stationary, so that the imaging device When the focus is placed on the flight path of the liquid droplets discharged from the respective discharge ports of the head portion, the illumination device irradiates the illumination light toward the liquid droplet from the side of the flight path of the liquid droplet to be imaged. The photographing device photographs an incident position of the illumination light that is irradiated toward the liquid droplet to be imaged.

In the discharge device of the present invention, the maintenance device is provided with a control device for discriminating the discharge port of the liquid droplet based on the result of the detection of the liquid droplet.

In the discharge device of the present invention, the sub-moving mechanism includes a linear first sub-track fixed to the first moving stage, and is mounted on the first sub-track between the mounting table and the first moving stage a second mobile station, a first sub-moving device for moving the second mobile station along the first sub-track on the first mobile station, and a second sub-track fixed to the second mobile station And a second sub-moving device that moves the aforementioned mounting table along the second sub-track on the second mobile station; one of the first sub-track and the second sub-track is disposed in parallel with the main rail The other side is configured to be perpendicular to the aforementioned main track and horizontal.

In the discharge device of the present invention, the illumination device includes: a light source that generates the illumination light; and a first reflection means that reflects the illumination light that is sent upward from the lower position and that is emitted horizontally and then irradiates the droplet to the measurement target; The photographing apparatus is provided to: illuminate the droplets toward the droplet Thereafter, the measurement light is reflected as a second reflection means that is sent downward, and a camera that receives the illumination light sent from the second reflection means and captures an image.

In the discharge device of the present invention, the maintenance device includes: a suction cloth having a suction cloth for absorbing the discharge liquid; and a cleaning device for moving the suction cloth in the vertical direction, wherein the cleaning device is provided on the mounting table; a moving table moves to the lower side of the head holding portion and then is stationary. When the first moving table is stationary, the mounting table is moved on the first moving table, and the cleaning device is placed in the head. In the case of the cleaning device, the suction cloth is brought into contact with the discharge port to remove the discharge liquid adhering to the discharge port.

Since the discharge of the discharge port is judged based on the droplets of the discharge liquid, it is not necessary to discharge the test substrate as in the related art, and the cost of the test substrate can be eliminated.

It is only necessary to clean the discharge port after detecting the defective discharge port, and it is not necessary to replace the head, and the cost of replacing the head and the time required for replacement can be omitted.

<Configuration of spitting device>

Fig. 1 is a plan view showing a discharge device 70 of the present invention, and Fig. 5 is a side view.

The discharge device 70 includes a pedestal 71 that is stationary on a horizontal reference surface, a linear main rail 72 that is fixed to the pedestal 71, a head holding portion 80 that holds a plurality of head portions 81, and a substrate movement on which the substrate 95 can be placed. Department 90 The maintenance device 10 that removes the discharge port 82 provided on the bottom surface of the head portion 81 and removes the discharge liquid adhering to the discharge port 82 is determined.

Hereinafter, the direction along the main track 72 will be referred to as the Y direction, and the direction perpendicular to the Y direction will be referred to as the X direction. Symbols 1 and 2 in Fig. 1 indicate the X and Y directions, respectively.

The substrate moving portion 90 and the maintenance device 10 are disposed on the main rail 72.

The head holding portion 80 is supported by a stay 73 fixed to the pedestal 71, and is disposed on the main rail 72 at a position higher than both the substrate moving portion 90 and the maintenance device 10.

The head holding portion 80 has a plurality of head portions 81, and a plurality of discharge ports 82 are provided on the bottom surface of each of the head portions 81. In each of the head portions 81, the discharge ports 82 are arranged in a plurality of rows of discharge ports parallel to the X direction. Column 83.

The discharge ports 82 in the one head 81 are arranged at equal intervals in the X direction, and the interval is the discharge port interval (the distance between the centers of the discharge ports) D, and the discharge port intervals D of the respective head portions 81 are equal to each other.

