TWI375057B - Detecting apparatus and detecting method for the detecting apparatus - Google Patents

Description

Ϊ375057 VI. Description of the Invention: [Technical Field] The present invention relates to a detecting device, and more particularly to a detecting device for detecting a defect of a substrate and a detecting method for the detecting device. [Prior Art] 5 With the advancement of liquid crystal display technology and the advantages of light weight and small size of liquid crystal display devices, liquid crystal display devices have been widely used in various electronic products such as digital cameras and personal digital assistants (personal digital Assistant, PDA), mobile phones, notebook computers, and flat-panel TVs. The liquid crystal display device includes a liquid crystal display panel and a backlight module 'group', wherein the backlight module is used to provide a surface light source to the liquid crystal display panel, so that the liquid crystal display panel can display a color picture. In the above, the liquid crystal display panel comprises two substrates and a liquid crystal layer disposed between the two substrates. One of the two substrates is a color filter substrate, and the color filter substrate is such that the liquid crystal display panel can display a color surface. Important components. The quality of the color filter G substrate is closely related to the display quality of the liquid crystal display panel. Therefore, it is detected that the defect of the color filter substrate is important. # Figure 1 is a schematic diagram of a conventional detection device. Referring to Figure 1, the conventional detecting device 100 is for detecting defects 53 on the glass substrate 50. A plurality of color filter units 52 are formed on the glass substrate 50. Each of the color filter units 52 and the glass substrate 50 therebelow constitute a color filter substrate in the liquid crystal display panel. The detecting device 1A is for detecting whether each of the color light-emitting units 52 is defective. The detecting unit 100 includes a moving platform 11A, a scanning module 12A, and a rechecking mold f130. The scanning module 120 is disposed above the mobile platform 11A and spans the mobile platform 110 along the χ3 axis. The re-inspection module 13 is disposed above the mobile platform ιι〇 and located beside the sweeping cat module 120. In addition, the mobile platform u〇 includes a plurality of transport rollers 112 along the γ 4 13750^7 column. By controlling the direction of rotation of the transport roller 112, / the glass substrate 5 placed on the transport roller 112 can be moved to the left or to the right along the Y-axis. The scan module 120 includes a plurality of charge coupled devices (CCDs) arranged along the x-axis. Therefore, the field of view (FOV) of the scan module 120 can traverse the mobile platform along the X direction. 11〇. The re-inspection module 130 includes a trajectory 132 that traverses the mobile platform u 沿 in the X direction, and a charge coupled element 134 adapted to move over the track 132. The prior art is to drive the charge to be lightly coupled by a linear motor (liner m〇t〇r) with better clamping accuracy.

Element 134 moves. Further, the charge coupled device 134 includes a lens having a magnification of eight times, so the field of view of the charge coupled device 134 is approximately 公8 mm χ 2 丨 公 公. In the prior art, the method of detecting the glass substrate 5 is to first place the glass substrate 50 on the transport roller 112 of the moving platform 110 to move the glass substrate 50 to the right in the x-axis direction by the transport roller 112. Then, when the glass substrate 5 is swept by the sweeping cat and under the i20, the buffing group 12_charge engaging component m detects whether the per-color light-emitting unit 52 on the glass substrate 50 has defects and the defect 63 is defective. Location 'and the result of the detection is fed back to the mobile platform ιι〇盘^检 module no. Thereafter, the mobile platform 11 moves the defect 53 below the track 132 of the recheck module 130, and the charge consuming element 134 of the recheck module 130 moves along the track i32 to above the defect 53.

