TWI400349B - Magnetic loop device for magnetron sputtering - Google Patents

Description

Magnetic circuit device for magnetron sputtering and manufacturing method thereof

The present invention relates to a magnetic circuit device mounted on a magnetron sputtering apparatus for forming a thin film on a surface of a substrate, and a method of manufacturing the same.

The magnetron sputtering apparatus has a target disposed opposite to the substrate on the anode side in the vacuum processing chamber, a magnetic circuit device disposed behind the target, and a high frequency connected to the target by the target being a cathode power supply. After introducing an inert gas of 10 ^-1 ~10 ^-3 Torr (13.33~0.13pa) in a vacuum processing chamber, a glow discharge is caused by applying a voltage between the substrate (anode) and the target (cathode), and the inert gas is generated. The gas is ionized, and the magnetic field is applied at a right angle to the secondary electron emitted from the target, and the cycloidal motion is performed on the surface of the target, and ionization is promoted by collision with the gas molecule, and the target material is a neutral atom. Stacked (thinned) on the substrate. Since the magnetron sputtering device has a high film formation speed and does not cause electrons to strike the substrate, it can be formed at a low temperature, and further, it is widely used in the process of semiconductor ICs because of its excellent reproducibility to form various alloy films. For other purposes.

In the magnetron sputtering apparatus, the discharge is concentrated in the central portion of the target orthogonal to the electric field and the magnetic field, and is significantly sputtered in this portion, so that the surface of the target is not uniform after sputtering for a long period of time. Therefore, the entire magnetic circuit device disposed on the back surface of the target is usually moved back and forth.

A sputtering film forming apparatus including a magnetron cathode to which a target is mounted, which is disposed on a wall portion of a vacuum container to which an internal substrate is transported, and a magnetron magnetic tube, is disclosed in Japanese Laid-Open Patent Publication No. Hei 10-46334. a loop device that is located on the back of the cathode of the magnetron in such a manner as to form a closed loop magnetic field on the surface of the target a first mechanism that is parallel to the target and that swings the magnetic circuit device in the substrate transport direction; and a second mechanism that is parallel to the target and that swings the magnetic circuit device in a direction perpendicular to the substrate transport direction. The magnetron magnetic circuit device disclosed in Japanese Patent Laid-Open No. Hei 10-46334 has a rod-shaped central magnet; a rectangular outer peripheral magnet that is magnetized in a manner opposite to the center magnet; and supports the magnets Flat yoke plate.

Japanese Laid-Open Patent Publication No. 2000-248360 discloses a magnetron sputtering apparatus comprising: a film forming chamber (first vacuum chamber) provided with a substrate and a target opposite thereto, and is provided with a tunnel shape on the surface of the target A magnetic chamber (second vacuum chamber) of a magnetic field generating mechanism of a Poloidal magnetic field, and a driving device that moves the magnetic field generating mechanism back and forth in parallel with the target. In the vicinity of the magnetic field generating mechanism, a backing plate and a target are arranged in sequence, and the backing plate is connected to a power source for applying a negative potential. The magnetic field generating mechanism generates a high-density plasma on the surface of the target by means of the backing plate and the power source.

In order to speed up the film formation speed of the substrate, it is necessary to shorten the distance from the surface of the self-magnetic circuit device (the surface of the permanent magnet) to the target surface to increase the strength of the magnetic field generated on the surface of the target. However, when the distance between the magnetic circuit device and the target is narrowed, when the permanent magnet interferes with the back plate (or cathode) on the back surface of the target, the permanent magnet may fall off and the edge portion may be damaged. In addition, in the combined operation of the magnetic circuit device, and the magnetic circuit device is transported or mounted in the magnetron sputtering device, the permanent magnet collides with other members due to the packing condition and the processing error, and the permanent magnet is caused. The problem of falling off or partially broken.

Generally, as described in Japanese Laid-Open Patent Publication No. 2000-248360, the permanent magnet in the magnetic field generating mechanism is fixed to the yoke by a bonding agent. but When the cement is hardened or hardened to generate an out gas (molecular weight of 300 or less), the surface of the magnetic circuit device is contaminated, which is a cause of defective products. When the permanent magnet that has fallen off or is damaged is replaced with a sound permanent magnet, it is necessary to peel off the bonding agent. Therefore, it is necessary to heat the entire magnetic circuit device to a temperature higher than the glass transition temperature (for example, 150 to 200 ° C) of the resin of the main component of the bonding agent. Therefore, it is not possible to disassemble only the damaged permanent magnet, but to disassemble all the permanent magnets. In particular, since a large-scale sputtering apparatus has a plurality of magnetic circuit devices of permanent magnets (for example, more than 100), the replacement cost of the permanent magnets is quite high in consideration of the working hours.

Therefore, when the permanent magnet is fixed by mechanical means such as a bolt, there is a problem in that sufficient combination accuracy cannot be obtained as described in Japanese Patent Laid-Open No. Hei 10-317137 and No. Hei 11-36068.

Accordingly, an object of the present invention is to provide a magnetic circuit device for magnetron sputtering which can accurately and detachably mount a permanent magnet and which does not fall off and break the permanent magnet during use, and a method of manufacturing the same.

In view of the positive research results of the above purposes, it is found that at least one permanent magnet can be mounted on the protective cover member and mechanically fixed to the magnetic circuit device for magnetron sputtering, and the permanent magnet can be accurately and detachably mounted. It is fixed to the magnetic circuit device, and the permanent magnet does not fall off and be damaged during use. Further, since the bonding agent is not used, deflation does not occur, and the present invention is conceivable.

Therefore, the magnetic circuit device for sputtering of the first magnetron of the present invention is characterized in that it has an inner permanent magnet row which is connected to a plurality of rectangular parallelepiped in a straight line shape with a magnetic pole of a predetermined polarity. Formed by a magnet; an outer permanent magnet row, which is formed by enclosing the inner permanent magnet row, and having a plurality of rectangular permanent magnets connected to the magnetic poles of opposite polarities of the inner permanent magnet rows; a yoke plate capable of detachably holding the inner permanent magnet row and the permanent magnet of the outer permanent magnet row; and the cross section is substantially a non-magnetic protective cover member that covers at least one of the permanent magnets one by one; each protective cover member includes: a first side plate portion covering one side of the permanent magnet and mechanically fixed to the yoke plate a second side plate portion covering the other side surface of the permanent magnet; and an upper plate portion integrally connecting the side plate portions; and firmly holding the permanent magnet by the plate portions on both sides of each protective cover member .

In the above magnetic circuit device, it is preferable that the yoke plate has a concave portion that receives the rectangular magnet in a rectangular parallelepiped shape. The concave portion that receives the permanent magnet constituting the inner permanent magnet row is a central groove, and the concave portion that receives the permanent magnet constituting the outer permanent magnet row is an outer circumferential step.

In the magnetic circuit device, it is preferable that the first side plate portion of the protective cover member has a flange portion having at least one opening portion, and the lower end portion of each permanent magnet is disposed in the recess portion of the yoke plate. The flange portion is fixed to the yoke plate by a bolt that is engaged with the opening.

