JP2011002641A - Maintenance apparatus and discharge apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a maintenance apparatus which is configured to move below a head and execute cleaning and inspection of a discharge port, and to provide a discharge apparatus that has the maintenance apparatus.SOLUTION: The maintenance apparatus 10 moves along a main rail 72 of a discharge apparatus 70, which moves a substrate 95 along the main rail 72 to make the substrate pass below a head-holding section 80 and discharges droplets of discharge liquid from discharge ports 82 of two or more heads 81 toward the substrate 95 to hit the substrate.

Description

  The present invention relates to a discharge port maintenance device and a discharge device having a maintenance device.

  With the development of the information society in recent years, the demand for larger liquid crystal display devices has increased, and improvement in productivity has been desired. In a color liquid crystal display device, a color filter is used to color a display image. The color filter is created by arranging inks of three colors R (red), G (green), and B (blue) in a predetermined pattern on a predetermined region on the substrate.

  Conventionally, an ink jet system is often used for ink ejection. In the ink jet method, the ink around and inside the discharge port is dried and solidified, or dust adheres to the discharge port, resulting in clogging of the discharge port, and the deposit on the discharge port hinders ink landing. There was a problem that accuracy deteriorated.

In order to solve this problem, an inspection device that detects a defective discharge port and a cleaning device that wipes off deposits from the defective discharge port are required as in the devices described in Patent Document 2 and Patent Document 3.
In an apparatus as described in Patent Document 1 that employs a head moving method in which a head is reciprocated so as to scan on a substrate and ink is ejected onto the substrate, an inspection device and a cleaning device are disposed as described in Patent Document 2, respectively. A defective discharge port can be inspected and cleaned by moving the head onto an inspection device or a cleaning device by providing it at a location different from the region where the substrate moves.

However, in the head moving type device, it takes a long time to eject ink in proportion to the increase in size of the substrate, and it is difficult to control the head in order to land the ink at predetermined intervals without unevenness.
In order to eject ink to a large substrate, it is necessary to adopt a head stationary method in which a plurality of heads are stopped on the area where the substrate moves, the substrate is passed under the head, and ink is ejected onto the substrate. is there.

Japanese Patent Laid-Open No. 11-248925 JP 2003-191492 A JP 2008-265321 A

  The present invention was created to solve the above-mentioned disadvantages of the prior art, and its object is to pass a substrate under a plurality of heads that are stationary with respect to a horizontal reference surface, and to discharge liquid onto the substrate. Another object of the present invention is to provide a maintenance device configured to be able to clean and inspect each discharge port in a discharge device that discharges water.