Regarding each of the head portions 81, the length of the head portion 81 in the X direction is larger than the length of the X-direction distance between the centers of the discharge ports 82 of the end portions and the discharge port spacing D. Therefore, if a plurality of heads 81 are provided Arranged in a row parallel to the X direction, and the position in the Y direction is the same, and the X-direction distance between the discharge port 82 at the end of one head 81 and the discharge port 82 at the end of the adjacent head 81 is A greater distance than the spout exit interval D.

In the present invention, a plurality of heads 81 are arranged along the X direction to The X-direction distance between the discharge ports 82 at the end portions of the different head portions 81 also serves as the discharge port spacing D, and the discharge ports 82 of the adjacent head portions 81 are disposed at positions different in the Y direction, and the adjacent head portions 81 are provided. The end portions overlap in the X direction, and include the discharge ports 82 of the different head portions 81, and the discharge ports 82 are arranged to be arranged in the X direction via the discharge port interval D.

In this case, the plurality of heads 81 arranged along the X direction can be alternately arranged at two positions in the Y direction, and a plurality of sets of the heads 81 arranged in this manner are arranged in a zigzag manner to form a head. Group 84.

A predetermined number (n) of head groups 84 constitutes a head group 85, and in one head group 85, between two adjacent discharge ports 82 of one head group 84, the discharge ports 82 of the other head groups are They are arranged one by one in the X direction at equal intervals of D/n.

The head holding portion 80 has an ink tank (not shown), and stores one color ink (discharge liquid) among the three colors of R, G, and B in each ink tank. Each head group 85 of each head 81 is connected to an ink tank.

Each of the discharge ports 82 has an ink chamber filled with ink, and a pressure generating device is disposed in each of the ink chambers. Each of the pressure generating devices receives a signal transmitted from a control device (not shown), and generates a predetermined pressure in the ink chamber to discharge a predetermined amount of ink from the discharge port 82.

The substrate moving portion 90 is provided with a horizontal substrate mounting table 91 on the upward facing surface. A suction port (not shown) is provided on the upward facing surface of the substrate stage 91, and the suction port is connected to a vacuum pump (not shown). After the substrate 95 is placed on the substrate stage 91, the substrate 95 is evacuated by a vacuum pump to vacuum-hold and hold the substrate 95 on the substrate stage 91.

On the substrate 95, a region (falling position) at which each of R, G, and B colors should be dropped is set. The substrate 95 has a lattice-shaped black matrix parallel to the X and Y directions, and each landing position is disposed in a region drawn by the black matrix region.

The interval between the landing positions of the substrate 95 adjacent to each other in the X direction is the same as the discharge port spacing D/n adjacent to the X direction in one head group 85, or the discharge port spacing D/n adjacent to each other in the X direction. The length of an integer multiple.

A first main moving mechanism is provided below the substrate moving portion 90.

Here, the first movable magnet 92 is disposed between the main rail 72 and the substrate stage 91, and a fixed electromagnet is disposed on the main rail 72 in the longitudinal direction of the rail, and is constituted by the main rail 72 and the first movable magnet 92. Linear motor (first main moving mechanism).

When the first main moving mechanism receives the signal transmitted by the control device (not shown), the magnetic pole of the fixed electromagnet of the main rail 72 is changed in the longitudinal direction of the track, and the substrate mounting table 91 is moved along the pedestal 71 along the main The track 72 moves in the Y direction.

The substrate moving portion 90 having the substrate stage 91 is reciprocally movable below the head holding portion 80 by moving in the Y direction along the main rail 72.

The control device (not shown) of the discharge device 70 is set to discharge the discharge liquid onto the substrate 95 in the following order.

First, the substrate moving portion 90 is moved to a position (starting point) at which the substrate 95 is placed on the substrate mounting table 91, and the substrate 95 is conveyed by a robot (not shown) and vacuum-adsorbed on the substrate mounting table 91. Icon The alignment cameras are aligned so that each landing position on the substrate 95 can pass directly below the predetermined discharge port 82. When the substrate moving portion 90 passes the lower portion of the head holding portion 80, the discharge liquid is discharged from each of the discharge ports 82, and when the position (end point) at which the substrate 95 is removed from the substrate mounting table 91 is reached, the substrate moving portion is caused. When 90 is stopped and the discharge liquid on the substrate 95 is dried, the vacuum suction on the substrate stage 91 is released, and the substrate 95 is removed by a robot (not shown).