The magnetic circuit device for sputtering a second magnetron of the present invention is characterized in that: the yoke plate has thereon: a central groove that receives the inner permanent magnet row, and a peripheral segment difference of the outer permanent magnet row; and has a side surface water a flat groove, wherein the first side plate portion of each of the protective cover members of the outer permanent magnet row has a flange portion having at least one opening portion at a position in contact with the upper surface of the yoke plate, and the second side plate portion has Arriving at the length of the horizontal groove, and having an inner protrusion at the front end, whereby the inner side protrusion is joined to the horizontal groove, and the permanent magnet is disposed in a state in which the outer circumference is in a difference, the first side plate portion The outer flange portion is fixed to the yoke plate by a bolt that is engaged with the opening.

The inner surface of the upper plate portion of the protective cover member may be provided with a protruding portion that abuts against the upper surface of the permanent magnet.

The magnetic circuit device for sputtering a third magnetron according to the present invention is characterized in that it has an inner permanent magnet row which is connected to a plurality of rectangular permanent magnets which are linearly arranged in a manner of a magnetic pole of a predetermined polarity. Forming; an outer permanent magnet row surrounding the inner permanent magnet row, having a plurality of rectangular parallelepiped magnets connected to the magnetic poles of opposite polarities of the inner permanent magnet rows; a yoke plate, The inner permanent magnet row and the outer permanent magnet row permanent magnet are detachably held; the spacer is disposed between the inner permanent magnet row and the outer permanent magnet row; and the cross section is substantially a non-magnetic protective cover member having a shape that covers at least one of the permanent magnets one by one; each of the protective cover members of the inner permanent magnet row includes: a first side plate portion covering one side of the permanent magnet, and mechanically Fixed to the yoke plate; the second side plate portion covers the other side surface of the permanent magnet; and the upper plate portion integrally connects the side plate portions; the protective cover members of the outer permanent magnet row include: a side plate portion having a length covering at least a portion of one side surface of the permanent magnet and a side surface of the yoke plate, and is mechanically fixed to the yoke plate; and a second side plate portion covering the permanent magnet The other side surface; and the upper plate portion integrally connect the side plate portions; and the permanent magnets are firmly held by the side plate portions of the respective cover members.

In the magnetic circuit device for sputtering of the third magnetron, the yoke plate preferably has a central groove of the permanent magnet that receives the rectangular shape of the inner permanent magnet, and has a rectangular parallelepiped shape for receiving the outer permanent magnet. The first side plate portion of each of the protective cover members of the inner permanent magnet row has at least one outer flange portion, and the first side plate of each of the outer permanent magnet rows of the protective cover member is different from the outer circumference of the permanent magnet. The end portion has at least one opening portion before the contact with the side surface of the yoke plate, and the first side plate portion is disposed in a state where the lower end portion of each permanent magnet is disposed in the groove or the step of the yoke plate. The yoke plate is fixed to the yoke plate by a bolt that is engaged with the opening. Preferably, the first side plate portion of each of the protective cover members of the inner permanent magnet row has a notch that receives the spacer.

In any of the magnetic circuit devices for magnetron sputtering, the protective cover member is preferably formed of an elastically deformable non-magnetic metal plate. Further, the width W _P of the magnetic pole surface of the permanent magnet and the inner wall width W _O of the open end of the side plate portions of the protective cover member and the inner wall width W _{D of the} upper plate portion are preferably W _D >W _P > W _O relationship.

The method for manufacturing the first magnetic circuit device for magnetron sputtering of the present invention is detachably assembled on a yoke plate: an inner permanent magnet row having a magnetic pole of a specified polarity thereon a plurality of straight-shaped permanent magnets connected in a straight line; and an outer permanent magnet row surrounding the inner permanent magnet row and having a magnetic pole having a polarity opposite to that of the inner permanent magnet row Formed by a plurality of parallel-shaped permanent magnets; characterized in that: (a) the production profile is approximately a first and second non-magnetic protective cover member having a shape, a first side plate portion having a joint portion with the yoke plate, a second side plate portion facing the first side plate portion, and integrally (b) by inserting at least one permanent magnet magnetized in the height direction into the first protective cover member so that the upper plate portion side has the same polarity, and is formed. (c) inserting at least one permanent magnet magnetized in the height direction into the second protective cover member so that the upper plate portion side has a polarity opposite to that of the first magnet assembly; And forming a second magnet assembly; (d) mechanically fixing the first and second magnet assemblies to the yoke plate, respectively.

In the method of manufacturing a magnetic circuit device, it is preferable that the yoke plate has a concave portion that receives the rectangular magnet in a rectangular parallelepiped shape. The concave portion that receives the permanent magnet constituting the inner permanent magnet row is preferably a central groove, and the concave portion that receives the permanent magnet constituting the outer permanent magnet row is preferably a peripheral step.

In the method of manufacturing the magnetic circuit device, it is preferable that the first side plate portion of the protective cover member has a flange portion having at least one opening portion, and the lower end portion of each permanent magnet is disposed in the concave portion of the yoke plate. Next, the flange portion is fixed to the yoke plate by a bolt that is engaged with the opening.

The method for manufacturing the second magnetic tube sputtering magnetic circuit device of the present invention is characterized in that the yoke plate has a central groove and an outer peripheral step on the upper surface and a horizontal groove on the side surface, and the second non-magnetic protective cover member has a cross section. Roughly a shape including: a first side plate portion having an outer flange portion having a joint portion with the yoke plate; and a second side plate portion facing the first side plate portion (having reaching the horizontal groove) a length, and an inner protruding portion at the front end; and integrally connecting the upper plate portion upper plate portion; and the inner protruding portion of the second side plate portion of the second magnet assembly is joined to the yoke The horizontal groove of the plate is disposed in a state in which the permanent magnet is disposed in the outer peripheral step, and the outer flange portion of the first side plate portion is mechanically fixed to the yoke plate.

A method of manufacturing a magnetic circuit device for a third magnetron sputtering according to the present invention is detachably combined on a yoke plate via a spacer: an inner permanent magnet row having a specified polarity thereon a plurality of rectangular permanent magnets formed in a linear manner by a magnetic pole; and an outer permanent magnet row surrounding the inner permanent magnet row having an opposite polarity to the magnetic pole of the inner permanent magnet row a plurality of rectangular parallelepiped magnets connected in a magnetic pole manner; characterized in that: (a) the cross section is substantially a first non-magnetic protective cover member having a shape, a first side plate portion having a joint portion with the yoke plate, a second side plate portion facing the first side plate portion, and integrally connecting the side plates Upper part of the board; and the production section is roughly a second non-magnetic protective cover member comprising: a first side plate portion having a length reaching the yoke plate and having a front end portion having a joint portion with at least one of the yoke plates, and the first side plate portion The second side plate portion and the upper plate portion upper plate portion are integrally connected to each other; (b) the height is inserted into the first protective cover member at a height such that the upper plate portion side has the same polarity Inserting at least one permanent magnet magnetized in the direction to form a first magnet assembly; (c) inserting the second protective cover member in such a manner that the upper plate portion side has a polarity opposite to that of the first magnet assembly a second magnet assembly that is magnetized in the height direction to form a second magnet assembly; (d) mechanically fixing the spacer on the yoke plate; (e) the first magnet via the first side plate portion The assembly is mechanically fixed to the yoke plate; (f) the second magnet assembly is mechanically fixed to the yoke plate via the first side plate portion.

A suitable method for manufacturing a magnetic circuit device for sputtering a third magnetron is detachably combined by a yoke plate having a central groove extending in a specified direction and a peripheral segment via a spacer: the inner permanent a row of magnets formed by a plurality of rectangular permanent magnets connected in a straight line with a magnetic pole of a specified polarity; and an outer permanent magnet row enclosing the inner permanent magnet row, having an upper permanent magnet row thereon a plurality of rectangular parallelepiped permanent magnets connected to the magnetic poles of opposite polarities of the inner permanent magnet rows; characterized in that: (a) the cross section is substantially a first non-magnetic protective cover member having a shape, comprising: a first side plate portion having an outer flange portion, the outer flange portion having at least one opening portion; and a second side plate portion facing the first side plate portion; And integrally connecting the upper plate portions of the upper plate portions; and the production profile is substantially a second non-magnetic protective cover member comprising: a first side plate portion having a length reaching the yoke plate and having at least one opening portion at a front end portion, and a second side plate opposite to the first side plate portion And (b) inserting at least one of the magnetization in the height direction in the first protective cover member so that the upper plate portion side has the same polarity. a permanent magnet to form a first magnet assembly; (c) inserting at least a magnetization in the height direction in the second protective cover member by the opposite polarity of the upper plate portion side from the first magnet assembly a permanent magnet to form a second magnet assembly; (d) mechanically fixing the spacer on the yoke plate; (e) a state in which the permanent magnet of the first magnet assembly is disposed in the central groove And fixing the first magnet assembly to the yoke plate by a bolt that is engaged with the opening of the outer flange portion; (f) arranging the permanent magnet of the second magnet assembly on the outer circumference segment Under the state, by the bolt engaging portion of the opening portion of the first side plate, whereas the second magnet assembly is fixed to the yoke plate.

In the method of manufacturing a magnetic circuit device for sputtering a third magnetron, the first protective cover member preferably has a notch that receives the spacer at least in the first side plate portion, and the spacer enters the notch. The aforementioned first magnet assembly is fixed to the yoke plate.

The magnetic circuit device for magnetron sputtering according to the present invention will be described in detail below with reference to the accompanying drawings. In each of the drawings, members having the same function are denoted by the same reference number (or the same reference number as the last two digits).

[1] Magnetic circuit device for magnetron sputtering

(1) First form

As shown in Fig. 1, the magnetic circuit device 1 includes a flat yoke plate 2 having substantially semicircular ends at both ends in the longitudinal direction, and is mechanically fixed to the inner permanent magnet row 3 and the outer permanent magnet row on the upper surface of the yoke plate 2. 4. As shown in FIGS. 2 to 4, the inner permanent magnet row 3 is linearly connected to the magnetic pole (for example, the S pole) having a predetermined polarity thereon, and is linearly connected in advance in the height direction. A number of permanent magnets 30, such as a rectangular parallelepiped. The lower end portions of the permanent magnets 30 are held on the yoke plate 2 in the central groove 21 formed in the longitudinal direction. At least one permanent magnet 30 is covered by the non-magnetic protective cover member 31, and each protective cover member 31 is mechanically fixed to the upper surface of the yoke plate 2 by screwing a bolt (hereinafter simply referred to as "bolt") 5 or the like.

As shown in FIG. 5, each of the protective cover members 31 includes: one side surface covering the permanent magnet 30, and is mechanically fixed to the first side plate portion 31a of the yoke plate 2, covering the second side of the other side of the permanent magnet 30 The side plate portion 31b and the upper plate portion 31a, 31b upper plate portion 31c are integrally connected, and the first side plate portion 31a has an outer flange portion 31e having at least one opening portion 31d, and the outer flange portion 31e is engaged with the opening portion 31d. The bolt 5 is fixed to the yoke plate 2. The opening portion 31d is a through hole that can be inserted into the screw portion of the bolt 5.

In order to cover both sides by respective protective member 31 of the plate portion 31a, 31b securely clamp the permanent magnets 30, should the upper plate portion 31c of the inner wall of both sides of the plate width W _D creation portion 31a of the member 31 than the protective cap, 31b of the opening The inner wall of the end is wider W _O , specifically, the width W _D is slightly larger than the width W _{P of the} permanent magnet 30, such as forming 0 < W _{D -} W _P ≦ 0.05 mm, so that the width W _{O is} longer than the permanent magnet 30 The width W _{P is} slightly smaller, such as forming 0 < W _{P -} W _O ≦ 0.1 mm. Therefore, the system W _D > W _P > W _O , and W _{D -} W _{O is at} most 0.15 mm. Thus, by setting W _D and W _O , the permanent magnet 30 can be firmly held without adverse effects. Further, when the permanent magnet 30 is inserted, in order to prevent damage at the edge of the opening, as shown in Fig. 5(c), the front end portion 31g of the second side plate portion 31b may be slightly enlarged.

The height H from the bottom surface of the outer flange portion 31e to the inner surface of the upper plate portion 31c is the same as or slightly larger than the height H _P of the ground portion of the permanent magnet 30 (exposed above the yoke plate 2). It should be set to HH _P = 0~0.1mm. Further, as shown in Fig. 2, when the permanent magnet 30 is fitted into the center groove 21, it is preferable that the second side plate portion 31b has a length at which the lower end is slightly higher than the upper surface of the yoke plate 2.

The length L of the protective cover member 31 (see Fig. 6) is preferably set to be the same as or slightly shorter than the length L _P of the permanent magnet 30 when the permanent magnet 30 is housed (see Fig. 12). When the permanent magnet is 30, it should be set to 2L _P or slightly shorter (refer to Fig. 13). Although the corner portion of the protective cover member 31 is rounded, in order to enlarge the contact area between the inner surface of the protective cover member 31 and the outer surface of the permanent magnet 30, the curvature of the inner peripheral corner portion of the protective cover member 31 is preferably 0.5 mm or less.

As shown in FIGS. 2 to 4, the outer permanent magnet row 4 is connected to the inner permanent magnet row 3 so as to be magnetized in the opposite direction to the permanent magnet 30 (in the example shown, the upper side is the N pole). The permanent magnets 40, the lower ends of the permanent magnets 40 are held at a circumferential difference 22 formed outside the yoke plate 2. At least one permanent magnet 40 is firmly held by the non-magnetic protective cover member 41, and the outer flange portion 41e of each protective cover member 41 is mechanically fixed to the yoke plate 2 by the bolt 5. The shape of the protective cover member 41 for holding the permanent magnet 40 is the same as that of the protective cover member 31 except that the permanent magnet 40 is thicker than the permanent magnet 30 and the inner wall is wide, and therefore the description thereof will be omitted. However, as shown in Fig. 1, the protective cover member 41 attached to the vicinity of both end portions of the yoke plate 2 preferably has a shape covering substantially the entire surface of each of the permanent magnets 40. Of course, in order to firmly hold the permanent magnet 40, it is also the same as the protective cover member 31, and it is preferable to satisfy the relationship of W _D , W _P and W _O .

