TWI375139B - - Google Patents

Download PDF

Info

Publication number
TWI375139B
TWI375139B TW97141064A TW97141064A TWI375139B TW I375139 B TWI375139 B TW I375139B TW 97141064 A TW97141064 A TW 97141064A TW 97141064 A TW97141064 A TW 97141064A TW I375139 B TWI375139 B TW I375139B
Authority
TW
Taiwan
Prior art keywords
axis
plane
right angle
shaped right
linear motion
Prior art date
Application number
TW97141064A
Other languages
English (en)
Chinese (zh)
Other versions
TW201017354A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW97141064A priority Critical patent/TW201017354A/zh
Publication of TW201017354A publication Critical patent/TW201017354A/zh
Application granted granted Critical
Publication of TWI375139B publication Critical patent/TWI375139B/zh

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
TW97141064A 2008-10-24 2008-10-24 Alignment device for laser light and linear motion axis, and its alignment method TW201017354A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97141064A TW201017354A (en) 2008-10-24 2008-10-24 Alignment device for laser light and linear motion axis, and its alignment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97141064A TW201017354A (en) 2008-10-24 2008-10-24 Alignment device for laser light and linear motion axis, and its alignment method

Publications (2)

Publication Number Publication Date
TW201017354A TW201017354A (en) 2010-05-01
TWI375139B true TWI375139B (enrdf_load_html_response) 2012-10-21

Family

ID=44830802

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97141064A TW201017354A (en) 2008-10-24 2008-10-24 Alignment device for laser light and linear motion axis, and its alignment method

Country Status (1)

Country Link
TW (1) TW201017354A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI493155B (zh) * 2013-11-22 2015-07-21 Sheng Kuo Machinery Co Ltd 物件精密量測檢測儀

Also Published As

Publication number Publication date
TW201017354A (en) 2010-05-01

Similar Documents

Publication Publication Date Title
US6493957B1 (en) Ball step gauge
CN114719752B (zh) 基于万能工具显微镜、测头测量精密零件几何参数的方法
CN107607041B (zh) 一种用于转台六项几何误差测量装置
CN108362221B (zh) 一种自由曲面形貌纳米精度检测方法与装置
CN205449447U (zh) 一种光学镜头分光束平行度检测装置
TW202028691A (zh) 運動量測方法及其系統
TWI580513B (zh) Method of Simultaneous Error Measurement of Linear and Rotating Shaft of Machine Tool
JP2012083192A (ja) 三次元測定機の校正方法および校正治具
JP2003057026A (ja) プローブのアライメント調整装置、その装置を備えた測定機およびプローブのアライメント調整方法
CN111443450A (zh) 一种可调节激光光束方位角的精密光学镜架
TWI375139B (enrdf_load_html_response)
CN110954016A (zh) 一种高精度光学元件干涉检测中的装夹装置
JP4986530B2 (ja) 形状測定方法及び測定用治具
CN107044831B (zh) 测量方向可变的激光测头装置及其使用方法
CN206556609U (zh) 测量方向可变的激光测头装置
CN103831634A (zh) 可调式治具机构
CN113532334B (zh) 一种车辆前束角和外倾角测量装置及方法
JP3265360B2 (ja) 反射光学系の支持調整装置
JP2006119121A (ja) 光学部材の形状測定方法及び形状測定装置
JP6368971B2 (ja) 超精密形状測定装置
JPS61144541A (ja) 光学部品の偏心測定装置
JP2011145135A (ja) レンズ中心厚測定器およびレンズ中心厚測定方法
JP2001133239A (ja) レンズ金型の傾きおよび偏心の測定方法およびその装置
TW201741619A (zh) 探棒前端感測式探頭
TWI495839B (zh) 具五軸量測功能之掃描探頭

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees