TWI396774B - A substrate manufacturing method and a copper surface treatment agent used therefor - Google Patents

A substrate manufacturing method and a copper surface treatment agent used therefor Download PDF

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TWI396774B
TWI396774B TW097108875A TW97108875A TWI396774B TW I396774 B TWI396774 B TW I396774B TW 097108875 A TW097108875 A TW 097108875A TW 97108875 A TW97108875 A TW 97108875A TW I396774 B TWI396774 B TW I396774B
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copper
compound
solder resist
copper alloy
barrier layer
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TW097108875A
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Chinese (zh)
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TW200840883A (en
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Mutsuyuki Kawaguchi
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Mec Co Ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/386Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/05Insulated conductive substrates, e.g. insulated metal substrate
    • H05K1/056Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an organic insulating layer

Description

基板之製造方法及其所使用之銅表面處理劑Method for manufacturing substrate and copper surface treatment agent used therefor

本發明關於一種印刷電路基板製造方法之用以接著樹脂層(尤其是阻焊層、圖案形成用之阻擋層)與銅或銅合金層之基板製造方法及其所使用之銅表面處理劑。The present invention relates to a method for producing a substrate for a resin layer (particularly, a solder resist layer, a barrier layer for pattern formation) and a copper or copper alloy layer, and a copper surface treatment agent used therefor.

以往製造印刷電路基板,在銅或銅合金表面形成阻蝕層、阻焊層等由樹脂所構成之阻擋層(resist layer)時,為了提高接著性,會進行粗糙化處理。粗糙化處理,係拋光(buffing)、洗滌拋光(scrub polishing)等機械處理、蝕刻之粗糙化(硫酸、過氧化氫系之微蝕刻劑、過硫酸鹽系之微蝕刻劑)等。When a printed circuit board is conventionally produced and a resist layer made of a resin such as a resist layer or a solder resist layer is formed on the surface of copper or a copper alloy, roughening treatment is performed in order to improve adhesion. The roughening treatment is mechanical treatment such as buffing, scrubbing polishing, roughening of etching (sulfuric acid, hydrogen peroxide-based microetching agent, persulfate-based microetching agent), and the like.

若對銅表面進行粗糙化,則雖然可使阻焊層、阻蝕層與銅之接著性良好,但是由於表面積變大,故若放置不管時,則會氧化發生變色,而隨著時間經過,與樹脂的接著性降低,因此必須要防止此種氧化。When the surface of the copper is roughened, the adhesion between the solder resist layer and the resist layer and copper can be improved. However, since the surface area becomes large, if it is left unattended, it will oxidize and discolor, and as time passes, The adhesion to the resin is lowered, so it is necessary to prevent such oxidation.

尤其,在阻焊前時,會發生下述不良情形。In particular, the following problems occur before soldering.

(1)在發生變色的狀態下,設置阻焊層時,易在自動光學檢查機(AOI)之外觀檢查中產生誤動作。(1) When a solder resist layer is provided in a state where discoloration occurs, it is easy to cause a malfunction in the visual inspection of an automatic optical inspection machine (AOI).

(2)阻焊劑,在塗布後需藉由加熱使其硬化,但是若是每一面塗布阻焊劑後再使其硬化,則未塗布有阻焊劑之銅表面在露出的狀態下,曝露在高溫下更加容易氧化,而造成與阻焊層之接著性降低。(2) The solder resist needs to be hardened by heating after coating, but if the solder resist is applied to each side and then hardened, the copper surface not coated with the solder resist is exposed to a high temperature and exposed to a high temperature. It is easily oxidized, resulting in a decrease in adhesion to the solder resist layer.

因此,用以接著銅表面與阻焊劑之技術,並非僅要求提升接著性之功能,亦同時要求抗氧化性及抗變色性。Therefore, the technique for adhering to the copper surface and the solder resist does not only require the function of improving the adhesion, but also requires oxidation resistance and discoloration resistance.