Furthermore, the type of the missing (10) is judged to find out the defect W1 U of the defect 53 and the positioning accuracy of the transport wave with the 112 is about 2 mm to 1 〇 mm. Because the transport roller m mosquito bit accuracy is poor, so often ^ 2 yuan: 134 can not automatically detect the situation of defect 53. For example, it takes a lot of manpower and time to find the defect 53, which results in a large detection time and 5 t. [Invention] The present invention provides a detecting device to improve detection efficiency. The invention further provides a detection method to improve detection efficiency. In order to achieve the above advantages, the present invention proposes a detecting device which is suitable for detecting a base, an upper, and a defect. The detecting device comprises a mobile platform, a scanning module, a rechecking module and a positioning set. The mobile platform is adapted to move the substrate back and forth in a first direction. The broom module is disposed above the mobile platform, and the field of view of the swept cat module moves along the second direction transversely f. The platform has an angle between the first direction and the second direction. The inspection mode _, · is placed above the shifting table and next to the sweep (four) group. The retest module includes a first track that traverses the mobile platform in a second direction and a first image sensing element adapted to move on the first track. The positioning module is disposed on a side of the mobile platform, and the positioning module includes a second lane parallel to the first direction and a light sensing component group adapted to move on the second track. The set of light sensing elements includes at least two light sensing elements arranged in a first direction. In addition, the scanning module is configured to detect the position of the defect, and the positioning module is adapted to move the light sensing component group from the preset position to the appropriate position in the direction of approaching the rechecking module according to the position of the defect. The mobile platform decelerates when one of the light sensing elements senses the first side of the parallel direction of the substrate, and the moving platform stops when the other of the light sensing elements senses the first side of the substrate . The recheck module is adapted to move the first image sensing element according to the position of the defect to recheck the defect on the substrate. In an embodiment of the invention, the first direction is perpendicular to the second direction. In an embodiment of the invention, the scan module includes a plurality of second image sensing elements arranged in a second direction. In an embodiment of the invention, the moving platform comprises a plurality of transport rollers arranged in parallel along the first direction. 6 ^/^057 In one embodiment of the invention, the spacing between the photo sensing elements described above is between 200 mm and 5 mm. In an embodiment of the invention, when the light sensing component group is located at a preset position, the distance between the light sensing component group and the rechecking module is approximately equal to the second side of the parallel first direction of the substrate. length. In one embodiment of the invention, the distance between the predetermined position and the appropriate position is equal to the length of the second side minus the shortest distance between the defect and the first side. In an embodiment of the invention, the light sensing component comprises a first light sensing component and a first light sensing component, wherein the first light sensing component is located between the second light sensing component and the rechecking module . When the positioning module is at the preset position or the appropriate position, the moving platform decelerates when the first light sensing element senses the first side of the substrate and the moving platform senses the first of the substrate at the second light sensing element Stop when you are on the side

In one embodiment of the present invention, the light sensing element includes a first-light sensing element, a second light-sensing element, a third light-sensing element, and a photo-sensing element, which are sequentially arranged. The first light sensing component is located between the second domain component and the retest module. When the positioning module is at the preset position, the moving platform decelerates when the measuring element senses the first side of the substrate, and the moving platform stops when the sensing element senses the base (four). When the positioning module is in the proper position, the mobile platform senses the first side of the substrate in the first light sensing tree: speed, and the moving platform senses the first side of the substrate in the second domain. In order to achieve the above advantages, the present invention further provides a detection method for the above, which comprises the following steps: First, by loading, the *-direction is moved forward. Then 'by the broom module price base::::: 7 1375057 • i set. Thereafter, the substrate is sensed by the light sensing element group located at the preset position, and the moving platform is decelerated to stop according to the sensing result of the light sensing element group. Then, the photo sensing element group is moved to an appropriate position in the direction of approaching the rechecking module, and the substrate is moved backward by the moving platform to be separated from the sensing range of the photo sensing element group. Then, the substrate is moved forward in the first direction by moving the platform. Then, the substrate is sensed by the light sensing component group, and the moving platform is decelerated and stopped according to the sensing result of the light sensing component group, so that the defect on the substrate is located in the detection range of the rechecking module.

Inside. Then, the first image sensing element of the recheck module is moved according to the position of the defect to recheck the defect on the substrate. In an embodiment of the invention, when the photo sensing element group is at the preset position, the distance between the photo sensing element group and the rechecking module is approximately equal to the length of the second side of the substrate. In one embodiment of the invention, the distance between the predetermined position and the appropriate position is equal to the length of the second side minus the shortest distance between the (four) and the first side. In an embodiment of the present invention, the method for causing the mobile platform to decelerate and stop according to the sensing result of the light sensing element includes the following steps: first, when the sensing component of the light sensing group detects the substrate When the first side is moved, ': decelerate. Then, when the other of the light sensing elements of the light sensing element group detects the i-th side of the substrate, the moving platform stops. In the embodiment, the light sensing element comprises a first light sensing element, a first light sensing element, wherein the first light sensing element is located in the second light sense and moves if =. The skill module is located at a preset position or a suitable position speed, and is reduced when the first light sensing element senses the first side of the substrate. The movable platform stops when the second light sensing element senses the first side of the substrate. 1 1375057 In an embodiment of the invention, the light sensing component comprises a first light sensing component arranged in sequence, The second light sensing component, the third light sensing component, and the fourth light sensing component, wherein the first light sensing component is located between the second light sensing component and the rechecking module. When the positioning module is at the preset position, the moving platform decelerates when the third light sensor/then element senses the first side of the substrate, and the moving platform senses the first side of the substrate at the fourth light sensing element Stop while you are on the side. When the positioning module is in the proper position, the moving platform decelerates when the first light sensing element senses the first side of the substrate, and the moving platform senses the first side of the substrate when the second light sensing element senses stop. In the detecting device of the present invention, since the light sensing component group of the positioning module can feed the sensing result back to the mobile platform, so that the mobile platform decelerates before stopping, it is determined that the defect on the substrate is accurately positioned in the complex Within the detection range of the inspection module. Therefore, the detecting device of the present invention can effectively improve the detection efficiency. In addition, the detecting method of the present invention firstly moves the positioning module to an appropriate position according to the position of the defect, and then returns the sensing result to the mobile platform by the positioning module, so that the moving platform decelerates before stopping. In this way, the defects on the substrate can be accurately positioned within the detection range of the re-inspection module to improve the detection efficiency.

The above and other objects, features, and advantages of the present invention will become more apparent and understood. Embodiments Fig. 2 is a schematic diagram of a detecting device according to an embodiment of the present invention. Referring to Fig. 2', the detecting device 2 of the present embodiment is adapted to detect a defect illusion on the substrate 6. This base 60 is, for example, a glass substrate', and a plurality of color light-receiving units 62 are formed, for example, on the substrate 6. Each of the color filter units 62 and the substrate 6 therebelowly constitute a color (four) substrate in the liquid crystal display panel. The detecting device 200 is configured to detect whether each of the color light-emitting units is defective, and to detect the type of the defect illusion 9 1375057 * }. The detecting device 200 includes a moving platform 21A, a scanning module 220, a rechecking module 230, and a positioning module 24A. The moving platform 21 is adapted to move the substrate 6 来回 back and forth in the first direction (e.g., the Y-axis). In more detail, the moving platform 21 includes, for example, a plurality of transport rollers 212 arranged in parallel in the first direction (γ axis), and the substrate 60 is placed on the transport roller 212. By controlling the rotational direction of the transport roller 212, the substrate 60 placed on the transport roller 212 can be moved leftward or rightward along the Y-axis. The ~% module 220 is disposed above the mobile platform 21A, and the field of view of the broom module 220 traverses the mobile platform 21〇 in the second direction (such as the X axis), wherein the first side, (Y axis) and the second There is an angle between the directions (X-axis), and the angle is, for example, 疋90 degrees. In addition, the scan module 220 includes, for example, a plurality of second image sensing elements 222 arranged in a second direction (the x-axis), and the third image sensing elements 222 are, for example, charge coupled elements. The field of view of the scanning module 22 is formed by the field of view of the image sensing elements 222. The re-inspection module 230 is disposed above the mobile platform 21A and is located beside the scanning module 220. The retest module 230 includes a first track 232 that spans the mobile platform 210 in a second direction (the x-axis) and a first image sensing element 234 that is adapted to move over the first track 232. The first image sensing element 234 is, for example, a charge coupled device, and the present embodiment drives the first image sensing element 234 to move, for example, by a linear motor with better positioning accuracy. In addition, the first image sensing element 234 can include a lens whose magnification is, for example, eight times, so that the field of view of the first image sensing π member 234 is, for example, 〇 χ 21 mm. It should be noted that the magnification of the above lens and the field of view of the first image sensing element 234 are for illustrative purposes only and are not intended to limit the invention. The positioning module 240 is disposed on the side of the moving platform 21 , and the positioning module 24 〇 1375057 « ii includes a second track 242 parallel to the 向 (axis) and a light sensing element adapted to move on the second track Group 244. This embodiment, for example, drives the light sensing element group 244 to move by positioning a preferred linear motor. The light sensing 7G piece, 244 packs of at least two light sensing elements arranged in a _ direction (γ axis), the arranged first light sensing element 245, the second light sensing element 246, and the third light sensing element 247 and fourth light sensing forest 248. The first light sensing element 5 is disposed between the second light sensing element 246 and the recheck module 23A. In addition, the spacing between adjacent two light sensing elements is, for example, between 200 ohms and 5,000 angstroms.

In this embodiment, when the substrate 60 passes under the scanning module 22, the broom module 22G can detect whether the color illuminating unit 62 on the substrate 6G has a defect 63, and detects the position of the defect 63. The result of the test is fed back to the top two clamp mode of the recheck module, and 240. The clamp module 240 is adapted to move (i.e., move to the left) the light sensing element set 244 from the preset position toward the appropriate position based on the position of the defective phantom. The mobile platform 21 is decelerated when the light sensing component commits, 246, 247, 248, senses the first side 64 of the parallel direction of the substrate 6〇, and the mobile platform 21 is hovering at the light sensing element 245. 246, 247 248, wherein the other side of the substrate 6A is sensed to stop. The re-inspection module 230 is adapted to move the first image sensing element 234' according to the position of the defect 63 to re-examine the defect 63 on the substrate 6. In addition, when the light sensing element group 244 is at the preset position (as shown in FIG. 2 ), the distance between the light sensing element group 244 and the recheck module 230 is approximately equal to the parallel first direction of the substrate 60 (Y axis) The length of the second side of the ). In more detail, when the light sensing component group 244 is at the preset position, the distance between the light sensing component group 244 and the recheck module 230 is, for example, the first track 232 to the light of the recheck module 23〇. The distance of one of the light sensing elements (eg, the fourth light sense 1375057 • i , the jaw 248) of the sensing element group 244. Further, the distance between the predetermined position and the appropriate position is equal to the length of the second side 66 minus the shortest distance between the defect 63 and the first side 64 of the substrate 6〇. For example, if the length of the second side 66 of the substrate 6 is 2250 mm, and the shortest between the defect side and the first side 64 of the substrate 60 is 1700, the preset position and the appropriate position are The distance between them is equal to 55 mm. In other words, the light sensing element group 244 is moved from the preset position toward the direction close to the rechecking mode group 230 by 55 〇 to reach the appropriate position. The detection method for the above-described detecting device 2A will be described in detail below. Please refer to FIG. 3A to FIG. 3, which are flowcharts of a detecting method according to an embodiment of the present invention. The detecting method for the detecting device 2〇〇 of the embodiment includes the following steps: First, as shown in FIG. 3A, the substrate 6 is moved forward along the first side (1) (Y axis) by moving the platform 21 ( That is to move to the right). Then, when the substrate 6 is passed under the brush module 220, the position of the defect 63 of the substrate 6 is detected by the broom module 22, and the result of the chip 22G is returned to the recheck module 230. And positioning module 240. Thereafter, as shown in FIGS. 3B and 3C, the substrate 60 is sensed by the light sensing element group 244 at a preset position, and the moving plate 21 is decelerated according to the sensing result of the light sensing element group 244. stop. In more detail, the method for causing the mobile platform 21 to decelerate and stop according to the sensing result of the photo sensing element group 244 includes the following steps: First, as shown in FIG. 3B, when the third sensing light of the photo sensing element group 244 When the measuring element 247 is fabricated to the first side 64 of the substrate 60, the moving platform 21 is decelerated. Next, as shown in Fig. 3C, when the fourth light sensing element 248 of the light sensing element group 2 senses the first side 64 of the substrate 60, the moving platform 21 is stopped. Then, as shown in FIG. 3D, the light sensing element group is moved away from the direction of the complex inspection module 230 (ie, moved to the left) to an appropriate position, and the substrate 60 is moved backward by the moving platform 2H) ( That is, moving to the left) 'to escape the sensing range of the light sensing element 12} 1375057 piece set 244. The method of how to move the light sensing element group 244 toward the position close to the recheck core group 230 has been described above and will not be repeated here. Next, as shown in Fig. 3E, the substrate 6 is moved forward in the first direction (Y-axis) by moving the stage 21 (i.e., moved to the right). Thereafter, the substrate 60 is sensed by the light sensing component group 244, and the moving platform 21〇 is decelerated and stopped according to the sensing result of the light sensing component group 244 so that the defect 63 on the substrate 6 is located in the rechecking module. 230 detection range. In particular, when the first light sensing element 245 of the light sensing element group 244 senses the first side 64 of the substrate 60, the moving platform 210 decelerates. In addition, as shown in FIG. 3F, when the first light sensing element 246 of the light sensing element group 245 senses the first side 64 of the substrate 60, the moving platform 210 stops. Then, as shown in FIG. 3G, the first image sensing element 244 of the recheck module 240 is moved according to the position of the defect 63 to recheck the defect 63 on the substrate 60. In more detail, the first image sensing element 244 is moved along the first track 242 above the defect 63 in accordance with the position of the defect 63 such that the defect 63 is within the field of view of the first image sensing element 244. Thus, the defect 63 can be further detected by the first image sensing element φ 244 to determine the type of the defect 63, thereby finding the cause of the defect 63. Since the light sensing component group 244 of the positioning module 240 can feed back the sensing result to the mobile platform 210 ′ to decelerate the mobile platform 210 before stopping, the positioning accuracy of the mobile platform 210 can be improved, and then the substrate 60 can be The defect 63 is finely positioned within the detection range of the retest module 230. Specifically, if the pitch between adjacent two light sensing elements is 0.5 mm, the present embodiment can improve the positioning accuracy of the moving platform 210 to within 1 mm. If the field of view of the first image sensing element 234 is 1 > 8 mm 2 2 mm, since the positioning precision of the mobile platform 210 is 13 1375057 • the degree of i has been increased to within 1 mm, the re-inspection module 230 can be ensured. Defect 63 is automatically detected. In this way, no additional labor and time are required to find the defect 63, so the detection efficiency can be improved.

