1374258 六、發明說明： 【發明所屈之技術領域】 [麵]本發明係關於一種光學監控設備之承載裝置。 【先前技術】 [0002]光學鍵膜製程中通常使用間接監控法監控所鍍膜層之厚 度，即於鍍膜製程中，提供一監控片，其可為玻璃片或 石英元件，將該監控片置於與待鑛工件相同之鐘膜環境 中，藉由測試該監控片之鑛層厚度以確定該待鍍工件之 鑛層厚度。 剛f知技術中，承載該監控片之機構通常為單盤多片式或 早盤單片式。單盤多片式承載裝置即採用單個承裁基盤 ’基盤上容置有多片監控片；單盤單片式承誠置即採 用早個承載基盤，基盤上容置單個監控片，該監控片上 設有多個監控點。但採用單盤多片式或單盤單片式承載 裝置之光學監控系統中，於工件所需鍵膜層數較多或骐 層厚度精確度要求較高時，所需監控片數較多，且每一 膜層鑛製完成後需更換監控片’因此使得監控片更換次 數多，不利於生產工藝的便利性及連續性。 【發明内容】 國冑於以上内容’有必要提供一種減少監控片更換次數之 光學監控設備之承栽裝置。 種光學監控設備之承«置，其包括1374258 VI. Description of the Invention: [Technical Field of the Invention] [Face] The present invention relates to a carrier device for an optical monitoring device. [Prior Art] [0002] The thickness of the coated layer is usually monitored by an indirect monitoring method in the optical bonding film process, that is, in the coating process, a monitoring sheet is provided, which may be a glass piece or a quartz element, and the monitoring piece is placed In the same bell film environment as the workpiece to be mined, the thickness of the ore layer of the workpiece to be plated is determined by testing the thickness of the ore layer of the monitor piece. In the technology, the mechanism for carrying the monitoring chip is usually a single-disc multi-chip or early-disc single-chip. The single-disc multi-chip carrier device adopts a single-receiving base plate. The base plate houses a plurality of monitoring pieces. The single-disc single-chip bearing device adopts an early carrier base plate, and the base plate houses a single monitoring piece. There are multiple monitoring points. However, in an optical monitoring system using a single-disc multi-chip or single-disc single-chip carrier, when the number of key layers required for the workpiece is large or the thickness of the layer is required to be high, the number of monitoring pieces required is large. Moreover, the monitoring piece needs to be replaced after each film layer is finished. Therefore, the number of times of the monitoring piece is changed, which is not conducive to the convenience and continuity of the production process. SUMMARY OF THE INVENTION In the above content, it is necessary to provide a planting device for an optical monitoring device that reduces the number of times of monitoring piece replacement. Optical monitoring equipment
LUUUOJ -^ ^ ^ 穴匕彷.一囡得支架， 複數個承載基座，該承載基絲咖敎架連接，且可 相對於該固持支架旋轉；一第—驅動裝置及一第二驅動 裝置；該第-驅動裝置用於軸該㈣支架 單編號_1 第3頁/共Η頁 第 1013149745-0 1374258 101年04月20日梭正春換頁 二驅動裝置用於驅動該承載基座旋轉。 [0006] 相較習知之技術’所述光學監控設備之承載裝置採用複 數個承載基座以容置監控片，且以驅動機構控制所述承 載基座定位及監控點選取；所述光學監控設備之承載裝 置可容置之監控片大大增加，使得於鍍膜製程中監控片 更換次數減少’以提昇生產工藝的便利性及連續性，且 可於鍍膜製程中同時使用多個監控點從而提昇監控之精 確度》 [實施方式】 ’ [0007] 請參照第一圖及第二圖所示，本發明較佳實施方式所述 之光學監控設備之承载裝置10包括一固持支架1、複數個 承載基座3、一第一驅動裝置4及一第二驅動裝置5。 [0008] 固持支架1包括一軸座11及沿軸座11之邊緣呈輻射狀伸出 之複數個支臂丨2。軸座11包括一輪齒部11 2及一轴體部 114，該輪齒部112外緣具有齒紋。該輪齒部112及軸體 部114以同軸之方式固定連接，其可為一體成型體，使得 _ 輪齒部112及轴體部114可繞軸體部114之軸心作一體之 轉動。該軸座11還具有一貫穿輪齒部11 2及軸體部114中 心之轴孔。支臂12一端固接於軸體部114邊緣，另一端呈 輻射狀伸出》 [0009] 承載基座3包括基盤31、旋轉軸33及軸承元件35。基盤 31為圓形盤體’其周緣具有齒紋。旋轉軸33—端固定於 基盤31中心，另一端藉由軸承元件35固接於支臂12從軸 座11伸出之-端’使得基盤31可繞旋轉軸33之軸心自轉 。此外，基盤31上還開設有複數個容置孔（圖未示）以LUUUOJ - ^ ^ ^ 匕 匕 . 