從以往用以提升銅表面與樹脂之接著性之技術,已知有以唑化合物處理銅表面的技術。專利文獻1提出一種以苯并三唑等各種唑來處理銅表面而與聚醯亞胺樹脂接著的技術。專利文獻2提出一種以抗氧化、焊料耐熱、接著耐久性為目的,以唑化合物與矽烷偶合劑處理銅表面的方法。專利文獻3提出一種以具有防銹效果、及提升銅-樹脂接著性為目的,而以四唑化合物來處理銅表面的方法。專利文獻4則是提出一種胺基四唑與胺基三唑來提升高玻璃轉移溫度(Tg)樹脂與銅之接著性的方法。From the conventional technique for improving the adhesion between the copper surface and the resin, a technique of treating the copper surface with an azole compound is known. Patent Document 1 proposes a technique in which a copper surface is treated with various azoles such as benzotriazole to be bonded to a polyimide resin. Patent Document 2 proposes a method of treating a copper surface with an azole compound and a decane coupling agent for the purpose of oxidation resistance, solder heat resistance, and durability. Patent Document 3 proposes a method of treating a copper surface with a tetrazole compound for the purpose of having a rust preventing effect and improving copper-resin adhesion. Patent Document 4 proposes a method in which an aminotetrazole and an aminotriazole are used to enhance the adhesion of a high glass transition temperature (Tg) resin to copper.

專利文獻1:日本特開昭61-266241號公報專利文獻2:日本特開平8-311658號公報專利文獻3:日本特開平10-193510號公報專利文獻4:日本特開平11-43778號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei.

然而,此等之習知技術,例如,專利文獻1僅注意與聚醯亞胺樹脂的接著性,但在提升與阻焊層之接著性方面卻有不夠充分的問題。專利文獻2,由於僅以唑化合物,接著性提升效果並不足,故有需要矽烷偶合劑的問題。若使用矽烷偶合劑,則由於液體之安定性不佳,因此難以實用化。而專利文獻3~4的方法,在提升與阻焊樹脂之接著性、及抗變色性方面並不充分。However, such conventional techniques, for example, Patent Document 1 only pays attention to the adhesion to the polyimide resin, but has insufficient problems in terms of improving the adhesion to the solder resist layer. According to Patent Document 2, since only the azole compound is used, the effect of improving the adhesion is insufficient, so that there is a problem that a decane coupling agent is required. When a decane coupling agent is used, since the stability of the liquid is not good, it is difficult to put it into practical use. Further, the methods of Patent Documents 3 to 4 are insufficient in improving the adhesion to the solder resist resin and the discoloration resistance.

本發明,為了解決習知之問題,提供一種在銅或銅合金表面形成用以提升接著性之有機被膜,而可提升銅-樹脂間之接著性的基板製造方法及其所使用之銅表面處理劑。In order to solve the conventional problems, the present invention provides a substrate manufacturing method for improving the adhesion between copper and resin on the surface of a copper or copper alloy to form an organic film for improving adhesion, and a copper surface treatment agent used therefor. .

本發明之基板之製造方法,包含使含胺基四唑化合物、胺基三唑化合物、及烷基胺衍生物之處理液接觸於銅或銅合金表面之至少一面側的步驟,及在接觸該處理液之銅或銅合金表面形成阻擋層之步驟。The method for producing a substrate of the present invention comprises the steps of contacting a treatment liquid containing an aminotetrazole compound, an aminotriazole compound, and an alkylamine derivative on at least one side of a surface of a copper or copper alloy, and contacting the surface The step of forming a barrier layer on the surface of the copper or copper alloy of the treatment liquid.

本發明之銅表面處理劑,係用以提升銅或銅合金表面與阻擋層之接著,其特徵在於,包含胺基四唑化合物0.05重量百分比(wt%)以上、胺基三唑化合物0.1wt%以上、烷基胺衍生物0.1wt%~10wt%、及剩餘部分為水。The copper surface treatment agent of the present invention is used for lifting the surface of the copper or copper alloy and the barrier layer, characterized in that it comprises 0.05% by weight (wt%) or more of the aminotetrazole compound and 0.1% by weight of the aminotriazole compound. The above alkylamine derivative is 0.1% by weight to 10% by weight, and the remainder is water.

本發明,藉由使混合有胺基四唑化合物、胺基三唑化合物、及烷基胺衍生物之水溶液接觸於銅或銅合金表面,在銅或銅合金表面形成有機被膜。可藉由使該有機被膜存在於銅或銅合金表面,來提升銅-樹脂間之接著性。In the present invention, an organic film is formed on the surface of copper or a copper alloy by contacting an aqueous solution in which an aminotetrazole compound, an aminotriazole compound, and an alkylamine derivative are mixed with a copper or copper alloy surface. The copper-resin adhesion can be improved by allowing the organic film to exist on the surface of the copper or copper alloy.

有機被膜,係藉由銅表面之銅與有機物配位鍵結而形成在銅表面。在此有機被膜形成時,烷基胺衍生物由於具有促進該銅表面之銅與有機物之配位鍵結之形成的作用,因此可高密度將均勻的有機被膜形成在銅表面。The organic film is formed on the copper surface by coordination bonding of copper on the copper surface with an organic substance. When the organic film is formed, the alkylamine derivative functions to promote the formation of a coordination bond between copper and an organic substance on the copper surface, so that a uniform organic film can be formed on the copper surface at a high density.

本發明之銅表面處理劑,係以本發明之處理液作為構成要素。本發明之處理液為包含胺基四唑化合物、胺基三唑化合物及烷基胺衍生物之水溶液。該處理液所含之各成分與其濃度如下述。The copper surface treatment agent of the present invention contains the treatment liquid of the present invention as a constituent element. The treatment liquid of the present invention is an aqueous solution containing an aminotetrazole compound, an aminotriazole compound, and an alkylamine derivative. The components contained in the treatment liquid and their concentrations are as follows.

(1)胺基四唑化合物:至少在0.05wt%以上,較佳在0.1wt%~5wt%、更佳則在0.1wt%~3wt%的範圍。(1) Aminotetrazole compound: at least 0.05% by weight or more, preferably 0.1% by weight to 5% by weight, more preferably 0.1% by weight to 3% by weight.

(2)胺基三唑化合物:至少在0.1wt%以上,較佳在0.3wt%~5wt%、更佳則在0.3wt%~3wt%的範圍。(2) The aminotriazole compound: at least 0.1% by weight or more, preferably 0.3% by weight to 5% by weight, more preferably 0.3% by weight to 3% by weight.

(3)烷基胺衍生物:0.1wt%~10wt%、較佳在0.3wt%~7wt%、更佳則在0.3wt%~5wt%的範圍。(3) Alkylamine derivative: 0.1% by weight to 10% by weight, preferably 0.3% by weight to 7% by weight, more preferably 0.3% by weight to 5% by weight.

(4)剩餘部份為水。(4) The remaining part is water.

若胺基四唑化合物之濃度未達0.05wt%,則在提升與阻擋層之接著性方面無法得到充分效果。又,若胺基三唑化合物之濃度未達0.1wt%時,則無法充分得到防止銅表面之氧化所導致之變色的效果。If the concentration of the aminotetrazole compound is less than 0.05% by weight, sufficient effects cannot be obtained in terms of improving the adhesion to the barrier layer. Further, when the concentration of the aminotriazole compound is less than 0.1% by weight, the effect of preventing discoloration due to oxidation of the copper surface cannot be sufficiently obtained.

若烷基胺衍生物之濃度未達0.1wt%,則無法得到被膜形成促進效果,由於被膜密度不充分、無法在銅或銅合金表面均勻地形成被膜,因此無法充分得到防止銅或銅合金表面之氧化所造成之變色的效果。而且,亦無法提升銅或銅合金表面與阻擋層之接著性。當添加超過10wt%時,烷基胺衍生物由於會附著於銅或銅合金表面,而阻礙被膜形成,因此無法充分得到所欲之銅或銅合金表面的抗變色效果,且亦無法提升銅或銅合金表面與阻擋層的接著性。When the concentration of the alkylamine derivative is less than 0.1% by weight, the film formation promoting effect cannot be obtained, and since the film density is insufficient and the film cannot be uniformly formed on the surface of the copper or copper alloy, the copper or copper alloy surface cannot be sufficiently prevented. The effect of discoloration caused by oxidation. Moreover, the adhesion of the copper or copper alloy surface to the barrier layer cannot be improved. When more than 10% by weight is added, the alkylamine derivative may adhere to the surface of the copper or copper alloy to hinder the formation of the film, so that the anti-tarnishing effect of the surface of the desired copper or copper alloy cannot be sufficiently obtained, and copper or The adhesion of the copper alloy surface to the barrier layer.

可藉由使胺基四唑化合物與胺基三唑化合物同時存在,來同時提升接著性與抗變色效果。尤其,胺基四唑化合物:胺基三唑化合物之濃度比例以重量比計在1:1~1:3的範圍,可有效同時提升接著性與抗變色效果。The adhesion and anti-tarnishing effect can be simultaneously improved by simultaneously presenting the aminotetrazole compound and the aminotriazole compound. In particular, the concentration ratio of the aminotetrazole compound:aminotriazole compound is in the range of 1:1 to 1:3 by weight ratio, and it is effective to simultaneously improve the adhesion and the anti-tarnishing effect.

在將阻擋層形成於銅或銅合金表面之至少一面後,可進行以100℃~200℃加以熱硬化之步驟。在此情形時,由於尤其未形成有阻擋層之銅或銅合金表面被置於因加熱而容易氧化之環境,故可藉上述處理液來處理銅或銅合金表面作為前處理,以防止氧化。After the barrier layer is formed on at least one surface of the copper or copper alloy surface, a step of thermally hardening at 100 ° C to 200 ° C may be performed. In this case, since the surface of the copper or copper alloy in which the barrier layer is not formed in particular is placed in an environment which is easily oxidized by heating, the surface of the copper or copper alloy can be treated as a pretreatment by the above treatment liquid to prevent oxidation.

當上述阻擋層為阻焊層時,尤其,可藉由上述處理液來防止銅或銅合金表面的氧化,因此可防止從阻焊層上所見時之變色、及AOI檢查等之外觀檢查機的誤動作。When the barrier layer is a solder resist layer, in particular, the surface of the copper or copper alloy can be prevented from being oxidized by the treatment liquid, thereby preventing discoloration from the solder resist layer and an appearance inspection machine such as AOI inspection. Malfunction.

以上述處理液進行處理前,在藉由蝕刻對銅或銅合金表面進行粗化後之場合,粗化表面由於特別容易氧化,故處理液之抗氧化效果高,同時與阻擋層之接著亦以相乘效果獲得提升。Before the treatment with the above treatment liquid, the surface of the copper or copper alloy is roughened by etching, since the roughened surface is particularly susceptible to oxidation, the oxidation resistance of the treatment liquid is high, and the barrier layer is followed by The multiplication effect is improved.

此時之粗化表面,由於粗化為L值50~75之表面可進一步提高接著性,故較佳。The roughened surface at this time is preferable because the surface having the L value of 50 to 75 can be further improved in adhesion.

此時之L值,係指用以表示藉色彩色差計所測量之L*a*b*顯色系之顏色濃淡之數值。L值愈接近100表示顏色愈淡(白色度高),相反地L值愈接近零則表示愈濃(黒色度高)。此數值與粗化表面之粗糙度有相關關係,數值愈低粗糙度愈高,數值愈高則粗糙度愈低。The L value at this time refers to the value of the color shading of the L*a*b* color system measured by the color difference color difference meter. The closer the L value is to 100, the lighter the color (higher whiteness), and the closer the L value is to zero, the thicker (high chroma). This value is related to the roughness of the roughened surface. The lower the value, the higher the roughness, and the higher the value, the lower the roughness.

以上述處理液處理銅或銅合金表面之pH的範圍,若在pH8~pH12的範圍使用時,則由於被膜附著性良好,故較佳。未達pH8時,被膜之密度變低而難以提升接著性。另一方面,pH12以上時,由於會成為強鹼,將導致處理環境惡化,液體的處理不易。When the pH of the surface of the copper or copper alloy is treated with the above treatment liquid, when it is used in the range of pH 8 to pH 12, the film adhesion is good, which is preferable. When the pH is not reached 8, the density of the film becomes low and it is difficult to improve the adhesion. On the other hand, when pH is 12 or more, since it becomes a strong alkali, the processing environment will deteriorate, and handling of a liquid will become difficult.

以下,說明處理液之各成分與基板之製造方法。Hereinafter, a method of producing each component of the treatment liquid and the substrate will be described.

(1)處理液(1) treatment liquid

(a)胺基四唑化合物選自胺基四唑化合物之化合物,例如可為5-胺基-1H-四唑(胺基四唑的正式名稱)、1-甲基-5-胺基四唑、1-乙基-5-胺基四唑、α-苯甲基-5-胺基四唑、β-苯甲基-5-胺基四唑、1-(β-胺乙基)四唑等。只要具有本發明之效果,亦可具有其他的置換基。又,亦可為水合物。上述之胺基四唑化合物中,較佳為胺基四唑、碳數1~5之具有短鏈烷基者。(a) a compound of an aminotetrazole compound selected from the group consisting of an aminotetrazole compound, for example, 5-amino-1H-tetrazole (formal name of aminotetrazole), 1-methyl-5-amino group IV Azole, 1-ethyl-5-aminotetrazole, α-benzyl-5-aminotetrazole, β-benzyl-5-aminotetrazole, 1-(β-aminoethyl)tetra Oxazole and the like. Other substituents may be provided as long as they have the effects of the present invention. Further, it may be a hydrate. Among the above aminotetrazole compounds, those having an aminotetrazole and a carbon number of 1 to 5 and having a short-chain alkyl group are preferred.

(b)胺基三唑、胺基三唑衍生物胺基三唑、胺基三唑衍生物之較佳者,例如可為3-胺基-1,2,4-三唑、4-胺基-1,2,4-三唑、3-胺基-5-甲基三唑、3-胺基-5-乙基三唑、3,5-二胺基-1,2,4-三唑、3-胺基-1,2,4-三唑-5-羧酸、5-胺基-1,2,3,4-噻三唑等。只要可具有本發明之效果,亦可具有其他的置換基。(b) Aminotriazole, an aminotriazole derivative, an aminotriazole or an aminotriazole derivative, preferably, for example, 3-amino-1,2,4-triazole or 4-amine Base-1,2,4-triazole, 3-amino-5-methyltriazole, 3-amino-5-ethyltriazole, 3,5-diamino-1,2,4-tri Oxazole, 3-amino-1,2,4-triazole-5-carboxylic acid, 5-amino-1,2,3,4-thiatriazole and the like. Other substituents may be provided as long as they have the effects of the present invention.

(c)烷基胺衍生物(其中,烷基之碳數在4~18的範圍)烷基胺衍生物,可為月桂酸二乙醇胺(lauric acid diethanolamide)、聚環氧乙烷油酸醯胺、聚環氧乙烷硬脂胺、N,N-雙(2-羥乙基)-N-環己胺等。其中,尤其是使用N,N-雙(2-羥乙基)-N-環己胺的情形,將pH調整至上述較佳範圍之pH調整劑由於亦可同時作用,故佳。(c) an alkylamine derivative (wherein the carbon number of the alkyl group is in the range of 4 to 18) alkylamine derivative, which may be lauric acid diethanolamide or polyethylene oxide oleate Polyethylene oxide stearylamine, N,N-bis(2-hydroxyethyl)-N-cyclohexylamine, and the like. Among them, in particular, in the case of using N,N-bis(2-hydroxyethyl)-N-cyclohexylamine, it is preferred that the pH adjuster having a pH adjusted to the above preferred range can also act simultaneously.

(d)其他成分為了輔助胺基四唑等之水溶液化、或均勻地處理銅表面等,可適當添加醇等水溶性之溶劑、硫酸鈉、硫酸銨、氯化銨、氯化鈉等金屬鹽、氨等。(d) Other components In order to assist the aqueous solution of the aminotetrazole or the like, or to uniformly treat the copper surface, a water-soluble solvent such as an alcohol or a metal salt such as sodium sulfate, ammonium sulfate, ammonium chloride or sodium chloride may be appropriately added. , ammonia, etc.

(e)pH調整pH調整劑,例如可為氫氧化鈉、氨、單乙醇胺、環己胺環氧乙烷等。(e) pH adjustment The pH adjuster may be, for example, sodium hydroxide, ammonia, monoethanolamine, cyclohexylamine ethylene oxide or the like.

(2)基板之製造方法(2) Method of manufacturing substrate

(a)銅或銅合金表面本發明之方法所欲進行處理之銅表面,係如印刷電路板等導體表面般與阻焊層接著之銅表面、或與用以形成圖案之圖案形成用阻擋層接著之銅表面等。(a) Copper or copper alloy surface The copper surface to be treated by the method of the present invention is a conductor surface such as a printed circuit board, and a copper surface adjacent to the solder resist layer or a barrier layer for pattern formation to form a pattern Then the copper surface and so on.

此銅或銅合金表面,為了提高與阻擋層之接著效果,可藉由微蝕刻法、電鍍法、無電電鍍法、氧化法(黑氧化(black oxide)、棕氧化(brown oxide))、氧化-還元法、刷式研磨法(brushing)、噴射洗滌法等來進行粗化。The surface of the copper or copper alloy may be microetched, electroplated, electrolessly plated, oxidized (black oxide, brown oxide), oxidized to improve adhesion to the barrier layer. The refining method, the brushing method, the jet washing method, and the like are used for roughening.