In order to solve the above-described problems, the present invention provides a substrate mounting table on which a substrate is mounted on a horizontally fixed main rail, moves the substrate mounting table along the main rail, and It passes along the main rail of the discharge device that passes below and discharges droplets of discharge liquid onto the substrate on the substrate mounting table from the discharge ports of the plurality of heads provided in the head holding unit. A maintenance device, wherein the maintenance device includes a first moving table placed on the main rail, a main moving device that moves the first moving table along the main rail, and the first moving table. A mounting table disposed on the moving table; a sub-movement mechanism for moving the mounting table on the first moving table; and an inspection device mounted on the mounting table; Is an illumination that illuminates the measurement object with illumination light And a photographing device for photographing the measurement object irradiated with the illumination light, moving the first moving base below the head holding portion to be stationary, and moving the first movement With the table stationary, the mounting table is moved on the first moving table, and the focal point of the imaging device is arranged on the flight path of the droplets discharged from the discharge ports of the head. The illumination device irradiates the illumination light toward the droplet from a side of a flight path of the droplet to be photographed, and the photographing device illuminates the droplet to be photographed. It is a maintenance device configured to take a picture at a position where light enters.
The present invention is a maintenance device having a control device that determines the quality of the discharge port from which the droplet has been discharged from the result of photographing the droplet.
The present invention is a maintenance device, wherein the sub-movement mechanism is a linear first sub-rail fixed on the first movement table, between the mounting table and the first movement table, A second moving table mounted on the first sub-rail, and a first sub-movement for moving the second moving table on the first moving table along the first sub-rail. An apparatus, a linear second sub-rail fixed on the second moving table, and a second moving the mounting table on the second moving table along the second sub-rail. A secondary movement device, wherein one of the first secondary rail and the second secondary rail is disposed in parallel with the main rail, and the other is disposed vertically and horizontally with the main rail. It is a maintenance device.
The present invention is a maintenance device, wherein the illumination device reflects a light source that generates the illumination light and the illumination light that is transmitted upward from a lower position, and transmits the illumination light horizontally to transmit a measurement target. First reflecting means for irradiating the liquid droplets, and the imaging device reflects the measurement light irradiated to the liquid droplets and transmits the light downward. A maintenance device having a camera that receives the illumination light transmitted from the second reflecting means and captures an image.
The present invention is a maintenance device, wherein a cleaning device having a blotting cloth that absorbs discharged liquid and a lifting device that moves the blotting cloth in a vertical direction is provided on the mounting table, and the first moving table is provided. Is moved below the head holding portion to be stationary, and the first moving table is stationary, the mounting table is moved on the first moving table, and the cleaning device is moved below the head. When arranged, the cleaning device is a maintenance device that removes the discharge liquid adhering to the discharge port by bringing the blotting cloth into contact with the discharge port.
In the present invention, a substrate mounting table on which a substrate is mounted is placed on a horizontally fixed main rail, the substrate mounting table is moved along the main rail, and passes under a head holding portion, and the head holding A discharge device that discharges droplets of discharge liquid onto the substrate on the substrate mounting table from discharge ports of a plurality of heads provided in the section, and causes the discharge device to land, and the discharge device moves along the main rail The maintenance device includes a first moving table placed on the main rail, a main moving device that moves the first moving table along the main rail, and the first movement. A mounting table disposed on the table; a sub-movement mechanism for moving the mounting table on the first moving table; and an inspection device mounted on the mounting table; An illumination device that irradiates illumination light toward the measurement object; An imaging device that photographs the measurement object irradiated with the illumination light, and moves the first moving table below the head holding unit to be stationary, and the first moving table is stationary. In this state, the mounting table is moved on the first moving table, and the focal point of the imaging device is arranged on the flight path of the droplets discharged from the discharge ports of the head. The illumination device irradiates the illumination light toward the droplet from the side of the flight path of the droplet to be imaged, and the imaging device receives the illumination light irradiated toward the droplet to be imaged. The discharge device is configured to take an image at a position where the image is taken.
The present invention is a discharge device, wherein the maintenance device is provided with a control device that determines the quality of the discharge port from which the droplet has been discharged based on a result of photographing the droplet.
The present invention is a discharge device, the sub-movement mechanism, the linear first sub-rail fixed on the first movement table, between the mounting table and the first movement table, A second moving table mounted on the first sub-rail, and a first sub-movement for moving the second moving table on the first moving table along the first sub-rail. An apparatus, a linear second sub-rail fixed on the second moving table, and a second moving the mounting table on the second moving table along the second sub-rail. A secondary movement device, wherein one of the first secondary rail and the second secondary rail is disposed in parallel with the main rail, and the other is disposed vertically and horizontally with the main rail. It is a discharge device.
The present invention is a discharge device, wherein the illuminating device reflects a light source that generates the illumination light and the illumination light that is transmitted upward from a lower position, and transmits the illumination light horizontally to transmit a measurement target. First reflecting means for irradiating the liquid droplets, and the imaging device reflects the measurement light irradiated to the liquid droplets and transmits the light downward. And an ejection device having a camera that receives the illumination light transmitted from the second reflecting means and captures an image.
The present invention is a discharge device, wherein the maintenance device includes a cleaning device having a blotting cloth that absorbs the discharge liquid and a lifting device that moves the suction fabric in a vertical direction, and the cleaning device is a table described above. The first moving table is provided above and moved to a position below the head holding portion to be stationary, and the mounting table is moved on the first moving table with the first moving table being stationary. When the cleaning device is arranged below the head, the cleaning device is a discharge device that brings the blotting cloth into contact with the discharge port and removes the discharge liquid adhering to the discharge port.

Since the quality of the ejection port is determined from the droplets of the ejection liquid, it is not necessary to eject the ejection port onto the test substrate as in the prior art, and the cost for the test substrate can be reduced.
If the ejection port can be restored by cleaning after detecting a defective ejection port, it is not necessary to replace the head, thereby reducing the cost of the replacement head and the time required for the replacement.