In the present invention, the spacing between adjacent two light sensing elements can be adjusted depending on the field of view of the first image sensing element 234. In addition, in the above embodiments, the first photo sensing element 245, the second photo sensing element 246, the third photo sensing element 247, and the fourth photo sensing element 248 of the photo sensing element group 244 are different. Function, but in other embodiments, the light sensing component group 244 can also use only two light sensing components (such as the first light sensing component 245 and the second light sensing component, 246), while the rest of the light Sensing elements, such as third light sensing element 247 and fourth light sensing element 248, can serve as alternate light sensing elements. In other words, in another embodiment, the light sensing element group 244 may also include only the first light sensing element 245 and the second light sensing element 246. As described above, in the embodiment in which the first light sensing element 245 and the second light sensing element 246 are used only in the light sensing element group 244, when the positioning module 24 is at a preset position or an appropriate position, the mobile platform 210 decelerates as the first light sensing element tears the first side 64 of the substrate 60, and the moving platform 21 停止 stops when the second light sensing element 246 senses the first side 64 of the substrate 60 . In summary, the invention towel, because the positioning component of the positioning module can feedback the sensing result to the mobile platform, so that the mobile platform can reduce the positioning accuracy before stopping, so as to improve the positioning accuracy of the mobile platform, Defects on the substrate are accurate, = within the detection range of the retest module. In this way, the detection device and the detection method thereof of the present invention can effectively improve the detection efficiency without separately wasting the manpower to find the defect. In the spirit and scope of this illusion, there may be some changes and refinements, and the scope of this protection shall be subject to the definition of the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a conventional detecting device. 2 is a sound diagram of a detecting apparatus according to an embodiment of the present invention. FIGS. 3A to 3G are diagrams of a detecting unit according to an embodiment of the present invention. [Description of main component symbols] Process 5: Glass substrate

52, 62: color filter unit 53, 63: defect 60: substrate 64: first side 66: second side 100, 200: detecting device 110, 210: moving platform 112, 212: roller drum 120, 220 Scan module 122, 134: charge coupled component 130, 230: recheck module Π 2: track 222: second image sensing component 232: first trajectory 234: first image sensing component 240: positioning module 242: second track 244: light sensing element level 15 1375057 245 · first light sensing element 246: second light sensing element 247 · · third light sensing element 248: fourth light sensing element

Claims (1)