上述微蝕刻法,例如可例舉以有機酸-銅離子型蝕刻劑、硫酸-過氧化氫型蝕刻劑、過硫酸鹽型蝕刻劑、氯化銅型蝕刻劑、氯化鐵型蝕刻劑等所進行之蝕刻處理。The microetching method may, for example, be an organic acid-copper ion type etchant, a sulfuric acid-hydrogen peroxide type etchant, a persulfate type etchant, a copper chloride type etchant, or a ferric chloride type etchant. Etching treatment is performed.

其中,由於有機酸-銅離子型蝕刻劑之蝕刻處理,由於其提高銅或銅合金之表面與阻焊層、圖案形成用阻擋層之接著性的效果高,故為特佳。Among them, the etching treatment of the organic acid-copper ion type etchant is particularly preferable because it has a high effect of improving the adhesion between the surface of the copper or copper alloy and the solder resist layer and the barrier layer for pattern formation.

粗化後之銅或銅合金表面,較佳為粗化成L值50~75之表面。若在此範圍,則可特別提升與阻擋層之接著性。The surface of the roughened copper or copper alloy is preferably roughened to a surface having an L value of 50 to 75. If it is in this range, the adhesion to the barrier layer can be particularly improved.

(b)表面處理使上述處理液接觸銅表面進行表面處理。將上述處理液塗布於銅表面之方法並無特別限制,例如可使用噴霧(淋浴)法、浸漬法等進行塗布後,再進行水洗、乾燥即可。(b) Surface treatment The above treatment liquid is brought into contact with the copper surface for surface treatment. The method of applying the treatment liquid to the surface of the copper is not particularly limited. For example, it may be applied by a spray (shower) method, a dipping method, or the like, followed by washing with water and drying.

處理液,較佳在pH8~pH12、更佳在pH9~11的範圍來使用。係由於若在此範圍使用,則可使被膜附著性良好之故。The treatment liquid is preferably used in the range of pH 8 to pH 12, more preferably pH 9 to 11. If it is used in this range, the film adhesion can be improved.

(c)阻擋層之形成在進行完上述表面處理之銅表面形成有有機被膜。透過此被膜形成阻擋層。阻擋層,例如為液狀阻焊劑、乾膜式阻焊劑等之阻焊層、液狀或乾膜式之圖案形成用阻擋層等。(c) Formation of barrier layer An organic film was formed on the surface of the copper surface subjected to the above surface treatment. A barrier layer is formed through the film. The barrier layer is, for example, a solder resist such as a liquid solder resist, a dry film solder resist, a barrier layer for pattern formation of a liquid or dry film type, or the like.

尤其是液狀阻焊劑,係在塗布後加熱至100~200℃使其熱硬化。在兩面形成阻焊層之基板的情形,可首先在銅表面之一面側塗布阻焊劑後進行熱硬化,然後再於另一面側亦形成阻焊層,未塗布有阻焊劑之銅或銅合金表面在露出的狀態下曝露於熱中,銅表面將發生熱氧化而產生變色。In particular, the liquid solder resist is heat-hardened by heating to 100 to 200 ° C after coating. In the case of forming a substrate of a solder resist layer on both sides, a solder resist may be first applied to one side of the copper surface to be thermally hardened, and then a solder resist layer may be formed on the other side, and a copper or copper alloy surface not coated with a solder resist may be applied. Exposure to heat in an exposed state causes thermal oxidation of the copper surface to cause discoloration.

當阻焊層之下面發生熱氧化時,與阻焊層之接著性將降低。又,若在變色的狀態下直接設置阻焊層,則阻焊層上之外觀的顏色將變暗。以AOI檢查機進行自阻焊層上之外觀檢查時,若顏色暗,則有可能產生誤動作。When thermal oxidation occurs under the solder resist layer, the adhesion to the solder resist layer is lowered. Further, if the solder resist layer is directly provided in a state of discoloration, the color of the appearance on the solder resist layer is darkened. When the AOI inspection machine performs an appearance inspection on the self-resisting solder layer, if the color is dark, malfunction may occur.

以本發明之處理液進行處理過之銅表面,由於可有效防止阻焊劑熱硬化時之氧化、變色,因此適於阻焊前之處理。The surface of the copper treated by the treatment liquid of the present invention is suitable for the treatment before the solder resist because it can effectively prevent oxidation and discoloration when the solder resist is thermally hardened.

