TWI376002B - - Google Patents

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Publication number
TWI376002B
TWI376002B TW96134286A TW96134286A TWI376002B TW I376002 B TWI376002 B TW I376002B TW 96134286 A TW96134286 A TW 96134286A TW 96134286 A TW96134286 A TW 96134286A TW I376002 B TWI376002 B TW I376002B
Authority
TW
Taiwan
Prior art keywords
air
opening
clean
shutter
door
Prior art date
Application number
TW96134286A
Other languages
English (en)
Chinese (zh)
Other versions
TW200901351A (en
Inventor
Hideji Sakata
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of TW200901351A publication Critical patent/TW200901351A/zh
Application granted granted Critical
Publication of TWI376002B publication Critical patent/TWI376002B/zh

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Landscapes

  • Ventilation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW96134286A 2006-09-19 2007-09-13 Apparatus inside clean room TW200901351A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006252873A JP4244389B2 (ja) 2006-09-19 2006-09-19 クリーンルーム内装置

Publications (2)

Publication Number Publication Date
TW200901351A TW200901351A (en) 2009-01-01
TWI376002B true TWI376002B (ja) 2012-11-01

Family

ID=39349999

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96134286A TW200901351A (en) 2006-09-19 2007-09-13 Apparatus inside clean room

Country Status (2)

Country Link
JP (1) JP4244389B2 (ja)
TW (1) TW200901351A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4706938B2 (ja) * 2008-11-21 2011-06-22 村田機械株式会社 クリーンルーム用の自動倉庫と自動倉庫での物品の保管方法

Also Published As

Publication number Publication date
TW200901351A (en) 2009-01-01
JP4244389B2 (ja) 2009-03-25
JP2008078198A (ja) 2008-04-03

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees