TW200722274A - Light irradiation device - Google Patents

Light irradiation device

Info

Publication number
TW200722274A
TW200722274A TW095134845A TW95134845A TW200722274A TW 200722274 A TW200722274 A TW 200722274A TW 095134845 A TW095134845 A TW 095134845A TW 95134845 A TW95134845 A TW 95134845A TW 200722274 A TW200722274 A TW 200722274A
Authority
TW
Taiwan
Prior art keywords
cooling
illuminant lamp
illuminant
light irradiation
lamp
Prior art date
Application number
TW095134845A
Other languages
Chinese (zh)
Other versions
TWI391235B (en
Inventor
Yoneta Tanaka
Nozomu Tajika
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2005353541A priority Critical patent/JP4811000B2/en
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200722274A publication Critical patent/TW200722274A/en
Application granted granted Critical
Publication of TWI391235B publication Critical patent/TWI391235B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

Abstract

The objective of this invention is to provide a light irradiation device and illuminant lamp is suit for thereof well, having a light emitter with cooling-air duct to broaden light irradiation amount of processed object, to buck for lifting process efficiency, and also obtain full cooling function even if amount of cooling wind not increased greatly. The light irradiation device including a light emitter which arranged in state of a tube axis of rod illuminant lamp with circular section is accordant with the first focus place of groove reflector with reflecting surface, when the illuminant lamp is turn on, the illuminant lamp and reflector is cooled by cooling wind, a cooling-air duct formed rear side of the illuminant lamp relative to illuminating direction for circulating cooling wind and interconnecting with reflector enclosed space, reflective film is formed in opposite outside surface region of the illuminant lamp and opening of the cooling-air duct, which refects light emited from the illuminant lamp.
TW095134845A 2005-12-07 2006-09-20 Light irradiation device TWI391235B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005353541A JP4811000B2 (en) 2005-12-07 2005-12-07 Light irradiation device

Publications (2)

Publication Number Publication Date
TW200722274A true TW200722274A (en) 2007-06-16
TWI391235B TWI391235B (en) 2013-04-01

Family

ID=38130241

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095134845A TWI391235B (en) 2005-12-07 2006-09-20 Light irradiation device

Country Status (4)

Country Link
JP (1) JP4811000B2 (en)
KR (1) KR101030421B1 (en)
CN (1) CN1978983B (en)
TW (1) TWI391235B (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7964858B2 (en) * 2008-10-21 2011-06-21 Applied Materials, Inc. Ultraviolet reflector with coolant gas holes and method
WO2011122257A1 (en) * 2010-03-31 2011-10-06 株式会社Ｇｓユアサ Uv irradiation device and inkjet printer
JP2012198997A (en) * 2011-03-18 2012-10-18 Ushio Inc Long arc metal halide lamp and light irradiation device
US8823249B2 (en) * 2011-11-15 2014-09-02 Seiko Epson Corporation Irradiation device and irradiation method
CN103292282B (en) * 2012-03-05 2016-07-06 上海微电子装备有限公司 For the cooling system of ellipsoidal reflector and the high power lighting source lamp chamber applying it
KR101991521B1 (en) * 2012-04-20 2019-06-20 이와사키 덴끼 가부시키가이샤 Polarizer unit, jig for adjusting, lamp replacement stage and irradiation apparatus
JP5573910B2 (en) * 2012-10-03 2014-08-20 岩崎電気株式会社 Irradiation device
CN103836596B (en) * 2012-11-22 2016-06-01 上海微电子装备有限公司 A kind of superpower mercury lamp room device
CN104141892B (en) * 2013-05-08 2017-05-31 海洋王（东莞）照明科技有限公司 Fitting structure
CN104141891B (en) * 2013-05-08 2017-05-31 海洋王（东莞）照明科技有限公司 Fitting structure
CN103644469A (en) * 2013-11-25 2014-03-19 湖州市妙西镇资产经营有限公司 Novel LED (light-emitting diode) lamp structure
CN103644470A (en) * 2013-11-25 2014-03-19 湖州市妙西镇资产经营有限公司 Fluorescent lamp structure
JP6052199B2 (en) * 2014-02-12 2016-12-27 ウシオ電機株式会社 Polarized light irradiation device and rod-shaped light source for photo-alignment
CN105216283A (en) * 2015-08-28 2016-01-06 广州达意隆包装机械股份有限公司 A kind of bottle blowing machine heating fluorescent tube
CN105487352B (en) * 2016-02-16 2017-06-27 武汉华星光电技术有限公司 The replacing options of exposure machine and Exposing Lamp
CN106016974B (en) * 2016-05-12 2018-07-06 绍兴中漂印染有限公司 A kind of drying unit for fabric printing
CN108591876A (en) * 2018-01-17 2018-09-28 东莞市天合机电开发有限公司 A kind of absorption type outdoor LED illuminator

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH024100B2 (en) * 1980-09-29 1990-01-26 Mitsubishi Electric Corp
JPH01209631A (en) * 1988-02-15 1989-08-23 Nec Corp Very high pressure mercury-vapor lamp for phosphor film exposure
JPH0817457A (en) * 1994-06-28 1996-01-19 Tokyo Gas Co Ltd Water treatment equipment for fuel cell
JPH08174567A (en) * 1994-10-25 1996-07-09 Ushio Inc Illuminator
DE19814300B4 (en) * 1998-03-31 2008-09-25 Bernhard Weber Headlight or light
JP2000206619A (en) * 1999-01-18 2000-07-28 Matsushita Electric Ind Co Ltd Lamp and liquid crystal projection device
CA2267674C (en) * 1999-03-31 2010-03-30 Imax Corporation Method for cooling an arc lamp
JP3846232B2 (en) * 2000-12-08 2006-11-15 ウシオ電機株式会社 Circulating air cooling system for light irradiators
JP2003187604A (en) * 2001-12-17 2003-07-04 Ushio Inc Optical device

Also Published As

Publication number Publication date
CN1978983B (en) 2011-05-18
TWI391235B (en) 2013-04-01
KR20070059937A (en) 2007-06-12
KR101030421B1 (en) 2011-04-20
CN1978983A (en) 2007-06-13
JP2007157583A (en) 2007-06-21
JP4811000B2 (en) 2011-11-09

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