(實施例)(Example)

以下藉實施例,更加具體說明本發明。The invention will be more specifically described below by way of examples.

(實施例1~8、比較例1~6)以"MECetch BOND CZ-8100"(MEC股份有限公司製商品名)對印刷電路板用覆銅積層板(FR-4)表面之銅進行蝕刻處理,形成粗化面。再以色彩色差計("CR-300",柯尼卡美能達股份有限公司製商品名),對以上述方式處理過的銅表面測量L值,其結果示於表1。另,實施例2及比較例6並無進行此蝕刻處理。(Examples 1 to 8 and Comparative Examples 1 to 6) The copper on the surface of the copper-clad laminate (FR-4) for a printed circuit board was etched by "MECetch BOND CZ-8100" (trade name, manufactured by MEC Co., Ltd.). Forming a roughened surface. Further, the L value was measured on the surface of the copper treated in the above manner by a color difference meter ("CR-300", trade name of Konica Minolta Co., Ltd.), and the results are shown in Table 1. Further, in Example 2 and Comparative Example 6, this etching treatment was not performed.

接著,調整下述表1所示之組成的水溶液,將蝕刻過之積層板於20℃下浸漬於此水溶液中15秒後,進行水洗、並加以乾燥。另,比較例5及6並無進行此處理。Next, an aqueous solution having the composition shown in the following Table 1 was adjusted, and the etched laminated plate was immersed in the aqueous solution at 20 ° C for 15 seconds, and then washed with water and dried. Further, Comparative Examples 5 and 6 did not perform this treatment.

然後,為了在阻焊層形成步驟於銅面露出的狀態下再次進行曝露於熱中之步驟,將所得之積層板於150℃下放置在熱風乾燥爐40分鐘。在此積層板之單面塗布阻焊劑("PSR-4000",太陽油墨製造股份有限公司製),並進行硬化(預硬化)、曝光、顯影、硬化(後硬化),形成阻焊層。Then, in order to perform the step of exposing to heat again in a state where the solder resist layer forming step was exposed to the copper surface, the obtained laminated board was placed in a hot air drying oven at 150 ° C for 40 minutes. A solder resist ("PSR-4000", manufactured by Sun Ink Manufacturing Co., Ltd.) was applied to one side of the laminate, and hardened (pre-hardened), exposed, developed, and cured (post-hardened) to form a solder resist layer.

(1)變色確認測試對所製得之積層板自阻焊層(SR)上進行觀察,將變色程度的檢查結果示於表1。A表示完全未發生變色,B表示變色程度小,C表示變色程度大,D則表示有嚴重的變色。(1) Color change confirmation test The laminated board self-resisting solder layer (SR) was observed, and the inspection result of the discoloration degree is shown in Table 1. A indicates no discoloration at all, B indicates a small degree of discoloration, C indicates a large degree of discoloration, and D indicates severe discoloration.

(2)密合性測試(剝離測試)以切刀將所製得之積層板的阻焊層面橫切成1mm寬,在室溫下浸漬於5wt%鹽酸10分鐘,之後進行水洗、乾燥。充分使黏貼膠帶密貼在該經橫切之阻焊層部分後再加以剝離,視阻焊層的剝離程度來檢查密合性。結果示於表1。A表示無剝離,B表示有些許剝離,剝離的程度小,C表示剝離的程度大,D則表示完全剝離。(2) Adhesion test (peeling test) The solder resist layer of the obtained laminate was cut into a width of 1 mm by a cutter, and immersed in 5 wt% hydrochloric acid at room temperature for 10 minutes, followed by washing with water and drying. The adhesive tape was sufficiently adhered to the portion of the cross-cut solder resist layer, and then peeled off, and the adhesion was checked depending on the degree of peeling of the solder resist layer. The results are shown in Table 1. A indicates no peeling, B indicates some peeling, and the degree of peeling is small, C indicates a large degree of peeling, and D indicates complete peeling.

如從表1清楚可知,實施例1~8之變色確認測試及密合性測試皆在B以上之合格程度。As is clear from Table 1, the discoloration confirmation test and the adhesion test of Examples 1 to 8 were all above B.

相對於此,比較例1由於未添加胺基三唑化合物,因此變色的程度大(為C),並不佳。On the other hand, in Comparative Example 1, since the aminotriazole compound was not added, the degree of discoloration was large (C), which was not preferable.

