TWI391235B - Light irradiation device - Google Patents

Description

Light irradiation device

According to the present invention, a light source lamp having, for example, a rod-shaped light source and a mirror that reflects light emitted from the light source lamp are irradiated with light to be subjected to an object to be processed, for example, a curing process or a modification process. Irradiation device.

Nowadays, a light irradiation device including a light source lamp for irradiating light including ultraviolet rays is used to cure and dry a protective film, an adhesive, a paint, an ink, a photoresist, a resin, an orientation film, and the like of an object to be processed, for example. , melting or softening, upgrading treatment, etc., are widely used in various fields.

6 is a schematic cross-sectional view showing a configuration of an example of a conventional light irradiation device, and FIG. 7 is a cross-sectional view showing a section of a light irradiator constituting the light irradiation device shown in FIG. 6 perpendicular to a tube axis of a light source lamp. Figure.

In the light irradiation device, the light illuminator 40 for illuminating the light including the ultraviolet ray is provided, and the object to be processed is transported by, for example, the lower position of the light illuminator 40 by a transport mechanism (not shown). (Workpiece) W, irradiated with ultraviolet rays.

The light illuminator 40 is formed by the partition wall 42 so that the wind tunnel 43 and the lamp arrangement space 44 are arranged in the vertical direction, and the lamp arrangement space 44 has a substantially box-shaped lamp chamber 41 below the lamp arrangement space 44. The arrangement space 44, the rod-shaped light source lamp 50 is disposed to face the object to be processed The object 55 extends in an orthogonal direction, and has a mirror 55 such as an elliptical reflecting surface that reflects light from the light source lamp 50, with the first focus position f being aligned with the center of the light source lamp 50. The light source lamp 50 is disposed in such a manner as to extend.

In the partition wall 42 of the lamp chamber 41, a cooling airflow common opening portion 45 formed in a state in which a plurality of through holes that communicate the wind tunnel 43 and the lamp arrangement space 44 are arranged along the longitudinal direction of the light source lamp 50 is formed, and The nozzle portion 46 that protrudes downward at the both side edges of the cooling air flow general opening portion 45 is formed integrally with the partition wall 42 so as to extend along the longitudinal direction of the light source lamp 50.

Further, a duct 48 connected to the internal space of the exhaust fan 49 and connected to the wind tunnel 43 is provided in the upper portion of the lamp chamber 41.

At the top of the mirror 55, an opening portion 56 formed by, for example, a groove extending along the light source lamp 50 is formed, in which the front end portion of the nozzle portion 46 integrally formed with the partition wall 42 is inserted. Thereby, a cooling air passage 60 for circulating the cooling air of the light source lamp 50 and the mirror 55 is formed.

In the light irradiation device, the light emitted from the light source lamp 50 is directly or reflected by the mirror 55 and is irradiated onto the object W to be processed. Specifically, the reflected light reflected by the mirror 55 is enlarged in a state where the position of the second focus f2 of the mirror 55 is temporarily concentrated, and is located closer to the light than the second focus f2 of the mirror 55. The entire object to be processed W on the far side in the irradiation direction is irradiated.

Further, when the light source lamp 50 is turned on, the exhaust fan 49 is actuated to attract the cooling air into the lamp chamber 41, whereby the wind source lamp 50 is cooled by the wind. The mirror 55 is cooled, and the cooling air introduced into the lamp chamber 41 flows into the wind tunnel 43 via the nozzle portion 46 forming the cooling air passage 60, and is then exhausted via the duct 48.

In the light irradiation device disclosed in Patent Document 1, as shown in FIG. 8, in order to set the width of the cooling air passage 60 which is the most optimal size of the light source lamp 50 with respect to the diameter of the light source lamp 50, a cooling air is formed. The nozzle portion 46 of the path 60 is configured to be different from the partition wall 42 of the lamp chamber 41.

[Patent Document 1] Japanese Patent Laid-Open No. Hei 8-174567

In general, the processing time of the light irradiation treatment using the ultraviolet light as described above is greatly dependent on the irradiation amount of the ultraviolet light, and by setting the irradiation amount of the ultraviolet light in the light irradiation region to be large, the processing time can be shortened. It is known to improve the processing efficiency, and it is desirable to increase the amount of ultraviolet rays irradiated by the light irradiator.