The permanent magnets 30, 40 themselves may be well-known. For low-cost devices, ferrite sintered magnets should be used. In addition, rare earth magnets should be used for high-priced devices that generate strong magnetic fields on the surface of the target. In order to use R ₂ T ₁₄ B (R or more of one or more rare earth elements containing Y, it must be at least one selected from the group consisting of ruthenium, osmium, iridium, and osmium, and T is iron or iron and cobalt) as a main phase. An anisotropic RTB based sintered magnet. Since the temperature of the substrate rises during film formation, the temperature of the vacuum chamber provided with the magnetic circuit device also rises. Therefore, it is particularly preferable to use a heat-resistant anisotropic RTB-based sintered magnet having a coercive force Hcj of 1193 kA·m ^-1 or more.

The yoke plate 2 contains a ferromagnetic metal such as iron or steel in order to form a magnetic circuit. However, it is preferably a rolled steel material (SS40 or the like) for general construction or a Marteusite stainless steel (SUS403 or the like).

The protective cover members 31, 41 must be non-magnetic to prevent short-circuiting of the magnetic beams generated from the permanent magnets 30, 40. The protective cover members 31, 41 may also be formed of a plastic material such as FRP, but it is still preferable to use an elastically deformable, highly durable austenite stainless steel (such as SUS304) or an aluminum alloy (such as A6063). The metal plate is formed by press working or extrusion processing. The thickness of the protective cover members 31, 41 should be appropriately set depending on the material and size of the permanent magnets 30, 40. When the anisotropic R-T-B sintered magnet is covered with a protective cover member made of metal, the thickness is preferably 3 mm or less, and particularly preferably 0.5 to 2 mm, in order to facilitate elastic deformation.

(2) The second form

The shape of the protective cover member is not limited to the above, and may be the shape shown in Fig. 7. In Fig. 7, the same reference numerals are used for the same functions as those of the first to sixth figures (or the same two digits are the same). In the example shown in Fig. 7, the yoke plate 2 has a central groove 21 on the upper side of the permanent magnet row 30 and a peripheral portion 22 on the outer permanent magnet row 40, and on the side, The lower portion of the outer peripheral step 22 has a horizontal groove 23, and the protective cover member 141 has a first side plate portion 141a having an outer flange portion 141e having at least one opening at a position contacting the upper surface of the yoke plate 2 a second side plate portion 141b that passes over the lower end of the permanent magnet 40 and reaches the horizontal groove 23, and has an inner protrusion portion 141f at the front end; and an upper plate portion 141c that integrally connects the side plate portions 141a, 141b . The inner protruding portion 141f can be formed by bending the front end portion of the second side plate portion 141b at a right angle to the inner side. When the inner protruding portion 141f is joined to the horizontal groove 23 and the permanent magnet 40 is placed in the outer peripheral step 22, the outer side flange portion 141e of the first side plate portion 141a is engaged by the screw 5 that is engaged with the opening portion 141d. It is fixed to the yoke plate 2. By forming the shape in which the inner protruding portion 141f is joined to the horizontal groove 23, the permanent magnet 40 can be more firmly fixed to the yoke plate 2, so that the thickness of the protective cover member 141 can be reduced.

(3) The third form

In the example shown in Fig. 8, the inner surface of the upper plate portion 241c of the protective cover member 241 is provided with a projection 241g that abuts against the upper surface of the permanent magnet 40. As shown in FIG. 8(b), the protruding portion 241g extends in the longitudinal direction of the protective cover member 241. The protrusion 241g can be formed by a method such as embossing. By this shape, the permanent magnet 40 inserted into the protective cover member 241 is attached to the outer peripheral step 22 of the yoke plate 2, and when the protective cover member 241 is screwed to the yoke plate 2, the permanent magnet 40 is used to protect the cover member 241. The pressing is performed downward, so that the permanent magnet 40 can be more firmly fixed to the yoke plate 2.

(4) The fourth form

In the magnetron sputtering device, the width of the magnetic circuit device is set to be 170 to 200 mm, however, in order to sputter the target surface as uniformly as possible, The utilization efficiency of the target is improved, and it is preferable to form a structure in which a plurality of (for example, 12 or 14) magnetic circuit devices having a narrow width such as 100 to 120 mm are arranged. In the narrow magnetic circuit device, since the target material (such as a non-magnetic metal) needs to have a high magnetic flux density on the surface of the target, as shown in Fig. 9, the permanent magnet having a large width is reviewed 30, 40. Fixed to the yoke plate 2.

The magnetic circuit device for magnetron sputtering according to the fourth aspect shown in Fig. 9 has a structure in which a thick permanent magnet is provided at a narrow interval, so that a strong magnetic attraction force is generated between the permanent magnet 30 and the permanent magnet 40. It is necessary to provide a spacer 6 containing a non-magnetic material between the inner permanent magnet row 3 and the outer permanent magnet row 4. In order to secure the space for the spacers 6, the second side plate portions of the protective cover members 331, 441 are shortened, and the entire protective cover members 331, 441 are formed in an L-shape. Word shape.

As shown in FIG. 9 and FIG. 11(a), the protective cover member 331 of the inner permanent magnet row 3 includes: a first side plate portion 331a having a substantially The shape of the cross section covers one side of the permanent magnet 30, the second side plate portion 331b covering the other side of the permanent magnet 30, and the upper plate portion 331a, 331b upper plate portion 331c. The first side plate portion 331a has an outer flange portion 331e at its distal end, and a notch 331f for receiving the spacer 6 is provided in the first side plate portion 331a and the outer flange portion 331e, and a bolt opening portion 331d is provided in the outer flange portion 331e. The second side plate portion 331b is shortened to the height of the spacer 6. Since the protective cover member 331 prevents interference with the spacer 6 by the notch 331f and the short second side plate portion 331b, the inner permanent magnet row 3 and the outer permanent magnet row 4 can be provided at a narrow interval.

As shown in FIG. 9 and FIG. 11(a), the protective cover member 341 of the outer permanent magnet row 4 includes a first side plate portion 341a having a shape close to an L shape. The shape of the cross section covers one side of the permanent magnet 40; the second side plate portion 341b covering the other side of the permanent magnet 40; and the upper plate portion 341a, 341b upper plate portion 341c. The first side plate portion 341a has a length covering at least a part of the side surface of the yoke plate 2, and has an opening portion 341d for the bolt 52 at the front end portion. The second side plate portion 341b is shortened to the height of the spacer 6. Since the protective cover member 341 is coupled to the side surface of the yoke plate 2 at the lower end portion of the first side plate portion 341a, the permanent magnet 40 can be firmly fixed to the yoke plate 2.

Further, since the fourth embodiment covers at least the upper portions of the permanent magnets 30, 40 with the protective cover members 331, 341, the chance of breakage due to interference (collision) of the permanent magnets 30, 40 and other members can be greatly reduced, and in addition, the permanent magnets 30 are provided. The angle between the 40 and the yoke plate 2 is maintained at a right angle to prevent the permanent magnets 30, 40 from tilting. Further, since the protective cover member 341 attached to the outer peripheral side of the yoke plate 2 does not have the outer flange portion, the distance between the permanent magnet 30 and the permanent magnet 40 (for example, 5 to 15 mm) can be reduced.