1375057 VII. Patent application scope: 1. A detecting device suitable for detecting a substrate on a substrate comprises: a mobile platform, a modified replacement page-defect on July 23, 2011, the detection is equipped with a one-second moving flat, suitable for making The substrate moves back and forth along a first direction; a re-inspection, disposed above the platform, and located beside the sweeping mold cylinder, the re-inspection module includes a first track spanning the mobile platform along the second direction and a first image sensing component that moves on the track; and a clamping module disposed on a side of the mobile platform, the positioning module includes a second track parallel to the first direction and adapted to move on the second lane The light sensing component group includes at least two light sensing elements arranged along the first direction, wherein the scanning module is configured to detect the position of the defect, and the positioning module is suitable The light sensing component group is moved from a predetermined position toward a position close to the rechecking module to an appropriate position according to the position of the defect detected by the scanning module, and the moving platform is in the light Decelerating when one of the sensing elements senses a first side of the substrate parallel to the second direction, and the moving platform senses the first side of the substrate in the other light sensing elements Stopping at the side, the retest module is adapted to be based on the defect The position moves the first image sensing element to recheck the defect on the substrate. 2. The detecting device of claim 1, wherein the first direction is perpendicular to the second direction. 3. The detecting device of claim 1, wherein the scanning module comprises a plurality of second image sensing elements arranged along the second direction. 4. The detecting device according to claim 1, wherein the moving flat 17 1375057 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . The detecting device of claim 2, wherein the distance between the light sensing elements is between .200 mm and 500 mm. 6. The detecting device of claim i, wherein when the photo sensing element group is located at the preset position, a distance between the photo sensing element group and the rechecking module is approximately equal to the substrate Parallel to the length of a second side of the first direction. 7. The detecting device of claim 6, wherein the distance between the preset position and the appropriate position is equal to the length of the second side minus the gap between the first side and the first side The shortest distance. 8. The detecting device of claim 1, wherein the light sensing elements comprise a first light sensing element and a second light sensing element, wherein the first light sensing element is located at the first Between the second light sensing component and the rechecking module, when the positioning module is located at the preset position or the proper position, the mobile platform senses the first of the substrate at the first light sensing component The side is decelerated, and the moving platform stops when the second light sensing element senses the first side of the substrate. 9. The detecting device of claim 1, wherein the light sensing elements comprise a first light sensing element, a second light sensing element, and a second light sensing element arranged in sequence. And a fourth light sensing component, the first light sensing component is located between the second light sensing component and the rechecking module, and when the positioning module is located at the preset position, the mobile platform is The third light sensing element decelerates when the first side of the substrate is sensed, and the moving platform stops when the fourth light sensing element senses the first side of the substrate, when the positioning mode When the group is in the proper position, the mobile platform decelerates when the first light sensing element senses the first side of the substrate and the moving platform senses the substrate at the second light sensing element The first side stops. 10. The detection of the detection device described in claim 1 of the patent scope 1371057 f. The method of modifying the replacement page on July 23, 101' includes: moving the substrate forward in the first direction by the moving platform Detecting the position of the defect of the substrate by the scanning module; sensing the substrate by the light sensing component group located at the preset position and recording the movement to the group of the measuring component The sensing fruit is decelerated and stopped; according to the position of the defect detected by the scanning module, the light sensing element group moves to the appropriate position in the direction of the retrieving, and borrows Moving the substrate backward by the movement to remove the measurement range of the field detecting component group; moving the substrate forward in the first direction by the moving platform; by using the light sensing component group Sensing the substrate, and causing the mobile platform to decelerate and stop according to the photo sensing element__, the bribe board is located within the detection range of the rechecking module; and moving the module according to the position of the defect An image sensing element retests the defect on the substrate. The method of claim 10, wherein when the light sensing component is recorded in the position, the distance between the light component group and the recheck module is about the substrate The method of detecting the second aspect of the first aspect of the first aspect of the invention, wherein the distance between the predetermined position and the appropriate position is equal to the second side; The shortest distance between the first side. Further, the method of detecting the method according to claim 10, wherein the moving platform is decelerated and stopped according to the sensing result of the light sensing element group is included in the light sensing element group When the one of the light sensing elements senses the first side of the substrate, the moving platform is decelerated; and ~ ^ 19 1375057, 101 years 7 a 23 modified replacement page when the light sensing component group When the light sensing elements have the first side of the substrate, the moving platform stops. 5λ 1-4. The detection method of claim 13, wherein the sensing element comprises an H sensing element and a second light sensing element, the light sensing element (four), the second light Between the sensing component and the re-inspection module, when the volume module is located at the position of the closed position, the movement is flat, and the measuring component senses the first side of the substrate and decelerates and shifts twice. = two stops when the second light element senses the first side of the substrate. ° 15. The detection method according to item 13 of the f-profit range, wherein the sensing element comprises a first light sensation arranged in sequence;; the first component is located in the present-first "^ first sensing 70" The first light sensing. = = : 'When the mobile platform is in the position of the third light and the fourth light sensing component, the moving flat Δ _ ^ is decelerated when the positioning module is located at the appropriate side And: shifting the sense of the element _ the first side of the first plate of the substrate stops the second light sensing element from sensing the base 20