In the light irradiation device of the above configuration, when the light source lamp 50 is turned on, in order to prevent the light source lamp 50 and the mirror 55 from being overheated, it is necessary to form the opening portion 56 of the cooling air passage 60 for common cooling air flow, for example, formed in The top of the light source lamp 50.

However, there is a problem that the ultraviolet light emitted from the light source lamp 50 toward the opening 56 of the mirror 55 cannot be effectively utilized due to the presence of the opening 56. In fact, for the entire light emitted by the light source lamp 50, toward the reflection The ratio of the ultraviolet rays that are radiated by the opening 56 of the mirror 55 and cannot be effectively utilized is, for example, about 20%.

In view of such a problem, as a means for increasing the amount of irradiation of ultraviolet rays to the object W to be processed, it is possible to increase the lamp input power of the light source lamp 50 itself, but the light source lamp 50 having a large input power is used. In the case of the above, it is easy to cause the problems shown below. In other words, the light emitted from the light source lamp 50 toward the opening 56 of the mirror 55 is directly irradiated to the nozzle portion 46 or the nozzle portion 46A forming the cooling air passage 60, and is heated, but the nozzle portion 46 or the nozzle portion 46A is caused by the nozzle portion 46A. The reason for the ease of processing, low cost, etc., is formed by, for example, aluminum, so that it is easily deformed by heating. Therefore, in order to prevent the nozzle portion 46 or the nozzle portion 46A from being deformed by heating, not only the light source lamp 50 and the mirror 55 but also the nozzle portion 46 or the nozzle portion 46A need to be cooled, and as a result, the cooling air requiring a larger air volume is increased. The energy consumption of the light irradiation device hinders the energy saving of one of the requirements of such a light irradiation device.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a light irradiation device including light irradiation of a light illuminator formed with a cooling air passage for cooling a light source and a cooling airflow of a mirror. In the device, it is possible to increase the amount of light irradiation to the object to be processed, and it is possible to obtain a light irradiation device which can obtain a sufficient cooling function without greatly increasing the amount of wind of the cooling air.

Further, another object of the present invention is to provide a light source lamp which can increase the light utilization amount of the light irradiated by the light source lamp and increase the amount of light irradiation on the light irradiation surface, and can surely prevent the formation of the light irradiation device from being cooled. Spray of wind road The mouth becomes the light source of the overheated state.

The present invention relates to a light-irradiating device comprising a light-emitting device in which a rod-shaped light source lamp having a circular cross section is disposed in a state in which a tube axis thereof and a first focus position of a mirror having a reflecting surface are aligned. When the light source lamp is lit, the light source lamp and the mirror cooling light are irradiated by the cooling wind, and the light is irradiated in the direction of the light, and a cooling air path is formed behind the light source lamp, which is a mirror The enclosed space is connected to allow the cooling air to circulate, and is formed along the light source lamp at the top of the mirror. The cooling air passage is provided with a nozzle for setting the width of the light source lamp, and the light source lamp a reflecting film that reflects the light emitted by the light source lamp is formed on an outer surface region of the cooling air passage opening, and the reflecting film is formed to extend along the tube axis over the entire area of the light emitting region: The surface area of the vertical direction of the tube axis of the light source lamp is outside the angle range of the nozzle when the nozzle is viewed from the center of the tube axis.

The light source lamp of the present invention is a light source lamp used in the above-described light irradiation device, and is characterized in that it has a rod-shaped sealing body having a circular cross section, and is disposed at a first focus position of a grooved mirror disposed in the light irradiator. In a state, an opening surface of the cooling air passage that communicates with the space surrounded by the mirror and used to circulate the cooling air is opposed to the outer surface region of the sealing body, and a reflecting film is formed in the light emitting region. The entire area extends along the tube axis It is formed on a surface area outside a range of angles when the nozzle is viewed from the cross section perpendicular to the tube axis of the light source lamp.