The top view of an example of the discharge apparatus of this invention Front view of the maintenance department Side view of the inspection device explaining the structure of the inspection device Side view of the cleaning device for explaining the structure of the cleaning device Side view of an example of the discharge device of the present invention

<Discharge device structure>
FIG. 1 shows a plan view of a discharge device 70 of the present invention, and FIG. 5 shows a side view.
The discharge device 70 can mount a pedestal 71 stationary on a horizontal reference surface, a linear main rail 72 fixed on the pedestal 71, a head holding unit 80 that holds a plurality of heads 81, and a substrate 95. And a maintenance device 10 that judges whether the discharge port 82 provided on the bottom surface of the head 81 and the discharge port 82 provided on the bottom surface of the head 81 are good or bad and removes the discharge liquid attached to the discharge port 82.
Hereinafter, the direction along the main rail 72 is referred to as the Y direction, and the horizontal direction perpendicular to the Y direction is referred to as the X direction. Reference numerals 1 and 2 in FIG. 1 indicate the X and Y directions, respectively.

The substrate moving unit 90 and the maintenance device 10 are disposed on the main rail 72.
The head holding unit 80 is supported by a column 73 fixed on the pedestal 71, and is disposed on the main rail 72 at a position higher than both the substrate moving unit 90 and the maintenance device 10.

The head holding unit 80 has a plurality of heads 81. A plurality of ejection openings 82 are provided on the bottom surface of each head 81, and the ejection openings 82 are arranged in each head 81 by forming a plurality of ejection opening arrays 83 parallel to the X direction.
The discharge ports 82 in one head 81 are arranged at equal intervals in the X direction. If the interval is the discharge port interval (distance between the centers of the discharge ports) D, the discharge port intervals D of the heads 81 are the same. Is in value.

  Each head 81 is formed such that the length in the X direction of the head 81 is larger than the length obtained by adding the discharge port interval D to the distance in the X direction between the centers of the discharge ports 82 at the end portion. When the heads 81 are arranged in a line parallel to the X direction and the positions in the Y direction are the same, the discharge ports 82 located at the end of one head 81 and the discharge ports 82 located at the end of the adjacent head 81 are arranged. The X-direction distance between them is separated by a distance larger than the discharge port interval D.

  In the present invention, the discharge ports 82 of adjacent heads 81 are arranged such that a plurality of heads 81 arranged along the X direction have a discharge port interval D between the discharge ports 82 at the ends of different heads 81. Are arranged at different positions with respect to the Y direction, and the end portions of the adjacent heads 81 overlap with each other in the X direction, and each discharge port 82 includes the discharge ports 82 of different heads 81 in the X direction. On the other hand, it arrange | positions so that it may rank with the discharge opening space | interval D.

In this case, the plurality of heads 81 arranged along the X direction can be alternately arranged at two positions with respect to the Y direction, and the set of the plurality of heads 81 arranged in such a manner is arranged in a staggered arrangement. Thus, one head set 84 is formed.
A predetermined number n of head sets 84 constitute a head group 85, and in one head group 85, other head sets are discharged between two adjacent discharge ports 82 in one head set 84. One outlet 82 is arranged at an equal interval D / n in the X direction.

The head holding unit 80 has an ink tank (not shown), and each ink tank stores one color ink (discharge liquid) of the three colors R, G, and B. Each head 81 is connected to one ink tank for each head group 85.
Each ejection port 82 has an ink chamber filled with ink, and a pressure generator is disposed in each ink chamber. Each pressure generator receives a signal transmitted from a control device (not shown), generates a predetermined pressure in the ink chamber, and discharges a predetermined amount of ink from the ejection port 82.

The substrate moving unit 90 is provided with a horizontal substrate mounting table 91 on the surface facing upward. The surface facing the substrate mounting table 91 has a suction port (not shown), and the suction port is connected to a vacuum pump (not shown). When the substrate 95 is placed on the substrate mounting table 91 and then evacuated by a vacuum pump, the substrate 95 is vacuum-adsorbed and held on the substrate mounting table 91.
On the substrate 95, areas (landing positions) where the respective colors R, G, and B are to be landed are determined. The substrate 95 has a black matrix having a lattice shape parallel to the X and Y directions, and each landing position is arranged in a region partitioned by the black matrix.

The interval between the landing positions adjacent to each other in the X direction of the substrate 95 is the same as the discharge port interval D / n adjacent to the X direction in one head group 85 or an integer of the discharge port interval D / n adjacent to the X direction. It is formed twice as long.
A first main moving mechanism is provided under the substrate moving unit 90.

  Here, a first movable magnet 92 is disposed between the main rail 72 and the substrate mounting table 91, and a fixed electromagnet is provided on the main rail 72 over the longitudinal direction of the rail. A linear motor is formed with the magnet 92 to constitute a first main moving mechanism.

When the first main movement mechanism receives a signal transmitted from a control device (not shown), the magnetic pole of the fixed electromagnet of the main rail 72 is changed over the longitudinal direction of the rail, and the substrate mounting table 91 is moved relative to the pedestal 71. It is moved along the rail 72 in the Y direction.
The substrate moving unit 90 having the substrate mounting table 91 is configured to reciprocate under the head holding unit 80 by moving in the Y direction along the main rail 72.
The control device (not shown) of the discharge device 70 is set to discharge the discharge liquid onto the substrate 95 in the following order.

  First, after moving the substrate moving unit 90 to the starting point which is a position where the substrate 95 is placed on the substrate mounting table 91, the substrate 95 is conveyed onto the substrate mounting table 91 by a robot (not shown) and vacuum-adsorbed. Alignment is performed so that each landing position on the substrate 95 can pass directly below a predetermined discharge port 82 by an alignment camera (not shown). When the substrate moving unit 90 passes below the head holding unit 80, the discharge liquid is discharged from each discharge port 82 at a predetermined timing, and the substrate moves when reaching the end point where the substrate 95 is removed from the substrate mounting table 91. After the unit 90 is stationary and the discharge liquid on the substrate 95 is dried, the vacuum suction on the substrate mounting table 91 is released, and the substrate 95 is removed by a robot (not shown).

Next, the substrate moving unit 90 is moved again to the starting point, another substrate 95 is transferred onto the substrate mounting table 91, and the above-described ejection process is repeated.
A control device (not shown) moves the maintenance device 10 below the head holding portion 80 each time the above-described discharge operation is repeated on a predetermined number of substrates 95, and cleans and inspects each discharge port 82 as described later. It is set to be.

FIG. 2 shows a front view of the maintenance device 10.
The maintenance device 10 has a first moving table 15a. The first moving table 15 a is disposed on the main rail 72.
A second main moving mechanism (main moving device) 75 is provided below the maintenance device 10.

Here, the second movable magnet 11 is disposed between the main rail 72 and the first moving table 15a, and the second main moving mechanism 75, which is a linear motor, is configured by the main rail 72 and the second movable magnet 11. It is composed.
When the second main moving mechanism receives a signal transmitted from a control device (not shown), it changes the magnetism of the fixed electromagnet of the main rail 72 over the longitudinal direction of the rail, and moves the first moving table 15a to the base 71. And move along the main rail 72 in the Y direction.
The maintenance device 10 having the first moving base 15 a is configured to be able to reciprocate under the head holding portion 80 by moving in the Y direction along the main rail 72.

  The first and second main moving mechanisms are controlled by a control device (not shown). When the cleaning operation of each discharge port 82 is started, first, the substrate moving unit 90 is sandwiched between the head holding units 80. The maintenance device 10 is moved to the opposite side, and then the maintenance device 10 is moved below the head holding unit 80. The Y coordinate of the maintenance device 10 is measured from the amount of movement on the main rail 72 by the control device. The XY coordinates of each head 81 are stored in the control device, and the movement is stopped when the maintenance device 10 is positioned below the head holding unit 80. Alternatively, the movement amount of the maintenance device 10 may be visually adjusted or detected by a fixed camera (not shown) installed in the head holding unit 80.

The maintenance device 10 has a tray 12 that receives the discharged liquid discharged from the discharge port 82. The tray 12 is placed on the first moving table 15a.
A control device (not shown) discharges the discharge liquid from each discharge port 82 toward the tray 12 at a high pressure, blows off the deposit on the discharge port 82, and drops the deposit on the discharge liquid and the discharge port 82 onto the tray 12. .
The other end of a waste liquid pipe 13 whose one end extends to the outside of the maintenance device 10 is connected to the bottom portion of the tray 12 so that the discharged liquid stored in the tray 12 can be discharged out of the maintenance device 10.

In this way, the discharge liquid adheres to the main rail 72, thereby preventing the maintenance device 10 and the substrate moving unit 90 from moving on the main rail 72.
The maintenance device 10 discharges the discharge liquid onto the tray 12 and then removes the discharge liquid adhering to each discharge port 82. After removing the discharge liquid adhering to each discharge port 82, the maintenance device 10 It has an inspection device 20 for judging pass / fail.

