JP7422983B2 - Light irradiation equipment and processing equipment - Google Patents

Description

Embodiments of the present invention relate to a light irradiation device and a processing device.

There are light irradiation devices equipped with high-intensity discharge lamps such as high-pressure mercury lamps and metal halide lamps. A high-intensity discharge lamp has a cylindrical arc tube and electrodes provided at both ends of the arc tube. In the case of a high-pressure mercury lamp, rare gas and mercury are sealed inside the arc tube. In the case of a metal halide lamp, a rare gas, mercury, metal, halogen element, etc. are sealed inside the arc tube.

In such a high-intensity discharge lamp, if the temperature of the arc tube becomes too high, the arc tube may become black due to the mercury or the like contained therein, making it impossible to maintain the illuminance. Further, deformation of the arc tube may occur.

Therefore, a technique has been proposed in which the arc tube is cooled by flowing air around the arc tube.
However, in recent years, there has been a demand for miniaturization of high-intensity discharge lamps (arc tubes) and an increase in applied power to improve processing performance, and the temperature of arc tubes tends to increase. Therefore, further improvement in cooling of the arc tube has been required.

JP 2017-157458 Publication

The problem to be solved by the present invention is to provide a light irradiation device and a processing device that can cool an arc tube.

A light irradiation device according to an embodiment includes a reflector having a recess opening on one surface and a plurality of exhaust ports communicating with the internal space of the recess; provided in the internal space of the recess and extending in one direction. The lamp includes a lamp having an arc tube; and a rectifying plate that faces the opening of the recess, is provided with a gap to the reflector, and is capable of transmitting light emitted from the lamp. The plurality of exhaust ports are arranged side by side in the direction in which the lamp extends, and the pitch dimension of the plurality of exhaust ports facing the central region of the lamp is equal to the pitch dimension of the plurality of exhaust ports facing the end region of the lamp. and at least one of the following: smaller than a pitch dimension, and a cross-sectional dimension of the exhaust port facing the central region of the lamp is larger than a cross-sectional dimension of the exhaust port facing the end region of the lamp. be.

According to embodiments of the present invention, it is possible to provide a light irradiation device and a processing device that can cool an arc tube.

FIG. 1 is a schematic cross-sectional view for illustrating a processing apparatus according to the present embodiment. FIG. 2 is a schematic perspective view of a processing device. FIG. 3 is a schematic cross-sectional view of the lamp. FIG. 2 is a schematic cross-sectional view illustrating a light irradiation device according to a comparative example. It is a schematic cross-sectional view for illustrating the function and effect of a current plate. FIG. 7 is a schematic cross-sectional view for illustrating a light irradiation device according to another embodiment. It is a graph for illustrating the temperature reduction effect by the current plate and the air supply port. It is a table for illustrating the temperature reduction effect of the current plate and the air supply port. It is a graph for illustrating the illuminance maintenance effect by a rectifier plate and an air supply port.

Hereinafter, embodiments will be illustrated with reference to the drawings. Note that in each drawing, similar components are denoted by the same reference numerals, and detailed explanations are omitted as appropriate.
FIG. 1 is a schematic cross-sectional view illustrating a processing apparatus 1 according to the present embodiment.
FIG. 2 is a schematic perspective view of the processing apparatus 1.
As shown in FIGS. 1 and 2, the processing device 1 can be provided with a housing 2, a mounting section 3, a power source 4, an exhaust section 5, a controller 6, and a light irradiation device 7.

A light irradiation device 7 can be attached to the housing 2. The housing 2 can be, for example, a chamber. In this case, the casing 2 can have an airtight structure that prevents particles from entering. Further, depending on the use of the processing device 1, the casing 2 may not have an airtight structure. For example, the housing 2 may have a frame structure using elongated members.

The mounting section 3 can place a processing object 100 to be processed. The mounting section 3 can also be provided with a chuck or the like for holding the processing object 100. Further, the mounting section 3 may be configured to move the processing object 100 in the horizontal direction. For example, the mounting section 3 may be an XY table, a conveyor, or the like.

The power source 4 can be electrically connected to a lamp 71 provided in the light irradiation device 7. The power source 4 can supply a predetermined power to the lamp 71.