According to the light-irradiating device of the present invention, since a reflecting film is formed by using an appropriate range in the outer surface region of the sealing body as a light source lamp, the reflecting film can be used to make the light source lamp face the opening direction of the cooling air passage. Since the emitted light does not hinder the effective reflection area of the mirror and is effectively reflected, the amount of light irradiation on the light-irradiated surface can be increased, and predetermined light irradiation processing for the object to be processed can be performed with high processing efficiency.

Further, in the case where the nozzle for setting the width of the light source lamp is provided in the cooling air passage, since the light radiated toward the opening direction of the cooling air passage can be prevented from directly irradiating the nozzle, it is not necessary to increase the amount of cooling air necessary for the cooling air. Therefore, it is possible to surely prevent the nozzle from being overheated, and it is possible to save energy.

According to the light source lamp of the present invention, in the case of using the light irradiation device, the light radiated toward the opening direction of the cooling air passage can be reflected by the reflection film in relation to the effective reflection region of the mirror. Since it can be effectively utilized, the amount of light irradiation to the light-irradiated surface can be increased, and since the light from the light source lamp can be prevented from being directly irradiated to the nozzle, it is not necessary to increase the required cooling wind when the light source lamp is lit. The air volume can surely prevent the nozzle from being overheated, and as a result, it is possible to save energy by using the light irradiation device including the light source lamp.

Hereinafter, the present invention will be described in detail with reference to the drawings.

1 is a schematic cross-sectional view showing a configuration of an example of a light irradiation device according to the present invention, FIG. 2 is a perspective view showing a schematic configuration of a light irradiator of the light irradiation device shown in FIG. 1, and FIG. 3 is a view showing the structure of FIG. A cross-sectional view of a section of the light illuminator shown perpendicular to the tube axis of the light source lamp.

The light irradiation device is configured to emit ultraviolet light to the object to be processed which is conveyed by, for example, a lower position of the light irradiator 10 by a transport mechanism (not shown). To perform a predetermined light irradiation processor.

The light irradiator 10 is provided with a substantially box-shaped lamp chamber 11 having an open light irradiation port 11A at the lower side, and an upper chamber and a constituent lamp constituting the wind tunnel 13 partitioned by the partition wall 12 are formed. A lower chamber of the space 14 is disposed, and a duct 17 is provided at an upper portion of the lamp chamber 11, which is connected to the exhaust fan 16 and communicates with the inside of the wind tunnel 13.

In the lamp arrangement space 14 of the lamp chamber 11, the rod-shaped light source lamp 20 is disposed in a posture in which the tube axis extends in parallel with the light irradiation surface A.

In the partition wall 12 of the lamp chamber 11, a cooling air flow common opening 15 formed in a state in which a plurality of through holes 15A that communicate the wind tunnel 13 and the lamp arrangement space 14 are arranged along the tube axis of the light source lamp 20 is formed, and The nozzle portion 18 formed of aluminum, which protrudes downward from the both side edges of the cooling air flow general opening portion 155, is formed integrally with the partition wall 12 so as to extend along the longitudinal direction of the light source lamp 20, thereby forming cooling. The air passage 19 is a versatile cooling airflow for cooling the light source lamp 20 and the mirror 30 by the exhaust fan 16 being actuated into the lamp chamber 11.

The nozzle portion 18 is for setting the width of the cooling air passage formed between the light source lamp 20 (separation distance from the light source lamp 20), and is preferably the speed of the cooling air flowing around the light source lamp 20.

In the lamp arrangement space 14, the grooved mirror 30 having the length equal to or longer than the size of the light-emitting area L (light-emitting length) of the light source lamp 20 and having an elliptical reflecting surface is at the position and composition of the first focus f1 thereof. The lamp center C of the light-emitting portion of the light source lamp 20 is disposed in a state of being aligned.

An opening portion 31 formed by a groove formed, for example, along the light source lamp 20 is formed at the top of the mirror 30, and an opening edge portion of the opening portion 31 is formed at a front end portion of the nozzle portion 18. The mirror holding portion 18A is held, and the front end portion is supported by the opening edge portion of the light irradiation port 11A.

On the inner surface of the mirror 30, a multilayer reflective film (not shown) made of tantalum oxide (Ta ₂ O ₅ ) and cerium oxide (SiO ₂ ) is formed by, for example, vapor deposition.

The specific structure of the thickness and the number of layers of each layer of the multilayer reflective film can be appropriately set so that ultraviolet rays of a specific wavelength are efficiently reflected by the purpose of processing by the light irradiation device. For example, in the case of curing treatment of a photocurable resin, the thickness and the number of layers of each layer are set so that ultraviolet rays having a wavelength of 350 to 400 nm can be efficiently reflected, and, for example, light used for an alignment film of a liquid crystal panel can be used. In the case of the orientation treatment, the thickness and the number of layers of each layer are set so that the ultraviolet rays having a wavelength of 240 to 280 nm can be efficiently reflected.

The light source lamp 20 is as shown in FIG. 4, and has two ends sealed, for example by The cross section of the glass is a circular envelope 21 in which a pair of electrodes 22 are disposed opposite each other at the both end portions, and are packaged with, for example, mercury, a rare gas, and a halogen gas, and are contained by radiation. Ultraviolet light high pressure mercury lamp.

In the both ends of the light source lamp 20 which are continuous with the light-emitting region L, the umbrella-shaped windshield member 23 for preventing the temperature from being lowered by the jetted cooling air is a cover body which covers the position opposite to the arrangement position of the electrode 22. The way the surface portion is set.

In the state in which the light source lamp 20 is disposed at a predetermined position in the lamp chamber 11 in a predetermined posture, it faces the opening of the nozzle portion 18 where the cooling air passage 19 is formed, in other words, on the top of the mirror 30. The reflection film 25 having a function of effectively reflecting ultraviolet rays of a specific wavelength for the purpose of processing in the outer surface region facing the opening portion 31 is formed to extend along the tube axis direction of the light source lamp 20.

The reflection film 25 is a cross section perpendicular to the tube axis of the light source lamp 20, and is formed in an angular range θ when the mirror holding portion 18A of the nozzle portion 18 is viewed centering on the tube axis (the lamp center C) of the light source lamp 20. The area is preferably such that the angle range is, for example, 90° (refer to Fig. 3). With such a configuration, the effective reflection area of the mirror 30 is not hindered, and the light radiated toward the opening 31 of the mirror 30 can be efficiently reflected by both the reflection film 25 and the mirror 30.

The reflective film 25 is formed by, for example, 600 to 800 ° C when the light source lamp 20 is turned on. Therefore, it is required to be formed of, for example, a material having excellent heat resistance, for example, by using tantalum oxide (Ta _{2 ).} O ₅ ) is composed of a multilayer reflective film formed of cerium oxide (SiO ₂ ). The reflective film of such a structure can be formed by, for example, evaporation.

In the reflection film 25, as described above, the ultraviolet ray of a specific wavelength can be effectively reflected by the purpose of the treatment by the light irradiation device, and the material, the thickness of each layer, and the number of layers are not particularly limited. For example, zirconia can also be used. Or yttrium oxide to replace yttrium oxide.

In the light irradiator 10, the width of the nozzle portion 18 and the light source lamp 20, that is, the closest distance K between the light source lamp 20 and the mirror holding portion 18A of the nozzle portion 18 is, for example, 4 to 5 mm, whereby The cooling air surely flows through the back side of the light source lamp 20.

In the light irradiation device, for example, the object to be processed is conveyed in a direction orthogonal to the tube axis of the light source lamp 20 so as to pass through the lower position of the light illuminator 10 while maintaining a constant separation distance from the light source lamp 20. The predetermined process is performed by the ultraviolet rays irradiated from the light irradiator 10. In other words, when the light source lamp 20 is turned on, the light including the ultraviolet light emitted from the light source lamp 20 is directly reflected by the light irradiation port 11A or reflected by the reflection film 25 of the mirror 30 and the light source lamp 20, and is irradiated onto the object to be processed. Here, the reflected light I1 reflected by the mirror 30 is temporarily collected by the second focus f2 of the mirror 30, and further diffused by the second focus f2, and is located further in comparison with the second focus f2. The entire object to be processed on the far side in the light irradiation direction is irradiated, and the reflected light I2 reflected by the reflection film 25 is different from the reflected light I1 reflected by the mirror 30, and does not pass through the second focus of the mirror 30. F2, for example, on both sides of the center position of the light irradiation surface A (the position directly under the light source lamp 20) Shoot (see Figure 1).

