TW200722274A - Light irradiation device - Google Patents
Light irradiation deviceInfo
- Publication number
- TW200722274A TW200722274A TW095134845A TW95134845A TW200722274A TW 200722274 A TW200722274 A TW 200722274A TW 095134845 A TW095134845 A TW 095134845A TW 95134845 A TW95134845 A TW 95134845A TW 200722274 A TW200722274 A TW 200722274A
- Authority
- TW
- Taiwan
- Prior art keywords
- cooling
- illuminant lamp
- illuminant
- light irradiation
- lamp
- Prior art date
Links
- 238000001816 cooling Methods 0.000 abstract 4
- 239000003570 air Substances 0.000 abstract 3
- 238000000034 methods Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Abstract
The objective of this invention is to provide a light irradiation device and illuminant lamp is suit for thereof well, having a light emitter with cooling-air duct to broaden light irradiation amount of processed object, to buck for lifting process efficiency, and also obtain full cooling function even if amount of cooling wind not increased greatly. The light irradiation device including a light emitter which arranged in state of a tube axis of rod illuminant lamp with circular section is accordant with the first focus place of groove reflector with reflecting surface, when the illuminant lamp is turn on, the illuminant lamp and reflector is cooled by cooling wind, a cooling-air duct formed rear side of the illuminant lamp relative to illuminating direction for circulating cooling wind and interconnecting with reflector enclosed space, reflective film is formed in opposite outside surface region of the illuminant lamp and opening of the cooling-air duct, which refects light emited from the illuminant lamp.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005353541A JP4811000B2 (en) | 2005-12-07 | 2005-12-07 | Light irradiation device |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200722274A true TW200722274A (en) | 2007-06-16 |
TWI391235B TWI391235B (en) | 2013-04-01 |
Family
ID=38130241
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095134845A TWI391235B (en) | 2005-12-07 | 2006-09-20 | Light irradiation device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4811000B2 (en) |
KR (1) | KR101030421B1 (en) |
CN (1) | CN1978983B (en) |
TW (1) | TWI391235B (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7964858B2 (en) * | 2008-10-21 | 2011-06-21 | Applied Materials, Inc. | Ultraviolet reflector with coolant gas holes and method |
WO2011122257A1 (en) * | 2010-03-31 | 2011-10-06 | 株式会社Gsユアサ | Uv irradiation device and inkjet printer |
JP2012198997A (en) * | 2011-03-18 | 2012-10-18 | Ushio Inc | Long arc metal halide lamp and light irradiation device |
US8823249B2 (en) * | 2011-11-15 | 2014-09-02 | Seiko Epson Corporation | Irradiation device and irradiation method |
CN103292282B (en) * | 2012-03-05 | 2016-07-06 | 上海微电子装备有限公司 | For the cooling system of ellipsoidal reflector and the high power lighting source lamp chamber applying it |
KR101991521B1 (en) * | 2012-04-20 | 2019-06-20 | 이와사키 덴끼 가부시키가이샤 | Polarizer unit, jig for adjusting, lamp replacement stage and irradiation apparatus |
JP5573910B2 (en) * | 2012-10-03 | 2014-08-20 | 岩崎電気株式会社 | Irradiation device |
CN103836596B (en) * | 2012-11-22 | 2016-06-01 | 上海微电子装备有限公司 | A kind of superpower mercury lamp room device |
CN104141892B (en) * | 2013-05-08 | 2017-05-31 | 海洋王(东莞)照明科技有限公司 | Fitting structure |
CN104141891B (en) * | 2013-05-08 | 2017-05-31 | 海洋王(东莞)照明科技有限公司 | Fitting structure |
CN103644469A (en) * | 2013-11-25 | 2014-03-19 | 湖州市妙西镇资产经营有限公司 | Novel LED (light-emitting diode) lamp structure |
CN103644470A (en) * | 2013-11-25 | 2014-03-19 | 湖州市妙西镇资产经营有限公司 | Fluorescent lamp structure |
JP6052199B2 (en) * | 2014-02-12 | 2016-12-27 | ウシオ電機株式会社 | Polarized light irradiation device and rod-shaped light source for photo-alignment |
CN105216283A (en) * | 2015-08-28 | 2016-01-06 | 广州达意隆包装机械股份有限公司 | A kind of bottle blowing machine heating fluorescent tube |
CN105487352B (en) * | 2016-02-16 | 2017-06-27 | 武汉华星光电技术有限公司 | The replacing options of exposure machine and Exposing Lamp |
CN106016974B (en) * | 2016-05-12 | 2018-07-06 | 绍兴中漂印染有限公司 | A kind of drying unit for fabric printing |
CN108591876A (en) * | 2018-01-17 | 2018-09-28 | 东莞市天合机电开发有限公司 | A kind of absorption type outdoor LED illuminator |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH024100B2 (en) * | 1980-09-29 | 1990-01-26 | Mitsubishi Electric Corp | |
JPH01209631A (en) * | 1988-02-15 | 1989-08-23 | Nec Corp | Very high pressure mercury-vapor lamp for phosphor film exposure |
JPH0817457A (en) * | 1994-06-28 | 1996-01-19 | Tokyo Gas Co Ltd | Water treatment equipment for fuel cell |
JPH08174567A (en) * | 1994-10-25 | 1996-07-09 | Ushio Inc | Illuminator |
DE19814300B4 (en) * | 1998-03-31 | 2008-09-25 | Bernhard Weber | Headlight or light |
JP2000206619A (en) * | 1999-01-18 | 2000-07-28 | Matsushita Electric Ind Co Ltd | Lamp and liquid crystal projection device |
CA2267674C (en) * | 1999-03-31 | 2010-03-30 | Imax Corporation | Method for cooling an arc lamp |
JP3846232B2 (en) * | 2000-12-08 | 2006-11-15 | ウシオ電機株式会社 | Circulating air cooling system for light irradiators |
JP2003187604A (en) * | 2001-12-17 | 2003-07-04 | Ushio Inc | Optical device |
-
2005
- 2005-12-07 JP JP2005353541A patent/JP4811000B2/en active Active
-
2006
- 2006-09-20 TW TW095134845A patent/TWI391235B/en active
- 2006-10-19 KR KR1020060101923A patent/KR101030421B1/en active IP Right Grant
- 2006-12-07 CN CN2006101531253A patent/CN1978983B/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN1978983B (en) | 2011-05-18 |
TWI391235B (en) | 2013-04-01 |
KR20070059937A (en) | 2007-06-12 |
KR101030421B1 (en) | 2011-04-20 |
CN1978983A (en) | 2007-06-13 |
JP2007157583A (en) | 2007-06-21 |
JP4811000B2 (en) | 2011-11-09 |
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