Above the first moving table 15a of the maintenance apparatus 10, a mounting table 19, a second moving table 15b, and linear first and second sub rails 14a and 14b are provided.
Both the inspection device 20 and the cleaning device 30 are mounted on the mounting table 19.
Two first sub rails 14a parallel to each other are fixed to the surface of the first moving table 15a facing upward, and the second moving table is placed on the two first sub rails 14a. 15b is placed.

Also, two second sub rails 14b parallel to each other are fixed to the surface of the second moving table 15b facing upward, and the mounting table 19 is placed on the two second sub rails 14b. Is placed.
The second moving table 15b is movable with respect to the first sub rail 14a, and the mounting table 19 is movable with respect to the second sub rail 14b.

Below the second moving table 15b and the mounting table 19, first and second sub moving devices 16a and 16b are provided, respectively, and motors (not shown) are respectively attached to them by a control device (not shown). The second moving table 15b and the mounting table 19 are controlled to move along the first sub rail 14a and the second sub rail 14b, respectively.
One of the first sub rail 14 a and the second sub rail 14 b is disposed in parallel with the main rail 72, and the other is disposed in a direction perpendicular to the main rail 72.

  As described above, the first moving table 15a moves along the main rail 72 and can be stopped at a position below the head holding portion 80. In this state, the second moving table 15b and the mounting table are arranged. When 19 is moved along the first and second sub rails 14a and 14b, the mounting table 19 is moved in the X and Y directions while the first moving table 15a is stationary, and is mounted on the mounting table 19. Further, the inspection device 20 and the cleaning device 30 can be moved below each head 81.

  The coordinates on the first moving table 15a of the inspection device 20 and the cleaning device 30 are measured from the movement amounts of the mounting table 19 on the first and second sub rails 14a and 14b by the control device. The XY coordinates of the inspection device 20 and the cleaning device 30 are obtained from the coordinates on the first moving table 15a of the inspection device 20 and the cleaning device 30 and the Y coordinate of the first moving table 15a. Since the XY coordinates of each head 81 are stored in the control device, the inspection device 20 and the cleaning device 30 can be stopped just below each head 81.

FIG. 4 is a side view of the cleaning device 30 for explaining the structure of the cleaning device 30.
The cleaning device 30 includes a strip-shaped blotting cloth (blotter) 32 that sucks the discharged liquid, rod-shaped first and second winding cores 34 a and 34 b, and a cylindrical tensioner 31.
The length in the width direction of the blotting cloth 32 is formed longer than the length of the discharge port array 83 of each head 81, and the suction cloth 32 is arranged so that the width direction is parallel to the discharge port array 83.

The first and second winding cores 34a and 34b are supported by struts (not shown) fixed on the mounting table 19 so that their longitudinal directions are parallel to the discharge port array 83, respectively. The direction in which the discharge port array 83 extends) can be rotated.
Both ends of the blotting cloth 32 are wound around the first and second winding cores 34a and 34b, respectively, and are held between the first and second winding cores 34a and 34b so as not to loosen. .

The length of the tensioner 31 in the longitudinal direction is formed longer than the length of the discharge port array 83 of each head 81, and the first and second winding cores 34a are arranged so that the longitudinal direction is parallel to the discharge port array 83. , 34b is disposed below the absorbent cloth 32.
A lifting device 33 fixed on the mounting table 19 is attached to the lower part of the tensioner 31. The lifting device 33 has a motor (not shown), and when receiving a signal from a control device (not shown), moves the tensioner 31 in the vertical direction with respect to the mounting table 19.

When the tensioner 31 is pressed against the head 81, the tensioner 31 is a cushioning material that deforms so as to be able to come into contact with a plurality of discharge ports 82 that are spaced apart from each other in the direction perpendicular to the discharge port array 83 within one head 81. Is formed.
After the cleaning device 30 is moved by the control device (not shown) so that the tensioner 31 is located directly below the head 81, the lifting device 33 is controlled to move the tensioner 31 vertically upward, and the blotting cloth on the tensioner 31 is moved. 32 is pressed against the bottom surface of the head 81. At this time, the blotting cloth 32 on the tensioner 31 is brought into contact with all the discharge ports 82 of one head 81.

For example, a Teflon sheet is processed on the surface of the tensioner 31 so that the blotting cloth 32 is slippery.
After the suction cloth 32 on the tensioner 31 is pressed against the bottom surface of the head 81, the first and second winding cores 34a and 34b are rotated in the same direction, and the suction cloth 32 on the tensioner 31 is discharged from the discharge port 82. The discharge liquid adhering to the surface can be scraped off.