Further, the cooling mirror 30 that is moved by the exhaust fan 16 and flows through the light irradiation port 11A flows along the inner surface of the mirror 30 and flows along the surface of the envelope 21 of the light source lamp 20 to move the mirror 30. The light source lamp 20 is cooled, and then the nozzle portion 18 is cooled by flowing into the wind tunnel 13 via the cooling air passage 19 formed by the nozzle portion 18, and then exhausted to the outside of the light irradiator 10 via the duct 17. In addition, the mirror 30 is cooled by the cooling air sucked into the lamp arrangement space 14 through the through hole 11B formed in the opening edge portion of the light irradiation port 11A from the back side (see FIG. 3). Here, the air volume of the cooling air is, for example, 1.5 to 2 m ³ /min.

However, in the light source lamp in which the reflection film is formed only on the outer surface of the package, the amount of light irradiation on the light irradiation surface cannot be increased compared to the light irradiation device using the light source lamp without the reflection film. This is because the reflected light from the mirror is different from the light reflected from the reflective film. Therefore, if it is reflected by the mirror in relation to the effective reflection area of the mirror, there is a possibility that it can be reflected to the light irradiation surface. The light in the range is reflected by the reflective film and is irradiated outside the range.

However, the light source lamp 20 is formed by forming the reflecting film 25 in an appropriate range of the outer surface area of the sealing body 21. According to the light irradiation device of the above configuration, the light source lamp 20 can be used by the reflecting film 25. Since the light radiated toward the opening 31 of the mirror 30 is not effectively blocked by the effective reflection area of the mirror 30, the amount of light irradiation on the light irradiation surface A can be increased. Specifically, it is possible to obtain the illuminance within a predetermined range including the position (center position) directly under the light source lamp of the light-irradiating surface A. In the illuminance distribution (for example, see FIG. 5) in which the overall level is high, it is possible to reliably cover the entire object to be processed, and to perform the predetermined object to be processed with high processing efficiency. Light irradiation treatment.

Further, since the light radiated toward the opening 31 of the mirror 30 is prevented from directly irradiating the nozzle portion 18 forming the cooling air passage 19, it is not necessary to increase the amount of cooling air required to prevent the nozzle portion 18 from being overheated. The state can be saved energy.

Hereinafter, an experimental example performed to confirm the effects of the present invention will be described.

(Experimental Example 1)

According to the structure shown in Fig. 1, the light irradiation device of the present invention was produced. The specific form of this light irradiation device is as follows.

The light source lamp is the outer diameter of the enclosure A high-pressure mercury lamp of 23 mm, a light-emitting length of 125 mm, a rated power of 1.5 kW, and a lamp input power of 120 W/cm, and a reflective film formed on the surface area outside the angular range of 90° centered on the tube axis of the package.

The reflective film is a multilayer deposited film of about 20 layers by laminating cerium oxide and cerium oxide by evaporation.

The reflective film has an elliptical reflecting surface, and the separation distance from the first focus to the second focus is 120 mm.

The exhaust fan has a capability of being set such that the amount of air flowing through the light irradiator becomes 1.5 to 2 m ³ /min.

The lamp chamber and the nozzle portion were made of aluminum, and the closest distance between the mirror holding portion of the nozzle portion and the light source lamp was 4.5 mm.

Further, a high-pressure water lamp having the same configuration as that of the above-described light source lamp was used, except that a high-pressure water lamp having the same configuration as that of the above-described light source lamp was used.