Fig. 10(b) shows another example of the protective cover member of the inner permanent magnet row 3. In addition to the first side plate portion 431a, the second cover portion 431b is provided with cutouts 431f, 431g for receiving the spacers 6, 6, and the second side plate portion 431b extends to the vicinity of the upper surface of the yoke plate 2. With this configuration, the exposed portion of the permanent magnet 30 is reduced, so that the damage of the permanent magnet 30 can be greatly reduced. Further, by joining the spacers 6, 6 to the notches 431f, 431g, even when the spacers 6, 6 are fixed by one bolt 51, it is ensured that the spacers 6, 6 are parallel to the inner permanent magnet row 3 degree.

Fig. 11(b) shows another example of the protective cover member of the outer permanent magnet row 4. The second side plate portion 441b of the protective cover member 441 has a spacer The notch 441f of 6 extends to the vicinity of the upper surface of the yoke plate 2. With this configuration, the exposed portion of the permanent magnet 40 is reduced, so that the damage of the permanent magnet 40 can be greatly reduced. Further, by joining the spacer 6 to the notch 441f, even when the spacer 6 is fixed by one bolt 51, the parallelism of the spacer 6 and the outer permanent magnet row 4 can be ensured.

[2] Manufacturing method

(1) First and third forms

In the form shown in Figs. 1 to 6 and 8, the operations of inserting the permanent magnets 30, 40 into the respective protective cover members 31, 41, 231, and 241 are substantially the same, and therefore, the protection is described with reference to Figs. 12(a) to (c). The case where the permanent magnet 40 is inserted into the cover member 41. Since the inner wall width W _O of the open ends of the side plate portions 41a, 41b and the inner wall width W _D of the upper plate portion 41c satisfy the relationship W _D > W _P > W _O with respect to the width W _P of the permanent magnet 40, The permanent magnet 40 is inserted into the protective cover member 41 in a state where the second side plate portion 41b is enlarged by the jig 8. As shown in Fig. 12(c), after the permanent magnet 40 is inserted, the jig 8 is removed.

By inserting the permanent magnet 40, the side plate portions 41a, 41b are slightly enlarged and elastically deformed, and thus are pressed against the outer surface of the permanent magnet 40 by the elastic restoring force. Therefore, the permanent magnet 40 is firmly fixed to the protective cover member 41 without using a bonding agent. And the following advantages can also be obtained by using the protective cover member. That is, when the permanent magnets in which the magnetizations are arranged adjacent to each other are not easily positioned accurately due to the magnetic repulsive force, even if a jig is used, the force for holding the permanent magnets must be increased, and thus the permanent magnet itself may be damaged. However, it is easy to insert each permanent magnet into each of the protective cover members, and even if the protective cover member is tightly held by the jig, the permanent magnet is not damaged, and therefore, it is very easy to mount the permanent magnet to the magnetic body by using the protective cover member. Yoke plate. Such as Thus, by using the protective cover member, the permanent magnet can be easily mounted on the yoke plate accurately (right angle and linearly), so that the accuracy of the magnetic circuit device can be improved and the manufacturing cost can be reduced.

Fig. 13 shows the case where two permanent magnets 40, 40 are inserted into one protective cover member 41. At this time, the length L of the protective cover member 41 is preferably set to be twice or more the length LP of the permanent magnet 40. When two or more permanent magnets 40, 40 are inserted into one protective cover member 41, there is an advantage that the operation of attaching the protective cover member to the yoke plate 2 can be shortened. The adjacent permanent magnets 40, 40 are mutually exclusive, but the repulsive force of the thin permanent magnet is small, so that it is relatively easy to insert the two permanent magnets 40, 40 into the protective cover member 41. However, when the permanent magnet becomes thick, it is necessary to optimize the size of W _P for W _D and W _O at the time of insertion, in addition to using appropriate jigs (not shown), so that the side plates 41a, 41b The permanent magnet 40 has sufficient clamping force.

In the first magnetic circuit device, the inner permanent magnet row 3 is relatively isolated from the outer permanent magnet row 4, so that either one can be attached to the yoke plate 2 first. The second magnet assembly is fabricated by first inserting the permanent magnet 30 into the protective cover member 31 to fabricate the first magnet assembly and inserting the permanent magnet 40 into the protective cover member 41. The lower ends of the permanent magnets 30 are magnetically attracted to the central groove 21 of the yoke plate 2, and the first magnet assembly is arranged along the central groove 21. The inner permanent magnet row 3 is combined by fixing all of the protective cover members 31 to the yoke plate 2 by bolts. Similarly, the permanent magnets 40 are magnetically attracted to the outer peripheral step 22 of the yoke plate 2, and the second magnet assembly is arranged along the outer peripheral step 22. The entire outer permanent magnet row 4 is combined by fixing all of the protective cover members 41 to the yoke plate 2 by bolts. Of course, it is also possible to combine the outer permanent magnet row 4 first.

(2) The second form

The second embodiment shown in Fig. 7 is the same as the first embodiment except for the method of fixing the second magnet assembly to the yoke plate. Therefore, only the second magnet assembly is described with reference to Fig. 7(b). The method of fixing the yoke plate. The inner protrusion 141f is joined to the horizontal groove 23, and the permanent magnet 40 is placed on the outer circumference difference 22. In this state, since the opening portion 141d of the outer flange portion 141e is aligned with the screw hole 25 of the yoke plate 2, the outer flange portion 141e of the protective cover member 141 is mechanically fixed to the yoke plate by the screw 5. 2 on.

(3) The fourth form

Fig. 14 is a view showing an example of a method of manufacturing the magnetic circuit device of the fourth aspect shown in Fig. 9. First, the spacers 6, 6 are fixed to the yoke plate 2 by screwing the bolts 51 to the screw holes 26 [step (a)]. In the central groove 21 between the two spacers 6, 6, a first magnet assembly in which the permanent magnet 30 is inserted into the protective cover member 31 is provided, and the outer flange portion 31e of the protective cover member 31 is fixed by the bolt 5. On the yoke plate 2 [step (b)]. The second magnet assembly formed by inserting the permanent magnet 40 into the protective cover member 41 is disposed on the outer peripheral step 22, and the first side plate portion 41b is fixed to the side surface of the yoke plate 2 by the bolt 52 [step (c)]. Finally, the remaining second magnet assembly is placed on the other outer circumferential step 22, and the first side plate portion 41b is fixed to the side surface of the yoke plate 2 by the bolt 52 [step (d)]. By forming the spacers 6, 6 in contact with the permanent magnets 30, 40 and/or the protective cover members 31, 41, the permanent magnets 30, 40 can be accurately positioned.