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 囡 支架 支架 支架 支架 支架 支架 支架 支架 支架 支架 支架 LU LU LU LU LU LU LU LU LU LU LU LU LU LU LU LU LU LU The first drive unit is used for the shaft. The (four) bracket single number _1 page 3 / total page number 1013149745-0 1374258 April 20, 2011 Shuttle Springs page 2 drive device for driving the base of the base. [0006] Compared with the prior art, the carrying device of the optical monitoring device adopts a plurality of carrier bases for accommodating the monitoring piece, and controls the positioning of the carrier base and the selection of monitoring points by a driving mechanism; the optical monitoring device The monitoring piece that can be accommodated by the carrying device is greatly increased, so that the number of times of monitoring piece replacement in the coating process is reduced to improve the convenience and continuity of the production process, and multiple monitoring points can be simultaneously used in the coating process to enhance monitoring. Accuracy [Embodiment] [0007] Referring to the first and second figures, the carrying device 10 of the optical monitoring device according to the preferred embodiment of the present invention includes a holding bracket 1 and a plurality of bearing bases. 3. A first driving device 4 and a second driving device 5. The holding bracket 1 includes a shaft seat 11 and a plurality of arms 2 projecting radially along the edge of the shaft seat 11. The shaft seat 11 includes a gear tooth portion 11 2 and a shaft body portion 114, and the outer edge of the gear tooth portion 112 has a tooth pattern. The gear portion 112 and the shaft portion 114 are fixedly coupled coaxially, and may be an integrally formed body such that the tooth portion 112 and the shaft portion 114 are integrally rotatable about the axis of the shaft portion 114. The shaft seat 11 also has a shaft hole extending through the tooth portion 11 2 and the center of the shaft portion 114. One end of the arm 12 is fixed to the edge of the shaft portion 114, and the other end is radially extended. [0009] The carrier base 3 includes a base plate 31, a rotating shaft 33, and a bearing member 35. The base plate 31 is a circular disk body' having a tooth edge on its circumference. The end of the rotating shaft 33 is fixed to the center of the base plate 31, and the other end is fixed to the end end of the arm 12 extending from the shaft base 11 by the bearing member 35 so that the base plate 31 can rotate about the axis of the rotating shaft 33. In addition, a plurality of receiving holes (not shown) are further disposed on the base plate 31 to
a "S / 4^- 14 W 〇941425〇f 單編號 A0101 第 4 M 、 1013149745-0 1374258 101年.04月20日核正替換頁 容置監控片6。 [0010] 第一驅動裝置4為馬達驅動機構，其包括一第一馬達41及 變速齒輪43。第一馬達41具有一傳動軸42，傳動軸42連 接於變速齒輪43軸心。變速齒輪43與固持支架1之輪齒部 112嚙合。 [0011] 第二驅動裝置5包括一第二馬達51、一傳動齒盤52及軸芯 53。其中，傳動齒盤52為一圓形盤體，其外緣具有齒紋 ，傳動齒盤52置於複數個基盤31之間，且使得傳動齒盤 ® 52與複數個基盤31相嚙合。軸芯53之一端固連於傳動齒 盤52之中心，其與傳動齒盤52亦可為一體成型體，使得 傳動齒盤52及軸芯53可繞軸芯53之軸心作一體之轉動。 軸芯53之另一端貫穿於軸體部114中心之軸孔後，連接於 第二馬達51之轉軸，且使得軸芯53可相對於轴體部114旋 轉。 [0012] 所述之光學監控設備之承載裝置10作動過程說明如下： φ 開啟第一馬達41，其輸出動力使變速齒輪43旋轉，變速 齒輪43藉由其與輪齒部112之嚙合帶動軸座11及支臂12 繞軸座11之軸心旋轉，進而帶動承載基座3繞轴座11作公 轉，基盤31隨之繞軸座11作公轉。因此，可藉由對第一 馬達41之控制而將複數個基盤31之一者調整至適當位置 。開啟第二馬達51時，其驅動傳動齒盤52旋轉，傳動齒 盤52藉由其與基盤31之嚙合而帶動基盤31繞其軸心自轉 ，從而使得基盤31上容置監控片6容置孔（圖未示）調整 至適當位置。 0941425,單編號 A0101 第5頁/共14頁 1013149745-0 1374258 101年04月20日修正替換頁 [0013] 所述之光學監控設備之承載裝置10適用於工件表面鍍覆 多層薄膜之製程，其應用示例如第三圖所示，承載裝置 10固設於一鍍膜設備中，該鍍膜設備包括一鍍膜室71、 一工件承載置具72、鍍膜源73，該鍍膜設備還包括由光 源81、監控遮板82、承載裝置10、光偵測器83、透明視 窗84構成之光學監控設備。 [0014] 請同時參照第一圖及第三圖，工件承載置具72及承載裝 置10相對於鍍膜源73設置於鍍膜室71内，工件9容置於工 件承載置具72上。承載裝置10之基盤31上容置有複數個 監控片6，承載裝置10可以設置於多個工件承載置具72中 心，亦可設置於工件承載置具72周邊，且使得承載裝置 10之監控片6與鍍膜源73之相對位置近似於工件承載置具 72與鍍膜源73之相對位置。監控遮板82為一薄板，其上 設有一開口821，該開口821之尺寸與監控片6之尺寸近似 。監控遮板82設於承載裝置10與鍍膜源73之間，當複數 監控片6中之一者與開口 821對準時，監控遮板82使得鍍 膜粒子恰可藉由開口821到達該監控片6，且同時使得承 載裝置10之其它部分免受鍍膜粒子污染。 [0015] 鍍膜時，鍍膜源73之鍍膜粒子會鍍覆於工件9表面，同時 亦可透過開口 821鍍覆於承載裝置10之監控片6表面。光 源81之光線可經由開口 821到達承載裝置10之監控片6表 面而一部分發生反射，經過透明視窗84後由光偵測器83 接收，藉由光偵測器83所偵測之監控片6之反射率差異變 化，可監測監控片6之膜厚，從而間接監測工件9表面之 膜厚。 09414250#單编號 A0101 第6頁/共14頁 1013149745-0 1374258 101年.04月20日修正替換頁 [0016] 可以理解地，光源81之光線到達監控片6表面時亦可發生 透射，因此亦可將光偵測器83置於光線透射光路中，以 偵測監控片6之透射率差異變化，從而監測監控片6之膜 厚，以此間接監測工件9表面之膜厚。 [0017] 承載裝置10工作時，開啟第一馬達41，其輸出動力使變 速齒輪43旋轉，變速齒輪43藉由其與輪齒部112之嚙合帶 動軸座11及支臂12繞軸座11之軸心旋轉，進而帶動承載 基座3繞軸座11作公轉，基盤31隨之繞軸座11作公轉。因 • 此，藉由對第一馬達41之控制將複數個基盤31之一者調 整至適當位置，關閉第一馬達41，使該基盤31為測試基 盤。 [0018] 開啟第二馬達51時，其驅動傳動齒盤52旋轉，傳動齒盤 52藉由其與基盤31之嚙合而帶動基盤31繞其軸心自轉， 使得基盤31上之一個監控片6對準開口 821，關閉第二馬 達51，從而使該監控片6作為測試目標。 ^ [0019] 當一個鍍層完成後，再次開啟第二馬達51調控基盤31自 轉，使得下一個監控片6對準開口 821而作為測試目標； 當該基盤31之監控片6用盡後，再次開啟第一馬達41調控 承載基座3繞軸座11公轉，基盤31相應地亦繞軸座11公轉 ，從而可選取下一個基盤31作為測試基盤。 [0020] 可以理解地，監控遮板82上之開口 821亦可為複數個，每 個開口821可對應一個監控片6，從而使得所述之光學監 控設備之承載裝置10亦可同時選取多個監控片6作為測試 目標。 0941«#單編號 A〇101 第7頁/共14頁 1013149745-0 1374258 101年04月20日梭正替換頁 [0021] 因此，本發明所述之光學監控設備之承載裝置10於多層 鍍膜製程中或膜厚要求較為精確時，不需要申止後續製 程以更換監控片，其可藉由承載基座3之公轉及自轉而選 取監控片6，從而可達到連續生產及測試可靠度高之功效a "S / 4^- 14 W 〇941425〇f Single No. A0101 No. 4 M, 1013149745-0 1374258 101. April 20th Nuclear Replacement Page Contains the monitor 6. [0010] The first driving device 4 is a motor driving mechanism including a first motor 41 and a shifting gear 43. The first motor 41 has a drive shaft 42 that is coupled to the shaft of the shift gear 43. The shift gear 43 meshes with the tooth portion 112 of the holding bracket 1. [0011] The second driving device 5 includes a second motor 51, a transmission toothed disc 52, and a shaft core 53. Wherein, the drive toothed disc 52 is a circular disc body having a tooth profile on the outer edge thereof, and the drive toothed disc 52 is interposed between the plurality of base discs 31, and the drive cutter discs 52 are engaged with the plurality of base discs 31. One end of the shaft core 53 is fixed to the center of the transmission gear 52, and the transmission toothed disc 52 can also be an integrally formed body, so that the transmission toothed disc 52 and the shaft core 53 can be integrally rotated about the axis of the shaft core 53. The other end of the shaft core 53 is inserted through the shaft hole at the center of the shaft portion 114, and is coupled to the rotating shaft of the second motor 51, and the shaft core 53 is rotatable relative to the shaft portion 114. [0012] The operation process of the carrying device 10 of the optical monitoring device is as follows: φ turns on the first motor 41, and the output power thereof rotates the shift gear 43. The shift gear 43 drives the shaft seat by meshing with the gear tooth portion 112. 