In the light irradiation device of the present invention and the light irradiation device for comparison, the light irradiation surface provided at a position separated by 400 mm from the first focus position of the mirror in the light irradiation direction is measured for ultraviolet illuminance having a central sensitivity at a wavelength of 365 nm. The result is shown in Fig. 5. The vertical axis in Fig. 5 is a measurement position indicating the distance in the direction orthogonal to the tube axis from the position immediately below the light source lamp (center position, 0 mm), and shows the result of the light irradiation device of the present invention. The result of the light irradiation device for comparison is shown by Δ.

From the results shown in FIG. 5, it was confirmed that the illuminance of the center position (measurement position 0 mm) of the position directly below the light source lamp is not greatly different between the light irradiation device of the present invention and the light irradiation device for comparison, but In the light irradiation device of the present invention, the illuminance is high on both sides of the center position of the illuminance distribution, and the ultraviolet ray irradiation amount (the integral value of the illuminance in Fig. 5) is in the range of 600 mm from the center position to the left and right. The comparative light irradiation device is about 20% higher.

The reason is as follows. That is, since the reflective film formed on the light source lamp is formed on the surface of the sealing body of the rod-shaped light source lamp having a circular cross section, the reflecting surface of the reflecting film has a circular cross section, so that, for example, when light is emitted from the center of the light source lamp At this time, the light is reflected by the reflection film in a direction opposite to the emission direction by 180°.

However, the actual light source of the light source lamp has a certain size, and the light is It is radiated from the surface of the light-emitting portion having the size. That is, the position at which the light is emitted is slightly offset from the center of the lamp, as shown by the "reflected light I2 of the reflective film" as shown in Fig. 1, and the light reflected by the reflective film is not directed to the opposite side of 180°, but It is reflected slightly closer to the center and illuminated. Therefore, a portion having a high illuminance is generated on both sides of the center position of the illuminance distribution.

As described above, according to the light irradiation device of the present invention, it is possible to effectively reflect the light emitted in the direction of the cooling air passage which cannot be effectively used by the comparative light irradiation device by the reflection film and the mirror. The use of the ground can increase the amount of light exposure.

In addition, when the range of the light irradiation amount of the light-irradiated surface is in the range of 600 mm from the center position, it is expected that the entire object to be processed can be covered, and a sufficient effect can be obtained practically.

Further, when measuring the temperature of the nozzle portion when the light source lamp was turned on, it was confirmed that the comparative light irradiation device was approximately 120 to 130 ° C, whereas the light irradiation device of the present invention was approximately 100 ° C or so. It is a temperature lower than 20 ° C than the comparative light irradiation device.

This is because, in the light irradiation device of the present invention, the light emitted in the direction of the cooling air path is reflected by the reflection film, and is emitted through the light exit port, thereby reducing the amount of light directly irradiated to the nozzle portion. Therefore, it is not necessary to increase the amount of cooling air necessary for preventing the nozzle portion from being in an overheated state, and it is possible to have a cooling function capable of sufficiently cooling the light irradiation device.

The embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment, and various modifications can be made.

For example, in the above embodiment, the cooling air is sucked by the exhaust fan Although the exhaust gas cooling direction in the lamp chamber has been described as an example, it may be a case where the cooling air is supplied to the lamp room through the cooling air passage.

Further, in the light irradiation device of the present invention, the nozzle portion that sets the width of the light source lamp may be formed integrally with the partition wall of the lamp chamber of the light irradiation device, or may be formed differently from the partition wall.

Moreover, the reflecting mirror constituting the light illuminator may not be an elliptical surface but a paraboloid.

Further, in the light irradiation device of the present invention, the mirror constituting the light illuminator may be a combination of two mirrors having a length equal to or greater than the length of the light-emitting lamp, and having two reflecting mirrors. Slotted. In this case, a cooling air path is formed between the two mirrors.

Further, the opening formed at the top of the mirror may be formed by a plurality of holes formed at positions spaced apart from each other along the light source lamps.

