TWI375863B - - Google Patents

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TWI375863B
TWI375863B TW094130706A TW94130706A TWI375863B TW I375863 B TWI375863 B TW I375863B TW 094130706 A TW094130706 A TW 094130706A TW 94130706 A TW94130706 A TW 94130706A TW I375863 B TWI375863 B TW I375863B
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Taiwan
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group
compound
resin composition
acid
alkali
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TW094130706A
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Chinese (zh)
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TW200625005A (en
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Mitsuo Akutsu
Masaaki Shimizu
Yoshie Makabe
Naomi Sato
Tomohito Ishiguro
Koichi Kimishima
Naoki Maeda
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Adeka Corp
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06Polymers provided for in subclass C08G
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Epoxy Resins (AREA)

Description

九、發明說明: 【發明所屬之技術領域】 .· 树明係關於—種含有具有乙雜不飽和鍵之特定化合 .物的驗性㈣性樹脂組合物,以及於㈣性顯影性樹脂組 • I物中含有光聚合開始劑而成之驗性顯影性感光性樹脂組 合物。 【先前技術】 • 鹼性顯影性感光性樹脂組合物,其係包含含有具有乙烯 性不飽和鍵之化合物之驗性顯影性樹脂組合物以及光聚合 開始劑者,因可藉由對該驗性顯影性感光性樹脂組合物职 射紫外線或者電子線而使之聚合硬化,故而可用於光硬化 性墨水、感光性印刷版、印魏線板以及各種綠劑等。 最近’、隨著電子機器之輕薄短小化或高功能化之發展,業 者要求#可精度良好地形成微細圖案的驗性顯影性成光 性樹脂組合物。 〜 • 作為該驗性_性樹脂組合物以及驗性顯影性感光性樹 脂組合物,於下述專利文獻!中提出有一種光聚合性不飽 和化合物以及含有該化合物之驗性顯影性感光性樹月旨組合 t 於下述專利文獻2中,提出有一種含有聚羧酸樹 •f曰、且Q物以及含有該樹脂組合物之感光性樹脂組合 物。又’於下述專利文獻3中,提出有一種驗性可溶性不 飽和樹脂以及含有該樹脂之感放射線性樹脂組合物。然 而’該等眾所周知之驗性顯影性感光性樹脂組合物,其靈 敏度不充分’難以獲得適合之圖案形狀或微細圖案。因 104737.doc 1375863 此’業者要求一種透明性、密著性以及耐鹼性良好,並且 可精度良好地形成微細圖案之鹼性顯影性感光性樹脂組合 物。 專利文獻1 :曰本專利第3148429號公報 專利文獻2:日本專利特開2〇〇3_1〇77〇2號公報 專利文獻3:曰本專利特開2003-89716號公報 發明所欲解決之問題 如上所述,所欲解決之問題在於:迄今為止,還未開發 出一種感度充分且可獲得適合之圖案形狀或微細圖案的鹼 性顯影性樹脂組合物以及驗性顯影性感光性樹脂組合物。 故而,本發明之目的在於提供一種感度、解像度、透明 性、密著性以及耐鹼性等良好,並且可精度良好地形成微 細圖案之鹼性顯影性樹脂組合物以及鹼性顯影性感光性樹 脂組合物。 【發明内容】 本發明係提供一種鹼性顯影性樹脂組合物,藉此實現上 述目的,其特徵為:其係相對於環氧加成物含有使多元 酸針(D)醋化而獲得之反應生成物者,上述環氧加成物具 有下述一般式⑴表示 < 環氧樹脂(A)加成不飽和一元酸(B) 以及選自苯朌化合物、醇化合物、胺化合物以及羧酸之化 合物(C)之構造,上述環氧加成物其具有如下構造:相對 於上述環氧樹脂(A)之一個環氧基,以上述不飽和一元酸 (B)之叛基為(MM.O個,上述化合物(〇之絲性經基、 醇性經基、胺基或缓基為〇至〇 9個,且上述不飽和一元酸 104737.doc 1375863 (B)以及上述化合物(C)之和為〇·1至個之比率而加成之 構造;上述酯化係以相對於上述環氧加成物之一個經基, 以上述多元酸酐(D)之酸針構造成為〇.1至1.0個之比率進 行。 [化1]Nine, the invention description: [Technical field to which the invention pertains] .. Shuming is an intrinsic (four) resin composition containing a specific compound having an ethylenically unsaturated bond, and a (four) developable resin group. The organic light-sensitive resin composition in which the photopolymerization initiator is contained in the material I is used. [Prior Art] An alkali-developable photosensitive resin composition containing an in-progress developable resin composition containing a compound having an ethylenically unsaturated bond and a photopolymerization initiator, because it can be used for the test The developed photosensitive resin composition is polymerized and cured by ultraviolet rays or electron beams, and thus can be used for photocurable inks, photosensitive printing plates, printed wiring boards, various green agents, and the like. Recently, with the development of the thinness and the high functionality of the electronic device, the manufacturer has demanded that the microscopic pattern-developable developable photo-resin composition can be formed with high precision. ~ As the testable resin composition and the developable photosensitive photo-curable resin composition, the following patent documents are available! There has been proposed a photopolymerizable unsaturated compound and an inventor-developing photosensitive photoreceptor composition containing the compound. In Patent Document 2 below, there is proposed a polycarboxylic acid tree containing a Q group and A photosensitive resin composition containing the resin composition. Further, in Patent Document 3 below, an intrinsic soluble unsaturated resin and a radiation sensitive resin composition containing the resin are proposed. However, the above-mentioned well-developed electrophotographic photosensitive resin compositions have insufficient sensitivity, and it is difficult to obtain a suitable pattern shape or fine pattern. In the case of the above-mentioned manufacturer, an alkali-developable photosensitive resin composition which is excellent in transparency, adhesion, and alkali resistance and which can form a fine pattern with high precision is required. Patent Document 1: Japanese Patent No. 3,148,429, Patent Document 2: Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. 2003-89716. The problem to be solved is that, until now, an alkali-developable resin composition and an organic-developable photosensitive resin composition having sufficient sensitivity and obtaining a suitable pattern shape or fine pattern have not been developed. Therefore, an object of the present invention is to provide an alkali-developable resin composition and an alkali-developable photosensitive resin which are excellent in sensitivity, resolution, transparency, adhesion, and alkali resistance, and which can form a fine pattern with high precision. combination. SUMMARY OF THE INVENTION The present invention provides an alkali-developable resin composition, thereby achieving the above object, which is characterized in that it contains a reaction obtained by acetating a polyacid needle (D) with respect to an epoxy adduct. In the product, the above epoxy adduct has the following general formula (1): < epoxy resin (A) addition unsaturated monobasic acid (B) and selected from the group consisting of a benzoquinone compound, an alcohol compound, an amine compound, and a carboxylic acid The structure of the compound (C), the above epoxy adduct having the following structure: with respect to one epoxy group of the above epoxy resin (A), the above-mentioned unsaturated monobasic acid (B) is a ruthenium (MM.O) The above compound (the silky mercapto group, the alcoholic transatom group, the amine group or the slow group is 〇 to 〇9, and the above unsaturated monobasic acid 104737.doc 1375863 (B) and the sum of the above compounds (C) a structure in which a ratio of 〇·1 to a ratio is added; the esterification is based on one of the above-mentioned epoxy adducts, and the acid needle structure of the above polybasic acid anhydride (D) is 〇.1 to 1.0 The ratio is carried out. [Chemical 1]

(式中,Cy表示碳原子數3至10之環烷基,X表示氫原 子、亦可經碳原子數1至10之烷基或烷氧基取代之苯基 或碳原子數3至1〇之環烷基,γ以及z分別獨立表示碳原 子數1至10之烷基、碳原子數1至1〇之烷氧基、碳原子數 2至1〇之烯基或鹵素原子,上述烷基、上述烷氧基以及 上述稀基亦可經鹵素原子取代’ η表示0至10之數,p表 示0至5之數,r表示〇至4之數)。 又’本發明提供一種含有上述鹼性顯影性樹脂組合物以 及光聚合起始劑的鹼性顯影性感光性樹脂組合物,藉此實 現上述目的。 【實施方式】 以下’就本發明之鹼性顯影性樹脂組合物以及鹼性顯影 感光I1生樹I曰組合物,根據較好之實施形態加以詳細說 明。 之驗〖生顯影性樹脂組合物含有反應生成物,該反 104737.doc 1375863 應生成物係對於環氧加成物,以相對於上述環氧加成物之 一個經基,使多元酸酐(D)的酸酐構造成為〇1至1.〇個之比 率予以酯化者’該環氧加成物具有對上述一般式(π)表示 之環氧樹脂(Α) ’使不飽和一元酸(Β)以及選自苯酚化合 物、醇化合物、胺化合物以及羧酸之化合物(c),以相對 於上述環氧樹脂(Α)之一個環氧基,上述不飽和一元酸(Β) 之羧基成為0.1至1.0個之比率,上述化合物(c)之苯酚性羥 基 '醇性羥基、胺基或羧基成為0至0.9個之比率,並且(B) 成分以及(C)成分之和成為〇1至! 〇個之比率予以加成之構 造I。 相對於上述環氧樹脂(A)之一個環氧基,上述不飽和一 元1(B)之羧基之比率較好是〇4至1〇個上述化合物(〇 之笨酚性羥基、醇性羥基、胺基或羧基之比率較好是〇至 〇_6個,(B)成分以及(C)成分之總和較好是◦々至工〇個。 又,相對於上述環氧加成物之一個羥基,多元酸酐⑴)之 酸酐構造之比率較好是0.4至1.〇個β 上述一般式⑴中’作為以〇表示之碳原子數3至1〇之環 烧基,Τ列舉環丙基、環丁基、環戍基、環己基、甲基環 己基、環庚基、環辛基、環壬基、環癸基等,作為以7以 及Ζ表示之碳原子數1至10之烷基,可列舉甲基、乙基、丙 基、異丙基、丁基、異丁基、第二丁基、第三丁基、戊 基、異戊基、第三戊基、己基、庚基、辛基、異辛基、第 三辛基、2-乙基己基、壬基、異壬基、癸基、異癸基、單 氟甲基、二"基、三氟曱基、三氟乙基、全氟乙基等, 104737.doc •10· 1375863 作為碳原子數丨至Η)之院氧基,可列舉甲氧基乙氧基、 丙氧基'Τ氧基、甲氧基乙基、乙氧基乙基、丙氧基乙 基、甲氧基乙氧基乙基、乙氧基乙氧基乙基、丙氧基乙氧 土乙基f氧基丙基等,作為碳原子數2至⑺之稀基,可 列舉乙烯基、烯丙基、丁烯基、丙埽基等,作為齒素原 子’可列舉氟、氣、溴、碘。 調製本發明之鹼性顯影性樹脂組合物時使用之環氧樹脂 (A)’其由於具有三芳基單環烷基甲烷骨架,從而硬化物 對基材之密著性' 耐驗性、加卫性以及強度等較為良好, 故而認為顯影去除非硬化部時,即使微細圖案亦可精度良 好地形成圖像。作為環氧樹脂(A),較好是於上述一般式 ()中Cy為環己基者;χ為苯基者;p以及犷為〇者;η為〇 至5 ’特別是0至1者。 作為以上述一般式⑴表示之環氧樹脂(Α)之具體例,可(wherein Cy represents a cycloalkyl group having 3 to 10 carbon atoms, X represents a hydrogen atom, a phenyl group which may be substituted by an alkyl group having 1 to 10 carbon atoms or an alkoxy group, or a carbon atom number of 3 to 1 Å. The cycloalkyl group, γ and z each independently represent an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 1 carbon atom, an alkenyl group having 2 to 1 carbon atom or a halogen atom, and the above alkyl group The above alkoxy group and the above-mentioned dilute group may also be substituted by a halogen atom 'n represents a number from 0 to 10, p represents a number from 0 to 5, and r represents a number from 〇 to 4). Further, the present invention provides an alkali-developable photosensitive resin composition containing the above-described alkali-developable resin composition and photopolymerization initiator, thereby achieving the above object. [Embodiment] Hereinafter, the alkali-developable resin composition of the present invention and the alkali-developable photosensitive I1 raw tree I 曰 composition will be described in detail based on preferred embodiments. The raw developing resin composition contains a reaction product, and the reaction product is obtained by reacting a polyether anhydride (D) with respect to an epoxy adduct of the epoxy adduct. The acid anhydride structure is a ratio of 〇1 to 1. The esterification is carried out. The epoxy adduct has an epoxy resin (Α) expressed by the above general formula (π) 'to make an unsaturated monobasic acid (Β) And a compound (c) selected from the group consisting of a phenol compound, an alcohol compound, an amine compound, and a carboxylic acid, and the carboxyl group of the above unsaturated monobasic acid (Β) is 0.1 to 1.0 with respect to one epoxy group of the above epoxy resin (oxime). The ratio of the phenolic hydroxyl group of the above compound (c) to the hydroxyl group, the amine group or the carboxyl group is from 0 to 0.9, and the sum of the component (B) and the component (C) becomes 〇1 to! The ratio of the ratios is added to the construction of I. The ratio of the carboxyl group of the above unsaturated monovalent 1 (B) to the epoxy group of the above epoxy resin (A) is preferably from 4 to 1 such as the above compound (the phenolic hydroxyl group, the alcoholic hydroxyl group, The ratio of the amine group or the carboxyl group is preferably from 〇 to 6 and the sum of the components (B) and (C) is preferably from ◦々 to 〇. Further, a hydroxyl group relative to the above epoxy adduct The ratio of the anhydride structure of the polybasic acid anhydride (1) is preferably from 0.4 to 1. ββ In the above general formula (1), 'as a cycloalkyl group having 3 to 1 Å of carbon atoms represented by fluorene, Τ exemplified by cyclopropyl group and ring Butyl, cyclodecyl, cyclohexyl, methylcyclohexyl, cycloheptyl, cyclooctyl, cyclodecyl, cyclodecyl, etc., as an alkyl group having 1 to 10 carbon atoms represented by 7 and fluorene Listed are methyl, ethyl, propyl, isopropyl, butyl, isobutyl, t-butyl, tert-butyl, pentyl, isopentyl, tert-pentyl, hexyl, heptyl, octyl , isooctyl, trioctyl, 2-ethylhexyl, decyl, isodecyl, fluorenyl, isodecyl, monofluoromethyl, di "yl, trifluoromethyl, trifluoroethyl, all Fluoroethyl, etc., 104,737.doc •10·1,375,863, as the oxy group of the carbon atom number Η to Η), exemplified by methoxyethoxy, propoxy 'decyloxy, methoxyethyl, ethoxy Ethyl ethyl, propoxyethyl, methoxyethoxyethyl, ethoxyethoxyethyl, propoxyethoxyethyl ethyloxypropyl, etc., as carbon number 2 to (7) Examples of the dilute group include a vinyl group, an allyl group, a butenyl group, a propyl group, and the like. Examples of the dentate atom include fluorine, gas, bromine, and iodine. The epoxy resin (A) used in the preparation of the alkali-developable resin composition of the present invention has a triarylmonocycloalkylmethane skeleton, and thus the adhesion of the cured product to the substrate is improved. Since the properties, the strength, and the like are relatively good, it is considered that even when the non-hardened portion is removed by development, an image can be formed accurately even with a fine pattern. As the epoxy resin (A), it is preferred that Cy is a cyclohexyl group in the above general formula (); χ is a phenyl group; p and 犷 are oxime; and η is 〇 to 5', particularly 0 to 1. Specific examples of the epoxy resin (Α) represented by the above general formula (1) may be used.

列舉下述化合物Ν〇·丨至^^。· 9之化合物。其中,本發明並 非限於下述化合物之任何者。 [化2] 化合物No. 1The following compounds Ν〇·丨 to ^^ are listed. · 9 compounds. Among them, the present invention is not limited to any of the following compounds. [Chemical 2] Compound No. 1

104737.doc 1375863 [化3] 化合物No. 2104737.doc 1375863 [Chemical 3] Compound No. 2

[化4] 化合物No. 3[Chemical 4] Compound No. 3

[化5] 化合物No. 4 ♦[Chemical 5] Compound No. 4 ♦

104737.doc -12- 1375863104737.doc -12- 1375863

[化6] 化合物No. 5Compound No. 5

ςχ, CH,Hey, CH,

[化7] 化合物No. 6[Chemical 7] Compound No. 6

OMe Ο ο 。十 4τ〇OMe Ο ο . Ten 4τ〇

OMe [化8] 化合物No. 7 Ο οOMe [Chemical 8] Compound No. 7 Ο ο

104737.doc -13 - 1375863 [化9] 化合物No. 8104737.doc -13 - 1375863 [Chemical Formula 9] Compound No. 8

[化 10] 化合物No. 9Compound No. 9

本發明之鹼性顯影性樹脂組合物所含之使(B)成分以及 根據需要之(C)成分加成至(A)成分後,使(D)成分酯化所獲 得之反應生成物,例如可藉由以下述[化11]之反應式表示 之方法製造。 首先,使作為(B)成分之不飽和一元酸(2)以及根據需要 之作為(C)成分之苯酚化合物等(3)加成至作為(A)成分之環 氧樹脂(1),從而獲得含有為環氧加成物之化合物(4)之樹 脂組合物。接著,於化合物(4)中,使作為(D)成分之多元 酸酐(5)反應而實施酯化反應,從而獲得作為目的之含有為 反應生成物之化合物(6)的樹脂組合物。進而,視情況,對 化合物(6)使作為(E)成分之環氧化合物(7)反應,可獲得含 104737.doc -14- 1375863 有化合物(8)之樹脂組合物。 [化 11]The reaction product obtained by esterifying the component (D) after the component (B) and the component (C) are added to the component (A) as contained in the alkali-developable resin composition of the present invention, for example, It can be produced by the method represented by the following reaction formula [Chemical Formula 11]. First, the unsaturated monobasic acid (2) as the component (B) and the phenol compound (3) as the component (C) are added to the epoxy resin (1) as the component (A), thereby obtaining A resin composition containing the compound (4) which is an epoxy adduct. Then, in the compound (4), the polybasic acid anhydride (5) as the component (D) is reacted to carry out an esterification reaction to obtain a resin composition containing the compound (6) which is a reaction product. Further, the compound (6) is reacted with the epoxy compound (7) as the component (E), and a resin composition containing the compound (8) of 104737.doc -14-1375863 can be obtained. [化11]

獲得上述[化U]所示之環氧加成物、即化合物(4)之方 法,/非限定於上述方法,例如,於化合物(4)<r^0時, 可藉由如下述[化12]之反應式所示,使雙酚(9)與含有甲美 丙烯酸縮水甘油酯(10)之單環氧化合物反應之方法 土 合物(4)。 後侍化 104737.doc -15· 1375863The method of obtaining the epoxy adduct represented by the above [Chemical U], that is, the compound (4), is not limited to the above method, and for example, when the compound (4) < r^0, it can be as follows [ The method (4) of reacting bisphenol (9) with a monoepoxy compound containing glycidyl methacrylate (10) is shown in the reaction formula of 12]. After the service 104737.doc -15· 1375863

[化 12][化 12]

作為用以獲得本發明之鹼性顯影性樹脂組合物之不飽和 元k (B) ’例如可列舉丙烯酸、甲基丙烯酸、巴豆酸、 桂皮酸、山梨酸、曱基丙烯酸羥乙酯.順丁烯二酸酯、丙 婦酸經乙酯.順丁烯二酸酯、甲基丙烯酸羥丙酯.順丁烯二 酸醋、丙烯酸羥丙酯·順丁烯二酸酯、二環戊二烯·順丁烯 二酸酯等。The unsaturated element k (B) ' used for obtaining the alkali-developable resin composition of the present invention may, for example, be acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbic acid, hydroxyethyl methacrylate. Ethylene diester, propyl fumarate by ethyl ester. Maleate, hydroxypropyl methacrylate, maleic acid vinegar, hydroxypropyl acrylate, maleate, dicyclopentadiene • Maleic acid ester and the like.

至於可作為用以獲得本發明之鹼性顯影性樹脂組合物之 化合物(C)而使用之苯酚化合物,例如可列舉苯酚、氣笨 酚、甲酚、乙基苯酚、丙基苯酚、枯基苯酚、第三丁基苯 酚、第三戊基苯酚、己基笨酚、辛基笨酚、異辛基苯酚、 第三辛基苯盼、壬基苯酚、十二烷基苯酚、十八烷基苯 酚、2,4-二-第三丁基苯酚、2,5-二-第三丁基苯酚、3,5-二-第三丁基苯酚、2,4,6-三溴苯酚、4-(1,1,3,3-四甲基丁基) 苯紛、2-(3,5 -二甲基庚基)苯酴、4-(3,5 -二甲基庚基)笨 104737.doc -16 - 1375863 酚、萜酚以及萘酚等。 至於可作為用以獲得本發明之鹼性顯影性樹脂組合物之 . 化合物(c)而使用之醇化合物,可列舉甲醇、乙醇、丙 • 醇 丁醇戊醇、己醇、庚醇、辛醇、異丙醇、第二丁基 . 醇、2·戊基醇、3·戊基醇、2-己基醇、3-己基醇、2-庚基 醇、3_庚基醇、4_庚基醇' 2_辛基醇、3_辛基醇、‘辛基 醇、第三丁基醇、2-曱基丁烷-2-醇、2-甲基戊烷_2_醇、2· ^ 甲基己烷·2·醇以及2-曱基庚烷-2-醇等。 至於可作為用以獲得本發明之鹼性顯影性樹脂組合物之 化合物(C)而使用之胺化合物,例如可列舉曱基胺、乙基 胺丙基胺、丁基胺、戊基胺、己基胺、庚基胺、辛基 胺、一甲基胺、二乙基胺、二丙基胺、二丁基胺' 二戊基 胺、二己基胺、二庚基胺、二辛基胺、嗎啉、哌啶等。 至於可作為用以獲得本發明之鹼性顯影性樹脂組合物之 化合物(C)而使用之羧酸,例如可列舉乙酸、丙酸、2,2_二 Φ (羥甲基)丙酸、乳酸、丁酸、辛酸、月桂酸、亞麻油酸、 . 蓖麻酸、安息香酸、甲苯甲酸、桂皮酸、苯乙酸、環己烷 • 羧酸等脂肪族、芳香族或脂環式單缓酸。 • 作為用以獲得本發明之鹼性顯影性樹脂組合物之多元酸 酐(D),可列舉琥拍酸酐、馬來酸酐、偏苯三酸酐、均苯 四曱酸酐、2,2,3’3 -二苯甲_四羧酸酐、3,3.,4,4._二苯甲 酮四羧酸酐 '乙二醇雙脫水偏苯三甲酸醋、丙三醇三脫水 偏苯三甲酸醋、鄰苯二甲酸酐、甲基四氫鄰苯二甲酸醉、 四氫鄰苯二f酸針、耐地酸軒、甲基耐地酸野、三烷基四 104737.doc •17- 1375863 氫鄰笨二曱酸酐、六氫鄰笨二曱酸酐、5-(2,5-二氧代四氫 。夫’基)-3_甲基-3-環己烯-1,2-二羧酸酐、三烷基四氫鄰笨 二甲酸酐一馬來酸酐加成物、十二烷基琥珀酸酐、甲基茯 令酸肝等一酸酐,3,3,,4,4,·聯苯四羧酸二酐、3,3,,4,4,·二 苯基四續酸二酐、4,4,-氧基二鄰笨二甲酸二酐、2,3,5-三 竣基環戊基乙酸二酐、i,2,3,4-環戊烷四羧酸二酐、甲基 六氫鄰苯二甲酸酐等二酐,該等之中,較好是二酸酐、或 二酸酐與一酸酐之組合。 於本發明中,上述環氧化合物(E)係用以調整酸價所使 用者’可用以改良本發明之鹼性顯影性樹脂組合物之顯影 性。作為環氧化合物’可列舉甲基丙烯酸縮水甘油酯、甲 基縮水甘油醚、乙基縮水甘油醚,丙基縮水甘油醚、異丙 基縮水甘油醚、丁基縮水甘油醚、異丁基縮水甘油醚、第 二丁基縮水甘油醚、戊基縮水甘油醚、己基縮水甘油醚、 庚基縮水甘油醚、辛基縮水甘油醚 '壬基縮水甘油醚、癸 基縮水甘油醚、十一烷基縮水甘油醚、十二烷基縮水甘油 謎、十二烧基縮水甘油醚、十四烷基縮水甘油醚、十五烷 基縮水甘油醚、十六烷基縮水甘油醚、2-乙基己基縮水甘 油醚、烯丙基縮水甘油醚、炔丙基縮水甘油醚、對甲氧基 乙基縮水甘油醚、笨基縮水甘油醚、對甲氧基縮水甘油 醚、對丁基笨酚縮水甘油醚、甲苯基縮水甘油醚、2-甲基 甲苯基縮水甘油醚、4·壬基苯基縮水甘油醚、苄基縮水甘 油醚、對枯基笨基縮水甘油醚 '三苯f基縮水甘油醚、甲 基丙歸酸2,3-環氧丙酯、環氧化大豆油、環氧化亞麻籽 104737.doc -18 - 油、丁酸縮水甘油 4-乙烯基環己燒、 烯、氧化環己締、 等。The phenol compound which can be used as the compound (C) for obtaining the alkali-developable resin composition of the present invention may, for example, be phenol, phenol, cresol, ethyl phenol, propyl phenol or cumylphenol. , tert-butylphenol, third amyl phenol, hexyl phenol, octyl phenol, isooctyl phenol, third octyl benzene, nonyl phenol, dodecyl phenol, octadecyl phenol, 2,4-di-tert-butylphenol, 2,5-di-tert-butylphenol, 3,5-di-tert-butylphenol, 2,4,6-tribromophenol, 4-(1 , 1,3,3-tetramethylbutyl) benzene, 2-(3,5-dimethylheptyl)phenylhydrazine, 4-(3,5-dimethylheptyl) stupid 104737.doc - 16 - 1375863 Phenol, indophenol and naphthol. The alcohol compound which can be used as the compound (c) for obtaining the alkali-developable resin composition of the present invention includes methanol, ethanol, propanol butanol, hexanol, heptanol, and octanol. , isopropanol, dibutyl. alcohol, 2·pentyl alcohol, 3·pentyl alcohol, 2-hexyl alcohol, 3-hexyl alcohol, 2-heptyl alcohol, 3-heptyl alcohol, 4—heptyl Alcohol '2-octyl alcohol, 3-octyl alcohol, 'octyl alcohol, tert-butyl alcohol, 2-mercaptobutane-2-ol, 2-methylpentane-2-ol, 2·^ Methyl hexane · 2 · alcohol and 2-decyl heptane-2-ol. As the amine compound which can be used as the compound (C) for obtaining the alkali-developable resin composition of the present invention, for example, mercaptoamine, ethylaminopropylamine, butylamine, pentylamine, hexyl group can be mentioned. Amine, heptylamine, octylamine, monomethylamine, diethylamine, dipropylamine, dibutylamine 'dipentylamine, dihexylamine, diheptylamine, dioctylamine, Porphyrin, piperidine, and the like. The carboxylic acid which can be used as the compound (C) for obtaining the alkali-developable resin composition of the present invention includes, for example, acetic acid, propionic acid, 2,2-di-(hydroxymethyl)propionic acid, and lactic acid. An acid, aromatic or alicyclic mono-acid such as butyric acid, caprylic acid, lauric acid, linoleic acid, ricinoleic acid, benzoic acid, toluic acid, cinnamic acid, phenylacetic acid, cyclohexane or carboxylic acid. • As the polybasic acid anhydride (D) for obtaining the alkali-developable resin composition of the present invention, acrolein anhydride, maleic anhydride, trimellitic anhydride, pyromellitic anhydride, 2,2,3'3-diphenyl can be cited. A-tetracarboxylic anhydride, 3,3.,4,4._benzophenonetetracarboxylic anhydride'ethylene glycol double-dehydrated trimellitic acid vinegar, glycerol tri-dehydrated trimellitic acid vinegar, orthophthalic acid Anhydride, methyltetrahydrophthalic acid drunk, tetrahydrophthalic acid acid needle, diarrhea acid, methyl acid acid field, trialkyl tetra 104737.doc • 17- 1375863 hydrogen o-benzoic anhydride , hexahydronoic acid anhydride, 5-(2,5-dioxotetrahydroindolyl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride, trialkyl four Hydrogen o-dimethic anhydride-maleic anhydride adduct, dodecyl succinic anhydride, methyl sulphonic acid and other anhydrides, 3,3,4,4,-biphenyltetracarboxylic dianhydride, 3 , 3,4,4,·diphenyltetrahydro acid dianhydride, 4,4,-oxy di-o-dicarboxylic acid dianhydride, 2,3,5-trimethylcyclopentyl acetic acid dianhydride, i a dianhydride such as 2,3,4-cyclopentanetetracarboxylic dianhydride or methylhexahydrophthalic anhydride; among these, it is preferably Acid anhydride, or a combination of the dianhydride with an acid anhydride. In the present invention, the epoxy compound (E) used to adjust the acid value can be used to improve the developability of the alkali-developable resin composition of the present invention. Examples of the epoxy compound include glycidyl methacrylate, methyl glycidyl ether, ethyl glycidyl ether, propyl glycidyl ether, isopropyl glycidyl ether, butyl glycidyl ether, and isobutyl glycidol. Ether, second butyl glycidyl ether, pentyl glycidyl ether, hexyl glycidyl ether, heptyl glycidyl ether, octyl glycidyl ether 'mercapto glycidyl ether, decyl glycidyl ether, undecyl shrinkage Glycerol ether, lauryl glycidol mystery, dodecyl glycidyl ether, tetradecyl glycidyl ether, pentadecyl glycidyl ether, hexadecyl glycidyl ether, 2-ethylhexyl glycidol Ether, allyl glycidyl ether, propargyl glycidyl ether, p-methoxyethyl glycidyl ether, strepto glycidyl ether, p-methoxyglycidyl ether, p-butyl phenol glycidyl ether, toluene Glycidyl ether, 2-methyltolyl glycidyl ether, 4·nonylphenyl glycidyl ether, benzyl glycidyl ether, p-cumyl glycidyl ether, triphenyl f-glycidyl ether, methyl Acryl 2,3-epoxypropane , Epoxidized soybean oil, epoxidized linseed 104737.doc -18 - oil, glycidyl butyrate, 4-vinyl cyclohexene burning, alkylene oxide, cyclohexene association, and the like.

酉日、乙烯基環己烷單氧化物、,氧_ 氧化笨乙烯、氧化蒎烯、甲基氧化笨乙 氧化丙歸、下述化合物No. 10、No. U 本發明之驗性顧旦彡& & 顯办性樹脂組合物之固形分之酸價較好於 60至120 mgKOH/g之銘图咖 a 、 a 範圍内,環氧化合物(E)之使用量較好 疋以滿足上述酸僧夕士 丄 &故1貝之方式加以選擇。 [化 13]The next day, vinyl cyclohexane monooxide, oxygen oxidized stupid ethylene, decene oxide, methyl oxidized stupid ethoxylated propylene, the following compound No. 10, No. U The acid value of the solid content of the &&amplifier resin composition is preferably in the range of 60 to 120 mgKOH/g, and the epoxy compound (E) is used in an amount sufficient to satisfy the above. The choice of the sour 僧 丄 丄 & [Chem. 13]

化合物No. 1〇 [化 14]Compound No. 1〇 [Chemical 14]

化合物No. 11 〇 本發明之檢性顯影性樹脂組合物,#進而可添加光聚合 起始劑從而製成鹼性顯影性感光性樹脂組合物。 本發明之鹼性顯影性樹脂組合物以及鹼性顯影性感光性 樹脂組合物,其通常作為根據需要而添加有下述可溶解或 分散上述各成分之溶劑的溶液狀組合物而使用:例如丙 酮、甲基乙基酮、甲基異丁基酮、環己酮、甲基溶纖劑、 乙基溶纖劑、丙二醇單曱醚乙酸酯、氣仿、二氣甲炫、己 烷、庚烷、辛烷、環己烷、苯、甲苯、二甲苯、甲醇、乙 醇、異丙醇。該溶液狀組合物中,溶劑含量較好是3〇至9〇 重量%,特別好的是40至70重量%。 於(A)成分中加成(B)成分以及相應需要之(〇成分後,g旨 104737.doc • 19- 化(D)成分,進而相應需要反應(E)成分所獲得之反應生成 物之含量,其於上述溶液狀組合物中較好是1至重量 % ’特別好的是3至30重量%。 作為用於本發明之鹼性顯影性感光性樹脂組合物之上述 光聚合起始劑,可使用先前已知之化合物,例如可列舉二 本甲酮、本基聯苯甲綱、1·經基_1_苯甲醜基環己烧、苯偶 醯、苄基二f基縮酮、1-苄基-1-二甲胺基嗎啉基苯 曱醯基)丙烷、2-嗎啉基-2-(4,-甲基巯基)苯甲醯基丙烷、 噻噸酮、1-氣-4-丙氧基噻噸酮、異丙基噻噸酮、二乙基噻 嘲酮、乙基蒽醌、4_笨曱醯基-4,-甲基二苯基硫醚、安息 香丁醚、2-羥基-2-苯甲醯基丙烷、2-羥基-2-(4,-異丙基)苯 甲醯基丙烷、4-丁基苯甲醯基三氯甲烷、4_苯氧基笨甲醯 基二氣甲烷、苯甲醯基甲酸甲酯、1,7-雙(9'·吖啶基)庚 烷、9-n-丁基-3,6-雙(2'-嗎啉基異丁醯基)咔唑、2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基丙烷-1-酮、2-甲基-4,6-雙(三氣 甲基)-s-三嗪、2-苯基·4,6-雙(三氣甲基)-s-三嘹、2·萘基-4,6-雙(三氣甲基)-s-三嗪,以及下述化合物No. 12、No. 13 等。 [化 15] 化合物No. 12Compound No. 11 〇 The detectively developable resin composition of the present invention, # Further, a photopolymerization initiator can be added to prepare an alkali-developable photosensitive resin composition. The alkali-developable resin composition and the alkali-developable photosensitive resin composition of the present invention are usually used as a solution-like composition in which the following solvent capable of dissolving or dispersing the above-mentioned respective components is added as needed: for example, acetone , methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, methyl cellosolve, ethyl cellosolve, propylene glycol monoterpene ether acetate, gas imitation, dioxane, hexane, g Alkane, octane, cyclohexane, benzene, toluene, xylene, methanol, ethanol, isopropanol. The solvent-like composition preferably has a solvent content of from 3 to 9 % by weight, particularly preferably from 40 to 70% by weight. Adding the component (B) to the component (A) and the corresponding reaction product (the component of the component (D), and then the reaction product obtained by the reaction (E) component is required. The content is preferably from 1 to 8% by weight in the above-mentioned solution-like composition, and particularly preferably from 3 to 30% by weight. The above photopolymerization initiator used as the alkali-developable photosensitive resin composition of the present invention A previously known compound can be used, and examples thereof include a dimethyl ketone, a benzylbiphenylene group, a hydrazinyl group, a benzophenone, a benzyl bis ketal, 1-benzyl-1-dimethylaminomorpholinophenyl)propane, 2-morpholinyl-2-(4,-methylindenyl) benzhydrylpropane, thioxanthone, 1-gas -4-propoxy thioxanthone, isopropyl thioxanthone, diethyl thiopyridone, ethyl hydrazine, 4 _ 曱醯 曱醯 4,-methyl diphenyl thioether, benzoin butyl ether , 2-hydroxy-2-benzhydrylpropane, 2-hydroxy-2-(4,-isopropyl)benzhydrylpropane, 4-butylbenzylidenetrichloromethane, 4-phenoxy Stupid thiol dimethane, methyl benzyl carbazate, 1,7- Bis(9'-acridinyl)heptane, 9-n-butyl-3,6-bis(2'-morpholinylisobutyryl)carbazole, 2-methyl-1-[4-(methyl sulfide Phenyl]-2-morpholinylpropan-1-one, 2-methyl-4,6-bis(trimethylmethyl)-s-triazine, 2-phenyl.4,6-bis ( Tris-methyl)-s-triterpene, 2·naphthyl-4,6-bis(tris-methyl)-s-triazine, and the following compounds No. 12, No. 13, and the like. Compound No. 12

104737.doc 20· 1375863 (式t,X丨表示齒素原子或烷基,Ri表示R、〇R、 COR、SR、CONRR,或 CN,R2表示R、〇R、c〇R、sr或 NRR’,R3表示R、OR、C0R、⑶或NRR,,R以及R|表示 烷基、芳基、芳烷基或雜環基,該等亦可經自素原子及/ 或雜環基取代,該等之中烷基以及芳烷基之伸烷基部 分,亦可插入選自不飽和鍵、醚鍵、硫醚鍵以及酯鍵之 一種以,又,R以及R·亦可一起形成環,n為〇至5)。 [化 16] 化合物No. 13104737.doc 20· 1375863 (Formula t, X丨 represents a dentate atom or an alkyl group, Ri represents R, 〇R, COR, SR, CONRR, or CN, and R2 represents R, 〇R, c〇R, sr or NRR ', R3 represents R, OR, COR, (3) or NRR, and R and R| represent an alkyl group, an aryl group, an arylalkyl group or a heterocyclic group, which may also be substituted by a self atom and/or a heterocyclic group. The alkyl group and the alkyl group of the aralkyl group may be inserted into one selected from the group consisting of an unsaturated bond, an ether bond, a thioether bond, and an ester bond, and R and R may also form a ring together. n is 〇 to 5). Compound No. 13

(式中’ X!、R,、r2、R3、R以及R,與上述化合物N〇 12 相同,Xl•表示齒素原?或烧基,z表示氧原子或硫原 子m以及n分別表示1至4之數,Ry表示r、〇R、(wherein X!, R, r2, R3, R and R are the same as the above compound N〇12, Xl• represents odoxin or burnt group, z represents an oxygen atom or a sulfur atom m and n respectively represent 1 To the number of 4, Ry means r, 〇R,