Here, a solution is supplied from the outside to the inside 35 of the tensioner 31, and the wet solution is configured so that the solution oozes out from the small hole 36 provided on the surface of the tensioner 31 to the blotting cloth 32. . The wet wipe type removes clogging of the discharge port 82 after the discharge liquid dries.
However, the cleaning device 30 of the present invention is not limited to the wet wipe type, and may be a drive lot type that does not use a solution.

  After the discharge liquid that has adhered to the tray 12 after being discharged is removed from each discharge port 82 of one head 81, the elevating device 33 is controlled so that the tensioner 31 is moved vertically downward to absorb the discharge liquid. The contact between the cloth 32 and the discharge port 82 is released, and then the inspection apparatus 20 is moved below one discharge port 82 in the same head 81.

FIG. 3 is a side view of the inspection apparatus 20 for explaining the structure of the inspection apparatus 20.
The inspection apparatus 20 includes an illumination device 21 that irradiates the measurement object with illumination light 29 and an imaging device 22 that photographs the measurement object irradiated with the illumination light 29 by the illumination device 21.
The illuminating device 21 includes a light source 23 that generates and emits illumination light 29, and first reflecting means 24 a that reflects the illumination light 29 emitted from the light source 23 and returns the traveling direction of the illumination light 29. ing.

  Here, the light source 23 is disposed below the height at which the ejection port 82 of each head 81 is located, and the first reflecting means 24 a has at least a part of its reflection surface at the height of the ejection port 82 and the light source 23. It is located between the heights, and the reflecting surface is arranged so as to reflect the irradiation light 29 emitted from the lower light source 23 and transmit the light in the horizontal direction. Therefore, the illumination light 29 is emitted from the illumination device 21 in the horizontal direction.

The imaging device 22 reflects the light traveling in the horizontal direction and transmits the light downward, and is positioned below the second reflecting means 24b, and from the second reflecting means 24b. It has a camera 25 that receives the transmitted light and images it.
The imaging device 22 is positioned with respect to the illumination device 21 such that the second reflecting means 24b reflects the light emitted by the illumination device 21 and enters the camera 25. Accordingly, the horizontal illumination light 29 Is incident on the measurement object, the camera 25 captures an image of the illumination light 29 that has passed through the shadow of the measurement object or the measurement object.

The relative position of the illumination device 21 and the imaging device 22 is set so that the horizontal illumination light 29 transmitted and received between the illumination device 21 and the imaging device 22 is perpendicular to the direction in which the discharge port array 83 extends. Thus, the state is maintained and light can be transmitted below each head 81 by moving the mounting table 19.
The camera 25 is configured so that the focal point 28 is located at a position spaced apart from the lens on the front surface of the camera by a certain distance on the optical path. Located between.

  Here, the inspection apparatus 20 has an inspection case 26 formed of a light-shielding material, and the light source 23 and the camera 25 are arranged inside the inspection case 26. In this manner, the inspection housing 26 prevents the electronic device portions of the light source 23 and the camera 25 from getting wet with the discharge liquid. The inspection casing 26 prevents extra light from entering the light receiving portion of the camera 25 from the outside.

  The first and second reflecting means 24 a and 24 b are placed on the inspection housing 26 at positions just above the light source 23 and the camera 25, respectively. The portions directly below the first and second reflecting means 24a, 24b of the inspection housing 26 are formed so that the illumination light 29 can be transmitted.

  After the discharge liquid that has adhered after discharging the discharge liquid onto the tray 12 is removed from each discharge port 82 of one head 81, the mounting table 19 is moved on the stationary first moving table 15a. As a result, the inspection apparatus 20 is moved so that the focal point 28 of the camera 25 is positioned directly below one discharge port 82, and then the discharge liquid is discharged from the discharge port 82.

A concave drainage passage 27 is provided in a portion between the first and second reflecting means 24 a and 24 b on the surface facing the inspection casing 26. The drainage passage 27 is configured to receive the droplet of the discharge liquid that falls on the inspection casing 26 and to discharge the other portion of the maintenance device 10 toward the tray 12 so as not to be contaminated with the discharge liquid.
When the discharge liquid is discharged from the discharge port 82 directly above the focal point 28, the illumination light 29 is emitted from the illumination device 21 to the droplet flying downward, and the droplet irradiated with the illumination light 29 is imaged. 22 is photographed, and the photographed image is recorded in a control device (not shown).

For example, data on droplets ejected from the normal ejection port 82 are set in advance, and the quality of the ejection port 82 is determined by comparing the captured image with this set value.
Judgment criteria include, for example, the shape, size, position (velocity), flight direction, and presence / absence of separated droplets during the flight.

  The result of pass / fail of the discharge ports 82 is stored in a control device (not shown), and then the focal point 28 of the camera 25 is moved directly below the adjacent discharge ports 82 in the same discharge port array 83 of the same head 81. Repeat the inspection.

When the inspection of all the ejection ports 82 in one ejection port array 83 of one head 81 is completed, the focal point 28 is placed directly below one ejection port 82 in the ejection port array 83 adjacent to the same head 81 in the Y direction. The inspection of the discharge port 82 is repeated in the adjacent discharge port array 83.
When the inspection of all the discharge ports 82 of one head 81 is completed, if there are one or more defective discharge ports 82, the cleaning device 30 is moved again below the same head 81 to remove the deposits on the discharge ports 82. Wipe off with the blotting cloth 32, and then move the focal point 28 of the camera 25 to the defective ejection port 82 to inspect again.
When the inspection result of all the discharge ports 82 of one head 81 becomes good, the maintenance device 10 is moved below the head 81 adjacent in the X direction, and the discharge port 82 of the head 81 is as described above. Have cleaning and inspection done.

  Or, even if cleaning and inspection of the discharge port 82 are repeated a predetermined number of times with the same head 81, if one or more defective discharge ports 82 remain, the head 81 is inspected after all the heads 81 have been inspected as will be described later. In order to replace the head 81, the position of the head 81 is stored in the control device, and then the maintenance device 10 is moved below the head 81 adjacent in the X direction in the same manner as described above, and the discharge port of the head 81 is changed. 82 is cleaned and inspected as described above.

After the inspection of all the heads 81 arranged in the X direction is completed, the maintenance device 10 is moved below the head 81 adjacent in the Y direction, and the same operation is performed on the head 81 and all the heads 81 arranged in the X direction. repeat.
After all the heads 81 held by the head holding unit 80 have been cleaned and inspected, the heads 81 having defective ejection ports 82 that could not be recovered are replaced with inspected spare heads 81.

  Next, the maintenance device 10 is moved to the opposite side to the substrate moving unit 90 with respect to the head holding unit 80, the maintenance device 10 is taken out from below the head holding unit 80, and then the discharge process to the substrate 95 is resumed.

DESCRIPTION OF SYMBOLS 10 ... Maintenance apparatus 14a, 14b ... 1st, 2nd sub rail 15a, 15b ... 1st, 2nd moving stand 16a, 16b ... 1st, 2nd sub moving device 19 ... Mounting stand DESCRIPTION OF SYMBOLS 20 ... Inspection apparatus 21 ... Illumination device 22 ... Imaging device 23 ... Light source 24a, 24b ... First and second reflection means 25 ... Camera 28 ... Focus 29 ... Illumination light 30 ... Cleaning device 32 …… absorbing cloth 33 …… lifting device 70 …… discharging device 72 …… main rail 75 …… main moving device 80 …… head holding portion 81 …… head 82 …… discharging port 91 …… substrate mounting table 95 …… substrate

Claims (10)