11 and the arm 12 rotates around the axis of the shaft seat 11, thereby driving the bearing base 3 to revolve around the shaft seat 11, and the base plate 31 revolves around the shaft seat 11. Therefore, one of the plurality of base plates 31 can be adjusted to an appropriate position by the control of the first motor 41. When the second motor 51 is turned on, the drive toothed disc 52 rotates, and the drive toothed disc 52 drives the base plate 31 to rotate around its axis by the engagement with the base plate 31, so that the base plate 31 accommodates the monitoring piece 6 receiving hole. (not shown) Adjust to the appropriate position. 0941425, single number A0101, page 5, total 14 pages, 1013149745-0 1374258, April 20, 2011, revised replacement page [0013] The carrier device 10 of the optical monitoring device described above is suitable for the process of plating a multilayer film on a workpiece surface, Application Example As shown in the third figure, the carrying device 10 is fixed in a coating device. The coating device includes a coating chamber 71, a workpiece carrying device 72, and a coating source 73. The coating device further includes a light source 81, and a monitoring device. The optical monitoring device is composed of a shutter 82, a carrying device 10, a photodetector 83, and a transparent window 84. [0014] Referring to both the first and third figures, the workpiece carrying device 72 and the carrying device 10 are disposed in the coating chamber 71 with respect to the coating source 73, and the workpiece 9 is received on the workpiece carrying device 72. The base plate 31 of the carrying device 10 houses a plurality of monitoring pieces 6 . The carrying device 10 can be disposed at the center of the plurality of workpiece carrying devices 72 , or can be disposed around the workpiece carrying device 72 and the monitoring device of the carrying device 10 . The relative position of 6 to the coating source 73 approximates the relative position of the workpiece carrying device 72 and the coating source 73. The monitoring shutter 82 is a thin plate having an opening 821 which is approximately the same size as the monitoring piece 6. The monitoring shutter 82 is disposed between the carrying device 10 and the coating source 73. When one of the plurality of monitoring sheets 6 is aligned with the opening 821, the monitoring shutter 82 allows the coated particles to reach the monitoring sheet 6 through the opening 821. At the same time, other parts of the carrier device 10 are protected from contamination by the coating particles. [0015] When coating, the coated particles of the coating source 73 are plated on the surface of the workpiece 9, and may also be plated on the surface of the monitoring sheet 6 of the carrier device 10 through the opening 821. The light of the light source 81 can reach the surface of the monitoring piece 6 of the carrying device 10 through the opening 821 and a part of the light is reflected. After passing through the transparent window 84, the light is received by the light detecting device 83, and the monitoring piece 6 detected by the light detecting device 83 The difference in reflectance changes, and the film thickness of the monitor sheet 6 can be monitored to indirectly monitor the film thickness of the surface of the workpiece 9. 09414250#单号A0101 Page 6/14 pages 1013149745-0 1374258 101. April 20th Revision Replacement Page [0016] It can be understood that the light of the light source 81 can also be transmitted when it reaches the surface of the monitor sheet 6, so The photodetector 83 can also be placed in the light transmission path to detect the change in the transmittance difference of the monitor sheet 6, thereby monitoring the film thickness of the monitor sheet 6, thereby indirectly monitoring the film thickness of the surface of the workpiece 9. [0017] When the carrying device 10 is in operation, the first motor 41 is turned on, and the output power thereof rotates the shifting gear 43. The shifting gear 43 drives the shaft base 11 and the arm 12 around the shaft seat 11 by meshing with the gear tooth portion 112. The shaft rotates, which in turn drives the carrier base 3 to revolve around the axle seat 11, and the base plate 31 revolves around the axle seat 11. Since the one of the plurality of bases 31 is adjusted to an appropriate position by the control of the first motor 41, the first motor 41 is turned off to make the base 31 a test substrate. When the second motor 51 is turned on, it drives the drive toothed disc 52 to rotate. The drive toothed disc 52 drives the base plate 31 to rotate about its axis by its engagement with the base plate 31, so that a pair of monitoring pieces 6 on the base plate 31 The quasi-opening 821 closes the second motor 51 so that the monitor piece 6 serves as a test target. [0019] When one plating is completed, the second motor 51 is turned on again to regulate the rotation of the base plate 31, so that the next monitoring piece 6 is aligned with the opening 821 as a test target; when the monitoring piece 6 of the base plate 31 is used up, it is turned on again. The first motor 41 regulates the carrier base 3 to revolve around the shaft base 11, and the base plate 31 also revolves around the shaft base 11, so that the next base plate 31 can be selected as the test base. [0020] It can be understood that the opening 821 of the monitoring shutter 82 can also be plural, and each opening 821 can correspond to one monitoring piece 6, so that the carrying device 10 of the optical monitoring device can also select multiple at the same time. The monitor 6 is used as a test target. 0941«#单编号A〇101 Page 7/14 pages 1013149745-0 1374258 April 20th, 2011 Shuttle replacement page [0021] Therefore, the carrier 10 of the optical monitoring device of the present invention is in a multi-layer coating process When the medium or film thickness requirement is relatively accurate, it is not necessary to apply a subsequent process to replace the monitoring piece, and the monitoring piece 6 can be selected by the revolution and rotation of the carrying base 3, thereby achieving the high reliability of continuous production and testing.