The exhaust section 5 can be connected to the exhaust port 72b1 of the reflector 72 via the duct 51 or the like. The exhaust section 5 exhausts air from the internal space of the recess 72a through the exhaust port 72b1. The exhaust section 5 can be, for example, a sirocco fan or a blower.

In addition, necessary elements can be added to the processing device 1 as appropriate depending on the content of the processing.
For example, when the processing device 1 is one that performs an alignment process on an alignment film such as a liquid crystal display element or a viewing angle compensation film by a photoalignment method, the processing device 1 includes a lamp 71 that irradiates light including ultraviolet rays. can be provided. Furthermore, the processing device 1 can include a polarizer between the light irradiation device 7 (lamp 71) and the mounting section 3. The polarizer can be, for example, a wire grid type polarizer. If a polarizer is provided, the alignment film of the processing object 100 can be irradiated with polarized light including ultraviolet rays. Therefore, the alignment process can be performed on the alignment film of the processing object 100 by the photoalignment method.

The controller 6 can control the operation of each element provided in the processing device 1. The controller 6 can include, for example, an arithmetic element such as a CPU (Central Processing Unit) and a memory that stores a control program for controlling the operation of each element provided in the processing device 1. The controller 6 can be, for example, a computer.

As shown in FIGS. 1 and 2, the light irradiation device 7 can be provided with a lamp 71, a reflector 72, a holder 73, and a rectifying plate 75.
Although the case where one light irradiation device 7 is provided is illustrated in FIGS. 1 and 2, a plurality of light irradiation devices 7 may also be provided. When a plurality of light irradiation devices 7 are provided, the plurality of light irradiation devices 7 can be arranged in a direction substantially perpendicular to the direction in which the lamp 71 extends.

Here, the lamp 71 used in the light irradiation device 7 can be changed depending on the purpose. For example, in the case where the processing object 100 has an alignment film such as a liquid crystal display element or a viewing angle compensation film, the lamp 71 may be used to irradiate light containing ultraviolet rays so that alignment treatment can be performed by a photoalignment method. can. Furthermore, the lamp 71 can also be used to irradiate light containing ultraviolet rays when curing ultraviolet curing ink, paint, adhesive, etc. attached to the processing object 100. For example, the lamp 71 can be a high intensity discharge lamp (HID) capable of emitting light including ultraviolet rays.

FIG. 3 is a schematic cross-sectional view of the lamp 71.
As shown in FIG. 3, the lamp 71 can include an arc tube 71a, an electrode 71b, a conductive foil 71c, and an outer lead 71d.
The arc tube 71a is provided in an internal space of a recess 72a provided in the reflector 72. The arc tube 71a extends in one direction within the interior space of the recess 72a. The arc tube 71a has a cylindrical shape and can be made of a heat-resistant and light-transmitting material. The material of the arc tube 71a can be, for example, quartz or glass. The glass can be, for example, soda lime glass containing sodium oxide, hard glass, or the like. If soda lime glass is used, it is possible to reduce costs and obtain a transmittance of 80% or more for light having a wavelength near 340 nm. If hard glass is used, the transmittance of light having a wavelength near 340 nm can be further improved.

A discharge medium can be sealed in the interior space of the arc tube 71a. The discharge medium can be, for example, rare gas and mercury. The rare gas can be, for example, xenon, argon, or a mixed rare gas. The gas pressure (rare gas filling pressure) in the internal space of the arc tube 71a at 25° C. can be, for example, 1333 Pa or more. The gas pressure at 25° C. in the internal space of the arc tube 71a can be determined from the standard ambient temperature and pressure (SATP): temperature 25° C., 1 bar. The amount of mercury enclosed can be, for example, about 1 mg to 1000 mg.

Further, the discharge medium may further contain a halogen or a metal for generating ultraviolet light (for example, at least one of iron, tin, indium, bismuth, thallium, and manganese). That is, the lamp 71 may be a metal halide lamp or the like.

Furthermore, a protective film may be provided on the inner wall of the arc tube 71a to prevent mercury from reaching the inner wall of the arc tube 71a. The protective film can be a film containing aluminum oxide or silicon dioxide, for example. The thickness of the protective film can be, for example, about 0.1 μm to 1 μm.