10‧‧‧Light illuminator

11‧‧‧ lamp room

11A‧‧‧Lighting port

11B‧‧‧through hole

12‧‧‧ next door

13‧‧‧Wind Cave

14‧‧‧Light configuration space

15‧‧‧General opening for cooling airflow

15A‧‧‧through hole

16‧‧‧Exhaust fan

17‧‧‧ catheter

18‧‧‧Nozzle Department

19‧‧‧Cooling wind road

20‧‧‧Light source

21‧‧‧Enclosed

22‧‧‧Electrode

23‧‧‧winding members

25‧‧‧Reflective film

30‧‧‧Mirror

31‧‧‧ openings

F1‧‧‧1st focus

F2‧‧‧2nd focus

Reflected light from I1‧‧‧ mirror

Reflected light of I2‧‧‧reflective film

40‧‧‧Light illuminator

41‧‧‧light room

42‧‧‧ next door

43‧‧‧Wind Cave

44‧‧‧Light configuration space

45‧‧‧Mainstream opening for cooling airflow

46‧‧‧Nozzle Department

46A‧‧‧Nozzles

48‧‧‧ catheter

49‧‧‧Exhaust fan

50‧‧‧Light source lamp

55‧‧‧Mirror

56‧‧‧ openings

60‧‧‧Cooling wind road

W‧‧‧Objects to be treated

Fig. 1 is a cross-sectional view showing the outline of an example of a light irradiation device of the present invention.

Fig. 2 is a perspective view showing a schematic configuration of a light irradiator of the light irradiation device shown in Fig. 1;

Figure 3 is a cross-sectional view showing a cross section of the light irradiator shown in Figure 2 perpendicular to the tube axis of the light source lamp.

Fig. 4 is a plan view showing the outline of a configuration of an example of a light source lamp of the present invention.

Figure 5 is a view showing the light irradiation device of the present invention produced in the experimental example. A chart of illuminance distribution.

FIG. 6 is a cross-sectional view showing a schematic configuration of an example of a conventional light irradiation device.

Fig. 7 is a cross-sectional view showing a cross section of a light irradiator constituting the light irradiation device shown in Fig. 6 perpendicular to a tube axis of a light source lamp.

8 is a perspective view showing a schematic configuration of another example of a conventional light irradiation device.

11‧‧‧ lamp room

11A‧‧‧Lighting port

11B‧‧‧through hole

12‧‧‧ next door

13‧‧‧Wind Cave

14‧‧‧Light configuration space

15‧‧‧General opening for cooling airflow

15A‧‧‧through hole

18‧‧‧Nozzle Department

18A‧‧‧Mirror Holder

19‧‧‧Cooling wind road

20‧‧‧Light source

23‧‧‧winding members

25‧‧‧Reflective film

30‧‧‧Mirror

C‧‧‧Light center of the light-emitting part of the light source lamp

K‧‧‧The closest distance between the light source lamp and the mirror holding portion of the nozzle section

Claims (2)

A light-irradiating device is provided with a light-emitting device in which a rod-shaped light source lamp having a circular cross section is disposed in a state in which a tube axis thereof and a first focus position of a grooved mirror having a reflecting surface are aligned with each other. When the light source lamp is lit, the light source lamp and the mirror cooling light are irradiated by the cooling wind, and the light is irradiated in the direction of the light, and a cooling air path is formed behind the light source lamp, which is a mirror The enclosed space is connected to allow the cooling air to circulate, and is formed along the light source lamp at the top of the mirror. The cooling air passage is provided with a nozzle for setting the width of the light source lamp, and the light source lamp a reflecting film that reflects the light emitted by the light source lamp is formed on an outer surface region of the cooling air passage opening, and the reflecting film is formed to extend along the tube axis over the entire area of the light emitting region: The surface area of the vertical direction of the tube axis of the light source lamp is outside the angle range of the nozzle when the nozzle is viewed from the center of the tube axis. A light source lamp is a light source lamp used in the light irradiation device according to the first aspect of the invention, characterized in that it has a rod-shaped sealing body having a circular cross section and a groove-like reflection disposed in the light illuminator In a state of the first focus position of the mirror, a reflective film is formed on an outer surface region of the sealed air passage that communicates with the space surrounded by the mirror and that allows the cooling air to flow therethrough. The reflective film is formed to extend along the tube axis in a region of the entire area of the light-emitting region: perpendicular to the tube axis of the light source lamp The surface area outside the angular range of the nozzle when the nozzle is viewed from the tube axis.