[0022] 综上所述，本發明符合發明專利要件，爰依法提出專利 申請。惟，以上所述者僅為本發明之較佳實施方式，舉 凡熟悉本案技藝之人士，在援依本案發明精神所作之等 效修飾或變化，皆應包含於以下之申請專利範圍内。 【圖式簡單說明】 [0023] 第一圖係本發明較佳實施方式之光學監控設備之承載裝 置之結構示意圖； [0024] 第二圖係第一圖於沿Π - Π線之剖面結構示意圖； [0025] 第三圖係本發明較佳實施方式之光學監控設備之承載裝 置之應用示例圖。 【主要元件符號說明】 [0026] 固持支架：1 [0027] 第二驅動裝置：5 [0028] 軸座：11 [0029] 第二馬達：51 [0030] 輪齒部：112 [0031] 傳動齒盤：52 09414250^^^51 A〇101 第8頁/共14頁 1013149745-0 1374258 101年.04屈20日修正替换頁 [0032] 軸體部：114 [0033] 轴忠· 5 3 • [0034] 支臂：12 ' [0035] 監控片：6 [0036] 承載基座：3 [0037] 工件承載置具：72 • [0038] 鍍膜室：71 [0039] 鍍膜源：73 [0040] 基盤：31 [0041] 光源：81 [0042] 旋轉抽：33 [0043] 監控遮板：82 、 • [0044] 軸承元件：35 [0045] 開口 ： 821 [0046] 第一驅動裝置：4 [0047] 光偵測器：83 [0048] 第一馬達：41 [0049] 透明視窗：84 [0050] 傳動軸：42 Q9414250#單编號 A〇101 第9頁/共14頁 1013149745-0 1374258 [0051] [0052] [0053] 工件：9 變速齒輪：43 承載裝置：10 _4250#單編號 A〇101 第10頁/共14頁 101年04月20日修正替換百[0022] In summary, the present invention complies with the requirements of the invention patent, and submits a patent application according to law. The above-mentioned embodiments are only the preferred embodiments of the present invention, and those skilled in the art will be able to incorporate the equivalent modifications and variations of the invention in the spirit of the invention. BRIEF DESCRIPTION OF THE DRAWINGS [0023] The first figure is a schematic structural view of a carrying device of an optical monitoring device according to a preferred embodiment of the present invention; [0024] The second drawing is a schematic view of a cross-sectional structure of the first figure along the Π-Π line [0025] The third figure is an application example diagram of a carrier device of an optical monitoring device according to a preferred embodiment of the present invention. [Main component symbol description] [0026] Holding bracket: 1 [0027] Second driving device: 5 [0028] Shaft seat: 11 [0029] Second motor: 51 [0030] Gear tooth: 112 [0031] Gear teeth Disk: 52 09414250^^^51 A〇101 Page 8/14 pages 1013149745-0 1374258 101 years. 04 bend 20 days correction replacement page [0032] Axis body: 114 [0033] Axis Zhong · 5 3 • [ 0034] Arm: 12 ' [0035] Monitor: 6 [0036] Carrier base: 3 [0037] Work load bearing: 72 • [0038] Coating chamber: 71 [0039] Coating source: 73 [0040] Base plate : 31 [0041] Light source: 81 [0042] Rotary pumping: 33 [0043] Monitoring shutter: 82, • [0044] Bearing component: 35 [0045] Opening: 821 [0046] First drive: 4 [0047] Photodetector: 83 [0048] First motor: 41 [0049] Transparent window: 84 [0050] Transmission shaft: 42 Q9414250#单号A〇101 Page 9/14 pages 1013149745-0 1374258 [0051] [0053] Workpiece: 9 shifting gear: 43 carrying device: 10 _4250# single number A 〇 101 page 10 / total 14 pages 101 April 20 correction replacement hundred
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