Next, the substrate moving portion 90 is again moved to the starting point, and the other substrate 95 is transported to the substrate placing table 91, and the above-described discharging step is repeated.

The control device (not shown) is set such that when the predetermined number of substrates 95 are repeatedly subjected to the above-described discharge operation, the maintenance device 10 is moved below the head holding portion 80, and each discharge port 82 is performed as will be described later. Cleaning and inspection.

Fig. 2 is a front view showing the maintenance device 10.

The maintenance device 10 has a first mobile station 15a, and the first mobile station 15a is disposed on the main rail 72.

A second main moving mechanism (main moving device) 75 is disposed below the maintenance device 10.

Here, the second movable magnet 11 is disposed between the main rail 72 and the first moving stage 15a, and the linear motor (second main moving mechanism 75) is constituted by the main rail 72 and the second movable magnet 11.

If the second main moving mechanism 75 receives the signal transmitted by the control device (not shown), the magnetic properties of the fixed electromagnet of the main track 72 are made to be in the track. The longitudinal direction changes, and the first moving stage 15a moves in the Y direction along the main rail 72 with respect to the pedestal 71.

The maintenance device 10 having the first mobile station 15a is reciprocally movable below the head holding portion 80 by moving in the Y direction along the main rail 72.

The first and second main moving mechanisms are controlled by a control device (not shown), and when the cleaning operation of each of the discharge ports 82 is started, the substrate moving portion 90 is first moved to the head holding portion 80 and the maintenance device 10 On the opposite side, the service device 10 is then moved to below the head holding portion 80. The Y coordinate of the maintenance device 10 is measured by the amount of movement on the main rail 72 by the control device. The XY coordinates of the respective heads 81 are stored in the control device, and the movement is stopped when the maintenance device 10 is positioned below the head holding portion 80. Alternatively, the amount of movement of the maintenance device 10 may be detected by visual alignment or by a fixed camera (not shown) provided in the head holding portion 80.

The maintenance device 10 includes a receiving tray 12 for receiving the discharge liquid discharged from the discharge port 82. The receiving tray 12 is placed on the first mobile station 15a.

The control device (not shown) allows the discharge liquid to be discharged from the respective discharge ports 82 toward the receiving tray 12 at a high pressure, whereby the deposit of the discharge port 82 is blown off, and the discharge liquid and the deposit are dropped on the receiving tray 12.

The other end of the waste liquid pipe 13 is connected to the bottom of the receiving tray 12 (the one end extends to the outside of the maintenance device 10), whereby the discharge liquid stored in the receiving tray 12 can be discharged to the outside of the maintenance device 10.

In this way, it is possible to prevent the movement of the maintenance device 10 and the substrate moving portion 90 on the main rail 72 from being caused by the adhesion of the discharge liquid to the main rail 72.

The maintenance device 10 includes a cleaning device 30 that removes the discharge liquid adhering to the discharge ports 82 after discharging the discharge liquid onto the receiving tray 12, and removes the discharge liquid after the discharge liquid adhered to each discharge port 82. 82 inspection device 20 of Liangzhu.

Above the first moving stage 15a of the maintenance device 10, a mounting table 19 and a second moving table 15b, and linear first and second sub-tracks 14a and 14b are provided.

Both the inspection device 20 and the cleaning device 30 are placed on the mounting table 19.

On the upward facing surface of the first moving stage 15a, two first sub-tracks 14a parallel to each other are fixed, and the second moving stage 15b is mounted on the first sub-tracks 14a of the two.

Further, on the upward facing surface of the second moving stage 15b, two second sub-tracks 14b which are parallel to each other are fixed, and the mounting table 19 is mounted on the second sub-tracks 14b of the two.