[3] Magnetron sputtering device

Fig. 15 shows a magnetron sputtering apparatus 100 including the magnetic circuit device 1 shown in Fig. 1. The magnetic circuit device 1 is arranged in a direction perpendicular to the paper surface (such as 6), but not shown on the map. The sputtering apparatus 100 includes a magnetic circuit device 1 in the vacuum processing chamber 101, a cathode 102 disposed at a position close to the magnetic circuit device 1, and a target 103 that is in contact with the cathode 102, and is disposed on the target 103 with the substrate 104 interposed therebetween. The anode 105 is in a relative position. The vacuum processing chamber 101 has a working gas inlet 101a connected to a working gas supply means (not shown), and an exhaust port 101b connected to a vacuum pump (not shown). The vacuum processing chamber 101 forms a ground potential, and the magnetic circuit device 1 and the cathode 102 form the same potential. The cathode 102 and the anode 105 are connected to a DC voltage source 106, respectively. The substrate 104 is transported between the target 103 and the anode 105.

When the distance from the surface of the magnetic circuit device 1 to the surface of the target 103 is too long, the horizontal component of the magnetic field appearing on the surface of the target 103 is too small. Further, when the distance is too short, it is difficult to provide the magnetic circuit device 1 in the vacuum processing chamber 101. Therefore, the distance between the two should be appropriately set depending on the size of the substrate 104 or the like. For the seventh to eighth generation of substrates, the distance is usually set in the range of 50 to 60 mm. Further, even if the interval between the upper surface of the magnetic circuit device 1 and the bottom surface of the cathode 102 is narrow to several mm, since the permanent magnet is covered by the protective cover member, the permanent magnet can be prevented from being broken at the time of combination.

The magnetron sputtering apparatus 100 can form a film on the surface of the substrate 104 as described below. Vacuum evacuation is performed in the vacuum processing chamber 101, and a working gas containing an inert gas (e.g., argon, argon + nitrogen or argon + oxygen) is introduced and maintained at a pressure of 10 ^-1 to 10 ^-3 Torr. Next, a negative voltage (e.g., -300 V to -800 V) is applied to the cathode 102 to form an electric field toward the surface of the target 103 to cause glow discharge. Thereby, the ions in the plasma strike the surface of the target 103, and the secondary electrons emitted at this time are captured by the magnetic field to form a high-density plasma which is elongated along the magnetic field. The ions in the high-density plasma strike the target 103, in which the substance scatters, and a film is formed by adhering particles to the surface of the substrate 104.

The magnetron sputtering apparatus 100 described above preferably has the following configuration. That is, when the film formation is performed, since the density of the high-density plasma at a position perpendicular to the surface of the target 103 is zero, an erosion region along the shape of the high-density plasma is formed on the surface of the target 103. . Therefore, by providing a driving device (not shown) on the back side of the magnetic circuit device 1, the magnetic circuit device 1 is moved in parallel in a plane parallel to the target 103, and the moving pitch is the same as that of the high-density plasma. The following distances increase the utilization efficiency of the target 103. With this configuration, the time at which the surface of the target 103 is exposed to the high-density plasma is averaged, thereby forming a uniform erosion region on the surface of the target 103.

(Effect of the invention)

In the magnetic circuit device for magnetron sputtering according to the present invention, at least one permanent magnet is covered by the protective cover member, and the protective cover member is mechanically fixed to the yoke plate, so that no bonding agent is required, and never occurs. Deflation. Further, although the adjacent magnetic poles of the same polarity generate magnetic repulsive force, it is easy to accurately fix the permanent magnet to the yoke plate. Further, even if the jig is used for precise positioning, since the jig is in contact with the protective cover member, damage is not caused to the permanent magnet itself. Further, even if it collides with other members or the like during use, since the permanent magnet is protected by the protective cover member, it does not fall off or be damaged.

When combining or operating, when several permanent magnets fall off or are damaged due to collision with other components, only the protective cover member holding these permanent magnets must be disassembled, and the new permanent magnet is clamped and then mounted on the yoke. Just on the board. Since the bonding agent is not used at this time, it is not necessary to heat the entire magnetic circuit device, and the permanent magnet can be quickly attached and detached. In addition, when the permanent magnet is fixed to the yoke plate without providing the protective cover member, when a plurality of permanent magnets are detached, the position of the permanent magnet on the yoke plate may be deviated due to the magnetic repulsive force, but the present invention When the permanent magnet is fixed by the protective cover member, the position of the permanent magnet on the yoke plate is not caused by the disassembly and assembly of the permanent magnet.

Since the magnetic circuit device for magnetron sputtering of the present invention is manufactured by mechanically fixing a protective cover member to which a permanent magnet is attached to a yoke plate, not only the permanent magnet is accurately positioned, but also can be greatly Reduce the combination time. In addition, since a bonding agent is not required, a good manufacturing environment can be maintained.

1‧‧‧magnetic circuit device

2‧‧‧Magnetic yoke plate

3‧‧‧ Inside permanent magnet row

4‧‧‧Outer permanent magnet row

5‧‧‧ bolt

6‧‧‧ spacers

8‧‧‧Clamp

21‧‧‧Central Ditch

22‧‧‧peripheral difference

23‧‧‧ horizontal ditch

25‧‧‧ screw holes

26‧‧‧ screw holes

30‧‧‧ permanent magnet

31‧‧‧Protective cover member for inner permanent magnet row

31a‧‧‧First side panel

31b‧‧‧Second side panel

31c‧‧‧Upper Board

31d‧‧‧Openings for screws

31e‧‧‧Outer flange

31g‧‧‧ front end

40‧‧‧ permanent magnet

41‧‧‧ Protective cover members for outer permanent magnets

41e‧‧‧Outer flange

51‧‧‧ bolt

52‧‧‧Bolts

100‧‧‧Magnetron tube sputtering device

101‧‧‧vacuum processing room

101a‧‧‧flow entrance

101b‧‧‧Exhaust port

102‧‧‧ cathode

103‧‧‧ Target

104‧‧‧Substrate

105‧‧‧Anode

106‧‧‧DC voltage source

141‧‧‧ Protective cover members for outer permanent magnets

141a‧‧‧First side panel

141b‧‧‧Second side panel

141c‧‧‧Upper Board

141d‧‧‧Openings for screws

141e‧‧‧Outer flange

141f‧‧‧Inside protrusion

241‧‧‧ Protective cover members for outer permanent magnets

241a‧‧‧First side panel

241b‧‧‧Second side panel

241c‧‧‧Upper Board

241d‧‧‧Openings for screws

241e‧‧‧Outer flange

241g‧‧‧Inside protrusion

331‧‧‧The inner permanent magnet row protective cover member

331a‧‧‧First side panel

331b‧‧‧Second side panel

331c‧‧‧Upper Board

331d‧‧‧Openings for screws

331e‧‧‧Outer flange

331f‧‧‧ gaps for spacers

341‧‧‧Side cover for outer permanent magnets

341a‧‧‧First side panel

341b‧‧‧Second side panel

341c‧‧‧Upper Board

341d‧‧‧Openings for screws

431‧‧‧Protective cover member for inner permanent magnet

431a‧‧‧First side panel

431b‧‧‧Second side panel

431c‧‧‧Upper Board

431d‧‧‧Openings for screws

431e‧‧‧Outer flange

431f‧‧‧ gaps for spacers

431g‧‧‧ spacer tolerance

441‧‧‧ Protective cover for outer permanent magnets

441a‧‧‧First side panel

441b‧‧‧Second side panel

441c‧‧‧Upper Board

441d‧‧‧Openings for screws

441f‧‧‧ spacers withstand gaps

Fig. 1 is a plan view showing an example of a magnetic circuit device for magnetron sputtering of the present invention.

Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

Fig. 3 is an exploded view showing a second diagram of the state in which the first and second magnet assemblies are separated from the yoke plate.

Figure 4 is a cross-sectional view taken along line B-B of Figure 1.

Sections 5(a) to (c) show a cross-sectional view of an example of the first protective cover member.

Fig. 6 is a plan view showing the first protective cover member shown in Fig. 3.

Sections 7(a) and (b) are cross-sectional views showing other examples of the second protective cover member for the outer permanent magnet row.

Figure 8(a) and (b) show the second protective cover for the outer permanent magnet row. A cross-sectional view of another example of the piece.

Fig. 9 is a cross-sectional view showing another example of the magnetic circuit device for magnetron sputtering of the present invention.

Fig. 10(a) and (b) are perspective views showing the first protective cover member of the inner permanent magnet row of Fig. 9.

Fig. 11(a) and (b) are perspective views showing the second protective cover member on the outer side of the permanent magnet row in Fig. 9.

Fig. 12(a) to (c) are perspective views showing the state in which the permanent magnet is inserted into the second protective cover member for the outer permanent magnet row shown in Fig. 2.

Fig. 13 is a perspective view showing the state in which two permanent magnets are inserted into one protective cover member.

Figures 14(a) to (d) are cross-sectional views showing the manufacturing steps of the magnetic circuit device of Fig. 9.

Fig. 15 is a cross-sectional view showing an example of a magnetron sputtering apparatus having the magnetic circuit device of the present invention.

2‧‧‧Magnetic yoke plate

3‧‧‧ Inside permanent magnet row

4‧‧‧Outer permanent magnet row

5‧‧‧ bolt

30‧‧‧ permanent magnet

31‧‧‧Protective cover member for inner permanent magnet row

40‧‧‧ permanent magnet

41‧‧‧ Protective cover members for outer permanent magnets

Claims (18)