Furthermore, sealing portions 71a1 can be provided at both ends of the arc tube 71a. By providing the sealing portions 71a1 at both ends of the arc tube 71a, the internal space of the arc tube 71a can be hermetically sealed. For example, the pair of sealing parts 71a1 can be formed by crushing both ends of the heated arc tube 71a. For example, the pair of sealing parts 71a1 can be formed using a pinch sealing method or a shrink sealing method. If the sealing portion 71a1 is formed using the pinch seal method, the plate-shaped sealing portion 71a1 can be formed. If the sealing part 71a1 is formed using a shrink sealing method, the columnar sealing part 71a1 can be formed.

The electrodes 71b can be provided at both ends of the arc tube 71a. For example, the electrode 71b can have a filament 71b1 and an inner lead 71b2. The filament 71b1 and the inner lead 71b2 can be integrally formed using a linear member. The linear member may include, for example, tungsten, a reneum tungsten alloy, or the like.

The filament 71b1 is provided in the internal space of the arc tube 71a. For example, the filament 71b1 may be a linear member wound spirally.
One end of the inner lead 71b2 is connected to the filament 71b1 in the interior space of the arc tube 71a. The other end of the inner lead 71b2 is connected to the conductive foil 71c inside the sealing part 71a1. The inner lead 71b2 and the conductive foil 71c can be connected by, for example, laser welding, resistance welding, or the like.

One conductive foil 71c can be provided for one sealing portion 71a1. The conductive foil 71c can be provided inside the sealing part 71a1. The planar shape of the conductive foil 71c can be a square. The conductive foil 71c can be made of, for example, molybdenum foil.

At least one outer lead 71d can be provided for one conductive foil 71c. The outer lead 71d may have a linear shape. One end side of the outer lead 71d is connected to the conductive foil 71c inside the sealing part 71a1. For example, one end side of the outer lead 71d can be laser welded or resistance welded to the conductive foil 71c. The other end side of the outer lead 71d can be exposed to the outside of the sealing part 71a1. The power source 4 can be electrically connected to the outer lead 71d. The outer lead 71d can be made of, for example, molybdenum wire.

In the lamp 71, discharge occurs between the filaments 71b1. Electrons generated by the discharge collide with mercury atoms enclosed in the interior space of the arc tube 71a. When electrons and mercury atoms collide, the mercury atoms receive energy from the electrons and generate ultraviolet light with a peak wavelength of about 253.7 nm. The generated ultraviolet rays are irradiated to the outside of the arc tube 71a. That is, the lamp 71 is an example of a long-arc type high-intensity ultraviolet lamp.

In addition, although the long arc type high-intensity ultraviolet lamp was illustrated above, the lamp used for the light irradiation device 7 is not limited to this. For example, the lamp used in the light irradiation device 7 can be a high-intensity discharge lamp whose arc tube reaches a high temperature (for example, about 600° C. to 850° C.) when lit.

The reflector 72 can be attached to the housing 2, for example. Note that the reflector 72 may be attached to a member such as a bracket provided on the housing 2 or the like. Further, as described later, the reflector 72 may be attached to the moving part 74.

The reflector 72 is provided with a recess 72a. The recess 72a is open to the lower surface 72c of the reflector 72 (the surface of the reflector 72 on the mounting section 3 side). The recess 72a is not open to the side surface of the reflector 72. Note that the recess 72a may be opened on the side surface of the reflector 72, and the opening on the side surface of the reflector 72 may be closed with a plate-like member or the like.
Moreover, although the block-shaped reflector 72 is illustrated, a reflector may be formed by curving a plate-shaped member.

A lamp 71 can be provided in the interior space of the recess 72a. The inner surface of the recess 72a can be a reflective surface. A film containing a highly reflective metal can be provided on the inner surface of the recess 72a. Furthermore, the inner surface of the recess 72a can be polished to a glossy surface. When viewed from the direction in which the lamp 71 extends, the outline of the recessed portion 72a may include a curved line, a straight line, or both a curved line and a straight line. The curve can be, for example, a portion of a circle, a portion of an ellipse, a parabola, or the like.
A part of the light emitted from the lamp 71 is directly emitted onto the processing object 100 . Further, the light irradiated from the lamp 71 and incident on the inner surface of the recess 72 a is reflected toward the processing object 100 . Providing the reflector 72 can improve the efficiency of light use.