又,比較例2由於未添加胺基四唑化合物,因此與阻焊層之接著性低(為C),於剝離測試中亦產生剝離,並不佳。Further, in Comparative Example 2, since the aminotetrazolium compound was not added, the adhesion to the solder resist layer was low (in C), and peeling occurred in the peeling test, which was not preferable.

又,比較例3~4,由於未添加烷基胺衍生物,於變色確認測試中並未獲得好的結果。Further, in Comparative Examples 3 to 4, since the alkylamine derivative was not added, good results were not obtained in the color change confirmation test.

又,比較例5~6,由於未特別使用處理液,因此變色確認測試及密合性測試皆未得到較佳結果。Further, in Comparative Examples 5 to 6, since the treatment liquid was not used in particular, no satisfactory results were obtained in the color change confirmation test and the adhesion test.

Claims (9)

一種基板之製造方法,包含下列步驟:使含胺基四唑化合物、胺基三唑化合物、及烷基胺衍生物之處理液接觸銅或銅合金表面之至少一面側之步驟;及在接觸該處理液之銅或銅合金表面形成阻擋層之步驟,其中該處理液包含胺基四唑化合物0.05wt%~5wt%、胺基三唑化合物0.1wt%~5wt%、烷基胺衍生物0.3wt%~7wt%及剩餘部份為水。A method for producing a substrate, comprising the steps of: contacting a treatment liquid containing an aminotetrazole compound, an aminotriazole compound, and an alkylamine derivative with at least one side of a surface of a copper or copper alloy; and contacting the a step of forming a barrier layer on the surface of the copper or copper alloy of the treatment liquid, wherein the treatment liquid comprises 0.05 wt% to 5 wt% of the aminotetrazole compound, 0.1 wt% to 5 wt% of the aminotriazole compound, and 0.3 wt% of the alkylamine derivative. %~7wt% and the rest is water. 如申請專利範圍第1項之基板之製造方法,其中,在銅或銅合金表面之至少一面形成該阻擋層後,將該阻擋層之樹脂加熱至100℃~200℃的範圍以進行熱硬化。The method for producing a substrate according to claim 1, wherein the barrier layer is formed on at least one surface of the copper or copper alloy, and the resin of the barrier layer is heated to a range of from 100 ° C to 200 ° C for thermal curing. 如申請專利範圍第1項之基板之製造方法,其中,該阻擋層為阻焊層。The method of manufacturing a substrate according to claim 1, wherein the barrier layer is a solder resist layer. 如申請專利範圍第1項之基板之製造方法,其中,在以該處理液進行處理前,藉由蝕刻對銅或銅合金表面進行粗化。The method for producing a substrate according to the first aspect of the invention, wherein the surface of the copper or copper alloy is roughened by etching before the treatment with the treatment liquid. 如申請專利範圍第4項之基板之製造方法,其中,將該銅或銅合金表面粗化至L值50~75的範圍。The method for producing a substrate according to the fourth aspect of the invention, wherein the surface of the copper or copper alloy is roughened to an L value of 50 to 75. 如申請專利範圍第1項之基板之製造方法,其中,在pH8~pH12的範圍使用該處理液。The method for producing a substrate according to the first aspect of the invention, wherein the treatment liquid is used in a range of pH 8 to pH 12. 如申請專利範圍第1項之基板之製造方法,其中,該胺基四唑化合物:胺基三唑化合物之濃度比例,以重量比 計,在1:1~1:3的範圍。The method for producing a substrate according to the first aspect of the invention, wherein the ratio of the concentration of the aminotetrazole compound: the aminotriazole compound to the weight ratio In the range of 1:1~1:3. 一種銅表面處理劑,係用以提升銅或銅合金表面與阻擋層之接著,其特徵在於,包含:胺基四唑化合物0.05wt%~5wt%、胺基三唑化合物0.1wt%~5wt%、烷基胺衍生物0.3wt%~7wt%、及剩餘部份為水。A copper surface treatment agent for lifting a copper or copper alloy surface and a barrier layer, comprising: an aminotetrazole compound of 0.05 wt% to 5 wt%, and an aminotriazole compound of 0.1 wt% to 5 wt% The alkylamine derivative is 0.3 wt% to 7 wt%, and the remainder is water. 如申請專利範圍第8項之銅表面處理劑,其中,該銅表面處理劑在pH8~pH12的範圍。The copper surface treatment agent of claim 8, wherein the copper surface treatment agent is in the range of pH 8 to pH 12.
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