SR CONRR'或 CN,R_2,表示 r、〇R、c〇R、SR *NRR ’ R3 分別表示 R、〇R、COR、SR或 NRR' ’ R4 表 示二醇殘基或二硫醇殘基)。 ;本發月之驗性顯影性感光性樹脂組合物中,相對於在 本發明之純__脂組合物巾添加溶狀上述溶液狀 口物上述光聚合起始劑之含量較好是0至3 0重量〇/〇, 特別好的是0.5至5重量%。 104737.doc •21 · 於本發明之驗性酤 任顯影性樹脂組合物以及鹼性顯影性感光 性樹脂組合物中,- 進而可併用具有不飽和鍵之單體、鍵轉 移劑、界面活性劑等。 作為具有上述不飽和鍵之單體,可列舉丙烯酸-2·羥基 乙基醋、丙缔酸經基丙基自旨、丙«異丁基S旨、丙烯酸 η-辛基酯、丙烯酸異辛基酯、丙烯酸異壬基酯、丙烯酸硬 知基西曰、丙烯酸甲氧基乙基酯、丙烯酸二甲胺基乙基酯、 丙烯馱鋅、1’6-己二醇二丙烯酸酯、三(羥甲基)丙烷三丙 烯酸酯、甲基丙烯酸·2_羥基乙基酯、罕基丙烯酸_2_羥基 丙基酯、甲基丙烯酸丁基酯、甲基丙烯酸第三丁基酯、曱 基丙烯酸環己基酯、三(羥甲基)丙烧三甲基丙烯酸酯、二 季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇 四丙婦酸酯、季戊四醇三丙稀酸酯等。 作為上述鏈轉移劑,可列舉硫代乙醇酸、硫代蘋果酸、 硫代水楊酸、2 -魏基丙酸、3 -疏基丙酸、3 -疏基丁酸、Ν- (2-酼基丙醯基)甘胺酸、2-疏基终驗酸、3-[Ν-(2-疏基乙 基)胺甲酿基]丙酸、3-[Ν-(2-疏基乙基)胺基]丙酸、Ν-(3-疏 基丙酿基)丙胺酸、2-疏基乙院續酸' 3·疏基丙烧續酸、4-疏基丁烧項酸、十二烧基(4 -甲硫基)笨醚、2-疏基乙醇、 3-巯基-1,2-丙烷二醇、1-巯基-2-丙醇、3_疏基·2_ 丁醇、酼 基苯酚、2-巯基乙基胺、2-巯基咪唑、2-巯基-3-吡啶醇、 2-酼基苯幷噻唑、酼基乙酸、三(羥甲基)丙烷三(3-Μ基丙 酸酯)、季戊四醇四(3 _疏基丙酸醋)等疏基化合物,氧化該 酼基化合物所獲得之二硫醚化合物、碘乙酸、碘丙酸、2- 104737.doc •22- 破乙醇、2·蛾乙院錢、丙料料蛾化统基化合物 等0 作為上述界面活性劑,可使用全氟烷基磷酸酯、全氟烷 基鲮酸鹽等氟界面活性劑,高級脂肪酸鹼鹽、烷基磺酸 鹽、烷基硫酸鹽等陰離子系界面活性劑,高級胺氫由酸 f、四級録鹽等陽離子系界面活性劑,聚乙二醇院基鱗、 聚乙二醇脂肪酸酯、山梨糖醇酐脂肪酸酯、脂肪酸單甘油 酯等非離子界面活性劑,兩性界面活性劑矽氧界面活性 劑等界面活性劑,亦可組合該等而使用。 於本發明之鹼性顯影性樹脂組合物以及鹼性顯影性感光 性樹脂組合物中,進而亦可藉由使用熱可塑性有機聚合 物’而改善硬化物之特性。作為該熱可塑性有機聚合物, 例如可列舉聚笨乙烯、聚甲基丙烯酸甲酯、甲基丙烯酸甲 酯-丙烯酸乙酯共聚物,.聚(甲基)丙烯酸、笨乙烯·(曱基)丙 烤知·共聚物、(甲基)丙烯酸-甲基丙烯酸甲酯共聚物、聚乙 烯醇縮丁醛、纖維素酯、聚丙烯醯胺以及飽和聚酯等。 又,於本發明之鹼性顯影性樹脂組合物以及鹼性顯影性 感光性樹脂組合物中,亦可根據需要添加苯甲醚、對苯二 酚、焦兒茶酚、第三丁基兒茶酚、吩噻嗪等熱聚合抑制 劑;可塑劑;黏著促進劑;填充劑;消泡劑;以及勻化劑 等慣用添加物。 本發明之鹼性顯影性感光性樹脂組合物,其可藉由歹筒 塗布、簾塗布、各種印刷、浸漬等眾所周知之方法,而適 旦貫施於薄膜 用於金屬、紙、塑膠等支持基體上。又 104737.doc -23- 等支持基m亦可轉印於其他支持基體上,其適用方 法並無限制。 本發明之鹼性顯影性感光性樹脂組合物可用於光硬化 性塗料、光硬化性黏著劑、印刷板、印刷配線板用光阻劑 荨各種用途,其用途並無特別限制。 又,作為硬化本發明之鹼性顯影性感光性樹脂組合物時 所使用之活性光之光源,可使用波長300至45〇 nm之光 線,例如可使用超高壓水銀、水銀蒸氣電弧、碳電弧、氙 氣電弧等。 實施例 以下,列舉實施例等進而詳細說明本發明,但本發明並 非限定於該等實施例者。 [實施例1]鹼性顯影性樹脂組合物No. 1之製造 <步驟1> 1,1-雙(4·-羥基笨基)-ΐ-(ι"·聯苯基環己基甲烷 之製造 裝入70.5 g聯苯環己基酮、200.7 g苯酚以及1〇.15 g硫代 乙酸,於18°C經20分鐘滴下40.0 g三氟甲烷磺酸。於17至 19°C反應18小時後,添加500 g水而停止反應,添加5〇〇 g 甲苯,水洗有機層直至pH值成為3至4為止而分離有機層。 館去甲苯、水以及過剩之苯盼。於殘留物中添加甲苯並過 濾所析出之固體,並且以甲苯分散洗淨,獲得59.2 g淡黃 色結晶(收率5 1 %)。該淡黃色結晶之熔點為239.5°C,可確 認該淡黃色结晶為目的物。 <步驟2> 1,1·雙(4’-環氧基丙氧基苯基)-1-(1"-聯苯基)_1_環 104737.doc • 24- 1375863 己基甲烷之製造 裝入57.5 g步驟1中所獲得之1,1·雙(4,_羥基苯基)^(^-聯苯基)-1-環己基甲院以及丨95.8 g環氧氣丙烷,添加〇6〇2 g苄基三乙基氯化銨後’於64°C攪拌18小時。接著,降溫 至54C,滴下43.0 g 24重量%之氫氧化鈉水溶液後,攪拌 30分鐘,餾去環氧氯丙烷以及水,添加216 g甲基異丁基 酮水洗後,滴下2.2 g 24重量%之氫氧化鈉。於8〇<t攪拌2 小時後,冷卻至室溫,以3重量❶/〇之單磷酸鈉水溶液中 和’實行水洗。餾去溶劑,獲得57 g黃色固體(收率 79%”(熔點64.2°C,環氧當量282、n=0.04)。可確認該黃 色結晶為目的物。 <步驟3>鹼性顯影性樹脂組合物N〇. 1之製造 裝入43 g步驟2中所獲得之ι,ΐ-雙(4,_環氧基丙氧基苯基)_ 1-(1"-聯苯基)-1.-環己基曱烷(以下,稱為化合物a)、u g丙 烯酸(以下,稱為化合物b)、0.05 g 2,6-二-第三丁基·對-甲 酚、0.11 g乙酸四丁基銨以及23 g丙二醇_丨_單甲醚_2•乙酸 酯,於120 C攪拌16小時。冷卻至室溫,添加35 §丙二醇· 1-單甲醚_2·乙酸酯以及9.4 g聯苯四羧酸二酐(以下,稱為 化合物d-Ι),於120。〇攪拌8小時。進而添加6〇 g四氫鄰苯 二甲酸酐(以下,稱為化合物d-2),於120°C攪拌4小時、於 1 〇〇 C攪拌3小時、於8〇°c攪拌4小時、於6〇。〇攪拌6小時、 於40C攪拌11小時後,添加29 g丙二醇]單甲醚_2·乙酸 酯,以丙二醇單甲醚_2•乙酸酯溶液獲得目的物之鹼性 顯影性樹脂紕合物No. 1(Mw=4〇〇〇、Mn=21〇〇、酸價(固形 104737.doc -25- 1375863 分)86 mgKOH/g)。 再者’鹼性顯影性樹脂組合物No. 1所含之反應生成 物’其可糟由下述方式獲得:相對於具有使作為(B)成分 之化合物b加成至作為(a)成分之化合物a中之構造的環氧 加成物之一個羥基,以作為成分之化合物dd以及化合 物d-2之酸酐構造為〇.68個之比率,使環氧加成物與化合物 d-Ι以及化合物d-2進行酯化反應。又,上述環氧加成物係 具有相對於化合物a之一個環氧基,以化合物b之鼓基為 1.0個之比率使之加成之構造。 [實施例2]鹼性顯影性樹脂組合物No. 2之製造 裝入43 g 1,1-雙(4’-環氧基丙氧基苯基)_ΐ·(1"_聯苯基 環己基甲烧(化合物a)、11 g丙婦酸(化合物b)、〇.〇5 g 2,6-二-第三丁基-對-甲酚、0.11 g乙酸四丁基敍以及23 g丙二 醇-1-單甲醚-2-乙酸酯,於120°C攪拌16小時。冷卻至室 溫’添加35 g丙二醇-1-單甲醚-2-乙酸酯以及16 g聯苯四羧 酸二酐(化合物d-Ι),於120°C擾拌8小時。進而,添加〇.7 g 四氫鄰苯二甲酸酐(化合物d-2),於120°C攪拌4小時、於 1 OOt:攪拌3小時、於80°C攪拌4小時、於60。〇攪拌6小時、 於40°C攪拌11小時後,添加29 g丙二醇-1·單甲醚-2-乙酸 酯,以丙二醇-1 -單甲醚-2-乙酸酯溶液獲得目的物之鹼性 顯影性樹脂組合物No. 2(Mw=8100、Mn=2900、酸價(固形 分)89 mgKOH/g)。 再者,驗性顯影性樹脂組合物N 〇. 2所含之反應生成 物,其可藉由下述方式獲得:相對於具有使作為(B)成分 104737.doc •26· 1375863 之化合物b加成至作為(a)成分之化合物&中之構造的環氧 加成物之一個羥基,以作為(D)成分之化合物dd以及化合 物d-2之酸酐構造為0.74個之比率,使環氧加成物與化合物 d-Ι以及化合物d-2進行酯化反應。又,上述環氧加成物係 具有相對於化合物a之一個環氧基,以化合物b之羧基為 1.0個之比率使之加成之構造。 [實施例3]鹼性顯影性樹脂組合物ν〇· 3之製造 裝入43 g l’l-雙(4’-環氧基丙氧基苯基)聯苯基)卜 環己基甲烷(化合物a)、11 g丙烯酸(化合物…、〇 〇5 g 2,6_ 二-第三丁基-對-甲酚、011 g乙酸四丁基銨以及23 g丙二 醇-1-單曱醚-2-乙酸酯,於12〇°c攪拌16小時。冷卻至室 溫,添加35 g丙二醇-1·單甲醚_2_乙酸酯、16 g聯苯四羧酸 二酐(化合物d-Ι)以及39 mg四正丁基溴化銨,於12〇°c攪拌 4小時 '於l〇〇°C攪拌3小時、於80t:攪拌4小時、於6〇〇c攪 拌6小時、於40 C授拌11小時後,添加29 g丙二醇_ 1 _單甲 醚-2-乙酸酯,以丙二醇_丨·單曱醚乙酸酯溶液獲得目的 物之驗性顯影性樹脂組合物N〇. 3 (Mw= 8600、Mn=3000、 酸價(固形分)87 mgKOH/g)。 再者’驗性顯影性樹脂組合物N 0. 3所含之反應生成 物,其可藉由下述方式獲得:相對於具有使作為(B)成分 之化合物b加成至作為(A)成分之化合物&之構造的環氧加 成物之一個羥基,以作為(D)成分之化合物cM之酸酐構造 為0.71個之比率,使環氧加成物與化合物d_ 1進行酯化反 應。又,上述環氧加成物係具有相對於化合物2之一個環 104737.doc •27· 1375863 氧基,以化合物b之羧基成為1.0個之比率使之加成之構 造0 [實施例4]鹼性顯影性樹脂組合物No. 4之製造 裝入43 g 1,1-雙(4’-環氧基丙氧基苯基)-1-(1"-聯苯基)·1-環己基甲烷(化合物a)、11 g丙烯酸(化合物b)、0.05 g 2,6-二-第三丁基·對-甲酚、0.11 g乙酸四丁基銨以及23 g丙二 醇-1-單甲醚-2-乙酸酯,於120°C攪拌16小時》冷卻至室 溫,添加35 g丙二醇—1-單曱醚-2·乙酸酯以及1〇 g聯苯四羧 酸二酐(化合物d-Ι),於120°C攪拌8小時。進而,添加6 g 四氫鄰苯二甲酸酐(化合物d-2),於120°C攪拌4小時、於 l〇〇°C攪拌3小時、於80°C攪拌4小時、於60°C攪拌6小時、 於40°C攪拌11小時後,添加6.3 g甲苯基縮水甘油醚(化合 物e),於120°C攪拌1 〇小時。冷卻至5〇。〇,添加29 g丙二 醇-1-單甲醚-2-乙酸酯,以丙二醇_丨_單曱醚_2•乙酸酯溶液 獲和·目的物之驗性顯影性樹脂組合物N〇. 4(Mw=4700、 Mn=2500、酸價(固形分)45 mgK〇H/g)。 再者驗性顯影性樹脂組合物N 〇 · 4所含之反應生成 物,其具有如下構造:相對於具有使作為(B)成分之化合 物b加成至作為(A)成分之化合物&之構造的環氧加成物之 一個羥基,以作為(D)成分之化合物cM以及化合物d-2之酸 酐構k為0.7個之比率’使環氧加成物與化合物η以及化 合物d-2進行酯化反應進而於如此獲得者中,以作為⑻成 分之化合物_源自_構造之縣之0.36個§旨化。又, 上述環氧加成物係具有相對於化合物a之-個環氧基,以 104737.doc -28- 1375863 化合物b之羧基為一個之比率使之加成之構造。 [實施例5]鹼性顯影性樹脂組合物ν〇· 5之製造 添加43 g 1,1-雙(4,-環氧基丙氧基苯基)·“〇"_聯苯基)_“ 環己基甲烷(化合物a)、5.7 g苯酚(以下,稱為化合物〇以 及25 g丙二醇-1-單甲謎_2·乙酸酯,加熱至115 °C。添加〇.2 g二本基腾’於12〇C授样4小時,添加50 g丙二醇_.ι_單甲 醚-2-乙酸酯,冷卻至5〇。〇。添加48 mg 2,6-二第三丁基· 對-甲酚、0.49 g苄基三乙基溴化銨以及6.6 g丙烯酸(化合 物b)後’於120°C攪拌5小時,冷卻至50°C。添加10.27 g聯 苯四羧酸二酐(化合物d-Ι),於120T:攪拌8小時。進而,添 加6.23 g四氫鄰苯二甲酸酐(化合物d-2),於120°C攪拌4小 時、於100°C攪拌3小時、於8〇°C授拌4小時、於60°C攪拌6 小時、於40°C攪拌11小時。冷卻至50。〇,添加58.3 g丙二 醇-1-單曱縫-2-乙酸酯,以丙二醇單甲鍵_2_乙酸酯溶液 獲得的目的物之鹼性顯影性樹脂組合物No. 5(Mw=4300、 Mn=2200、酸價(固形分)87 mgKOH/g) » 再者’鹼性顯影性樹脂組合物No. 5所含之反應生成 物,其可藉由下述方式獲得:相對於具有使作為(B)成分 之化合物b以及作為(〇成分之化合物c加成至作為成分 之化合物a之構造的環氧加成物之一個羥基,以作為成 分之化合物d-Ι以及化合物d-2之酸酐構造為0.73個之比 率,使環氧加成物與化合物d-1以及化合物d-2進行酯化反 應。又’上述環氧加成物係具有相對於化合物a之一個環 氧基,以化合物b之羧基約為〇·6個、化合物^之苯酚性羥 104737.doc -29- 1375863 基為0.4個、化合物b以及化合物c之和為ι·〇個之比率使之 加成之構造。 [實施例6]驗性顯影性樹脂組合物No· 6之製造 添加43 g 1,1-雙(4’·環氧基丙氧基苯基)_!·〇"_聯苯基)N 環己基甲炫(化合物a)、7.1 g苯龄(化合物c)以及25 g丙二 醇-1-單曱醚-2-乙酸酯’加熱至115。〇。添加〇.2 g三苯基 膦’於l2〇°C攪拌4小時後,添加丙二醇-i_單甲醚_2_乙酸 酯50 g冷卻至50°C。添加48 mg 2,6-二-第三丁基_對_甲 紛、0.49 g苄基三乙基溴化銨以及5.5 g丙烯酸(化合物…, 於120°C攪拌5小時,冷卻至50。(:。添加10.27 g聯笨四竣酸 二酐(化合物d-Ι),於12(TC攪拌8小時。進而,添加6.23 g 四氫鄰苯二曱酸酐(化合物d-2),於120°C搜拌4小時、於 l〇〇°C攪拌3小時、於80°C攪拌4小時、於6(rC攪拌6小時、 於4〇 C授拌π小時。冷卻至5〇它,添加S83 g丙二醇_丨單 曱醚-2-乙酸酯,以丙二醇_卜單甲醚_2•乙酸酯溶液獲得目 的物之驗性顯影性樹脂組合物No. 6(Mw=4400、 Mn=2230、酸價(固形分)86 mgKOH/g)。 再者’驗性顯影性樹脂組合物N 〇. 6所含之反應生成 物,其可藉由下述方式獲得:相對於具有使作為(B)成分 之化合物b以及作為(C)成分之化合物c加成至作為(A)成分 之化θ物a之構造的環氧加成物之一個經基,以作為⑴)成 分之化合物d-l以及化合物d-2之酸酐構造為〇·7個之比率, 使環氧加成物與化合物d· 1以及化合物d-2進行酯化反應。 又 上述環氛加成物係具有相對於化合物a之一個環氧 104737.doc -30- 1375863 基,以化合物b之缓基為0.5個、化合物c之苯盼性超基為 0.5個、化合物b以及化合物c之總和為1.〇個之比率使之加 成之構造。 [實施例7]鹼性顯影性感光性樹脂組合物No. 1之製造 相對於14 g實施例1中所獲得之鹼性顯影性樹脂組合物 No. 1 ’添加5.9 g三(羥甲基)丙烷三丙烯酸酯、2.1 g二苯曱 調以及78 g乙基溶纖劑’充分攪拌,獲得鹼性顯影性感光 性樹脂組合物No. 1。 [實施例8]鹼性顯影性感光性樹脂組合物N〇. 2之製造 相對於14 g實施例2中所獲得之鹼性顯影性樹脂組;合物 N〇. 2’添加5.9 g三(經甲基)丙烧三丙稀酸酯、21 g二苯甲 酮以及78 g乙基溶纖劑,充分攪拌,獲得鹼性顯影性感光 性樹脂組合物No. 2。 [實施例9]鹼性顯影性感光性樹脂組合物Ν〇· 3之製造 相對於12 g實施例1中所獲得之鹼性顯影性樹脂組合物 No. 1 ’添加8.1 g二季戊四醇六丙烯酸酯、I; g二苯甲 酮47 g乙基溶纖劑以及31 g環己酮,充分攪拌,獲得驗 性顯影性感光性樹脂組合物N〇 3。 [貫施例1 〇]臉性顯影性感光性樹脂組合物4之製造 相對於7.2 g實施例丨中所獲得之鹼性顯影性樹脂組合物SR CONRR' or CN, R_2, denotes r, 〇R, c〇R, SR *NRR ' R3 denotes R, 〇R, COR, SR or NRR' ' R4 denotes a diol residue or a dithiol residue, respectively) . In the present invention, the content of the photopolymerization initiator is preferably 0 to the content of the solution-like oral solution in the pure __-fat composition towel of the present invention. 30% 〇/〇, particularly preferably 0.5 to 5% by weight. 104737.doc • 21 In the present invention, the developable resin composition and the alkali-developable photosensitive resin composition, and further, a monomer having a unsaturated bond, a bond transfer agent, and a surfactant can be used in combination. Wait. Examples of the monomer having the above unsaturated bond include acrylic acid-2·hydroxyethyl vinegar, propionic acid via propyl group, propyl «isobutyl S, η-octyl acrylate, and isooctyl acrylate. Ester, isodecyl acrylate, acrylic ketone, methoxyethyl acrylate, dimethylaminoethyl acrylate, propylene zinc hydride, 1'6-hexanediol diacrylate, tris(hydroxyl) Methyl)propane triacrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, butyl methacrylate, t-butyl methacrylate, methacrylic acid ring Hexyl ester, tris(hydroxymethyl)propane trimethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol tetrapropionate, pentaerythritol triacrylate, and the like. Examples of the chain transfer agent include thioglycolic acid, thiomalic acid, thiosalicylic acid, 2-weiylpropionic acid, 3-propionylpropionic acid, 3-cyanobutyric acid, and hydrazine-(2- Glycosyl methionine, glycine acid, 2-sulfanyl final acid, 3-[indole-(2-sulfoethyl)amine-based]propionic acid, 3-[Ν-(2- sylylene Alkyl]propionic acid, hydrazine-(3-siliary propyl) alanine, 2-sodium sulfonate, acid- 3, succinyl-propionic acid, 4-sulfathyl-burning acid, ten Dialkyl (4-methylthio) phenyl ether, 2-mercaptoethanol, 3-mercapto-1,2-propane diol, 1-mercapto-2-propanol, 3-disyl-2-butanol, hydrazine Phenyl, 2-mercaptoethylamine, 2-mercaptoimidazole, 2-mercapto-3-pyridinol, 2-mercaptobenzothiazole, thioglycolic acid, tris(hydroxymethyl)propane tris(3-mercaptoproperate a sulfonate compound such as an acid ester or a pentaerythritol tetrakis(3-dithiopropionic acid vinegar), a disulfide compound obtained by oxidizing the mercapto compound, iodoacetic acid, iodopropionic acid, 2-104737.doc • 22-breaking ethanol 2, moth, money, propylene material moth compound, etc. 0 as the above surfactant, can use perfluoroalkyl phosphate, perfluoroalkyl hydrazine a fluorine surfactant such as a salt, an anionic surfactant such as a higher fatty acid alkali salt, an alkylsulfonate or an alkyl sulfate; a higher amine hydrogen is a cationic surfactant such as an acid f or a quaternary salt; A nonionic surfactant such as a glycol base scale, a polyethylene glycol fatty acid ester, a sorbitan fatty acid ester or a fatty acid monoglyceride, or an amphoteric surfactant 矽 oxygen surfactant or the like may be combined. Use these. In the alkali-developable resin composition and the alkali-developable photosensitive resin composition of the present invention, the properties of the cured product can be further improved by using the thermoplastic organic polymer. Examples of the thermoplastic organic polymer include polystyrene, polymethyl methacrylate, methyl methacrylate-ethyl acrylate copolymer, poly(meth)acrylic acid, and stupid ethylene (fluorenyl) propylene. Bake copolymers, (meth)acrylic acid-methyl methacrylate copolymer, polyvinyl butyral, cellulose ester, polypropylene decylamine, and saturated polyester. Further, in the alkali-developable resin composition and the alkali-developable photosensitive resin composition of the present invention, anisole, hydroquinone, pyrocatechol, and tert-butyl tea may be added as needed. A thermal polymerization inhibitor such as phenol or phenothiazine; a plasticizer; an adhesion promoter; a filler; an antifoaming agent; and a conventional additive such as a homogenizing agent. The alkali-developable photosensitive resin composition of the present invention can be suitably applied to a support substrate for metal, paper, plastic, etc. by a well-known method such as roll coating, curtain coating, various printing, and dipping. on. Further, 104737.doc -23- and other supporting groups m can also be transferred onto other supporting substrates, and the applicable method is not limited. The alkali-developable photosensitive resin composition of the present invention can be used for various applications such as a photocurable coating material, a photocurable adhesive, a printing plate, and a photoresist for a printed wiring board, and its use is not particularly limited. Further, as the light source for the active light used for curing the alkali-developable photosensitive resin composition of the present invention, light having a wavelength of 300 to 45 Å can be used, and for example, ultrahigh pressure mercury, mercury vapor arc, carbon arc, or the like can be used. Xenon arc and so on. EXAMPLES Hereinafter, the present invention will be described in detail with reference to examples and the like, but the present invention is not limited to the examples. [Example 1] Production of alkali-developable resin composition No. 1 <Step 1>1,1-bis(4·-hydroxyphenyl)-fluorene-(i"-biphenylcyclohexylmethane production 70.5 g of biphenylcyclohexyl ketone, 200.7 g of phenol and 1 〇.15 g of thioacetic acid were charged, and 40.0 g of trifluoromethanesulfonic acid was added dropwise at 18 ° C for 20 minutes. After reacting at 17 to 19 ° C for 18 hours, The reaction was stopped by adding 500 g of water, 5 g of toluene was added, and the organic layer was washed with water until the pH became 3 to 4. The organic layer was separated. Toluene, water and excess benzene were added. Toluene was added to the residue and filtered. The precipitated solid was washed with toluene to obtain 59.2 g of pale yellow crystals (yield 51%). The melting point of the pale yellow crystals was 239.5 ° C, and it was confirmed that the pale yellow crystals were the target. 2>1,1·bis(4'-epoxypropoxyphenyl)-1-(1"-biphenyl)_1_cyclo 104737.doc • 24- 1375863 Preparation of hexyl methane into 57.5 g step 1,1·bis(4,-hydroxyphenyl)^(^-biphenyl)-1-cyclohexylamine obtained in 1 and ruthenium 95.8 g of epoxy propylene, adding 〇6〇2 g benzyl tri B After ammonium chloride, the mixture was stirred at 64 ° C for 18 hours. Then, the temperature was lowered to 54 C, 43.0 g of a 24% by weight aqueous sodium hydroxide solution was dropped, and the mixture was stirred for 30 minutes to distill off the epichlorohydrin and water, and 216 g of methyl group was added. After washing with isobutyl ketone, 2.2 g of 24% by weight sodium hydroxide was added dropwise. After stirring at 8 Torr for 2 hours, it was cooled to room temperature and neutralized with 3 parts by weight of ❶/〇 of sodium monophosphate aqueous solution. The solvent was distilled off to obtain 57 g of a yellow solid (yield: 79%) (melting point: 64.2 ° C, epoxide equivalent 282, n = 0.04). The crystals of the yellow crystals were confirmed to be the object. <Step 3> Preparation of Resin Composition N〇. 1 Loaded with 43 g of the ι,ΐ-bis(4,-epoxypropoxyphenyl)-1-(1"-biphenyl)-1 obtained in Step 2 .-cyclohexyldecane (hereinafter, referred to as compound a), ug acrylic acid (hereinafter, referred to as compound b), 0.05 g of 2,6-di-t-butyl-p-cresol, 0.11 g of tetrabutyl acetate Ammonium and 23 g of propylene glycol _ 丨 monomethyl ether _2 acetate, stirred at 120 C for 16 hours. Cooled to room temperature, adding 35 § propylene glycol · 1-monomethyl ether 2 · acetate and 9.4 g benzene The carboxylic acid dianhydride (hereinafter referred to as the compound d-fluorene) was stirred at 120 ° C for 8 hours, and further 6 μg of tetrahydrophthalic anhydride (hereinafter referred to as compound d-2) was added at 120 ° C. The mixture was stirred for 4 hours, stirred at 1 ° C for 3 hours, and stirred at 8 ° C for 4 hours at 6 °C. After stirring for 6 hours and stirring at 40 ° for 11 hours, 29 g of propylene glycol]monomethyl ether-2·acetate was added, and the alkali-developable resin of the target was obtained by using a propylene glycol monomethyl ether-2•acetate solution. No. 1 (Mw = 4 Å, Mn = 21 Å, acid value (solid type 104737. doc - 25 - 1375863 minutes) 86 mg KOH / g). Further, the 'reaction product contained in the alkali-developable resin composition No. 1' can be obtained by adding the compound b as the component (B) to the component (a). One of the hydroxyl groups of the epoxy adduct of the compound a, the compound dd as the component and the acid anhydride of the compound d-2 are constructed in a ratio of 〇68 to the epoxy adduct and the compound d-oxime and the compound. D-2 was subjected to an esterification reaction. Further, the epoxy adduct has a structure in which one epoxy group of the compound a is added at a ratio of 1.0 to the drum base of the compound b. [Example 2] Production of alkali-developable resin composition No. 2 was charged with 43 g of 1,1-bis(4'-epoxypropoxyphenyl)-oxime (1"-biphenylcyclohexyl Methyl burn (Compound a), 11 g of pro-glycolic acid (Compound b), 〇.〇5 g 2,6-di-t-butyl-p-cresol, 0.11 g of tetrabutyl sulphate and 23 g of propylene glycol 1-monomethyl ether-2-acetate, stirred at 120 ° C for 16 hours. Cooled to room temperature 'added 35 g of propylene glycol-1-monomethyl ether-2-acetate and 16 g of biphenyltetracarboxylic acid Anhydride (compound d-Ι) was spoiled at 120 ° C for 8 hours. Further, 〇.7 g of tetrahydrophthalic anhydride (compound d-2) was added and stirred at 120 ° C for 4 hours at 100 Torr: Stirring for 3 hours, stirring at 80 ° C for 4 hours, at 60. Stirring for 6 hours, stirring at 40 ° C for 11 hours, adding 29 g of propylene glycol-1 · monomethyl ether-2-acetate to propylene glycol-1 - a monomethyl ether-2-acetate solution to obtain an alkali-developable resin composition No. 2 (Mw = 8100, Mn = 2900, acid value (solid content) 89 mgKOH/g) of the target product. The reaction product contained in the developable resin composition N 〇. 2, which can be obtained by the following means: Compound b as component (B) 104737.doc •26·1375863 is added to a hydroxyl group of the epoxy adduct of the compound of the component (a) as a component (D) And the anhydride structure of the compound d-2 is 0.74, and the epoxy adduct is esterified with the compound d-oxime and the compound d-2. Further, the above epoxy addition system has a relative to the compound a. An epoxy group having a structure in which the carboxyl group of the compound b is added in a ratio of 1.0. [Example 3] Production of an alkali-developable resin composition ν〇·3 was charged with 43 g of l'l-double ( 4'-Epoxypropoxyphenyl)biphenyl)cyclohexylmethane (compound a), 11 g of acrylic acid (compound..., 〇〇5 g 2,6-di-t-butyl-p-cresol 011 g of tetrabutylammonium acetate and 23 g of propylene glycol-1-monodecyl ether-2-acetate were stirred at 12 ° C for 16 hours, cooled to room temperature, and 35 g of propylene glycol-1·monomethyl ether was added. 2_acetate, 16 g of biphenyltetracarboxylic dianhydride (compound d-oxime) and 39 mg of tetra-n-butylammonium bromide, stirred at 12 ° C for 4 hours 'stirring at l ° ° C for 3 hours At 80t: stirring for 4 hours, stirring at 6 ° C for 6 hours, and stirring at 40 ° for 11 hours, adding 29 g of propylene glycol _ 1 -monomethyl ether-2-acetate to propylene glycol 丨 曱 monoterpene ether The acetate solution obtained the inventor-developable resin composition N〇. 3 (Mw = 8600, Mn = 3000, acid value (solid content) 87 mgKOH/g). Further, the reaction product contained in the 'experimental reproducible resin composition N 0. 3 can be obtained by adding the compound b as the component (B) to the component (A). One of the hydroxyl groups of the epoxy adduct of the structure of the compound & is a ratio of 0.71 of the acid anhydride structure of the compound cM as the component (D), and the epoxy adduct is esterified with the compound d-1. Further, the above epoxy addition product has a structure in which a ring of 104737.doc • 27·1375863 oxy group is added to the compound 2, and the carboxyl group of the compound b is added to 1.0. [Example 4] base Preparation of the developable resin composition No. 4 was charged with 43 g of 1,1-bis(4'-epoxypropoxyphenyl)-1-(1"-biphenyl)·1-cyclohexylmethane. (Compound a), 11 g of acrylic acid (compound b), 0.05 g of 2,6-di-t-butyl-p-cresol, 0.11 g of tetrabutylammonium acetate, and 23 g of propylene glycol-1-monomethyl ether-2 -acetate, stirred at 120 ° C for 16 hours" cooled to room temperature, adding 35 g of propylene glycol 1-1-decyl ether-2 · acetate and 1 〇 g of biphenyltetracarboxylic dianhydride (compound d-Ι ), stirring at 120 ° C for 8 hours. Further, 6 g of tetrahydrophthalic anhydride (compound d-2) was added, and the mixture was stirred at 120 ° C for 4 hours, at 10 ° C for 3 hours, at 80 ° C for 4 hours, and at 60 ° C for stirring. After stirring at 40 ° C for 11 hours at 6 hours, 6.3 g of cresyl glycidyl ether (compound e) was added, and the mixture was stirred at 120 ° C for 1 hour. Cool to 5 〇. 〇, adding 29 g of propylene glycol-1-monomethyl ether-2-acetate, and the propylene glycol 丨 曱 曱 曱 曱 _2 _2 • • • 乙酸 目的 目的 目的 目的 目的 目的 目的 目的 目的 目的 验 验 验 验 验 验 验 验 验 验 验 验 验. 4 (Mw = 4700, Mn = 2500, acid value (solid content) 45 mg K 〇 H / g). Further, the reaction product contained in the inventor-developable resin composition N 〇·4 has a structure in which a compound b as a component (B) is added to a compound & One of the hydroxyl groups of the epoxy adduct of the structure is a ratio of the compound cM of the component (D) and the anhydride k of the compound d-2 to a ratio of 'the epoxy adduct and the compound η and the compound d-2. The esterification reaction is further carried out in such a manner that the compound as the component (8) is derived from 0.36 of the county of the structure. Further, the above epoxy addition product has a structure in which an epoxy group of the compound a is added to the epoxy group of the compound b of 104737.doc -28-1375863. [Example 5] Production of alkali-developable resin composition ν〇·5 Addition of 43 g of 1,1-bis(4,-epoxypropoxyphenyl)·“〇"_biphenyl)_ "Cyclohexylmethane (compound a), 5.7 g of phenol (hereinafter referred to as the compound hydrazine and 25 g of propylene glycol-1-monomethane _2. acetate), heated to 115 ° C. Add 〇.2 g di-based Teng' was given a sample for 4 hours at 12 ° C, 50 g of propylene glycol _.ι_monomethyl ether-2-acetate was added, cooled to 5 〇. 48 added 48 mg 2,6-di-t-butyl butyl pair - cresol, 0.49 g of benzyltriethylammonium bromide and 6.6 g of acrylic acid (compound b) were stirred at 120 ° C for 5 hours and cooled to 50 ° C. 10.27 g of biphenyltetracarboxylic dianhydride (compound) was added. D-Ι), at 120T: stirring for 8 hours. Further, 6.23 g of tetrahydrophthalic anhydride (compound d-2) was added, and the mixture was stirred at 120 ° C for 4 hours and at 100 ° C for 3 hours at 8 °. The mixture was stirred for 4 hours at °C, stirred at 60 °C for 6 hours, and stirred at 40 °C for 11 hours. Cooled to 50. 〇, added 58.3 g of propylene glycol-1-single-seal-2-acetate to propylene glycol monomethyl Alkaline-developable resin group of the target obtained by the bond _2_acetate solution Material No. 5 (Mw=4300, Mn=2200, acid value (solid content) 87 mgKOH/g) » Further, the reaction product contained in the 'alkaline developing resin composition No. 5 can be used In the above-mentioned manner, a compound d having a compound b as a component (B) and a hydroxyl group as an epoxy adduct having a structure of a compound a as a component is added as a component. - The oxime and the anhydride of the compound d-2 are constructed in a ratio of 0.73, and the epoxy adduct is esterified with the compound d-1 and the compound d-2. Further, the above epoxy addition system has a relative compound One of the epoxy groups of a, the carboxyl group of the compound b is about 〇6, the phenolic hydroxy 104737.doc -29- 1375863 of the compound is 0.4, and the sum of the compound b and the compound c is ι·〇 [Example 6] The production of the in-progressive resin composition No. 6 was added with 43 g of 1,1-bis(4'-epoxypropoxyphenyl)_!·〇 "_biphenyl)N cyclohexylmethyl amide (compound a), 7.1 g benzene age (compound c) and 25 g propylene glycol-1-monodecyl ether-2-B The ester was heated to 115. 〇. After adding 2 g of triphenylphosphine to the mixture at 4 ° C for 4 hours, 50 g of propylene glycol-i-monomethyl ether-2-acetate was added and cooled to 50 °C. 48 mg of 2,6-di-t-butyl-p-p-methyl, 0.49 g of benzyltriethylammonium bromide and 5.5 g of acrylic acid (compound..., were stirred at 120 ° C for 5 hours and cooled to 50. (: Add 10.27 g of bisphosphonate dianhydride (compound d-Ι), stir at 12 (TC for 8 hours. Further, add 6.23 g of tetrahydrophthalic anhydride (compound d-2) at 120° C stir for 4 hours, stir at l ° ° C for 3 hours, stir at 80 ° C for 4 hours, stir at 6 (rC for 6 hours, mix at π ° C for π hours. Cool to 5 〇 it, add S83 g Propylene glycol 丨 丨 曱 -2- -2- ether, the acrylonitrile _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The acid value (solid content) is 86 mg KOH/g. Further, the reaction product contained in the 'experimental developing resin composition N 〇. 6 can be obtained by the following means: The component b of the component and the compound c as the component (C) are added to one of the epoxy groups of the structure of the θ a of the component (A), and the compound dl and the compound d as the component (1)) The acid anhydride structure of -2 is a ratio of 〇·7, and the epoxy adduct is esterified with the compound d·1 and the compound d-2. The above-mentioned cyclic adduct system has a relative ratio. An epoxy 104737.doc -30- 1375863 base of the substance a, 0.5 of the compound b of the compound b, 0.5 of the benzene-prone super group of the compound c, and the sum of the compound b and the compound c are 1. [Example 7] The production of the alkali-developable photosensitive resin composition No. 1 was added with respect to 14 g of the alkali-developable resin composition No. 1 ' obtained in Example 1. 5.9 g of tris(hydroxymethyl)propane triacrylate, 2.1 g of diphenyl hydrazine, and 78 g of ethyl cellosolve' were thoroughly stirred to obtain an alkali-developable photosensitive resin composition No. 1. [Example 8] The alkali-developable photosensitive resin composition N〇. 2 was produced in comparison with 14 g of the alkali-developable resin group obtained in Example 2; the compound N〇. 2' was added to 5.9 g of tris(methyl)propyl group. The tributyl acrylate, 21 g of benzophenone, and 78 g of ethyl cellosolve were sufficiently stirred to obtain an alkali-developable photosensitive resin composition No. 2. [Example 9] Alkaline development of photosensitive light The production of the resin composition Ν〇·3 was added to 8.1 g of the alkali-developable resin composition No. 1 ' obtained in 12 g of Example 1. Pentaerythritol hexaacrylate, I; g benzophenone 47 g ethyl cellosolve and 31 g of cyclohexanone were thoroughly stirred to obtain an invisible developing photosensitive resin composition N〇3. 〇] Production of face-developing photosensitive resin composition 4 relative to 7.2 g of the alkali-developable resin composition obtained in Example 丨

No_ 1,添加4.3 g三(羥曱基)丙烷三丙烯酸酯、15 g 2_甲 基K[4-(曱硫基)苯基]_2-嗎啉基丙烷·丨_酮以及87 g乙基溶 纖劑’充分if拌’獲得驗性顯影性感光性樹脂組合物N〇. 4 〇 104737.doc -31- [實施例11]驗性顯影性感光性樹脂組合物N〇 5之製造 相對於20 g實施例1中所獲得之驗性顯影性樹脂組合物 N〇. 1 ’添加8.7 g三(羥甲基)丙烷三丙烯酸酯、46g丙烯酸 .共聚物、1.7 g 2-甲基-1-[4-(甲硫基)苯基]_2_嗎啉基丙烷_ 1-酮以及65 g乙基溶纖劑,充分攪拌,獲得鹼性顯影性感 光性樹脂組合物No. 5。 再者’上述丙烯酸共聚物’其藉由下述方式獲得:將2〇 重畺份曱基丙稀酸、15重量份曱基丙稀酸經乙酯、丨〇重量 伤甲基丙烯酸甲酯以及55重量份甲基丙烯酸丁酯溶解於 3〇〇重量份乙基溶纖劑中’於氮環境下添加〇 75重量份偶 氮二異丁腈,使之於70°C反應5小時。 [比較例1]鹼性顯影性樹脂組合物Ν〇· 7之製造 裝入184 S雙酚芴型環氧樹脂(環氧當量231)、58 g丙烯 酸、〇.26g2,6-二-第三丁基·對·甲酚、〇11 g乙酸四丁基銨 以及23 g丙二醇-丨·單曱醚_2·乙酸酯,於12〇。〇攪拌16小 時。冷卻至室溫,添加35 g丙二醇-i_單甲醚_2·乙酸酯、 59 g雙鄰笨二曱酸酐以及0.24 g四正丁基溴化兹,於uoi 攪拌4小時。進而,添加20 g四氫鄰苯二甲酸酐,於12〇〇c 授拌4小時、於丄〇〇。〇攪拌3小時、於8〇〇c攪拌4小時、於 60 C攪拌6小時、於4〇。〇攪拌11小時後,添加9〇 g丙二醇_ 1-單甲醚_2-乙酸酯,以丙二醇_丨_單曱醚_2_乙酸酯溶液獲 得目的物之驗性顯影性樹脂組合物N〇. 7(Mw=5000、 Mn=2100、酸價(固形分)92 7 mgK〇H/g)。 [比較例2]鹼性顯影性樹脂組合物n〇 8之製造 I04737.doc •32· 1375863 裝入154 g雙酚A型環氧樹脂(環氧當量19〇)、59 g丙烯 酸〇·26 g2,6-第二丁基-對-曱紛、0.11 g乙酸四丁基銨 以及23 g丙二醇-1·單甲醚·2_乙酸酯,於12〇。〇攪拌“小 時。冷卻至室溫’添加365 g丙二醇-1-單甲醚_2-乙酸酯、 67 g雙鄰苯二甲酸酐以及0.24 g四正丁基溴化敍,於120。〇 攪拌4小時、於l〇〇°C攪拌3小時、於8〇°c攪拌4小時於 6〇°C攪拌6小時、於40°C攪拌11小時後,添加90 g丙二醇_ 1-單甲醚-2-乙酸酯,以丙二醇單甲醚_2_乙酸酯溶液獲 付目的物之驗性顯影性樹脂組合物N〇. 8(Mw=7500、 Mn=2 1 00、酸價(固形分)9 1 mgK〇H/g)。 [比較例3]鹼性顯影性樹脂組合物N〇. 9之製造 <步驟1> 1,1-雙(4'-羥基苯基聯苯基)乙烷之製造 使75 g苯酚以及50 g 4-乙醯基聯苯於6〇。〇加熱溶解,添 加5 g 3-毓基丙酸,一面攪拌一面吹入氯化氫氣體歷時24 小時,其後使之反應72小時《以70。(:之溫水洗淨後,於減 壓下加熱至180°C餾去蒸發物。於殘渣中添加二甲苯加以 冷卻,過濾所析出之結晶,減壓乾燥而獲得65 g淡黃色結 晶(收率68%)。該淡黃色結晶之熔點為184°C,可確認該渓 黃色結晶為目的物。 <步驟2> 1,1-雙(4'-環氧基丙氧基笨基)-丨_(1”聯苯基)乙烷 之製造 裝入37 g步驟1中所獲得之^-雙^-羥基苯基)-1-(1聯 苯基)乙烷以及149.5 g環氧氣丙烷,添加0.45 g苄基三乙基 氯化銨,於64°C攪拌1 8小時。接著,降溫至54°C,滴下 104737.doc -33 - 32.6 g 24重量%之氫氧化納水溶液,攪拌30分鐘。德去環 氧氯丙燒以及水’添加14〇 g甲基異丁基酮加以水洗後, 滴下1.7 g 24重量%之氫氧化鈉。於8〇°c攪拌2小時後,冷 卻至至溫’以3重量%之單碌酸鈉水溶液中和,實行水 洗°館去溶劑’獲得38.7 g黃色黏性液體(收率80%)(環氧 當量248 ’ η=〇·〇4)。可確認該黃色黏性液體為目的物。 <步驟3>鹼性顯影性樹脂組合物Ν〇 9之製造 裝入49.6 g 1,1-雙(4,-環氧基丙氧基笨基),·聯苯基) 乙院、14.4 g丙烯酸、〇_〇5 g 2,6-二-第三丁基-對-曱酚、 0.14 g乙酸四丁基銨以及27.4 g丙二醇-1-單甲醚-2-乙酸 醋,於120。(:授拌16小時。冷卻至室溫,添加41.5 g丙二 醇-1-單甲醚-2-乙酸酯以及12.4 g聯苯四羧酸二酐,於 120°C授拌8小時。進而’添加7.9 g四氫鄰苯二甲酸酐,於 120°C攪拌4小時、於l〇〇°c攪拌3小時、於80°C攪拌4小時、 於60°C授拌ό小時、於40°C擾拌11小時後,添加34 g丙二 醇-1-單曱醚-2-乙酸酯’以丙二醇_丨_單曱醚_2-乙酸酯溶液 獲得目的物之鹼性顯影性樹脂組合物No. 9(Mw=3700、No_ 1, adding 4.3 g of tris(hydroxyindenyl)propane triacrylate, 15 g of 2-methyl K[4-(indolyl)phenyl]_2-morpholinopropane·indolone and 87 g of ethyl The cellulolytic agent 'sufficient if mixed' to obtain an invisible developable photosensitive resin composition N〇. 4 〇104737.doc -31- [Example 11] Manufactured in an illustratively-developable photosensitive resin composition N〇5 20 g of the in-progress developable resin composition obtained in Example 1 N. 1 'Addition of 8.7 g of tris(hydroxymethyl)propane triacrylate, 46 g of an acrylic copolymer, and 1.7 g of 2-methyl-1- [4-(Methylthio)phenyl]_2-morpholinopropane-1-one and 65 g of ethyl cellosolve were stirred well to obtain an alkali-developable photosensitive resin composition No. 5. Further, 'the above-mentioned acrylic copolymer' is obtained by adding 2 parts by weight of mercapto acrylic acid, 15 parts by weight of mercapto acrylic acid by ethyl ester, ruthenium weight to damage methyl methacrylate, and 55 parts by weight of butyl methacrylate was dissolved in 3 parts by weight of ethyl cellosolve', 75 parts by weight of azobisisobutyronitrile was added under a nitrogen atmosphere, and reacted at 70 ° C for 5 hours. [Comparative Example 1] Production of alkaline developable resin composition Ν〇·7 was charged with 184 S bisphenol fluorene type epoxy resin (epoxy equivalent 231), 58 g of acrylic acid, 〇.26 g 2,6-di-third Butyl·p-cresol, 〇11 g tetrabutylammonium acetate, and 23 g propylene glycol-indole monodecyl ether-2·acetate at 12 Torr. Stir for 16 hours. After cooling to room temperature, 35 g of propylene glycol-i_monomethyl ether-2·acetate, 59 g of diammonium diacetate and 0.24 g of tetra-n-butyl bromide were added and stirred at uoi for 4 hours. Further, 20 g of tetrahydrophthalic anhydride was added, and the mixture was stirred at 12 ° C for 4 hours. The mixture was stirred for 3 hours, stirred at 8 ° C for 4 hours, and stirred at 60 ° for 6 hours at 4 °. After stirring for 11 hours, 9 μg of propylene glycol _ 1-monomethyl ether-2-acetate was added, and the inventor-developable resin composition of the object was obtained by using a propylene glycol _ 丨_monodecyl ether 2 -acetate solution. N〇. 7 (Mw=5000, Mn=2100, acid value (solid content) 92 7 mgK〇H/g). [Comparative Example 2] Production of alkaline developable resin composition n〇8 I04737.doc • 32·1375863 charged with 154 g of bisphenol A type epoxy resin (epoxy equivalent 19 Å), 59 g of yttrium yttrium · 26 g 2 , 6-t-butyl-p-oxime, 0.11 g of tetrabutylammonium acetate, and 23 g of propylene glycol-1·monomethyl ether·2-acetate at 12 Torr. 〇 stir “hours. Cool to room temperature” add 365 g propylene glycol-1-monomethyl ether-2-acetate, 67 g diphthalic anhydride and 0.24 g tetra-n-butyl bromide at 120. Stir for 4 hours, stir at 3 ° C for 3 hours, stir at 8 ° C for 4 hours, stir at 6 ° C for 6 hours, and at 40 ° C for 11 hours, add 90 g of propylene glycol _ 1-monomethyl ether -2-acetate, an inspectively developable resin composition of the object obtained by a propylene glycol monomethyl ether-2-acetate solution N〇. 8 (Mw=7500, Mn=2 00, acid value (solid form) (Part 1) 9 1 mg K〇H/g) [Comparative Example 3] Production of an alkali-developable resin composition N〇. 9 <Step 1> 1,1-bis(4'-hydroxyphenylbiphenyl) The production of ethane is 75 g of phenol and 50 g of 4-ethenylbiphenyl at 6 Torr. The hydrazine is heated and dissolved, and 5 g of 3-mercaptopropionic acid is added, and hydrogen chloride gas is blown while stirring for 24 hours, after which After the reaction was carried out for 72 hours, the mixture was washed with warm water, and then heated to 180 ° C under reduced pressure to distill off the evaporate. The residue was cooled with xylene, and the precipitated crystals were filtered and dried under reduced pressure. Obtained 65 g of pale yellow crystals (yield 68%). The melting point of the pale yellow crystal was 184 ° C, and it was confirmed that the yellow crystals were the target. <Step 2> 1,1-bis(4'-epoxypropoxyphenyl)-oxime Manufacture of _(1"biphenyl)ethane was charged with 37 g of ^-bis-hydroxyphenyl)-1-(1biphenyl)ethane obtained in Step 1, and 149.5 g of epoxy propylene, added 0.45 g of benzyltriethylammonium chloride was stirred at 64 ° C for 18 hours. Subsequently, the temperature was lowered to 54 ° C, and 104737.doc -33 - 32.6 g of a 24% by weight aqueous sodium hydroxide solution was dropped and stirred for 30 minutes. After de-evaporation and water addition of 14 g of methyl isobutyl ketone, water was washed, and 1.7 g of 24% by weight of sodium hydroxide was added dropwise. After stirring at 8 ° C for 2 hours, it was cooled to a temperature of 3% by weight of sodium monobromide aqueous solution, and washed with water to obtain 38.7 g of a yellow viscous liquid (yield 80%) (ring Oxygen equivalent 248 ' η = 〇 · 〇 4). It was confirmed that the yellow viscous liquid was the target. <Step 3> Preparation of Alkaline Developing Resin Composition Ν〇9 49.6 g of 1,1-bis(4,-epoxypropoxyphenyl), biphenyl group), 14.4 g Acrylic acid, 〇_〇5 g 2,6-di-t-butyl-p-nonylphenol, 0.14 g of tetrabutylammonium acetate, and 27.4 g of propylene glycol-1-monomethyl ether-2-acetic acid vinegar at 120. (: The mixture was stirred for 16 hours. After cooling to room temperature, 41.5 g of propylene glycol-1-monomethyl ether-2-acetate and 12.4 g of biphenyltetracarboxylic dianhydride were added, and the mixture was stirred at 120 ° C for 8 hours. Add 7.9 g of tetrahydrophthalic anhydride, stir at 120 ° C for 4 hours, stir at l ° °c for 3 hours, stir at 80 ° C for 4 hours, and mix at 60 ° C for 4 hours at 40 ° C. After the mixture was stirred for 11 hours, 34 g of propylene glycol-1-monodecyl ether-2-acetate was added to obtain an alkali-developable resin composition No. of the target substance in a propylene glycol_丨_monodecyl ether-2-acetate solution. . 9 (Mw=3700,

Mn=1900、酸價(固形分)93 mgKOH/g)。 [比較例4]鹼性顯影性感光性樹脂組合物N〇. 6之製造 相對於14 g比較例1中獲得之鹼性顯影性樹脂組合物N〇. 7’添加5.9 g二(經曱基)丙烧三丙稀酸g旨、2.1 g二苯甲姻 以及78 g乙基溶纖劑,充分攪拌,獲得鹼性顯影性感光性 樹脂組合物N 〇. 6。 [比較例5]鹼性顯影性感光性樹脂組合物N〇. 7之製造 104737.doc -34- 1375863 相對於14 g比較例2中獲得之鹼性顯影性樹脂組合物N〇 8添加5.9 g二(經甲基)丙院三丙稀酸輯、2.1 g二苯甲嗣 以及78 g乙基溶纖劑,充分攪拌,獲得鹼性顯影性感光性 樹脂組合物No. 7。 [比較例6]鹼性顯影性感光性樹脂組合物ν〇· 8之製造 相對於14 g比較例3中獲得之鹼性顯影性樹脂組合物N〇 9 添加5.9 g二(輕甲基)丙烧三丙稀酸醋,2.1 g二笨曱酮 以及78 g乙基溶纖劑,充分攪拌,獲得鹼性顯影性感光性 樹脂組合物N 〇. 8。 如下所述,評估所獲得之鹼性顯影性感光性樹脂組合物 No. 1 至 8。 即’於基板上旋轉塗布r-縮水甘油氧基丙基甲基乙氧基 矽烷,使之良好地旋轉乾燥後,旋轉塗布上述鹼性顯影性 感光性樹脂組合物No. 1至7(1300 r.p.m,50秒)並且使之乾 燥。於70°C預烘烤20分鐘後’塗布聚乙烯醇5重量%之溶 液,製成氧阻隔膜。於7(TC乾燥20分鐘後,使用特定之遮 罩,使用超高壓水銀燈作為光源曝光後,於25。〇浸潰於2.5 重量%之碳酸鈉溶液中顯影30秒,且良好地水洗。水洗乾 燥後,於230 C烘烤1小時而固定圖案。就所獲得之圖案實 行以下評價。將結果表示於表1。 <感度> 曝光時’將曝光量於1〇〇 mj/cm2較為充分者設為a,將 於100 mJ/cm2不充分而於2〇〇 mJ/cm2曝光者設為b。 <解像度> 104737.doc •35- 1375863 曝光顯影時,將線寬度小於10 μιη時亦可良好地形成圖 案者評估為A ’將當線寬度為1〇至30 μπι時可良好地形成圖 案者評估為Β,將線寬度必須超過30 μηι以上時才能良好地 形成圖案者評估為C。 <密著性> 根據JIS D 0202之試驗方法’於塗膜上交叉切割為基盤 網目狀’接著藉由透明膠帶實施剝離試驗,目視評估基盤 目之剝離狀態。將無法確認完全剝離者設為〇,將可確認 剝離者設為X。 <对驗性> 將加熱處理後之塗膜,a)於5重量%2NaOH(aq.)中浸潰 24小時,b)於4重量%2KOH(aq.)中於5(TC浸潰10分鐘,c) 於1重畺%2NaOH(aq.)中於80°C浸潰5分鐘,以目視評估浸 潰後之外觀。將無外觀變化且阻劑未完全剝離者設為〇, 將可發現阻劑浮起或可確認剝離者設為X。 [表1]Mn = 1900, acid value (solid content) 93 mgKOH/g). [Comparative Example 4] Alkaline-developable photosensitive resin composition N〇. 6 was produced in comparison with 14 g of the alkali-developable resin composition obtained in Comparative Example 1. N'. Acryl triacetate, 2.1 g of dibenzoic acid, and 78 g of ethyl cellosolve were stirred well to obtain an alkali-developable photosensitive resin composition N 〇. [Comparative Example 5] Alkali-developed photosensitive resin composition N〇. Production of 7104737.doc -34- 1375863 5.9 g was added to 14 g of the alkali-developable resin composition N〇8 obtained in Comparative Example 2. The bismuth (methyl) propyl trimethacrylate, 2.1 g of dibenzamide and 78 g of ethyl cellosolve were thoroughly stirred to obtain an alkali-developable photosensitive resin composition No. 7. [Comparative Example 6] Production of an alkali-developable photosensitive resin composition ν〇·8 5.9 g of di(light methyl)-propyl was added with respect to 14 g of the alkali-developable resin composition N〇9 obtained in Comparative Example 3. The triacetic acid vinegar, 2.1 g of dicumyl ketone and 78 g of ethyl cellosolve were thoroughly stirred to obtain an alkali-developable photosensitive resin composition N 〇. The obtained alkali-developable photosensitive resin compositions No. 1 to 8 were evaluated as described below. That is, the r-glycidoxypropyl methyl ethoxy decane was spin-coated on the substrate, and after being spin-dried well, the above-mentioned alkali-developable photosensitive resin composition No. 1 to 7 (1300 rpm) was spin-coated. , 50 seconds) and let it dry. After prebaking at 70 ° C for 20 minutes, a solution of 5 wt% of polyvinyl alcohol was applied to prepare an oxygen barrier film. After drying for 20 minutes at TC, using a specific mask, using an ultra-high pressure mercury lamp as a light source, the film was exposed to 25.5% by weight of sodium carbonate solution for 30 seconds, and washed well. Washed and dried. Thereafter, the pattern was fixed by baking at 230 C for 1 hour. The following evaluation was carried out on the obtained pattern. The results are shown in Table 1. <Sensitivity> The exposure amount was sufficient at 1 〇〇mj/cm 2 during exposure. If it is set to a, it will be insufficient at 100 mJ/cm2 and will be set to b at 2〇〇mJ/cm2. <Resolution> 104737.doc •35- 1375863 When the line width is less than 10 μιη during exposure and development Those who can form a good pattern are evaluated as A'. Those who can form a pattern well when the line width is 1 〇 to 30 μπι are evaluated as Β, and those who can form a pattern well when the line width must exceed 30 μηι or more are evaluated as C. <Adhesiveness> According to the test method of JIS D 0202, 'cross-cutting on a coating film to a base mesh shape', a peeling test was carried out by a transparent tape, and the peeling state of the base was visually evaluated. Oh, it will be true. The peeler is set to X. <Comparative> The film after heat treatment, a) is immersed in 5 wt% 2 NaOH (aq.) for 24 hours, b) at 4 wt% 2 KOH (aq.) The appearance of the post-impregnation was visually evaluated by submerging at 5 (TC for 10 minutes, c) in 1 wt% 2 NaOH (aq.) at 80 ° C for 5 minutes. When the appearance was not changed and the resist was not completely peeled off, it was found that the resist was floated or the peeling was confirmed to be X. [Table 1]