An exhaust port 72b1 can be provided on the upper surface 72b of the reflector 72 (the surface of the reflector 72 on the opposite side to the mounting section 3 side). The exhaust port 72b1 communicates with the internal space of the recess 72a. For example, the exhaust port 72b1 penetrates between the upper surface 72b and the inner surface of the recess 72a. As shown in FIG. 2, a plurality of exhaust ports 72b1 can be provided. The plurality of exhaust ports 72b1 can be provided side by side in the direction in which the lamp 71 extends. The pitch dimensions of the plurality of exhaust ports 72b1 may be the same or different. The cross-sectional dimensions of the plurality of exhaust ports 72b1 may be the same or different.

The temperature of the lamp 71 tends to be higher in the central region than in the end regions. Therefore, the pitch dimension of the exhaust ports 72b1 facing the central region may be smaller than the pitch dimension of the exhaust ports 72b1 facing the end regions. The cross-sectional dimension of the exhaust port 72b1 facing the central region may be larger than the cross-sectional dimension of the exhaust port 72b1 facing the end region. The number, arrangement, cross-sectional dimensions, etc. of the exhaust ports 72b1 can be determined as appropriate depending on the length, temperature, etc. of the lamp 71. The number, arrangement, cross-sectional dimensions, etc. of the exhaust ports 72b1 can be appropriately determined by conducting experiments and simulations.
Further, one exhaust port 72b1 (for example, a slit-shaped exhaust port 72b1) extending in the direction in which the lamp 71 extends may be provided. That is, at least one exhaust port 72b1 may be provided.

The exhaust port 72b1 is connected to the exhaust section 5 via the duct 51 or the like. Therefore, air in the internal space of the recess 72a (for example, heated air near the lamp 71) can be exhausted to the outside of the reflector 72 via the exhaust port 72b1.

A pair of holders 73 can be provided. The pair of holders 73 can be provided side by side in the direction in which the lamp 71 extends. The pair of holders 73 can be attached to the reflector 72. Note that the pair of holders 73 can be attached to the housing 2 or to a member such as a bracket provided on the housing 2 or the like. The pair of holders 73 can hold both ends of the lamp 71.

Here, by changing the distance between the lamp 71 and the reflector 72, the width of the irradiation area and the peak value of illuminance can be changed. Therefore, it is preferable to change the distance between the lamp 71 and the reflector 72 depending on processing conditions and the like.
Therefore, a moving part 74 that changes the relative position between the lamp 71 and the reflector 72 may be further provided.
Note that the lamp 71 and the rectifying plate 75 are held in a holder 73. Therefore, the moving part 74 can change the relative position between the lamp 71 and the rectifying plate 75 and the reflector 72.

As illustrated in FIG. 2, the moving unit 74 can change the position of the lamp 71 via the holder 73. For example, the pair of moving parts 74 can be attached to the housing 2 or the like, and the holder 73 can be provided on each of the pair of moving parts 74.

Furthermore, the moving section 74 may also be configured to change the position of the reflector 72. For example, the moving part 74 can be attached to the housing 2 or the like, and the reflector 72 can be provided on the moving part 74. In this case, the holder 73 holding the lamp 71 may be attached to the housing 2 or the like.

Furthermore, a moving section for changing the position of the holder 73 (lamp 71) and a moving section for changing the position of the reflector 72 may be provided, respectively.

The moving unit 74 may include, for example, a ball screw, an encoder, a guide, a servo motor, and the like. Note that the configuration of the moving unit 74 is not limited to that illustrated, and may be any configuration as long as it can change the relative position between the lamp 71 and the reflector 72.

In addition, the holder 73 and the moving part 74 may be provided in the internal space of the recessed part 72a, or may be provided outside the reflector 72. In this case, a hole for providing the holder 73 and the moving part 74 may be provided on the upper surface 72b of the reflector 72, or a hole may be provided on the side surface of the reflector 72 for connecting the holder 73 and the lamp 71.

The current plate 75 has a plate shape and can be provided facing the opening of the recess 72a. The current plate 75 can be attached to the holder 73, for example. The current plate 75 can be formed from a material that is heat resistant and transparent. The rectifying plate 75 can transmit light emitted from the lamp 71 (for example, light including ultraviolet light). The material of the current plate 75 can be, for example, quartz or glass. The glass can be, for example, soda lime glass containing sodium oxide, hard glass, or the like.

Since the current plate 75 is made of a translucent material, the light emitted from the lamp 71 can reach the surface of the object 100 via the current plate 75. On the other hand, the heat generated when the lamp 71 is lit is suppressed from propagating to the surface of the processing object 100 by the rectifying plate 75 .

Next, the function and effect of the current plate 75 will be explained.
FIG. 4 is a schematic cross-sectional view illustrating a light irradiation device 107 according to a comparative example.
As shown in FIG. 4, the light irradiation device 107 is provided with a lamp 71, a reflector 72, and a holder 73a. Note that the light irradiation device 107 is not provided with the rectifying plate 75. Therefore, the holder 73a holds the lamp 71 but does not hold the rectifying plate 75.

When the lamp 71 is turned on, light is generated, but also heat is generated. In the case of the lamp 71, which is a high-intensity discharge lamp, the temperature of the arc tube 71a may be approximately 600° C. to 850° C. when lit. If the temperature of the arc tube 71a becomes too high, the arc tube 71a will become black due to the mercury and the like contained therein, and the illuminance may not be maintained. Furthermore, deformation of the arc tube 71a may occur. Therefore, the exhaust part 5 is provided to exhaust the air in the internal space of the recess 72a (for example, heated air near the lamp 71), and to exhaust the air outside the reflector 72 through the opening of the recess 72a. He is trying to introduce it into the internal space of the recessed part 72a.

Air heated by the lamp 71 is discharged from the interior space of the recess 72a, and unheated air (for example, room temperature air) outside the reflector 72 is supplied to the vicinity of the lamp 71 through the opening of the recess 72a. If this is done, it is possible to suppress the temperature of the arc tube 71a from increasing.

However, as shown in FIG. 4, since the opening of the recess 72a is large, the flow velocity of the air introduced into the internal space of the recess 72a is slow. When the flow velocity of the air becomes slower, the air in the internal space of the recess 72a tends to stagnate, and the difference between the temperature of the arc tube 71a and the temperature of the air near the arc tube 71a becomes smaller. Therefore, cooling of the arc tube 71a is suppressed.

In recent years, there has been a demand for miniaturization of the lamp 71 (the arc tube 71a) and an increase in applied power to improve processing performance, and the temperature of the arc tube 71a tends to increase. Therefore, if the cooling of the arc tube 71a is suppressed, it may become difficult to maintain the illuminance or the arc tube 71a may become easily deformed.

In this case, it is conceivable to increase the exhaust capacity of the exhaust section 5, but this would result in an increase in the size of the processing apparatus 1 and an increase in manufacturing costs.

Further, the surface of the object to be processed 100 is heated by the heat emitted from the lamp 71. When the surface of the processing object 100 is heated, components of the processing object 100 may evaporate from the surface of the processing object 100, as shown in FIG. 4. As described above, since the temperature of the arc tube 71a tends to increase, there is a possibility that the amount of components of the processing object 100 that transpire increases. The evaporated components of the processed material 100 are caught up in the air introduced into the internal space of the recess 72a and enter the internal space of the recess 72a. Since the opening of the recess 72a is located directly above the object 100, more components of the object 100 enter the internal space of the recess 72a.

If components of the processed material 100 that have entered the internal space of the recess 72a adhere to the arc tube 71a, it may become difficult to maintain the illuminance. Further, if the components of the processed material 100 adhere to the arc tube 71a, it becomes difficult to dissipate heat, so there is a possibility that the temperature of the arc tube 71a will further rise.

Therefore, the light irradiation device 7 according to this embodiment is provided with a rectifying plate 75.
FIG. 5 is a schematic cross-sectional view for illustrating the function and effect of the current plate 75.
As shown in FIG. 5, the current plate 75 can be provided facing the opening of the recess 72a. An air supply port 72d can be provided between the current plate 75 and the lower surface 72c of the reflector 72. The air supply port 72d may be a gap provided between the current plate 75 and the lower surface 72c of the reflector 72. That is, the current plate 75 is provided with a gap between the reflector 72 and the reflector 72 .

The air in the internal space of the recess 72a is discharged to the outside of the reflector 72 by the exhaust section 5 through the exhaust port 72b1. Accordingly, air outside the reflector 72 is introduced into the internal space of the recess 72a via the air supply port 72d. That is, an airflow flowing from the air supply port 72d (gap) toward the exhaust port 72b1 is formed in the internal space of the recess 72a. Since the cross-sectional dimension (area) of the air supply port 72d is smaller than the cross-sectional dimension (area) of the opening of the recess 72a, the flow rate of air passing through the air supply port 72d can be increased. Since the air supply port 72d is provided at the periphery of the recess 72a, it is possible to form a high-speed airflow flowing from the periphery of the recess 72a toward the center. Since the lamp 71 (the arc tube 71a) is provided in the center of the recess 72a, low temperature air can easily reach the arc tube 71a.

If the low temperature air reaches the arc tube 71a, the arc tube 71a can be efficiently cooled. Furthermore, if the air flow in the internal space of the recess 72a becomes faster, the retention of air in the internal space of the recess 72a is suppressed, so that the temperature difference between the temperature of the arc tube 71a and the temperature of the air near the arc tube 71a is reduced. becomes larger. Therefore, the arc tube 71a can be easily cooled.

Here, if the temperature of the arc tube 71a becomes too low, the amount of evaporation of the discharge medium decreases, and there is a possibility that a predetermined illuminance cannot be obtained. In this case, the amount and flow rate of air introduced into the internal space of the recess 72a can be adjusted by the dimensions of the air supply port 72d and the amount of air discharged by the exhaust section 5. Therefore, by adjusting the dimensions of the air supply port 72d and the amount of exhaust gas by the exhaust section 5, the temperature of the arc tube 71a can be kept within a predetermined temperature range.

For example, experiments or simulations may be conducted in advance to determine the influence of the temperature of the air around the reflector 72 (outside temperature), the cross-sectional dimension of the air supply port 72d, and the amount of exhaust air from the exhaust section 5 on the temperature of the arc tube 71a. If the temperature is determined as follows, the temperature of the arc tube 71a can be easily controlled.

As described above, the propagation of the heat generated when the lamp 71 is turned on to the surface of the processing object 100 is suppressed by the rectifying plate 75, so that the amount of components of the processing object 100 that evaporate can be reduced. Further, since the rectifying plate 75 faces the opening of the recess 72a, it is possible to suppress the components of the evaporated processing material 100 from entering the internal space of the recess 72a from the opening of the recess 72a.

In this case, the evaporated components of the processed material 100 may adhere to the surface of the current plate 75. However, due to the heat shielding effect of the current plate 75, the amount of evaporation of the components of the processed material 100 can be reduced. Therefore, the amount of deposits is reduced. Furthermore, if the distance between the current plate 75 and the object to be processed 100 can be increased, the amount of deposits will further decrease.

Further, since the rectifying plate 75 is a simple plate-like member, it can be easily attached to and detached from the holder 73. Therefore, when the amount of deposits increases, the current plate 75 can be easily replaced or cleaned (for example, washed).

FIG. 6 is a schematic cross-sectional view for illustrating a light irradiation device 7a according to another embodiment.
As shown in FIG. 6, a reflector 76 is provided in the light irradiation device 7a. The reflector 76 can be, for example, the reflector 72 described above with an air supply port 76a further added thereto. The current plate 75 may be attached to the holder 73 or may be attached to the lower surface 72c of the reflector 76. The opening of the recess 72a may be closed by the rectifying plate 75. When the opening of the recess 72a is blocked by the rectifying plate 75, the moving part 74 can change the relative position between the lamp 71 and the reflector 76.
Note that the air supply port 72d and the air supply port 76a described above may be provided.

The air supply port 76a communicates with the internal space of the recess 72a. The air supply port 76a is provided on a surface (side surface 76b) of the reflector 76 that intersects the surface (lower surface 72c) where the recess 72a opens. For example, the air supply port 76a penetrates between the side surface 76b of the reflector 76 and the inner surface of the recess 72a. The air supply port 76a can be provided on one side surface 76b of the reflector 76, or as shown in FIG. 6, it can be provided on both side surfaces 76b of the reflector 76. However, if the air supply ports 76a are provided on the side surfaces 76b on both sides of the reflector 76, it becomes easier to introduce air into the entire vicinity of the lamp 71.
If the air supply port 76a is provided, an airflow flowing from the air supply port 76a toward the exhaust port 72b1 is formed in the internal space of the recess 72a.