The second moving stage 15b is movable relative to the first sub-track 14a, and the stage 19 is movable relative to the second sub-track 14b.

First and second sub-moving devices 16a and 16b are provided below the second mobile station 15b and the mounting table 19, respectively, and motors (not shown) are attached thereto, and the second mobile station is controlled by a control device (not shown). The 15b and the stage 19 are movable along the first sub-track 14a and the second sub-track 14b, respectively.

One of the first sub-track 14a and the second sub-track 14b is disposed in parallel with the main rail 72, and the other is disposed perpendicular to the main rail 72.

The first mobile station 15a moves along the main rail 72 as described above, and can be stationary at a position below the head holding portion 80. If the second mobile station 15b and the mounting table 19 are respectively along the first state, The second sub-tracks 14a and 14b are moved, and the mounting table 19 is moved in the XY direction while the first moving table 15a is still stationary, and the inspection device 20 and the cleaning device 30 placed on the mounting table 19 are moved to the respective positions. Below the head 81.

The coordinates of the inspection device 20 and the cleaning device 30 on the first moving stage 15a are measured by the control device based on the amount of movement of the mounting table 19 on the first and second sub-tracks 14a and 14b. The XY coordinates of the inspection device 20 and the cleaning device 30 can be obtained from the coordinates of the inspection device 20 and the cleaning device 30 on the first mobile station 15a and the Y coordinates of the first mobile station 15a. Since the XY coordinates of the respective heads 81 are stored in the control device, the inspection device 20 and the cleaning device 30 can be placed directly below the respective heads 81.

Fig. 4 is a side view of the cleaning device 30 for explaining the structure of the cleaning device 30.

The cleaning device 30 includes a belt-shaped suction cloth (blowing paper) 32 that sucks the discharge liquid, a rod-shaped first and second cores 34a and 34b, and a cylindrical tensioner 31.

The length of the suction cloth 32 in the width direction is longer than the length of the discharge port row 83 of each of the head portions 81, and the suction cloth 32 is disposed in the width direction parallel to the discharge port row 83.

The first and second cores 34a and 34b are respectively in the longitudinal direction and the discharge port The column 83 is supported in parallel by the pillars (fixed to the mounting table 19, not shown), and can be rotated in the X direction (the direction in which the discharge port 83 extends).

Both ends of the suction cloth 32 are wound around the first and second cores 34a and 34b, respectively, and the suction cloth 32 is held in tension between the first and second cores 34a and 34b.

The length of the tensioner 31 in the longitudinal direction is longer than the length of the discharge port row 83 of each of the heads 81, and the longitudinal direction thereof is parallel to the discharge port array 83 between the first and second cores 34a, 34b. It is disposed below the suction cloth 32.

A lifting device 33 fixed to the mounting table 19 is attached to a lower portion of the tensioner 31. The lifting device 33 has a motor (not shown), and receives a signal from a control device (not shown) to move the tensioner 31 in the vertical direction with respect to the mounting table 19.

The tensioner 31 is formed of a deformable cushioning material. When pressed against the head 81, it is brought into contact with a plurality of discharge ports 82 (separated in a direction perpendicular to the discharge port array 83) in one head 81. .

The cleaning device 30 is moved so that the tensioner 31 is positioned directly below the head portion 81 by a control device (not shown), and then the lifting device 33 is controlled to move the tensioner 31 vertically upward to cause the tensioner 31 to move. The upper suction cloth 32 is pressed against the bottom surface of the head 81. At this time, the suction cloth 32 on the tensioner 31 comes into contact with all of the discharge ports 82 of one of the heads 81.

The surface of the tensioner 31 is processed by, for example, a Teflon sheet to allow the suction cloth 32 to slide easily.

The suction cloth 32 on the tensioner 31 is pressed against the bottom surface of the head 81 The first and second cores 34a, 34b rotate in the same direction, and the suction cloth 32 on the tensioner 31 can wipe off the discharge liquid adhering to the discharge port 82.

Here, the wet rub type structure is employed, that is, the solution liquid is supplied from the outside to the inside 35 of the tensioner 31, and the solution liquid is infiltrated into the suction cloth 32 from the small holes 36 provided in the surface of the tensioner 31. The wet rub type can remove the clogging of the discharge port 82 after the discharge liquid is dried.

However, the cleaning device 30 of the present invention is not limited to the wet rub type, and may be a dry blot that does not use a solution.

The discharge liquid which is discharged by the discharge liquid to the receiving tray 12 is removed from each discharge port 82 of one head 81, and then the lifting device 33 is controlled to move the tensioner 31 vertically downward, thereby releasing the suction cloth 32 and spitting. The contact of the outlet 82 then moves the inspection device 20 below a discharge port 82 in the same head 81.

Fig. 3 is a side view of the inspection device 20 for explaining the configuration of the inspection device 20.

The inspection device 20 includes an illumination device 21 that irradiates the measurement target with the illumination light 29, and an imaging device 22 that captures the measurement target after the illumination device 29 is irradiated with the illumination light 29.

The illuminating device 21 includes a light source 23 that generates and emits the illumination light 29, and a first reflection means 24a that reflects the illumination light 29 emitted from the light source 23 and folds the traveling direction of the illumination light 29.

Here, the light source 23 is disposed at a position lower than the height of the discharge port 82 of each of the head portions 81, and at least a part of the reflection surface of the first reflection means 24a is located between the height of the discharge port 82 and the height of the light source 23. Reflective surface, The illumination light 29 emitted from the lower light source 23 is reflected and sent in the horizontal direction. Therefore, the illumination light 29 can be emitted from the illumination device 21 in the horizontal direction.

The photographing device 22 includes a second reflecting means 24b that reflects light traveling in the horizontal direction and that is sent downward, and a camera 25 that is positioned below the second reflecting means 24b and receives light from the second reflecting means 24b for photographing. .

The imaging device 22 is disposed relative to the illumination device 21 such that the second reflection means 24b can reflect the light emitted by the illumination device 21 and enter the camera 25. Therefore, when the horizontal illumination light 29 is incident on the measurement target, the camera 25 can capture the shadow of the measurement object or the image generated by the illumination light 29 of the measurement object.

The relative position of the illumination device 21 and the imaging device 22 is set such that the horizontal illumination light 29 that is conveyed between the illumination device 21 and the imaging device 22 is perpendicular to the direction in which the discharge port 83 extends. While maintaining this state, by moving the stage 19, light can be transmitted under the respective heads 81.

The focus 28 of the camera 25 is spaced from the lens in front of the camera by a certain distance on the optical path. Here, the focus 28 is located between the first and second reflecting means 24a, 24b.

Here, the inspection device 20 has an inspection frame 26 formed of a light-blocking material, and the light source 23 and the camera 25 are disposed inside the inspection frame 26. Thus, the inspection frame 26 prevents the light source 23 and the electronic machine portion of the camera 25 from being wetted by the discharge liquid. In addition, the inspection frame 26 can prevent the outside Excessive light is incident on the light receiving portion of the camera 25.

The first and second reflection means 24a, 24b are placed on the inspection frame 26 at positions directly above the light source 23 and the camera 25. The portion directly below the first and second reflecting means 24a, 24b of the frame 26 is inspected to allow the illumination light 29 to pass therethrough.

The discharge liquid which is discharged by the discharge liquid to the receiving tray 12 is removed from each discharge port 82 of one head 81, and then the mounting table 19 is moved by the stationary first mobile station 15a, and the inspection device 20 is moved. On the other hand, the focus 28 of the camera 25 is positioned directly below one discharge port 82, and then the discharge liquid is discharged from the discharge port 82.

A concave liquid discharge path 27 is provided in a portion between the first and second reflection means 24a, 24b of the upward facing surface of the inspection frame 26. The draining path 27 can receive the droplets of the discharge liquid that has fallen onto the inspection frame 26 and discharge toward the receiving tray 12 to prevent the discharge liquid from contaminating other portions of the maintenance device 10.

When the discharge liquid is discharged from the discharge port 82 directly above the focus point 28, the illumination light 29 is irradiated from the illumination device 21 to the liquid droplets flying downward, and the imaging device 22 captures the liquid droplets irradiated by the illumination light 29, The photographic image is recorded on a control device not shown.

For example, the droplet data discharged from the normal discharge port 82 is set in advance, and the photographed image is compared with the set value to determine the quality of the discharge port 82.

The judgment criteria include, for example, the shape, size, position (speed) of the droplet in flight, the direction of flight, whether there are separated droplets, and the like.

The result of the discharge port 82 is stored in a control device (not shown), and then the focus 28 of the camera 25 is moved to the same discharge of the head 81. The discharge port 82 is directly under the adjacent discharge port 82, and the inspection of the discharge port 82 is repeated.

When the inspection of all the discharge ports 82 in one of the discharge ports 83 of one of the heads 81 is completed, the focus 28 is moved to directly below one of the discharge ports 82 of the discharge port array 83 adjacent to the Y direction of the head 81. The inspection of the discharge port 82 is repeated in the adjacent discharge port row 83.

When the inspection of all the discharge ports 82 of one of the heads 81 is completed, if there is one or more defective discharge ports 82, the cleaning device 30 is moved to the lower side of the head portion 81 again, and the adhesion of the discharge port 82 is wiped off by the suction cloth 32. Then, the focus 28 of the camera 25 is moved to the defective discharge port 82 to be inspected again.

When the inspection result of all the discharge ports 82 of one of the heads 81 is good, the maintenance device 10 is moved to the lower side of the head 81 adjacent to the X direction, and the discharge port 82 of the head 81 is subjected to the above-described cleaning and inspection.

Alternatively, even if the same head 81 is repeatedly cleaned and inspected by the discharge port 82 for a predetermined number of times, if there is one or more defective discharge ports 82, the head portion 81 is replaced after the inspection of all the heads 81 is completed as will be described later. When the control device stores the position of the head portion 81, the maintenance device 10 is moved to the lower side of the head portion 81 adjacent to the X direction in the same manner as described above, and the above-described cleaning and inspection are performed on the discharge port 82 of the head portion 81.

When the inspection of all the heads 81 arranged in the X direction is completed, the maintenance device 10 is moved to the lower side of the head 81 adjacent to the Y direction, and then all the heads arranged in the X direction with the head 81 are placed. 81 Repeat the same work.

After the cleaning and inspection of all the heads 81 held by the head holding portion 80 are completed, the head portion 81 having the unrecoverable defective discharge port 82 is replaced with the checked spare head 81.

Next, the maintenance device 10 moves to the side opposite to the substrate moving portion 90 of the head holding portion 80, takes out the maintenance device 10 from below the head holding portion 80, and then starts the discharging step toward the substrate 95 again.

10‧‧‧Maintenance device

14a, 14b‧‧‧ first and second sub-tracks

15a, 15b‧‧‧first and second mobile stations

16a, 16b‧‧‧ first and second sub-mobile devices

19‧‧‧Station

20‧‧‧Checking device

21‧‧‧Lighting device

22‧‧‧Photographing device

23‧‧‧Light source

24a, 24b‧‧‧first and second reflection means

25‧‧‧ camera

28‧‧‧ Focus

29‧‧‧Lights

30‧‧‧ cleaning device

32‧‧‧Absorbing cloth

33‧‧‧ Lifting device

70‧‧‧ spitting device

72‧‧‧ main track

75‧‧‧Main mobile device

80‧‧‧ head keeping department

81‧‧‧ head

82‧‧‧Exporting

91‧‧‧Substrate mounting table

95‧‧‧Substrate

Fig. 1 is a plan view showing an example of a discharge device of the present invention.

Figure 2 is a front view of the service unit.

Fig. 3 is a side view of an inspection apparatus for explaining the configuration of the inspection apparatus.

Fig. 4 is a side view of the cleaning device for explaining the structure of the cleaning device.

Fig. 5 is a side view showing an example of the discharge device of the present invention.

1‧‧‧X direction

2‧‧‧Y direction

10‧‧‧Maintenance device

11‧‧‧Second movable magnet

12‧‧‧ receiving tray

13‧‧‧ Waste pipe

14a, 14b‧‧‧ first and second sub-tracks

15a, 15b‧‧‧first and second mobile stations

19‧‧‧Station

20‧‧‧Checking device

24a, 24b‧‧‧first and second reflection means

26‧‧‧Check the frame

30‧‧‧ cleaning device

32‧‧‧Absorbing cloth

70‧‧‧ spitting device

71‧‧‧ pedestal

72‧‧‧ main track

73‧‧‧ pillar

80‧‧‧ head keeping department

81‧‧‧ head

82‧‧‧Exporting

83‧‧‧Exhaust

84‧‧‧ head group

85‧‧‧ head group

90‧‧‧Substrate movement department

91‧‧‧Substrate mounting table

92‧‧‧First movable magnet

95‧‧‧Substrate

Claims (10)

A maintenance device is a maintenance device that moves along a main rail of a discharge device; the discharge device mounts a substrate mounting table on which a substrate is placed on a main rail that is fixed horizontally, and the substrate mounting table is along the main body The track moves through the lower portion of the head holding portion, and the liquid droplets of the discharge liquid are discharged onto the substrate on the substrate mounting table from the discharge port provided in the plurality of head portions of the head holding portion, and are dropped onto the substrate; The apparatus includes: a first mobile station mounted on the main rail, a main mobile device that moves the first mobile station along the main rail, a mounting table disposed on the first mobile station, and the mounting table a sub-moving mechanism that moves on the first mobile station and an inspection device that is placed on the mounting table; the inspection device includes an illumination device that emits illumination light toward the measurement object, and the illumination device is irradiated with the illumination light An imaging device for measuring the object; the first mobile station is moved to a position below the head holding portion, and is stationary, in the first mobile station In the stopped state, when the mounting table is moved on the first moving stage, and the focus of the imaging device is placed on the flight path of the liquid droplet discharged from each of the discharge ports of the head, the illumination device From the side of the flight path of the aforementioned droplet to be photographed The illumination device emits the illumination light toward the liquid droplet, and the imaging device captures an incident position of the illumination light that is irradiated toward the droplet to be imaged; and the illumination device includes a light source that generates the illumination light and The illuminating light that is sent to the upper side is reflected as a first reflecting means that is irradiated to the measurement target after being horizontally sent, and the imaging device is configured to reflect the measurement light that has been irradiated toward the liquid droplet to be sent downward And a second reflecting means and a camera that receives the illumination light sent from the second reflection means and captures an image. The maintenance device according to the first aspect of the invention is characterized in that the control device for determining the discharge port of the liquid droplet is determined based on the result of the detection of the liquid droplet. The maintenance device according to claim 1, wherein the sub-moving mechanism includes a linear first sub-track fixed to the first moving stage, and between the mounting table and the first mobile station a second mobile station mounted on the first sub-track, a first sub-moving device that moves the second mobile station along the first sub-track on the first mobile station, and is fixed on the second mobile station a second secondary track that is linear; and a second secondary moving device that moves the aforementioned table along the second secondary track on the second mobile station; One of the first sub-track and the second sub-track is disposed in parallel with the main rail, and the other is disposed perpendicular to the main rail and horizontal. The maintenance device according to claim 2, wherein the sub-moving mechanism includes a linear first sub-track fixed to the first moving stage, and between the mounting table and the first mobile station a second mobile station mounted on the first sub-track, a first sub-moving device that moves the second mobile station along the first sub-track on the first mobile station, and is fixed on the second mobile station a second sub-track having a linear shape and a second sub-moving device for moving the loading table along the second sub-track on the second moving stage; or one of the first sub-track and the second sub-track It is arranged parallel to the aforementioned main track, and the other is arranged perpendicular to the aforementioned main track and horizontal. The maintenance device according to any one of claims 1 to 4, wherein the cleaning device having the suction cloth for absorbing the discharge liquid and the lifting device for moving the suction cloth in the vertical direction is provided on the mounting table. And moving the first mobile station to the lower side of the head holding portion and then stationary, and moving the loading table on the first mobile station while the first mobile station is stationary, and causing the cleaning device Configured in the aforementioned header In the lower portion, the cleaning device is configured to allow the suction cloth to contact the discharge port to remove the discharge liquid adhering to the discharge port. A discharge device for mounting a substrate mounting table on which a substrate is placed on a main rail that is fixed horizontally, and moving the substrate mounting table along the main rail to pass under the head holding portion, and is provided from the head portion The discharge port of the plurality of heads of the holding portion discharges the liquid droplets of the discharge liquid onto the substrate on the substrate mounting table and falls onto the substrate; the discharge device has a maintenance device that moves along the main rail; and the maintenance device is provided with a first mobile station mounted on the main track, a main mobile device that moves the first mobile station along the main track, a mounting table disposed on the first mobile station, and the first stage in the first stage a sub-moving mechanism that moves on the mobile station and an inspection device that is placed on the mounting table; the inspection device includes an illumination device that emits illumination light toward the measurement target, and the measurement target that is irradiated with the illumination light a photographing device for moving the first mobile station to the lower side of the head holding portion, and then stationary, and the first mobile station is stationary State, so that the stage is moved in the first movement stage, the focus of the photographing apparatus disposed in front In the flight path of the droplets discharged from the respective ejection ports of the head, the illumination device irradiates the illumination light toward the droplet from the side of the flight path of the droplet to be imaged, and the imaging device is Shooting is performed at an incident position of the illumination light irradiated by the droplet to be imaged; the illumination device includes: a light source that generates the illumination light, and the illumination light that is sent upward from a lower position is reflected horizontally and then sent to the measurement a first reflecting means for irradiating the liquid droplets on the object; the image forming apparatus comprising: a second reflecting means for reflecting the measurement light after the liquid droplets are irradiated downward, and receiving the second reflecting means for receiving the light from the second reflecting means The camera that illuminates the light and captures the image. The discharge device according to claim 6, wherein the maintenance device is provided with a control device for discriminating the discharge port of the liquid droplet based on the result of the detection of the liquid droplet. The discharge device according to claim 6, wherein the sub-moving mechanism includes a linear first sub-track fixed to the first moving stage, and between the mounting table and the first mobile station a second mobile station mounted on the first sub-track, a first sub-moving device that moves the second mobile station along the first sub-track on the first mobile station, and is fixed on the second mobile station a linear second sub-track, and a second sub-moving device that moves the aforementioned table along the second sub-track on the second mobile station; one of the first sub-track and the second sub-track is disposed in parallel with the main track, and One side is arranged to be perpendicular to the aforementioned main track and horizontal. The discharge device according to claim 7, wherein the sub-moving mechanism includes a linear first sub-track fixed to the first moving stage, and between the mounting table and the first mobile station a second mobile station mounted on the first sub-track, a first sub-moving device that moves the second mobile station along the first sub-track on the first mobile station, and is fixed on the second mobile station a second sub-track having a linear shape and a second sub-moving device for moving the loading table along the second sub-track on the second moving stage; or one of the first sub-track and the second sub-track It is arranged parallel to the aforementioned main track, and the other is arranged perpendicular to the aforementioned main track and horizontal. The discharge device according to any one of claims 6 to 9, wherein the maintenance device includes a cleaning device having a suction cloth for absorbing the discharge liquid and a lifting device for moving the suction cloth in the vertical direction. The cleaning device is disposed on the mounting platform; Moving the first mobile station to the lower side of the head holding portion and then stationary, and moving the loading table on the first mobile station while the first mobile station is stationary, and disposing the cleaning device In the cleaning device, the cleaning device is configured such that the suction cloth contacts the discharge port to remove the discharge liquid adhering to the discharge port.