鹼性顯影性感光性樹脂組合物 感度 解像度 密著性 耐驗性 No. 1 (實施例7) a A 〇 〇 No. 2 (實施例8) a A o 〇 No. 3 (實施例9) a A 〇 〇 No. 4 (實施例10) a A o o No. 5 (實施例11) a A o 0 No. 6 (比較例4) b C X X No. 7 (比較例5) b C X X No, 8 (比較例6) b C X X 貫施例7至11之鹼性顯影性感光性樹脂組合物係高感度 且解像度良好者,又,所獲得之塗臈係與基板之密著性、 104737.doc * 36 · 1375863Alkaline-developable photosensitive resin composition sensitivity resolution adhesiveness test No. 1 (Example 7) a A 〇〇 No. 2 (Example 8) a A o 〇 No. 3 (Example 9) a A 〇〇 No. 4 (Example 10) a A oo No. 5 (Example 11) a A o 0 No. 6 (Comparative Example 4) b CXX No. 7 (Comparative Example 5) b CXX No, 8 ( Comparative Example 6) b CXX The alkali-developable photosensitive resin composition of Examples 7 to 11 was high in sensitivity and good in resolution, and the adhesion between the obtained coating system and the substrate was 104737.doc * 36 · 1375863

耐鹼性良好者。 相對於此,比較例4至6之鹼性顯影性感光性樹脂組合 物,由於其感度較低故而必須加大曝光量,從而降低解像 度’線寬度若不為30 μιη以上則無法形成,又,所獲得之 塗膜與基板之密著性、耐鹼性亦未如預期。 產業上之可利用性 本發明之鹼性顯影性感光性樹脂組合物,其透明性、密 著性、耐鹼性等良好,可精度良好地形成微細圖案。 104737.doc 37.Good alkali resistance. On the other hand, in the alkali-developable photosensitive resin compositions of Comparative Examples 4 to 6, since the sensitivity is low, it is necessary to increase the amount of exposure, and the resolution of the line is reduced, and if the line width is not 30 μm or more, it cannot be formed. The adhesion and alkali resistance of the obtained coating film to the substrate were not as expected. Industrial Applicability The alkali-developable photosensitive resin composition of the present invention is excellent in transparency, adhesiveness, alkali resistance, and the like, and can form a fine pattern with high precision. 104737.doc 37.

Claims (1)

13758631375863 第094130706號專利申請案 中文申請專利範圍替換本(101年7月、 、申請專利範圍: 一種鹼性顯影性樹脂組合物,其特徵為:其係於_一·一-~- 氧加成物含有使多元酸酐(D)酯化而獲得之反應生成物 者,上述環氧加成物具有下述一般式⑴表示之環氧樹脂 (A)加成不飽和一元酸(B)以及選自苯酚化合物、醇化合 物、胺化合物以及羧酸之化合物(C)之構造, 上述環氡加成物’其具有如下構造:相對於上述環氧 樹脂(A)之一個環氧基,以上述不飽和一元酸(b)之敌基 為0.1至1.0個’上述化合物(C)之苯酚性羥基、醇性經 基、胺基或叛基為0至0.9個,且上述不飽和一元酸(b)所 具有之羧基以及上述化合物(C)所具有之苯酚性羥基、醇 性羥基、胺基或羧基.之和為0.1至1.0個之比率而加成之 構造, 上述S旨化’其以相對於上述環氧加成物之一個經基, 以上述多元酸酐(D)之酸酐構造成為〇.1至1.〇個之比率進 行; [化1]Patent Application No. 094,130,706, the entire disclosure of the entire disclosure of Japanese Patent Application No. (J.J.J.J.J.J.J.JJJJJJJJJJJJJJJJJJJJJJJJJJJJJJJJJJ In the case of a reaction product obtained by esterifying a polybasic acid anhydride (D), the epoxy adduct has an epoxy resin (A) represented by the following general formula (1), an unsaturated monobasic acid (B), and a phenol selected from phenol. a structure of a compound (C) which is a compound, an alcohol compound, an amine compound, and a carboxylic acid, and the above-mentioned cyclic oxime adduct' has a structure in which one of the above epoxy groups is unsaturated with respect to one epoxy group of the above epoxy resin (A) The acid (b) is an aliphatic group of 0.1 to 1.0 of the above compound (C), a phenolic hydroxyl group, an alcoholic trans group, an amine group or a thiol group of 0 to 0.9, and the above unsaturated monobasic acid (b) has a structure in which a carboxyl group and a phenolic hydroxyl group, an alcoholic hydroxyl group, an amine group or a carboxyl group of the compound (C) are added in a ratio of 0.1 to 1.0, and the above S is determined to be relative to the above ring One of the oxygen adducts, with the above polybasic acid anhydride (D The anhydride structure is made at a ratio of 〇.1 to 1. ;; (式中,Cy表示碳原子數3至10之環烷基,X表示氫原 子、亦可經碳原子數1至1〇之烷基或烷氧基取代之苯基 或碳原子數3至10之環烷基,γ以及z分別獨立表示碳原 104737-1010709.doc 1375863 子數1至10之烷基、碳原子數1至10之烷氧基、碳原子數 2至10之烯基或鹵素原子,上述烷基、上述烷氧基以及 上述烯基亦可經鹵素原子取代,n表示〇至1〇之數,p表 示0至5之數,r表示〇至4之數)。 2. 如請求項1之鹼性顯影性樹脂組合物,其中於上述反應 生成物中進而使環氧化合物(E)反應者。 3. 如請求項1或2之鹼性顯影性樹脂組合物,其中於上述一 般式(I)中,Cy為環己基,X為苯基,p以及r為〇。 4. 一種鹼性顯影性感光性樹脂組合物,其含有如請求項i 之鹼性顯影性樹脂組合物以及光聚合起始劑。 104737-i010709.doc(wherein Cy represents a cycloalkyl group having 3 to 10 carbon atoms, X represents a hydrogen atom, a phenyl group which may be substituted by an alkyl group or an alkoxy group having 1 to 1 carbon atom, or a carbon atom number of 3 to 10 The cycloalkyl group, γ and z each independently represent a carbon atom 104737-1010709.doc 1375863 an alkyl group of 1 to 10, an alkoxy group having 1 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms or a halogen. The atom, the above alkyl group, the above alkoxy group and the above alkenyl group may also be substituted by a halogen atom, n represents a number of 〇 to 1 ,, p represents a number of 0 to 5, and r represents a number of 〇 to 4). 2. The alkali-developable resin composition of claim 1, wherein the epoxy compound (E) is further reacted in the reaction product. 3. The alkali-developable resin composition according to claim 1 or 2, wherein in the above general formula (I), Cy is a cyclohexyl group, X is a phenyl group, and p and r are fluorene. An alkali-developable photosensitive resin composition containing the alkali-developable resin composition of claim i and a photopolymerization initiator. 104737-i010709.doc
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