A plurality of air supply ports 76a can be provided. The plurality of air supply ports 76a can be provided side by side in the direction in which the lamp 71 extends. The pitch dimensions of the plurality of air supply ports 76a may be the same or different. The cross-sectional dimensions of the plurality of air supply ports 76a may be the same or different.

The temperature of the lamp 71 tends to be higher in the central region than in the end regions. Therefore, the pitch dimension of the air supply ports 76a facing the central region may be smaller than the pitch dimension of the air supply ports 76a facing the end regions. The cross-sectional size of the air supply port 76a facing the central region may be larger than the cross-sectional size of the air supply port 76a facing the end region. The number, arrangement, cross-sectional dimensions, etc. of the air supply ports 76a can be determined as appropriate depending on the length, temperature, etc. of the lamp 71. The number, arrangement, cross-sectional dimensions, etc. of the air supply ports 76a can be appropriately determined by conducting experiments and simulations.
Further, one air supply port 76a (for example, a slit-shaped air supply port 76a) extending in the direction in which the lamp 71 extends may be provided. That is, at least one air supply port 76a may be provided.

The air supply port 76a is preferably provided in a region between the lower surface 72c of the reflector 76 and a line segment 76c passing through the center of the lamp 71 and parallel to the lower surface 72c of the reflector 76 on the side surface 76b of the reflector 76. In this way, an air current flowing from the bottom to the top in the internal space of the recess 72a is formed, so that the air heated by the lamp 71 can be easily discharged.

Further, as in the case of the air supply port 72d described above, the cross-sectional dimension (area) of the air supply port 76a is smaller than the cross-sectional dimension (area) of the opening of the recess 72a, so that the air passing through the air supply port 76a is The flow rate can be increased. Therefore, low temperature air can easily reach the arc tube 71a. If the low temperature air reaches the arc tube 71a, the arc tube 71a can be efficiently cooled. Furthermore, if the air flow in the internal space of the recess 72a becomes faster, the difference between the temperature of the arc tube 71a and the temperature of the air near the arc tube 71a becomes larger, so that the arc tube 71a can be easily cooled.

Further, as in the case of the air supply port 72d described above, the amount and flow rate of air introduced into the internal space of the recess 72a can be adjusted by the cross-sectional dimension of the air supply port 76a and the amount of exhaust by the exhaust portion 5. can. Therefore, by adjusting the cross-sectional dimension of the air supply port 76a and the exhaust amount by the exhaust section 5, it is possible to keep the temperature of the arc tube 71a within a predetermined temperature range.

For example, the influence of the temperature of the air around the reflector 76 (outside air temperature), the position of the air supply port 76a, the cross-sectional dimension of the air supply port 76a, and the amount of exhaust air by the exhaust section 5 on the temperature of the arc tube 71a is as follows. If the temperature is determined in advance through experiments or simulations, the temperature of the arc tube 71a can be easily controlled.

FIG. 7 is a graph for illustrating the temperature reduction effect of the current plate 75 and the air supply ports 72d and 76a.
A in FIG. 7 is a case where the rectifying plate 75 is not provided, for example, the case of the light irradiation device 107 illustrated in FIG. 4. B in FIG. 7 is the case where the rectifier plate 75 and the air supply ports 72d and 76a are provided, for example, the light irradiation devices 7 and 7a illustrated in FIGS. 5 and 6.

FIG. 8 is a table illustrating the temperature reduction effect of the current plate 75 and the air supply ports 72d and 76a.
FIG. 9 is a graph illustrating the effect of maintaining illuminance by the rectifying plate 75 and the air supply ports 72d and 76a.
C in FIG. 9 is a case where the rectifying plate 75 is not provided, for example, the case of the light irradiation device 107 illustrated in FIG. 4. D in FIG. 9 is a case where the rectifying plate 75 and the air supply port 72d are provided, for example, the case of the light irradiation device 7 illustrated in FIG. 5. E in FIG. 9 is a case where the rectifier plate 75 and the air supply port 76a are provided, for example, the case of the light irradiation device 7a illustrated in FIG. 6.