A magnetic circuit device for magnetron sputtering, comprising: an inner permanent magnet row formed by a plurality of rectangular permanent magnets arranged in a straight line in a manner of a magnetic pole having a predetermined polarity; a row of outer permanent magnets formed by a plurality of rectangular permanent magnets continuously surrounding the inner permanent magnet row and having magnetic poles having opposite polarities to the magnetic poles of the inner permanent magnet row; yoke plate The detachable permanent magnet of the inner permanent magnet row and the outer permanent magnet row can be detachably held; and the cross section is substantially a non-magnetic protective cover member of a shape, which covers at least one of the permanent magnets one by one; each protective cover member includes: a first side plate portion covering one side of the permanent magnet and mechanically fixed to the yoke a second side plate portion covering the other side of the permanent magnet; and an upper plate portion that integrally joins the side plate portions; and, by the side plates of each of the protective cover members, is firmly clamped Hold the aforementioned permanent magnet. A magnetic circuit device for magnetron sputtering according to item 1 of the patent application scope, The yoke plate has a concave portion on the upper surface of the permanent magnet that receives the rectangular parallelepiped shape. The magnetic circuit device for magnetron sputtering according to claim 2, wherein the concave portion that receives the permanent magnet constituting the inner permanent magnet row is a central groove, and receives a concave portion of the permanent magnet constituting the outer permanent magnet row. It is the difference of the peripheral segment. The magnetic circuit device for magnetron sputtering according to the second aspect of the invention, wherein the first side plate portion of the protective cover member has a flange portion having at least one opening portion, and an end portion under each permanent magnet. The flange portion is fixed to the yoke plate by a bolt that is engaged with the opening portion in a state of being disposed in the recessed portion of the yoke plate. The magnetic circuit device for magnetron sputtering according to claim 1, wherein the yoke plate has a central groove on the upper side of the inner permanent magnet row and a circumferential difference from the outer permanent magnet row, and is laterally a horizontal groove, wherein the first side plate portion of each of the outer permanent magnet rows has a flange portion having at least one opening portion at a position in contact with the upper surface of the yoke plate, and the second side plate The portion has a length reaching the horizontal groove, and has an inner protruding portion at the front end, whereby the first side plate is in a state where the inner protruding portion is engaged with the horizontal groove and the permanent magnet is disposed in the outer peripheral step. The outer flange portion of the portion is fixed to the yoke plate by a bolt that is engaged with the opening. A magnetic circuit device for magnetron sputtering according to item 1 of the patent application scope, The inner surface of the upper plate portion of the protective cover member has a protruding portion that abuts against the upper surface of the permanent magnet. A magnetic circuit device for magnetron sputtering, characterized in that it comprises: an inner permanent magnet row formed by a plurality of rectangular permanent magnets arranged in a straight line in a manner of a magnetic pole having a predetermined polarity; a row of outer permanent magnets formed by a plurality of rectangular permanent magnets continuously surrounding the inner permanent magnet row and having magnetic poles having opposite polarities to the magnetic poles of the inner permanent magnet row; yoke plate The permanent magnet of the inner permanent magnet row and the permanent magnet of the outer permanent magnet row are detachably held; the spacer is disposed between the inner permanent magnet row and the outer permanent magnet row; and the cross section is substantially a non-magnetic protective cover member of the shape, which covers at least one of the permanent magnets one by one; each of the protective cover members of the inner permanent magnet row comprises: a first side plate portion covering one side of the permanent magnet, and is mechanically The method is fixed to the yoke plate; the second side plate portion covers the other side surface of the permanent magnet; and the upper plate portion connects the two side plate portions into one body; each of the outer permanent magnet rows of the protective cover member The first side plate portion includes a length covering at least a portion of one side surface of the permanent magnet and a side surface of the yoke plate, and is mechanically fixed to the yoke plate; the second side plate portion covers the foregoing The other side of the permanent magnet; and the upper plate portion are integrally joined to the side plate portions; and the permanent magnets are firmly held by the side plate portions of each of the protective cover members. The magnetic circuit device for magnetron sputtering according to claim 7, wherein the yoke plate has a central groove on the upper surface of the permanent magnet that receives the rectangular shape of the inner permanent magnet, and has a permanent outer surface The first side plate portion of each of the protective cover members of the inner permanent magnet row has a flange portion having at least one opening portion, and each of the outer permanent magnet rows is inferior to the outer circumference of the permanent magnet in the shape of a straight body of the magnet row. The first side plate portion of the protective cover member has at least one opening portion before the contact with the side surface of the yoke plate, and the end portion of each of the permanent magnets is disposed on the groove or the step of the yoke plate. In the state, the first side plate portion is fixed to the yoke plate by a bolt that is engaged with the opening portion. The magnetic circuit device for magnetron sputtering according to claim 7, wherein the first side plate portion of each of the inner permanent magnet rows has a notch that receives the spacer. The magnetic circuit device for magnetron sputtering according to any one of claims 1 to 9, wherein the protective cover member is made of an elastically deformable non-magnetic material Formed by a metal plate. The magnetic circuit device for magnetron sputtering according to claim 10, wherein a width W _P of the magnetic pole surface of the permanent magnet and an inner wall width W _O of the open end of the side plate portions of the protective cover member and the foregoing The inner wall width W _{D of the} upper plate portion satisfies the relationship of W _D > W _P > W _O . A method for manufacturing a magnetic circuit device for magnetron sputtering, wherein a magnetic circuit device for magnetron sputtering is manufactured by disassembling a combination of an inner permanent magnet row and an outer permanent magnet row on a yoke plate, wherein The inner permanent magnet row is formed by a plurality of rectangular permanent magnets which are linearly arranged in a manner of a magnetic pole having a specified polarity thereon, and the outer permanent magnet row is surrounded by the inner permanent magnet row and has an upper surface The method of manufacturing a magnetic circuit device for magnetron sputtering is characterized in that: (a) a cross section is substantially formed by a plurality of rectangular permanent magnets in which the magnetic poles of the opposite polarity of the inner permanent magnet row are continuously disposed. for a first and second non-magnetic protective cover member having a shape, the first side plate portion having a joint portion joined to the yoke plate, and the second side plate portion facing the first side plate portion, and (b) at least one permanent magnet that is magnetized in the height direction is inserted into the first protective cover member so that the upper plate portion side can be of the same polarity. a first magnet assembly is produced; (c) at least one permanent magnet that is magnetized in the height direction is inserted into the second protective cover member so that the upper plate portion side has a polarity opposite to that of the first magnet assembly; And forming a second magnet assembly; (d) mechanically fixing the first and second magnet assemblies to the yoke plate through the first side plate portions. The method of manufacturing a magnetic circuit device for magnetron sputtering according to claim 12, wherein the yoke plate has a concave portion extending in a predetermined direction, and the first and second magnet combinations are disposed in the concave portion. The permanent magnet of the body. The method of manufacturing a magnetic circuit device for magnetron sputtering according to claim 12, wherein the first and second protective cover members have outer flange portions at a front end of the first side plate portion, which are separated from each other The first and second protective cover members are mechanically fixed to the yoke plate by the square flange portion. The method of manufacturing a magnetic circuit device for magnetron sputtering according to claim 12, wherein the yoke plate has a central groove and an outer peripheral step on the yoke plate, and has a horizontal groove on a side surface, and the second non-magnetic protective cover member has The first side plate portion, the second side plate portion, and the upper plate portion are substantially In the cross section, the first side plate portion has an outer flange portion having a joint portion joined to the yoke plate, and the second side plate portion faces the first side plate portion and has a length reaching the horizontal groove And having an inner protruding portion at the front end, wherein the upper plate portion integrally connects the side plate portions; and the inner protruding portion of the second side plate portion of the second magnet assembly is engaged with the yoke plate In the horizontal groove, the outer peripheral portion of the first side plate portion is mechanically fixed to the yoke plate in a state in which the permanent magnet is disposed in the outer peripheral step. A method for manufacturing a magnetic circuit device for magnetron sputtering, which is capable of manufacturing a magnetron sputtering by disassembling an inner permanent magnet row and an outer permanent magnet row on a yoke plate via a spacer. A magnetic circuit device in which an inner permanent magnet row is formed by a plurality of rectangular permanent magnets which are linearly arranged in a manner of a magnetic pole having a specified polarity thereon, and the outer permanent magnet row is formed to surround the aforementioned inner permanent The magnet row is formed by a plurality of rectangular permanent magnets continuously provided with magnetic poles of opposite polarities to the magnetic poles of the inner permanent magnet rows. The method for manufacturing a magnetic circuit device for magnetron sputtering is characterized by: (a) The production profile is roughly a first and second non-magnetic protective cover member, wherein the first non-magnetic protective cover member includes: a first side plate portion having a joint portion joined to the yoke plate; and a first side plate portion opposite to the first side plate portion a two side plate portion; the side plate portions are joined to form an integral upper plate portion; and the second non-magnetic protective cover member includes: a joint portion having a length reaching the yoke plate and having a front end portion engaged with at least one of the yoke plates a first side plate portion; a second side plate portion facing the first side plate portion; the both side plate portions being coupled to the integral upper plate portion; and (b) the first plate portion side being of the same polarity Inserting at least one permanent magnet magnetized in the height direction in the protective cover member to form the first magnet assembly; (c) in the second layer so that the upper plate portion side may be opposite in polarity to the first magnet assembly Inserting at least one permanent magnet magnetized in the height direction into the protective cover member to form a second magnet assembly; (d) mechanically fixing the spacer to the yoke plate; (e) interposing the first side plate Ministry The first magnet assembly is mechanically fixed to the plate yoke; (f) through the first side plate portion, the said second magnet assembly is mechanically fixed to the yoke plate. A method for manufacturing a magnetic circuit device for magnetron sputtering, which is capable of detachably assembling an inner permanent magnet row on a yoke plate having a central groove and a peripheral segment extending in a predetermined direction with a spacer interposed therebetween And a magnetic circuit device for magnetron sputtering in which the outer permanent magnet is formed, wherein the inner permanent magnet row is formed by a plurality of rectangular permanent magnets which are linearly arranged in a manner of a magnetic pole having a specified polarity thereon. The outer permanent magnet row is formed by a plurality of rectangular permanent magnets that are continuously disposed in a manner that surrounds the inner permanent magnet row and has a magnetic pole opposite to the magnetic pole of the inner permanent magnet row. The method of the magnetic circuit device for pipe sputtering is characterized in that: (a) the cross section is approximately a first and second non-magnetic protective cover member, wherein the first non-magnetic protective cover member comprises: a first side plate portion having an outer flange portion, the outer flange portion having at least one opening portion; and the first side plate a second side plate portion opposite to the second side plate portion; the two side plate portions are integrally joined to the upper plate portion; the second non-magnetic protective cover member includes: a first side plate portion having a length reaching the aforementioned length and having at least one opening portion at the front end portion, a second side plate portion facing the first side plate portion and an upper plate portion being integrally joined to the upper plate portion; (b) the first plate member side being of the same polarity in the first protective cover member Inserting at least one permanent magnet magnetized in the height direction to form a first magnet assembly; (c) in the second protective cover member in such a manner that the upper plate portion side can be opposite in polarity to the first magnet assembly Inserting at least one permanent magnet magnetized in the height direction to form a second magnet assembly; (d) mechanically fixing the spacer to the yoke plate; (e) permanently splicing the first magnet assembly The stone is disposed in the center groove, and the first magnet assembly is fixed to the yoke plate by a bolt that is engaged with the opening of the outer flange portion; (f) the second magnet is The permanent magnet of the assembly is disposed in a state in which the outer peripheral step is different, and the second magnet assembly is fixed to the yoke plate by a bolt that is engaged with the opening of the first side plate portion. The method of manufacturing a magnetic circuit device for magnetron sputtering according to claim 16 or 17, wherein the first protective cover member has a notch at least on the first side plate portion to receive the spacer, and The foregoing The first magnet assembly is fixed to the yoke plate in such a manner that the spacer enters the gap.