A substrate mounting table on which a substrate is mounted is placed on a horizontally fixed main rail, the substrate mounting table is moved along the main rail, and passes under the head holding unit, and is provided in the head holding unit. A maintenance device that moves along the main rail of a discharge device that discharges droplets of discharge liquid from the discharge ports of a plurality of heads onto the substrate on the substrate mounting table,
The maintenance device is
A first moving platform mounted on the main rail;
A main moving device for moving the first moving table along the main rail;
A mounting table disposed on the first moving table;
A sub-movement mechanism for moving the mounting table on the first moving table;
An inspection device placed on the mounting table, and
Have
The inspection device includes:
An illumination device that irradiates illumination light toward the measurement object;
An imaging device for imaging the measurement object irradiated with the illumination light;
Have
Moving the first moving table below the head holding portion to be stationary; moving the mounting table on the first moving table in a state where the first moving table is stationary; and Is arranged on the flight path of the droplets ejected from the ejection ports of the head,
The illumination device irradiates the illumination light toward the droplet from a side of a flight path of the droplet to be photographed,
The imaging device is a maintenance device configured to perform imaging at a position where the illumination light irradiated toward the droplet to be imaged is incident.   The maintenance device according to claim 1, further comprising: a control device that determines whether the discharge port from which the droplet has been discharged is good or bad based on a result of photographing the droplet. The sub-movement mechanism is
A linear first sub-rail fixed on the first moving table;
A second moving table placed on the first sub-rail between the mounting table and the first moving table;
A first sub moving device for moving the second moving table on the first moving table along the first sub rail;
A linear second sub-rail fixed on the second moving table;
A second sub moving device for moving the mounting table on the second moving table along the second sub rail;
Have
Either one of said 1st subrail and said 2nd subrail is arrange | positioned in parallel with the said main rail, and the other is arrange | positioned perpendicularly and horizontally with respect to the said main rail. The maintenance device according to item 1. The illumination device reflects a light source that generates the illumination light and the illumination light that is transmitted upward from a lower position, transmits the illumination light horizontally, and irradiates the droplet to be measured. One reflection means,
The imaging device receives the measurement light irradiated toward the droplet and receives the illumination light transmitted from the second reflection unit and the second reflection unit that transmits the measurement light downward. The maintenance device according to any one of claims 1 to 3, further comprising a camera that captures an image. The maintenance device according to any one of claims 1 to 4,
A cleaning device having a blotting cloth that absorbs the discharged liquid and a lifting device that moves the blotting cloth in the vertical direction is provided on the mounting table,
Moving the first moving table below the head holding unit to be stationary; moving the mounting table on the first moving table in a state where the first moving table is stationary; and the cleaning device. Is placed below the head,
The cleaning device is a maintenance device that removes the discharge liquid adhering to the discharge port by bringing the blotting cloth into contact with the discharge port. A substrate mounting table on which a substrate is mounted is placed on a horizontally fixed main rail, the substrate mounting table is moved along the main rail, and passes under the head holding unit, and is provided in the head holding unit. A discharge device that discharges liquid droplets of discharge liquid from the discharge ports of the plurality of heads onto the substrate on the substrate mounting table,
The discharge device has a maintenance device that moves along the main rail,
The maintenance device is
A first moving platform mounted on the main rail;
A main moving device for moving the first moving table along the main rail;
A mounting table disposed on the first moving table;
A sub-movement mechanism for moving the mounting table on the first moving table;
An inspection device placed on the mounting table;
Have
The inspection device includes:
An illumination device for irradiating illumination light toward the measurement object;
An imaging device for imaging the measurement object irradiated with the illumination light;
Have
Moving the first moving table below the head holding unit to be stationary; moving the mounting table on the first moving table while the first moving table is stationary; and Is arranged on the flight path of the droplets ejected from the ejection ports of the head,
The illumination device irradiates the illumination light toward the droplet from a side of a flight path of the droplet to be photographed,
The said imaging device is a discharge device comprised so that it might image | photograph in the position where the said illumination light irradiated toward the said droplet to image | photograph enters.   The discharge device according to claim 6, wherein the maintenance device is provided with a control device that determines the quality of the discharge port from which the droplet has been discharged, based on a result of photographing the droplet. The sub-movement mechanism is
A linear first sub-rail fixed on the first moving table;
A second moving table placed on the first sub-rail between the mounting table and the first moving table;
A first sub moving device for moving the second moving table on the first moving table along the first sub rail;
A linear second sub-rail fixed on the second moving table;
A second sub moving device for moving the mounting table on the second moving table along the second sub rail;
Have
Either one of said 1st subrail and said 2nd subrail is arrange | positioned in parallel with the said main rail, The other is arrange | positioned perpendicularly and horizontally with respect to the said main rail. 2. A discharge device according to item 1. The illumination device reflects a light source that generates the illumination light and the illumination light that is transmitted upward from a lower position, transmits the illumination light horizontally, and irradiates the droplet to be measured. One reflection means,
The imaging device receives the measurement light irradiated toward the droplet and receives the illumination light transmitted from the second reflection unit and the second reflection unit that transmits the measurement light downward. The ejection device according to claim 6, further comprising a camera that captures an image. The discharge device according to any one of claims 6 to 9,
The maintenance device has a cleaning device having a blotting cloth that absorbs the discharged liquid and a lifting device that moves the blotting fabric in a vertical direction,
The cleaning device is provided on the mounting table,
Moving the first moving table below the head holding unit to be stationary; moving the mounting table on the first moving table in a state where the first moving table is stationary; and the cleaning device. Is placed below the head,
The cleaning device is a discharge device that removes the discharge liquid adhering to the discharge port by bringing the blotting cloth into contact with the discharge port.

Images