The measurements in FIGS. 7 to 9 were conducted under the following conditions.
Lamp size: total length 700mm, light emitting length: 600mm, tube diameter φ27.5mm
Rated lamp voltage: 640V, current: 27A, power: 16800W, input density 280W/cm
Electrode: Tungsten/shaft diameter φ3.0mm, total length 30mm
Discharge medium: xenon/50Torr, Hg, HgI2, Fe, Ti, etc.
Reflector material: aluminum
Current plate: Quartz plate (thickness is 1.5mm)

As can be seen from FIG. 7, by providing the rectifying plate 75 and the air supply ports 72d and 76a, the surface temperature of the arc tube 71a can be lowered.
As can be seen from FIG. 8, the surface temperature of the arc tube 71a is maintained even when the light irradiation device 7 is provided with a rectifier plate 75 and an air supply port 72d, and the light irradiation device 7a is provided with a rectifier plate 75 and an air supply port 76a. can be lowered.
As can be seen from FIG. 9, both the light irradiation device 7 provided with the rectifying plate 75 and the air supply port 72d and the light irradiation device 7a provided with the rectification plate 75 and the air supply port 76a suppress the decrease in illuminance. can do.

Although several embodiments of the present invention have been illustrated above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, changes, etc. can be made without departing from the gist of the invention. These embodiments and their modifications are included within the scope and gist of the invention, as well as within the scope of the invention described in the claims and its equivalents. Further, each of the embodiments described above can be implemented in combination with each other.

1 processing device, 5 exhaust section, 6 controller, 7 light irradiation device, 7a light irradiation device, 71 lamp, 71a arc tube, 72 reflector, 72a recess, 72b top surface, 72b1 exhaust port, 72c bottom surface, 72d air supply port, 73 holder, 74 moving part, 75 rectifying plate, 76 reflector, 76a air supply port, 76b side surface, 100 processing object

Claims (7)

a reflector having a recess opening on one surface and a plurality of exhaust ports communicating with the internal space of the recess;
a lamp provided in the inner space of the recess and having an arc tube extending in one direction;
a rectifying plate facing the opening of the recess, provided with a gap between the reflector and the light emitted from the lamp;
Equipped with
The plurality of exhaust ports are arranged in a direction in which the lamp extends,
A pitch dimension of the plurality of exhaust ports facing the central region of the lamp is smaller than a pitch dimension of the plurality of exhaust ports facing the end region of the lamp.
and,
the cross-sectional dimension of the exhaust port facing the central region of the lamp is larger than the cross-sectional dimension of the exhaust port facing the end region of the lamp;
A light irradiation device that is at least one of the following . The light irradiation device according to claim 1, wherein an airflow flowing from the gap toward the plurality of exhaust ports is formed in the internal space of the recess. The light irradiation device according to claim 1 or 2, further comprising a moving section that changes relative positions between the lamp, the rectifying plate, and the reflector. a reflector having a recess opening on one surface, an exhaust port communicating with the internal space of the recess, and a plurality of air supply ports communicating with the internal space of the recess;
a lamp provided in the inner space of the recess and having an arc tube extending in one direction;
a rectifying plate that faces the opening of the recess and is capable of transmitting the light irradiated from the lamp;
Equipped with
The plurality of air supply ports are arranged in a direction in which the lamp extends on a surface of the reflector that intersects with a surface where the concave portion opens ,
A pitch dimension of the plurality of air supply ports facing the central region of the lamp is smaller than a pitch dimension of the plurality of air supply ports facing the end region of the lamp.
and,
the cross-sectional dimension of the air inlet facing the central region of the lamp is larger than the cross-sectional dimension of the air inlet facing the end region of the lamp;
A light irradiation device that is at least one of the following . The light irradiation device according to claim 4 , wherein an airflow flowing from the plurality of air supply ports toward the exhaust port is formed in the internal space of the recess. The light irradiation device according to claim 4 or 5, further comprising a moving part that changes a relative position between the lamp and the reflector. The light irradiation device according to any one of claims 1 to 6;
an exhaust section connected to an exhaust port of a reflector provided in the light irradiation device;
Processing equipment equipped with

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